JP2022035960A - measuring device - Google Patents

Abstract

To provide a measuring device and a measuring method for determining a representative value of surface shape data.SOLUTION: In a first surface shape data asd showing the distance at each coordinate position (x, y) of the surface of a measurement object W from a first reference surface DT, a first respective region surface shape data amd is generated, which shows the distance at each coordinate position (x, y) in each of measurement regions kt. In the first respective region surface shape data amd, a second respective region surface shape data tmd is generated, which shows the distance of the surface of the measurement object W from a second reference surface DB. In the second respective region surface shape data tmd, a representative value is determined in each of the measurement areas kt.SELECTED DRAWING: Figure 4

Description

In the present invention, an irradiation means and a light receiving means are provided below the transparent table, the irradiation light is irradiated from the irradiation means toward the measurement object placed on the upper surface of the table, and the reflected light is received by the light receiving means. The present invention relates to a measuring device for specifying a measurement area of an object to be measured and determining a representative value in each of the measurement areas.

Conventionally, the following measuring devices shown in Patent Document 1 are known.
The measuring device of Patent Document 1 is an inspection device for inspecting an inspection object having a plurality of protrusions arranged in at least one direction, and irradiates a transparent table with a light pattern whose light intensity changes periodically. An image pickup unit for photographing the inspection object (hereinafter referred to as “measurement object”) irradiated with the light pattern from the lower surface of the table is provided, and the measurement object placed on the upper surface of the table is provided with a light irradiation unit. The light pattern is irradiated toward the object, and the reflected light is photographed by the imaging unit to measure the surface of the object to be measured, the measurement area including the protrusion is specified, and the representative value of the specified measurement area is determined. It ’s an inspection device,
The same cosine wave stripe pattern is projected on the upper surface of the table on which the object to be measured is not placed, and an image is taken (received), and the sample surface 12a (table surface on which the object to be inspected is placed (paragraph [0023])). Data indicating the phase θ at each coordinate position (x, y) of the above is calculated, and the data indicating the phase θ is recorded in advance in a computer as reference phase data (see paragraph [0044]).
The surface of the object to be measured having a plurality of protrusions placed on the upper surface of the table is photographed by the imaging unit, and the image of the surface of the photographed object is processed to determine the respective coordinate positions of the surface of the object to be measured. The phase data of the object to be measured representing the phase θ at (x, y) is generated, and the phase data is generated.
The phase difference between the reference phase data and the measurement object phase data at each coordinate position (x, y) is calculated, converted into data showing the phase difference at each coordinate position (x, y), and converted into a transparent table. Generates surface shape data (data representing a three-dimensional shape) showing the distance (height / floating amount) from the top surface of the object to the surface of the object to be measured (see paragraphs [0043] and [0044]), or triangular survey. Generates surface shape data (data representing a three-dimensional shape) showing the distance (height / floating amount) from the upper surface of the transparent table to the surface of the object to be measured using the principle of (paragraphs [0023] and [0046]]. reference),
It is a measuring device that identifies a region including each of the protrusions in the surface shape data, and determines a representative value of a distance value at each coordinate position (x, y) from the upper surface of the transparent table in the specified region. ..

<Definition of the upper surface of the table in Patent Document 1>
The invention of Patent Document 1 claims, "... a transparent table on which the inspection object is placed and a distance from the upper surface of the table with respect to the inspection object placed on the upper surface of the table. An image processing unit that generates surface shape data indicating the above, and a representative value determining unit that determines a representative value of a value indicating a distance from the upper surface of the table. ”(Claim 1 and the like). Therefore, the upper surface of the table (hereinafter, also referred to as "the upper surface of the table") is defined as the surface on which the inspection object is placed.
Then, the surface of the reflective member applied to the upper surface of the table, the surface of the reflective member placed on the upper surface of the table, the surface of the inspection object placed on the upper surface of the table, and the portion in contact with the upper surface of the table are the upper surface of the table. Since it is clear that the table top surface is not a place and the surface cannot be the table top surface, and it is impossible to place an object to be inspected on those surfaces, the invention of Patent Document 1 defines "the table top surface is "The surface on which the object to be inspected is placed" is a ready-made item, and it is rather consciously excluded from the technical scope.
That is, in paragraph [0063] of Patent Document 1, "If the resolution of the height measurement by the measuring unit 5 is Δk, the surface shape data is obtained in the regions R1 and R2 where the distance h from the sample surface 12a is smaller than Δk. Above, the distances h are all the same value (here, h = 0). " = 0) is described, but there is no description suggesting and teaching that the portion of the terminal 32e in contact with the upper surface of the table is included in the upper surface of the table.
Further, there is no description that defines that a reflective member is provided on the upper surface of the table and the surface position of the reflective member is included in the upper surface of the table, and there is no description that suggests and teaches it.
To further describe this, a technique in which the surface position of the reflective member (reflecting film) provided on the upper surface of the table is defined as the upper surface of the table (for example, Japanese Patent Application Laid-Open No. 5-223533 ([0025], [FIG. 4])). The technique in which the position of the contact portion of the inspection object with the table upper surface is defined as the table upper surface (for example, Japanese Patent Application Laid-Open No. 8-247735 ([0011], [FIG. 6])) is described before the filing of the invention of Cited Document 1. Despite the well-known technique, in the invention of Cited Document 1, there is no suggestion or teaching to define the surface position of the reflective member or the like, which is a well-known technique, as the upper surface of the table.
From the above, in the invention of Patent Document 1, it is appropriate that the surface position of the reflective member or the like provided on the upper surface of the table is not included in the upper surface of the table or is consciously out of the field. It is reasonable to say that it is a conscious exclusion from the technical scope of the invention.

Since the invention of Patent Document 1 requires the configuration of "generating surface shape data indicating the distance from the upper surface of the table at each position (x, y) in the XY plane" (claim 1). It is an essential requirement to measure the position of each coordinate position (x, y) on the upper surface (sample surface 12a) of the table.
As described above, the upper surface of the table cannot be other than the upper surface of the table on which the inspection object is placed, and the acquisition of each coordinate position (x, y) of the upper surface of the table is performed on the physical upper surface of the table. It cannot be obtained except by direct measurement.
As for the method of measuring the upper surface of the table, the image of the case where the same cosine wave stripe pattern is projected on the sample surface 12a on which the inspection object A is not placed is taken in advance in paragraph [0044], and the sample surface 12a is taken. The data indicating the phase θ of each position in the above is calculated and recorded as the reference phase data. "
The description of the measurement unit is only the measurement unit 5 including the projection projector 21 (an example of the light irradiation unit) provided below the table and the image pickup unit 22, and the measurement units other than the measurement unit 5 are described. There is no description that suggests or teaches.
Then, as referred to in paragraph [0044] in Patent Document 1, "projecting the same cosine wave stripe pattern" for measuring the position of the sample surface 12a (table upper surface) is irradiated from the projection projector 21 below the table. It is reasonable to assume that it is a projection of the same sine wave stripe pattern as the sine wave stripe pattern. Further, "projecting the same chord wave stripe pattern" projected on the upper surface of the table means the same chord wave stripe pattern projected from the projection projector 21 onto the sample from the technical, cost, accuracy, and operation aspects. It is most rational to assume that it is an optical pattern in which the intensity of light changes periodically (claim 1).
<Contradiction of the invention of Patent Document 1>
If so, there is the following contradiction in the projection of the projection projector 21 onto the upper surface of the table.
In order to measure the surface of the sample by projecting a striped pattern of cosine waves (hereinafter also referred to as "irradiation light") from the projection projector 21 with the sample placed on the sample surface 12a (upper surface of the table), the table is used. The striped pattern should not be projected (reflected) on the surface of. That is, the chord wave (irradiation light) from the projection projector 21 must pass through a transparent table, and the table passes through the chord wave (irradiation light), so that the chord wave (illumination light) is transmitted. It is reflected on the surface of the sample and a striped pattern is projected, and the striped pattern (reflected light) passes through the table and is imaged by the imaging unit.
Therefore, since the irradiation light (striped pattern of the cosine wave) from the projection projector 21 is transmitted to the table, the striped pattern of the cosine wave from the projection projector 21 is not projected on the surface (both the lower surface and the upper surface) of the table. Is clear, that is, the surface of the table (both the lower surface and the upper surface) cannot be imaged by the imaging unit, that is, the surface of the table (lower surface, the lower surface, depending on the irradiation of the cosine wave stripe pattern from the projection projector 21). It means that neither the brightness information, the distance information, nor the position information can be acquired (both on the upper surface).
Then, since the sine wave pattern of the cosine wave from the projection projector 21 is not projected on the table surface (both the upper surface and the lower surface), the sine wave fringe pattern from the projection projector 21 that passes through the table and is not projected on the table surface. It is reasonable to say that it is not possible to measure the position of the top surface of the table, depending on the pattern or the striped pattern of the same sine wave. The position of each coordinate position (x, y) on the upper surface of the table cannot be obtained except by directly measuring the upper surface.
Further, in Patent Document 1, there is no description other than paragraph [0044] that suggests or teaches a method for measuring the position of the upper surface of the table.
Then, it is reasonable that the invention of Patent Document 1 does not describe a method for measuring the position of the upper surface of the table, which is an essential constituent requirement, to the extent that a person skilled in the art can carry out.
If so, it is reasonable to assume that the invention of Patent Document 1 does not satisfy the enablement requirement in this respect.

Further, even according to the common general knowledge at the time of filing, the invention according to the claims "generates surface shape data indicating the distance from the upper surface of the table at each position (x, y) in the XY plane", "table". Image of the case where the same cosine wave stripe pattern is projected on the sample surface 12a on which the inspection object A is not placed, up to the scope of the invention of the claim of "determining the representative value of the value indicating the distance from the upper surface of the surface". Is photographed in advance, data indicating the phase θ of each position on the sample surface 12a is calculated, and the data is recorded as reference phase data ”(paragraph [0044]). It is reasonable to say that it cannot be converted.

In Patent Document 1, "the determination unit 101 determines whether or not the distance from the sample surface 12a at each point of the surface of the main body 31 facing the sample surface 12a indicated by the three-dimensional shape data is within a predetermined range. Determination. Specifically, the determination unit 101 calculates the difference between the distance from the sample surface 12a at each point of the predetermined reference surface and the distance from the sample surface 12a at each point of the main body 31. It is possible to determine whether the number of points where the difference exceeds the threshold value, the value of the difference, or the like is within a predetermined range. " It is appropriate that the "predetermined reference plane" is a reference plane on the image pickup unit side (measurement unit side) (hereinafter referred to as "first reference plane DT").
In addition, using the principle of triangulation, surface shape data (data representing a three-dimensional shape) showing the distance (height / floating amount) from the upper surface of the transparent table to the surface of the object to be measured is generated (paragraph [0023]. , [0046]).
Further, the phase difference is calculated by calculating the difference between the reference phase data representing the phase θ at each position of the sample surface 12a and the data representing the phase θ at each position when the inspection object A is placed. (Paragraph "0044"), the phase θ indicates the inclination from the phase 0 point in one cycle, and the phase 0 point corresponds to the first reference plane DT, and the phase 0. The inclination of the phase θ from the point is proportional to the distance from the first reference surface DT to the top surface of the table, and “by converting the phase difference into height units (S5), the height of the inspection object A at each position is high. (Paragraph [0043]), and "... the three-dimensional shape of the surface of the inspection object represented by the surface shape data can be captured with reference to the upper surface of the table ...". By determining and determining the representative point based on the upper surface of the table, a quick determination can be made with a simple process. ”(Paragraph [0007]).
Therefore, in the following description of Patent Document 1, the position of the upper surface of the table as a reference (hereinafter referred to as “table reference surface HT”) and the position of the surface of the sample are described as the height distance from the first reference surface DT. do.

"The image data taken by the measuring unit 5 is sent to the image processing unit (described later) of the computer 1. The image processing unit of the computer 1 processes the image data" in the corruption of Patent Document 1. Therefore, phase analysis is performed (S3). In phase analysis, the phase θ of the projected light pattern is calculated at the position (coordinates (x, y)) of each pixel in the image. At the position (x, y). From the description that "the brightness is represented by the following formula (1)", "each coordinate position (x, y)" is "the position of each pixel in the image (coordinates (x, y))". be.

Japanese Patent No. 5385703 (Claim 1, [0043], [0044])

<Purpose and structure of the invention of Patent Document 1> (see FIGS. 14 and 15 of the present application).
The object of the invention of Patent Document 1 described above is an object of the invention to provide an inspection device capable of rapidly measuring (inspecting) a measurement object (inspection object) having a plurality of protrusions.
To achieve the purpose of rapid measurement (inspection) of the object to be measured
An image of the same cosine wave stripe pattern projected on the upper surface of the table on which the object to be measured is not placed is taken in advance, and the phase θ at each coordinate position (x, y) of the sample surface 12a (table upper surface) is determined. The indicated data is calculated, and the data indicating the phase θ is recorded in advance in a computer as reference phase data (table reference plane HT) (see step 1 in FIG. 14 of the present application).
The surface of the measurement object having a plurality of protrusions placed on the upper surface of the table (the front surface of the measurement object seen from the front side of the measurement unit) is photographed by the imaging unit, and the photographed measurement object is photographed. The surface image is processed to represent the phase θ at each coordinate position (x, y) of the surface of the object to be measured. The phase data of the object to be measured (the height of the surface of the object to be measured from the first reference plane DT). Since it is the expressed shape data indicating the distance, it is hereinafter referred to as "first reference surface shape data") (see step 2 in FIG. 14, see [0044] in Patent Document 1).
The phase difference between the reference phase data (data indicating the table reference plane HT) and the phase data of the object to be measured at each coordinate position (x, y) is calculated, and the phase difference at each coordinate position (x, y) is calculated. Surface shape data (hereinafter referred to as "table reference surface shape data") that indicates the distance (height / floating amount) of the surface of the object to be measured from the upper surface (table reference surface HT) of the transparent table by converting it into data indicating the height. (See step 3 in FIG. 14).
Regions including each of the protrusions are specified in the XY plane in the table reference surface shape data (this data is hereinafter referred to as "table reference surface shape data for each region") (see step 4 in FIG. 14).
A representative value of the distance value at each coordinate position (x, y) from the upper surface of the table (table reference plane HT) in the specified region is determined (see step 5 in FIG. 14).
It is configured as.
The table reference surface shape data (“surface shape data” in Patent Document 1) shown in step 3 of FIG. 14 is a measurement target according to the height distance at each coordinate position (x, y) of the surface of the measurement target from the upper surface of the table. It is also data that represents the three-dimensional shape of the surface of an object.

<Core structure of Patent Document 1>
Therefore, the invention of Patent Document 1 is
(1) Refer to <step1> in FIG. 14 The table top surface is measured in the absence of a measurement object, and the height distance of the table top surface from the first reference surface DT at each coordinate position (x, y) is determined. A table reference plane HT (reference phase data (paragraph [0044])) represented by the surface shape data shown is generated and recorded in advance.
(2) Refer to <step2> in FIG. 14. First reference surface which is surface shape data indicating the height distance of the surface of the object to be measured from the first reference surface DT at each coordinate position (x, y). Generate shape data and
(3) Refer to <step3> in FIG. 14 The value of the table reference surface HT is subtracted from the value of the first reference surface shape data, and each coordinate position (x, y) of the surface of the object to be measured is calculated from the upper surface of the table. ) Generates table reference surface shape data represented by the height distance,
(4) Refer to <step4> in FIG. 14 In the table reference surface shape data, a region including each of the protrusions is specified, and each coordinate position (x, y) of each of the regions on the surface of the object to be measured is specified from the upper surface of the table. Generates surface shape data for each region of the table reference represented by the height distance in
(5) Refer to <step5> in FIG. 14 Table reference Determine the representative value of each region in the surface shape data of each region.
The above-mentioned configurations (1) to (5) are the core configurations for achieving the object of the invention, and in particular, the generation of table-referenced surface shape data achieves the object of the invention of rapid measurement (inspection). It is the core structure for doing so.

The table reference surface shape data is data indicating the distance data (data indicating the phase θ at each coordinate position (x, y)) at each coordinate position (x, y) in the entire measurement area (sample surface 12a) on the upper surface of the table. ), The measurement target is the distance data (data indicating the phase θ at each coordinate position (x, y)) at each coordinate position (x, y) over the entire surface of the surface of the measurement target. It is generated by subtracting the value of the object phase data.
Therefore, the table reference surface shape data (see step 3 in FIG. 14) is obtained from the distance value at each coordinate position (x, y) of the entire measurement area (sample surface 12a) on the upper surface of the table to the entire surface of the object to be measured. It is generated by subtracting the distance value at each coordinate position (x, y).

<Problems of the Invention of Patent Document 1>
(1) The table reference surface shape data (see step 3 in FIG. 14) is measured from the distance values at each coordinate position (x, y) in the entire measurement area (sample surface 12a) of the upper surface of the table (table reference surface HT). Since it is generated by subtracting the distance values at each coordinate position (x, y) over the entire surface of the object, it has a problem that the amount of information processing is large.

(2) Further, the measurement object phase data which is the distance data (data indicating the phase θ at each coordinate position (x, y)) at each coordinate position (x, y) over the entire surface of the measurement object is generated. Therefore, there is a problem that the amount of information processing is large.

In view of the above-mentioned drawbacks of the prior art, the present invention does not generate and use the surface shape data (“table reference surface shape data” (see step 3 of FIG. 14 of the present application)) in the invention of Patent Document 1. The purpose is to provide a measuring device for determining a representative value.

In order to achieve the above object, the present invention has the following configuration.
<< First Invention >>
A transparent table (2) having a mounting area on the upper surface, which is a region for mounting the measurement object (W), and
A reflective member provided on the upper surface of the table (2) outside the above-mentioned storage area, and
Irradiation light (3) is irradiated from below the table (2) toward the measurement object (W) placed on the upper surface of the table (2) provided below the table (2). Light irradiation means (4) and
A light receiving means (5) provided below the table (2) and receiving the reflected light of the irradiation light (3) from the measurement object (W) below the table (2).
A measuring unit (12) having the light irradiating means (4) and the light receiving means (5),
A measurement area specifying unit (7) that specifies or preliminarily specifies the measurement area (kt) of the measurement object (W), and
First region surface shape data indicating the distance at each coordinate position (x, y) of the surface of the measurement object (W) from the first reference plane (DT) in each of the measurement regions (kt). The first region surface shape data generation unit (15) that generates amd), and
In each of the measurement regions (kt), the value of the data of the second reference plane (DB) is subtracted from the value of the surface shape data (amd) of each of the first regions, and the value of the data of the second reference plane (DB) is subtracted from the value of the second reference plane (DB). Second region surface shape data generation unit (10) that generates second region surface shape data (tmd) indicating a distance at each coordinate position (x, y) on the surface of the measurement object (W) from. )When,
In each of the second region surface shape data (tmd), a second representative value (G2) which is a representative value of a value indicating a distance from the second reference plane (DB) in each of the measurement regions (kt). ) Is provided with a second representative value determination unit (17).
The first reference plane (DT) is a reference position or a reference plane on the measurement unit (12) side.
The second reference plane (DB) is a reference position or reference plane set based on the distance of the surface of the reflective member from the first reference plane (DT), or is the surface of the reflective member. It is a measuring device characterized in that it is a reference position or a reference plane set by moving a position of a distance from the first reference plane (DT) to an arbitrary or predetermined position.

<< Second invention >>
A transparent table (2) having a mounting area on the upper surface, which is a region for mounting the measurement object (W), and
A reflective member provided on the upper surface of the table (2) outside the above-mentioned storage area, and
Irradiation light (3) is irradiated from below the table (2) toward the measurement object (W) placed on the upper surface of the table (2) provided below the table (2). Light irradiation means (4) and
A light receiving means (5) provided below the table (2) and receiving the reflected light of the irradiation light (3) from the measurement object (W) below the table (2).
A measuring unit (12) having the light irradiating means (4) and the light receiving means (5),
A measurement area specifying unit (7) that specifies or preliminarily specifies the measurement area (kt) of the measurement object (W), and
First region surface shape data indicating the distance at each coordinate position (x, y) of the surface of the measurement object (W) from the first reference plane (DT) in each of the measurement regions (kt). The first region surface shape data generation unit (15) that generates amd), and
In each of the first region surface shape data (amd), a first representative value (G1) which is a representative value of a value indicating a distance from the first reference plane (DT) in each of the measurement regions (kt). ), And the first representative value determination unit (30),
The value of the data of the second reference plane (DB) is subtracted from the value of the data of the first representative value (G1), and from the second reference plane (DB) in each of the measurement regions (kt). A second representative value determination unit (11) for determining a second representative value (G2), which is a representative value of a value indicating the distance between the two, is provided.
The first reference plane (DT) is a reference position or a reference plane on the measurement unit (12) side.
The second reference plane (DB) is a reference position or reference plane set based on the distance of the surface of the reflective member from the first reference plane (DT), or is the surface of the reflective member. It is a measuring device characterized in that it is a reference position or a reference plane set by moving a position of a distance from the first reference plane (DT) to an arbitrary or predetermined position.

<< Third Invention >>
A transparent table (2) having a mounting area on the upper surface, which is a region for mounting the measurement object (W), and
A reflective member provided on the upper surface of the table (2) outside the above-mentioned storage area, and
Irradiation light (3) is irradiated from below the table (2) toward the measurement object (W) placed on the upper surface of the table (2) provided below the table (2). Light irradiation means (4) and
A light receiving means (5) provided below the table (2) and receiving the reflected light of the irradiation light (3) from the measurement object (W) below the table (2).
A measuring unit (12) having the light irradiating means (4) and the light receiving means (5),
A measurement area specifying unit (7) that specifies or preliminarily specifies the measurement area (kt) of the measurement object (W), and
Based on the light receiving information of the measurement object (W) received by the light receiving means (5), each coordinate position (x,) of the surface of the measurement object (W) from the first reference plane (DT). The first surface shape data generation unit (8) that generates the first surface shape data (asd) indicating the distance in y), and
In the first surface shape data (asd), at each coordinate position (x, y) of the surface of the measurement object (W) from the first reference plane (DT) in each of the measurement regions (kt). The first region surface shape data generation unit (9) that generates the first region surface shape data (amd) indicating the distance, and
In each of the measurement regions (kt), the value of the data of the second reference plane (DB) is subtracted from the value of the surface shape data (amd) of each of the first regions, and the value of the data of the second reference plane (DB) is subtracted from the value of the second reference plane (DB). Second region surface shape data generation unit (10) that generates second region surface shape data (tmd) indicating a distance at each coordinate position (x, y) on the surface of the measurement object (W) from. )When,
In each of the second region surface shape data (tmd), a second representative value (G2) which is a representative value of a value indicating a distance from the second reference plane (DB) in each of the measurement regions (kt). ) Is provided with a second representative value determination unit (11).
The first reference plane (DT) is a reference position or a reference plane on the measurement unit (12) side.
The second reference plane (DB) is a reference position or reference plane set based on the distance of the surface of the reflective member from the first reference plane (DT), or is the surface of the reflective member. It is a measuring device characterized in that it is a reference position or a reference plane set by moving a position of a distance from the first reference plane (DT) to an arbitrary or predetermined position.

<< Fourth Invention >>
A transparent table (2) having a mounting area on the upper surface, which is a region for mounting the measurement object (W), and
A reflective member provided on the upper surface of the table (2) outside the above-mentioned storage area, and
Irradiation light (3) is irradiated from below the table (2) toward the measurement object (W) placed on the upper surface of the table (2) provided below the table (2). Light irradiation means (4) and
A light receiving means (5) provided below the table (2) and receiving the reflected light of the irradiation light (3) from the measurement object (W) below the table (2).
A measuring unit (12) having the light irradiating means (4) and the light receiving means (5),
A measurement area specifying unit (7) that specifies or preliminarily specifies the measurement area (kt) of the measurement object (W), and
Based on the light receiving information of the measurement object (W) received by the light receiving means (5), each coordinate position (x,) of the surface of the measurement object (W) from the first reference plane (DT). The first surface shape data generation unit (8) that generates the first surface shape data (asd) indicating the distance in y), and
In the first surface shape data (asd), at each coordinate position (x, y) of the surface of the measurement object (W) from the first reference plane (DT) in each of the measurement regions (kt). The first region surface shape data generation unit (9) that generates the first region surface shape data (amd) indicating the distance, and
In each of the first region surface shape data (amd), a first representative value (G1) which is a representative value of a value indicating a distance from the first reference plane (DT) in each of the measurement regions (kt). ), And the first representative value determination unit (30),
The value of the data of the second reference plane (DB) is subtracted from the value of the data of the first representative value (G1), and from the second reference plane (DB) in each of the measurement regions (kt). A second representative value determination unit (31) for determining a second representative value (G2), which is a representative value of a value indicating the distance between the two, is provided.
The first reference plane (DT) is a reference position or a reference plane on the measurement unit (12) side.
The second reference plane (DB) is a reference position or reference plane set based on the distance of the surface of the reflective member from the first reference plane (DT), or is the surface of the reflective member. It is a measuring device characterized in that it is a reference position or a reference plane set by moving a position of a distance from the first reference plane (DT) to an arbitrary or predetermined position.

<< Fifth Invention >>
A transparent table (2) on which the object to be measured (W) is placed, and
Irradiation light (3) is irradiated from below the table (2) toward the measurement object (W) placed on the upper surface of the table (2) provided below the table (2). Light irradiation means (4) and
A light receiving means (5) provided below the table (2) and receiving the reflected light of the irradiation light (3) from the measurement object (W) below the table (2).
A measuring method for a measuring device including a measuring unit (12) having the light irradiating means (4) and the light receiving means (5).
The reference position or reference plane on the measurement unit (12) side is set as the first reference plane (DT).
The first reference position or reference plane set based on the distance of the upper surface of the table (2) from the first reference plane (DT), and the surface of the reflective member provided on the surface of the table (2). A reference position or reference plane set based on the distance from the reference plane (DT), or a position of a distance from the first reference plane (DT) on the surface of the reflective member provided on the surface of the table (2). The reference position or reference plane set by moving to an arbitrary or predetermined position is set as the second reference plane (DB).
The step of specifying or pre-specifying the measurement area (kt) of the measurement object (W),
First region surface shape data indicating the distance at each coordinate position (x, y) of the surface of the measurement object (W) from the first reference plane (DT) in each of the measurement regions (kt). Steps to generate (amd) and
In each of the measurement regions (kt), the value of the data of the second reference plane (DB) is subtracted from the value of the surface shape data (amd) of each of the first regions, and the value of the data of the second reference plane (DB) is subtracted from the value of the second reference plane (DB). ) To generate second region surface shape data (tmd) indicating the distance at each coordinate position (x, y) of the surface of the measurement object (W).
In each of the second region surface shape data (tmd), a second representative value (G2) which is a representative value of a value indicating a distance from the second reference plane (DB) in each of the measurement regions (kt). ) And the steps to determine
It is a measurement method including.

<< Sixth Invention >>
A transparent table (2) on which the object to be measured (W) is placed, and
Irradiation light (3) is irradiated from below the table (2) toward the measurement object (W) placed on the upper surface of the table (2) provided below the table (2). Light irradiation means (4) and
A light receiving means (5) provided below the table (2) and receiving the reflected light of the irradiation light (3) from the measurement object (W) below the table (2).
A measuring method for a measuring device including a measuring unit (12) having the light irradiating means (4) and the light receiving means (5).
The reference position or reference plane on the measurement unit (12) side is set as the first reference plane (DT).
The first reference position or reference plane set based on the distance of the upper surface of the table (2) from the first reference plane (DT), and the surface of the reflective member provided on the surface of the table (2). A reference position or reference plane set based on the distance from the reference plane (DT), or a position of a distance from the first reference plane (DT) on the surface of the reflective member provided on the surface of the table (2). The reference position or reference plane set by moving to an arbitrary or predetermined position is set as the second reference plane (DB).
The step of specifying or pre-specifying the measurement area (kt) of the measurement object (W),
First region surface shape data indicating the distance at each coordinate position (x, y) of the surface of the measurement object (W) from the first reference plane (DT) in each of the measurement regions (kt). Steps to generate (amd) and
In each of the first region surface shape data (amd), a first representative value (G1) which is a representative value of a value indicating a distance from the first reference plane (DT) in each of the measurement regions (kt). ) And the steps to determine
The value of the data of the second reference plane (DB) is subtracted from the value of the data of the first representative value (G1), and the second reference plane (DB) in each of the measurement regions (kt). A step of determining a second representative value (G2), which is a representative value of a value indicating a distance from
It is a measurement method including.

<< Seventh Invention >>
A transparent table (2) on which the object to be measured (W) is placed, and
Irradiation light (3) is irradiated from below the table (2) toward the measurement object (W) placed on the upper surface of the table (2) provided below the table (2). Light irradiation means (4) and
A light receiving means (5) provided below the table (2) and receiving the reflected light of the irradiation light (3) from the measurement object (W) below the table (2).
It is a measurement method of a measuring device including a measuring unit (12) having the light irradiating means (4) and the light receiving means (5).
The reference position or reference plane on the measurement unit (12) side is set as the first reference plane (DT).
The first reference position or reference plane set based on the distance of the upper surface of the table (2) from the first reference plane (DT), and the surface of the reflective member provided on the surface of the table (2). A reference position or reference plane set based on the distance from the reference plane (DT), or a position of a distance from the first reference plane (DT) on the surface of the reflective member provided on the surface of the table (2). The reference position or reference plane set by moving to an arbitrary or predetermined position is set as the second reference plane (DB).
The step of specifying or pre-specifying the measurement area (kt) of the measurement object (W),
Based on the light receiving information of the measurement object (W) received by the light receiving means (5), each coordinate position (x) of the surface of the measurement object (W) from the first reference plane (DT). , Y), the step of generating the first surface shape data (asd) indicating the distance, and
In the first surface shape data (asd), each coordinate position (x, y) of the surface of the measurement object (W) from the first reference plane (DT) in each of the measurement regions (kt). The step of generating the surface shape data (amd) of each region showing the distance in
In each of the measurement regions (kt), the value of the data of the second reference plane (DB) is subtracted from the value of the surface shape data (amd) of each of the first regions, and the second reference plane (DB) is used. A step of generating second region surface shape data (tmd) indicating a distance at each coordinate position (x, y) of the surface of the measurement object (W) from the above.
In each of the second region surface shape data (tmd), a second representative value (G2) which is a representative value of a value indicating a distance from the second reference plane (DB) in each of the measurement regions (kt). ) And the steps to determine
It is a measurement method including.

<< Eighth Invention >>
A transparent table (2) on which the object to be measured (W) is placed, and
Irradiation light (3) is irradiated from below the table (2) toward the measurement object (W) placed on the upper surface of the table (2) provided below the table (2). Light irradiation means (4) and
A light receiving means (5) provided below the table (2) and receiving the reflected light of the irradiation light (3) from the measurement object (W) below the table (2).
A measuring method for a measuring device including a measuring unit (12) having the light irradiating means (4) and the light receiving means (5).
The reference position or reference plane on the measurement unit (12) side is set as the first reference plane (DT).
The first reference position or reference plane set based on the distance of the upper surface of the table (2) from the first reference plane (DT), and the surface of the reflective member provided on the surface of the table (2). A reference position or reference plane set based on the distance from the reference plane (DT), or a position of a distance from the first reference plane (DT) on the surface of the reflective member provided on the surface of the table (2). The reference position or reference plane set by moving to an arbitrary or predetermined position is set as the second reference plane (DB).
The step of specifying or pre-specifying the measurement area (kt) of the measurement object (W),
Based on the light receiving information of the measurement object (W) received by the light receiving means (5), each coordinate position (x) of the surface of the measurement object (W) from the first reference plane (DT). , Y), the step of generating the first surface shape data (asd) indicating the distance, and
In the first surface shape data (asd), a step of generating first region surface shape data (amd) indicating a distance at each coordinate position (x, y) of each of the measurement regions (kt).
In each of the first region surface shape data (amd), a first representative value (G1) which is a representative value of a value indicating a distance from the first reference plane (DT) in each of the measurement regions (kt). ) And the steps to determine
The value of the data of the second reference plane (DB) is subtracted from the value of the data of the first representative value (G1), and from the second reference plane (DB) in each of the measurement regions (kt). The step of determining the second representative value (G2), which is the representative value of the value indicating the distance of
It is a measurement method including.

As is clear from the above description, the present invention exerts the effects described below.
<< Common features of the present invention >>
The matter common to each invention of the present invention is that the processing configuration for determining the representative value in each region is the surface shape data in the invention of Patent Document 1 (“table reference surface shape data” (see step 3 of FIG. 14 of the present application)). ) Is not generated or used (see the comparison diagram of FIG. 15 of the present application).

<< Inhibitors >>
As described in the above "<Core configuration of Patent Document 1>", the invention of Patent Document 1 is data on distances at each coordinate position (x, y) in the entire measurement area (sample surface 12a) on the upper surface of the table. From the value of the reference phase data (including the data indicating the phase θ at each coordinate position (x, y)), it is the data indicating the distance at each coordinate position (x, y) over the entire surface of the surface of the measurement object. The generation and use of table-referenced surface shape data (“surface shape data” in Patent Document 1) by subtracting the value of the phase data of the object to be measured is the core configuration for achieving the object of the invention.
However, the invention of the present application does not have a processing configuration of table reference surface shape data (“surface shape data” in Patent Document 1), which is such a core configuration of the invention of Patent Document 1, in a processing configuration for determining a representative value. It is a thing.
Then, it can be said that the invention of the present application denies the core constitution of the invention of Patent Document 1, and if so, Patent Document 1 has an obstructive factor that hinders the idea of each invention of the present application. It is appropriate to say.

Example 1 of the present specification mainly corresponds to the inventions of the third and seventh, Example 2 mainly corresponds to the inventions of the fourth and eighth, and Example 3 mainly corresponds to the first invention. 5 corresponds to the invention, and Example 4 mainly corresponds to the second and sixth inventions.

<< Effect of the first invention >>
In the first region surface shape data generation unit (15), the measurement of the surface of the object to be measured (W) is performed only in the region where only the measurement region (kt) is the measurement region, and only in each measurement region (kt). The first region surface shape data (amd), which is the measurement data, is generated.
In the second region surface shape data generation unit (10), a table is obtained from the value of the first region surface shape data (amd) to the second reference plane (DB) (position data of the surface of the firing member). By subtracting the value of the data of the reference plane set near the upper surface position of (2), the surface shape data (tmd) of each second region, which is the data of only the measurement region (kt), is generated.
Therefore, the first invention of the present application is from the surface shape data (amd) of each first region, which is the measurement data of only the measurement region (kt), to the second region, which is the data of only the measurement region (kt). It generates surface shape data (tmd).
The first region surface shape data (amd) is data indicating the distance of each measurement region (kt) at each coordinate position (x, y) of the surface of the object to be measured from the first reference plane (DT). Is.
The second region surface shape data (tmd) is data indicating the distance of each measurement region (kt) at each coordinate position (x, y) of the surface of the object to be measured from the second reference plane (DB). Is.
Therefore, the second region surface shape data (tmd) in the first invention corresponds to the second reference region surface shape data of the invention of Patent Document 1. (However, the second reference plane (DB) is not the "surface shape data" of Patent Document 1.)
Therefore, the first invention of the present application is the surface of the object to be measured from the distance values at each coordinate position (x, y) in the entire measurement area (sample surface 12a) of the upper surface of the table in the invention of Patent Document 1. The table reference surface shape data (“surface shape data” in Patent Document 1) generated by subtracting the distance values at each coordinate position (x, y) in the entire area of the above is not generated or used, and Patent Document 1 2nd reference point Since the second reference area surface shape data (tmd) corresponding to each area surface shape data is generated, the amount of information in the process of determining the representative value in each measurement area (kt). It also has the effect of reducing the amount of information processing.
That is, it is possible to quickly perform the process of determining the flatness based on the representative value of each measurement region (kt) with a small amount of information processing.

Further, the surface shape data (amd) of each region of the first invention of the first invention of the present application measures only the region having only the measurement region (kt) as the measurement region, whereas the invention of Patent Document 1 relates to the measurement. , The measurement object phase data is basically different from the distance data (data indicating the phase θ at each coordinate position (x, y)) at each coordinate position (x, y) over the entire surface of the measurement object. The first invention of the present application, in which the amount of information and the amount of information processing is measured only in a region (partial region measurement), is smaller than the invention of Patent Document 1, which is a measurement in the entire region. It realizes various processing.

<< Effect of the Second Invention >>
In the first region surface shape data generation unit (15), the measurement of the surface of the object to be measured (W) is performed only in the region where only the measurement region (kt) is the measurement region, and the measurement of each measurement region (kt) is performed. The first region surface shape data (amd), which is the data, is generated, and the data is generated.
In the first representative value determination unit (30), in the first region surface shape data (amd), the representative value of the value indicating the distance from the first reference plane (DT) in each measurement region (kt). Determine a first representative value (G1) and
By subtracting the value of the second reference plane (DB) from the value of the first representative value (G1) in each of the measurement regions (kt), the second representative value (G2) in each of the measurement regions (kt). Is what determines.
Therefore, the second invention of the present application does not generate data corresponding to the second reference region surface shape data of the invention of Patent Document 1, and the second invention is the region specifying process in the second reference region surface shape data. There is no generation of the surface shape data of each region of the reference, and there is no configuration of determining the second representative value in the surface shape data of each region of the second reference.
Therefore, the distance value at each coordinate position (x, y) of the entire surface of the object to be measured is subtracted from the distance value at each coordinate position (x, y) of the entire measurement area (sample surface 12a) on the upper surface of the table. In contrast to the invention of Patent Document 1 that generates table-referenced surface shape data which is the whole area data generated by the above, in the first region surface shape data (amd), the first in each measurement region (kt). The first representative value (G1), which is a representative value of the value indicating the distance from the reference plane (DT), is determined, and the value of the second reference plane (DB) is derived from the value of the first representative value (G1). The second invention of the present application, which determines the second representative value (G2) by subtracting, has an action that the amount of information and the amount of information processing are small in the process of determining the representative value in each measurement region (kt). It is effective and therefore realizes quick processing.

Further, in the second invention of the present application, the surface shape data (amd) of each first region is measured only in the region where only the measurement region (kt) is the measurement region, whereas the invention of Patent Document 1 is made. , The measurement object phase data is basically different from the distance data (data indicating the phase θ at each coordinate position (x, y)) at each coordinate position (x, y) over the entire surface of the measurement object. The amount of information and the amount of information processing are measured only in the area (measurement in a partial area), which is smaller than the invention of Patent Document 1 which is the measurement in the entire area. Is.
That is, it is possible to quickly perform the process of determining the flatness based on the representative value of each measurement region (kt) with a small amount of information processing.

As described in the above-mentioned "<core configuration of Patent Document 1>", the invention of Patent Document 1 describes the distances at each coordinate position (x, y) in the entire measurement area (sample surface 12a) on the upper surface of the table. From the value of the reference phase data, which is the data (data indicating the phase θ at each coordinate position (x, y)), the distance data (each coordinate position) at each coordinate position (x, y) over the entire surface of the surface of the measurement object. The table reference surface shape data generated by subtracting the value of the measurement object phase data (data indicating the phase θ in (x, y)) is the core configuration for achieving the object of the invention.
However, the second invention of the present application does not have a processing configuration of generating table-referenced surface shape data, which is such a core configuration of the invention of Patent Document 1, that is, a configuration denying such a core configuration. ..
If so, it is reasonable to say that Patent Document 1 has an inhibitory factor that hinders the arrival of the second invention of the present application.

<< Effect of the Third Invention >>
The third invention of the present application is
In the first surface shape data generation unit (8), the first surface shape data indicating the distance at each coordinate position (x, y) from the first reference plane (DT) of the surface of the measurement object (W). Generate (asd) and
In the first surface shape data (asd), the measurement region (kt), which is the region to be measured by the measurement target (W), is specified in the first surface shape data generation unit (9) of each region, and the measurement region is measured. (Kt) Generates first region surface shape data (amd) indicating the distance at each coordinate position (x, y).
In the second region surface shape data generation unit (10), in the first region surface shape data (amd), the object to be measured from the second reference plane (DB) in each of the measurement regions (kt). The second region surface shape data (tmd) indicating the distance of the surface of (W) is generated, and the surface shape data (tmd) is generated.
In the second representative value determination unit (11), it is a representative value of a value indicating the distance from the second reference plane (DB) in each measurement region (kt) of each second region surface shape data (tmd). The configuration is such that a certain second representative value (G2) is determined.

Since the measurement process for specifying the measurement region (kt) is performed in the first surface shape data (asd) indicating the distance of the measurement object (W) from the first reference plane (DT). In the third invention of the present application, the table reference surface shape data in the invention of Patent Document 1 is not generated.
The table reference surface shape data in Patent Document 1 is the data of the distance at each coordinate position (x, y) in the entire measurement area (sample surface 12a) of the upper surface of the table (phase θ at each coordinate position (x, y)). From the value of the reference phase data (data shown), it is the distance data (data indicating the phase θ at each coordinate position (x, y)) at each coordinate position (x, y) over the entire surface of the surface of the measurement object. It is generated by subtracting the value of the phase data of the object to be measured.
That is, since the third invention of the present application does not generate or use table-referenced surface shape data, which is a large amount of information in the invention of Patent Document 1, a process of determining a representative value in each measurement region (kt). In, the amount of processing information is small, and therefore rapid processing is possible.
That is, it is possible to quickly perform the process of determining the flatness based on the representative value of each measurement region (kt) with a small amount of information processing.

As described in the above-mentioned "<core configuration of Patent Document 1>", the invention of Patent Document 1 describes the distances at each coordinate position (x, y) in the entire measurement area (sample surface 12a) on the upper surface of the table. From the value of the reference phase data, which is the data (data indicating the phase θ at each coordinate position (x, y)), the distance data (each coordinate position) at each coordinate position (x, y) over the entire surface of the surface of the measurement object. The table reference surface shape data generated by subtracting the value of the measurement object phase data (data indicating the phase θ in (x, y)) is the core configuration for achieving the object of the invention.
However, the third invention of the present application does not have a processing configuration of generating table-referenced surface shape data, which is such a core configuration of the invention of Patent Document 1, that is, a configuration denying such a core configuration. ..
If so, it is reasonable to say that Patent Document 1 has an inhibitory factor that hinders the arrival of the second invention of the present application.

<< Effect of the Fourth Invention >>
The second invention of the present application is
The first surface shape data generation unit (8) generates first surface shape data (asd) indicating the distance of the surface of the object to be measured (W) from the first reference plane (DT).
In the first surface shape data (asd), the measurement region (kt), which is the region to be measured by the measurement target (W), is specified in the first surface shape data generation unit (9) of each region, and the measurement region is measured. (Kt) Generates first region surface shape data (amd) indicating the distance at each coordinate position (x, y).
In the first representative value determination unit (30), in the first region surface shape data (amd), the representative value of the value indicating the distance of each measurement region (kt) from the first reference plane (DT). Determine a first representative value (G1) and
In the second representative value determination unit (31), the first representative value (G1) is a representative value of a value indicating the distance from the second reference plane (DB) in each measurement region (kt). The configuration is such that the representative value (G2) of 2 is determined.

Since the measurement process for specifying the measurement region (kt) is performed in the first surface shape data (asd) indicating the distance of the measurement object (W) from the first reference plane (DT). In the third invention of the present application, the "table reference surface shape data"("surface shape data" in Patent Document 1) in the invention of Patent Document 1 is not generated.
The table reference surface shape data in Patent Document 1 is the data of the distance at each coordinate position (x, y) in the entire measurement area (sample surface 12a) of the upper surface of the table (phase θ at each coordinate position (x, y)). From the value of the reference phase data (data shown), it is the distance data (data indicating the phase θ at each coordinate position (x, y)) at each coordinate position (x, y) over the entire surface of the surface of the measurement object. It is generated by subtracting the value of the phase data of the object to be measured.
That is, since the third invention of the present application does not generate or use table-referenced surface shape data, which is a large amount of information in the invention of Patent Document 1, a process of determining a representative value in each measurement region (kt). In, the amount of processing information is small, and therefore rapid processing is possible.
That is, it is possible to quickly perform the process of determining the flatness based on the representative value of each measurement region (kt) with a small amount of information processing.

As described in the above-mentioned "<core configuration of Patent Document 1>", the invention of Patent Document 1 describes the distances at each coordinate position (x, y) in the entire measurement area (sample surface 12a) on the upper surface of the table. From the value of the reference phase data, which is the data (data indicating the phase θ at each coordinate position (x, y)), the distance data (each coordinate position) at each coordinate position (x, y) over the entire surface of the surface of the measurement object. "Table reference surface shape data" (“surface shape data” in Patent Document 1) generated by subtracting the value of the measurement object phase data (data indicating the phase θ in (x, y)) of the present invention. It is a core structure that achieves the purpose.
However, the fourth invention of the present application does not have a processing configuration of generating table-referenced surface shape data (“surface shape data” in Patent Document 1), which is the core configuration of the invention of Patent Document 1, that is, such. It is a structure that denies the core structure.
If this is the case, it is reasonable to assume that Patent Document 1 has an inhibitory factor that hinders the arrival of the fourth invention of the present application.

<< Effect of the Fifth Invention >>
It has the same effect as that of the first invention.

<< Effect of the Sixth Invention >>
It has the same effect as that of the second invention.

<< Effect of the Seventh Invention >>
It has the same effect as that of the third invention.

<< Effect of the Eighth Invention >>
It has the same effect as that of the fourth invention.
It has the same effect as that of the fourth invention.

The schematic block diagram of the mechanical part of the apparatus of Example 1 of this invention. The block diagram of Example 1 of this invention. The flowchart which shows the process of Example 1 of this invention. The schematic diagram which represented the point part of the process of Example 1 of this invention as an image. The block diagram of Example 2 of this invention. The flowchart which shows the process of Example 2 of this invention. The schematic diagram which represented the point part of the process of Example 2 of this invention as an image. The block diagram of Example 3 of this invention. The flowchart which shows the process of Example 3 of this invention. The schematic diagram which represented the point part of the process of Example 3 of this invention as an image. The block diagram of Example 4 of this invention. The flowchart which shows the process of Example 4 of this invention. The schematic diagram which represented the point part of the process of Example 4 of this invention as an image. A schematic diagram showing the point part of the process of the conventional technology as an image. Schematic diagram showing the point part of the process as an image comparing the prior art and the embodiment of the present invention. The block diagram of Example 5 of this invention. The schematic diagram which represented the point part of the process of Example 5 of this invention as an image. The front view which made the measuring part side of Example 5 of this invention a front, and looked at the table side from the front. The front view which made the measuring part side of Example 6 of this invention a front, and looked at the table side from the front. The schematic diagram which represented the point part of the process of Example 7 of this invention as an image. The front view which made the measuring part side of Example 7 of this invention a front, and looked at the table side from the front.

Hereinafter, examples of the best mode for carrying out the present invention will be described. However, the present invention is not intended to be limited to these examples only. Further, in the description of the embodiments described later, the same components of the above-described embodiments are designated by the same reference numerals, and duplicate description will be omitted.

In the first embodiment of the present invention shown in FIGS. 1 to 4, the measuring device 1 has the following configuration. (The first embodiment corresponds to the third and seventh embodiments of the invention.)
<Definition>
The Z-axis is a linear axis from the measurement unit located below to the transparent table located above.
The X-axis is a horizontal axis on a plane perpendicular to the Z-axis.
The Y-axis is a vertical axis on a plane perpendicular to the Z-axis, and is an axis orthogonal to the X-axis on the plane.
The XY plane is a plane including the X-axis and the Y-axis that are orthogonal to the Z-axis at right angles.
The height distance is a distance in the Z-axis direction.
Each coordinate position (x, y) is each measurement position in the XY plane.
The "measurement area scanning" is a scanning area for measuring the entire area of the measurement object W or the entire area of the designated measurement area, which is a designated measurement area. Therefore, the measuring unit 12 has a plurality of scanning areas. (1st scanning area, 2nd scanning area ... nth scanning area (see FIG. 18)) is included.

<Configuration of measuring device 1>
A transparent table 2 on which a measurement object W having a plurality of protrusions wt on the lower side or the side side is placed, and
A light irradiation means 4 that irradiates the irradiation light 3 from below the table 2 toward the measurement object W placed on the upper surface of the table 2 provided below the table 2.
A light receiving means 5 provided below the table 2 for receiving the reflected light of the irradiation light 3 from the object W to be measured below the table 2.
A measuring unit 12 having a light irradiating means 4 and a light receiving means 5,
A reflective member 36 provided outside the installation area of the object W to be measured on the upper surface of the table 2 (here, a ceramic paint is applied and adhered, but a reflector may be placed on the reflective member 36 or the like. .),
With a control unit 21
The control unit 21
The reference position or reference plane on the measurement unit 12 side is set as the first reference plane DT.
The reference position or reference plane set based on the distance from the first reference plane DT of the upper surface of the table 2 (distance from the first reference plane DT to the upper surface of the table 2), the surface of the table 2 (the upper surface of the table 2). The reference position or reference surface set based on the distance from the first reference surface DT of the surface of the reflection member 36 provided on the lower surface), or the reflection provided on the surface of the table 2 (upper surface or lower surface of the table 2). The reference position or reference plane set by moving the position of the surface of the member 36 from the first reference plane DT to an arbitrary or predetermined position is set as the second reference plane DB.
The area to be measured on the surface of the object to be measured W is defined as the measurement area kt.
A second indicating the distance at each coordinate position (x, y) from the first reference surface DT of the surface of the measurement object W based on the measurement object light reception information wG of the measurement object W received by the light receiving means 5. The first surface shape data generation unit 8 that generates the surface shape data asd of 1 and
In the first surface shape data asd, the distance information of each measurement area kt is extracted, and each first area surface shape data amd indicating the distance at each coordinate position (x, y) is generated. Surface shape data generation unit 9 and
In the first region surface shape data amd, the second region surface shape data generation that generates the second region surface shape data tmd indicating the distance of the surface of the measurement target W from the second reference surface DB. Part 10 and
In the second region surface shape data tmd, a second representative value determining unit that determines a second representative value G2, which is a representative value of a value indicating a distance from the second reference plane DB in each measurement region kt. 11 and
The configuration includes a determination unit 19 for determining whether the distribution of the second representative value G2 satisfies a preset standard.

Here, the light irradiation means 4 uses a laser beam as the irradiation light 3.
The light receiving means 5 may be a CMOS image sensor or a CCD image sensor.
As the measuring method, an optical cutting method or a phase shift method is preferable.
However, the light irradiation means, the light receiving means, and the measurement method are not limited to the above.

The transparent table 2 is transparent such as a quartz glass member, and the irradiation light 3 (here, a laser beam) is transmitted through the table 2, and the reflected light at a level that can be received (detected) by the light receiving means 5 is emitted. It does not occur. Therefore, there is no light receiving information in the table 2.

<Setting example 1 of the second reference plane DB>
In the second reference surface DB, in the first embodiment, the surface of the reflective member 36 provided on the upper surface of the table 2 is photographed (light-received) by the light receiving means 5, and the surface is photographed (light-received) at arbitrary or predetermined three or four places. A region is specified, and the representative value points of the three or four regions (the shortest distance position point, the longest distance position point, or the average value point of the distance at each coordinate position (x, y) is set in the center of the region. (Points, etc.) are determined, and the plane connecting the three or four representative value points is used as the second reference plane DB, and if necessary, it is moved up and down by a predetermined distance, or the operator. The second reference plane DB is set in the upper surface position of the table 2 or in the vicinity of the upper surface position of the table including the upper surface position by moving the table 2 up and down by the positioning operation or the automatic positioning operation.
The reflective member may be provided on the lower surface of the table 2.

The reflective member 36 is provided outside the mounting area of the measurement object W.
In the present invention, in the state where the measurement object W is placed on the upper surface of the reflection member 36, (1) the measurement is performed by being blocked by the reflection member 36 on the surface portion of the measurement object W of the reflection member 36 portion. (2) The portion of the object to be measured (W) on the reflective member 36 is positioned so as to rise from the upper surface of the table 2, and the object W to be measured is accurately placed on the upper surface of the table 2 corresponding to the substrate. (3) The entire surface of the surface of the object W to be measured and the surface of the reflective member 36 cannot be measured at the same time, which makes it impossible to achieve the object of the present invention.

As shown in Examples 5 and 6 (see FIGS. 16, 18, 19, and 21), the mounting area of the object W to be measured is such that the positioning portion 61 in the form of a quadrangular enclosure is placed on the upper surface of the table 2. It is preferable to provide the inner region of the positioning portion 61 as the mounting region 62. The reflective member 36 is provided in the outer region of the mounting region 62.

The setting of the second reference plane DB is not limited to the above, and may be as follows.
(1) For example, a table 2 whose upper surface position itself is measured and set as a second reference surface DB.
(2) For example, the measurement object W placed on the upper surface of the table 2 with the protrusion wt facing downward is located at the position where the distance from the first reference surface DT is the shortest among the protrusion wt. For example, a plane in which three points are specified and a plane connecting the three points is set as a second reference plane DB, for example, a plane in which two points are specified and the plane connecting the two points is set as a second reference plane DB, for example. A plane in which one point is specified and the one point position is expanded to the upper surface of the table 2 or a plane parallel to the first reference plane DT is set as the second reference plane DB.
(3) For example, the surface of the reflective member 36 provided on the upper surface or the lower surface (here, the upper surface) of the table 2 is photographed (received) by the light receiving means 5, and for example, any three regions are specified, and the three regions are specified. A representative value point of the region (the shortest distance position point, the longest distance position point, or the average value point of the distances at each coordinate position (x, y) is set as the center point of the region, etc.) is determined, and the three are The plane connecting the representative value points of the place is set as the second reference plane DB,
For example, specifying four or more points and finding the plane from those points using the least squares method or the pseudo-inverse matrix.
For example, two points are specified and a plane connecting the two points is set as a second reference plane DB.
For example, a plane in which one point is specified and the position of the one point is expanded to the upper surface of the table 2 or a plane parallel to the first reference plane DT is set as the second reference plane DB.
(4) For example, a reference plane parallel to the first reference plane DT may be set in the vicinity of the upper surface of the table to serve as a second reference plane DB.

<Specification of measurement area kt>
(1) To specify the measurement area kt, the XY plane image of the shade image nG represented by the measurement object brightness information wmd is displayed on the display 33, and the measurement area is designated by surrounding the measurement area with a frame or the like by operating the mouse or the like. It is preferable to specify the frame as the measurement area kt.
The acquisition and generation of the measurement object brightness information wmd, the generation of the grayscale image nG, and the specification of the measurement area kt may be performed before or after the measurement scan of the measurement object W, respectively, or as the first surface shape data asd. It may be before or after the generation of. In the first surface shape data asd, the one in which the first area surface shape data am indicating the distance at each coordinate position (x, y) of the measurement area kt and the measurement area kt is generated is the above-mentioned item. It is the technical scope of the present invention regardless of the time of production or the time of acquisition.
The shade image is a black-and-white shade image (grayscale image, for example, 256 gradations), a black-and-white binary image, a color shade image, a color binary image, and the like.
(2) Further, the measurement area kt may be specified based on the CAD data on the surface of the measurement object W. In this case as well, as in the case of (1) above, the measurement area kt may be specified at any time, and in the first surface shape data asd, each coordinate position (x, y) of the measurement area kt and the measurement area kt is used. It is the technical scope of the present invention that the surface shape data am of each of the first regions indicating the distances in the above is generated regardless of the generation time and acquisition time of the above items.

The specification of the measurement area kt is not limited to (2) above.
For example, the measurement for obtaining the luminance information wmd of the object to be measured and the first surface shape data asd may be performed by separate measurement scans (measurement scans that are not together). For example, in the first measurement scan, the brightness of the surface of the object W to be measured is measured, the XY plane of the shade image represented by the brightness information is displayed on the display, and the measurement area kt is specified (specified) by a frame. )Remember. In the second measurement scan, the height distance of the object to be measured W is measured (the luminance is not measured), and the first surface shape data asd is generated.
For example, the data obtained by acquiring the measurement area kt from the CAD data of the measurement target W may be stored in advance, for example.
When the first measurement scan is completed, the second measurement scan is automatically performed.
Further, a shading image taken by a camera or the like different from that of the light receiving means 5 may be used, or the measurement area kt acquired in the shading image may be stored in advance, for example.

(3) The area kt is specified by the display 33 by displaying a frame indicating the measurement area kt specified based on the CAD data before the light and shade image nG, and setting the measurement area as the light and shade image nG. It is also possible to move the frame to an accurate position by operating the mouse, keyboard, or the like to specify the measurement area kt at the displaced portion.

<Processing step>
The processing steps will be described mainly with reference to FIGS. 1 and 3.
step1 <Measurement start>
step2 <Acquisition of distance information and brightness information>
The light-receiving information fG of the reflective member and the light-receiving information wG of the measurement object acquired by scanning the measurement area by the measurement unit 12 include height distance information of the measurement object W and the reflection member 36, each coordinate position (x, y) information, and luminance. Information is included and each is stored.
(A1) In the reflection member surface shape data generation unit 22, reflection indicating a distance at each coordinate position (x, y) of the surface of each reflection member 36 from the first reference surface DT based on the reflection member light receiving information fG. The member surface shape data fsd is generated and stored in the reflective member surface shape data storage unit 50.
(A2) In the reflective member luminance information generation unit 23, based on the reflective member light receiving information fG, the reflective member luminance information ud (each coordinate position (x, y) of the surface of each reflective member 36, which is the luminance information of each reflective member 36. The luminance information) in) is generated and stored in the reflecting member luminance information storage unit 51.
(B1) Distance information of the measurement object W in the first surface shape data generation unit 8 based on the light receiving information wG of the measurement object (each coordinate position of the surface of the measurement object W from the first reference surface DT (b1). The first surface shape data asd) indicating the distance in x and y) is generated and stored in the first surface shape data storage unit 52.
(B2) Based on the light receiving information wG of the measurement target, the measurement target brightness information wmd (luminance information at each coordinate position (x, y) on the surface of the measurement target W), which is the brightness information of the measurement target W, is It is stored in the measurement object brightness information storage unit 53.
Although the case where there are a plurality of reflective members 36 is described, the reflective member 36 may be in a form of surrounding the outer periphery of the measurement area with one enclosure.

step3 <Display of brightness information and distance information on the display>
When the reflective member surface shape data fsd, the reflective member brightness information umd, the first surface shape data asd, and the measurement object brightness information wmd are acquired, the display 33 (monitor) automatically displays (1) the reflective member brightness information. The overlapping form of the XY plane image of the reflection member shading image by umd and the XY plane image of the reflection member surface shape data fsd is represented by the XY plane which is the plane seen from the measurement unit 12 side (the plane seen from the Z axis direction). The reflected member brightness information umd and the reflective member surface shape data fsd (bottom view in the drawing) are displayed. (2) Measurement target brightness information wmd measurement target shading image and first surface shape data asd The shape that overlaps with is the shape seen from the measurement unit 12 side (front) (measurement object brightness information wmd represented by the XY plane seen from the Z-axis direction, the first surface shape data asd, and display on the display. Is displayed on the front view of the measurement object side as seen from the measurement unit 12 side (front) in the drawing.

step4 <Specify area>
In the XY plane image of the reflection member shading image by the reflection member brightness information umd displayed on the display 33 and the XY plane image of the measurement target shading image by the measurement object brightness information wmd, for example, by operating the mouse pointer. (1) Reflective member area ft is specified by enclosing each of the three places of the appropriate position of the light and shade image with a frame (for example, a square frame that can be freely changed in size and can be copied and pasted). (2) The measurement area kt is specified in a form in which each of the protrusions wt of the shading screen of the object to be measured is surrounded by a frame (for example, a square frame whose size can be changed and copy / paste is possible).

step5 <Memory and identification of area>
Click the displayed execute button (not shown).
The reflective member region specifying unit 37 identifies and stores the reflective member region data ftd, which is the data of the designated reflective member region ft. At this time, the reflective member region ft is positioned in the reflective member surface shape data fsd.
The measurement area specifying unit 7 identifies the designated measurement area kt and stores the measurement area data ktd, which is the data thereof, in the measurement area storage unit 72. At this time, the measurement region kt is positioned in the first surface shape data asd.

step6 <Setting of 2nd reference plane DB>
For example, the "second reference plane setting button" displayed on the display 33 is clicked to instruct the setting of the second reference plane DB.
When the setting of the second reference plane is instructed, in the second reference plane setting unit 40, for example, the representative value points (representative of 3 points to 4 points) of the reflective member region ft at each of 3 or 4 places. The value point) is determined, and a second reference plane DB composed of a plane connecting the representative value points of 3 to 4 points is generated. If necessary, the second reference plane DB is moved up and down on the screen of the display 33 to determine the position and complete the setting. The second reference plane data DBd, which is the data of the set second reference plane DB, is stored in the second reference plane data storage unit 14.
Further, the setting of the second reference plane DB may be set automatically when scanning is performed.

step7 <Generation of first region surface shape data amd>
For example, clicking the "each area data generation button" displayed on the display 33 instructs the generation of the first area surface shape data amd.
At this time, in the first surface shape data asd, the measurement area kt is already specified by the measurement area kt already located in the first surface shape data asd.
When the generation is instructed, the first region surface shape data generation unit 9 extracts the distance information of each measurement region kt and indicates the distance at each coordinate position (x, y). The shape data amd is generated and stored in the first region surface shape data storage unit 55.

step8 <Generation of surface shape data tmd of each second region>
When the first region surface shape data amd is generated, the second region surface shape data generation unit 10 automatically generates the first region surface shape data amd from the second reference surface DB. The second region surface shape data tmd indicating the distance between the surfaces of the measurement target W is generated and stored in the second region surface shape data storage unit 56.

step9 <Determining the second representative value G2>
When the second region surface shape data tmd is generated, the second representative value determination unit 11 automatically determines the second reference in each of the measurement regions kt in the second region surface shape data tmd. A second representative value G2, which is a representative value of a value indicating a distance from the surface DB, is determined, and the second representative value data G2d, which is the data, is stored in the second representative value storage unit 57.

step10 <judgment>
When the second representative value data G2d is generated, the determination unit 19 determines whether the distribution of the second representative value G2 satisfies a preset standard by automatic or manual operation, and the determination unit 19 determines whether or not the distribution of the second representative value G2 satisfies a preset standard. The determination data jud, which is data, is stored in the determination data storage unit 58.

Step4 to step9 to step10 may be processed automatically.
Further, if the measurement area kt is stored in advance before the measurement of the measurement object W, the processing may be automatically performed except for the operation of designating the reflection member area ft.
Further, when the second reference plane DB is stored in advance before the measurement and the measurement area kt is stored in advance before the measurement, all steps are automatically executed when the measurement is started. You may do so.

In the first embodiment, a second surface shape data generation unit 59 for generating the second surface shape data tsd is provided, and the second surface shape data tsd is stored in the second surface shape data storage unit 60. Will be done.
The second surface shape data tsd is processed by subtracting the value at each coordinate position (x, y) of the second reference plane data DBd from the value at each coordinate position (x, y) of the first surface shape data asd. It is the data showing the distance at each coordinate position (x, y) generated by the above, and it is the 3D data showing the three-dimensional shape of the surface of the W of the measurement object, and the shape of the measurement object W is three-dimensionally displayed on the display. It can be displayed in shape. However, the first surface shape data asd is also data representing the three-dimensional shape of the surface of W of the measurement target, which indicates the distance from the first reference plane DT.
The second surface shape data tsd is not used in the process of generating (identifying, determining) the second representative value (G).
Although the second surface shape data tsd is generated in Examples 3 and 4, it is omitted in the drawing.

<Generation of second surface shape data (tsd)>
[Appendix A1]
A transparent table (2) on which the object to be measured (W) is placed, and
Irradiation light (3) is irradiated from below the table (2) toward the measurement object (W) placed on the upper surface of the table (2) provided below the table (2). Light irradiation means (4) and
A light receiving means (5) provided below the table (2) and receiving the reflected light of the irradiation light (3) from the measurement object (W) below the table (2).
A measuring unit (12) having the light irradiating means (4) and the light receiving means (5),
A measurement area specifying unit (7) that specifies or preliminarily specifies the measurement area (kt) of the measurement object (W), and
First region surface shape data indicating the distance at each coordinate position (x, y) of the surface of the measurement object (W) from the first reference plane (DT) in each of the measurement regions (kt). The first region surface shape data generation unit (15) that generates amd), and
In each of the measurement regions (kt), the value of the data of the second reference plane (DB) is subtracted from the value of the surface shape data (amd) of each of the first regions, and the value of the data of the second reference plane (DB) is subtracted from the value of the second reference plane (DB). Second region surface shape data generation unit (10) that generates second region surface shape data (tmd) indicating a distance at each coordinate position (x, y) on the surface of the measurement object (W) from. )When,
In each of the second region surface shape data (tmd), a second representative value (G2) which is a representative value of a value indicating a distance from the second reference plane (DB) in each of the measurement regions (kt). ), And the second representative value determination unit (17),
Based on the light receiving information of the measurement object (W) received by the light receiving means (5), each coordinate position (x) of the surface of the measurement object (W) from the first reference plane (DT). , Y), the first surface shape data generation unit (8) that generates the first surface shape data (asd) indicating the distance, and
The second value is obtained by subtracting the value at each coordinate position (x, y) of the second reference plane (DB) from the value at each coordinate position (x, y) of the first surface shape data (asd). A second surface shape data generation unit (59) that generates a second surface shape data (tsd) representing the surface shape of the measurement object (W) from the reference surface (DB) of the above.
The first reference plane (DT) is a reference position or a reference plane on the measurement unit (12) side.
The second reference plane (DB) is a reference position or a reference plane set based on the distance of the upper surface of the table (2) from the first reference plane (DT), and is the reference plane of the table (2). A reference position or reference plane set based on the distance from the first reference plane (DT) of the surface of the reflective member provided on the surface, or the surface of the reflective member provided on the surface of the table (2). A reference position or a reference plane set by moving the position of the distance from the first reference plane (DT) to an arbitrary or predetermined position.
A measuring device characterized by being configured as described above.
[Appendix A2]
A transparent table (2) on which the object to be measured (W) is placed, and
Irradiation light (3) is irradiated from below the table (2) toward the measurement object (W) placed on the upper surface of the table (2) provided below the table (2). Light irradiation means (4) and
A light receiving means (5) provided below the table (2) and receiving the reflected light of the irradiation light (3) from the measurement object (W) below the table (2).
A measuring unit (12) having the light irradiating means (4) and the light receiving means (5),
A measurement area specifying unit (7) that specifies or preliminarily specifies the measurement area (kt) of the measurement object (W), and
First region surface shape data indicating the distance at each coordinate position (x, y) of the surface of the measurement object (W) from the first reference plane (DT) in each of the measurement regions (kt). The first region surface shape data generation unit (15) that generates amd), and
In each of the first region surface shape data (amd), a first representative value (G1) which is a representative value of a value indicating a distance from the first reference plane (DT) in each of the measurement regions (kt). ), And the first representative value determination unit (30),
The value of the data of the second reference plane (DB) is subtracted from the value of the data of the first representative value (G1), and from the second reference plane (DB) in each of the measurement regions (kt). A second representative value determination unit (11) that determines a second representative value (G2), which is a representative value of a value indicating the distance between the two.
Based on the light receiving information of the measurement object (W) received by the light receiving means (5), each coordinate position (x) of the surface of the measurement object (W) from the first reference plane (DT). , Y), the first surface shape data generation unit (8) that generates the first surface shape data (asd) indicating the distance, and
The second value is obtained by subtracting the value at each coordinate position (x, y) of the second reference plane (DB) from the value at each coordinate position (x, y) of the first surface shape data (asd). It is provided with a "second surface shape data generation unit (59)" that generates a second surface shape data (tsd) representing the surface shape of the measurement object (W) from the reference surface (DB) of the above.
The first reference plane (DT) is a reference position or a reference plane on the measurement unit (12) side.
The second reference plane (DB) is a reference position or a reference plane set based on the distance of the upper surface of the table (2) from the first reference plane (DT), and is the reference plane of the table (2). A reference position or reference plane set based on the distance from the first reference plane (DT) of the surface of the reflective member provided on the surface, or the surface of the reflective member provided on the surface of the table (2). A reference position or a reference plane set by moving the position of the distance from the first reference plane (DT) to an arbitrary or predetermined position.
A measuring device characterized by being configured as described above.
[Appendix A3]
A transparent table (2) on which the object to be measured (W) is placed, and
Irradiation light (3) is irradiated from below the table (2) toward the measurement object (W) placed on the upper surface of the table (2) provided below the table (2). Light irradiation means (4) and
A light receiving means (5) provided below the table (2) and receiving the reflected light of the irradiation light (3) from the measurement object (W) below the table (2).
A measuring unit (12) having the light irradiating means (4) and the light receiving means (5),
A measurement area specifying unit (7) that specifies or preliminarily specifies the measurement area (kt) of the measurement object (W), and
Based on the light receiving information of the measurement object (W) received by the light receiving means (5), each coordinate position (x,) of the surface of the measurement object (W) from the first reference plane (DT). The first surface shape data generation unit (8) that generates the first surface shape data (asd) indicating the distance in y), and
In the first surface shape data (asd), each coordinate position (x, y) of the surface of the measurement object (W) from the first reference plane (DT) in each of the measurement regions (kt). The first region surface shape data generation unit (9) that generates the first region surface shape data (amd) indicating the distance in
In each of the measurement regions (kt), the value of the data of the second reference plane (DB) is subtracted from the value of the surface shape data (amd) of each of the first regions, and the value of the data of the second reference plane (DB) is subtracted from the value of the second reference plane (DB). Second region surface shape data generation unit (10) that generates second region surface shape data (tmd) indicating a distance at each coordinate position (x, y) on the surface of the measurement object (W) from. )When,
In each of the second region surface shape data (tmd), a second representative value (G2) which is a representative value of a value indicating a distance from the second reference plane (DB) in each of the measurement regions (kt). ), And the second representative value determination unit (11),
The second value is obtained by subtracting the value at each coordinate position (x, y) of the second reference plane (DB) from the value at each coordinate position (x, y) of the first surface shape data (asd). A second surface shape data generation unit (59) that generates a second surface shape data (tsd) representing the surface shape of the measurement object (W) from the reference surface (DB) of the above.
The first reference plane (DT) is a reference position or a reference plane on the measurement unit (12) side.
The second reference plane (DB) is a reference position or a reference plane set based on the distance of the upper surface of the table (2) from the first reference plane (DT), and is the reference plane of the table (2). A reference position or reference plane set based on the distance from the first reference plane (DT) of the surface of the reflective member provided on the surface, or the surface of the reflective member provided on the surface of the table (2). A reference position or a reference plane set by moving the position of the distance from the first reference plane (DT) to an arbitrary or predetermined position.
A measuring device characterized by being configured as described above.
[Appendix A4]
A transparent table (2) on which the object to be measured (W) is placed, and
Irradiation light (3) is irradiated from below the table (2) toward the measurement object (W) placed on the upper surface of the table (2) provided below the table (2). Light irradiation means (4) and
A light receiving means (5) provided below the table (2) and receiving the reflected light of the irradiation light (3) from the measurement object (W) below the table (2).
A measuring unit (12) having the light irradiating means (4) and the light receiving means (5),
A measurement area specifying unit (7) that specifies or preliminarily specifies the measurement area (kt) of the measurement object (W), and
Based on the light receiving information of the measurement object (W) received by the light receiving means (5), each coordinate position (x,) of the surface of the measurement object (W) from the first reference plane (DT). The first surface shape data generation unit (8) that generates the first surface shape data (asd) indicating the distance in y), and
In the first surface shape data (asd), each coordinate position (x, y) of the surface of the measurement object (W) from the first reference plane (DT) in each of the measurement regions (kt). The first region surface shape data generation unit (9) that generates the first region surface shape data (amd) indicating the distance in
In each of the first region surface shape data (amd), a first representative value (G1) which is a representative value of a value indicating a distance from the first reference plane (DT) in each of the measurement regions (kt). ), And the first representative value determination unit (30),
The value of the data of the second reference plane (DB) is subtracted from the value of the data of the first representative value (G1), and from the second reference plane (DB) in each of the measurement regions (kt). A second representative value determination unit (31) that determines a second representative value (G2), which is a representative value of a value indicating the distance between the two.
The second value is obtained by subtracting the value at each coordinate position (x, y) of the second reference plane (DB) from the value at each coordinate position (x, y) of the first surface shape data (asd). A second surface shape data generation unit (59) for generating a second surface shape data (tsd) representing the surface shape of the measurement object (W) from the reference surface (DB) is provided.
The first reference plane (DT) is a reference position or a reference plane on the measurement unit (12) side.
The second reference plane (DB) is a reference position or a reference plane set based on the distance of the upper surface of the table (2) from the first reference plane (DT), and is the reference plane of the table (2). A reference position or reference plane set based on the distance from the first reference plane (DT) of the surface of the reflective member provided on the surface, or the surface of the reflective member provided on the surface of the table (2). A reference position or a reference plane set by moving the position of the distance from the first reference plane (DT) to an arbitrary or predetermined position.
A measuring device characterized by being configured as described above.

The present invention can be easily carried out by those skilled in the art by using a measurement system including a ready-made measuring unit and a controller provided by a company. An example of a ready-made measurement system is introduced below.
<Example of measurement unit of phase shift method>
For example, a measurement system (manufactured by KEYENCE CORPORATION) consisting of an irradiation unit consisting of two left and right projectors, a measurement unit equipped with a camera (light receiving unit / light detection unit) provided in the center, and a controller using the phase shift method as the measurement method. "XG-8000 series XR-HT40MD") is provided. In this method, multiple stripe patterns (striped patterns) projected at high speed from two left and right projectors on the sample are photographed (received) by the central camera (light detection unit / light receiving unit), and the measurement unit side. The height distance of each coordinate position (x, y) from the reference position to the surface of the sample is measured and acquired, and the three-dimensional shape data represented by the height of each coordinate position (x, y) and each coordinate position. The brightness level at (x, y) can be obtained.

<Example of measurement unit of optical cutting method>
For example, there is a measurement system consisting of a measurement unit and a controller of the "LJ-V7000 series" manufactured by KEYENCE CORPORATION, which uses the optical cutting method as the measurement method. Since the optical cutting method is a method of acquiring the shape (profile) of a line-shaped cut surface, the cutting position for optical cutting is continuously changed in one direction with respect to the sample to continuously profile (line). The shape of the cut surface) is acquired, and the obtained profiles are combined to acquire the three-dimensional shape data which is a distance image and the brightness level at each coordinate position (x, y). The irradiation light is a 405 nm blue-purple laser beam.
For example, the Z-axis (height) repeatability (variation when the fixed point of the object is repeatedly measured) is 0.2 μm or 0.4 μm.
<Example of confocal measurement unit>
For example, there is a measurement system consisting of a measurement unit and a controller of "CL-3000 series LT-9000 series" manufactured by KEYENCE CORPORATION, which uses a confocal method as a measurement method. This is designed so that the light projection (irradiation) and the light reception are coaxial, and only the light that is in focus on the sample is focused on one point on the pinhole, and the focusing position is set for each wavelength. The height distance of the object is measured by irradiating the object with different light and detecting the wavelength focal position from the received light spectrum. By scanning this irradiation / light receiving unit in the XY directions, it is possible to obtain three-dimensional shape data and the luminance level at each coordinate position (x, y).
The measurement system example described above is an example, and a plurality of companies provide a measurement system including various measurement units and controllers.

Then, in the ready-made measuring unit and controller system provided by such a manufacturer, the first reference plane DT is already set or is set on the irradiation light unit side.

In the second embodiment of the present invention shown in FIGS. 5 to 7, the measuring device 18 has the following configuration. (The second embodiment corresponds to the fourth and eighth embodiments of the invention.)
Steps 1 to 7 and step 10 are the same as those of the first embodiment (therefore, the description thereof will be omitted), and the main difference is that steps 8 and 9 are as follows.

step8 <Determining the first representative value G1>
When the first region surface shape data amd is generated, the first representative value determination unit 30 automatically determines the measurement region kt from the first reference surface DT in the first region surface shape data amd. A first representative value G1 which is a representative value of a value indicating each distance is determined, and the first representative value data G1d which is the data is stored in the first representative value data storage unit 58.

step9 <Determining the second representative value G2>
When the first representative value G1 is determined, the second representative value determination unit 31 automatically determines the representative value of the value indicating the distance from the second reference plane DB in the first representative value G1. A certain second representative value G2 is determined, and the second representative value data G2d, which is the data thereof, is stored in the second representative value storage unit 57.

Since it is based on the above steps, the second region surface shape data generation unit 10 in the first embodiment is not provided, so that the second region surface shape data tmd is not generated, and thus each of the second regions. The region surface shape data storage unit 56 is not provided, and a first representative value determination unit 30, which is not provided in the first embodiment, is provided, so that the first representative value data G1d is generated, and thus the first representative value data G1d is generated. The representative value data storage unit 58 of the above is provided, and the process of determining the second representative value is different.

In the third embodiment of the present invention shown in FIGS. 9 to 10, the measuring device 26 has the following configuration. (The third embodiment corresponds to the first and fifth embodiments of the invention.)

<Structure of measuring device 26>
A transparent table 2 on which a measurement object W having a plurality of protrusions wt on the lower side or the side surface side is placed, and
A light irradiation means 4 that irradiates the irradiation light 3 from below the table 2 toward the measurement object W placed on the upper surface of the table 2 provided below the table 2.
A light receiving means 5 provided below the table 2 for receiving the reflected light of the irradiation light 3 from the object W to be measured below the table 2.
A measuring unit 12 having a light irradiating means 4 and a light receiving means 5,
A reflective member 36 provided outside the installation area of the object W to be measured on the upper surface of the table 2 (here, a ceramic paint is applied and adhered, but a reflector may be placed on the reflective member 36 or the like. ),
With a control unit 21
The control unit 21
The reference position or reference plane on the measurement unit 12 side is set as the first reference plane DT.
A reference position or reference surface set based on the distance from the first reference surface DT of the upper surface of the table 2, and the first reference of the surface of the reflective member 36 provided on the surface of the table 2 (upper surface or lower surface of the table 2). A reference position or reference surface set based on the distance from the surface DT, or a position of the distance from the first reference surface DT of the surface of the reflective member 36 provided on the surface of the table 2 (upper surface or lower surface of the table 2). Is set to an arbitrary position and the set reference position or reference plane is set as the second reference plane DB.
(Since the above configuration is the same as that of the first embodiment and the second reference plane DB is the same as that of the first embodiment, the description thereof will be omitted.)
Based on the shading image of the surface of the measurement object W or the CAD data of the measurement object W, the measurement area specifying unit 7 for specifying or pre-specifying the measurement area kt to be measured on the surface of the measurement object W, and the measurement area specifying unit 7.
The measurement of the surface of the object W is measured only in the area where only the measurement area kt is the measurement area, and each coordinate position (x, y) in each coordinate position (x, y) in the XY plane of each measurement area kt (x). , Y), the first region surface shape data generation unit 15 that generates the first region surface shape data amd indicating the distance of the surface of the measurement object W from the first reference surface DT.
The value of the data of the second reference plane DB is subtracted from the value of the surface shape data amd of each first region, the distance information of each of the measurement regions kt is extracted, and the measurement object from the second reference plane DB is extracted. The second region surface shape data generation unit 10 that generates the second region surface shape data tmd indicating the distance at each coordinate position (x, y) of the surface of W, and the
In the second region surface shape data tmd, a second representative value determining unit that determines a second representative value G2, which is a representative value of a value indicating a distance from the second reference plane DB in each measurement region kt. 17 and
The configuration includes a determination unit 19 for determining whether the distribution of the second representative value G2 satisfies a preset standard.

The measuring unit 12 is driven and traveled in either the X-axis direction or the Y-axis direction by a driving means (not shown) to perform scanning.
The operation unit 12 may be fixed, and the table 2 may be driven and traveled in either the X-axis direction or the Y-axis direction to perform scanning.

step1 <Preliminary memory of measurement area kt>
The measurement area specifying unit 7 specifies in advance the measurement area kt to be measured based on the grayscale image of the surface of the measurement object W or the CAD data of the measurement object W, and stores the measurement area data ktd which is the data. ..

step2 <Preliminary memory of the second reference plane DB>
The second reference plane DB is set in advance, and the second reference plane data DBd, which is the data thereof, is stored in the second reference plane data storage unit 14.

step3 <Measurement start>
step4 <Acquisition of distance information only in the measurement area kt>
In the first region surface shape data generation unit 15, the measurement of the surface of the measurement object W is performed only in the region where only the measurement region kt is set as the measurement region, and the distance information of each measurement region kt is extracted to obtain the first measurement. First region surface shape data amd indicating the distance at each coordinate position (x, y) of the surface of the object W to be measured from the reference surface DT of the above is generated, and is stored in the first region surface shape data storage unit 55. It will be remembered.

step5 <Generation of surface shape data tmd of each second region>
When the first region surface shape data amd is generated, in the second region surface shape data generation unit 10, the value of the data of the second reference plane DB is changed from the value of the first region surface shape data amd. Is subtracted to extract the distance information of each of the measurement regions kt, and the surface of each of the second regions indicating the distance at each coordinate position (x, y) of the surface of the object W to be measured from the second reference plane DB. The shape data tmd is generated and stored in the second region surface shape data storage unit 56.

step6 <Determining the second representative value G2>
When the second region surface shape data tmd is generated, the second representative value determination unit 11 automatically determines the second reference in each of the measurement regions kt in the second region surface shape data tmd. A second representative value G2, which is a representative value of a value indicating a distance from the surface DB, is determined, and the second representative value data G2d, which is the data, is stored in the second representative value storage unit 57.

step7 <judgment>
When the second representative value data G2d is generated, the determination unit 19 determines whether or not the distribution of the second representative value G2 satisfies a preset standard by automatic or manual operation, and the determination unit 19 determines whether or not the distribution of the second representative value G2 meets a preset standard. The determination data jud, which is data, is stored in the determination data storage unit 58.

In the fourth embodiment of the present invention shown in FIGS. 11 to 13, the measuring device 27 has the following configuration. (The fourth embodiment corresponds to the second and sixth embodiments of the invention.)
Steps 1 to 4 and step 7 are the same as those of the third embodiment (therefore, the description thereof will be omitted), and the main difference is that steps 5 and 6 are as follows.

step5 <Determining the first representative value G1>
When the surface shape data amd of each of the first regions is generated in step 4, the measurement region kt from the first reference surface DT is obtained in the surface shape data amd of each of the first regions in the first representative value determination unit 30. The first representative value G1 which is the representative value of the value indicating the distance in the above is determined, and the first representative value data G1d which is the data is stored in the first representative value data storage unit 58.

step6 <Determining the second representative value G2>
When the first representative value G1 is determined, in the second representative value determination unit 11, the first representative value (G1) is the representative value of the value indicating the distance from the second reference plane DB. The representative value G2 of 2 is determined, and the second representative value data G2d, which is the data thereof, is stored in the second representative value storage unit 57.

In the second embodiment of the present invention shown in FIGS. 16, 17, and 18, the main difference from the first embodiment is.
(1) In FIG. 18, a positioning portion 61 is provided on the upper surface of the table 2 in which a quadrangular frame shape is formed by positioning members 61a, 61b, 61c, 61d made of quadrangular rod members, and the setting position of the measurement object W is set in FIG. The measurement object W to be measured in the area of the positioning unit 61 is placed in the lower left position (lower left corner position) set with the opposite side of the measurement object W against the left inner wall and the lower inner wall of the positioning unit 61. The mounting area 62 is to be placed.
(2) The reflective member 36 composed of the first reflective member 36a and the second reflective member 36b is provided outside the mounting area 62 (here, the area inside the positioning portion 61).
(3) A heat treatment furnace 63 for heat-treating, cooling, or heat-treating the measurement object W placed on the table 2 is provided.
(4) A heat treatment air supply means 64 for supplying heat treatment air to the heat treatment furnace 63 is provided.
(5) The heat treatment air supply means 64 is provided with a heat treatment air control unit 65 for controlling the temperature of the heat treatment air.
(6) The value at each coordinate position (x, y) of the second reference plane DB is subtracted from the value at each coordinate position (x, y) of the first surface shape data asd, and the second reference plane DB A second surface shape data generation unit 59 for generating a second surface shape data tsd representing the surface shape of the object W to be measured from the above is provided.
(7) The second region surface shape data generation unit 10 displays the grayscale image nG on the display 33, and the measurement region kt, which is a portion where the operator intends to measure the measurement object W while visually observing the grayscale image. The measurement target W from the second reference plane DB, which is designated by the designated frame Sf by operating the mouse, touch panel, etc., and has only the measurement area kt designated by the designated frame Sf in the second surface shape data tsd. The configuration is such that the surface shape data tmd of each second region indicating the distance at each coordinate position (x, y) of the surface is extracted and generated.
(7) The second reference surface setting unit is set as the second reference surface setting unit 73, and the setting (generation) of the second reference surface DB is performed every time the measurement scan for acquiring the distance information of the measurement object W is performed. It is possible to set automatically,
(8) The first region surface shape data amd is not generated, the first region surface shape data generation unit 9 is not provided, and the first region surface shape data storage unit 55 is not provided.
(9) The reflection member brightness information generation unit 23, the reflection member brightness information storage unit 51, and the reflection member area identification unit 37 are not provided, and the reflection member brightness information umd, the reflection member region ft identification, and the reflection member region data ftd are provided. It is at the point where the measuring device 70 is formed, which is configured not to be generated.

In FIG. 18, the first reflective member 36a and the second reflective member 36b have the following arrangement.
The first reflective member 36a is provided outside one side of the mounting area 62 (may be inside or outside the positioning portion 61).
The second reflective member 36b is provided outside the other side of the mounting area 62 so as to face the first reflective member 36a.
The reflective member 36 is not provided on the side other than the one side and the other side.
The measurement area scanning of the measuring unit 12 is a scanning mode that constantly scans from a position including a part or all of the first reflecting member 36a to a position including a part or all of the second reflecting member 36b.

The positioning portion 61 is made of a transparent member through which the irradiation light 3 is transmitted, for example, a member made of quartz glass.
The table 2 is made of a transparent member through which the irradiation light 3 is transmitted, for example, a member made of quartz glass.
Therefore, since the irradiation light 3 is transmitted through the table 2 and the positioning unit 61, the reflected light that can be detected by the light receiving means 5 cannot be obtained. Therefore, there is no measurement data of the table 2 and the positioning unit 61. The data is only the data on the surface of the reflective member 36, the data on the surface of the object W to be measured, and the noise data such as dust and dirt.
The form of the positioning portion is not limited to the quadrangular enclosure form, and there are various forms such as an L-shaped positioning portion, an opposed type positioning unit arranged at intervals, and a single rod type positioning unit.

The measuring unit 12 simultaneously (together) measures the measurement object W placed in the mounting area 62 of the table 2 and the reflective member provided outside the mounting area 62 on the upper surface of the table 2 by scanning the measuring area. Therefore, it is possible to simultaneously (together) perform the measurement scan of the distance of the reflective member 36 at each measurement scan of the distance of the object to be measured W, thereby performing the measurement scan of the distance of the object to be measured. It is possible to automatically set (reset) the second reference plane DB every time.
It acquires the change in the vertical position of the surface of the reflective member 36 due to the change in the upper surface position of the table 2 which changes subtly due to the influence of temperature (thermal expansion and contraction) and vibration (environmental change), and obtains the second reference. Setting the surface DB to the measurement position of the object W to be measured is automatically performed for each measurement scan of the distance, which corresponds to the influence of the change in the vertical position due to the environmental change. The distance measurement is performed at each measurement scan, which realizes accurate and highly accurate measurement.
Further, it realizes a measurement form in which human work for measuring the position of the upper surface of the table 2 is not complicated at all.
Further, in the measurement mode in which the measurement object W is measured while changing the heat treatment temperature, which is a temperature state in which the object W is heated or cooled, the position of the surface of the reflective member accompanying the position of the upper surface of the table that changes with the changing heat treatment temperature is determined. It is possible to realize a measurement mode in which the measurement is performed and the second reference plane DB is reset every time the distance is measured and scanned.
The measurement of the reflective member 36 is also performed at the same time every time the distance of the object to be measured W is measured, which means that the measurement and scanning of the distance of the reflective member 36 are also performed at the same time as the measurement and scanning of the distance of the object to be measured W. It is measured by 12.

On the display 33, the XY plane image of the shade image nG and the XY plane image of the second surface shape data tsd are combined and displayed, and the XY plane image of the shade image nG and the second surface shape data are displayed. It is possible to switch and display the XY plane image of tsd.
In the display of the display 33 visually viewed by the operator, the XY plane image of the shade image nG and the XY plane image of the second surface shape data tsd switch the display of the front-back position as seen from the operator, and the operator visually recognizes each image. It is possible to check with.

Acquisition of distance information of the measurement object W of the measurement unit 12 The second brightness information, which is the brightness information of the measurement object W, is also acquired at the same time during scanning, and a shading image based on the second brightness information is displayed on the display 33. The second shade image and the XY plane image of the second surface shape data tsd can be combined and displayed, and the second shade image and the XY plane image of the second surface shape data (tsd) can be switched and displayed. What is possible is also good.
In the "composite display", the second shade image is arranged on the first layer, the XY plane image of the second surface shape data (tsd) is arranged on the second layer, and the first layer and the second layer are arranged. It is common to stack layers of.

The second region surface shape data generation unit 10 generates the second region surface shape data tmd of the designated measurement region kt every time the measurement region kt is designated. It is possible to use a form, or a processing form in which batch processing is performed in which the surface shape data tmd of each second region of all the designated measurement regions kt is collectively generated.

It is possible to measure while changing the heat treatment temperature of the heat treatment furnace 63.
Measurement modes while changing the heat treatment temperature include measurement at a predetermined temperature and measurement at predetermined time intervals.
During the measurement scanning of the heat treatment temperature, the reflection member 36 is also measured at each measurement, and the second reference plane DB is set (generated) at each measurement.
In the fifth embodiment, the heat treatment means adopts the heat treatment air supply means 64 for supplying the heat treatment air, but the heat treatment means is not limited to this. For example, there are various things such as a transparent conductive heater provided on the upper side, the lower side or the inner side of the table 2, a heating sheeter provided on the wall side of the heat treatment furnace 63, a heating heater provided in the heat treatment furnace 63, and cooling means.

A processing step for determining the second representative value G2 of the measuring device 70 will be described with reference to FIGS. 16 and 17.
step1 <Setting of second reference plane DB>
The second reference surface setting unit 73 is a reference position or a reference surface set based on the distance from the first reference surface DT of the surface of the reflective member 36, or is the first reference of the surface of the reflective member 36. A second reference plane DB which is a reference position or a reference plane set by moving the position of the distance from the plane DT to an arbitrary or predetermined position is set, and the second reference plane which is the data of the second reference plane DB is set. The data DBd is stored in the second reference plane data storage unit 14.

step2 <Generation of first surface shape data asd>
The first surface shape data generation unit 8 is a reference position or a reference surface on the measurement unit 12 side based on the height information of the measurement object light reception information wG, which is the light reception information of the measurement object (W) of the light receiving means 5. The first surface shape data asd, which is the data of the first surface shape as indicating the distance at each coordinate position (x, y) of the surface of the object W to be measured from the first reference plane DT, is generated.

step3 <Generation of second surface shape data tsd>
The second surface shape data generation unit 59 subtracts the value at each coordinate position (x, y) of the second reference plane DB from the value at each coordinate position (x, y) of the first surface shape data asd. Then, the second surface shape data tsd representing the surface shape of the object W to be measured from the second reference surface DB is generated.

step4 <Specification of area kt by designated frame Sf on display 33>
The grayscale image nG is displayed on the display 33, and the measurement area kt, which is a portion where the operator intends to measure the measurement target W while visually observing the grayscale image nG, is designated by the designated frame Sf by operating a mouse, a touch panel, or the like.

step5 <Generation of surface shape data tmd of each second region>
The second region surface shape data generation unit 10 has each coordinate position (x) of the surface of the measurement target W from the second reference plane DB only in the measurement region kt specified in the second surface shape data tsd. , Y), the surface shape data tmd of each second region indicating the distance is extracted and generated.

step6 <Determining the second representative value G2>
In each of the second region surface shape data tmd, the second representative value G2 in each of the measurement regions kt is determined.

In the measurement method of the fifth embodiment, irradiation light 3 composed of a band-shaped (line-shaped) laser beam (hereinafter referred to as “line light”) is applied to the surface of the measurement object W and the reflecting member 36 to diffuse and reflect the irradiation light 3. An optical cutting method is adopted in which the reflected light is received by the light receiving means 5 (for example, the image pickup element CMOS in this case) to form an image, and changes in the height, shape, and position of the object W to be measured and the reflecting member 36 are acquired as profile data. is doing.

The measuring unit 12 has the width of the line light (Y-axis direction) as the scanning width, the traveling scan in the X-axis direction (hereinafter referred to as “traveling scanning distance MR”), and the scanning width × traveling scanning distance MR = scanning area. ..
The measuring unit 12 horizontally moves in the Y-axis direction by a scanning width or a distance shorter than the scanning width to scan the adjacent scanning area.
In the fifth embodiment, as shown in FIG. 18, the scanning area consists of three scanning areas, a first scanning area 71a, a second scanning area 71b, and a third scanning area 71c.
The scanning area can be specified manually or by automatically determining the scanning area where the measurement object W is located. In the fifth embodiment, either method is possible. Either one may be used.

The scanning that automatically determines and specifies the scanning area is as follows.
When the entire measurement area of the measurement object W is within the first scanning area 71a, the measurement area scanning is only the scanning of the first scanning area 71a.
When the measurement area of the measurement object W extends from the first scanning area 71a to the second scanning area 72b, the measurement area scanning is the scanning of the first scanning area 71a and the second scanning area 71b.
When the measurement area of the measurement object W extends beyond the third scanning area 72c, the measurement area scanning is the scanning of the first scanning area 71a, the second scanning area 71b, and the third scanning area 72c.

The first scanning area 71a, the second scanning area 71b, and the third scanning area 71c each slightly overlap with the adjacent scanning areas, and in the overlapped portion, only the light receiving information of one scanning area is used and the other scanning area is scanned. Processing is performed to exclude the received light information in the area.

In FIG. 18, the scanning movement of the first scanning area 71a of the measuring unit 12 travels from the first reflecting member 36a side to the second reflecting member 36b side, and the scanning movement of the second scanning area 71b is the second. The traveling movement is made from the reflection member 36b side to the first reflection member 36a side, and the scanning movement of the third scanning area 71c is made to travel from the first reflection member 36a side to the second reflection member 36b side.
Further, in each of the first scanning area 71a, the second scanning area 71b, and the third scanning area 71c, the traveling movement may be made from the first reflecting member 36a side to the second reflecting member 36b side.

The first reflective member 36a is arranged on the traveling start side of the measuring unit 12, and the second reflective member 36b is arranged on the traveling end side of the measuring unit 12, all of which are the first scanning area 71a, the second scanning area 71b, and the second. It is a single rectangular shape that passes over the three scanning areas 71c.
The second reference plane DB is a plane set in each of the first scanning region 71a, the second scanning region 71b, and the third scanning region 71c.
The second reference surface DB in which the first scanning area 71a is set is the first scanning area reference surface DBa, and the second reference surface DB in which the second scanning area 71b is set is the second scanning area reference surface DBb, the third. The second reference surface DB in which the scanning area 71c is set is referred to as a third scanning area reference surface DBc (hereinafter collectively referred to as “each scanning area reference surface DBn”).
The scanning area reference surface DBn is set by the distance from the first reference surface DT of the surface of the first reflective member 36a in each scanning area and the first reference surface of the surface of the second reflective member 36b in each scanning area. It is a plane set based on the distance from the DT.

The first scanning area reference surface DBa is a reference surface expanded over the entire surface of the first scanning area 71a or beyond, and the second scanning area reference surface DBb is expanded over the entire surface of the second scanning area 71b or beyond. The reference surface is used, and the third scanning area reference surface DBc is a reference surface extended to the entire surface of the third scanning area 71c or beyond, so that the measurement object W falls within the range of each scanning area reference surface DBn. To.
This process is automatically performed, or the operator manually operates the mouse or the like to widen each scanning area reference plane DBn to an arbitrary width on the display 33 and set it.

The traveling scanning distance MR is from the middle of the first reflective member 36a to the middle of the second reflective member 36b, so that the middle of the first reflective member 36a is the measurement start position and the second The middle of the reflective member 36b is the measurement end position.
The range of the first scanning area reference plane DBa is the first of each coordinate position (x, y) on one Y-axis line of the measurement start position where the distance in the Y-axis direction is narrower than the first scanning area 71a. The line formed by the distance from the reference plane DT of 1 is defined as the first line Ln1a, and the distance from the first reference plane DT of each coordinate position (x, y) on one Y axis of the measurement end position. The formed line is the second line Ln2a, and the distance in the X-axis direction between the first line Ln1a and the second line Ln2a is the traveling scanning distance MR, which is a rectangular space.
The range of the second scanning area reference plane DBb is the second of each coordinate position (x, y) on one Y-axis line of the measurement start position where the distance in the Y-axis direction is narrower than the second scanning area 71b. The line formed by the distance from the reference plane DT of 1 is defined as the first line Ln1b, and the distance from the first reference plane DT of each coordinate position (x, y) on one Y axis of the measurement end position. The formed line is the second line Ln2b, and the distance in the X-axis direction between the first line Ln1b and the second line Ln2b is the traveling scanning distance MR, which is a rectangular space.
The range of the third scanning area reference plane DBc is the third of each coordinate position (x, y) on one Y-axis line of the measurement start position where the distance in the Y-axis direction is narrower than that of the first scanning area 71c. The line formed by the distance from the reference plane DT of 1 is defined as the first line Ln1c, and the distance from the first reference plane DT of each coordinate position (x, y) on one Y axis of the measurement end position. The formed line is the second line Ln2c, and the distance in the X-axis direction between the first line Ln1c and the second line Ln2c is the traveling scanning distance MR, which is a rectangular space range.

The process of setting the second reference plane DB is as follows.
<Setting example of scanning area reference plane DBn>
The method for obtaining the scanning area reference plane DBn, which is a plane in the spatial range of a quadrangle, is a case where the equation of a plane is obtained from each coordinate position (x, y) point (distance position) of four or more points on the reflective member. A plane is obtained by using a certain minimum square method or a pseudo-inverse matrix, and the plane is positioned and set at the same position or at a position moved up and down. The plane is often an inclined plane with respect to the first reference plane DT.

The setting of the scanning area reference plane DB is, for example, all the distance positions (coordinate point group) of each coordinate position (x, y) on the first line Ln1a and each coordinate position (x, y) on the second line Ln2a. It is also possible to find the plane between the first line Ln1a and the second line Ln2a using the least square method, pseudo-inverse matrix, or equation by singular value decomposition for the plane that best fits all the distance positions (coordinate point group) of. Good (in this Example 5, the least squared method is used). Similarly, the plane between the first line Ln1b and the second line Ln2b and the plane between the first line Ln1c and the second line Ln2c are obtained.

The configuration is such that the reflective member 36 is not provided, the positioning member 61a on the scanning start side is used as the first reflective member, and the positioning member 61b on the scanning end side is used as the second reflective member. In this form, the entire positioning portion 61 may be a reflective member.
In that case, the material of the positioning member itself may be a reflective member (for example, a non-transparent ceramic member), or the reflective member may be provided on the facing surface (contact surface) of the upper surface of the table of the positioning member.
The positioning portion may be fixed to the upper surface of the table with bolts or the like, or may be adhesively fixed with an adhesive (ceramic adhesive or the like) that also serves as a reflective member.
In the form in which the entire positioning portion 61 is a reflective member, the scanning information of the outer region of the X-axis line at the position of the inner wall line of the positioning member 61c and the positioning member 61d is set as an excluded outer region, which is an excluded region or a non-acquired region. The excluded outer area also includes (excludes) the outer area on the X-axis line at the position of the inner wall line of the positioning members 61c and 61d of the positioning members 61a and 61b.

When there is only one measurement object W, the set position is the left corner position of the positioning unit 61, but a plurality of measurement objects W can be measured at the same time. For example, four measurement objects W are set in the lower left corner, the upper left corner, the upper right corner, and the lower right corner, respectively, and the entire mounting area 62 is scanned to measure all the set measurement objects W together. It is possible.

The main difference between Example 6 of the present invention shown in FIG. 19 and that of Example 5 is.
The traveling scanning distance MR, which is the traveling distance in the X-axis direction of the first scanning area 71a, the second scanning area 71b, and the third scanning area 71c, is measured to a position beyond the first reflecting member 36a and the second reflecting member 36b. The distance to travel
The width of each scanning area reference plane DBn in the Y-axis direction is set to be the same as the width of the first scanning area 71a, the second scanning area 71b, and the third scanning area 71c.
The position of the first line Ln1a-the first line Ln1c is set to an arbitrary line in the Y-axis direction preset on the first reflection member 36a.
The position of the second line Ln2a-the second line Ln2c is located on an arbitrary line in the Y-axis direction preset on the first reflection member 36a.
The first scanning area 71a, the second scanning area 71b, and the third scanning area 71c each slightly overlap with the adjacent scanning areas, and in the overlapped portion, only the light receiving information of one scanning area is used and the other scanning area is used. Processing is performed to exclude the received light information in the area.

In Example 7 of the present invention shown in FIGS. 20 and 21, the main difference from the above-mentioned Example 5 is.
Scanning of the measuring unit 12 that acquires only the luminance information of the measurement object W (hereinafter referred to as "acquiring and scanning only the luminance information") is performed (there is no distance information data because the distance information is not acquired), and the luminance is obtained. The shade image nG of the measurement target W based on the information is displayed on the display 33, and the measurement area kt, which is the part to be measured of the measurement target W, is designated by the designated frame Sf by operating the operator's mouse, touch panel, or the like. Then, the measurement area data ktd, which is the data of the measurement area kt specified by the designated frame Sf, is stored in advance in the measurement area storage unit 72 (step 1).
Measurement scanning is performed by the measuring unit 12 that acquires only the distance information of the measurement object W and only the distance information of the reflective member 36 (hereinafter referred to as “distance information only acquisition scanning”) (because the brightness information is not acquired, the brightness is increased. There is no information data), the second reference plane DB is set (step2), and the first surface shape data asd is generated (step3).
The second surface shape data tsd is generated (step4), and the surface shape data is generated.
Each coordinate position (x, y) of the surface of the measurement object W from the second reference plane DB only in the measurement area kt portion which is the measurement part of the measurement object W specified in the second surface shape data tsd. ), The surface shape data tmd of each second region indicating the distance is extracted and generated (step5).
In the subsequent measurement, in the measurement of the same measurement object W, it is possible to specify the area by the measurement area kt by performing the acquisition scan of only the distance information without performing the acquisition scan of only the luminance information.
The measurement area specifying part is set as the measurement area specifying part 75, and the shading image only acquisition part 76 is provided.
The point is that the measuring device 74 is provided with a discriminating unit 78 for discriminating the quality of the shape of the object W to be measured and the quality of the set position (placement position), or the quality of either one.
The second representative value G2 is determined in the processing after step 5, and the determination unit 19 further determines the quality.

In the acquisition scan of only the luminance information, the luminance information outside the mounting area 62 is automatically excluded or not acquired. Therefore, there is no luminance information of the reflecting member 36, and the shading image information of the reflecting member 36 is not obtained. There is no such thing. To exclude the luminance information outside the mounting area 62, the position of the inner wall of the positioning unit 61 is measured and the specified specific inner wall position is stored in advance, and the information on the outer area of the specific inner wall position is excluded or not acquired. It is done by.

The measuring device 74 that realizes the above steps has the following configuration.
A transparent table 2 having a mounting area 62 on the upper surface, which is an area on which the measurement object W is placed,
A reflective member provided outside the mounting area 62 on the upper surface of the table 2 and
Light that irradiates the irradiation light transmitted through the table 2 from below the table 2 toward the measurement object W and the reflective member placed on the upper surface of the table and set in the mounting area 62 provided below the table 2. Irradiation means 4 and
A light receiving means 5 provided below the table 2 for receiving the reflected light from the object W to be measured and the reflecting member below the table 2.
A measuring unit 12 having a light irradiating means 4 and a light receiving means 5 capable of simultaneously measuring or simultaneously measuring a measurement object W and a reflecting member by measuring area scanning.
Only the brightness information, which is the scanning of the measuring unit 12 that acquires only the brightness information of the measurement object W, is performed (there is no distance information data because the distance information is not acquired), and the measurement object based on the brightness information is performed. The shading image only acquisition unit 76 that acquires only the shading image nG of W,
In the shade image nG displayed on the display 33, the measurement area data ktd, which is the data of the measurement area kt specified by the designated frame Sf designated by the operation of the operator's mouse, touch panel, etc., is generated and stored in the measurement area storage unit 72. The measurement area identification unit 75 to be stored in advance, and
Distance information that acquires only the distance information, which is the measurement scan by the measuring unit 12, and acquires the object distance information consisting only of the distance information of the measurement object W and the reflecting member distance information consisting only of the distance information of the reflecting member. Only with the acquisition unit 77 (there is no brightness information data because the brightness information is not acquired),
It is a reference position or reference plane set based on the distance from the first reference plane DT of the surface of the reflection member based on the reflection member distance information, or from the first reference plane DT of the surface of the reflection member. A second reference plane setting unit 73 for setting a second reference plane DB which is a reference position or a reference plane set by moving the position of the distance to an arbitrary or predetermined position.
A first surface that generates first surface shape data asd indicating a distance at each coordinate position (x, y) of the surface of the object W to be measured from the first reference surface DT based on the object distance information. Shape data generation unit 8 and
Measurement from the second reference plane DB by subtracting the value at each coordinate position (x, y) of the second reference plane DB from the value at each coordinate position (x, y) of the first surface shape data asd. A second surface shape data generation unit 59 that generates a second surface shape data tsd representing the surface shape of the object W, and
The surface of each of the second regions indicating the distance at each coordinate position (x, y) of the surface of the object W to be measured from the second reference plane DB only in the measurement region kt specified in the second surface shape data tsd. A second region surface shape data generation unit 10 for extracting and generating shape data tmd is provided, and the shape data tmd is provided.
It is a configuration that enables the setting of the second reference plane DB to be automatically set every time the measurement object W is measured.
In the subsequent measurement, in the measurement of the same measurement object W, the region is specified by the measurement region kt by performing the acquisition scan of only the distance information without performing the acquisition scan of only the brightness information, and the surface shape of each second region. It is possible to generate the data tmd and to determine the second representative value G2.

<Discrimination unit 78>
Only the shading image The data of the shading image nG of the measurement object W acquired by the acquisition unit 76 is determined by the discrimination unit 78 to determine whether the shape of the measurement object W and the set position (placement position) are good or bad. , That is displayed and warned on the display as an error of the measurement object, and the subsequent processing is automatically stopped, or if there is measurement data, it is automatically deleted.
The good shape storage unit 79 stores the good product shape (CAD data and the light and shade image data of the good product) of the measurement target object W, and the discriminating unit 78 compares the good product shape with the acquired light and shade image nG to determine whether the product is good or bad. It is carried out.
In determining whether the set position is good or bad, somewhere on the two sides of the object W is in contact with the inner wall of the corner of the positioning portion 51. For example, in FIG. 19, somewhere on the lower side of the object W to be measured. Is in contact with the inner wall of the positioning member 61a and somewhere on the left side of the object to be measured W is in contact with the inner wall of the positioning member 61c. The discrimination is considered bad. For the position of the inner wall of the positioning member 61, the position data measured and stored in advance is used.
The quality determination may be the quality determination of the shape of the object to be measured and the quality of the set position, or the quality determination of either one.

In the setting of the second reference surface DB and the generation of the first surface shape data asd, there is no brightness information, and therefore there is no processing thereof. Therefore, at the time of setting the second reference surface DB and the first surface shape data asd. Since the data processing of is only distance information, the amount of information processing is small and rapid processing is realized.

Each of the measurement area data ktd stored in the measurement area storage unit 72 is provided with object identification information for specifying or identifying the measurement object W.
By inputting the object identification information of the measurement object W to be measured, designating the object identification information, or acquiring the object identification information from the image of the measurement object W, the object identification information is stored in the measurement area storage unit 72. If so, the scan of step1 is not performed, and the operation and processing from step2 are performed.
This is particularly effective when measuring while exchanging and erasing a plurality of the same measurement object W.

[Appendix B]
[Background technology]
[Patent Document 1] Japanese Patent No. 5385703 [Problems to be solved by the invention]
The invention of Patent Document 1 requires the configuration of "generating surface shape data indicating the distance from the upper surface of the table at each position (x, y) in the XY plane" (claim 1), and the configuration of the upper surface of the table is essential. Regarding the measurement method, the phase θ of each position on the sample surface 12a is taken in advance by taking an image in the case where the same cosine wave stripe pattern is projected on the sample surface 12a on which the inspection object A is not placed. The data indicating the above is calculated and recorded as the reference phase data. " The sample surface 12a is a table surface (paragraph [0023]) on which the inspection object is placed.
Therefore, in the invention of Cited Document 1, when the measurement is performed every time the inspection target is measured, the reference phase data (table reference plane) is measured by measuring the table upper surface (sample surface 12a) on which the inspection target is not installed. There was a problem that the complicated work and time of acquiring the data indicating the HT) and then installing the inspection object on the upper surface of the table and measuring the surface of the inspection object had to be wasted. ..
In addition, when measuring at the heat treatment temperature, which is the temperature state in which the object to be measured is heated or cooled, the measurement of the top surface position of the table at the heat treatment temperature at which the object to be measured is heat-treated is simultaneously (with) the measurement of the object to be measured. It was something that could not be done.
Further, in the case of measuring while changing the heat treatment temperature which is a temperature state in which the object to be measured is heated or cooled, it is impossible to measure the position of the upper surface of the table which changes with the changing heat treatment temperature.

Further, the vertical position of the upper surface of the table changes on the order of microns due to vibration, humidity, temperature, etc. (hereinafter referred to as "environmental change"). Therefore, the vertical position of the surface of the reflective member 36 also changes accordingly.
There are various types of vibration such as impact caused by movement of the device, vibration of a weak earthquake, vibration from other machines, and pressing pressure for cleaning the table surface of the operator. It is no exaggeration to say that the measuring device is always affected by some kind of vibration.
However, in the invention of Patent Document 1, the reference phase data (data indicating the table reference plane HT) in which the position of the upper surface of the table on which the object to be measured is not placed is measured and recorded in advance is the scanning of the imaging unit / irradiation unit. It is impossible to generate and set each time.
And, the fact that the vertical position of the upper surface of the table changes means that the position of the surface (measurement surface) of the object to be measured on which it is placed also changes, so the reference phase data is a value that cannot correspond to the change. Therefore, the invention of Patent Document 1 has a drawback that it becomes inaccurate (an error occurs) by the amount of the change in the vertical position of the object to be measured due to the environmental change.

Further, the invention of Patent Document 1 is subject to measurement and determination in paragraph [0005], "However, in the case of continuously inspecting a large number of inspection objects, for example, for inspection in a production line of electronic parts, etc." Further shortening of time is required. ”, Paragraph [0075],“ ... Precise determination can be performed quickly. Therefore, the inspection device 100 can be used as a terminal of an electronic component in an electronic device production line. According to the description "It can be used for shape determination" and "... according to this embodiment" in paragraph [0077], for example, a measuring instrument having a structure suitable for inspection in a production line of an electronic device and a calculation process are provided. From the description, etc., it is reasonable to say that the main purpose is to provide an inspection device that measures and judges a large amount of continuously flowing inspection objects such as a production line for electronic parts. And then the technical challenge is to make the inspection speed faster so that the inspection equipment does not reduce productivity but rather increases productivity, and if so, inspection. It is reasonable to assume that there are circumstances that hinder the configuration that reduces the inspection speed of the device.

[Purpose of the invention of Appendix B]
The invention of Appendix B has been made in view of the above-mentioned problems of the prior art, and its main purpose is to be close to the position of the upper surface of the table with the object to be measured placed on the upper surface of the table. It is an object of the present invention to provide a measuring device capable of simultaneously (together) measuring the position of a reference plane and the position of the surface of an object to be measured by scanning a measurement area.
Further, in the measurement scanning of the measuring unit having the light irradiating means and the light receiving means, the reference plane set at the position close to the table top surface position (including the table top surface position) (the "second reference plane" in the invention of Appendix B). ) Is to be provided as a measuring device capable of measuring and setting each measurement scan.

[Means to solve problems]
[Invention of Appendix B1]
A transparent table (2) having a mounting area (62) on the upper surface, which is an area on which the measurement object (W) is placed.
A reflective member provided on the upper surface of the table (2) outside the previously described storage area (62), and
The table (2) is provided below the table (2) from below the table (2) toward the measurement object (W) and the reflective member set in the previously described storage area (62). ), And the light irradiation means (4) that irradiates the irradiation light transmitted through).
A light receiving means (5) provided below the table (2) to receive light reflected from the object to be measured (W) and the reflecting member below the table (2).
A measuring unit (12) having the light irradiating means (4) and the light receiving means (5) capable of simultaneously measuring or measuring the measurement object (W) and the reflection member by scanning the measurement area.
It is a reference position or a reference plane on the measurement unit (12) side based on the height information of the measurement object light receiving information (wG) which is the light receiving information of the measurement object (W) of the light receiving means (5). The first surface shape data which is the data of the first surface shape (as) indicating the distance at each coordinate position (x, y) of the surface of the measurement object (W) from the first reference plane (DT). The first surface shape data generation unit (8) that generates (asd), and
A measurement target that stores a shading image (nG) of the measurement target (W) based on the luminance information of the measurement target light reception information (wG), which is the light reception information of the measurement target (W) of the light receiving means (5). Object brightness information storage unit (53) and
A reference position or reference plane set based on the distance of the surface of the reflective member from the first reference plane (DT), or from the first reference plane (DT) of the surface of the reflective member. A second reference plane setting unit for setting a second reference plane (DB) which is a reference position or a reference plane set by moving a distance position to an arbitrary or predetermined position, and a second reference plane setting unit.
The second value is obtained by subtracting the value at each coordinate position (x, y) of the second reference plane (DB) from the value at each coordinate position (x, y) of the first surface shape data (asd). A second surface shape data generation unit (59) that generates a second surface shape data (tsd) representing the surface shape of the measurement object (W) from the reference surface (DB) of the above.
The measurement object from the second reference plane (DB) of only the measurement region (kt) which is the measurement portion of the measurement object (W) specified in the second surface shape data (tsd). A second region surface shape data generation unit (10) that extracts and generates second region surface shape data (tmd) indicating a distance at each coordinate position (x, y) of the surface of (W). Be prepared and
The measuring device characterized in that the setting of the second reference plane (DB) is automatically set for each measurement of the measurement object (W).

<Action effect>
The measuring unit (12) is provided outside the previously described storage area (62) on the measurement object (W) placed on the mounting area (62) of the table (2) and on the upper surface of the table (2). Since the reflective members are measured simultaneously (together) by scanning the measurement area, it is possible to measure the reflective members at the same time (together) each time the object to be measured is measured. It has a special and remarkable effect of making it possible to automatically set the second reference plane (DB) for each measurement.
It constantly measures the second reference plane (DB) due to the changed position of the surface of the reflective member due to the position of the upper surface of the table (2) that frequently changes on the order of microns under the influence of environmental changes. It means that the position at the time of measurement scanning is automatically set, which realizes accurate and highly accurate measurement without the occurrence of micron-order error due to the influence of environmental changes.
In addition, it realizes a measurement scan that does not cause any human work to measure the upper surface of the table.
Further, in the measurement mode in which the measurement object is measured while changing the heat treatment temperature which is a heated or cooled temperature state, the reflection changes with the table top surface position which changes due to the influence of the environmental change including the changing heat treatment temperature. A measurement mode in which the position of the second reference plane (DB) corresponding to the position of the surface of the member is reset is realized.

[Invention of Appendix B2]
A transparent table (2) having a mounting area (62) on the upper surface, which is an area on which the measurement object (W) is placed.
A reflective member provided on the upper surface of the table (2) outside the previously described storage area (62), and
The table (2) is provided below the table (2) from below the table (2) toward the measurement object (W) and the reflective member set in the previously described storage area (62). ), And the light irradiation means (4) that irradiates the irradiation light transmitted through).
A light receiving means (5) provided below the table (2) to receive light reflected from the object to be measured (W) and the reflecting member below the table (2).
A measuring unit (12) having the light irradiating means (4) and the light receiving means (5) capable of simultaneously measuring or measuring the measurement object (W) and the reflection member by scanning the measurement area.
A first reference plane (DT) which is a reference position or a reference plane on the measurement unit (12) side, and
Only the luminance information, which is the scan of the measuring unit (12), which acquires only the luminance information of the measurement object (W), is performed, and the shading image (nG) of the measurement object (W) based on the luminance information is performed. ) Only the shading image acquisition unit (76),
In the shade image (nG) displayed on the display, the measurement area data (ktd) which is the data of the measurement area (kt) specified by the designated frame (Sf) designated by the operator is generated and the measurement area storage unit ( The measurement area identification unit (75) stored in advance in 72) and
Only the distance information, which is the measurement scan by the measuring unit (12), is acquired and scanned, and the object distance information including only the distance information from the first reference plane (DT) of the measurement object (W) and the object distance information are described. The distance information only acquisition unit (77) for acquiring the reflection member distance information consisting only of the distance information from the first reference plane (DT) of the reflection member, and
A reference position or reference plane set based on the distance of the surface of the reflective member from the first reference plane (DT) based on the distance information of the reflective member, or the first surface of the reflective member. A second reference plane setting unit (73) for setting a second reference plane (DB) which is a reference position or a reference plane set by moving the position of the distance from the reference plane (DT) of 1 to an arbitrary or predetermined position. )When,
First surface shape data (asd) indicating the distance at each coordinate position (x, y) of the surface of the measurement object (W) from the first reference plane (DT) based on the object distance information. ), The first surface shape data generation unit (8),
The second value is obtained by subtracting the value at each coordinate position (x, y) of the second reference plane (DB) from the value at each coordinate position (x, y) of the first surface shape data (asd). A second surface shape data generation unit (59) that generates a second surface shape data (tsd) representing the surface shape of the measurement object (W) from the reference surface (DB) of the above.
The measurement object from the second reference plane (DB) of only the measurement region (kt) which is the measurement portion of the measurement object (W) specified in the second surface shape data (tsd). A second region surface shape data generation unit (10) that extracts and generates second region surface shape data (tmd) indicating a distance at each coordinate position (x, y) of the surface of (W). Be prepared and
A measuring device characterized in that the setting of the second reference plane (DB) can be automatically set for each measurement of the measurement object (W).

<Action effect>
Let's acquire only the shading image (nG) of the measurement target object (W) in advance and measure the measurement target object (W) in the shading image (nG) while exhibiting the same action and effect as the invention of Appendix B1. The measurement area data (ktd), which is the data of the measurement area (kt), which is the area to be measured, is stored in advance, and in the measurement of the same measuring object (W), scanning and processing for specifying the measurement area are performed. Instead of using the measurement area data (ktd) stored in advance, the measurement of the same measuring object (W) requires only scanning measurement to acquire distance information, which realizes rapid processing. do.

[Invention of Appendix B3]
The shading image (nG) and the XY plane image of the second surface shape data (tsd) can be combined and displayed on the display, and the shading image (nG) and the second surface shape data (tsd) can be displayed together. It is possible to switch and display the XY plane image of tsd), or the brightness information of the measurement object (W) at the time of acquisition and scanning of the distance information of the measurement object (W) of the measurement unit (12). The second brightness information is also acquired at the same time, and the second shade image, which is a shade image based on the second brightness information, and the XY plane image of the second surface shape data (tsd) are displayed on the display. B1 or 2 which is characterized in that the second shading image and the XY plane image of the second surface shape data (tsd) can be switched and displayed. The measuring device according to the invention.

<Action effect>
It has the same effect as the invention of Appendix B1 or Appendix 2, and in the display displayed by the operator, before and after the grayscale image (nG) and the second surface shape data (tsd) before and after the XY plane image on the display. It is possible to switch the display of the position (front and back position when viewed from the operator) so that the operator can visually confirm the position.

[Invention of Appendix B4]
A heat treatment furnace for heat-treating the object to be measured (W) placed on the table (2), which is a heat treatment or a cooling treatment, is provided.
In the measurement mode in which the heat treatment temperature of the heat treatment furnace is changed, the position of the surface of the reflecting member that changes at the changing heat treatment temperature is measured, and the second reference plane (DB) at the heat treatment temperature is measured. ) Shall be set, and the measuring apparatus according to the invention of Appendix B1, Appendix B2, or Appendix B3.

<Action effect>
It has the same effect as the invention of Appendix B1, Appendix B2 or Appendix B3, and measures the change in the distance of the object to be measured (W) due to the change in the heat treatment temperature of the heat treatment furnace, and the second reference plane in which the distance has changed. It is possible to set (DB).
Thereby, "the second surface shape data (tsd) and the second region surface shape data (tmd) or either of them are the distances from the position of the second reference plane (DB) at the heat treatment temperature at the time of measurement. It has the effect of being shown.

[Invention of Appendix B5]
The reflective member is composed of a first reflective member and a second reflective member.
The first reflective member is provided outside one side of the previously described storage area (62).
The second reflective member is provided outside the other side of the above-mentioned placement area (62) in a facing form facing the first reflective member.
The reflective member is not provided on the side other than the one side and the other side.
The measurement area scanning of the measuring unit (12) is a scanning mode that constantly scans from a position including a part or all of the first reflecting member to a position including a part or all of the second reflecting member. can be,
The measuring device according to the invention of Supplementary note B1 to Supplementary note B3 or Supplementary note B4, which is configured as described above.

<Action effect>
The second reference plane (DB) is always set by scanning the distance from the first reflective member to the second reflective member, while having the same effect as the invention of the appendix B1 to the appendix B3 or the appendix B4. Since it is performed, it has an effect that the setting range of the second reference plane (DB) can always be the same.

[Invention of Appendix B6]
The second reference plane DB is a method of least squares, a pseudo-inverse matrix, or a singular value in which a plane equation is obtained from each of four or more predetermined coordinate positions (x, y) on the surface of the reflective member. The measuring device according to the invention of Supplementary note B1 to Supplementary note B4 or Supplementary note B5, characterized in that the plane is a plane obtained by using value decomposition.

<Action effect>
It has the same effect as the invention of Supplementary B1 to Supplementary B4 or Supplementary B5, and has the effect that the second reference plane DB can always be set based on each coordinate position (x, y) of four or more predetermined points. Play.

[Invention of Appendix B7]
A transparent table (2) having a mounting area (62) on the upper surface, which is an area on which the measurement object (W) is placed.
A reflective member provided on the upper surface of the table (2) outside the previously described storage area (62), and
The table (2) is provided below the table (2) from below the table (2) toward the measurement object (W) and the reflective member set in the previously described storage area (62). ), And the light irradiation means (4) that irradiates the irradiation light transmitted through).
A light receiving means (5) provided below the table (2) to receive light reflected from the object to be measured (W) and the reflecting member below the table (2).
A measuring unit (12) having the light irradiating means (4) and the light receiving means (5),
The reference position or the reference position set based on the distance from the first reference plane (DT) which is the reference position or the reference plane on the measurement unit (12) side and the first reference plane (DT) of the surface of the reflection member. A second reference plane that is a reference plane or is a reference position or a reference plane that is set by moving the position of the surface of the reflective member at a distance from the first reference plane (DT) to an arbitrary or predetermined position. In a measuring device provided with a second reference plane setting unit for setting (DB).
The reflective member is composed of a first reflective member and a second reflective member.
The first reflective member is provided outside one side of the previously described storage area (62).
The second reflective member is provided outside the other side of the above-mentioned placement area (62) in a facing form facing the first reflective member.
The reflective member is not provided on the side other than the one side and the other side.
The measurement area scanning of the measuring unit (12) is a scanning mode that constantly scans from a position including a part or all of the first reflecting member to a position including a part or all of the second reflecting member. can be,
A measuring device characterized by being configured as described above.

<Action effect>
Since the setting of the second reference plane (DB) is always performed by scanning the distance from the first reflecting member to the second reflecting member, the setting range of the second reference plane (DB) is always set. It has the effect of being able to do the same.

[Invention of Appendix B8]
A transparent table (2) having a mounting area (62) on the upper surface, which is an area on which the measurement object (W) is placed.
A reflective member provided on the upper surface of the table (2) outside the previously described storage area (62), and
The table (2) is provided below the table (2) from below the table (2) toward the measurement object (W) and the reflective member set in the previously described storage area (62). ), And the light irradiation means (4) that irradiates the irradiation light transmitted through).
A light receiving means (5) provided below the table (2) to receive light reflected from the object to be measured (W) and the reflecting member below the table (2).
A measuring unit (12) having the light irradiating means (4) and the light receiving means (5) capable of simultaneously measuring or measuring the measurement object (W) and the reflection member by scanning the measurement area.
A first reference plane (DT) which is a reference position or a reference plane on the measurement unit (12) side, and
Only the luminance information, which is the scan of the measuring unit (12), which acquires only the luminance information of the measurement object (W), is performed, and the shading image (nG) of the measurement object (W) based on the luminance information is performed. ) Only the shading image acquisition unit (76),
In the shade image (nG) displayed on the display, the measurement area data (ktd) which is the data of the measurement area (kt) specified by the designated frame (Sf) designated by the operator is generated and the measurement area storage unit ( The measurement area identification unit (75) stored in advance in 72) and
Only the distance information, which is the measurement scan by the measuring unit (12), is acquired and scanned, and the object distance information consisting only of the distance information of the measurement object (W) and the reflecting member distance consisting only of the distance information of the reflecting member are performed. Distance information acquisition unit (77) to acquire information and
A reference position or reference plane set based on the distance of the surface of the reflective member from the first reference plane (DT) based on the distance information of the reflective member, or the first surface of the reflective member. A second reference plane setting unit (73) for setting a second reference plane (DB) which is a reference position or a reference plane set by moving the position of the distance from the reference plane (DT) of 1 to an arbitrary or predetermined position. )When,
First surface shape data (asd) indicating the distance at each coordinate position (x, y) of the surface of the measurement object (W) from the first reference plane (DT) based on the object distance information. ), The first surface shape data generation unit (8),
The second value is obtained by subtracting the value at each coordinate position (x, y) of the second reference plane (DB) from the value at each coordinate position (x, y) of the first surface shape data (asd). A second surface shape data generation unit (59) that generates a second surface shape data (tsd) representing the surface shape of the measurement object (W) from the reference surface (DB) of the above.
The measurement object from the second reference plane (DB) of only the measurement region (kt) which is the measurement portion of the measurement object (W) specified in the second surface shape data (tsd). A second region surface shape data generation unit (10) that extracts and generates second region surface shape data (tmd) indicating a distance at each coordinate position (x, y) of the surface of (W). A measuring device characterized by being equipped.

<Action effect>
An object (W) to be measured is placed on the upper surface of the table, and a scan (first scan) for acquiring only a grayscale image of the object to be measured (W) is performed to acquire a grayscale image (nG), and then the upper surface of the table is obtained. Since scanning (second scanning) is performed to acquire only the distance information of the measurement target (W) and the reflective member while the measurement target (W) is placed on the measurement target (W), the shape of the measurement target (W). -It is possible to determine or determine whether the shape is good or bad, and whether the set position (placement position) is good or bad, only by the light and shade image (nG) acquired by the first scan. In the case of a defect, the designated operation of the designated frame (Sf) is not required, and the subsequent processing operations such as extraction of the surface shape data (tmd) of each second region are not performed, and the measurement target (W) is replaced or positioned. It has an effect that makes it possible to make corrections.
In particular, in the case of acquiring the distance information and the brightness information of the object to be measured (W) and the distance information and the brightness information of the reflective member in one scan, all of these information will be processed immediately and the information processing thereof. Although the amount is enormous, the invention of Appendix B8 has an effect that it is possible to avoid performing such enormous information processing when it is determined that the shading image (nG) by the first scan is defective. Play.

Further, only the light and shade image (nG) of the measurement target object (W) is acquired in advance, and the data of the measurement area (kt) which is the area where the measurement target object (W) is to be measured in the light and shade image (nG). The measurement area data (ktd) is stored in advance, and in the measurement of the same measuring object (W), the measurement area data (Ktd) stored in advance is not performed for scanning and processing to specify the measurement area. Since it is performed by ktd), in the measurement of the same measuring object (W), scanning measurement only for acquiring distance information is sufficient, so that rapid processing is realized.

[Invention of Appendix B9]
Regarding the shade image (nG) of the measurement object (W) acquired by the grayscale image only acquisition unit (76), whether the shape and set position of the measurement object (W) are good. A discriminant unit (78) that automatically discriminates whether the product is defective or not is provided.
When the discrimination unit (78) determines a defect, the designation operation of the designated frame Sf is unnecessary, the subsequent processing can be automatically stopped, or if there is measurement data, it is automatically deleted. The measuring device according to the invention of Appendix B8, which is characterized by this.

<Action effect>
It has the same effect as the invention of Appendix B8, and in the case of a defect, it has an effect of automatically stopping the subsequent processing operation or automatically deleting the measurement data.

[Invention of Appendix B10]
It excludes the measuring device provided on the production line or the inspection line in which the measurement object (W) is continuously set on the table (2) and inspected.
One or more of the measurement objects (W) are manually set on the table (2), and in the case of the plurality of measurement objects (W), the measurement object (W) is measured together. The measuring device according to the invention of Appendix B8 or Appendix B9.

As described above, the invention of Patent Document 1 describes a large amount of continuously flowing inspection objects such as a production line of electronic parts from the description of paragraph [0005], paragraph [0075], paragraph [0077] and the like. It is reasonable that the main purpose is to provide inspection equipment for measurement and judgment, and it is reluctant or negative to configure the inspection equipment so that the productivity is reduced. If this is the case, it is reasonable to say that there are circumstances that hinder the configuration that slows down the inspection speed of the inspection device.
Then, it is reasonable that the invention of Appendix B10 cannot be easily conceived based on the prior art.

The present invention is mainly used in industries such as electronic components that require measurement of flatness or measurement of behavior due to environmental changes.

wt: protrusion,
W: Object to be measured,
wG: Light receiving information of the object to be measured,
asd: First surface shape data,
wmd: Luminance information of the object to be measured,
Sf: Designated frame,
kt: Measurement area,
ktd: Measurement area data,
AMD: First region surface shape data,
tmd: Second area surface shape data,
G2: Second representative value,
G2d: Second representative value data,
G1: First representative value,
G1d: First representative value data,
DB: Second reference plane,
DBa: 1st scanning area reference plane,
DBb: Second scanning area reference plane,
DBc: 3rd scanning area reference plane,
DBn: Scanning area reference plane,
DBd: Second reference plane data,
nG: shade image,
DT: First reference plane,
fG: Reflective member light receiving information,
fsd: Reflective member surface shape data,
umd: Reflective member brightness information,
ft: Reflective member area,
ftd: Reflective member area data,
jud: Judgment data,
tsd: Second surface shape data,
MR: Traveling scanning distance,
Ln1: 1st line,
Ln2: 2nd line,
HT: Table reference plane,

1: Measuring device,
2: Table,
3: Irradiation light,
4: Light irradiation means,
5: Light receiving means,
7: Measurement area identification part,
8: First surface shape data generation unit,
9: First area surface shape data generation unit,
10: Second area surface shape data generation unit,
11: Second representative value determination unit,
12: Measuring unit,
14: Second reference plane data storage unit,
15: First area surface shape data generation unit,
17: Second representative value determination unit,
18: Measuring device,
19: Judgment unit,
21: Control unit,
22: Reflective member surface shape data generation unit,
23: Reflective member brightness information generator,
26: Measuring device,
27: Measuring device,
30: First representative value determination unit,
31: Second representative value determination unit,
33: Display,
36: Reflective member,
36a: First reflective member,
36b: Second reflective member,
37: Reflective member area identification part,
40: Second reference plane setting unit,
41: Second representative value determination unit,
42: Each area surface shape data generator,
43: Table top surface surface shape data generation unit for each region.
50: Reflective member surface shape data storage unit,
51: Reflective member brightness information storage unit,
52: First surface shape data storage unit,
53: Luminance information storage unit of the object to be measured,
55: First area surface shape data storage unit,
56: Second area surface shape data storage unit,
57: Second representative value storage unit,
58: First representative value data storage unit,
59: Second surface shape data generator,
60: Second surface shape data storage unit,
61: Positioning unit,
61a: Positioning member,
61b: Positioning member,
61c: Positioning member,
61d: Positioning member,
62: Placement area,
63: Heat treatment furnace,
64: Heat treatment air supply means,
65: Heat treatment wind control unit,
70: Measuring device,
71a: 1st scanning area,
71b: 2nd scanning area,
71c: 3rd scanning area,
72: Measurement area storage unit,
73: Second reference plane setting unit,
74: Measuring device,
75: Measurement area identification part,
76: Only the shade image acquisition part,
77: Distance information only acquisition department,
78: Discriminator,
79: Good shape storage unit.

Claims (8)

A transparent table (2) having a mounting area on the upper surface, which is a region for mounting the measurement object (W), and
A reflective member provided on the upper surface of the table (2) outside the above-mentioned storage area, and
Irradiation light (3) is irradiated from below the table (2) toward the measurement object (W) placed on the upper surface of the table (2) provided below the table (2). Light irradiation means (4) and
A light receiving means (5) provided below the table (2) and receiving the reflected light of the irradiation light (3) from the measurement object (W) below the table (2).
A measuring unit (12) having the light irradiating means (4) and the light receiving means (5),
A measurement area specifying unit (7) that specifies or preliminarily specifies the measurement area (kt) of the measurement object (W), and
First region surface shape data indicating the distance at each coordinate position (x, y) of the surface of the measurement object (W) from the first reference plane (DT) in each of the measurement regions (kt). The first region surface shape data generation unit (15) that generates amd), and
In each of the measurement regions (kt), the value of the data of the second reference plane (DB) is subtracted from the value of the surface shape data (amd) of each of the first regions, and the value of the data of the second reference plane (DB) is subtracted from the value of the second reference plane (DB). Second region surface shape data generation unit (10) that generates second region surface shape data (tmd) indicating a distance at each coordinate position (x, y) on the surface of the measurement object (W) from. )When,
In each of the second region surface shape data (tmd), a second representative value (G2) which is a representative value of a value indicating a distance from the second reference plane (DB) in each of the measurement regions (kt). ) Is provided with a second representative value determination unit (17).
The first reference plane (DT) is a reference position or a reference plane on the measurement unit (12) side.
The second reference plane (DB) is a reference position or reference plane set based on the distance of the surface of the reflective member from the first reference plane (DT), or is the surface of the reflective member. A measuring device characterized in that it is a reference position or a reference plane set by moving a position of a distance from the first reference plane (DT) to an arbitrary or predetermined position. A transparent table (2) having a mounting area on the upper surface, which is a region for mounting the measurement object (W), and
A reflective member provided on the upper surface of the table (2) outside the above-mentioned storage area, and
Irradiation light (3) is irradiated from below the table (2) toward the measurement object (W) placed on the upper surface of the table (2) provided below the table (2). Light irradiation means (4) and
A light receiving means (5) provided below the table (2) and receiving the reflected light of the irradiation light (3) from the measurement object (W) below the table (2).
A measuring unit (12) having the light irradiating means (4) and the light receiving means (5),
A measurement area specifying unit (7) that specifies or preliminarily specifies the measurement area (kt) of the measurement object (W), and
First region surface shape data indicating the distance at each coordinate position (x, y) of the surface of the measurement object (W) from the first reference plane (DT) in each of the measurement regions (kt). The first region surface shape data generation unit (15) that generates amd), and
In each of the first region surface shape data (amd), a first representative value (G1) which is a representative value of a value indicating a distance from the first reference plane (DT) in each of the measurement regions (kt). ), And the first representative value determination unit (30),
The value of the data of the second reference plane (DB) is subtracted from the value of the data of the first representative value (G1), and from the second reference plane (DB) in each of the measurement regions (kt). A second representative value determination unit (11) for determining a second representative value (G2), which is a representative value of a value indicating the distance between the two, is provided.
The first reference plane (DT) is a reference position or a reference plane on the measurement unit (12) side.
The second reference plane (DB) is a reference position or reference plane set based on the distance of the surface of the reflective member from the first reference plane (DT), or is the surface of the reflective member. A measuring device characterized in that it is a reference position or a reference plane set by moving a position of a distance from the first reference plane (DT) to an arbitrary or predetermined position. A transparent table (2) having a mounting area on the upper surface, which is a region for mounting the measurement object (W), and
A reflective member provided on the upper surface of the table (2) outside the above-mentioned storage area, and
Irradiation light (3) is irradiated from below the table (2) toward the measurement object (W) placed on the upper surface of the table (2) provided below the table (2). Light irradiation means (4) and
A light receiving means (5) provided below the table (2) and receiving the reflected light of the irradiation light (3) from the measurement object (W) below the table (2).
A measuring unit (12) having the light irradiating means (4) and the light receiving means (5),
A measurement area specifying unit (7) that specifies or preliminarily specifies the measurement area (kt) of the measurement object (W), and
Based on the light receiving information of the measurement object (W) received by the light receiving means (5), each coordinate position (x,) of the surface of the measurement object (W) from the first reference plane (DT). The first surface shape data generation unit (8) that generates the first surface shape data (asd) indicating the distance in y), and
In the first surface shape data (asd), at each coordinate position (x, y) of the surface of the measurement object (W) from the first reference plane (DT) in each of the measurement regions (kt). The first region surface shape data generation unit (9) that generates the first region surface shape data (amd) indicating the distance, and
In each of the measurement regions (kt), the value of the data of the second reference plane (DB) is subtracted from the value of the surface shape data (amd) of each of the first regions, and the value of the data of the second reference plane (DB) is subtracted from the value of the second reference plane (DB). Second region surface shape data generation unit (10) that generates second region surface shape data (tmd) indicating a distance at each coordinate position (x, y) on the surface of the measurement object (W) from. )When,
In each of the second region surface shape data (tmd), a second representative value (G2) which is a representative value of a value indicating a distance from the second reference plane (DB) in each of the measurement regions (kt). ) Is provided with a second representative value determination unit (11).
The first reference plane (DT) is a reference position or a reference plane on the measurement unit (12) side.
The second reference plane (DB) is a reference position or reference plane set based on the distance of the surface of the reflective member from the first reference plane (DT), or is the surface of the reflective member. A measuring device characterized in that it is a reference position or a reference plane set by moving a position of a distance from the first reference plane (DT) to an arbitrary or predetermined position. A transparent table (2) having a mounting area on the upper surface, which is a region for mounting the measurement object (W), and
A reflective member provided on the upper surface of the table (2) outside the above-mentioned storage area, and
Irradiation light (3) is irradiated from below the table (2) toward the measurement object (W) placed on the upper surface of the table (2) provided below the table (2). Light irradiation means (4) and
A light receiving means (5) provided below the table (2) and receiving the reflected light of the irradiation light (3) from the measurement object (W) below the table (2).
A measuring unit (12) having the light irradiating means (4) and the light receiving means (5),
A measurement area specifying unit (7) that specifies or preliminarily specifies the measurement area (kt) of the measurement object (W), and
Based on the light receiving information of the measurement object (W) received by the light receiving means (5), each coordinate position (x,) of the surface of the measurement object (W) from the first reference plane (DT). The first surface shape data generation unit (8) that generates the first surface shape data (asd) indicating the distance in y), and
In the first surface shape data (asd), at each coordinate position (x, y) of the surface of the measurement object (W) from the first reference plane (DT) in each of the measurement regions (kt). The first region surface shape data generation unit (9) that generates the first region surface shape data (amd) indicating the distance, and
In each of the first region surface shape data (amd), a first representative value (G1) which is a representative value of a value indicating a distance from the first reference plane (DT) in each of the measurement regions (kt). ), And the first representative value determination unit (30),
The value of the data of the second reference plane (DB) is subtracted from the value of the data of the first representative value (G1), and from the second reference plane (DB) in each of the measurement regions (kt). A second representative value determination unit (31) for determining a second representative value (G2), which is a representative value of a value indicating the distance between the two, is provided.
The first reference plane (DT) is a reference position or a reference plane on the measurement unit (12) side.
The second reference plane (DB) is a reference position or reference plane set based on the distance of the surface of the reflective member from the first reference plane (DT), or is the surface of the reflective member. A measuring device characterized in that it is a reference position or a reference plane set by moving a position of a distance from the first reference plane (DT) to an arbitrary or predetermined position. A transparent table (2) on which the object to be measured (W) is placed, and
Irradiation light (3) is irradiated from below the table (2) toward the measurement object (W) placed on the upper surface of the table (2) provided below the table (2). Light irradiation means (4) and
A light receiving means (5) provided below the table (2) and receiving the reflected light of the irradiation light (3) from the measurement object (W) below the table (2).
A measuring method for a measuring device including a measuring unit (12) having the light irradiating means (4) and the light receiving means (5).
The reference position or reference plane on the measurement unit (12) side is set as the first reference plane (DT).
The first reference position or reference plane set based on the distance of the upper surface of the table (2) from the first reference plane (DT), and the surface of the reflective member provided on the surface of the table (2). A reference position or reference plane set based on the distance from the reference plane (DT), or a position of a distance from the first reference plane (DT) on the surface of the reflective member provided on the surface of the table (2). The reference position or reference plane set by moving to an arbitrary or predetermined position is set as the second reference plane (DB).
The step of specifying or pre-specifying the measurement area (kt) of the measurement object (W),
First region surface shape data indicating the distance at each coordinate position (x, y) of the surface of the measurement object (W) from the first reference plane (DT) in each of the measurement regions (kt). The steps to generate amd) and
In each of the measurement regions (kt), the value of the data of the second reference plane (DB) is subtracted from the value of the surface shape data (amd) of each of the first regions, and the value of the data of the second reference plane (DB) is subtracted from the value of the second reference plane (DB). ) To generate second region surface shape data (tmd) indicating the distance at each coordinate position (x, y) of the surface of the measurement object (W).
In each of the second region surface shape data (tmd), a second representative value (G2) which is a representative value of a value indicating a distance from the second reference plane (DB) in each of the measurement regions (kt). ) And the steps to determine
Measurement method including. A transparent table (2) on which the object to be measured (W) is placed, and
Irradiation light (3) is irradiated from below the table (2) toward the measurement object (W) placed on the upper surface of the table (2) provided below the table (2). Light irradiation means (4) and
A light receiving means (5) provided below the table (2) and receiving the reflected light of the irradiation light (3) from the measurement object (W) below the table (2).
A measuring method for a measuring device including a measuring unit (12) having the light irradiating means (4) and the light receiving means (5).
The reference position or reference plane on the measurement unit (12) side is set as the first reference plane (DT).
The first reference position or reference plane set based on the distance of the upper surface of the table (2) from the first reference plane (DT), and the surface of the reflective member provided on the surface of the table (2). A reference position or reference plane set based on the distance from the reference plane (DT), or a position of a distance from the first reference plane (DT) on the surface of the reflective member provided on the surface of the table (2). The reference position or reference plane set by moving to an arbitrary or predetermined position is set as the second reference plane (DB).
The step of specifying or pre-specifying the measurement area (kt) of the measurement object (W),
First region surface shape data indicating the distance at each coordinate position (x, y) of the surface of the measurement object (W) from the first reference plane (DT) in each of the measurement regions (kt). The steps to generate amd) and
In each of the first region surface shape data (amd), a first representative value (G1) which is a representative value of a value indicating a distance from the first reference plane (DT) in each of the measurement regions (kt). ) And the steps to determine
The value of the data of the second reference plane (DB) is subtracted from the value of the data of the first representative value (G1), and the second reference plane (DB) in each of the measurement regions (kt). A step of determining a second representative value (G2), which is a representative value of a value indicating a distance from
Measurement method including. A transparent table (2) on which the object to be measured (W) is placed, and
Irradiation light (3) is irradiated from below the table (2) toward the measurement object (W) placed on the upper surface of the table (2) provided below the table (2). Light irradiation means (4) and
A light receiving means (5) provided below the table (2) and receiving the reflected light of the irradiation light (3) from the measurement object (W) below the table (2).
It is a measurement method of a measuring device including a measuring unit (12) having the light irradiating means (4) and the light receiving means (5).
The reference position or reference plane on the measurement unit (12) side is set as the first reference plane (DT).
The first reference position or reference plane set based on the distance of the upper surface of the table (2) from the first reference plane (DT), and the surface of the reflective member provided on the surface of the table (2). A reference position or reference plane set based on the distance from the reference plane (DT), or a position of a distance from the first reference plane (DT) on the surface of the reflective member provided on the surface of the table (2). The reference position or reference plane set by moving to an arbitrary or predetermined position is set as the second reference plane (DB).
The step of specifying or pre-specifying the measurement area (kt) of the measurement object (W),
Based on the light receiving information of the measurement object (W) received by the light receiving means (5), each coordinate position (x,) of the surface of the measurement object (W) from the first reference plane (DT). The step of generating the first surface shape data (asd) indicating the distance in y), and
In the first surface shape data (asd), at each coordinate position (x, y) of the surface of the measurement object (W) from the first reference plane (DT) in each of the measurement regions (kt). A step of generating first region surface shape data (amd) indicating a distance, and
In each of the measurement regions (kt), the value of the data of the second reference plane (DB) is subtracted from the value of the surface shape data (amd) of each of the first regions, and the second reference plane (DB) is used. A step of generating second region surface shape data (tmd) indicating a distance at each coordinate position (x, y) of the surface of the measurement object (W) from the above.
In each of the second region surface shape data (tmd), a second representative value (G2) which is a representative value of a value indicating a distance from the second reference plane (DB) in each of the measurement regions (kt). ) And the steps to determine
Measurement method including. A transparent table (2) on which the object to be measured (W) is placed, and
Irradiation light (3) is irradiated from below the table (2) toward the measurement object (W) placed on the upper surface of the table (2) provided below the table (2). Light irradiation means (4) and
A light receiving means (5) provided below the table (2) and receiving the reflected light of the irradiation light (3) from the measurement object (W) below the table (2).
A measuring method for a measuring device including a measuring unit (12) having the light irradiating means (4) and the light receiving means (5).
The reference position or reference plane on the measurement unit (12) side is set as the first reference plane (DT).
The first reference position or reference plane set based on the distance of the upper surface of the table (2) from the first reference plane (DT), and the surface of the reflective member provided on the surface of the table (2). A reference position or reference plane set based on the distance from the reference plane (DT), or a position of a distance from the first reference plane (DT) on the surface of the reflective member provided on the surface of the table (2). The reference position or reference plane set by moving to an arbitrary or predetermined position is set as the second reference plane (DB).
The step of specifying or pre-specifying the measurement area (kt) of the measurement object (W),
Based on the light receiving information of the measurement object (W) received by the light receiving means (5), each coordinate position (x,) of the surface of the measurement object (W) from the first reference plane (DT). The step of generating the first surface shape data (asd) indicating the distance in y), and
In the first surface shape data (asd), a step of generating first region surface shape data (amd) indicating a distance at each coordinate position (x, y) of each of the measurement regions (kt).
In each of the first region surface shape data (amd), a first representative value (G1) which is a representative value of a value indicating a distance from the first reference plane (DT) in each of the measurement regions (kt). ) And the steps to determine
The value of the data of the second reference plane (DB) is subtracted from the value of the data of the first representative value (G1), and from the second reference plane (DB) in each of the measurement regions (kt). The step of determining the second representative value (G2), which is the representative value of the value indicating the distance of
Measurement method including.

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