JP2022090891A5 - - Google Patents

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Publication number
JP2022090891A5
JP2022090891A5 JP2020203466A JP2020203466A JP2022090891A5 JP 2022090891 A5 JP2022090891 A5 JP 2022090891A5 JP 2020203466 A JP2020203466 A JP 2020203466A JP 2020203466 A JP2020203466 A JP 2020203466A JP 2022090891 A5 JP2022090891 A5 JP 2022090891A5
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JP
Japan
Prior art keywords
flow path
valve
refrigerant
light source
refrigerator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2020203466A
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English (en)
Japanese (ja)
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JP2022090891A (ja
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Publication date
Application filed filed Critical
Priority to JP2020203466A priority Critical patent/JP2022090891A/ja
Priority claimed from JP2020203466A external-priority patent/JP2022090891A/ja
Priority to TW110142869A priority patent/TWI851941B/zh
Priority to KR1020210168030A priority patent/KR20220081288A/ko
Priority to CN202111463603.1A priority patent/CN114624962A/zh
Priority to US17/542,195 priority patent/US11815253B2/en
Publication of JP2022090891A publication Critical patent/JP2022090891A/ja
Publication of JP2022090891A5 publication Critical patent/JP2022090891A5/ja
Pending legal-status Critical Current

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JP2020203466A 2020-12-08 2020-12-08 光源装置、冷却方法、及び物品の製造方法 Pending JP2022090891A (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2020203466A JP2022090891A (ja) 2020-12-08 2020-12-08 光源装置、冷却方法、及び物品の製造方法
TW110142869A TWI851941B (zh) 2020-12-08 2021-11-18 光源裝置，冷卻方法，及產品的製造方法
KR1020210168030A KR20220081288A (ko) 2020-12-08 2021-11-30 광원 디바이스, 냉각 방법 및 물품의 제조 방법
CN202111463603.1A CN114624962A (zh) 2020-12-08 2021-12-03 光源设备、冷却方法和产品制造方法
US17/542,195 US11815253B2 (en) 2020-12-08 2021-12-03 Light source device, cooling method, and manufacturing method for product

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2020203466A JP2022090891A (ja) 2020-12-08 2020-12-08 光源装置、冷却方法、及び物品の製造方法

Publications (2)

Publication Number Publication Date
JP2022090891A JP2022090891A (ja) 2022-06-20
JP2022090891A5 true JP2022090891A5 (https=) 2023-11-17

Family

ID=81847891

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2020203466A Pending JP2022090891A (ja) 2020-12-08 2020-12-08 光源装置、冷却方法、及び物品の製造方法

Country Status (5)

Country Link
US (1) US11815253B2 (https=)
JP (1) JP2022090891A (https=)
KR (1) KR20220081288A (https=)
CN (1) CN114624962A (https=)
TW (1) TWI851941B (https=)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2022090891A (ja) * 2020-12-08 2022-06-20 キヤノン株式会社 光源装置、冷却方法、及び物品の製造方法
JPWO2024038538A1 (https=) * 2022-08-18 2024-02-22
JP7520278B1 (ja) * 2023-03-02 2024-07-22 三菱電機株式会社 光源システム
KR102812386B1 (ko) * 2023-07-27 2025-05-26 주식회사 타임링크 발광장치
JP2026046013A (ja) * 2024-08-30 2026-03-13 キヤノン株式会社 光源装置、露光装置、および、物品製造方法

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011165509A (ja) 2010-02-10 2011-08-25 Moritex Corp Ｌｅｄ照明装置
CN102782581B (zh) * 2010-02-23 2015-05-20 Asml荷兰有限公司 光刻设备和器件制造方法
JP3166157U (ja) * 2010-10-22 2011-02-24 楊　泰和 半導体応用装置の温度均一化システム
NL2019411A (en) * 2016-09-02 2018-03-06 Asml Netherlands Bv Lithographic Apparatus
EP3301999B1 (en) * 2016-09-30 2020-06-17 HP Scitex Ltd Light emitting diode heatsink
CN206594446U (zh) * 2016-10-09 2017-10-27 激光影像系统有限责任公司 扫描系统
JP6989557B2 (ja) * 2019-04-15 2022-01-05 ファナック株式会社 レーザ装置
JP2022090891A (ja) * 2020-12-08 2022-06-20 キヤノン株式会社 光源装置、冷却方法、及び物品の製造方法

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