JP2022047488A - Straight wire bonding of silicon die - Google Patents

Straight wire bonding of silicon die Download PDF

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Publication number
JP2022047488A
JP2022047488A JP2021083945A JP2021083945A JP2022047488A JP 2022047488 A JP2022047488 A JP 2022047488A JP 2021083945 A JP2021083945 A JP 2021083945A JP 2021083945 A JP2021083945 A JP 2021083945A JP 2022047488 A JP2022047488 A JP 2022047488A
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Prior art keywords
die
solder
silicon
connection pads
pads
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JP2021083945A
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JP7227304B2 (en
Inventor
クリバカラン・ペリヤナン
Periyannan Kirubakaran
ダニエル・リネン
Linnen Daniel
ジャヤバル・パチャムチュ
Pachamuthu Jayavel
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Western Digital Technologies Inc
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Western Digital Technologies Inc
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Abstract

To provide a method including stacking a number of silicon dice such that one or more edges of the dice are in vertical alignment.SOLUTION: A silicon die 200 has one or more edges 204 including a number of connection pads 202a, 202b. A method includes positioning a connecting wire on a substantially perpendicular axis to the one or more edges 204. The connecting wire includes a number of solder blocks formed thereon. The solder blocks are spaced at intervals associated with a distance between a first set of aligned connection pads on the die 200. The connecting wire is positioned such that the solder blocks are in contact with the first set of aligned connection pads 202a, 202b. The method further includes applying heat to cause the solder blocks to reflow and physically and electrically couple the connecting wire to the connection pads 202a, 202b by the solder blocks.SELECTED DRAWING: Figure 2

Description

本出願は、2020年9月11日に出願した米国仮特許出願第63/077、069号の優先権および利益を主張し、それらの全ての内容は援用により本出願に取り込まれる。 This application claims the priority and interests of US Provisional Patent Application Nos. 63/077, 069 filed on September 11, 2020, all of which are incorporated herein by reference.

本出願は、一般に、シリコンダイ間の電気的接続の提供に関し、特に、垂直エッジに沿ったシリコンダイの電気的接続に関する。 The present application generally relates to providing electrical connections between silicon dies, and in particular to electrical connections of silicon dies along vertical edges.

いくつかのシリコンダイの構造において、接続パッドはダイの上部または底部に設けられる。この構造は、トランジスタを形成するための貴重なスペースを占有し、ダイを積層するときに、ダイ間を接続するのに貴重なスペースを占有する。また、ダイを階段状にずらして設置する必要があるため、完成した集積デバイスまたはパッケージ化された集積デバイスを形成するのにより多くのスペースが必要となる。 In some silicon die structures, the connection pad is provided at the top or bottom of the die. This structure occupies valuable space for forming transistors and occupies valuable space for connecting dies when stacking dies. Also, because the dies need to be staggered and installed, more space is required to form the completed or packaged integrated device.

本明細書において記載されるプロセス、デバイス、およびシステムは、ダイの垂直エッジに沿ってシリコンダイを電気的に接続し、必要な横方向のスペース要件を低減することについて説明する。具体的には、接続パッドをダイの垂直エッジに設置することにより、ダイをずらして上部または底部に設けられる接続パッドを介して接続を形成することなく、ダイを上下に積層することができる。代わりに、上下に整列した、エッジに取り付けられる接続パッドに沿って線形接続を形成することにより、シリコンダイを完全に上下に積層することができる。これにより、シリコンダイの横方向のフットプリントが減少し、全体のフォームファクタを小さくすることが可能となる。さらに、トランジスタは、通常、垂直エッジではなく、シリコンダイの上部および/または底部で形成される。接続パッドをエッジに設置することにより、シリコンダイ上の今まで未使用のスペースを相互接続に使用し、シリコンダイの上部および/または底部にトランジスタを形成するためのスペースを解放する。 The processes, devices, and systems described herein describe electrically connecting silicon dies along the vertical edges of the dies to reduce the required lateral space requirements. Specifically, by installing the connection pads on the vertical edge of the die, the dies can be stacked one above the other without shifting the die and forming a connection via a connection pad provided at the top or bottom. Instead, the silicon dies can be fully stacked vertically by forming a linear connection along the edge-mounted connection pads that are aligned vertically. This reduces the lateral footprint of the silicon die and makes it possible to reduce the overall form factor. In addition, transistors are typically formed at the top and / or bottom of the silicon die rather than at the vertical edges. By installing the connection pad on the edge, previously unused space on the silicon die is used for interconnection, freeing up space for forming transistors at the top and / or bottom of the silicon die.

本明細書において記載される方法およびシステムは、エッジに形成される接続パッドによるシリコンダイ間の相互接続、特に上下に積層したシリコンダイのための新規で有利な接続技術を提供する。 The methods and systems described herein provide interconnection between silicon dies with connection pads formed at the edges, particularly novel and advantageous connection techniques for top and bottom laminated silicon dies.

また、本開示は、基板と、2つ以上のシリコンダイとを含む装置を提供する。第1のダイは基板上に設けられ、第2のダイは第1のダイ上に設置または積層される。シリコンダイは、基板に平行な上側平面と、上側平面に平行であるとともに上側平面から第1の距離を空けて配置された下側平面と、上側平面と下側平面との間に設けられ、かつそれらに垂直な第1のエッジ部と、第1のエッジ部に設けられ、かつ上下に整列した第1のセットの接続パッドとを含む。本装置は、1つ以上の接続パッドに結合されるように構成された導電素子と、いくつかのはんだブロックとをさらに含む。はんだブロックは、導電素子に結合され、第1のセットの接続パッド間の距離に関連付けられる間隔を置いて配置される。いくつかの実施形態において、はんだブロックは、第1のエッジ部の幅とほぼ同じ幅を有し、第1の溝内のシリコンダイのエッジを受け入れるように構成された第1の溝を含む。 The present disclosure also provides an apparatus including a substrate and two or more silicon dies. The first die is provided on the substrate and the second die is installed or laminated on the first die. The silicon die is provided between the upper plane parallel to the substrate, the lower plane parallel to the upper plane and arranged at a first distance from the upper plane, and between the upper plane and the lower plane. It also includes a first edge portion perpendicular to them and a first set of connection pads provided on the first edge portion and aligned vertically. The device further includes a conductive element configured to be coupled to one or more connection pads and several solder blocks. The solder blocks are coupled to the conductive element and placed at intervals associated with the distance between the first set of connection pads. In some embodiments, the solder block has a width approximately equal to the width of the first edge portion and includes a first groove configured to accommodate the edge of the silicon die within the first groove.

本開示は、シリコンダイの1つ以上のエッジが上下に整列するように、いくつかのシリコンダイを積層することを含む方法を提供し、ここで1つ以上のエッジは、いくつかの接続パッドを含む。また、この方法は、略直線状に形成される導体を1つ以上のエッジに実質的に垂直な軸上に設置することを含み、ここで直線状導体は1つ以上の接続パッドと接触する。さらに、この方法は、1つ以上の接続パッドおよび1つ以上の接続パッドに接触する直線状導体の1つ以上の部分に導電性はんだを塗布することを含む。また、熱を加えてはんだをリフローし、はんだによって直線状導体の1つ以上の部分とそれに接触する1つ以上の接続パッドとを物理的かつ電気的に結合することを含む。 The present disclosure provides a method comprising stacking several silicon dies such that one or more edges of the silicon die are aligned vertically, where one or more edges are several connecting pads. including. The method also involves placing a substantially linear conductor on an axis that is substantially perpendicular to one or more edges, where the linear conductor contacts one or more connecting pads. .. Further, the method comprises applying conductive solder to one or more portions of the connecting pad and one or more portions of the linear conductor that come into contact with the one or more connecting pads. It also involves applying heat to reflow the solder and physically and electrically coupling one or more portions of the linear conductor to one or more connecting pads in contact with the solder.

また、本開示は、いくつかのシリコンダイの1つ以上のエッジが上下に整列するように、いくつかのシリコンダイを積層することを含む方法を提供し、ここで1つ以上のエッジは、いくつかの接続パッドを含む。この方法はまた、接続線を1つ以上のエッジに実質的に垂直な軸上に設置することを含む。接続線には、いくつかのはんだブロックが含まれる。はんだブロックは、シリコンダイ上の第1のセットの整列した接続パッド間の距離に関連付けられる間隔を置いて配置される。接続線は、はんだブロックが第1のセットの整列した接続パッドと接触するように配置される。さらに、この方法は、熱を加えてはんだブロックをリフローして、はんだブロックによって接続線を整列した接続パッドに物理的に結合することを含む。 The present disclosure also provides a method comprising stacking several silicon dies such that one or more edges of the several silicon dies are aligned vertically, wherein the one or more edges are: Includes several connection pads. This method also involves installing connecting wires on an axis that is substantially perpendicular to one or more edges. The connecting wire contains several solder blocks. The solder blocks are placed at intervals associated with the distance between the first set of aligned connection pads on the silicon die. The connecting wires are arranged so that the solder blocks are in contact with the first set of aligned connection pads. Further, this method involves applying heat to reflow the solder block and physically bond the connecting wires to the aligned connection pad by the solder block.

このように、本開示の様々な態様は、少なくともシリコンダイの相互接続およびそれらの設計と構造の技術分野における改善を提供する。本開示は、積層されたダイを接続するために特に有用であるが、当業者ならば、本開示が他の実施形態、例えば、ダイが基板に直交して設置される実施形態に使用され得ることを理解しているであろう。前述の説明は、本開示の様々な態様の一般的な概念を提供することのみを目的としており、本開示の範囲をいかな形でも限定するものではない。 As such, various aspects of the present disclosure provide improvements, at least in the technical field of silicon die interconnection and their design and construction. The present disclosure is particularly useful for connecting laminated dies, but those skilled in the art may appreciate the present disclosure in other embodiments, eg, embodiments in which the dies are installed orthogonally to the substrate. You will understand that. The above description is intended solely to provide general concepts of the various aspects of the present disclosure and is not intended to limit the scope of the present disclosure in any way.

本開示のいくつかの実施形態による、1つ以上のシリコンダイを接続する既知の方法の斜視図である。FIG. 3 is a perspective view of a known method of connecting one or more silicon dies according to some embodiments of the present disclosure.

図2aは、本開示のいくつかの実施形態による、1つ以上の垂直エッジ接続パッドを有するシリコンダイの斜視図であり、図2bは、本開示のいくつかの実施形態による、図2aのシリコンダイの側面断面図である。FIG. 2a is a perspective view of a silicon die with one or more vertical edge connecting pads according to some embodiments of the present disclosure, and FIG. 2b is a silicon of FIG. 2a according to some embodiments of the present disclosure. It is a side sectional view of a die.

本開示のいくつかの実施形態による、2つ以上のシリコンダイを接続するためのプロセスを示すフローチャートである。It is a flowchart which shows the process for connecting two or more silicon dies by some embodiments of this disclosure.

図4aは、本開示のいくつかの実施形態による、図3に示すプロセスの一部を示すシリコンダイの断面図であり、図4bは、本開示のいくつかの実施形態による、図3に示すプロセスのさらなる部分を示すシリコンダイの断面図である。4a is a cross-sectional view of a silicon die showing a portion of the process shown in FIG. 3 according to some embodiments of the present disclosure, and FIG. 4b is shown in FIG. 3 according to some embodiments of the present disclosure. FIG. 6 is a cross-sectional view of a silicon die showing a further part of the process.

本開示のいくつかの実施形態による、図3に示すプロセスによって電気的に結合された2つのシリコンダイの斜視図である。FIG. 3 is a perspective view of two silicon dies electrically coupled by the process shown in FIG. 3 according to some embodiments of the present disclosure.

本開示のいくつかの実施形態による、はんだブロックの底面図である。It is a bottom view of the solder block according to some embodiments of this disclosure.

本開示のいくつかの実施形態による、複数のシリコンダイを接続してパッケージ化されたICまたは他のパッケージ化されたシリコン装置を形成するプロセスを示すフローチャートである。It is a flowchart which shows the process of connecting a plurality of silicon dies to form a packaged IC or other packaged silicon apparatus according to some embodiments of the present disclosure.

本開示のいくつかの実施形態による、電気的に結合されるように準備された複数のシリコンダイの斜視図である。FIG. 3 is a perspective view of a plurality of silicon dies prepared to be electrically coupled according to some embodiments of the present disclosure.

本開示のいくつかの実施形態による、電気的に結合された複数のシリコンダイの斜視図である。FIG. 3 is a perspective view of a plurality of electrically coupled silicon dies according to some embodiments of the present disclosure.

本開示のいくつかの実施形態による、基板に結合された複数のシリコンダイの斜視図である。FIG. 3 is a perspective view of a plurality of silicon dies coupled to a substrate according to some embodiments of the present disclosure.

本開示のいくつかの実施形態による、基板に結合されたシリコンダイの交互配置である。It is an alternating arrangement of silicon dies coupled to a substrate according to some embodiments of the present disclosure.

以下の説明において、本開示の1つ以上の態様を理解するために、シリコン系ダイの構成、シリコンダイの電気的相互接続方法などの多くの詳細について記述する。これらの具体的な詳細は単なる例示であり、本出願の範囲を限定することを意図するものではないことは、当業者には容易に明らかであろう。以下の説明は、本開示の様々な態様の一般的な概念を提供することのみを目的としており、本開示の範囲をいかなる形でも限定するものではない。 In the following description, in order to understand one or more aspects of the present disclosure, many details such as the configuration of silicon-based dies and the method of electrically interconnecting silicon dies will be described. It will be readily apparent to those skilled in the art that these specific details are merely exemplary and are not intended to limit the scope of this application. The following description is intended solely to provide general concepts of the various aspects of the present disclosure and is not intended to limit the scope of the present disclosure in any way.

図1は、従来のパッケージ化された集積回路(「パッケージ化されたIC」)またはメモリ装置などの他のパッケージ化されたシリコン装置(「パッケージ」)内に1つ以上のシリコンダイ100を接続する方法の斜視図である。図1に示すように、シリコンダイ100は、その上面104に設けられた1つ以上の接続パッド102を含む。後続の各シリコンダイの接続パッド102を露出させるかまたはその利用を可能にするように、シリコンダイ100が互いにずらして配置される。これによって、シリコンダイ100の接続パッド102を接続することが可能となる。シリコンダイのこのずらし配列は、パッケージ内に追加のスペースを必要とするため、パッケージのサイズが大きくなる場合が多い。さらに、積層するダイが多いほど、上部のダイが突き出るため、ダイが中心から外れるように突出し、その結果、ダイが傾いたり、外力を受けて亀裂が生じたり可能性がある。 Figure 1 connects one or more silicon dies 100 within a traditional packaged integrated circuit (“packaged IC”) or other packaged silicon device (“package”) such as a memory device. It is a perspective view of the method of doing. As shown in FIG. 1, the silicon die 100 includes one or more connection pads 102 provided on its top surface 104. The silicon dies 100 are staggered from each other so that the connection pads 102 of each subsequent silicon die are exposed or made available. This makes it possible to connect the connection pad 102 of the silicon die 100. This staggered arrangement of silicon dies requires additional space within the package, which often results in a large package size. Further, the more dies to be stacked, the more the upper die protrudes, so that the die protrudes away from the center, and as a result, the die may be tilted or cracks may occur due to external force.

図2aを参照して、いくつかの実施形態による、垂直エッジ204に設けられた1つ以上の接続パッド202a、202bを有するシリコンダイ200の斜視図を示す。ダイ200は、略平面状の上面206と、上面206と平行であり、かつ上面206から第1の距離を空けて配置された略平面状の底面208とを有する。図示の実施形態において、第1の距離は、ダイ200の幅である。垂直エッジ204は、上面206と底面208の間に設けられ、かつそれらに垂直である。例えば、図1に示すようにシリコンダイ200をずらしたりオフセットしたりすることなく、接続パッド202a、202bを垂直エッジに設置することにより、1つ以上のシリコンダイ200を上下に積層することができる。これにより、集積回路内に複数のシリコンダイ200を積層する場合、スペースを節約することができる。 FIG. 2a shows a perspective view of a silicon die 200 with one or more connecting pads 202a, 202b provided on a vertical edge 204, according to some embodiments. The die 200 has a substantially planar top surface 206 and a substantially planar bottom surface 208 that is parallel to the top surface 206 and is located at a first distance from the top surface 206. In the illustrated embodiment, the first distance is the width of the die 200. The vertical edge 204 is provided between the top surface 206 and the bottom surface 208 and is perpendicular to them. For example, one or more silicon dies 200 can be stacked one above the other by installing the connection pads 202a, 202b on the vertical edge without shifting or offsetting the silicon dies 200 as shown in FIG. .. This saves space when stacking a plurality of silicon dies 200 in an integrated circuit.

図2bは、シリコンダイ200の断面側面図であり、接続パッド202aを示す。図2bに示すように、接続パッド202aは、上面206と底面208と部分的に重なってもよい。しかし、いくつかの実施形態において、接続パッド202aが上面206および/または底面208と重ならない場合がある。例えば、接続パッド202a(および接続パッド202b)は、垂直エッジ204上でのみ露出し、接続パッド202aの残部がシリコンダイ200内に位置してもよい。いくつかの実施形態において、接続パッドは、第1の長さ210が25ミクロンであってもよい。しかし、25ミクロンを超える長さまたは25ミクロン未満の長さもまた考えられる。いくつかの実施形態において、この長さは、シリコンダイ200の垂直エッジ204の幅と同一であってもよい。 FIG. 2b is a cross-sectional side view of the silicon die 200, showing the connection pad 202a. As shown in FIG. 2b, the connection pad 202a may partially overlap the top surface 206 and the bottom surface 208. However, in some embodiments, the connection pad 202a may not overlap the top surface 206 and / or the bottom surface 208. For example, the connection pad 202a (and connection pad 202b) may be exposed only on the vertical edge 204 and the rest of the connection pad 202a may be located within the silicon die 200. In some embodiments, the connection pad may have a first length of 210 of 25 microns. However, lengths greater than 25 microns or less than 25 microns are also possible. In some embodiments, this length may be the same as the width of the vertical edge 204 of the silicon die 200.

図3を参照して、いくつかの実施形態による、2つ以上のシリコンダイを接続するためのプロセス300を示す。プロセスブロック302において、導電性接続線を第1のシリコンダイの第1の接続パッドに設置する。接続線は、銅、アルミニウム、金、パラジウム、インジウム、イリジウム、様々な銀/スズアマルガム、鉛、ならびに二元および/または三元金属合金などの1つ以上の金属または他の導電性材料で構成することができる。一実施形態において、接続線は、銅の酸化を防止するスズなどの金属めっきの銅コアを含む。一実施形態において、接続線は、円形または実質的に円形のものである。しかし、他の例において、接続線は、平形またはリボン形のものであってもよい。いくつかの実施形態において、接続線の直径は、約24μmであってもよい。他の実施形態において、接続線の直径は、約16μm~約50μmの範囲内にあってもよい。さらなる実施形態において、接続線の直径は、16μm未満または50μm超であってもよい。 With reference to FIG. 3, a process 300 for connecting two or more silicon dies, according to some embodiments, is shown. In the process block 302, the conductive connecting wire is installed on the first connecting pad of the first silicon die. Connecting wires consist of one or more metals or other conductive materials such as copper, aluminum, gold, palladium, indium, iridium, various silver / tin amalgams, lead, and binary and / or ternary metal alloys. can do. In one embodiment, the connecting wire comprises a metal-plated copper core such as tin that prevents the oxidation of copper. In one embodiment, the connecting line is circular or substantially circular. However, in other examples, the connecting wire may be flat or ribbon-shaped. In some embodiments, the diameter of the connecting wire may be about 24 μm. In other embodiments, the diameter of the connecting wire may be in the range of about 16 μm to about 50 μm. In a further embodiment, the diameter of the connecting wire may be less than 16 μm or more than 50 μm.

いくつかの実施形態において、図4aは、シリコンダイ404の接続パッド402に設けられる導電性接続線400を示す。図4aに示すように、シリコンダイは、接続線が接続パッドを横切って、重力によってその位置を維持できるように設けられる。しかし、他の実施形態において、様々な他の方法によって接続線を接続パッド上の所定の位置に保持してもよい。 In some embodiments, FIG. 4a shows a conductive connection line 400 provided on the connection pad 402 of the silicon die 404. As shown in Figure 4a, the silicon die is provided so that the connecting wire can cross the connecting pad and maintain its position by gravity. However, in other embodiments, the connecting wire may be held in place on the connecting pad by various other methods.

プロセスブロック304において、接続線400を第1のシリコンダイの第1の接続パッド402に設置した後、第1の接続パッド402および接続線400に液状はんだを塗布する。これは図4bから明らかである。図4bは、第1の接続パッド402に塗布され、接続線400を取り囲んでいる塊状の液状はんだ406を示す。いくつかの実施形態において、はんだは金はんだである。他の実施形態において、はんだは、銀はんだ、パラジウムはんだ、イリジウムはんだ、インジウムはんだ、銀/スズアマルガムはんだ、1つ以上の二元または三元金属合金はんだ、鉛はんだ、または他の適用可能なはんだタイプであってもよい。一般に、はんだを加熱して液体状態に戻した後に接続パッド402に吐出する。 In the process block 304, after installing the connecting wire 400 on the first connecting pad 402 of the first silicon die, liquid solder is applied to the first connecting pad 402 and the connecting wire 400. This is clear from Figure 4b. FIG. 4b shows a lump of liquid solder 406 applied to the first connection pad 402 and surrounding the connection line 400. In some embodiments, the solder is gold solder. In other embodiments, the solder is silver solder, palladium solder, iridium solder, indium solder, silver / tin amalgam solder, one or more binary or ternary metal alloy solders, lead solders, or other applicable solders. It may be a type. Generally, the solder is heated to return it to a liquid state and then discharged to the connection pad 402.

プロセスブロック306において、はんだを塗布した後、はんだ、接続線400、および/または第1の接続パッドに熱を加える。熱は、はんだを溶かすか、リフローする。これによって、はんだによって第1の接続パッドと接続線との間にはんだ接合を形成する。いくつかの実施形態において、第1の接続パッドと接続線との間に形成される適切なはんだ接合を容易にするために、第1の接続パッドおよび/または接続線は、フラックス材料で被覆されてもよい。上記のプロセス300において、はんだを使用して接続線400を第1の接続パッド402に接続することについて説明したが、溶接、ろう付け、レーザー溶接などの他の接続プロセスを使用することもできると考えられる。 After applying the solder in the process block 306, heat is applied to the solder, the connecting wire 400, and / or the first connecting pad. The heat melts or reflows the solder. Thereby, the solder forms a solder joint between the first connection pad and the connection wire. In some embodiments, the first connecting pad and / or the connecting wire is coated with a flux material to facilitate proper solder joining formed between the first connecting pad and the connecting wire. You may. In process 300 above, we described using solder to connect the connection wire 400 to the first connection pad 402, but other connection processes such as welding, brazing, and laser welding can also be used. Conceivable.

プロセス300は、複数のシリコンダイにわたって使用することができる。例えば、図5に示すように、第1のエッジ506上に第1の接続パッド502を有する第1のシリコンダイ500は、第2のシリコンダイ508の第1のエッジ512上に第2の接続パッド510を有する第2のシリコンダイ508と整列される。第1のシリコンダイ500と第2のシリコンダイ508はサイズが同一であり、シリコンダイ500、508の積層を容易にするためにそれらの関連する接続パッド502、510を同一の位置に有することが考えられる。プロセス300に関しては、前述のように、接続線514は、第1の接続パッド502と第2の接続パッド510の両方を横切って設置される。上記と同様に、第1の接続パッド502および第2の接続パッド510が上を向くように設けられ、重力によって接続線514に下向きの力を加えることによって接続線を所定の位置に保持するのに役立つように、シリコンダイ500、508を設置する。続いて、液状はんだを第1の接続パッド502上の第1の塊(または「ブロブ」)516、次に第2の接続パッド510上の第2の塊518に配置する。その後、熱を加えてはんだをリフローすることにより、接続線514と第1の接続パッド502との間のはんだ接合、および接続線514と第2の接続パッド510との間のはんだ接合を容易にする。 Process 300 can be used across multiple silicon dies. For example, as shown in FIG. 5, a first silicon die 500 having a first connection pad 502 on the first edge 506 has a second connection on the first edge 512 of the second silicon die 508. Aligned with a second silicon die 508 with pad 510. The first silicon die 500 and the second silicon die 508 are the same size and may have their associated connection pads 502, 510 in the same position to facilitate stacking of the silicon dies 500, 508. Conceivable. For process 300, as described above, the connection line 514 is installed across both the first connection pad 502 and the second connection pad 510. Similar to the above, the first connection pad 502 and the second connection pad 510 are provided so as to face upward, and the connection line is held in place by applying a downward force to the connection line 514 by gravity. Install silicon dies 500, 508 to help. Subsequently, the liquid solder is placed on the first block (or "blob") 516 on the first connection pad 502 and then on the second block 518 on the second connection pad 510. Then, by applying heat to reflow the solder, solder bonding between the connection wire 514 and the first connection pad 502 and solder bonding between the connection wire 514 and the second connection pad 510 can be easily performed. do.

いくつかの実施形態において、火炎ジェットまたはレーザー加熱などによって、接続パッド(および関連するはんだ塊および接続線)に熱を集中的に加えてもよい。しかし、他の実施形態において、ダイの接続パッドでのはんだの溶融またはリフローを容易にするために、シリコンダイ(例えば、シリコンダイ500、508)に一般的な熱を加える。例えば、シリコンダイをリフロー炉に入れてもよく、拡散炉などによって一般的な熱源にさらしてよい。 In some embodiments, heat may be intensively applied to the connecting pads (and associated solder lumps and connecting wires), such as by flame jets or laser heating. However, in other embodiments, common heat is applied to a silicon die (eg, silicon dies 500, 508) to facilitate melting or reflow of solder in the die connection pads. For example, a silicon die may be placed in a reflow oven or exposed to a general heat source by a diffusion oven or the like.

図6を参照して、いくつかの実施形態による、はんだブロック600の底面図を示す。はんだブロック600は、インジウム、金、銀、パラジウム、イリジウム、鉛、または他の適用可能なはんだタイプなどの様々なはんだ材料で作製することができる。図6に示すように、はんだブロック600は、正方形の形状を有してもよいが、他の形状もまた考えられる。はんだブロック600は、第1のトラフまたは溝602および第2のトラフまたは溝604を含んでいてもよい。第1のトラフ602は、上記のような接続線を収容できるほどの大きさにすることができる。一実施形態において、第1のトラフは、幅が約15ミクロンである。しかし、15ミクロン未満の幅または15ミクロンを超える幅もまた考えられる。第2のトラフ604が上記のような接続パッドの全部または一部を受け取ることを可能にするために、第1のトラフ602は、第2のトラフ604よりもはんだブロック600内でより深く設置される。 FIG. 6 shows a bottom view of the solder block 600 according to some embodiments. The solder block 600 can be made of various solder materials such as indium, gold, silver, palladium, iridium, lead, or other applicable solder types. As shown in FIG. 6, the solder block 600 may have a square shape, but other shapes are also conceivable. The solder block 600 may include a first trough or groove 602 and a second trough or groove 604. The first trough 602 can be large enough to accommodate the above connecting lines. In one embodiment, the first trough is about 15 microns wide. However, widths less than 15 microns or more than 15 microns are also possible. The first trough 602 is installed deeper in the solder block 600 than the second trough 604 to allow the second trough 604 to receive all or part of the connection pads as described above. Ru.

上述のように、第2のトラフ604は、シリコンダイの接続パッドの全部または一部を受け取るように構成される。一実施形態において、第2のトラフ604の幅は25ミクロンである。しかし、25ミクロンを超える幅または25ミクロン未満の幅もまた考えられる。さらに、必要に応じて、第2のトラフ604は、異なるサイズの接続パッドを収容できるほどの大きさにすることができることが理解される。例えば、第2のトラフ604は、シリコンダイの接続パッドの幅よりも約10%広くてもよい。ただし、必要に応じて、第2のトラフは、シリコンダイの接続パッドの幅よりも10%を超えて広くてもよいし、10%未満広くてもよい。はんだブロック600を加熱するときに効果的なはんだ接合を形成するように、第2のトラフ604は、接続パッドの深さを受け入れ可能な大きさにすることができる(以下、より詳細に説明する)。例えば、第2のトラフの深さは5ミクロンであってもよい。しかし、5ミクロンを超える深さおよび5ミクロン未満の深さもまた考えられる。 As mentioned above, the second trough 604 is configured to receive all or part of the connection pads on the silicon die. In one embodiment, the width of the second trough 604 is 25 microns. However, widths greater than 25 microns or less than 25 microns are also possible. Further, it is understood that the second trough 604 can be large enough to accommodate different sized connection pads, if desired. For example, the second trough 604 may be about 10% wider than the width of the connection pad on the silicon die. However, if desired, the second trough may be more than 10% wider or less than 10% wider than the width of the silicone die connection pad. The second trough 604 can be sized to accept the depth of the connection pad so that it forms an effective solder joint when heating the solder block 600 (described in more detail below). ). For example, the depth of the second trough may be 5 microns. However, depths greater than 5 microns and depths less than 5 microns are also possible.

いくつかの実施形態において、はんだブロック600は、接続線の製造中に接続線に結合されてもよい。例えば、複数のはんだブロック600は、接続線に結合され、シリコンダイ間の間隔に関連付けられる距離を空けて配置されてもよい。これにより、はんだブロック600が各シリコンダイの接続パッドの上方に設けられるように、接続線を複数のシリコンダイと接触させて配置することができる。 In some embodiments, the solder block 600 may be coupled to the connecting wire during the manufacture of the connecting wire. For example, the plurality of solder blocks 600 may be coupled to the connecting wire and placed at a distance associated with the spacing between the silicon dies. Thereby, the connecting wire can be arranged in contact with the plurality of silicon dies so that the solder block 600 is provided above the connection pad of each silicon die.

図7を参照して、いくつかの実施形態による、複数のシリコンダイを接続して集積回路を形成するプロセス700を示す。プロセスブロック702において、2つ以上のシリコンダイを一緒に設置する。上述のように、シリコンダイは、ダイのエッジが共通の軸と整列するように上下に積層することができる。いくつかの例において、ダイアタッチフィルムまたはダイアタッチフィルム接着剤をシリコンダイの間に設置して、それらを互いに対して所定の位置に固定することができる。他の実施形態において、ペーストまたは他の液体接着剤をシリコンダイの間に設置して、それらを互いに対して所定の位置に固定することができる。いくつかの実施形態において、ダイアタッチフィルムは、ダイアタッチファイルの厚さに等しい、シリコンダイ間の離間距離を提供することができる。例えば、ダイアタッチフィルムは、厚さが10ミクロンであってもよい。しかし、10ミクロンを超える厚さまたは10ミクロン未満の厚さもまた考えられる。さらなる実施形態において、ダイアタッチフィルムは、ダイのエッジで微小間隔を空けるように、ダイのエッジに到達しないような大きさにすることができる。さらに別の実施形態において、ブランクシリコンダイなどのスペーサーを使用して、隣接するダイの間隔を空けることができる。 FIG. 7 shows a process 700 of connecting multiple silicon dies to form an integrated circuit, according to some embodiments. In process block 702, install two or more silicon dies together. As mentioned above, the silicon dies can be stacked one above the other so that the edges of the dies are aligned with a common axis. In some examples, a die attach film or a die attach film adhesive can be placed between the silicone dies and fixed in place with respect to each other. In other embodiments, pastes or other liquid adhesives can be placed between the silicone dies to secure them in place with respect to each other. In some embodiments, the die attach film can provide a distance between silicon dies equal to the thickness of the die attach file. For example, the die attach film may be 10 microns thick. However, thicknesses greater than 10 microns or less than 10 microns are also possible. In a further embodiment, the die attach film can be sized so that it does not reach the edge of the die so that it is closely spaced at the edge of the die. In yet another embodiment, spacers such as blank silicon dies can be used to space adjacent dies.

シリコンダイは、接続パッドが上を向くように設けられてもよい。例えば、本明細書においてさらに記述されるように、接続パッドを上向きに回転させて、重力によって接続線を所定の位置に保持するのに役立つように、ダイを保持するワークチャックを回転させてもよい。いくつかの実施形態において、ワイヤボンディング/はんだ付けプロセスにおいて、ワークチャックは、シリコンダイを複数の位置で回転させ、異なる接続パッドが上を向くことを可能にするように構成されてもよい。既知のダイ配置技術を用いてシリコンダイを配置することがさらに考えられる。 The silicon die may be provided with the connection pad facing up. For example, as further described herein, the connection pad may be rotated upwards to rotate the work chuck holding the die to help hold the connection line in place by gravity. good. In some embodiments, in the wire bonding / soldering process, the work chuck may be configured to rotate the silicon die in multiple positions to allow different connection pads to face up. It is further conceivable to place silicon dies using known die placement techniques.

シリコンダイの配置を図8に示す。図8に示すように、装置は、いくつかの実施形態による、第1のシリコンダイ802と、第2のシリコンダイ804と、第3のシリコンダイ806とを含む。シリコンダイ802は2つの接続パッド808、810を含み、シリコンダイ804は2つの接続パッド812、814を含み、シリコンダイ806は2つの接続パッド816、818を含む。第1のシリコンダイ802と第2のシリコンダイ804は、第1のダイアタッチフィルム820によって分離され、第2のシリコンダイ804と第3のシリコンダイ806は、第2のダイアタッチフィルム822によって分離される。図8に示すように、第1の列にある接続パッド808、812、816は、第1のセットを形成し、第2の列にある接続パッド810、814、および818は、第2のセットを形成する。 Figure 8 shows the arrangement of the silicon dies. As shown in FIG. 8, the apparatus includes a first silicon die 802, a second silicon die 804, and a third silicon die 806, according to some embodiments. The silicon die 802 includes two connection pads 808, 810, the silicon die 804 includes two connection pads 812, 814, and the silicon die 806 includes two connection pads 816, 818. The first silicon die 802 and the second silicon die 804 are separated by the first die attach film 820, and the second silicon die 804 and the third silicon die 806 are separated by the second die attach film 822. Will be done. As shown in FIG. 8, the connection pads 808, 812, 816 in the first row form the first set, and the connection pads 810, 814, and 818 in the second row form the second set. To form.

プロセスブロック702においてシリコンダイを設置した後、プロセスブロック704において2つ以上の統合されたはんだブロックを有する接続線は2つ以上のシリコンダイ上に設けられる。一実施形態において、接続線は、統合されたはんだブロックが一組の上下に整列した接続パッド(すなわち、第1のセットまたは第2のセット)と整列するように設けられる。例えば、図9に示すように、第1の接続線902は、第1のシリコンダイ802の接続パッド808、第2のシリコンダイ804の接続パッド812、および第3のシリコンダイ806の接続パッド816の上側に設けられる。また、第1の接続線902は、接続パッド808、812、および814と整列するように間隔を置いて配置された第1のはんだブロック906、第2のはんだブロック908、および第3のはんだブロック910を有する。同様に、第2の接続線904は、第1のシリコンダイ802の接続パッド810、第2のシリコンダイ804の接続パッド814、および第3のシリコンダイ806の接続パッド818の上側に設けられる。図9に示すように、第1の接続線902は、接続パッド808、812、および814と整列するように間隔を置いて配置された第1のはんだブロック912、第2のはんだブロック914、および第3のはんだブロック916を有する。 After installing the silicon die in the process block 702, a connecting line with two or more integrated solder blocks in the process block 704 is provided on the two or more silicon dies. In one embodiment, the connecting wire is provided such that the integrated solder block is aligned with a set of vertically aligned connecting pads (ie, a first set or a second set). For example, as shown in FIG. 9, the first connection line 902 is the connection pad 808 of the first silicon die 802, the connection pad 812 of the second silicon die 804, and the connection pad 816 of the third silicon die 806. It is provided on the upper side of. Also, the first connecting wire 902 is spaced apart from the connecting pads 808, 812, and 814 to form a first solder block 906, a second solder block 908, and a third solder block. Has 910. Similarly, the second connection line 904 is provided above the connection pad 810 of the first silicon die 802, the connection pad 814 of the second silicon die 804, and the connection pad 818 of the third silicon die 806. As shown in FIG. 9, the first connecting wire 902 has a first solder block 912, a second solder block 914, and a second solder block 912 spaced apart from each other so as to align with the connecting pads 808, 812, and 814. It has a third solder block 916.

ここで図7に戻ると、プロセスブロック704において接続線を設置した後、プロセスブロック706において熱を加えてはんだをリフローする。一実施形態において、上述したように、熱は、はんだブロック、接続パッド、および接続線に加えられる。いくつかの実施形態において、火炎ジェットまたはレーザー加熱などによって、はんだブロック(および関連する接続パッドと接続線)に熱を集中的に加えてもよい。しかし、他の実施形態において、ダイの接続パッドではんだの溶融またはリフローを容易にするために、シリコンダイに一般的な熱を加える。例えば、シリコンダイをリフロー炉に入れてもよく、拡散炉などによって一般化された熱源にさらしてよい。 Returning to FIG. 7, after installing the connecting wire in the process block 704, heat is applied in the process block 706 to reflow the solder. In one embodiment, as described above, heat is applied to the solder blocks, connecting pads, and connecting wires. In some embodiments, heat may be intensively applied to the solder blocks (and associated connection pads and connections), such as by flame jets or laser heating. However, in other embodiments, general heat is applied to the silicon die to facilitate melting or reflow of the solder at the die connection pad. For example, a silicon die may be placed in a reflow oven or exposed to a heat source generalized by a diffusion oven or the like.

図10を参照して、上述のシリコンダイ802、804、および806は、接続線902、904を介して基板1000に結合される。基板1000は、第1の接続線902および第2の接続線904にそれぞれ接続するための第1の接続パッド1002および第2の接続パッド1004を含んでいてもよい。いくつかの実施形態において、基板1000は、チャネル1006を含んでいてもよい。いくつかの実施形態において、チャネル1006によって、接続線の曲げまたは他の変形を必要とせずに、接続線902、904を基板1000に取り付けることができる。図8、9、および10は、2つの接続線を介して接続された3つのシリコンダイの例を示すが、上述のプロセス700は、必要に応じて、3つ以上のシリコンダイおよび2つ以上の接続線で使用するために拡張できることが考えられる。したがって、図8、9、および10の例は、例示のみを目的としており、本明細書において記載されるプロセスを図に示される特定の構成要素に限定するものとして解釈されるべきではない。 With reference to FIG. 10, the silicon dies 802, 804, and 806 described above are coupled to the substrate 1000 via connecting lines 902, 904. The substrate 1000 may include a first connection pad 1002 and a second connection pad 1004 for connecting to the first connection line 902 and the second connection line 904, respectively. In some embodiments, the substrate 1000 may include channels 1006. In some embodiments, the channel 1006 allows the connecting lines 902, 904 to be attached to the substrate 1000 without the need for bending or other deformation of the connecting lines. Figures 8, 9, and 10 show examples of three silicon dies connected via two connecting lines, but the process 700 described above would optionally have three or more silicon dies and two or more. It is conceivable that it can be expanded for use in the connection line of. Therefore, the examples in FIGS. 8, 9, and 10 are for illustrative purposes only and should not be construed as limiting the processes described herein to the particular components shown in the figures.

図11を参照して、アセンブリ1100においてシリコンダイの交互配置を示す。アセンブリ1100は、第1のシリコンダイ1102と、第3のシリコンダイ1104と、第5のシリコンダイ1106とを含み、これらは、シリコンダイ1102、1104、および1106の第1のエッジ1110上に接続パッド1108を含む。第2のシリコンダイ1112、第4のシリコンダイ1114、および第6のシリコンダイ1116は、それぞれ第1のシリコンダイ1102、第3のシリコンダイ1104、および第5のシリコンダイ1106の間に交互に設けられる。第2のシリコンダイ1112、第4のシリコンダイ1114、および第6のシリコンダイ1116は、第1のシリコンダイ1102、第3のシリコンダイ1104、および第5のシリコンダイ1106の第1のエッジの反対側の第2のエッジ1120上に接続パッド1118を含む。第1の接続線1122は、第1のシリコンダイ1102、第3のシリコンダイ1104、および第5のシリコンダイ1106の接続パッド1108に結合され、第2の接続線1124は、第2のシリコンダイ1112、第4のシリコンダイ1114、および第6のシリコンダイ1116の接続パッド1118に結合される。第1の接続線1122は、第1の基板接続パッド1128で基板1126に結合される。同様に、第2の接続線1124は、第2の接続パッド1130を介して基板1126に結合される。 Referring to FIG. 11, the alternating arrangement of silicon dies in assembly 1100 is shown. Assembly 1100 includes a first silicon die 1102, a third silicon die 1104, and a fifth silicon die 1106, which are connected onto the first edge 1110 of the silicon dies 1102, 1104, and 1106. Includes pad 1108. The second silicon die 1112, the fourth silicon die 1114, and the sixth silicon die 1116 alternate between the first silicon die 1102, the third silicon die 1104, and the fifth silicon die 1106, respectively. It will be provided. The second silicon die 1112, the fourth silicon die 1114, and the sixth silicon die 1116 are of the first edge of the first silicon die 1102, the third silicon die 1104, and the fifth silicon die 1106. Includes a connection pad 1118 on the opposite second edge 1120. The first connection line 1122 is coupled to the connection pad 1108 of the first silicon die 1102, the third silicon die 1104, and the fifth silicon die 1106, and the second connection line 1124 is the second silicon die. It is coupled to the connection pads 1118 of the 1112, the fourth silicon die 1114, and the sixth silicon die 1116. The first connection line 1122 is coupled to the board 1126 by the first board connection pad 1128. Similarly, the second connecting line 1124 is coupled to the substrate 1126 via the second connecting pad 1130.

アセンブリ1100は、ダイごとの接続を可能にする2チャネル構造と呼ばれる。この構成によれば、シリコンダイが交互に設けられるため、接続間のスペースを増やすことができ、接続線をダイ接続パッドにはんだ付けすることによって生じる短絡のリスクを軽減できる。接続線を接続パッドに接続するはんだ接合は、プロセス300および/またはプロセス700などの上記のプロセスによって行うことができる。これにより、それぞれのシリコンダイの垂直側面に沿って接続を形成することができる。いくつかの例において、4チャネル構造を使用することにより、シリコンダイの所定のエッジに第4のダイごとに接続することができる。図11に示す例は、例示に過ぎず、所定の用途に応じて、上記のような2チャネルまたは4チャネルの設計を用いて複数のダイを接続することができると考えられる。 Assembly 1100 is called a two-channel structure that allows die-by-die connections. According to this configuration, since the silicon dies are provided alternately, the space between the connections can be increased, and the risk of short circuit caused by soldering the connection wire to the die connection pad can be reduced. Soldering joining the connecting wire to the connecting pad can be done by the above process such as process 300 and / or process 700. This allows connections to be formed along the vertical sides of each silicon die. In some examples, the 4-channel structure allows each fourth die to be connected to a given edge of the silicon die. The example shown in FIG. 11 is merely an example, and it is considered that a plurality of dies can be connected by using the above-mentioned 2-channel or 4-channel design depending on a predetermined application.

記述された実施形態は、積層されたシリコンダイを電気的に接続するのに特に有用である。例えば、電子メモリ装置のいくつかのバージョンは、複数の積層されたNADダイを含む。したがって、本明細書に開示される特徴およびダイの電気的相互接続方法は、基板上に積層された複数のNADDダイを有するメモリ装置に役立つ。 The described embodiments are particularly useful for electrically connecting laminated silicon dies. For example, some versions of electronic memory devices include multiple stacked NAD dies. Therefore, the features and methods of electrical interconnection of dies disclosed herein are useful for memory devices with multiple NADD dies stacked on a substrate.

本明細書において記載されるプロセス、システム、方法、ヒューリスティックなどに関して、そのようなプロセスなどのステップは、特定の順序付けられた順序に従って行われると記述されているが、そのようなプロセスは、本明細書において記載される順序以外の順序で実行される、記載されたステップによって実施可能であることを理解すべきである。さらに、いくつかのステップの同時実行、他のステップの追加、または本明細書において記載される特定のステップの省略が可能であることを理解すべきである。言い換えれば、本明細書におけるプロセスの説明は、いくつかの実施形態を例示する目的で提供されており、特許請求の範囲を限定するように解釈されるべきでは決してない。 With respect to the processes, systems, methods, heuristics, etc. described herein, steps such as such processes are described as being performed in a particular ordered order, which is described herein. It should be understood that it can be performed by the described steps, which are performed in an order other than those described in the document. In addition, it should be understood that it is possible to execute several steps simultaneously, add other steps, or omit certain steps described herein. In other words, the description of the process herein is provided for purposes of exemplifying some embodiments and should never be construed to limit the scope of the claims.

本明細書において使用される用語「実質的に」は、約、ほぼ、または修正される用語のプラスまたはマイナスの10~20%以内を意味する。たとえば、「実質的に直線状」とは、対象物が完全な直線状(つまり、真っ直ぐ)の10~20%以内にあることを意味する。同様に、「実質的に円形」とは、対象物が真円から10~20%の歪みまたは偏差を有する可能性があることを意味する。 As used herein, the term "substantially" means within 10-20% of the plus or minus of a term that is approximately, almost, or amended. For example, "substantially straight" means that the object is within 10-20% of the perfect straight line (ie, straight). Similarly, "substantially circular" means that an object can have a distortion or deviation of 10-20% from a perfect circle.

したがって、上記の説明は、例示を意図するものであり、限定を意図するものではないことを理解されたい。提供された例以外の多くの実施形態および用途は、上記の説明を読めばわかるであろう。本開示の範囲は、上記の説明を参照して決定されるではなく、添付の特許請求の範囲を参照して、そのような特許請求の範囲が権利を与えられる均等物の全範囲とともに決定されるべきである。本明細書において論じられる技術において将来の開発が行われ、開示されたデバイス、方法、および装置がそのような将来の実施形態に包含されることが予想されかつ意図される。要するに、本開示は修正および変更が可能であることを理解されたい。 Therefore, it should be understood that the above description is intended as an example and not as a limitation. Many embodiments and uses other than the examples provided will be apparent by reading the above description. The scope of the present disclosure is not determined by reference to the above description, but by reference to the appended claims, the scope of such claims is determined along with the full range of equivalents entitled. Should be. It is expected and intended that future developments will be made in the techniques discussed herein and that the disclosed devices, methods, and devices will be included in such future embodiments. In short, please understand that this disclosure can be modified and modified.

特許請求の範囲で使用されるすべての用語は、本明細書において逆の意味が明示的に示さない限り、当業者に理解されるような、それらの最も広い合理的な解釈およびそれらの通常の意味を与えることを意図している。特に、「a」、「the」、「said」などの単数形の冠詞の使用は、請求項が逆に明示的な限定を列挙しない限り、示された要素の1つ以上を列挙するものと解釈されるべきである。 All terms used in the claims are their broadest rational interpretations and their usual ordinary as understood by those skilled in the art, unless expressly construed herein. Intended to give meaning. In particular, the use of singular articles such as "a", "the", and "said" enumerates one or more of the indicated elements, unless the claim conversely enumerates explicit limitations. Should be interpreted.

本要約書は、読者が技術的開示の主題を迅速に確認できるようにするために提供される。これは、特許請求の範囲または意味を解釈または限定するように使用されないことを理解した上で提供される。さらに、前述の詳細な説明において、本開示を合理化するために、種々の実施形態において、様々な特徴がまとめてグループ化されることが分かる。本開示の方法は、本開示の開示される実施形態が、各請求項において明確に列挙されている特徴よりも多くの特徴を必要とするという意図を反映するものとして解釈されるべきではない。むしろ、以下の特許請求の範囲が反映するように、本開示の要旨は、単一の開示される実施形態のすべての特徴にあるわけではない。したがって、以下の特許請求の範囲は、発明を実施するための形態に組み込まれ、それぞれの請求項が個々に特許請求した主題を定義し、独立して存在する。 This abstract is provided to allow the reader to quickly identify the subject of the technical disclosure. It is provided with the understanding that it is not used to interpret or limit the scope or meaning of the claims. Further, in the above detailed description, it can be seen that in various embodiments, various features are grouped together in order to rationalize the present disclosure. The methods of the present disclosure should not be construed as reflecting the intent that the disclosed embodiments of the present disclosure require more features than are specifically listed in each claim. Rather, the gist of the present disclosure is not in all the features of a single disclosed embodiment, as reflected in the claims below. Therefore, the following claims are incorporated into the form for carrying out the invention, and each claim defines the subject matter claimed individually and exists independently.

Claims (20)

基板と、
2つ以上のシリコンダイであって、第1のダイが前記基板上に設けられ、第2のダイが前記第1のダイ上に積層され、
前記基板に平行な上側平面と、
前記上側平面に平行であるとともに前記上側平面から第1の距離を空けて配置された下側平面と、
前記上側平面と前記下側平面との間に設けられ、かつそれらに垂直な少なくとも第1のエッジ部と、
前記少なくとも第1のエッジ部に設けられ、かつ互いに上下に整列した少なくとも第1のセットの接続パッドとを備えた2つ以上のシリコンダイと、
前記第1のセットの接続パッドに結合されるように構成された導電素子と、
前記導電素子に結合され、前記第1のセットの接続パッドの接続パッド間の距離に関連付けられる間隔を置いて配置された複数のはんだブロックとを備える装置。
With the board
Two or more silicon dies, the first die is provided on the substrate and the second die is laminated on the first die.
The upper plane parallel to the substrate and
A lower plane that is parallel to the upper plane and is arranged at a first distance from the upper plane,
At least a first edge portion provided between the upper plane and the lower plane and perpendicular to them,
With two or more silicon dies provided at least on the first edge and with at least a first set of connection pads aligned vertically with each other.
A conductive element configured to be coupled to the first set of connection pads,
A device comprising a plurality of solder blocks coupled to the conductive element and spaced apart from each other and associated with a distance between the connection pads of the first set of connection pads.
前記はんだブロックは、リフローし、前記導電素子と前記第1のセットの接続パッドとの間にはんだ付け接続を形成するように加熱されるように構成される、請求項1に記載の装置。 The apparatus of claim 1, wherein the solder block is configured to reflow and be heated to form a soldering connection between the conductive element and the first set of connection pads. 前記はんだブロックは、前記第1の距離とほぼ同じ幅を有し、シリコンダイのエッジを内部に受け入れるように構成された第1の溝を備える、請求項1に記載の装置。 The apparatus according to claim 1, wherein the solder block has a width substantially the same as the first distance and includes a first groove configured to internally accept the edge of the silicon die. 前記第1の溝の幅は、前記第1のエッジ部の幅よりも10%広い、請求項3に記載の装置。 The apparatus according to claim 3, wherein the width of the first groove is 10% wider than the width of the first edge portion. 前記第1のエッジ部の幅は25ミクロンである、請求項4に記載の装置。 The apparatus according to claim 4, wherein the width of the first edge portion is 25 microns. 前記導電素子は、前記基板に電気的に接続される、請求項1に記載の装置。 The device according to claim 1, wherein the conductive element is electrically connected to the substrate. 前記基板はチャネルを含み、前記導電素子は前記チャネル内の前記基板に電気的に接続される、請求項6に記載の装置。 The apparatus according to claim 6, wherein the substrate includes a channel, and the conductive element is electrically connected to the substrate in the channel. 前記第1のダイを前記第2のダイに取り付けるための手段をさらに備える、請求項1に記載の装置。 The device of claim 1, further comprising means for attaching the first die to the second die. 前記第1のダイと第2のダイとの間に設けられ、かつそれらを物理的に接続するダイアタッチフィルムをさらに備える、請求項1に記載の装置。 The apparatus according to claim 1, further comprising a die attach film provided between the first die and the second die and physically connecting them. 前記第1のダイを前記第2のダイから離間させるための手段をさらに備える、請求項1に記載の装置。 The apparatus according to claim 1, further comprising means for separating the first die from the second die. 前記導電素子は、錫めっきの銅線を含む、請求項1に記載の装置。 The apparatus according to claim 1, wherein the conductive element includes a tin-plated copper wire. 前記2つ以上のシリコンダイの第1のサブセットは、前記第1のエッジ上に前記第1のセットの接続パッドを有し、前記2つ以上のシリコンダイの第2のサブセットは、第2のエッジ上に第2のセットの接続パッドを有し、前記第2のエッジは前記第1のエッジとは異なる、請求項1に記載の装置。 The first subset of the two or more silicon dies has the first set of connection pads on the first edge and the second subset of the two or more silicon dies is the second. The device of claim 1, wherein the device has a second set of connection pads on an edge, wherein the second edge is different from the first edge. 前記2つ以上のシリコンダイは、前記2つ以上のシリコンダイの前記第1のサブセットのそれぞれが前記2つ以上のシリコンダイの前記第2のサブセットと積層されるように設けられる、請求項12に記載の装置。 12. The two or more silicon dies are provided such that each of the first subsets of the two or more silicon dies is laminated with the second subset of the two or more silicon dies. The device described in. 前記導電素子および前記接続パッドのうちの少なくとも1つは、フラックス材料で被覆される、請求項1に記載の装置。 The device according to claim 1, wherein at least one of the conductive element and the connection pad is coated with a flux material. 導電性はんだは、金、インジウム、イリジウム、錫めっき銅、およびパラジウムからなる群から選択される少なくとも1つで構成される、請求項1に記載の装置。 The apparatus of claim 1, wherein the conductive solder comprises at least one selected from the group consisting of gold, indium, iridium, tinned copper, and palladium. 前記複数のシリコンダイの1つ以上のエッジが上下に整列するように複数のシリコンダイを積層する工程であって、前記1つ以上のエッジが複数の接続パッドを含む、工程と、
略直線状に形成される導体を前記1つ以上のエッジに実質的に垂直な軸上に設置する工程であって、前記直線状導体が前記複数の接続パッドのうちの1つ以上と接触する、工程と、
前記1つ以上の接続パッドと、前記1つ以上の接続パッドと接触する前記直線状導体の1つ以上の部分に導電性はんだを塗布する工程と、
熱を加えてはんだをリフローし、前記はんだによって前記直線状導体の前記1つ以上の部分とそれに接触する前記1つ以上の接続パッドとを物理的かつ電気的に結合する工程とを含む、方法。
A step of stacking a plurality of silicon dies so that one or more edges of the plurality of silicon dies are aligned vertically, wherein the one or more edges include a plurality of connection pads.
A step of installing a substantially linear conductor on an axis substantially perpendicular to the one or more edges, wherein the linear conductor comes into contact with one or more of the plurality of connecting pads. , Process and
A step of applying conductive solder to the one or more connection pads and one or more portions of the linear conductor that come into contact with the one or more connection pads.
A method comprising the steps of applying heat to reflow the solder and physically and electrically coupling the one or more portions of the linear conductor to the one or more connecting pads in contact with the solder. ..
前記直線状導体を磁束層で被覆することをさらに含む、請求項16に記載の方法。 16. The method of claim 16, further comprising covering the linear conductor with a magnetic flux layer. 前記導電性はんだは、前記1つ以上の接続パッドおよび前記1つ以上の接続パッドと接触する前記直線状導体の1つ以上の部分に加熱された液状はんだを塗布することによって塗布される、請求項16に記載の方法。 The conductive solder is applied by applying a heated liquid solder to one or more portions of the linear conductor in contact with the one or more connecting pads and the one or more connecting pads. Item 16. The method according to Item 16. 前記複数のシリコンダイの1つ以上のエッジが上下に整列するように複数のシリコンダイを積層する工程であって、前記1つ以上のエッジが複数の接続パッドを含む、工程と、
接続線を前記1つ以上のエッジに実質的に垂直な軸上に設置する工程であって、前記接続線は前記複数のシリコンダイ上の整列された第1のセットの接続パッド間の距離に関連付けられる間隔を置いて配置された複数のはんだブロックを含み、前記接続線は、前記複数のはんだブロックが整列された第1のセットの接続パッドと接触するように配置される、工程と、
熱を加えてはんだブロックをリフローし、前記はんだブロックによって前記接続線を整列された接続パッドに物理的に接合する工程とを含む、方法。
A step of stacking a plurality of silicon dies so that one or more edges of the plurality of silicon dies are aligned vertically, wherein the one or more edges include a plurality of connection pads.
In the process of installing the connecting wire on an axis substantially perpendicular to the one or more edges, the connecting wire is at a distance between the aligned first set of connecting pads on the plurality of silicon dies. The process, which comprises a plurality of solder blocks arranged at associated intervals, the connecting line is arranged such that the plurality of solder blocks are in contact with an aligned first set of connecting pads.
A method comprising the steps of applying heat to reflow a solder block and physically joining the connecting wires to an aligned connection pad by the solder block.
フレーム噴流加熱プロセスは、前記はんだブロックをリフローするために使用される、請求項19に記載の方法。 19. The method of claim 19, wherein the frame jet heating process is used to reflow the solder block.
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