JP2022041399A - Substrate transfer system and substrate positioning method - Google Patents

Abstract

To provide a substrate transfer system and a substrate positioning method that can correct overruns quickly and accurately, prevent time loss associated with substrate positioning, and improve productivity.SOLUTION: When an elapsed time from a time when the head of a board is detected by a first sensor reaches a deceleration start delay time GT, the transfer speed of the board is reduced to the stop speed (ST6), and the transfer of the board is stopped (ST8) when the head of the board transferred at the stop speed is detected by a second sensor. When the head of the board is detected by a third sensor after the transfer of the board is stopped, a transfer conveyor is operated such that the head of the board approaches the target stop position, and the board is retracted (ST12), and a new deceleration start delay time GT is set by subtracting a time required for the head of the board to advance to the overrun detection position beyond the target stop position from a deceleration start delay time GT (ST14).SELECTED DRAWING: Figure 7

Description

The present invention relates to a substrate transfer system and a substrate positioning method for transporting a substrate and positioning it at a predetermined target stop position.

In order to perform work on a board, a component mounting device such as a component mounting device used in a component mounting line for mounting a component on a board transports the board by a conveyor and positions it at a predetermined work position. There is. When the transport conveyor receives the board from the upstream side, it transports the board at high speed at first, and after a certain period of time has passed after the top of the board reaches the preset deceleration start reference position, the transport speed is decelerated and the top of the board. The transport is stopped when the unit reaches the target stop position. At this time, if the substrate overruns beyond the target stop position, it is necessary to operate the conveyor so that the leading portion of the substrate approaches the target stop position to retract the substrate. Overrun should be avoided as much as possible because it leads to time loss. Conventionally, when overrun occurs, the time from when the head of the board reaches the deceleration start reference position to when deceleration starts (deceleration start). The delay time) is shortened so that deceleration is started earlier (see, for example, Patent Document 1 below).

Japanese Unexamined Patent Publication No. 2014-157960

However, in the above-mentioned conventional component mounting device, the time width of the deceleration start delay time to be shortened when the substrate is overrun is constant, and the deceleration start delay time after the change is not always the optimum value. .. For this reason, the time width of the deceleration start delay time is too small and the overrun continues after that, or the overrun is corrected because the time width is too large, but it takes time to reach the target stop position on the contrary. There was a problem that productivity might decrease due to passing.

Therefore, according to the present invention, even if an overrun occurs, it can be corrected quickly and accurately, and the time loss associated with the positioning of the substrate can be prevented to improve the productivity. The purpose is to provide.

The substrate transfer system of the present invention is a substrate transfer system that transfers a substrate and positions it at a predetermined target stop position, and a transfer conveyor that conveys the substrate and a head portion of the substrate that is conveyed by the transfer conveyor are included. The first sensor that detects the state of reaching the deceleration start reference position set on the upstream side of the target stop position and the head portion of the substrate conveyed by the transfer conveyor are slightly upstream of the target stop position. The second sensor that detects the state of reaching the stop operation start position set in, and the overrun detection position where the head portion of the substrate conveyed by the transfer conveyor is set slightly downstream of the target stop position. A third sensor that detects the state of reaching the deceleration start, and a deceleration start in which the elapsed time from the time when the state where the head portion of the substrate conveyed by the transfer conveyor reaches the deceleration start reference position is detected is set in advance. When the delay time is reached, the transfer speed of the board by the transfer conveyor is reduced to a preset stop speed, and then when the state where the head portion of the board reaches the stop operation start position is detected, the said. When the transfer of the substrate by the transfer conveyor is stopped, the transfer of the substrate by the transfer conveyor is stopped, and then the state where the head portion of the substrate reaches the overrun detection position is detected, the substrate of the substrate is stopped. When it is detected that the operation control unit that operates the conveyor so that the head portion approaches the target stop position to retract the substrate and the head portion of the substrate reaches the overrun detection position. A delay time changing unit that sets a new deceleration start delay time by subtracting the overrun time required for the head portion of the substrate from the target stop position to the overrun detection position from the deceleration start delay time. Equipped with.

The substrate positioning method of the present invention is a substrate positioning method in which a substrate is conveyed by a transfer conveyor and positioned at a predetermined target stop position, and the head portion of the substrate conveyed by the transfer conveyor is more than the target stop position. When the elapsed time from the time when the deceleration start reference position set on the upstream side is reached reaches the preset deceleration start delay time, the transfer speed of the substrate by the transfer conveyor is reduced to the preset stop speed. The deceleration step and the transfer of the substrate by the transfer conveyor when the head portion of the substrate conveyed at the stop speed by the transfer conveyor reaches the stop operation start position set slightly upstream of the target stop position. When the head portion of the board reaches the overrun detection position set slightly downstream of the target stop position after the stop step of stopping the process and the transfer of the board by the transfer conveyor are stopped. The overrun processing step of operating the transfer conveyor so that the head portion of the board approaches the target stop position to retract the board, and the board when the head portion of the board reaches the front overrun detection position. The deceleration start delay time change step of subtracting the overrun time required for the head portion from the target stop position to the overrun detection position from the deceleration start delay time to set a new deceleration start delay time, and including.

According to the present invention, even if an overrun occurs, it can be corrected quickly and accurately, and it is possible to prevent a loss of time due to positioning of the substrate and improve productivity.

A perspective view of a main part of a component mounting device provided with a board transfer system according to an embodiment of the present invention. Top view of the main part of the component mounting apparatus according to the embodiment of the present invention. A block diagram showing a control system of a component mounting device according to an embodiment of the present invention. (A) Plan view (b) Side view of the substrate transport mechanism included in the component mounting device according to the embodiment of the present invention. A graph showing the time profile of the transfer speed of the substrate when the positioning control of the substrate is performed by the component mounting device according to the embodiment of the present invention. (A) (b) (c) (d) The figure which shows the change of the position of a substrate when the positioning control of a substrate is performed by the component mounting apparatus in one Embodiment of this invention. A flowchart showing the flow of substrate positioning control by the component mounting device according to the embodiment of the present invention.

Hereinafter, embodiments of the present invention will be described with reference to the drawings. First, the structure of the component mounting device 1 as an example of the component mounting device will be described with reference to FIGS. 1 and 2. In FIGS. 1 and 2, the component mounting device 1 is a device for mounting the component BH on the board KB, and includes a base 11, a board transfer mechanism 12, a plurality of parts feeders 13, a head moving mechanism 14, a mounting head 15, and component recognition. It includes a camera 16 and a control device 17.

In FIGS. 1 and 2, the substrate transport mechanism 12 extends from the central portion of the base 11 in the left-right direction (X-axis direction), and a pair of transport belts 21a arranged to face each other in the front-rear direction (Y-axis direction). Both ends of the substrate KB are supported from below and transported by the transport conveyor 21 having the above. The board transfer mechanism 12 receives the board KB sent from the upstream side, transports it to the central portion side of the base 11, and positions it at a predetermined work position. That is, in the present embodiment, the substrate transfer mechanism 12 is a substrate positioning unit that positions the substrate KB at the working position.

In FIGS. 1 and 2, the plurality of parts feeders 13 are attached side by side in the X-axis direction to the feeder base 11F provided on the front side of the substrate transport mechanism 12 as seen from the operator OP. Each part feeder 13 supplies the part BH mounted on the board KB to the part supply port 13K provided at the end on the board transfer mechanism 12 side.

In FIGS. 1 and 2, the head moving mechanism 14 is a fixed beam 14A fixed to the base 11 and extended in the Y-axis direction, and a movement supported by the fixed beam 14A on one end side and extended in the X-axis direction. It is equipped with a beam 14B. The mounting head 15 is provided on the moving beam 14B. The moving beam 14B moves on the fixed beam 14A in the Y-axis direction, and the mounting head 15 moves on the moving beam 14B in the X-axis direction. The mounting head 15 freely moves the upper region of the base 11 in the horizontal plane (inside the XY plane) by moving the moving beam 14B in the Y-axis direction and moving the mounting head 15 itself in the X-axis direction. can do.

In FIG. 1, the mounting head 15 includes a plurality of nozzles 15N extending downward. Each nozzle 15N is driven by a nozzle drive unit 15A provided in the mounting head 15 to perform an elevating operation with respect to the mounting head 15 and a rotating operation around the Z axis. Vacuum pressure can be supplied to each nozzle 15N through a valve unit 15B provided on the mounting head 15, whereby an attractive force can be generated at the lower end of each nozzle 15N.

In FIGS. 1 and 2, the component recognition camera 16 is provided in the region between the substrate transfer mechanism 12 and the component feeder 13 of the base 11. The component recognition camera 16 has the image pickup optical axis directed upward, and the component BH picked up by the mounting head 15 attracted to the nozzle 15N is imaged from below.

In FIG. 3, the control device 17 controls the operation of each part included in the component mounting device 1. Specifically, the control device 17 operates the board transfer mechanism 12 to transfer the board KB and position it at the working position, and operates each part feeder 13 to supply the component BH to the component supply port 13K. Further, the control device 17 operates the head moving mechanism 14 to move the mounting head 15 in the horizontal plane. Further, the control device 17 operates the nozzle drive unit 15A to raise and lower and rotate each nozzle 15N, and operates the valve unit 15B to generate an adsorption force at the lower end of each nozzle 15N. Further, the control device 17 recognizes the component BH by causing the component recognition camera 16 to take an image of the component BH picked up by the mounting head 15 attracted to the nozzle 15N.

In FIG. 3, the control device 17 includes a storage unit 17a and an operation control unit 17b. In addition to the component mounting program that defines the execution procedure of the component mounting work, the storage unit 17a stores various data such as the type and size of the component BH to be mounted on the board KB. The operation control unit 17b operates each part of the component mounting device 1 in a predetermined order based on the component mounting program stored in the storage unit 17a, and mounts the component BH at each target mounting coordinate defined on the board KB. ..

When the component mounting device 1 having such a configuration performs component mounting work for mounting the component BH on the board KB, first, the board transfer mechanism 12 receives and transports the board KB sent from the upstream side, and works. Position to position. The details of positioning the substrate KB to the working position by the substrate transfer mechanism 12 will be described later.

When the board KB is positioned at the work position, the head moving mechanism 14 moves the mounting head 15 above the parts feeder 13. When the mounting head 15 moves above the parts feeder 13, the parts BH supplied by the parts feeder 13 are attracted to each of the plurality of nozzles 15N and picked up.

After the mounting head 15 picks up the component BH, the head moving mechanism 14 moves the mounting head 15 so that the component BH picked up by the mounting head 15 passes above the component recognition camera 16. The component recognition camera 16 takes an image of the component BH when the component BH passes above, and the control device 17 recognizes the component BH based on the image obtained by the image taken by the component recognition camera 16.

When the control device 17 recognizes the component BH, the head moving mechanism 14 moves the mounting head 15 above the board KB, and the mounting head 15 mounts the picked up component BH at the target mounting coordinates set on the board KB. When the mounting head 15 mounts the component BH at the target mounting coordinates, the position is corrected based on the recognition result of the component BH.

By repeating such a series of operations of the mounting head 15, when all the components BH to be mounted on the board KB are mounted, the board transfer mechanism 12 carries out the board KB to the downstream side of the component mounting device 1. This completes the component mounting work for each board KB.

Next, the positioning control of the board KB to the working position by the board transfer mechanism 12 will be described. First, the configuration of the substrate transfer mechanism 12 will be described with reference to FIGS. 4 (a) and 4 (b). In FIGS. 4A and 4B, the substrate transfer mechanism 12 includes a transfer conveyor 21 provided with the pair of transfer belts 21a described above, as well as a plurality of sensors (first sensor 31, second sensor 32, and second sensor 32). The sensor 33) of 3 is provided.

In FIGS. 4A and 4B, the conveyor 21 has a configuration in which each of the two conveyor belts 21a is hung around the drive pulley 41 and the two driven pulleys 42. When the drive pulley 41 is driven by the conveyor drive motor 43, the pair of transfer belts 21a travel in the same direction, support both ends of the substrate KB from below, and transfer in the X-axis direction.

In FIGS. 4A and 4B, a working position where the mounting head 15 performs component mounting work is set in the transport path of the substrate KB formed by the conveyor 21. A target stop position M is set at a position corresponding to the head portion of the board KB located at the work position.

In FIGS. 4A and 4B, the deceleration start reference position E0 is set on the upstream side of the target stop position M, and the stop operation start position E1 is set slightly upstream of the target stop position M. There is. Further, an overrun detection position E2 is set slightly downstream of the target stop position M. It is assumed that the distance from the stop operation start position E1 to the target stop position M (set stop distance) is D, and the distance from the target stop position M to the overrun detection position E2 (overrun detection distance) is L (FIG. 4 (FIG. 4). a)).

In FIGS. 4A and 4B, the first sensor 31 is provided at a position for detecting a state in which the head portion of the substrate KB conveyed by the transfer conveyor 21 reaches the deceleration start reference position E0. The second sensor 32 is provided at a position for detecting a state in which the head portion of the substrate KB conveyed by the transfer conveyor 21 has reached the stop operation start position E1. The third sensor 33 is provided at a position for detecting a state in which the head portion of the substrate KB conveyed by the transfer conveyor 21 has reached the overrun detection position E2.

The first sensor 31, the second sensor 32, and the third sensor 33 are all transmissive optical sensors, and the head portion of the substrate KB conveyed by the transfer conveyor 21 blocks the detection light of each sensor. By detecting, it is detected that the head portion of the substrate KB has reached the position of the detection light of the sensor. The detection information of each of the first sensor 31, the second sensor 32, and the third sensor 33 is input to the control device 17 (FIG. 3).

In FIG. 3, the control device 17 includes a delay time setting unit 17c, a timer 17d, and a delay time changing unit 17e, in addition to the above-mentioned storage unit 17a and operation control unit 17b. The delay time setting unit 17c sets the deceleration start delay time. Here, the "deceleration start delay time" means that the head portion of the substrate KB conveyed by the conveyor 21 has reached the deceleration start reference position E0 (the head portion of the substrate KB is detected by the first sensor 31). It refers to the time from time to the start of deceleration of the transfer speed of the substrate KB by the transfer conveyor 21 thereafter. The initial value of the delay time setting unit 17c is stored in the storage unit 17a, and the delay time setting unit 17c reads the initial value from the storage unit 17a at the start of the component mounting work and sets it as the deceleration start delay time. do. After that, when the deceleration start delay time is changed by the delay time changing unit 17e described later, the changed value is read out and set as the deceleration start delay time.

The timer 17d measures the elapsed time from the time when the first sensor 31 detects that the head portion of the substrate KB conveyed by the conveyor 21 has reached the deceleration start reference position E0. do. Then, when the elapsed time reaches the deceleration start delay time set by the delay time setting unit 17c, information to that effect is output to the operation control unit 17b.

In the delay time changing unit 17e, when the state in which the head portion of the substrate KB conveyed by the transfer conveyor 21 exceeds the target stop position M and reaches the overrun detection position E2 is detected by the third sensor 33 (that is, over). When a run occurs), the deceleration start delay time set at that time is set (changed) to a new value. Specifically, when an overrun occurs, the time required for the head portion of the board KB to advance from the target stop position M to the overrun detection position E2 (referred to as “overrun time ΔT”) at that time. Set a new deceleration start delay time by subtracting it from the set deceleration start delay time.

In the present embodiment, the storage unit 17a, the operation control unit 17b, the delay time setting unit 17c, the timer 17d, and the delay time changing unit 17e of the substrate transfer mechanism 12 and the control device 17 convey the substrate KB to a predetermined target stop. The substrate transfer system 50 positioned at the position M is configured (FIG. 3). FIG. 5 shows the transfer of the substrate KB until the substrate transfer system 50 conveys the substrate KB by the transfer conveyor 21 and the transfer of the substrate KB is stopped triggered by the fact that the head portion of the substrate KB reaches the target stop position M. The velocity V is shown over time (as a profile for time T).

In FIG. 5, when the substrate KB is sent from the upstream side, the transfer of the substrate KB is started (arrow A shown in FIG. 6A), and the transfer speed V of the substrate KB reaches a predetermined normal transfer speed VJ. Accelerate to. Then, when the transfer speed V of the substrate KB reaches the normal transfer speed VJ (T1 at the completion of acceleration shown in FIG. 5), the transfer speed V is kept at a constant speed of the normal transfer speed VJ thereafter.

When the state in which the head portion of the substrate KB conveyed at the normal transfer speed VJ reaches the deceleration start reference position E0 is detected by the first sensor 31 (FIG. 6 (a). ), The operation control unit 17b measures the elapsed time from the time when the head portion of the board KB is detected by the first sensor 31 by the timer 17d. Then, when the elapsed time measured by the timer 17d reaches the set deceleration start delay time GT (FIG. 5) (deceleration start time T3 shown in FIG. 5), the transport speed V is set to a preset stop. Decelerate to speed VT.

The deceleration of the transfer speed V of the substrate KB by the transfer conveyor 21 is continued until the transfer speed V reaches the stop speed VT (T4 at the end of deceleration shown in FIG. 5), after which the substrate KB continues to have a constant speed of the stop speed VT. Will be transported by. Then, when it is detected by the second sensor 32 that the head portion of the substrate KB conveyed by the transfer conveyor 21 at the stop speed VT has reached the stop operation start position E1 (FIG. 6B). At the start of the stop operation (T5) shown, the operation control unit 17b stops the transfer of the substrate KB by the transfer conveyor 21. As a result, the substrate KB stops at a position past the stop operation start position E1 (ideally, the target stop position M).

Here, if the set deceleration start delay time GT is an appropriate value for the weight of the board KB, the slip condition with respect to the transport belt 21a, etc., the head portion of the board KB does not overrun. (The head portion of the board KB does not reach the overrun detection position E2), the board KB stops. However, if the deceleration start delay time GT is longer than an appropriate value, the board KB may overrun, and at this time, the head portion of the board KB reaches the overrun detection position E2. Then, it is detected by the third sensor 33 (FIG. 6 (c)). In the state where the overrun occurs in this way, the substrate KB is largely displaced from the working position, so that the operation control unit 17b sets the conveyor 21 so that the head portion of the substrate KB approaches the target stop position M. It is operated to retract the substrate KB (FIG. 6 (d); arrow B shown in the figure).

In this backward operation of the board KB, the head portion of the board KB may be located on the upstream side (target stop position M side) of the overrun detection position E2. Therefore, the amount of movement of the substrate KB when the substrate KB is retracted may be simply the distance from the target stop position M to the overrun detection position E2 (overrun detection distance L).

In this way, the operation control unit 17b is preset with the elapsed time from the time when the first sensor 31 detects that the head portion of the substrate KB conveyed by the transfer conveyor 21 has reached the deceleration start reference position E0. When the deceleration start delay time GT is reached (when the elapsed time measured by the timer 17d reaches the deceleration start delay time GT), the transfer speed V of the substrate KB by the transfer conveyor 21 is set to the preset stop speed VT. When the speed is reduced and then the state where the head portion of the board KB reaches the stop operation start position E1 is detected by the second sensor 32. The transfer of the substrate KB by the transfer conveyor 21 is stopped. Further, the operation control unit 17b stops the transfer of the board KB by the transfer conveyor 21, and then, when the state where the head portion of the board KB reaches the overrun detection position is detected by the third sensor 33, the board KB The conveyor 21 is operated so that the head portion of the conveyor belt 21 approaches the target stop position M, and the substrate KB is retracted.

Further, as described above, when the board KB is overrun, the delay time changing unit 17e takes time for the head portion of the board KB to advance from the target stop position M to the overrun detection position E2 (overrun). Time ΔT) is subtracted from the current deceleration start delay time GT to set a new deceleration start delay time GT. Specifically, the overrun time ΔT is obtained by calculation ΔT = L / VT using the overrun detection distance L and the stop speed VT as its approximate values. Alternatively, if the time (stop time) required from the second sensor 32 detecting the head portion of the board KB to the third sensor 33 detecting the head portion of the board KB is MT, the stop is performed. It may be obtained by calculation ΔT = MT−D / VT using the time MT, the set stop distance D, and the stop speed VT.

Next, a procedure for transporting the substrate KB (board positioning method) by the substrate transport system 50 based on the time profile of the transport speed V of the substrate KB shown in FIG. 5 described above will be described with reference to the flowchart shown in FIG. do. The board transfer system 50 starts the positioning operation of the board KB to the work position when the component mounting work by the component mounting device 1 is started. First, the deceleration start delay time GT is set (step ST1). Specifically, the operation control unit 17b reads the initial value of the deceleration start delay time GT from the storage unit 17a, and sets the read initial value as the deceleration start delay time GT.

After setting the deceleration start delay time GT, when the board KB is sent from the upstream side, the conveyor drive motor 43 is operated to start the transfer of the board KB by the transfer conveyor 21 (step ST2). Then, the first sensor 31 enters a state of waiting for detection of the head portion of the board KB (step ST3). When the first sensor 31 detects the head portion of the board KB (FIG. 6A), the elapsed time from that point is measured by the timer 17d (step ST4), and the deceleration start delay time GT set by the elapsed time is set. Enter the waiting state until it reaches (step ST5).

When the elapsed time reaches the deceleration start delay time GT, the transport speed V is decelerated from the normal transport speed VJ to the stop speed VT (deceleration step in step ST6), and the state of waiting for detection of the head portion of the board KB by the second sensor 32. Enter (step ST7). Then, when the second sensor 32 detects the head portion of the board KB (FIG. 6 (b)), the operation of the transfer conveyor 21 is stopped to stop the transfer operation of the board KB (stop step of step ST8).

When the transfer operation of the board KB by the transfer conveyor 21 is stopped, the time measurement is started by the timer 17d (step ST9). Then, it is determined whether or not the head portion of the board KB is detected by the third sensor 33 (step ST10) until the timer 17d elapses a predetermined fixed time (overrun detection time) (step ST10). Step ST11). If the head portion of the substrate KB is not detected by the third sensor 33 during that period, it is assumed that the substrate KB has not overrun, and the positioning operation of the substrate KB is terminated. On the other hand, if the head portion of the substrate KB is detected by the third sensor 33 before the overrun detection time elapses (FIG. 6 (c)), the conveyor drive motor 43 of the conveyor 21 is reversed. By rotating in the direction, the conveyor 21 is operated so that the head portion of the substrate KB approaches the target stop position M, and the substrate KB is retracted (overrun processing step of step ST12; FIG. 6D).

After the substrate KB is retracted in step ST12, the overrun time ΔT is calculated as described above (step ST13). Then, after the overrun time ΔT is calculated, the calculated overrun time ΔT is subtracted from the deceleration start delay time GT (GT = GT−ΔT) to set a new deceleration start delay time GT (step ST14). Step of changing the deceleration start delay time), the positioning operation of the board KB is completed.

As described above, in the substrate transfer system 50 and the substrate positioning method using the substrate transfer system 50 in the present embodiment, it is detected that the head portion of the substrate KB exceeds the target stop position M and reaches the overrun detection position E2. In this case, measures are taken to accelerate the timing to start deceleration of the transfer speed V of the substrate KB so that the substrate KB does not overrun. At this time, the time width to accelerate the timing to start deceleration is set to the substrate KB. The leading portion of the above is set to be the time required to advance from the target stop position M to the overrun detection position E2 (overrun time ΔT). Therefore, even if an overrun occurs, it can be corrected quickly and accurately, and it is possible to prevent a loss of time due to positioning of the substrate KB and improve productivity.

Although the embodiments of the present invention have been described so far, the present invention is not limited to the above-mentioned ones, and various modifications and the like are possible. For example, in the above-described embodiment, when the substrate KB overruns beyond the target stop position M, the amount of movement to retract the substrate KB is simply between the target stop position M and the overrun detection position E2. Although the overrun detection distance L is set as described above, the overrun detection distance L may be set, but the head portion of the board KB may be retracted by the distance obtained by accurately measuring the overrun distance exceeding the target stop position M. Further, in the above-described embodiment, an example in which the substrate transfer system 50 and the positioning method of the substrate KB in the present invention are applied to the component mounting device 1 is shown, but the present invention shows another component mounting device (for example, screen printing). It can be similarly applied to devices, inspection devices, etc.).

Provided are a substrate transfer system and a substrate positioning method that can quickly and accurately correct an overrun even if it occurs, prevent a loss of time associated with substrate positioning, and improve productivity.

17b Operation control unit 17e Delay time change unit 21 Conveyor conveyor 31 First sensor 32 Second sensor 33 Third sensor 50 Board transfer system M Target stop position GT Deceleration start delay time ΔT Overrun time E0 Deceleration start reference position E1 Stop operation start position E2 Overrun detection position VT Stop speed L Overrun detection distance D Set stop distance KB Board

Claims (6)

A board transfer system that transfers a board and positions it at a predetermined target stop position.
A conveyor that conveys the substrate and
A first sensor that detects a state in which the head portion of the substrate conveyed by the conveyor reaches a deceleration start reference position set upstream of the target stop position.
A second sensor that detects a state in which the head portion of the substrate conveyed by the conveyor reaches a stop operation start position set slightly upstream of the target stop position.
A third sensor that detects a state in which the head portion of the substrate conveyed by the conveyor reaches an overrun detection position set slightly downstream of the target stop position.
When the elapsed time from the time when the state where the head portion of the substrate conveyed by the conveyor reaches the deceleration start reference position is detected reaches the preset deceleration start delay time, the substrate by the conveyor belt The transfer speed is reduced to a preset stop speed, and then when the state where the head portion of the substrate reaches the stop operation start position is detected, the transfer of the substrate by the transfer conveyor is stopped, and the transfer is performed. After stopping the transfer of the substrate by the conveyor, when a state in which the head portion of the substrate reaches the overrun detection position is detected, the transfer is made so that the head portion of the substrate approaches the target stop position. An operation control unit that operates the conveyor to retract the board, and
When the state in which the head portion of the substrate reaches the overrun detection position is detected, the overrun time required for the head portion of the substrate to advance from the target stop position to the overrun detection position is reduced. A delay time changing unit that sets a new deceleration start delay time by subtracting it from the start delay time,
Board transfer system with. The first aspect of the present invention, wherein when the overrun detection distance from the target stop position to the overrun detection position is L and the stop speed is VT, the overrun time ΔT is calculated by calculation ΔT = L / VT. Substrate transfer system. The set stop distance, which is the distance from the stop operation start position to the target stop position, is D, the stop speed is VT, and the second sensor detects the head portion of the substrate, and then the third sensor. The substrate transfer according to claim 1, wherein the overrun time ΔT is calculated by calculation ΔT = MT−D / VT when the stop time, which is the time required to detect the head portion of the substrate, is MT. system. It is a substrate positioning method in which a substrate is conveyed by a conveyor and positioned at a predetermined target stop position.
When the elapsed time from the time when the head portion of the substrate conveyed by the conveyor reaches the deceleration start reference position set upstream from the target stop position reaches the preset deceleration start delay time. In addition, a deceleration process that reduces the transfer speed of the substrate by the transfer conveyor to a preset stop speed, and
When the head portion of the board conveyed at the stop speed by the transfer conveyor reaches the stop operation start position set slightly upstream of the target stop position, the transfer of the board by the transfer conveyor is stopped. Process and
After the transfer of the substrate by the transfer conveyor is stopped, when the head portion of the substrate reaches the overrun detection position set slightly downstream of the target stop position, the head portion of the substrate is the target. An overrun processing step of operating the conveyor so as to approach the stop position and retracting the substrate.
When the head portion of the substrate reaches the front overrun detection position, the overrun time required for the head portion of the substrate to advance from the target stop position to the overrun detection position is subtracted from the deceleration start delay time. In the deceleration start delay time changing step of setting a new deceleration start delay time,
Board positioning method including. The fourth aspect of the present invention, wherein when the overrun detection distance from the target stop position to the overrun detection position is L and the stop speed is VT, the overrun time ΔT is calculated by calculation ΔT = L / VT. Board positioning method. The set stop distance, which is the distance from the stop operation start position to the target stop position, is D, the stop speed is VT, and the second sensor detects the head portion of the substrate, and then the third sensor. 4. The substrate positioning according to claim 4, wherein the overrun time ΔT is calculated by calculation ΔT = MT−D / VT when the stop time, which is the time required to detect the head portion of the substrate, is MT. Method.

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