JP2019074475A - Optical scanning height measuring device - Google Patents

Abstract

To provide an optical scanning height measuring device that can efficiently measure the shape of a desired portion of a measurement object.SOLUTION: Whether a portion of a measurement object S is located within a predetermined measurement range in a height direction is determined. The distance between a measuring head 200 and the measurement object S can be adjusted. One portion of light emitted from an emission light output unit 231 is deflected by a scanning unit 270 as measurement light and emitted to a portion of the measurement object S corresponding to a measurement point. Another portion of the light is reflected on a reference body as reference light. The length of the light path of the reference light is changed by a light path length variable unit. The distance between the scanning unit 270 and the portion of the measurement object S corresponding to the measurement point is calculated on the basis of interference light generated by the measurement light reflected on the measurement object S and the reference light reflected on the reference body and the length of the light path of the reference light. The height of the portion of the measurement object S corresponding to the measurement point is calculated on the basis of the deflection direction of the scanning unit 270 or the irradiation position of the deflected measurement light and the calculated distance.SELECTED DRAWING: Figure 3

Description

  The present invention relates to an optical scanning height measurement device that measures the surface shape of a measurement object.

  An optical scanning height measuring device is used to measure the surface shape of the measurement object. For example, in the dimension measurement device described in Patent Document 1, light emitted from a white light source is divided into a measurement light beam and a reference light beam by an optical coupler. The measurement light beam is scanned by the measurement object scanning optical system and irradiated to any measurement point on the surface of the object to be measured. The reference light beam is irradiated to the reference light scanning optical system. The surface height of the measurement point of the object to be measured is determined based on the interference between the measurement light flux reflected by the object to be measured and the reference light flux.

JP, 2010-43954, A

  By using the dimension measurement device of Patent Document 1, it is possible to measure the shape of the desired part of the measurement object. In this case, in order to irradiate the measurement light flux to the part, it is necessary to accurately determine the position and posture of the measurement object with respect to the dimension measurement device, and to prepare the position coordinates of the part in advance. However, the operation of placing the measurement object while maintaining the position and posture accurately is troublesome. Therefore, the desired part of the measurement object can not be easily designated, and the part can not be measured efficiently.

  An object of the present invention is to provide a light scanning height measuring device capable of efficiently measuring the shape of a desired portion of a measurement object.

  (1) The optical scanning height measuring device according to the present invention is an optical scanning height measuring device for calculating the height of the portion of the measurement object corresponding to the measuring point in the measuring area, and the designation of the measuring point A part of the light emitted from the receiving part, the outgoing light output part for emitting light with low temporal coherence, and the outgoing light output part as measurement light, and the other part of the light as reference light , A reference body that reflects the reference light output from the branch portion, an optical path movable portion that changes the optical path length of the reference light between the branch portion and the reference body, and a measurement that is output from the branch portion It generates interference light between a deflection unit that deflects light and irradiates the measurement object, and measurement light that is reflected by the measurement object and is returned to the branching unit and reference light that is reflected by the reference body and is returned to the branching unit. Measurement of the interference light generation unit and the height direction in which the portion of the measurement object is determined in advance A range determination unit that determines whether or not it is positioned within the enclosure, a distance adjustment unit that adjusts the distance between the deflection unit and the measurement object, and interference light generated by the interference light generation unit are received. And a drive control unit for controlling the deflection unit so that the measurement light is irradiated to the portion of the measurement object corresponding to the measurement point, and an output by the optical path length of the reference light and the light reception unit A first distance information calculation unit that calculates the distance between the deflection unit and the portion of the measurement object corresponding to the measurement point based on the received light signal, and the deflection direction of the deflection unit or deflection by the deflection unit And a height calculation unit that calculates the height of the portion of the measurement object corresponding to the measurement point based on the irradiation position of the measurement light and the distance calculated by the first distance information calculation unit.

  In this light scanning height measuring device, the designation of the measurement point in the measurement area is received by the reception unit. It is determined by the range determination unit whether or not the portion of the measurement object is positioned within the measurement range in the height direction determined in advance. The distance between the deflection unit and the measurement object can be adjusted by the distance adjustment unit.

  A part of temporally low coherence light emitted from the outgoing light output unit is output as measurement light by the branching unit, and another part of the light is output as reference light. The measuring beam output from the branching unit is deflected by the deflecting unit and irradiated to the measurement object. The deflection unit is controlled by the drive control unit so that the measurement light is irradiated to the portion of the measurement object corresponding to the measurement point. On the other hand, the reference light output from the branching portion is reflected by the reference body. The optical path length of the reference light between the branch portion and the reference body is changed by the optical path length movable portion.

  Interference light is generated by the interference light generation unit between the measurement light reflected by the measurement object and returned to the branch portion, and the reference light reflected by the reference body and returned to the branch portion. The interference light generated by the interference light generation unit is received by the light reception unit, and a light reception signal indicating the amount of light reception is output. The first distance information calculation unit calculates the distance between the deflection unit and the portion of the measurement object corresponding to the measurement point based on the optical path length of the reference light and the light reception signal output by the light reception unit. The height of the portion of the measurement object corresponding to the measurement point is high based on the deflection direction of the deflection unit or the irradiation position of the measurement light deflected by the deflection unit and the distance calculated by the first distance information calculation unit Calculated by the length calculator.

  According to this configuration, the height of the portion of the measurement object corresponding to the designated measurement point is calculated by the user designating the desired measurement point. Therefore, the user does not have to place the object to be measured in a state in which the position and the attitude with respect to the light scanning height measuring device are accurately adjusted, and it is not necessary to prepare the position coordinates of the measuring point in advance.

  On the other hand, in order to calculate the height of the part of the measurement object, it is necessary to place the measurement object so that the part is located within the measurement range. Here, since the range determination unit determines whether or not the portion of the measurement object is located within the measurement range, the user positions the portion within the measurement range by the distance adjustment unit based on the determination result. As such, the distance between the deflecting unit and the measurement object can be adjusted. As a result, it is possible to efficiently measure the shape of the desired part of the measurement object.

  (2) The range determination unit may determine whether or not the portion of the measurement object is positioned within the measurement range based on the light reception amount of the interference light in the light reception signal output by the light reception unit. In this case, it can be determined with a simple configuration whether or not the portion of the measurement object is located within the measurement range.

  (3) The light scanning height measuring device is reflected by the determination light output unit that emits the determination light irradiated on the measurement object so as to overlap with the measurement light irradiated on the measurement object from the deflection unit, and the reflection by the measurement object Based on the time difference between the determination light detection unit that detects the determined determination light and the determination light output unit that emits the determination light and the determination light detection unit detects the determination light, the deflection unit and the measurement target And a second distance information calculation unit for calculating the distance between the two, wherein the range determination unit is configured to position the portion of the measurement object within the measurement range based on the distance calculated by the second distance information calculation unit. It may be determined whether or not. In this case, it can be determined more reliably whether or not the portion of the measurement object is located within the measurement range.

  (4) The range determination unit may output a determination message indicating whether or not the portion of the measurement object is located within the measurement range. In this case, the user can easily recognize whether or not the portion of the measurement object is located within the measurement range by visually recognizing the determination message.

  (5) When it is determined that the part of the measurement object is not located within the measurement range, the distance adjustment unit is between the deflection part and the measurement object so that the part of the measurement object is located within the measurement range The distance may be adjusted automatically. In this case, the user can easily position the portion of the measurement object within the measurement range.

  (6) The optical scanning height measurement apparatus further includes a mounting table on which the measurement object is mounted, and the range determination unit simultaneously positions the portion of the measurement object and the mounting surface of the mounting table within the measurement range It may be determined whether it is possible or not. In this case, the user can easily determine whether or not the portion of the measurement object and the mounting surface of the mounting table can be simultaneously positioned within the measurement range.

  (7) The distance adjustment unit determines that the portion of the measurement object and the mounting surface of the mounting table can be simultaneously positioned within the measurement range, the portion of the measurement object and the mounting table The distance between the deflecting unit and the object to be measured may be automatically adjusted so that the mounting surface is simultaneously positioned within the measurement range. In this case, the user can easily position the portion of the measurement object and the mounting surface of the mounting table at the same time within the measurement range.

  (8) The distance adjustment unit may adjust the distance between the deflection unit and the measurement object such that the lower limit of the measurement range is located on the mounting surface of the mounting table. In this case, the user can secure a large measurement range in the height direction above the mounting surface of the mounting table.

  (9) The receiving unit receives the designation of the plurality of measurement points, and the range determination unit determines whether or not the plurality of portions of the measurement object corresponding to the plurality of measurement points can be simultaneously positioned within the measurement range It may be determined. In this case, the user can easily determine whether or not desired portions of the measurement object can be simultaneously positioned within the measurement range.

  (10) When it is determined that the plurality of portions of the measurement object can be simultaneously positioned within the measurement range, the distance adjustment unit is configured such that the plurality of portions of the measurement object are simultaneously positioned within the measurement range The distance between the deflection unit and the measurement object may be adjusted automatically. In this case, the user can easily position the desired portions of the measurement object at the same time within the measurement range.

  (11) The distance adjustment unit adjusts the distance between the deflection unit and the measurement object so that the representative portion in the height direction determined by the plurality of portions of the measurement object is positioned at the center in the height direction of the measurement range You may In this case, the user can position the desired portions of the measurement object within the measurement range more reliably.

  (12) The light scanning height measurement apparatus further includes an image acquisition unit that acquires an image of the measurement object, and the reception unit receives specification of a measurement point on the image of the measurement object acquired by the image acquisition unit. May be In this case, the user can easily designate the measurement point on the image of the measurement object.

  (13) The optical scanning height measurement apparatus is configured to set the measurement point on the first measurement target placed in the measurement area, and on the second measurement target placed in the measurement area. Configured to selectively operate in the measurement mode for measuring the height of the portion corresponding to the measurement point, and further including a registration unit, the reception unit receiving specification of the measurement point in the setting mode, and determining the range The unit determines whether or not the portion of the first measurement object is located within the measurement range in the setting mode, and the distance adjustment unit is between the deflection unit and the first measurement object in the setting mode. The registration unit registers the distance between the measurement point received by the reception unit and the distance adjusted by the distance adjustment unit in the setting mode, and the distance adjustment unit registers by the registration unit in the measurement mode. Based on the measured distance and the second measurement The drive control unit adjusts the distance between the object and the deflection unit so that the measurement light is irradiated to the portion of the second measurement object corresponding to the measurement point registered by the registration unit in the measurement mode. The first distance information calculation unit calculates the distance between the deflection unit and the portion of the second measurement object corresponding to the measurement point in the measurement mode, and the height calculation unit measures the measurement mode. A portion of the second measurement object corresponding to the measurement point based on the deflection direction of the deflection unit or the irradiation position of the measurement light deflected by the deflection unit and the distance calculated by the first distance information calculation unit You may calculate the height of.

  In this case, the optical scanning height measuring device selectively operates in the setting mode and the measuring mode. In the setting mode, the measurement point is designated, and it is determined whether or not the portion of the first measurement object is located within the measurement range. The distance between the deflection unit and the first measuring object can be adjusted so that the portion of the first measuring object lies within the measuring range. The designated measurement point and the distance between the deflection unit and the first measurement object are registered. In the measurement mode, the distance between the deflection unit and the second measurement object is adjusted on the basis of the registered distance. Further, the height of the portion of the second measurement object corresponding to the registered measurement point is calculated.

  Therefore, by performing registration in the setting mode by a skilled user, it is possible to uniformly obtain the calculation result of the height of the desired part even when the user is not skilled in the measurement mode. This makes it possible to efficiently measure the shape of the desired part of the measurement object.

  According to the present invention, it is possible to efficiently measure the shape of the desired part of the measurement object.

FIG. 1 is a block diagram showing an entire configuration of an optical scanning height measurement device according to an embodiment of the present invention. It is an external appearance perspective view which shows the stand part of FIG. It is a block diagram which shows the structure of a stand part and a measurement head. It is a schematic diagram which shows the structure of a measurement part. It is a schematic diagram which shows arrangement | positioning of a determination light output part and the determination light detection part. It is a schematic diagram which shows the structure of a reference part. It is a schematic diagram which shows the structure of a focusing part. It is a schematic diagram which shows the structure of a scanning part. It is a figure which shows an example of the selection screen displayed on the display part of an optical scanning height measurement apparatus. It is a figure which shows the content of the data transmitted between a control part and a control board in each operation mode. It is a block diagram which shows the control system of the optical scanning height measurement apparatus of FIG. It is a figure which shows an example of the report produced by a report production part. It is a flowchart which shows an example of the optical scanning height measurement process performed in the optical scanning height measurement apparatus of FIG. It is a flowchart which shows an example of the optical scanning height measurement process performed in the optical scanning height measurement apparatus of FIG. It is a flowchart which shows an example of the optical scanning height measurement process performed in the optical scanning height measurement apparatus of FIG. It is a flowchart which shows an example of the optical scanning height measurement process performed in the optical scanning height measurement apparatus of FIG. It is a flowchart which shows an example of the position setting process by a control board. It is a flowchart which shows an example of the designation | designated measurement process by a control board. It is a flowchart which shows an example of the designation | designated measurement process by a control board. FIG. 20 is an explanatory diagram for describing the designated measurement process of FIGS. 18 and 19; FIG. 20 is an explanatory diagram for describing the designated measurement process of FIGS. 18 and 19; It is a flowchart which shows the other example of the designation | designated measurement process by a control board. It is a flowchart which shows the other example of the designation | designated measurement process by a control board. FIG. 24 is an explanatory diagram for describing the designated measurement process of FIGS. 22 and 23; It is a figure for demonstrating the operation example of the optical scanning height measurement apparatus in setting mode. It is a figure for demonstrating the operation example of the optical scanning height measurement apparatus in setting mode. It is a figure for demonstrating the operation example of the optical scanning height measurement apparatus in setting mode. It is a figure for demonstrating the operation example of the optical scanning height measurement apparatus in setting mode. It is a figure for demonstrating the operation example of the optical scanning height measurement apparatus in setting mode. It is a figure for demonstrating the operation example of the optical scanning height measurement apparatus in setting mode. It is a figure for demonstrating the operation example of the optical scanning height measurement apparatus in setting mode. It is a figure for demonstrating the other operation example of the optical scanning height measurement apparatus in setting mode. It is a figure for demonstrating the other operation example of the optical scanning height measurement apparatus in setting mode. It is a figure for demonstrating the other operation example of the optical scanning height measurement apparatus in setting mode. It is a figure for demonstrating the other operation example of the optical scanning height measurement apparatus in setting mode. It is a figure for demonstrating the operation example of the optical scanning height measuring apparatus in measurement mode. It is a figure for demonstrating the operation example of the optical scanning height measuring apparatus in measurement mode. It is a figure for demonstrating the operation example of the optical scanning height measuring apparatus in measurement mode. It is a block diagram showing a control system of a light scanning height measuring device concerning a modification.

(1) Overall Configuration of Light Scanning Height Measuring Device Hereinafter, a light scanning height measuring device according to an embodiment of the present invention will be described with reference to the drawings. FIG. 1 is a block diagram showing an entire configuration of an optical scanning height measuring device according to an embodiment of the present invention. FIG. 2 is an external perspective view showing the stand unit 100 of FIG. As shown in FIG. 1, the optical scanning height measuring device 400 includes a stand unit 100, a measuring head 200 and a processing device 300.

  The stand unit 100 has an L-shaped longitudinal cross section, and includes an installation unit 110, a holding unit 120, and an elevation unit 130. The installation unit 110 has a horizontal flat plate shape and is installed on the installation surface. As shown in FIG. 2, a square optical surface plate 111 on which the measurement object S is mounted is provided on the upper surface of the installation unit 110. Above the optical surface plate 111, a measurement area V in which the measurement object S can be measured by the measurement head 200 is defined. In FIG. 2, the measurement area V is illustrated by a dotted line. The range of the measurement area V in the vertical direction (the height direction of the measurement object S) is referred to as a measurement range. The measurement range is determined by the distance from the measurement head 200 in the vertical direction. Details of the measurement range will be described later.

  A plurality of screw holes are formed in the optical surface plate 111 at equal intervals in two directions orthogonal to each other. Thereby, the measuring object S can be fixed to the optical surface plate 111 in a state where the surface of the measuring object S is positioned in the measuring area V using the clamp member and the screw member.

  The holding portion 120 is provided to extend upward from one end of the installation portion 110. The measurement head 200 is attached to the upper end portion of the holding unit 120 so as to face the upper surface (hereinafter, referred to as a mounting surface) of the optical surface plate 111. In this case, since the measurement head 200 and the installation unit 110 are held by the holding unit 120, the handling of the light scanning height measurement apparatus 400 is facilitated. In addition, by placing the measurement target S on the optical surface plate 111 on the installation unit 110, the measurement target S can be easily positioned in the measurement area V.

  As shown in FIG. 1, the elevation unit 130 is provided inside the holding unit 120. The elevating unit 130 can move the measuring head 200 in the vertical direction with respect to the measurement target S on the optical surface plate 111. By moving the measuring head 200 in the vertical direction, the measuring range is in the vertical direction.

  The measurement head 200 includes a control substrate 210, an imaging unit 220, an optical unit 230, a light guide unit 240, a reference unit 250, a focusing unit 260, and a scanning unit 270. The control board 210 includes, for example, a CPU (central processing unit), a ROM (read only memory) and a RAM (random access memory). The control substrate 210 may be configured by a microcomputer.

  The control substrate 210 is connected to the processing apparatus 300, and controls operations of the elevation unit 130, the imaging unit 220, the optical unit 230, the reference unit 250, the focusing unit 260, and the scanning unit 270 based on an instruction from the processing apparatus 300. . The control substrate 210 also gives the processing apparatus 300 various information acquired from the imaging unit 220, the optical unit 230, the reference unit 250, the focusing unit 260, and the scanning unit 270. The imaging unit 220 generates image data of the measurement object S by imaging the measurement object S placed on the optical surface plate 111, and gives the generated image data to the control substrate 210.

  The optical unit 230 emits outgoing light having temporally low coherence to the light guiding unit 240. The light guiding unit 240 divides the light emitted from the optical unit 230 into reference light and measurement light, guides the reference light to the reference unit 250, and guides the measurement light to the focusing unit 260. The reference unit 250 reflects the reference light to the light guide 240. The focusing unit 260 focuses the measurement light passing through the focusing unit 260. The scanning unit 270 scans the measurement light focused by the focusing unit 260 to irradiate the measurement light to a desired portion of the measurement object S.

  A part of the measurement light irradiated to the measurement object S is reflected by the measurement object S, and is guided to the light guiding unit 240 through the scanning unit 270 and the focusing unit 260. The light guiding unit 240 generates interference light between the reference light reflected by the reference unit 250 and the measurement light reflected by the measurement object S, and guides the interference light to the optical unit 230. The optical unit 230 detects the amount of light received for each wavelength of the interference light, and provides a signal indicating the detection result to the control substrate 210. Details of the measurement head 200 will be described later.

  The processing device 300 includes a control unit 310, a storage unit 320, an operation unit 330, and a display unit 340. Control unit 310 includes, for example, a CPU. The storage unit 320 includes, for example, a ROM, a RAM, and an HDD (Hard Disk Drive). The storage unit 320 stores system programs. The storage unit 320 is also used for storing various data and processing the data.

  Control unit 310 controls the operation of imaging unit 220, optical unit 230, reference unit 250, focusing unit 260 and scanning unit 270 of measurement head 200 based on the system program stored in storage unit 320. To the control substrate 210. Further, the control unit 310 acquires various information from the control substrate 210 of the measurement head 200 and causes the storage unit 320 to store the information.

  The operation unit 330 includes a mouse, a touch panel, a pointing device such as a trackball or a joystick, and a keyboard, and is operated by the user to give an instruction to the control unit 310. The display unit 340 includes, for example, an LCD (liquid crystal display) panel or an organic EL (electroluminescence) panel. The display unit 340 displays an image, a measurement result, and the like based on the image data stored in the storage unit 320.

(2) Lifting Unit and Light Guide Unit FIG. 3 is a block diagram showing the configuration of the stand unit 100 and the measuring head 200. As shown in FIG. In FIG. 3, detailed configurations of the elevation unit 130, the optical unit 230, and the light guide unit 240 are shown. As shown in FIG. 3, the elevation unit 130 includes a drive unit 131, a drive circuit 132, and a reading unit 133.

  The drive unit 131 is, for example, a motor, and moves the measurement head 200 in the vertical direction with respect to the measurement object S on the optical surface plate 111, as indicated by a thick arrow in FIG. Thus, the optical path length of the measurement light can be adjusted over a wide range. Here, the optical path length of the measurement light is an optical length until the measurement light reflected by the measurement object S is input to the port 245 d after the measurement light is output from the port 245 d of the light guide 240 described later. It is the length of the light path.

  The drive circuit 132 is connected to the control substrate 210 and drives the drive unit 131 based on control by the control substrate 210. The reading unit 133 is, for example, an optical linear encoder, and detects the amount of drive of the drive unit 131 to detect the position of the measuring head 200 in the vertical direction. Further, the reading unit 133 gives the detection result to the control board 210.

  The optical unit 230 includes an emitted light output unit 231, a measurement unit 232, a determination light output unit 233, and a determination light detection unit 234. The outgoing light output unit 231 includes, for example, an SLD (super luminescent diode) as a light source, and emits outgoing light having relatively low coherence. Specifically, the coherence of emitted light is higher than the coherence of light emitted by an LED (light emitting diode) or white light, and lower than the coherence of laser light. Therefore, the emitted light has a wavelength bandwidth narrower than the wavelength bandwidth of the light emitted by the LED or the white light and wider than the wavelength bandwidth of the laser light. Light emitted from the optical unit 230 is input to the light guide unit 240.

  Interference light is output from the light guiding unit 240 to the measuring unit 232. FIG. 4 is a schematic view showing the configuration of the measurement unit 232. As shown in FIG. As shown in FIG. 4, the measuring unit 232 includes lenses 232a and 232c, a spectral unit 232b, and a light receiving unit 232d. The interference light output from the optical fiber 242 of the light guide 240 described later is substantially collimated by passing through the lens 232 a and is incident on the light splitting unit 232 b. The spectral unit 232 b is, for example, a reflective diffraction grating. The light incident on the light splitting unit 232b is split to reflect light at different angles for each wavelength, and is focused at a different one-dimensional position for each wavelength by passing through the lens 232c.

  The light receiving unit 232 d includes, for example, an imaging device (one-dimensional line sensor) in which a plurality of pixels are arranged in a one-dimensional manner. The imaging device may be a multi-split PD (photodiode), a CCD (charge coupled device) camera, a CMOS (complementary metal oxide semiconductor) image sensor, or another device. The light receiving unit 232 d is disposed such that the plurality of pixels of the imaging device receive light at a plurality of focusing positions that are different for each wavelength formed by the lens 232 c.

  An analog electric signal (hereinafter referred to as a light reception signal) corresponding to the amount of light received is output from each pixel of the light receiving unit 232 d and is applied to the control substrate 210 in FIG. 3. Thereby, the control substrate 210 acquires data indicating the relationship between each pixel (wavelength of interference light) of the light receiving unit 232 d and the light receiving amount. The control substrate 210 calculates the height of the portion of the measurement target S by performing predetermined calculations and processing on the data.

  FIG. 5 is a schematic view showing the arrangement of the determination light output unit 233 and the determination light detection unit 234. As shown in FIG. As shown in FIG. 5, the determination light output unit 233 emits, for example, determination light in the visible region. The wavelength range of the determination light is not limited to the visible range, and may be another range. In addition, as described later, the light guiding unit 240 includes an optical fiber 244 and a dichroic mirror 247. The reflectance of the dichroic mirror 247 has wavelength selectivity. Specifically, it has a high reflectance (preferably 100%) in the wavelength region of the determination light, and a low reflectance (preferably 0%) in the wavelength region of the measurement light.

  The dichroic mirror 247 is disposed on the optical path of the measurement light output from the optical fiber 244, and superposes the optical path of the measurement light and the optical path of the determination light. Thereby, the determination light is guided to the focusing unit 260 through the same optical path as the measurement light. In addition, as described later, a part of the determination light or the measurement light is reflected by the measurement object S, and then guided to the dichroic mirror 247 through the focusing unit 260. Thereafter, the determination light is reflected by the dichroic mirror 247 and detected by the determination light detection unit 234. A detection signal indicating that the determination light is detected by the determination light detection unit 234 is given to the control substrate 210 of FIG. The control substrate 210 calculates the distance between the scanning unit 270 and the object S based on the detection signal.

  In the above arrangement, the optical path of the determination light is superimposed on the optical path of the measurement light output from the optical fiber 244, but the present invention is not limited thereto. The optical path of the determination light may be superimposed on the optical path of the outgoing light output from the outgoing light output unit 231 of FIG. 3. Further, the optical path of the measurement light and the optical path of the determination light may be overlapped by a half mirror, or may be overlapped by a fiber coupler and an optical fiber. In this case, the fiber coupler has a so-called 2 × 1 configuration.

  As shown in FIG. 3, the light guiding unit 240 includes four optical fibers 241, 242, 243 and 244, a fiber coupler 245, a lens 246 and a dichroic mirror 247. The fiber coupler 245 has a so-called 2 × 2 configuration, and includes four ports 245a, 245b, 245c, 245d and a main body 245e. The ports 245a and 245b and the ports 245c and 245d are provided in the main body 245e so as to face each other with the main body 245e interposed therebetween.

  The optical fiber 241 is connected between the outgoing light output unit 231 and the port 245a. The optical fiber 242 is connected between the measurement unit 232 and the port 245b. The optical fiber 243 is connected between the reference unit 250 and the port 245c. The optical fiber 244 is connected between the focusing unit 260 and the port 245d. In the present embodiment, the optical fiber 243 is longer than the optical fibers 241, 242 and 244. The lens 246 is disposed on the optical path between the optical fiber 243 and the reference unit 250. The dichroic mirror 247 is disposed on the optical path between the optical fiber 244 and the focusing unit 260.

  The outgoing light from the outgoing light output unit 231 is input to the port 245 a through the optical fiber 241. A part of the emitted light input to the port 245a is output from the port 245c as a reference light. The reference light is substantially collimated by passing through the optical fiber 243 and the lens 246, and is guided to the reference unit 250. Also, the reference light reflected by the reference unit 250 is input to the port 245 c through the lens 246 and the optical fiber 243.

  The other part of the emitted light input to the port 245a is output as measurement light from the port 245d. The measurement light is irradiated to the measurement object S through the optical fiber 244, the focusing unit 260 and the scanning unit 270. Further, the determination light is irradiated onto the measurement object S through the focusing unit 260 and the scanning unit 270. A part of the measurement light or determination light reflected by the measurement target S passes through the scanning unit 270 and the focusing unit 260.

  Thereafter, the determination light is reflected by the dichroic mirror 247 to be guided to the determination light detection unit 234, and the measurement light is input to the port 245 d through the dichroic mirror 247 and the optical fiber 244. The reference light input to the port 245 c and the measurement light input to the port 245 d are output as interference light from the port 245 b, and are guided to the measurement unit 232 through the optical fiber 242.

(3) Reference Section FIG. 6 is a schematic view showing the configuration of the reference section 250. As shown in FIG. As shown in FIG. 6, the reference unit 250 includes a fixed unit 251, a linear guide 251g linearly extending, movable units 252a and 252b, a fixed mirror 253, movable mirrors 254a, 254b and 254c, drive units 255a and 255b, and a drive circuit. 256a, 256b and a reading unit 257a, 257b. The fixing portion 251 and the linear guide 251 g are fixed to the main body of the measuring head 200. The movable portions 252a and 252b are attached to the linear guide 251g so as to be movable along the direction in which the linear guide 251g extends.

  The fixed mirror 253 is attached to the fixed portion 251. The movable mirrors 254a and 254c are attached to the movable portion 252a. The movable mirror 254b is attached to the movable portion 252b. The movable mirror 254c is used as a so-called reference mirror. The movable mirror 254c is preferably configured by a corner cube. In this case, the arrangement of the optical members can be easily performed.

  The reference light output from the optical fiber 243 is substantially collimated by passing through the lens 246, and then sequentially reflected by the fixed mirror 253, the movable mirror 254a, the movable mirror 254b, and the movable mirror 254c. The reference light reflected by the movable mirror 254 c is sequentially reflected by the movable mirror 254 b, the movable mirror 254 a and the fixed mirror 253, and is input to the optical fiber 243 through the lens 246.

  The driving units 255a and 255b are, for example, voice coil motors, and move the movable units 252a and 252b with respect to the fixed unit 251 along the direction in which the linear guide 251g extends, as shown by the white arrow in FIG. . In this case, the distance between the fixed mirror 253 and the movable mirror 254a, the distance between the movable mirror 254a and the movable mirror 254b, and the movable mirror 254b and the movable mirror 254c in the direction parallel to the moving direction of the movable portions 252a and 252b. The distance between and changes. Thereby, the optical path length of the reference light can be adjusted.

  Here, the optical path length of the reference light is an optical path length until the reference light reflected by the movable mirror 254 c is input to the port 245 c after the reference light is output from the port 245 c of FIG. 3 is there. The range of the optical path length of the reference light adjustable by the movable portions 252a and 252b is the measurement range. In the present embodiment, the measurement range is, for example, 30 mm. When the difference between the optical path length of the reference light and the optical path length of the measurement light is smaller than a predetermined value, interference light between the reference light and the measurement light is output from the port 245b of FIG.

  In the present embodiment, the movable parts 252a and 252b move in the opposite direction to each other along the direction in which the linear guide 251g extends, but the present invention is not limited to this. Only one of the movable portion 252a and the movable portion 252b may move along the direction in which the linear guide 251g extends, and the other may not move. In this case, the other non-moving movable portions 252a and 252b may be fixed as the non-movable portion to the fixed portion 251 or the main body of the measurement head 200 instead of the linear guide 251g.

  The drive circuits 256a and 256b are connected to the control substrate 210 of FIG. 3 and drive the drive units 255a and 255b based on the control of the control substrate 210. The reading units 257a and 257b are, for example, optical linear encoders. The reading unit 257a detects the relative position of the movable unit 252a with respect to the fixed unit 251 by reading the driving amount of the driving unit 255a, and gives the detection result to the control substrate 210. The reading unit 257 b detects the relative position of the movable unit 252 b with respect to the fixed unit 251 by reading the driving amount of the driving unit 255 b, and gives the detection result to the control substrate 210.

(4) Focusing Unit FIG. 7 is a schematic view showing a configuration of the focusing unit 260. As shown in FIG. As shown in FIG. 7, the focusing unit 260 includes a fixed unit 261, a movable unit 262, a movable lens 263, a drive unit 264, a drive circuit 265, and a reading unit 266. The movable portion 262 is attached to the fixed portion 261 so as to be movable along one direction. The movable lens 263 is attached to the movable portion 262. The movable lens 263 is used as an objective lens to focus light passing therethrough. In FIG. 7, the dichroic mirror 247 and the determination light are not shown.

  The measurement light output from the optical fiber 244 is guided to the scanning unit 270 in FIG. 3 through the dichroic mirror 247 and the movable lens 263. The determination light reflected by the dichroic mirror 247 is guided to the scanning unit 270 in FIG. 3 through the movable lens 263. A part of the measurement light or determination light reflected by the measurement target S in FIG. 3 passes through the scanning unit 270 and then passes through the movable lens 263. After that, the determination light is guided to the determination light detection unit 234 by the dichroic mirror 247 in FIG. 5, and the measurement light is input to the optical fiber 244 through the dichroic mirror 247.

  The driving unit 264 is, for example, a voice coil motor, and moves the movable unit 262 in one direction (the traveling direction of the measurement light) with respect to the fixed unit 261 as indicated by a thick arrow in FIG. 7. Thereby, the focus of the measurement light can be located on the surface of the measurement object S.

  The drive circuit 265 is connected to the control substrate 210 of FIG. 3 and drives the drive unit 264 based on control by the control substrate 210. The reading unit 266 is, for example, an optical linear encoder, and detects the relative position of the movable unit 262 (movable lens 263) with respect to the fixed unit 261 by reading the driving amount of the drive unit 264. Further, the reading unit 266 gives the detection result to the control substrate 210.

  A collimator lens may be disposed between the optical fiber 244 and the movable lens 263 to collimate the measurement light output from the optical fiber 244. In this case, the measurement light incident on the movable lens 263 is collimated, and the beam diameter of the measurement light does not change regardless of the movement position of the movable lens, so that the movable lens can be formed in a small size.

(5) Scanning Unit FIG. 8 is a schematic view showing the configuration of the scanning unit 270. As shown in FIG. As shown in FIG. 8, the scanning unit 270 includes deflection units 271 and 272, drive circuits 273 and 274, and reading units 275 and 276. The deflection unit 271 is formed of, for example, a galvano mirror, and includes a drive unit 271a and a reflection unit 271b. The drive unit 271a is, for example, a motor having a substantially vertical rotation axis. The reflective portion 271b is attached to the rotation shaft of the drive portion 271a. The measurement light or the determination light which has passed through the focusing unit 260 from the optical fiber 244 in FIG. 3 is guided to the reflection unit 271 b. When the drive unit 271a rotates, the reflection angle of the measurement light or the determination light reflected by the reflection unit 271b changes in a substantially horizontal plane.

  The deflecting unit 272 is, for example, a galvano mirror similar to the deflecting unit 271, and includes a drive unit 272a and a reflecting unit 272b. The drive unit 272a is, for example, a motor having a horizontal rotation axis. The reflective portion 272b is attached to the rotation axis of the drive portion 272a. The measurement light or the determination light reflected by the reflection unit 271 b is guided to the reflection unit 272 b. As the drive unit 272a rotates, the reflection angle of the measurement light or the determination light reflected by the reflection unit 272b changes in a substantially vertical plane.

  Thus, when the drive units 271a and 272a rotate, the measurement light or the determination light is scanned in two directions orthogonal to each other on the surface of the measurement target S in FIG. Thereby, measurement light or determination light can be irradiated to any position on the surface of the measurement object S. The measurement light or the determination light irradiated to the measurement object S is reflected on the surface of the measurement object S. The reflected measurement light or a part of the determination light is sequentially reflected by the reflection unit 272b and the reflection unit 271b, and is then guided to the focusing unit 260 in FIG.

  The drive circuits 273 and 274 are connected to the control substrate 210 of FIG. 3 and drive the drive units 271 a and 272 a based on the control of the control substrate 210. The reading units 275 and 276 are, for example, optical rotary encoders. The reading unit 275 detects the angle of the reflecting unit 271 b by reading the driving amount of the driving unit 271 a, and gives the detection result to the control substrate 210. The reading unit 276 detects the angle of the reflecting unit 272 b by reading the driving amount of the driving unit 272 a, and gives the detection result to the control substrate 210.

(6) Operation Mode The optical scanning height measurement apparatus 400 of FIG. 1 operates in an operation mode selected by the user from a plurality of operation modes. Specifically, the operation mode includes a setting mode, a measurement mode and a height gauge mode. FIG. 9 is a view showing an example of the selection screen 341 displayed on the display unit 340 of the light scanning height measuring device 400. As shown in FIG.

  As shown in FIG. 9, on the selection screen 341 of the display unit 340, a setting button 341a, a measurement button 341b and a height gauge button 341c are displayed. When the user operates the setting button 341a, the measurement button 341b and the height gauge button 341c using the operation unit 330 of FIG. 1, the optical scanning height measuring device 400 operates in the setting mode, the measurement mode and the height gauge mode.

  In the following description, among the users, a skilled user who manages the measurement operation of the measurement object S is appropriately referred to as a measurement manager, and a user who performs the measurement operation of the measurement object S under the management of the measurement administrator. Is appropriately called a measurement worker. The setting mode is mainly used by the measurement manager, and the measurement mode is mainly used by the measurement operator.

  Here, in the optical scanning height measuring device 400, a three-dimensional coordinate system unique to the space including the measurement area V of FIG. 2 is defined in advance by the X axis, the Y axis, and the Z axis. Here, the X axis and the Y axis are parallel to and orthogonal to the optical surface plate 111 of FIG. 2, and the Z axis is orthogonal to the X axis and the Y axis. In each operation mode, data of coordinates specified by the above-mentioned coordinate system and data of plane coordinates on an image acquired by imaging of the imaging unit 220 are transmitted between the control unit 310 and the control substrate 210. FIG. 10 shows the contents of data transmitted between control unit 310 and control board 210 in each operation mode.

  In the setting mode, the measurement manager can register information on the desired measurement object S in the light scanning height measurement device 400. Specifically, the measurement manager places the desired measurement object S on the optical surface plate 111 of FIG. 2, and images the measurement object S by the imaging unit 220 of FIG. Further, the measurement manager designates a portion to be measured of the measurement target S displayed on the display unit 340 of FIG. 1 as a measurement point on the image. In this case, as shown in FIG. 10A, the control unit 310 gives plane coordinates (Ua, Va) specified by the measurement point designated on the image to the control substrate 210.

  Here, in order to calculate the height of the portion of the measurement target S corresponding to the measurement point, the portion needs to be located within the measurement range. Therefore, the control substrate 210 determines whether or not the portion of the measurement object S is within the measurement range based on the distance between the measurement head 200 (specifically, the deflection unit 272 in FIG. 8) and the measurement object S. Determine if

  When the portion of the measurement object S is not located within the measurement range, the measurement operator gives an instruction to the drive circuit 132 of FIG. 3 to move the measurement head 200 in the vertical direction, thereby positioning the portion within the measurement range. It can be done. Alternatively, when the portion of the measurement object S is not located within the measurement range, the measurement head 200 may be automatically moved up and down so that the portion is located within the measurement range by control from the control substrate 210 .

  Thereafter, the control substrate 210 specifies three-dimensional coordinates (Xc, Yc, Zc) of the position corresponding to the plane coordinates (Ua, Va) in the measurement area V of FIG. 2, and specifies the specified three-dimensional coordinates (Xc, The control unit 310 is supplied with Yc and Zc). Further, height information indicating the position in the vertical direction of the measuring head 200 read by the reading unit 133 in FIG. 3 is given to the control unit 310. The control unit 310 stores the three-dimensional coordinates (Xc, Yc, Zc) and height information given by the control substrate 210 in the storage unit 320 of FIG. In addition, the control unit 310 calculates the height of the portion corresponding to the measurement point based on the three-dimensional coordinates (Xc, Yc, Zc) stored in the storage unit 320 and information such as a reference surface described later, and the calculation result Are stored in the storage unit 320.

  The measurement mode is used to measure the height of the portion corresponding to the measurement point for the measurement object S of the same type as the measurement object S whose information is registered in the optical scanning height measurement apparatus 400 in the setting mode. . Specifically, the measurement worker places, on the optical surface plate 111, the measurement target S of the same type as the measurement target S whose information is registered in the optical scanning height measurement apparatus 400 in the setting mode, and captures an image. The image is taken by the unit 220. In this case, as shown in FIG. 10B, the control unit 310 gives the control substrate 210 three-dimensional coordinates (Xc, Yc, Zc) and height information stored in the storage unit 320 in the setting mode.

  The control substrate 210 adjusts the vertical position of the measurement head 200 based on the acquired height information. Further, the control substrate 210 calculates three-dimensional coordinates (Xb, Yb, Zb) of the portion of the measurement target S corresponding to the measurement point based on the acquired three-dimensional coordinates (Xc, Yc, Zc). Further, the control board 210 gives the calculated three-dimensional coordinates (Xb, Yb, Zb) to the control unit 310. The control unit 310 calculates the height of the portion corresponding to the measurement point based on the three-dimensional coordinates (Xb, Yb, Zb) given by the control substrate 210 and information such as a reference surface described later. Further, the control unit 310 causes the display unit 340 of FIG. 1 to display the calculation result.

  Thus, in the measurement mode, the measurement operator can acquire the height of the position without specifying the portion of the measurement object S to be measured. Therefore, even if the measurement operator is not skilled, it is possible to easily and accurately measure the shape of the desired part of the measurement object. In addition, since the three-dimensional coordinates (Xc, Yc, Zc) are stored in the storage unit 320 in the setting mode, in the measurement mode, corresponding to the measurement points based on the stored three-dimensional coordinates (Xc, Yc, Zc) Can be identified quickly.

  In the present embodiment, three-dimensional coordinates (Xc, Yc, Zc) corresponding to plane coordinates (Ua, Va) are specified in the setting mode and stored in storage unit 320, but the present invention is not limited to this. . In the setting mode, plane coordinates (Xc, Yc) corresponding to plane coordinates (Ua, Va) may be specified, and the component Zc of the Z axis may not be specified. In this case, the specified plane coordinates (Xc, Yc) are stored in the storage unit 320. In the measurement mode, the plane coordinates (Xc, Yc) stored in the storage unit 320 are given to the control substrate 210.

  The height gauge mode is used to designate the desired part of the measurement object S as a measurement point on the screen while the user confirms the measurement object S on the screen, and to measure the height of the part. Specifically, the user mounts the desired measurement target S on the optical surface plate 111, and images the measurement target S by the imaging unit 220. In addition, the user designates a portion to be measured on the image of the measurement object S displayed on the display unit 340 as a measurement point. In this case, as shown in FIG. 10C, the control unit 310 gives the control substrate 210 plane coordinates (Ua, Va) specified by the measurement point specified on the image.

  Here, based on the distance between the measurement head 200 and the measurement object S, the control substrate 210 determines whether or not the portion of the measurement object S is located within the measurement range. When the portion of the measurement object S is not located within the measurement range, the measurement operator gives an instruction to the drive circuit 132 of FIG. 3 to move the measurement head 200 in the vertical direction, thereby positioning the portion within the measurement range. It can be done. Alternatively, when the portion of the measurement object S is not located within the measurement range, the measurement head 200 may be automatically moved up and down so that the portion is located within the measurement range by control from the control substrate 210 .

  Thereafter, the control substrate 210 specifies three-dimensional coordinates (Xc, Yc, Zc) of the position corresponding to the plane coordinates (Ua, Va) in the measurement area V of FIG. 2, and specifies the specified three-dimensional coordinates (Xc, Based on Yc, Zc), three-dimensional coordinates (Xb, Yb, Zb) of the portion of the measurement object S corresponding to the measurement point are calculated. Further, the control board 210 gives the calculated three-dimensional coordinates (Xb, Yb, Zb) to the control unit 310. The control unit 310 calculates the height of the portion corresponding to the measurement point based on the three-dimensional coordinates (Xb, Yb, Zb) given by the control substrate 210 and information such as a reference surface described later, and displays the calculation result It is displayed on the part 340.

  Coordinate conversion information and position conversion information are stored in advance in the storage unit 320 of FIG. The coordinate conversion information indicates plane coordinates (Xc, Yc) corresponding to plane coordinates (Ua, Va) at each position in the height direction (Z-axis direction) in the measurement area V. Further, the control substrate 210 can irradiate the measurement light to a desired position in the measurement area V by controlling the positions of the movable parts 252a and 252b in FIG. 6 and the angles of the reflection parts 271b and 272b in FIG. it can. The position conversion information indicates the relationship between the coordinates in the measurement area V, the positions of the movable portions 252a and 252b, and the angles of the reflecting portions 271b and 272b.

  The control system configured by the control unit 310 and the control substrate 210 uses three-dimensional coordinates (Xc, Yc, Zc) and three-dimensional coordinates (Xb) of positions corresponding to measurement points by using coordinate conversion information and position conversion information. , Yb, Zb) can be identified. Details of coordinate conversion information and position conversion information will be described later.

(7) Control System of Optical Scanning Height Measurement Device (a) Overall Configuration of Control System FIG. 11 is a block diagram showing a control system of the optical scanning height measurement device 400 of FIG. As shown in FIG. 11, the control system 410 includes a reference image acquisition unit 1, a position information acquisition unit 2, a drive control unit 3, a reference surface acquisition unit 4, an allowance acquisition unit 5, a registration unit 6 and a deflection direction acquisition unit 7. , Detection unit 8 and image analysis unit 9. The control system 410 also includes a reference position acquisition unit 10, a light reception signal acquisition unit 11, a distance information calculation unit 12, a coordinate calculation unit 13, an irradiation determination unit 14, a height calculation unit 15, a measurement image acquisition unit 16, and a correction unit 17. , And an examination unit 18 and a report preparation unit 19. Further, control system 410 further includes distance information calculation unit 20, range determination unit 21, and drive control unit 22.

  When the control board 210 and the control unit 310 in FIG. 1 execute the system program stored in the storage unit 320, the functions of the components of the control system 410 described above are realized. In FIG. 11, the flow of common processing in all operation modes is indicated by a solid line, the flow of processing in the setting mode is indicated by a dashed dotted line, and the flow of processing in the measurement mode is indicated by a dotted line. The same applies to FIG. 39 described later. The flow of processing in the height cage mode is substantially equal to the flow of processing in the setting mode. Hereinafter, in order to facilitate understanding, each component of the control system 410 will be described separately in the setting mode and the measurement mode.

(B) Setting Mode The measurement manager places the desired measurement object S on the optical surface plate 111 of FIG. 2, and images the measurement object S by the imaging unit 220 of FIG. The reference image acquisition unit 1 acquires image data generated by the imaging unit 220 as reference image data, and causes the display unit 340 in FIG. 1 to display an image based on the acquired reference image data as a reference image. The reference image displayed on the display unit 340 may be a still image or a moving image that is sequentially updated. The measurement manager can designate a part to be measured as a measurement point and also designate a reference point on the reference image displayed on the display unit 340. The reference point is a point for defining a reference plane which is a reference when calculating the height of the measurement object S.

  The position information acquisition unit 2 receives the designation of the measurement point on the reference image acquired by the reference image acquisition unit 1 and acquires the position of the received measurement point (the above-mentioned plane coordinates (Ua, Va)). Further, the position information acquisition unit 2 receives specification of the reference point using the reference image, and acquires the position of the received reference point. The position information acquisition unit 2 can also receive a plurality of measurement points, and can also receive a plurality of reference points.

  The distance information calculation unit 20 controls the determination light output unit 233 of FIG. 5 so as to emit determination light, and the determination light detection unit 234 of FIG. 5 so as to detect the determination light reflected by the measurement object S. Control. In the distance information calculation unit 20, the distance between the measuring head 200 and the object S based on the time difference between the judgment light output unit 233 emits the judgment light and the judgment light detection unit 234 detects the judgment light. Calculate the distance between The distance information calculation unit 20 may calculate the distance between the measurement head 200 and the measurement object S by another method such as a triangular distance measurement method.

  The range determination unit 21 specifies the measurement range by acquiring the position of the measurement head 200 from the reading unit 133 of the elevating unit 130 in FIG. 3. Further, based on the distance calculated by the distance information calculation unit 20, the range determination unit 21 determines whether or not the portion of the measurement object S is located within the specified measurement range. The range determination unit 21 may output a determination message such as “OK” or “FAIL” when the portion of the measurement target S is or is not positioned within the measurement range. The determination message may be displayed on the display unit 340, or may be output as sound when the optical scanning height measurement device 400 has an audio output device.

  The drive control unit 22 acquires the distance information calculated by the distance information calculation unit 20 and the determination result by the range determination unit 21. In addition, the drive control unit 22 controls the drive circuit 132 in FIG. 3 based on the acquired position, distance information, and determination result of the measurement head 200. Thus, the measurement head 200 is moved in the vertical direction so that the portion of the measurement object S is located within the measurement range. In addition, the drive control unit 22 acquires the position of the movable lens 263 from the reading unit 266 of the focusing unit 260 in FIG. 7 and controls the drive circuit 265 in FIG. 7 based on the acquired position of the movable lens 263. Thereby, the movable lens 263 is moved so that the measurement light is focused in the vicinity of the surface of the measurement object S.

  Drive control unit 3 generates drive circuits 273 and 274 in FIG. 8 and drive circuit 256 a in FIG. 6 based on the position conversion information stored in storage unit 320 in FIG. 1 and the position acquired by position information acquisition unit 2. , 256b. As a result, the angles of the reflecting portions 271b and 272b of the deflecting portions 271 and 272 in FIG. 8 are adjusted, and the measuring light is irradiated to the portion of the measuring object S corresponding to the measuring point and the reference point. Further, in response to the change in the optical path length of the measurement light, the optical path length of the reference light is adjusted such that the difference between the optical path length of the measurement light and the optical path length of the reference light becomes equal to or less than a predetermined value.

  The coordinates of the portion of the measurement object S corresponding to the measurement point and the reference point are calculated by the coordinate calculation unit 13 by the operation of the drive control unit 3 described above. Details of the operation of the drive control unit 3 will be described later. The process of calculating the coordinates of the portion of the measurement object S corresponding to the measurement point will be described below, but the process of calculating the coordinates of the portion of the measurement object S corresponding to the reference point is also the measurement object corresponding to the measurement point The process is similar to the process of calculating the coordinates of the portion of S.

  The reference surface acquisition unit 4 acquires a reference surface based on one or more coordinates calculated by the coordinate calculation unit 13 corresponding to one or more reference points acquired by the position information acquisition unit 2. The measurement manager can input an allowable value for the height of the measurement point acquired by the position information acquisition unit 2. The tolerance value is used to inspect the measurement object S in the measurement mode described later, and includes a design value and a tolerance from the design value. The allowable value acquisition unit 5 receives the input allowable value.

  The registration unit 6 registers the reference image data acquired by the reference image acquisition unit 1, the position acquired by the position information acquisition unit 2 and the tolerance value set by the tolerance value acquisition unit 5 in association with each other. Specifically, the registration unit 6 causes the storage unit 320 to store registration information indicating the relationship between the reference image data, the positions of the measurement points and the reference points, and the tolerance value corresponding to each measurement value. Multiple reference planes may be set. In this case, the registration unit 6 associates and registers, for each reference surface, a reference point corresponding to the reference surface, a measurement point corresponding to the reference surface, and an allowance corresponding to each measurement value.

  The deflection direction acquisition unit 7 acquires the angles of the reflection units 271b and 272b from the reading units 275 and 276 in FIG. The detection unit 8 detects the deflection directions of the deflection units 271 and 272 based on the angles of the reflection units 271 b and 272 b acquired by the deflection direction acquisition unit 7. Further, as the imaging by the imaging unit 220 is continued, the measurement light on the measurement object S appears in the reference image. The image analysis unit 9 analyzes the reference image data acquired by the reference image acquisition unit 1. The detection unit 8 detects plane coordinates indicating the irradiation position on the reference image of the measurement light deflected by the deflection units 271 and 272 based on the analysis result of the image analysis unit 9.

  The reference position acquisition unit 10 acquires the positions of the movable units 252a and 252b from the reading units 257a and 257b of the reference unit 250 in FIG. The light reception signal acquisition unit 11 acquires a light reception signal from the light reception unit 232 d of FIG. 4. The distance information calculation unit 12 performs predetermined calculation and processing on data indicating the relationship between the wavelength of the interference light and the light reception amount based on the light reception signal acquired by the light reception unit 232 d. This operation and processing include, for example, wavelength-to-wavenumber frequency axis conversion and wavenumber Fourier transform.

  The distance information calculation unit 12 outputs the measurement light emission position and the measurement target in the measurement head 200 of FIG. 2 based on the data obtained by the processing and the positions of the movable portions 252a and 252b acquired by the reference position acquisition unit 10. Distance information indicating the distance between the object S and the irradiation position of the measurement light is calculated. The emission position of the measurement light in the measurement head 200 is, for example, the position of the deflection unit 272 in FIG.

  The coordinate calculation unit 13 detects the irradiation position of the measurement light on the measurement object S based on the deflection directions of the deflection units 271 and 272 detected by the detection unit 8 and the distance information calculated by the distance information calculation unit 12. Three-dimensional coordinates (Xc, Yc, Zc) are calculated. The three-dimensional coordinates (Xc, Yc, Zc) of the irradiation position of the measurement light are made up of coordinates Zc in the height direction and plane coordinates (Xc, Yc) in a plane orthogonal to the height direction.

  The coordinate calculation unit 13 is an object to be measured based on plane coordinates indicating the irradiation position on the reference image of the measurement light detected by the detection unit 8 and the deflection directions of the deflection units 271 and 272 using, for example, a triangular distance measurement method. The three-dimensional coordinates of the irradiation position of the measurement light on the object S may be calculated. Alternatively, the coordinate calculation unit 13 is located on the measurement object S based on plane coordinates indicating the irradiation position on the reference image of the measurement light detected by the detection unit 8 and the distance information calculated by the distance information calculation unit 12. Three-dimensional coordinates of the irradiation position of the measurement light may be calculated.

  The irradiation determination unit 14 determines whether the portion of the measurement target S corresponding to the measurement point or a portion in the vicinity thereof is irradiated with the measurement light. Specifically, based on the calculated coordinate in the height direction and the coordinate conversion information stored in the storage unit 320, the coordinate calculation unit 13 calculates plane coordinates corresponding to the measurement points registered by the registration unit 6 ( The plane coordinates (Xa ′, Ya ′) described later are acquired. Further, the irradiation determination unit 14 determines whether the plane coordinates (Xc, Yc) calculated by the coordinate calculation unit 13 are within a predetermined range from the plane coordinates (Xa ′, Ya ′) corresponding to the measurement point. Determine

  Alternatively, the image analysis unit 9 may specify plane coordinates (plane coordinates (Uc, Vc) described later) of the irradiation position of the measurement light in the reference image by analyzing the reference image data. In this case, the irradiation determination unit 14 determines in advance the plane coordinates (Uc, Vc) of the irradiation position of the measurement light specified by the image analysis unit 9 from the plane coordinates (Ua, Va) of the measurement points registered by the registration unit 6. It is determined whether or not it is within a defined range.

  When the irradiation determination unit 14 determines that the measurement light is not irradiated to the portion of the measurement target S corresponding to the measurement point and the portion in the vicinity thereof, the drive control unit 3 moves the irradiation position of the measurement light The driver circuits 273 and 274 of FIG. 8 and the driver circuits 256a and 256b of FIG. When it is determined by the irradiation determination unit 14 that the measurement light is irradiated to the portion of the measurement target S corresponding to the measurement point or a portion in the vicinity thereof, the drive control unit 3 fixes the irradiation position of the measurement light Drive circuits 273 and 274 and drive circuits 256a and 256b.

  The coordinate calculation unit 13 gives the reference surface acquisition unit 4 the coordinates calculated for the reference point. The height calculation unit 15 uses the reference plane acquired by the reference plane acquisition unit 4 as a reference based on the three-dimensional coordinates (Xc, Yc, Zc) calculated by the coordinate calculation unit 13 corresponding to the measurement points. The height of the portion of the measurement object S is calculated. For example, when the reference plane is a plane, the height calculation unit 15 measures the length from the reference plane to the three-dimensional coordinates (Xc, Yc, Zc) in the vertical line of the reference plane passing through the three-dimensional coordinates (Xc, Yc, Zc). Is calculated as height. The height calculator 15 causes the display 340 to display the calculated height.

  The registration unit 6 uses the height information obtained by the drive control unit 22, the three-dimensional coordinates (Xc, Yc, Zc) calculated by the coordinate calculation unit 13 and the height calculated by the height calculation unit 15 as a reference image. It is registered as registration information in association with data, position of measurement point, position of reference point and tolerance value.

(C) Measurement mode The measurement operator places the measurement object S of the same type as the measurement object S whose registration information is registered in the setting mode on the optical surface plate 111 of FIG. 2, and the imaging unit of FIG. An image is taken at 220. The measurement image acquisition unit 16 acquires image data generated by the imaging unit 220 as measurement image data, and causes the display unit 340 in FIG. 1 to display an image based on the acquired measurement image data as a measurement image.

  The drive control unit 22 acquires the position of the measurement head 200 from the reading unit 133 of the elevating unit 130 in FIG. 3. Further, the drive control unit 22 controls the drive circuit 132 of FIG. 3 based on the acquired position of the measurement head 200 and the height information of the registration information registered by the registration unit 6. Thereby, the portion of the measurement object S is located within the measurement range.

  The correction unit 17 corrects the deviation of the measurement image data with respect to the reference image data based on the registration information registered by the registration unit 6. Thereby, the correction unit 17 sets the measurement point and the reference point corresponding to the registration information registered by the registration unit 6 in the measurement image data.

  The drive control unit 3 controls the drive circuits 273 and 274 of FIG. 8 and the drive circuits 256 a and 256 b of FIG. 6 based on the registration information registered by the registration unit 6 in the setting mode. Thereby, the three-dimensional coordinates of the portion of the measuring object S corresponding to the measurement point and the reference point set by the correction unit 17 are calculated by the coordinate calculation unit 13. Here, since the drive control unit 3 performs control based on the three-dimensional coordinates and height registered in the setting mode, the coordinate calculation unit 13 corresponds to the measurement point and the reference point set by the correction unit 17. The three-dimensional coordinates of the portion of the measurement object S can be efficiently calculated.

  The processing of the deflection direction acquisition unit 7 and the detection unit 8 in the measurement mode is the same as the processing of the deflection direction acquisition unit 7 and the detection unit 8 in the setting mode. The processing of the image analysis unit 9 in the measurement mode is the image analysis in the setting mode except that the measurement image data acquired by the measurement image acquisition unit 16 is used instead of the reference image data acquired by the reference image acquisition unit 1 It is similar to the process of part 9. The processes of the reference position acquisition unit 10, the light reception signal acquisition unit 11, and the distance information calculation unit 12 in the measurement mode are the same as the processes of the reference position acquisition unit 10, the light reception signal acquisition unit 11, and the distance information calculation unit 12 in the setting mode. is there.

  The coordinate calculation unit 13 detects the irradiation position of the measurement light on the measurement object S based on the deflection directions of the deflection units 271 and 272 detected by the detection unit 8 and the distance information calculated by the distance information calculation unit 12. Three-dimensional coordinates (Xb, Yb, Zb) are calculated. The coordinate calculation unit 13 measures the measurement light on the measurement object S based on plane coordinates indicating the irradiation position on the measurement image of the measurement light detected by the detection unit 8 and the distance information calculated by the distance information calculation unit 12. The three-dimensional coordinates (Xb, Yb, Zb) of the irradiation position of may be calculated. The three-dimensional coordinates (Xb, Yb, Zb) of the irradiation position of the measurement light are composed of the coordinate Zb in the height direction and the plane coordinates (Xb, Yb) in a plane orthogonal to the height direction.

  The processing of the irradiation determination unit 14 in the measurement mode is to use the measurement points set by the correction unit 17 instead of the measurement points registered by the registration unit 6 and replace the three-dimensional coordinates (Xc, Yc, Zc) The process is the same as the process of the irradiation determination unit 14 in the setting mode except that three-dimensional coordinates (Xb, Yb, Zb) are used. Thereby, the coordinate calculation unit 13 calculates the coordinates corresponding to the reference point set by the correction unit 17.

  The reference surface acquisition unit 4 acquires a reference surface based on the coordinates corresponding to the reference point calculated by the coordinate calculation unit 13. The height calculation unit 15 is a portion of the measurement object S based on the reference plane acquired by the reference plane acquisition unit 4 based on the three-dimensional coordinates (Xb, Yb, Zb) calculated by the coordinate calculation unit 13 Calculate the height of

  The inspection unit 18 inspects the measurement object S based on the height of the portion of the measurement object S calculated by the height calculation unit 15 and the tolerance value registered in the registration unit 6. Specifically, when the calculated height is within the range of tolerance based on the design value, the inspection unit 18 determines that the measurement object S is a non-defective item. On the other hand, when the calculated height is out of the range of the tolerance based on the design value, the inspection unit 18 determines that the measurement object S is a defective product.

  The report creation unit 19 creates a report based on the inspection result by the inspection unit 18 and the measurement image acquired by the measurement image acquisition unit 16. Thereby, the measurement worker can easily report the measurement value of the height or the test result of the measurement object S to the measurement manager or other users using the report. The report is prepared according to a pre-determined writing style. FIG. 12 is a diagram showing an example of a report prepared by the report preparation unit 19.

  In the description format of FIG. 12, the report 420 includes a name display field 421, an image display field 422, a status display field 423, a result display field 424, and a guarantee display field 425. In the name display field 421, the name of the report 420 (in the example of FIG. 12, "inspection report") is displayed. In the image display column 422, a measurement image of an inspection object is displayed. The status display column 423 displays the name of the inspection target, the identification number of the inspection target, the name of the measurement worker, the inspection date and the like.

  In the result display column 424, the inspection result on the inspection object is displayed. Specifically, in the result display column 424, names of various inspection items set as inspection objects, measurement values and determination results are displayed in the form of a list in a state of being associated with design values and tolerances. Ru. The warranty display field 425 is a blank for being signed or sealed. The measurement operator and the measurement manager can guarantee the inspection result by signing or sealing the warranty display section 425.

  The report creation unit 19 may create the report 420 only for the measurement target S determined to be non-defective by the inspection unit 18. Such a report 420 is attached to a delivery note to guarantee the quality of the product when delivering the product to be inspected to the customer. Further, the report creation unit 19 may create the report 420 only for the measurement target S determined to be a defective product by the inspection unit 18. Such a report 420 is used in-house to analyze the cause that the product to be inspected is determined to be defective.

  In the present embodiment, the result display column 424 of the report 420 is displayed in a state where the measured value of the height of the portion of the measurement object S and the determination result of the inspection item set for the portion are associated. However, the present invention is not limited thereto. One of the measurement value of the height and the determination result of the inspection item may be displayed in the result display field 424 of the report 420, and the other may not be displayed.

  In the above control, when the measurement light is emitted, the determination light may be emitted simultaneously. In this case, the measurement object S is irradiated with the measurement light and the determination light superimposed on each other. According to this configuration, the determination light functions as guide light that can be easily viewed by the user. Therefore, the user can easily recognize the irradiation position of the light from the scanning unit 270 to the measurement object S by visually recognizing the irradiation position of the determination light on the measurement object S.

  Further, the imaging unit 220 in FIG. 3 can clearly image the determination light on the measurement object S together with the measurement light. Thereby, the image analysis unit 9 of FIG. 11 can more easily detect plane coordinates indicating the irradiation position of the determination light on the reference image or the measurement image as plane coordinates indicating the irradiation position of the measurement light. The measurement light is typically infrared light having low coherence, and the imaging unit 220 can not typically capture infrared light. In this case, the imaging unit 220 emits the determination light. The position is imaged as the irradiation position of the measurement light.

(D) Height Gauge Mode The user places a desired measurement object S on the optical surface plate 111 of FIG. 2, and images the measurement object S by the imaging unit 220 of FIG. The reference image acquisition unit 1 acquires the image data generated by the imaging unit 220, and causes the display unit 340 in FIG. 1 to display an image based on the acquired image data. The user designates a portion to be measured as a measurement point on the image displayed on the display unit 340.

  The position information acquisition unit 2 receives the designation of the measurement point on the image acquired by the reference image acquisition unit 1, and acquires the position (the above-mentioned plane coordinates (Ua, Va)) of the received measurement point. Further, the position information acquisition unit 2 receives specification of the reference point using the reference image, and acquires the position of the received reference point. The position information acquisition unit 2 can also receive a plurality of measurement points, and can also receive a plurality of reference points.

  The processes of the distance information calculation unit 20, the range determination unit 21, and the drive control unit 22 in the height gauge mode are the same as the processes of the distance information calculation unit 20, the range determination unit 21, and the drive control unit 22 in the setting mode. Thereby, the portion of the measurement object S is located within the measurement range.

  Drive control unit 3 generates drive circuits 273 and 274 in FIG. 8 and drive circuit 256 a in FIG. 6 based on the position conversion information stored in storage unit 320 in FIG. 1 and the position acquired by position information acquisition unit 2. , 256b. Thus, the measurement light is irradiated to the portion of the measurement target S corresponding to the measurement point and the reference point, and the optical path length of the reference light is adjusted.

  By the operation of the drive control unit 3 described above, the coordinates of the portion of the measurement target S corresponding to the measurement point and the reference point are calculated by the coordinate calculation unit 13. The reference plane acquisition unit 4 acquires a reference plane based on the coordinates calculated by the coordinate calculation unit 13 in correspondence with the reference points acquired by the position information acquisition unit 2.

  The processes of the deflection direction acquisition unit 7, the detection unit 8, the image analysis unit 9, the reference position acquisition unit 10, the light reception signal acquisition unit 11 and the distance information calculation unit 12 in the height gauge mode are the deflection direction acquisition unit 7 and the detection unit in the setting mode. The processing is the same as the processing of the image analysis unit 9, the reference position acquisition unit 10, the light reception signal acquisition unit 11, and the distance information calculation unit 12.

  The coordinate calculation unit 13 measures the measurement object S based on the deflection direction of the deflection units 271 and 272 detected by the detection unit 8 or the irradiation position of the measurement light and the distance information calculated by the distance information calculation unit 12. Three-dimensional coordinates (Xb, Yb, Zb) of the light irradiation position are calculated. The coordinate calculation unit 13 measures the measurement light on the measurement object S based on plane coordinates indicating the irradiation position on the measurement image of the measurement light detected by the detection unit 8 and the distance information calculated by the distance information calculation unit 12. The three-dimensional coordinates (Xb, Yb, Zb) of the irradiation position of may be calculated. The processes of the irradiation determination unit 14 and the height calculation unit 15 in the height gauge mode are the same as the processes of the irradiation determination unit 14 and the height calculation unit 15 in the setting mode.

(8) Overall Operation Flow of Control System FIGS. 13 to 16 are flowcharts showing an example of an optical scanning height measurement process performed in the optical scanning height measurement device 400 of FIG. A series of processes described below are executed by the control unit 310 and the control substrate 210 in a constant cycle when the power of the optical scanning height measurement apparatus 400 is in the on state. The light scanning height measurement process includes a designated measurement process and an actual measurement process described later. In the following description, the designated measurement process and the actual measurement process of the light scanning height measurement process are performed by the control substrate 210, and the other processes of the light scanning height measurement process are performed by the control unit 310. The invention is not limited to this. For example, all processing of the light scanning height measurement processing may be performed by the control substrate 210 or the control unit 310.

  In the initial state, it is assumed that the power of the optical scanning height measuring device 400 is turned on in a state where the measurement object S is placed on the optical surface plate 111 of FIG. At this time, the selection screen 341 of FIG. 9 is displayed on the display unit 340 of FIG.

  When the light scanning height measurement process is started, the control unit 310 determines whether the setting mode is selected by the operation of the operation unit 330 by the user (step S101). More specifically, control unit 310 determines whether or not the setting button 341a of FIG. 9 has been operated by the user.

  When the setting mode is not selected, the control unit 310 proceeds to the process of step S201 in FIG. 16 described later. On the other hand, when the setting mode is selected, the control unit 310 causes the display unit 340 of FIG. 1 to display a setting screen 350 of FIG. 25 described later (step S102). On the setting screen 350, the reference image of the measurement area V of FIG. 2 acquired at a constant cycle by the imaging unit 220 is displayed in real time.

  Next, the control unit 310 executes position setting processing of the measurement head 200 for positioning the portion of the measurement object S within the measurement range (step S500), and proceeds to step S103. Details of the position setting process will be described later.

  In the light scanning height measuring apparatus 400 according to the present embodiment, in order to realize the correction function of the correction unit 17 of FIG. 11, it is necessary to set the pattern image and the search area in the setting mode. The pattern image means an image of a portion including at least the measurement object S in the entire region of the reference image displayed at the time designated by the user. Further, the search area means a range (a range within the imaging field of the imaging unit 220) in which a portion similar to the pattern image is searched in the measurement image after the pattern image is set in the setting mode.

  Therefore, control unit 310 determines whether or not the search area has been designated by the operation of operation unit 330 by the user (step S103). If no search area is specified, the control unit 310 proceeds to the process of step S105 described later. On the other hand, when the search area is specified, the control unit 310 sets information of the specified search area by storing the information in the storage unit 320 (step S104).

  Next, the control unit 310 determines whether or not the pattern image has been designated by the operation of the operation unit 330 by the user (step S105). If no pattern image is specified, the control unit 310 proceeds to the process of step S107 described later. On the other hand, when the pattern image is designated, the control unit 310 sets information of the designated pattern image by storing the information in the storage unit 320 (step S106). The information on the pattern image also includes information indicating the position of the pattern image in the reference image. A specific setting example of the pattern image and the search area by the user will be described later.

  Next, the control unit 310 determines whether or not the search area and the pattern image have been set by the processes of steps S104 and S106 (step S107). When at least one of the search area and the pattern image is not set, the control unit 310 returns to the process of step S103. On the other hand, when the search area and the pattern image are set, control unit 310 determines whether or not the setting of the reference surface is accepted (step S108).

  When control unit 310 receives the setting of the reference surface in step S108, control unit 310 determines whether or not the user designated a point as a reference point on the reference image displayed on display unit 340 by the operation of operation unit 330. (Step S109). If the control unit 310 does not receive designation of a point, the control unit 310 proceeds to the process of the subsequent step S111. On the other hand, when the control unit 310 receives designation of a point, it instructs the control substrate 210 to perform designated measurement processing and gives plane coordinates (Ua, Va) specified by the designated point on the image (see FIG. 10 (a)). Thereby, the control substrate 210 performs the designated measurement process (step S110), and gives the coordinates (Xc, Yc, Zc) specified by the designated measurement process to the control unit 310. Details of the designated measurement process will be described later.

  Thereafter, the control unit 310 determines whether designation of a point as a reference point is completed by the operation of the operation unit 330 by the user (step S111). When the designation of a point is not completed, the control unit 310 returns to the process of step S109. On the other hand, when the designation of the point is completed, the control unit 310 sets a reference plane based on one or more coordinates (Xc, Yc, Zc) acquired in the designation measurement process of step S110 (step S112). In this example, information indicating the coordinates of the reference plane based on the coordinates (Xc, Yc, Zc) corresponding to one or more reference points, for example, plane coordinates (Xc, Yc) corresponding to each reference point or each reference The coordinates (Xc, Yc, Zc) corresponding to the point are stored in the storage unit 320.

  Here, the information indicating the coordinates of the reference surface may include a reference surface constraint condition for determining the reference surface. The reference surface restraint conditions include, for example, conditions such that the reference surface is parallel to the mounting surface, or that the reference surface is parallel to another surface stored in advance. In the case of a reference surface constraint condition that the reference surface is parallel to the mounting surface, if coordinates (Xb, Yb, Zb) for one reference point are specified, the plane represented by Z = Zb is acquired as the reference surface It will be done.

  After the process of step S112 described above or when the setting of the reference plane is not received in step S108, the control unit 310 determines whether the accepted setting is a setting related to the measurement of the measurement object S (step S121). . More specifically, control unit 310 determines whether or not the accepted setting is a setting for specifying the portion of measurement object S whose height is to be measured.

  If the accepted setting is not a setting regarding measurement, control unit 310 acquires information regarding the setting by the operation of operation unit 330 by the user, and stores the information in storage unit 320 (step S130). The information acquired here includes, for example, information such as the above-mentioned allowable value, an index to be displayed on the measurement image in the measurement mode, and a comment. Thereafter, the control unit 310 proceeds to the process of step S126 described later.

  When the setting accepted in step S121 is the setting regarding measurement, control unit 310 receives a designation of a point as a measurement point on the reference image displayed on display unit 340 by the operation of operation unit 330 by the user. It is determined (step S122). If the control unit 310 does not receive designation of a point, the control unit 310 proceeds to the process of the subsequent step S124. On the other hand, when receiving the designation of a point, the control unit 310 instructs the control substrate 210 to perform the designated measurement process and also determines the plane coordinates specified by the designated point on the image, as in step S110 described above. Give Ua, Va). Thus, the control board 210 performs the designated measurement process (step S123), and gives the coordinates (Xc, Yc, Zc) specified by the designated measurement process to the control unit 310.

  Thereafter, the control unit 310 determines whether or not designation of a point as a measurement point has been completed by the operation of the operation unit 330 by the user (step S124). When the designation of the point is not completed, the control unit 310 returns to the process of step S122.

  On the other hand, when the designation of the point is completed, the control unit 310 performs measurement by storing in the storage unit 320 the coordinates (Xc, Yc, Zc) of one or more measurement points acquired in the designated measurement process of step S123. Setting of points is performed (step S125).

  After the process of any one of steps S125 and S130, control unit 310 determines whether the completion of the setting has been instructed or a new setting has been instructed (step S126). When a new setting is instructed, that is, when the completion of the setting is not instructed, control unit 310 returns to the process of step S108.

  On the other hand, when the completion of setting is instructed, control unit 310 associates the information set in any of steps S103 to S112, S121 to S125, and S130 with each other and registers the information as registration information (step S127). Thereafter, the optical scanning height measurement process ends in the setting mode. The file of registration information to be registered is stored in the storage unit 320 after being given a specific file name by the user. At this time, the information temporarily stored in the storage unit 320 for setting may be deleted in any of steps S103 to S112, S121 to S125, and S130.

  Here, in step S127, when the reference plane is set in the process of step S112, the control unit 310 sets the height of the measurement point based on the reference plane and the specified coordinates (Xc, Yc, Zc). Is calculated and the calculation result is included in the registration information. If the reference plane is already set at the time of step S125, the height of the measurement point is determined based on the set reference plane and the specified coordinates (Xc, Yc, Zc) in step S125. It may be calculated. In this case, the calculation result may be displayed on the setting screen 350 (FIG. 31 described later) as the height of the measurement point.

  If the setting mode is not selected in step S101 described above, the control unit 310 determines whether the measurement mode is selected by the operation of the operation unit 330 by the user (step S201). More specifically, control unit 310 determines whether or not the measurement button 341b of FIG. 9 has been operated by the user. When the measurement mode is selected, the control unit 310 causes the display unit 340 of FIG. 1 to display a measurement screen 360 of FIG. 36 described later (step S202). On the measurement screen 360, the measurement image of the measurement area V of FIG. 2 acquired at a constant cycle by the imaging unit 220 is displayed in real time.

  Next, the control unit 310 determines whether the file of the registration information is designated by the operation of the operation unit 330 by the user (step S203). Specifically, it is determined whether or not the user has specified a file name of registration information. When no file is specified, the control unit 310 is in a standby state until the file specification is received. On the other hand, when receiving the designation of the file, control unit 310 reads the file of the designated registration information from storage unit 320 (step S204). When the file of the designated registration information is not stored in the storage unit 320, the control unit 310 may display information indicating that the designated file does not exist on the display unit 340.

  Next, the control unit 310 acquires height information from the read registration information, and adjusts the position of the measurement head 200 so that the portion of the measurement object S is positioned within the measurement range (step S200).

  Next, the control unit 310 acquires information of the registered pattern image from the read registration information, and superimposes and displays the acquired pattern image on the measurement image displayed on the display unit 340 (step S205). At this time, the control unit 310 acquires a search area in addition to the pattern image. As described above, the information on the pattern image also includes information indicating the position of the pattern image in the reference image. Therefore, the pattern image is superimposed on the measurement image at the same position as the position set in the setting mode.

  Here, the pattern image may be displayed semi-transparently. In this case, the user can easily compare the measurement image of the measurement object S currently imaged and the reference image of the measurement object S acquired in the setting mode. Then, the user can perform the positioning operation of the measuring object S on the optical surface plate 111.

  Next, the control unit 310 compares the pattern image and the measurement image (step S206). Specifically, the control unit 310 extracts the edge of the measurement target S in the pattern image as a reference edge, and searches whether there is an edge having a shape corresponding to the reference edge in the acquired search area. Do.

  In this case, the edge portion of the measurement object S in the measurement image is considered to be most similar to the reference edge. Therefore, when the portion of the measurement image most similar to the reference edge is detected, the control unit 310 calculates how much the detected portion deviates from the reference edge on the image, and the detected portion is The amount of rotation from the reference edge on the image is calculated (step S207).

  Next, the control unit 310 acquires information of the registered measurement point from the read registration information, and corrects the acquired information of the measurement point based on the calculated shift amount and rotation amount (step S208). The processes of steps S206 to S208 correspond to the function of the correction unit 17 in FIG. According to this configuration, even when the measurement object in the correction image is displaced or rotated with respect to the measurement object in the pattern image, the measurement point can be easily identified and corrected with high accuracy.

  Next, the control unit 310 instructs the control substrate 210 to perform an actual measurement process for each of the corrected measurement points, and gives coordinates (Xc, Yc, Zc) of the corrected measurement points (FIG. 10 (b)) reference). Thereby, the control substrate 210 performs the actual measurement process (step S209), and gives the coordinates (Xb, Yb, Zb) specified by the actual measurement process to the control unit 310. Details of the actual measurement process will be described later.

  Next, the control unit 310 acquires information of the registered reference surface, calculates the height of the measurement point based on the reference surface and the acquired coordinates (Xb, Yb, Zb), and measures the calculation result. As a result, it is stored in the storage unit 320. In addition, various processing according to the registered other information is performed (step S210). As various processes according to other registered information, for example, when an allowance is included in the read registration information, whether or not the calculation result of the height is within the tolerance range set by the allowance. There may be an inspection process to determine. Thereafter, the optical scanning height measurement process ends in the measurement mode.

  If the measurement mode is not selected in step S201, the control unit 310 determines whether the height gauge mode is selected by the operation of the operation unit 330 by the user (step S211). More specifically, control unit 310 determines whether or not the height gauge button 341c of FIG. 9 has been operated by the user. When the height gauge mode is not selected, the control unit 310 returns to the process of step S101.

  On the other hand, when the height gauge mode is selected, control unit 310 causes display unit 340 of FIG. 1 to display setting screen 350 of FIG. 25 described later (step S212). Next, control unit 310 executes position setting processing similar to that of step S500 (step S600). Thereafter, the control unit 310 sets the reference plane based on the operation of the operation unit 330 by the user (step S213). This setting process is the same as the process of steps S109 to S112 described above.

  Thereafter, when the control unit 310 receives designation of a point, it instructs the control substrate 210 to perform designated measurement processing, and gives plane coordinates (Ua, Va) specified by the designated point on the image (see FIG. 10 (c)). Thus, the control board 210 performs designated measurement processing (step S214). In addition, the control board 210 controls the positions of the movable parts 252a and 252b in FIG. 6 and the reflection parts 271b and 272b in FIG. 8 based on the coordinates (Xc, Yc, Zc) specified by the designated measurement process and the position conversion information. The angle is adjusted to irradiate measurement light (step S215).

  Subsequently, the control substrate 210 measures the object based on the light receiving signal output from the light receiving unit 232 d of FIG. 4, the positions of the movable units 252 a and 252 b of FIG. 6, and the deflection directions of the deflection units 271 and 272 of FIG. The three-dimensional coordinates (Xb, Yb, Zb) of the portion irradiated with the measurement light on the object S are calculated and given to the control unit 310 (step S216).

  Note that, in step S215 described above, the control substrate 210 receives the light reception signal output from the light reception unit 232d of FIG. 4, the positions of the movable units 252 a and 252 b of FIG. 6, and the image acquired by the imaging unit 220 of FIG. The three-dimensional coordinates (Xb, Yb, Zb) of the portion of the measurement object S irradiated with the measurement light may be calculated based on the plane coordinates indicating the irradiation position of the measurement light.

  Next, the control unit 310 acquires information of the set reference plane, and a portion to which the measurement light is irradiated on the measurement object S based on the reference plane and the acquired coordinates (Xb, Yb, Zb) The calculated height is displayed on the display unit 340 as the measurement result. For example, when the reference plane is a plane, the control unit 310 extends from the reference plane when the perpendicular of the reference plane passing through the acquired coordinates (Xb, Yb, Zb) to the coordinates (Xb, Yb, Zb) The length of the perpendicular is calculated as the height, and the calculation result is displayed on the display unit 340 as the measurement result. In addition, the control unit 310 is configured to measure the object corresponding to the measurement point at a plane coordinate indicating the irradiation position of the measurement light on the image acquired by the imaging unit 220 or at a plane coordinate specified by the point designated on the image. A green "+" mark indicating that the height of the portion S has been calculated is displayed on the display unit 340 (step S217).

  Subsequently, the control unit 310 determines whether an additional point is designated by the operation of the operation unit 330 by the user (step S218). If an additional point is specified, the control unit 310 returns to the process of step S214. Thus, the process of steps S214 to S218 is repeated until no additional point is specified. If no additional points are specified, the optical scan height measurement process ends in height gauge mode.

  According to the height gauge mode described above, the user can designate the reference point and the reference plane by designating the point on the image. Also, the user can acquire the measurement result of the height by designating the measurement point on the screen. Furthermore, the user can continue measurement while maintaining the reference surface by specifying a plurality of measurement points.

(9) Example of Position Setting Process FIG. 17 is a flowchart showing an example of the position setting process by the control board 210. First, the control substrate 210 causes the determination light output unit 233 of FIG. 3 to emit determination light (step S501). The determination light may be emitted from the deflecting unit 272 in FIG. 8 to the optical surface plate 111 in FIG. 2 directly below. On the other hand, as described later, in the setting mode, it is also possible to receive designation of the measurement point or the reference point before the position setting process. Therefore, when the measurement point or the reference point is already received, the determination light may be emitted from the deflection unit 272 to the portion corresponding to the measurement point or the reference point.

  Next, the control substrate 210 detects the determination light reflected by the measurement object S by the determination light detection unit 234 of FIG. 3 (step S502). Subsequently, the control substrate 210 is distance information indicating the distance between the measuring head 200 and the portion of the measuring object S based on the time difference from when the determination light is emitted in step S501 to when the reflected light is detected in step S502. Is calculated (step S503).

  Further, the control substrate 210 specifies the measurement range by acquiring the position of the measurement head 200 from the reading unit 133 of the elevating unit 130 in FIG. 3 (step S504). Step S504 may be performed prior to any one of steps S501 to S503, or may be performed simultaneously with any one of steps S501 to S503.

  Thereafter, the control substrate 210 determines whether or not the portion of the measurement target S is located within the measurement range, based on the distance information calculated in step S503 and the measurement range specified in step S504 (step S505). ). If the portion of the measurement object S is not located within the measurement range, the control substrate 210 moves the measurement head 200 upward or downward by controlling the drive circuit 132 of FIG. 3 (step S506). Steps S501 to S505 are repeated until the portion of the measurement object S is located within the measurement range. If the portion of the measurement object S is located within the measurement range, the control substrate 210 ends the position setting process.

  In the example of the position setting process of FIG. 17, when the portion of the measurement object S is not positioned within the measurement range, the measurement head 200 is automatically moved so that the portion is positioned within the measurement range. The invention is not limited to this. If the portion of the measurement object S is not located within the measurement range, the user may move the measurement head 200 by giving an instruction to the drive circuit 132 of FIG. 3 using the operation unit 330.

  In this case, step S506 is omitted, and the position setting process ends regardless of the determination result in step S505. Here, when the portion of the measurement target S is located within the measurement range in step S505, the determination message “OK” may be displayed on the display unit 340. On the other hand, when the portion of the measurement target S is not located within the measurement range in step S505, the determination message "FAIL" may be displayed on the display unit 340.

(10) Example of Specified Measurement Process FIGS. 18 and 19 are flowcharts showing an example of the specified measurement process by the control board 210. FIG. 20 and 21 are explanatory diagrams for describing the designated measurement process of FIGS. 18 and 19. In each of FIGS. 20 (a), (b) and (c) and FIGS. 21 (a) and (b), the measurement object S mounted on the optical surface plate 111 on the left side, the imaging unit 220 and the scanning unit While the positional relationship with 270 is shown by a side view, the image displayed on the display part 340 by the imaging of the imaging part 220 is shown on the right side. The image displayed on the display unit 340 includes the image SI of the measurement object S. In the following description, plane coordinates on the image displayed on the display unit 340 will be referred to as screen coordinates.

  The control board 210 starts the designated measurement process by receiving a command of the designated measurement process from the control unit 310. Therefore, the control board 210 acquires screen coordinates (Ua, Va) given along with a command from the control unit 310 (step S301).

  On the right side of FIG. 20A, screen coordinates (Ua, Va) are shown on the image displayed on the display unit 340. Further, on the left side of FIG. 20A, a portion of the measurement target S corresponding to the screen coordinates (Ua, Va) is indicated by a point P0.

  In step S301, among the coordinates of the point P0 corresponding to the screen coordinates (Ua, Va), the Z-axis component (the component in the height direction) is unknown. Therefore, the control board 210 assumes that the component of the Z axis of the point P0 designated by the user is "Za" (step S302). In this case, as shown in FIG. 20B, the assumed Z-axis component does not necessarily coincide with the Z-axis component of the actually designated point P0.

  Next, the control board 210 calculates planar coordinates (Xa, Ya) corresponding to the screen coordinates (Ua, Va) when the component of the Z axis is assumed to be “Za” based on the above coordinate conversion information. (Step S303). Thereby, as shown in FIG. 20B, the coordinates (Xa, Ya, Za) of the virtual point P1 corresponding to the screen coordinates (Ua, Va) and the assumed Z-axis component are obtained. In the present example, “Za” is an intermediate position in the Z direction in the measurement area V of FIG.

  Next, on the basis of the coordinates (Xa, Ya, Za) and position conversion information obtained by the process of step S303, the control board 210 controls the positions of the movable parts 252a and 252b in FIG. 6 and the positions of the reflection parts 271b and 272b in FIG. The angle is adjusted to irradiate measurement light (step S304).

  In this case, if the component of the Z-axis assumed in step S302 is largely deviated from the component of the Z-axis of the actually designated point P0, as shown in the side view on the left side of FIG. The irradiation position of the measurement light on the object S is largely deviated from the actually designated point P0. Therefore, the following processing is performed.

  By the process of step S304, an irradiation portion (light spot) of the measurement light emitted from the scanning unit 270 to the measurement object S appears on the image acquired by the imaging unit 220. In this case, the screen coordinates of the irradiated portion of the measurement light can be easily detected using image processing or the like. In the drawing on the right side of FIG. 20C, the irradiated portion (light spot) of the measurement light appearing on the image displayed on the display unit 340 is indicated by a circle.

  After the process of step S304, the control substrate 210 detects plane coordinates indicating the irradiation position of the measurement light on the image acquired by the imaging unit 220 as screen coordinates (Uc, Vc), and the reflection unit 271b of FIG. The deflection direction of the measurement light is detected from the angle 272b (step S305).

  Next, the control substrate 210 coordinates (Xc, Yc, coordinates) coordinates of the irradiation position P2 of the measurement light on the measurement object S or the optical surface plate 111 based on the detected screen coordinates (Uc, Vc) and the deflection direction. It is assumed that Zc) (step S306).

  Here, as shown in FIG. 20C, when the irradiation position P2 deviates from the point P0, the screen coordinates (Uc, Vc) also deviate from the screen coordinates (Ua, Va). Therefore, the control board 210 calculates an error (Ua-Uc, Va-Vc) of the detected screen coordinates (Uc, Vc) with respect to the screen coordinates (Ua, Va), and the calculated error is predetermined. It is determined whether it is within the determination range (step S307). The determination range used at this time may be set by the user, or may be set in advance at the factory shipment of the optical scanning height measuring device 400.

  In step S307, when the errors (Ua-Uc, Va-Vc) are within the predetermined determination range, the control board 210 uses the coordinates (Xc, Yc, Zc) determined in the previous step S306 as the user. To specify the coordinates designated by the (step S308), and end the designated measurement process. Thereafter, the control substrate 210 gives the identified coordinates (Xc, Yc, Zc) to the control unit 310.

  In step S307, when the error (Ua-Uc, Va-Vc) is out of a predetermined determination range, the control substrate 210 deflects the measurement light based on the above-mentioned error (Ua-Uc, Va-Vc). The direction is adjusted (step S309). Specifically, for example, the relationship between the error on the screen coordinates corresponding to the X axis and the Y axis and the angle to be adjusted of the reflection units 271b and 272b is stored in advance in the storage unit 320 as an error correspondence relationship. Furthermore, as indicated by the white arrow in FIG. 21A, the control substrate 210 deflects the measurement light based on the calculated error (Ua-Uc, Va-Vc) and the error correspondence relation. Fine-tune the

  Thereafter, the control board 210 returns to the process of step S305. Thus, the processing of steps S305 to S307 is performed again after the deflection direction of the measurement light is finely adjusted. As a result, finally, as shown in FIG. 21 (b), when the error (Ua-Uc, Va-Vc) falls within the determination range, the coordinate (Xc) corresponding to the measurement point designated by the user is obtained. , Yc, Zc) are identified.

  In this example, the coordinates of the coordinates (Xc, Yc, Zc) of the irradiation position P2 are calculated by the process of step S306, but the present invention is not limited to this. The coordinates (Xc, Yc, Zc) of the irradiation position P2 may be calculated by the processes of steps S405 and S406 in the designated measurement process of FIGS. 22 and 23 described later.

(11) Another Example of Designated Measurement Process FIGS. 22 and 23 are flowcharts showing another example of the designated measurement process by the control board 210. FIG. FIG. 24 is an explanatory diagram for describing the designated measurement process of FIG. 22 and FIG. In each of FIGS. 24 (a) and 24 (b), the positional relationship between the measurement object S mounted on the optical surface plate 111 on the left side and the imaging unit 220 and the scanning unit 270 is shown in a side view. The image displayed on the display unit 340 by the imaging of the imaging unit 220 is shown in FIG.

  When the designated measurement process is started, the control board 210 acquires screen coordinates (Ua, Va) given along with a command from the control unit 310 (step S401). Subsequently, the control board 210 assumes that the component of the Z axis of the point P0 designated by the user is “Za” (step S402), as in the process of step S302 described above. In this case, as in the example of FIG. 20 (b), the assumed Z-axis component does not necessarily coincide with the Z-axis component of the actually designated point P0.

  Next, in the control substrate 210, plane coordinates (Xa, Ya) corresponding to the screen coordinates (Ua, Va) when the Z-axis component is assumed to be “Za” as in the process of step S303 above. Is calculated (step S403). Further, the control board 210 controls the movable portion 252a of FIG. 6 based on the coordinates (Xa, Ya, Za) of the virtual point P1 obtained by the process of step S403 and the position conversion information, as in the process of step S304 described above. The position of 252b and the angles of the reflecting portions 271b and 272b of FIG. 8 are adjusted to irradiate measurement light (step S404). In step S404, the relationship between the point P0 designated by the user and the irradiation position of the measurement light irradiated to the measurement object S is the same as the state shown in FIG. 20 (c). Thereafter, the subsequent processing is performed such that the irradiation position of the measurement light on the measurement object S actually coincides with or approaches the designated point P0.

  First, the control substrate 210 detects the positions of the movable parts 252a and 252b in FIG. 6, and detects the deflection direction of the measurement light from the angles of the reflection parts 271b and 272b in FIG. 8 (step S405).

  Next, the control substrate 210 outputs the measurement light emission position and the measurement object S based on the positions of the movable portions 252a and 252b detected in the immediately preceding step S405 and the light reception signal acquired by the light reception portion 232d of FIG. Calculate the distance between the measurement light and the irradiation position of In addition, the control substrate 210 coordinates the coordinates of the irradiation position P2 of the measurement light on the measurement target S or the optical surface plate 111 based on the calculated distance and the deflection direction of the measurement light detected in the immediately preceding step S405. It is assumed that Xc, Yc, Zc) (step S406).

  By the process of step S406 described above, the component "Zc" of the Z axis of the irradiation position P2 of the measurement light is estimated to be a value that matches or is close to the component of the Z axis of the point P0 designated by the user . Therefore, the control board 210 calculates plane coordinates (Xa ′, Ya ′) corresponding to the screen coordinates (Ua, Va) when the component of the Z axis is assumed “Zc” based on the coordinate conversion information. (Step S407). Thus, as shown in FIG. 24A, the screen coordinates (Ua, Va) and the coordinates (Xa ', Ya', Zc) of the virtual point P3 corresponding to the assumed Z-axis component are obtained.

  Next, the control substrate 210 calculates an error (Xa′−Xc, Ya′−Yc) of the plane coordinates (Xc, Yc) of the irradiation position P2 with respect to the plane coordinates (Xa ′, Ya ′) of the virtual point P3. Then, it is determined whether the calculated error is within a predetermined determination range (step S408). The determination range used at this time may be set by the user, or may be set in advance at the factory shipment of the optical scanning height measuring device 400.

  In step S408, when the error (Xa '-Xc, Ya'-Yc) is within the predetermined determination range, the control substrate 210 determines the coordinates (Xc, Yc) of the irradiation position P2 determined in the previous step S406. , Zc) as coordinates designated by the user (step S409), and the designated measurement process is ended. Thereafter, the control substrate 210 gives the identified coordinates (Xc, Yc, Zc) to the control unit 310.

  In step S408, when the error (Xa'-Xc, Ya'-Yc) is out of the predetermined determination range, the control substrate 210 determines the coordinates (Xa ', of the virtual point P3 obtained in the immediately preceding step S407. Ya 'and Zc are set as coordinates (Xa, Ya, Za) to be irradiated with the measurement light in step S404 above (step S410). Thereafter, the control substrate 210 returns to the process of step S404 described above.

  As a result, after the deflection direction of the measurement light is changed, the processes of steps S404 to S408 are performed again. As a result, finally, as shown in FIG. 24 (b), when the error (Xa'-Xc, Ya'-Yc) falls within the determination range, the coordinates corresponding to the measurement point designated by the user (Xc, Yc, Zc) is identified.

  In this example, the coordinates of the coordinates (Xc, Yc, Zc) of the irradiation position P2 are calculated by the processing of steps S405 and S406, but the present invention is not limited to this. The coordinates of the coordinates (Xc, Yc, Zc) of the irradiation position P2 may be calculated by the process of step S306 in the designated measurement process of FIGS. 18 and 19.

(12) Actual Measurement Process The control substrate 210 starts the actual measurement process by receiving an instruction of the actual measurement process from the control unit 310. When the actual measurement process is started, the control board 210 first acquires coordinates (Xc, Yc, Zc) of measurement points given from the control unit 310 together with a command.

  Here, even if the measurement light is irradiated based on the coordinates (Xc, Yc, Zc) of the measurement point set in the setting mode and the position conversion information, depending on the shape of the measurement object S measured in the measurement mode The plane coordinates of the irradiation position of the measurement light on the measurement object S may be largely deviated from the coordinates of the measurement point.

  For example, if the component of the Z axis of the portion of the measurement target S corresponding to the measurement point is largely deviated from “Zc”, the plane coordinates of the measurement point at which the plane coordinates of the irradiation position of the measurement light are set (Xc, Yc Greatly deviate from). Therefore, in the actual measurement process, the plane coordinates of the irradiation position of the measurement light are adjusted to be within a certain range from the plane coordinates (Xc, Yc) of the measurement point.

  Specifically, the control board 210 sets, for example, (Ua, Va) screen coordinates corresponding to the acquired coordinates (Xc, Yc, Zc) of the acquired measurement points, and then coordinates (Xc) of the acquired measurement points. , Yc, Zc) are coordinates (Xa, Ya, Za) of the virtual point P1 obtained by the process of step S303 of FIG. Next, the control substrate 210 performs the processes of steps S304 to S308 in FIGS. 18 and 19. Subsequently, based on the coordinates (Xc, Yc, Zc) specified in the process of step S308 and the position conversion information, the control board 210 positions the movable parts 252a and 252b in FIG. 6 and the reflection part 271b in FIG. The measurement light is irradiated by adjusting the angle 272 b.

  Subsequently, the control substrate 210 measures the object based on the light receiving signal output from the light receiving unit 232 d of FIG. 4, the positions of the movable units 252 a and 252 b of FIG. 6, and the deflection directions of the deflection units 271 and 272 of FIG. The three-dimensional coordinates (Xb, Yb, Zb) of the portion on the object S irradiated with the measurement light are calculated and given to the control unit 310. Thus, the actual measurement process ends. The control substrate 210 is a light receiving signal output from the light receiving unit 232 d in FIG. 4, the positions of the movable units 252 a and 252 b in FIG. 6, and the irradiation position of measurement light on the image acquired by the imaging unit 220 in FIG. The three-dimensional coordinates (Xb, Yb, Zb) of the portion of the measurement object S irradiated with the measurement light may be calculated based on the plane coordinates indicating.

  Alternatively, the control substrate 210 may execute the actual measurement process as follows. The control board 210 sets, for example, the coordinates (Xc, Yc, Zc) of the acquired measurement points after setting the screen coordinates corresponding to the acquired coordinates (Xc, Yc, Zc) of the measurement points as (Ua, Va). Let (Xa, Ya, Za) be the coordinates of the virtual point P1 obtained by the process of step S403 in FIG. Next, the control substrate 210 performs the processing of steps S404 to S409 in FIGS. Subsequently, the control board 210 controls the positions of the movable parts 252a and 252b in FIG. 6 and the reflection part 271b in FIG. 8 based on the coordinates (Xc, Yc, Zc) specified in the process of step S408 and the position conversion information. The measurement light is irradiated by adjusting the angle 272 b.

  After that, the control substrate 210 receives the light receiving signal output from the light receiving unit 232 d of FIG. 4, the positions of the movable units 252 a and 252 b of FIG. 6, and the deflection directions of the deflection units 271 and 272 of FIG. The three-dimensional coordinates (Xb, Yb, Zb) of the portion of the measurement object S irradiated with the measurement light are calculated based on the above, and are given to the control unit 310. Alternatively, the control substrate 210 may be a light receiving signal output from the light receiving unit 232 d in FIG. 4, the positions of the movable units 252 a and 252 b in FIG. 6, and the irradiation position of measurement light on the image acquired by the imaging unit 220 in FIG. The three-dimensional coordinates (Xb, Yb, Zb) of the portion of the measurement object S irradiated with the measurement light are calculated based on the plane coordinates indicating.

(13) Operation Example Using Setting Mode and Measurement Mode FIGS. 25 to 31 are diagrams for explaining an operation example of the optical scanning height measuring device 400 in the setting mode. In the following, the user of the optical scanning height measurement apparatus 400 will be described separately for the measurement manager and the measurement worker.

  First, the measurement manager positions the measurement target S as a reference for height measurement on the optical surface plate 111, and operates the setting button 341a of FIG. 9 using the operation unit 330 of FIG. Thus, the optical scanning height measuring device 400 starts the operation of the setting mode. In this case, for example, as shown in FIG. 25, the setting screen 350 is displayed on the display unit 340 of FIG.

  The setting screen 350 includes an image display area 351 and button display areas 352 and 353 (see FIGS. 26 to 31 for the button display area 352). In the image display area 351, an image of the measurement object S currently captured is displayed as a reference image RI. In each of FIGS. 25 to 31 and each of FIGS. 32 to 38 described later, a contour indicating the shape of the measurement target S in the reference image RI displayed in the image display area 351 and the measurement image MI described later is It is indicated by a thick solid line.

  In the example of FIG. 25, the determination light is irradiated from the deflecting unit 272 of FIG. 8 to the portion of the measurement target directly below, so that it is determined whether the irradiation portion of the determination light is within the measurement range. The irradiated portion of the determination light is indicated by "+" in FIG. In addition, a determination message indicating the determination result is displayed in the image display area 351 together with the reference image RI. In the example of FIG. 25, as described later, the measurement range is positioned 20.0 mm or more above the mounting surface. In this case, the irradiated portion of the determination light is not located within the measurement range. Therefore, the determination message "FAIL" is displayed.

  In the button display area 353, a range image 353 a visually showing the current measurement range for the light scanning height measuring device 400 is displayed, and a plurality of elevating buttons 353 b, an auto button 353 c and a registration button 353 d are displayed. . The measurement manager can recognize the current measurement range for the optical scanning height measurement device 400 by visually recognizing the range image 353a. The range image 353a of FIG. 25 indicates that the measurement range is positioned 20.0 mm to 50.0 mm above the mounting surface.

  The measurement manager gives an instruction for moving the measurement head 200 upward or downward to the drive circuit 132 of FIG. 3 by operating any of the plurality of elevation buttons 353 b using the operation unit 330 of FIG. 1. be able to. The drive circuit 132 moves the measuring head 200 upward or downward in accordance with the operated elevation button 353b. The measurement manager positions the irradiated portion of the determination light within the measurement range by operating the elevation button 353b so that the determination message “OK” is displayed in the image display area 351 while visually recognizing the range image 353a. Can.

  On the other hand, the measurement manager can operate the auto button 353 c using the operation unit 330. In this case, the measuring head 200 automatically moves upward or downward (autofocus) such that the irradiated portion of the determination light is positioned within the measurement range. After autofocusing of the measurement head 200 is completed, the measurement manager can further move the measurement head 200 to a more suitable position by further operating the plurality of elevation buttons 353b.

  The measurement manager can end the position setting of the measurement head 200 by operating the registration button 353 d using the operation unit 330. In this case, the height information of the measuring head 200 is stored (registered) in the storage unit 320. Further, the display mode of the setting screen 350 is switched as shown in FIG. Specifically, in the image display area 351, the index indicating the irradiated portion of the determination light and the determination message are removed. Further, in the setting screen 350, a button display area 352 is displayed instead of the button display area 353.

  As shown in FIG. 26, in the button display area 352, a search area button 352a, a pattern image button 352b and a setting completion button 352c are displayed. The measurement manager operates, for example, the search area button 352 a and performs a drag operation or the like on the image display area 351. Thus, the search area SR is set as shown by a dotted line in FIG. Also, the measurement manager operates, for example, the pattern image button 352 b to perform a drag operation or the like on the image display area 351. Thereby, the pattern image PI can be set as indicated by an alternate long and short dash line in FIG.

  After setting the search area SR and the pattern image PI, the measurement manager operates the setting completion button 352 c. Thereby, the setting of the search area SR and the pattern image PI is completed, and the display mode of the setting screen 350 is switched as shown in FIG. Specifically, in the image display area 351, the index indicating the set search area SR and the pattern image PI is removed. Further, in the button display area 352, in place of the search area button 352a and the pattern image button 352b of FIG. 26, a point designation button 352d and a reference surface setting button 352e are displayed.

  The measurement manager operates the point designation button 352 d to perform a click operation or the like on the image display area 351. Thereby, one or more (three in this example) reference points are designated as indicated by “+” marks in FIG. Thereafter, the measurement manager operates the reference surface setting button 352 e. As a result, a reference plane including one or more designated reference points is set, and an index indicating the reference plane RF set in the image display area 351 is displayed as shown by a two-dot chain line in FIG. Here, when four or more reference points are designated, all four or more reference points need not necessarily be included in the reference plane RF. In this case, the reference plane RF is set, for example, such that the distance between the plurality of reference points is entirely reduced. Similarly, when a reference surface constraint condition for determining a reference surface is defined, for example, the reference surface is parallel to the mounting surface, or the reference surface is parallel to another surface previously stored. In the case where two or more reference points are designated in the case where conditions such as that are defined, it is not necessary that all the two or more reference points be included in the reference plane RF. A plurality of reference planes RF may be set by repeating the operations of the point designation button 352d and the reference plane setting button 352e.

  Thereafter, the measurement manager operates the setting completion button 352 c. Thereby, the setting of the reference plane RF is completed, and the display mode of the setting screen 350 is switched as shown in FIG. Specifically, in the image display area 351, an index indicating one or more reference points used for setting the reference plane RF is removed. Further, in the button display area 352, in place of the reference surface setting button 352e of FIG. 29, an allowance value button 352g is displayed.

  The measurement manager operates the point designation button 352 d to perform a click operation or the like on the image display area 351. Thereby, measurement points are designated as indicated by “+” marks in FIG. At this time, in the case where a plurality of reference planes RF are set, one selection is accepted from among the plurality of reference planes RF set as the reference planes RF as the reference of the designated measurement point. In addition, when the above-mentioned designated measurement processing is performed for the designated measurement point and the height of the portion of the measurement target S corresponding to the measurement point can be calculated, the portion of the measurement target S corresponding to the measurement point The height is displayed on the image display area 351. At this time, it may be shown that the height of the portion of the measurement object S corresponding to the measurement point can be calculated by changing the color of the “+” mark, for example, to green.

  On the other hand, when the designated measurement process described above is performed for the designated measurement point and the height of the portion of the measurement object S corresponding to the measurement point can not be calculated, an error message such as “FAIL” appears on the image display area 351. May be displayed. At this time, it may be indicated that the height of the portion of the measurement object S corresponding to the measurement point can not be calculated by changing the color of the “+” mark to, for example, red.

  When a plurality of measurement points are designated, it may be possible to designate measurement path information. For example, it may be possible to set information such as setting measurement paths in accordance with the designation order of a plurality of measurement points, or setting measurement paths such that the measurement path is shortest.

  At the time of designation of the measurement point, the measurement manager can further set the design value and the tolerance as the tolerance value for each measurement point by operating the tolerance value button 352g. Finally, the measurement manager operates the setting completion button 352c. Thereby, a series of information including height information, a plurality of measurement points, and a tolerance value are associated with one another and stored in the storage unit 320 as registration information. At this time, the registration information is given a specific file name. The file name may be set by the measurement manager.

  As shown in FIGS. 28 to 31, on the reference image RI, the reference point designated by the measurement manager and the index “+” indicating the position of the measurement point are superimposed and displayed. Thereby, the measurement manager can easily confirm the designated reference point and measurement point by visually recognizing the index superimposed and displayed on the reference image RI of the measurement object S.

  Here, in the present invention, the order of setting of the reference point and the measurement point in the setting mode is not limited to the above example. The setting of the reference point and the measurement point may be performed as follows.

  32 to 35 are diagrams for explaining another operation example of the optical scanning height measuring device 400 in the setting mode. In this example, the setting screen 350 of FIG. 25 for performing position setting processing is not displayed on the display unit 340 at the start time of the setting mode, and the setting screen of FIG. 26 for setting the search area SR and the pattern image PI. 350 is displayed. After setting the search area SR and the pattern image PI, as shown in FIG. 32, in the button display area 352, a setting completion button 352c, point designation button 352d, reference surface setting button 352e, position setting button 352f, tolerance value button 352g, A reference point setting button 352 h and a measurement point setting button 352 i are displayed.

  In this state, the measurement manager operates the point designation button 352 d to perform a click operation or the like on the image display area 351. At this time, the measurement manager designates a plurality of (five in this example) points that can be reference points or measurement points, as indicated by “+” marks in FIG.

  Next, the measurement manager operates the reference point setting button 352 h or the measurement point setting button 352 i for each designated point to determine whether to use the point as a reference point or as a measurement point. Furthermore, the measurement manager operates the reference surface setting button 352 e after determining one or more points as the reference points. As a result, as shown in FIG. 33, one or more (three in this example) reference points are displayed in the image display area 351 as indicated by a dotted “+” mark. In addition, as indicated by a two-dot chain line, a reference plane based on one or more reference points is displayed. Furthermore, one or more (two in this example) measurement points are displayed as indicated by a solid "+" mark.

  Next, the measurement manager operates the position setting button 352f to display a setting screen 350 similar to the setting screen 350 in FIG. 25 for performing position setting processing on the display unit 340 as shown in FIG. Be done. In the example of FIG. 34, determination light is irradiated to each point designated from the deflection unit 272 of FIG. 8 to determine whether each irradiation portion of the determination light is located within the measurement range. Each irradiation portion of the determination light is indicated by “+” in FIG. In addition, a determination message indicating the determination result for each point is displayed in the image display area 351 together with the reference image RI.

  In the example of FIG. 34, it is indicated that the measurement range is located 10.0 mm to 40.0 mm above the mounting surface. In this case, among the five irradiation portions of the determination light corresponding to the five points, one irradiation portion is located within the measurement range, and the other four irradiation portions are not located within the measurement range. Therefore, the determination message "OK" is displayed for one irradiation portion, and the determination message "FAIL" is displayed for the other four irradiation portions.

  The measurement manager measures all the irradiated portions of the determination light by operating the elevation button 353b so that all determination messages displayed in the image display area 351 become "OK" while visually recognizing the range image 353a. It can be located within the range. On the other hand, by operating the auto button 353c, the measurement manager can move the measurement head 200 so that all the irradiated portions of the determination light are automatically positioned within the measurement range. After autofocusing of the measurement head 200 is completed, the measurement manager can further move the measurement head 200 to a more suitable position by further operating the plurality of elevation buttons 353b.

  Here, in the auto focus, the range determination unit 21 in FIG. 11 determines whether or not a plurality of portions respectively corresponding to a plurality of designated points can be simultaneously positioned within the measurement range. When a plurality of portions can be simultaneously positioned within the measurement range, the drive control unit 22 of FIG. 11 adjusts the position of the measurement head 200 so that the plurality of portions is simultaneously positioned within the measurement range.

  In this case, the position of the measurement head 200 may be adjusted such that the representative portion in the vertical direction determined by the plurality of portions is positioned at the center in the vertical direction of the measurement range. The representative portion may be a portion having an average height at a plurality of points or a portion having an intermediate height.

  In addition, the reference surface RF is often set as the mounting surface. Therefore, the range determination unit 21 may determine whether or not the plurality of portions and the placement surface respectively corresponding to the plurality of designated points can be simultaneously positioned within the measurement range. When the plurality of parts and the mounting surface can be simultaneously positioned within the measurement range, the drive control unit 22 positions the measurement head 200 such that the plurality of parts and the mounting surface are simultaneously positioned within the measurement range. You may adjust the

  In this case, the measurement range does not have to be located below the mounting surface. Therefore, the position of the measurement head 200 may be adjusted such that the lower limit of the measurement range is located on the mounting surface. Thus, it is possible to secure a large measurement range in the vertical direction while setting the reference surface RF as the mounting surface.

  Further, the range determination unit 21 can simultaneously position the plurality of portions respectively corresponding to the plurality of designated points and the origin of the three-dimensional coordinate system unique to the optical scanning height measuring device 400 within the measurement range. It may be determined whether there is any. When the plurality of parts and the origin can be simultaneously positioned within the measurement range, the drive control unit 22 adjusts the position of the measuring head 200 so that the plurality of parts and the origin are simultaneously positioned within the measurement range. It is also good.

  The measurement manager can end the position setting of the measurement head 200 by operating the registration button 353d. In this case, the height information of the measuring head 200 is stored (registered) in the storage unit 320. Further, the display mode of the setting screen 350 is switched as shown in FIG. Specifically, in the image display area 351, the index indicating the irradiated portion of the determination light and the determination message are removed. Further, in the setting screen 350, a button display area 352 is displayed instead of the button display area 353.

  Thereafter, as shown in FIG. 35, the height of the portion of the measurement target S corresponding to the designated measurement point is displayed on the image display area 351. At this time, the measurement manager can set the design value and the tolerance as the allowable value for each measurement point by operating the allowable value button 352 g as in the above example. Finally, the measurement manager operates the setting completion button 352c.

  In the setting mode, it is also possible to edit the generated registration information. For example, plane coordinates (Xc, Yc) of any of the registered measurement points or reference points (specifically, the highest point and the lowest point) are acquired, and the portion corresponding to that point is located within the measurement range The position of the measuring head 200 may be adjusted again to do this. In this case, the height information in the registration information is updated to the height information of the measuring head 200 after adjustment. Such editing of the registration information may be performed each time the registration information is read in the setting mode, or once when the registration information is read in the setting mode before the registration information is used in the measurement mode. It may only be done.

  36 to 38 are diagrams for describing an operation example of the optical scanning height measurement device 400 in the measurement mode. The measurement operator positions the measurement object S to be measured for height measurement on the optical surface plate 111, and operates the measurement button 341b of FIG. 9 using the operation unit 330 of FIG. Thereby, the optical scanning height measuring device 400 starts the operation in the measurement mode. In this case, for example, as shown in FIG. 36, a measurement screen 360 is displayed on the display unit 340 of FIG. The measurement screen 360 includes an image display area 361 and a button display area 362. In the image display area 361, an image of the measurement object S currently captured is displayed as a measurement image MI.

  At the start time of the measurement mode, a file read button 362 a is displayed in the button display area 362. The measurement worker operates the file read button 362 a to select the file name instructed by the measurement manager. Thereby, registration information of height measurement corresponding to the measurement object S placed on the optical surface plate 111 is read.

  When the registration information is read, the position of the measurement head 200 is adjusted based on the height information corresponding to the read registration information. Further, as shown in FIG. 37, a pattern image PI corresponding to the read registration information is superimposed and displayed on the measurement image MI of the image display area 361 in a semitransparent state. The measurement button 362 b is displayed in the button display area 362. In this case, the measurement operator can position the measuring object S at a more appropriate position on the optical surface plate 111 with reference to the pattern image PI.

  Thereafter, the measurement worker operates the measurement button 362 b after performing the positioning operation of the measurement object S more accurately. Thereby, the height from the reference plane of the plurality of portions of the measurement object S corresponding to the plurality of measurement points of the read registration information is measured. If the read registration information includes an allowance, the quality of the corresponding part of the measurement point is determined based on the allowance.

  As a result, as shown in FIG. 38, the height of the portion of the measurement target S corresponding to each of the set measurement points is displayed on the image display area 361. Further, the height of the portion of the measurement target S corresponding to each set measurement point is displayed on the button display area 362, and the result of the quality determination based on the tolerance value is displayed as the inspection result.

(14) Modification FIG. 39 is a block diagram showing a control system 410 of an optical scanning height measurement apparatus 400 according to a modification. The control system 410 of FIG. 39 will be described in terms of differences from the control system 410 of FIG. As shown in FIG. 39, in the modification, the control system 410 further includes a geometric element acquisition unit 23 and a geometric element calculation unit 24.

  In the setting mode, the geometric element acquisition unit 23 receives specification of a geometric element related to the position of the measurement point acquired by the position information acquisition unit 2. Here, the geometric element related to the position of the measurement point is various elements that can be calculated based on the coordinates of the portion of the measurement object S corresponding to the measurement point, for example, the flatness of the desired surface of the measurement object S Alternatively, the distance or angle of a plurality of parts of the measurement object S is included. The tolerance value corresponding to the designated geometric element may be further input to the tolerance value acquiring unit 5.

  The registration unit 6 registers the geometric element received by the geometric element acquisition unit 23 in association with the measurement point. When the tolerance value corresponding to the geometric element is input to the tolerance value acquisition unit 5, the registration unit 6 registers the tolerance value received by the tolerance value acquisition unit 5 in association with the geometry element. The coordinate calculation unit 13 further calculates coordinates related to the geometric element registered in the registration unit 6. The geometric element calculation unit 24 calculates the value of the geometric element registered in the registration unit 6 based on the coordinates related to the geometric element calculated by the coordinate calculation unit 13.

  In the measurement mode, the correction unit 17 further sets a geometric element corresponding to the registration information registered by the registration unit 6 in the measurement image data. The coordinate calculation unit 13 further calculates coordinates related to the geometric element set by the correction unit 17. The geometric element calculation unit 24 calculates the geometric element set by the correction unit 17 based on the coordinates related to the geometric element calculated by the coordinate calculation unit 13.

  According to this configuration, when the measurement manager designates the geometric element in the setting mode, even if the measurement operator is not skilled in the measurement mode, the calculation result of the geometric element of the corresponding portion of the measuring object S is obtained. It can be acquired uniformly. This makes it possible to accurately and easily measure various geometric elements including the flatness or the assembly dimension of the measurement object S.

  When the tolerance value corresponding to the geometric element is registered in the registration unit 6, the inspection unit 18 determines whether the geometric element calculated by the geometric element calculation unit 24 and the tolerance value registered in the registration unit 6 are registered. The inspection object S is further inspected based on it. Specifically, when the calculated geometric element is within the tolerance range based on the design value, the inspection unit 18 determines that the measurement object S is a non-defective item. On the other hand, when the calculated geometric element is out of the range of the tolerance based on the design value, the inspection unit 18 determines that the measurement object S is a defective product.

  The report creation unit 19 creates the report 420 of FIG. 12 based on the inspection result by the inspection unit 18 and the reference image acquired by the measurement image acquisition unit 16. In this case, the report 420 describes inspection results of various geometric elements other than the height. In the example of FIG. 12, in addition to the height of the portion of the measurement object S, the flatness, the level difference and the angle are described as geometric elements. Thereby, the measurement worker can inspect the assembled dimensions of the measurement object S, and can easily report the inspection result to the measurement manager or other users using the report 420.

(15) Effects In the optical scanning height measuring device 400 according to the present embodiment, when the user designates a desired measuring point, the height of the portion of the measuring object S corresponding to the designated point is It is calculated. Therefore, the user does not have to place the measurement object S in a state in which the position and the attitude with respect to the optical scanning height measurement device 400 are accurately adjusted, and it is not necessary to prepare position coordinates of measurement points in advance.

  On the other hand, in order to calculate the height of the portion of the measurement object S, it is necessary to place the measurement object S such that the portion is located within the measurement range. Here, whether or not the portion of the measurement target S is positioned within the measurement range is determined by the range determination unit 21. Therefore, the user determines that the portion is within the measurement range by the drive control unit 22 based on the determination result. The distance between the measuring head 200 and the measuring object S can be adjusted to be located at As a result, it is possible to efficiently measure the shape of the desired part of the measurement object S.

(16) Other Embodiments (a) In the above embodiment, the optical unit 230 includes the determination light output unit 233, but the present invention is not limited to this. When a part of the emitted light is used as the determination light, the optical unit 230 may not include the determination light output unit 233. In this case, the distance between the measurement head 200 and the object S is calculated based on the time difference between the emission light output by the emission light output unit 231 and the detection of the emission light by the determination light detection unit 234. Ru.

  (B) In the above embodiment, the range determination unit 21 determines whether or not the portion of the measurement object S is located within the measurement range based on the distance calculated by the distance information calculation unit 20. The invention is not limited to this. The range determination unit 21 may determine whether or not the portion of the measurement target S is positioned within the measurement range based on the light reception amount of the interference light in the light reception signal output by the light reception unit 232 d. Specifically, it is determined that the portion of the measurement object S is located within the measurement range when the light reception amount is equal to or greater than a predetermined threshold value, and the measurement object when the light reception amount is less than the threshold value It is determined that the portion of S is not located within the measurement range. In this case, the optical unit 230 may not include the determination light output unit 233.

  (C) In the above embodiment, in the measurement mode, the position of the measurement head 200 is adjusted based on the height information and is not moved to another position, but the present invention is not limited to this. In the measurement mode, the position of the measurement head 200 may be moved from the position adjusted based on the height information to another position. In this case, it is preferable that the imaging unit 220 be configured of a telecentric optical system so that the size of the measurement image does not change even if the measurement head 200 moves. Alternatively, it is preferable that the measurement image data be corrected using a magnification corresponding to the movement amount of the measurement head 200 so that the size of the measurement image does not change even if the measurement head 200 moves.

  (D) The height calculation unit 15 may calculate the height of the portion of the measurement object S based on the origin in the unique three-dimensional coordinate system defined in the optical scanning height measurement device 400. In this case, the user can obtain the absolute value of the height of the portion of the measurement object S in the unique three-dimensional coordinate system. In addition, the height calculation unit 15 calculates the relative value of the height relative to the reference surface in the relative value calculation mode and the absolute value calculation mode in which the absolute value of the height in the unique three-dimensional coordinate system is calculated. It may be selectively operable. In the absolute value calculation mode, the reference point may not be designated because the reference plane is not necessary.

  (E) The height calculation unit 15 may cause the display unit 340 to display an error message such as “FAIL” when the height of the portion of the measurement object S corresponding to the measurement point can not be calculated in the setting mode. . In this case, the measurement manager can recognize that the height of the portion of the measurement target S corresponding to the measurement point can not be calculated by viewing the display unit 340. Thereby, the measurement manager changes the position of the measurement object S or the optical scanning height measurement apparatus 400 so that the height of the portion of the measurement object S can be calculated, or the position of the measurement point specified Can be changed.

  (F) The optical scanning height measuring device 400 may be configured to be able to insert a drawing and a comment into a reference image acquired in the setting mode or a measurement image acquired in the measurement mode. Thereby, the measurement condition of the measuring object S can be recorded in more detail. Further, the drawing and the comment inserted into the reference image may be registered as registration information.

  For example, a frame line indicating a search area set in the setting mode may be drawn on the reference image. In this case, in the measurement mode, the frame line is displayed on the measurement image. Thereby, in the measurement mode, it becomes easy for the measurement worker to place the measurement object S on the optical surface plate 111 so that the measurement object S fits within the frame line displayed in the measurement image. As a result, it is possible to efficiently correct the deviation of the measurement image data with respect to the reference image data.

  (G) The reference image acquisition unit 1 may display a bird's-eye view on the display unit 340 by performing image processing on the acquired reference image. Similarly, the measurement image acquisition unit 16 may display a bird's-eye view on the display unit 340 by performing image processing on the acquired measurement image.

  (H) In the above embodiment, the reference image acquisition unit 1 and the measurement image acquisition unit 16 acquire a captured image of the measurement object S by the imaging unit 220 as a reference image and a measurement image, respectively. It is not limited. The reference image acquisition unit 1 and the measurement image acquisition unit 16 may acquire CAD (Computer Aided Design) images of the measurement object S prepared in advance as a reference image and a measurement image, respectively.

  Alternatively, when the measurement light is irradiated to a plurality of portions of the measurement target S, the height calculation unit 15 can calculate the heights of the plurality of portions of the measurement target S. Therefore, the reference image acquisition unit 1 and the measurement image acquisition unit 16 may acquire the distance image of the measurement object S as the reference image and the measurement image based on the heights of the plurality of portions of the measurement object S. .

  When a CAD image or a distance image is used as a reference image, the measurement manager correctly specifies a desired reference point and measurement point on the CAD image or the distance image while recognizing the three-dimensional shape of the measurement object S. can do. In addition, when a distance image is used as the reference image and the measurement image, the distance image may be generated at high speed by reducing the resolution.

  (I) In the above embodiment, the measurement operator designates the file of registration information at the start of the measurement mode, but the present invention is not limited to this. For example, an ID (Identification) tag corresponding to a file of registration information may be attached to the measurement object S. In this case, when the measurement object S and the ID tag are imaged by the imaging unit 220 at the start of the measurement mode, the file of the registration information corresponding to the tag is automatically designated. According to this configuration, the measurement operator does not have to specify a file of registration information at the start of the measurement mode. Therefore, the process of step S203 of FIG. 16 is omitted.

  (J) In the above embodiment, the height of the measurement object S is calculated by the spectral interference method, but the present invention is not limited to this. The height of the measurement object S may be calculated by the white light interference method.

  (K) In the above embodiment, the operation mode of the light scanning height measurement device 400 includes a plurality of operation modes, and the light scanning height measurement device 400 operates in the operation mode selected by the user. Is not limited to this. The operation mode of the light scanning height measurement device 400 does not include a plurality of operation modes and includes only a single operation mode, and the light scanning height measurement device 400 may operate in the operation mode. For example, the operation mode of the light scanning height measurement device 400 does not include the setting mode and the measurement mode, and the light scanning height measurement device 400 may operate in the same operation mode as the height gauge mode.

  (L) In the above embodiment, the light guide 240 includes the optical fibers 241 to 244 and the fiber coupler 245, but the present invention is not limited thereto. The light guiding unit 240 may include a half mirror instead of the optical fibers 241 to 244 and the fiber coupler 245.

(17) Correspondence Between Each Component of the Claim and Each Part of the Embodiment Hereinafter, an example of the correspondence between each component of the claim and each part of the embodiment will be described, but the present invention is not limited to the following example. It is not limited. As each component of a claim, other various elements having the configuration or function described in the claim can also be used.

  In the above embodiment, the measurement area V is an example of the measurement area, the measurement object S is an example of the measurement object, and the light scanning height measuring device 400 is an example of the light scanning height measuring device, The position information acquisition unit 2 is an example of a reception unit. The output light output unit 231 is an example of an output light output unit, the fiber coupler 245 is an example of a branch unit and an interference light generation unit, the movable mirror 254c is an example of a reference body, and the drive units 255a and 255b are optical path lengths. It is an example of a movable part.

  The deflection units 271 and 272 are examples of deflection units, the range determination unit 21 is an example of a range determination unit, the drive control unit 22 is an example of a distance adjustment unit, and the light receiving unit 232 d is an example of a light receiving unit. The drive control unit 3 is an example of a drive control unit. The distance information calculators 12 and 20 are examples of the first and second distance information calculators, the height calculator 15 is an example of the height calculator, and the determination light output unit 233 is a portion of the determination light output unit. It is an example. The determination light detection unit 234 is an example of a determination light detection unit, the optical surface plate 111 is an example of a mounting table, the measurement image acquisition unit 16 is an example of an image acquisition unit, and the registration unit 6 is an example of a registration unit. is there.

  DESCRIPTION OF SYMBOLS 1 ... Reference image acquisition part, 2 ... Position information acquisition part, 3, 22 ... Drive control part, 4 ... Reference surface acquisition part, 5 ... Tolerance value acquisition part, 6 ... Registration part, 7 ... Deflection direction acquisition part, 8 ... Detecting part, 9 ... image analysis part, 10 ... reference position acquisition part, 11 ... light reception signal acquisition part, 12, 20 ... distance information calculation part, 13 ... coordinate calculation part, 14 ... irradiation judgment part, 15 ... height calculation part , 16 ... measurement image acquisition unit, 17 ... correction unit, 18 ... inspection unit, 19 ... report creation unit, 21 ... range determination unit, 23 ... geometric element acquisition unit, 24 ... geometric element calculation unit, 100 ... stand unit, DESCRIPTION OF SYMBOLS 110 ... Installation part, 111 ... Optical surface plate, 120 ... Holding part, 130 ... Elevation part, 131, 255a, 255b, 264, 271a, 272a ... Drive part, 132, 256a, 256b, 265, 273, 274 ... Drive circuit , 133, 257a, 257b, 266, 2 5, 276: reading unit, 200: measuring head, 210: control substrate, 220: imaging unit, 230: optical unit, 231: emitted light output unit, 232: measuring unit, 233: judgment light output unit, 234: judgment light Detecting part, 232a, 232c, 246 ... Lens, 232b ... Spectroscopic part, 232d ... Photodetecting part, 240 ... Light guiding part, 241 to 244 ... Optical fiber, 245 ... Fiber coupler, 245a to 245d ... Port, 245e ... Body part, 247 ... dichroic mirror, 250 ... reference unit, 251, 261 ... fixed unit, 251 g ... linear guide, 252a, 252b, 262 ... movable unit, 253 ... fixed mirror, 254a to 254c ... movable mirror, 260 ... focusing unit, 263 ... Movable lens, 270 ... scanning unit, 271, 272 ... deflection unit, 271 b, 272 b ... reflection unit, 300 ... processing device, 3 DESCRIPTION OF SYMBOLS 0 ... Control part, 320 ... Storage part, 330 ... Operation part, 340 ... Display part, 341 ... Selection screen, 341a ... Setting button, 341b, 362b ... Measurement button, 341c ... Height gauge button, 350 ... Setting screen, 351, 361 ... image display area, 352, 353, 362 ... button display area, 352 a ... search area button, 352 b ... pattern image button, 352 c ... setting completion button, 352 d ... point designation button, 352 e ... reference surface setting button, 352 f ... position setting Button, 352g: Tolerance value button, 353a: Range image, 353b: Lifting button, 353c: Auto button, 353d: Registration button, 360: Measurement screen, 362a: File read button, 400: Optical scanning height measuring device, 410 ... Control system, 420 ... Report, 421 ... Name display column, 422 ... Image display , 423 ... status display column, 424 ... result display column, 425 ... warranty display column, MI ... measurement image, PI ... pattern image, RF ... reference surface, RI ... reference image, S ... measurement object, SR ... search area, V ... Measurement area

Claims (13)

An optical scanning height measuring device for calculating the height of a portion of an object to be measured corresponding to a measurement point in a measurement area, comprising:
A reception unit that receives specification of measurement points;
An outgoing light output unit that emits temporally low coherence light;
A branching unit that outputs part of the light emitted from the output light output unit as measurement light and outputs the other part of the light as reference light;
A reference body that reflects the reference light output from the branch portion;
An optical path length movable part that changes an optical path length of reference light between the branch part and the reference body;
A deflection unit that deflects the measurement light output from the branch unit and irradiates the measurement object with the measurement light;
An interference light generation unit that generates interference light between the measurement light reflected by the measurement object and returned to the branch portion, and the reference light reflected by the reference body and returned to the branch portion;
A range determination unit that determines whether or not a portion of the measurement object is positioned within a measurement range in a predetermined height direction;
A distance adjustment unit for adjusting the distance between the deflection unit and the object to be measured;
A light receiving unit that receives the interference light generated by the interference light generation unit and outputs a light reception signal indicating a light reception amount;
A drive control unit configured to control the deflection unit such that the measurement light is irradiated to the portion of the measurement object corresponding to the measurement point;
A first distance information calculation unit that calculates the distance between the deflection unit and the portion of the measurement object corresponding to the measurement point based on the optical path length of the reference light and the light reception signal output by the light reception unit;
The height of the portion of the measurement object corresponding to the measurement point based on the deflection direction of the deflection unit or the irradiation position of the measurement light deflected by the deflection unit and the distance calculated by the first distance information calculation unit An optical scanning height measuring device, comprising: a height calculating unit that calculates a height. The optical scanning according to claim 1, wherein the range determination unit determines whether or not the portion of the measurement object is positioned within the measurement range based on the light reception amount of the interference light in the light reception signal output by the light reception unit. Height measuring device. A determination light output unit that emits determination light to be applied to the measurement object so as to overlap with the measurement light to be applied to the measurement object from the deflection unit;
A determination light detection unit that detects the determination light reflected by the measurement object;
A second distance for calculating the distance between the deflection unit and the object based on the time difference between the determination light output by the determination light output unit and the determination light being detected by the determination light detection unit And an information calculation unit,
The optical scanning height according to claim 1, wherein the range determination unit determines whether or not the portion of the measurement object is positioned within the measurement range based on the distance calculated by the second distance information calculation unit. measuring device. The optical scanning height measurement device according to any one of claims 1 to 3, wherein the range determination unit outputs a determination message indicating whether or not the portion of the measurement object is located within the measurement range. When it is determined that the part of the measurement object is not positioned within the measurement range, the distance adjustment unit is configured to determine the distance between the deflection unit and the measurement object such that the part of the measurement object is positioned within the measurement range The light scanning height measuring device according to any one of claims 1 to 4, wherein the light scanning height is automatically adjusted. It further comprises a mounting table on which the measurement object is mounted,
The said range determination part determines whether it is possible for the part of a measurement object, and the mounting surface of the said mounting table to be simultaneously located in a measurement range, or not. The optical scanning height measurement device according to claim 1. When it is determined that the portion of the measurement object and the mounting surface of the mounting table can be simultaneously positioned within the measurement range, the distance adjustment unit sets the portion of the measurement object and the mounting surface of the mounting table. The optical scanning height measuring device according to claim 6, wherein the distance between the deflecting unit and the object to be measured is automatically adjusted so that the mounting surface is simultaneously positioned within the measurement range. The optical scanning height measurement device according to claim 7, wherein the distance adjustment unit adjusts the distance between the deflection unit and the measurement object such that the lower limit of the measurement range is located on the mounting surface of the mounting table. . The reception unit receives designation of a plurality of measurement points,
The range determination unit determines whether or not a plurality of portions of the measurement object corresponding to a plurality of measurement points can be simultaneously positioned within the measurement range. The optical scanning height measurement device according to one item. When it is determined that the plurality of portions of the measurement object can be simultaneously positioned within the measurement range, the distance adjustment unit is configured such that the plurality of portions of the measurement object are simultaneously positioned within the measurement range. The optical scanning height measuring device according to claim 9, wherein the distance between the deflecting unit and the object to be measured is automatically adjusted. The distance adjustment unit adjusts the distance between the deflection unit and the measurement object such that the representative portion in the height direction determined by the plurality of portions of the measurement object is positioned at the center of the measurement range in the height direction. The optical scanning height measurement device according to claim 10. It further comprises an image acquisition unit for acquiring an image of the measurement object,
The optical scanning height measurement device according to any one of claims 1 to 11, wherein the receiving unit receives specification of a measurement point on an image of a measurement object acquired by the image acquisition unit. The setting mode for setting the measurement point on the first measurement object placed in the measurement area and the height of the portion corresponding to the measurement point on the second measurement object placed in the measurement area Configured to selectively operate in the measurement mode to be measured,
Further equipped with a registration unit,
The receiving unit receives specification of a measurement point in the setting mode,
The range determination unit determines whether or not the portion of the first measurement object is located within the measurement range in the setting mode,
The distance adjustment unit adjusts the distance between the deflection unit and the first measurement object in the setting mode,
The registration unit registers, in the setting mode, the measurement point accepted by the acceptance unit and the distance adjusted by the distance adjustment unit.
In the measurement mode, the distance adjustment unit adjusts the distance between the deflection unit and the second measurement object based on the distance registered by the registration unit,
In the measurement mode, the drive control unit controls the deflection unit such that a portion of the second measurement target corresponding to the measurement point registered by the registration unit is irradiated with the measurement light.
The first distance information calculation unit calculates, in the measurement mode, a distance between the deflection unit and a portion of the second measurement object corresponding to the measurement point;
In the measurement mode, the height calculation unit performs measurement based on the deflection direction of the deflection unit or the irradiation position of measurement light deflected by the deflection unit and the distance calculated by the first distance information calculation unit. The optical scanning height measuring device according to any one of claims 1 to 12, wherein the height of the portion of the second measuring object corresponding to the point is calculated.

Images