JP2019074474A - Shape measurement device - Google Patents

Abstract

To provide a shape measurement device that can measure a physical quantity with a high degree of freedom.SOLUTION: A coordinate calculation unit 13 performs processing for calculating the three-dimensional coordinates of first object portions on the basis of the deflection direction of a deflection unit or an irradiation position of light deflected by the deflection unit and a light receiving signal output from a light receiving unit. A reference plane specification unit 4 specifies a reference plane on the basis of the calculated three-dimensional coordinates. A physical quantity calculation unit 15 calculates a physical quantity with the specified reference plane as a reference. When the three-dimensional coordinates of at least one of the first object portions are not calculated, coordinate omission processing selected in advance is performed. When first processing is selected as the coordinate omission processing, the reference plane is not specified. When second processing is selected as the coordinate omission processing and the reference plane can be specified with the calculated three-dimensional coordinates, the reference plane is specified on the basis of the calculated three-dimensional coordinates.SELECTED DRAWING: Figure 10

Description

  The present invention relates to a shape measuring device that measures the surface shape of a measurement object.

  An optical scanning height measuring device is used to measure the surface shape of the measurement object. For example, in the dimension measurement device described in Patent Document 1, light emitted from a white light source is divided into a measurement light beam and a reference light beam by an optical coupler. The measurement light beam is scanned by the measurement object scanning optical system and irradiated to any measurement point on the surface of the object to be measured. The reference light beam is irradiated to the reference light scanning optical system. The surface height of the measurement point of the object to be measured is determined based on the interference between the measurement light flux reflected by the object to be measured and the reference light flux.

JP, 2010-43954, A

  In the dimension measurement device of Patent Document 1, the surface height of the object to be measured is calculated based on a predetermined reference plane. In this case, since the reference surface is fixed, the degree of freedom of measurement is low. Therefore, a measuring device capable of measuring a physical quantity with a higher degree of freedom is required.

  An object of the present invention is to provide a shape measuring apparatus capable of measuring a physical quantity with a high degree of freedom.

  (1) The shape measuring apparatus according to the present invention comprises a light emitting unit for emitting light, a deflecting unit for deflecting light emitted from the light emitting unit and irradiating the light onto a measurement area including the object to be measured; Light receiving unit for receiving a light receiving signal indicating the amount of light received, a position information acquiring unit for acquiring first position information indicating the positions of a plurality of reference points in the measurement area, and an information acquiring unit A drive control unit configured to control the deflection unit such that light is emitted to the plurality of first target portions of the measurement area respectively corresponding to the plurality of reference points based on the first position information; A coordinate calculation unit for performing processing for calculating three-dimensional coordinates of each first target portion based on the irradiation position of light deflected by the direction or the deflection unit and the light reception signal output by the light reception unit; Three-dimensional coordinates of the plurality of first target portions by the calculation unit When it is calculated, the reference plane is specified based on the three-dimensional coordinates of the plurality of first target portions calculated by the coordinate calculation unit, and the three-dimensional coordinates of at least one first target portion are determined by the coordinate calculation unit. When it is not calculated, a reference surface specifying unit that performs coordinate loss processing selected in advance, a physical amount calculation unit that calculates a physical quantity based on the reference surface specified by the reference surface specifying unit, and The reference surface identification unit does not identify the reference surface when the first processing is selected by the selection unit. When the second process is selected by the unit and the reference plane can be specified by the three-dimensional coordinates calculated by the coordinate calculation unit, the reference plane is specified based on the calculated three-dimensional coordinates.

  In this shape measuring apparatus, the light emitted from the light emitting unit is deflected by the deflecting unit, and the plurality of first target portions respectively corresponding to the plurality of reference points are irradiated. The light reflected by the first target portion is received by the light receiving unit. A process for calculating three-dimensional coordinates of each first target portion is performed based on the deflection direction of the deflection unit or the irradiation position of light deflected by the deflection unit and the light reception signal output by the light reception unit. A reference plane is specified based on the calculated three-dimensional coordinates, and a physical quantity based on the reference plane is calculated. In this case, a desired reference plane can be set by setting the reference point at an arbitrary position. Therefore, physical quantities can be measured with a high degree of freedom.

  In addition, when the three-dimensional coordinates of at least one first target portion are not calculated, a coordinate loss process selected in advance is performed. When the first process is selected as the coordinate loss process, the reference plane is not identified. In this case, it is prevented that a reference plane different from the user's request is identified. This prevents the decrease in the reliability of the calculated physical quantity. On the other hand, if the second process is selected as coordinate loss processing and the reference plane can be identified by the calculated three-dimensional coordinates, the reference plane is identified based on the calculated three-dimensional coordinates. In this case, the physical quantity can be efficiently calculated without re-specifying the reference point. Thus, different coordinate missing processes can be selectively performed according to the purpose. Therefore, the convenience of the user can be enhanced and the reference surface can be appropriately identified.

  (2) The first position information indicates the positions of a plurality of reference points on the reference image including the measurement object, and the shape measurement apparatus measures the reference image acquisition unit that acquires the reference image and the measurement object Corresponding to a plurality of reference points on the reference image based on a comparison of a measurement image acquisition unit for acquiring an image, a reference image acquired by the reference image acquisition unit, and a measurement image acquired by the measurement image acquisition unit The drive control unit further includes a correction unit that specifies a plurality of positions on the measurement image as a plurality of correction reference points, and the drive control unit determines a plurality of first target portions based on the plurality of correction reference points specified by the correction unit. The deflection unit may be controlled so that light is emitted to the light source.

  In this case, even if the position of the measurement object in the reference image and the position of the measurement object in the measurement image are different, the correction reference point is specified on the measurement image to correspond to the reference point specified on the reference image Be done. Based on the correction reference point, light can be irradiated to the first object portion represented by the measurement image. Thereby, when the actual physical quantity is measured using the measurement image, light can be irradiated to the first target portion represented by the measurement image based on the reference image prepared in advance, It is possible to calculate three-dimensional coordinates of the target portion of As a result, the amount of work of the user required to measure the physical quantity is reduced, and the convenience of the user is further enhanced.

  (3) The position information acquisition unit further acquires second position information indicating the position of the measurement point on the measurement object, and the drive control unit is based on the second position information acquired by the position information acquisition unit. And controlling the deflection unit such that light is emitted to the second target portion of the measurement object corresponding to the measurement point, and the coordinate calculation unit determines the irradiation direction of the deflection unit or the irradiation position of the light deflected by the deflection unit. The three-dimensional coordinates of the second target portion are calculated based on the light receiving signal and the light receiving unit, the reference plane is a plane, and the physical quantity calculating unit calculates the reference plane and the reference plane acquired by the reference plane acquiring unit. The height of the second target portion based on the reference plane may be calculated as the physical quantity based on the coordinates of the second target portion calculated by the coordinate calculation unit. In this case, it is possible to calculate the height of the desired portion of the measurement object relative to the reference surface.

  (4) The physical quantity calculation unit may not calculate the physical quantity when the reference surface identification unit does not identify the reference surface. In this case, it is prevented that the unreliable physical quantity is calculated.

  (5) The shape measuring device is controlled by the coordinate calculation unit at least in one of the cases where the first process is selected by the selection unit and the second process is selected by the selection unit. You may further provide the warning presentation part which presents warning information, when the three-dimensional coordinate of an object part is not calculated. In this case, the user can easily recognize that the three-dimensional coordinates of at least one first target portion have not been calculated. As a result, the user can efficiently redesign the reference point as needed.

  (6) The number-of-coordinates setting unit that sets the number of three-dimensional coordinates of the first target portion necessary to specify the reference plane when the second processing is selected by the selection unit The reference surface identification unit further includes: if the second processing is selected by the selection unit and the number of three-dimensional coordinates calculated by the coordinate calculation unit is equal to or greater than the number set by the coordinate number setting unit, The reference plane may be specified based on the calculated three-dimensional coordinates. In this case, the number of three-dimensional coordinates of the first target portion necessary to specify the reference surface can be set in accordance with the condition and purpose of the measurement.

  (7) The shape measuring apparatus substitutes the measurement area as a substitute for the first target portion for which the coordinates were not calculated when the coordinates of the at least one first target portion were not calculated by the coordinate calculation unit. It may further comprise an alternative presentation part which identifies the part and presents the identified alternative part to the user. In this case, the user can easily and efficiently respecify the reference point.

  (8) The drive control unit substitutes the measurement area as a substitute for the first target portion for which the coordinates were not calculated when the coordinates of the at least one first target portion were not calculated by the coordinate calculation unit. The deflection unit may be controlled such that light is irradiated to the part, and the coordinate calculation unit may calculate three-dimensional coordinates of the alternative part. In this case, it is possible to automatically calculate the three-dimensional coordinates of the alternative portion and to specify the reference plane based on the three-dimensional coordinates, without the user re-specifying the reference point.

  According to the present invention, physical quantities can be measured with a high degree of freedom.

FIG. 1 is a block diagram showing an entire configuration of an optical scanning height measurement device according to an embodiment of the present invention. It is an external appearance perspective view which shows the stand part of FIG. It is a block diagram which shows the structure of a stand part and a measurement head. It is a schematic diagram which shows the structure of a measurement part. It is a schematic diagram which shows the structure of a reference part. It is a schematic diagram which shows the structure of a focusing part. It is a schematic diagram which shows the structure of a scanning part. It is a figure which shows an example of the selection screen displayed on the display part of an optical scanning height measurement apparatus. It is a figure which shows the content of the data transmitted between a control part and a control board in each operation mode. It is a block diagram which shows the control system of the optical scanning height measurement apparatus of FIG. It is a figure which shows an example of the report produced by a report production part. It is a flowchart which shows an example of the optical scanning height measurement process performed in the optical scanning height measurement apparatus of FIG. It is a flowchart which shows an example of the optical scanning height measurement process performed in the optical scanning height measurement apparatus of FIG. It is a flowchart which shows an example of the optical scanning height measurement process performed in the optical scanning height measurement apparatus of FIG. It is a flowchart which shows an example of the optical scanning height measurement process performed in the optical scanning height measurement apparatus of FIG. It is a flowchart which shows an example of the optical scanning height measurement process performed in the optical scanning height measurement apparatus of FIG. It is a flowchart which shows an example of the optical scanning height measurement process performed in the optical scanning height measurement apparatus of FIG. It is a flowchart which shows an example of the designation | designated measurement process by a control board. It is a flowchart which shows an example of the designation | designated measurement process by a control board. FIG. 20 is an explanatory diagram for describing the designated measurement process of FIGS. 18 and 19; FIG. 20 is an explanatory diagram for describing the designated measurement process of FIGS. 18 and 19; It is a flowchart which shows the other example of the designation | designated measurement process by a control board. It is a flowchart which shows the other example of the designation | designated measurement process by a control board. FIG. 24 is an explanatory diagram for describing the designated measurement process of FIGS. 22 and 23; It is a figure for demonstrating the example in the case where reflected light can not be received appropriately. It is a figure for demonstrating the example in the case where reflected light can not be received appropriately. It is a figure for demonstrating the example in the case where reflected light can not be received appropriately. It is a figure for demonstrating the operation example of the optical scanning height measurement apparatus in setting mode. It is a figure for demonstrating the operation example of the optical scanning height measurement apparatus in setting mode. It is a figure for demonstrating the operation example of the optical scanning height measurement apparatus in setting mode. It is a figure for demonstrating the other operation example of the optical scanning height measurement apparatus in setting mode. It is a figure for demonstrating the other operation example of the optical scanning height measurement apparatus in setting mode. It is a figure for demonstrating the other operation example of the optical scanning height measurement apparatus in setting mode. It is a figure for demonstrating the operation example of the optical scanning height measurement apparatus in setting mode. It is a figure for demonstrating the operation example of the optical scanning height measurement apparatus in setting mode. It is a figure for demonstrating the other operation example of the optical scanning height measurement apparatus in setting mode. It is a figure for demonstrating the other operation example of the optical scanning height measurement apparatus in setting mode. It is a figure for demonstrating the other operation example of the optical scanning height measurement apparatus in setting mode. It is a figure for demonstrating the operation example of the optical scanning height measuring apparatus in measurement mode. It is a figure for demonstrating the operation example of the optical scanning height measuring apparatus in measurement mode. It is a figure for demonstrating the operation example of the optical scanning height measuring apparatus in measurement mode. It is a figure for demonstrating the operation example of the optical scanning height measuring apparatus in measurement mode. It is a figure for demonstrating the operation example of the optical scanning height measuring apparatus in measurement mode. It is a figure for demonstrating the operation example of the optical scanning height measuring apparatus in measurement mode. It is a figure for demonstrating the operation example of the optical scanning height measuring apparatus in measurement mode. It is a figure for demonstrating the example of presentation of an alternative part.

(1) Overall Configuration of Light Scanning Height Measuring Device Hereinafter, a light scanning height measuring device according to an embodiment of the present invention will be described with reference to the drawings. FIG. 1 is a block diagram showing an entire configuration of an optical scanning height measuring device according to an embodiment of the present invention. FIG. 2 is an external perspective view showing the stand unit 100 of FIG. As shown in FIG. 1, the optical scanning height measuring device 400 includes a stand unit 100, a measuring head 200 and a processing device 300.

  The stand unit 100 has an L-shaped longitudinal cross section, and includes an installation unit 110, a holding unit 120, and an elevation unit 130. The installation unit 110 has a horizontal flat plate shape and is installed on the installation surface. As shown in FIG. 2, a square optical surface plate 111 on which the measurement object S (FIG. 1) is placed is provided on the upper surface of the installation unit 110. Above the optical surface plate 111, a measurement area V in which the measurement object S can be measured by the measurement head 200 is defined. In FIG. 2, the measurement area V is illustrated by a dotted line.

  A plurality of screw holes are formed in the optical surface plate 111 at equal intervals in two directions orthogonal to each other. Thereby, the measuring object S can be fixed to the optical surface plate 111 in a state where the surface of the measuring object S is positioned in the measuring area V using the clamp member and the screw member.

  The holding portion 120 is provided to extend upward from one end of the installation portion 110. The measuring head 200 is attached to the upper end portion of the holding portion 120 so as to face the upper surface of the optical surface plate 111. In this case, since the measurement head 200 and the installation unit 110 are held by the holding unit 120, the handling of the light scanning height measurement apparatus 400 is facilitated. In addition, by placing the measurement target S on the optical surface plate 111 on the installation unit 110, the measurement target S can be easily positioned in the measurement area V.

  As shown in FIG. 1, the elevation unit 130 is provided inside the holding unit 120. The elevation unit 130 can move the measurement head 200 in the vertical direction (the height direction of the measurement object S) with respect to the measurement object S on the optical surface plate 111. The measurement head 200 includes a control substrate 210, an imaging unit 220, an optical unit 230, a light guide unit 240, a reference unit 250, a focusing unit 260, and a scanning unit 270. The control board 210 includes, for example, a CPU (central processing unit), a ROM (read only memory) and a RAM (random access memory). The control substrate 210 may be configured by a microcomputer.

  The control substrate 210 is connected to the processing apparatus 300, and controls operations of the elevation unit 130, the imaging unit 220, the optical unit 230, the reference unit 250, the focusing unit 260, and the scanning unit 270 based on an instruction from the processing apparatus 300. . The control substrate 210 also gives the processing apparatus 300 various information acquired from the imaging unit 220, the optical unit 230, the reference unit 250, the focusing unit 260, and the scanning unit 270. The imaging unit 220 generates image data of the measurement object S by imaging the measurement object S placed on the optical surface plate 111, and gives the generated image data to the control substrate 210.

  The optical unit 230 emits outgoing light having temporally low coherence to the light guiding unit 240. The light guiding unit 240 divides the light emitted from the optical unit 230 into reference light and measurement light, guides the reference light to the reference unit 250, and guides the measurement light to the focusing unit 260. The reference unit 250 reflects the reference light to the light guide 240. The focusing unit 260 focuses the measurement light passing through the focusing unit 260. The scanning unit 270 scans the measurement light focused by the focusing unit 260 to irradiate the measurement light to a desired portion of the measurement object S.

  A part of the measurement light irradiated to the measurement object S is reflected by the measurement object S, and is guided to the light guiding unit 240 through the scanning unit 270 and the focusing unit 260. The light guiding unit 240 generates interference light between the reference light reflected by the reference unit 250 and the measurement light reflected by the measurement object S, and guides the interference light to the optical unit 230. The optical unit 230 detects the amount of light received for each wavelength of the interference light, and provides a signal indicating the detection result to the control substrate 210. Details of the measurement head 200 will be described later.

  The processing device 300 includes a control unit 310, a storage unit 320, an operation unit 330, and a display unit 340. Control unit 310 includes, for example, a CPU. The storage unit 320 includes, for example, a ROM, a RAM, and an HDD (Hard Disk Drive). The storage unit 320 stores system programs. The storage unit 320 is also used for storing various data and processing the data.

  Control unit 310 controls the operation of imaging unit 220, optical unit 230, reference unit 250, focusing unit 260 and scanning unit 270 of measurement head 200 based on the system program stored in storage unit 320. To the control substrate 210. Further, the control unit 310 acquires various information from the control substrate 210 of the measurement head 200 and causes the storage unit 320 to store the information.

  The operation unit 330 includes a mouse, a touch panel, a pointing device such as a trackball or a joystick, and a keyboard, and is operated by the user to give an instruction to the control unit 310. The display unit 340 includes, for example, an LCD (liquid crystal display) panel or an organic EL (electroluminescence) panel. The display unit 340 displays an image, a measurement result, and the like based on the image data stored in the storage unit 320.

(2) Lifting Unit and Light Guide Unit FIG. 3 is a block diagram showing the configuration of the stand unit 100 and the measuring head 200. As shown in FIG. In FIG. 3, detailed configurations of the elevation unit 130, the optical unit 230, and the light guide unit 240 are shown. As shown in FIG. 3, the elevation unit 130 includes a drive unit 131, a drive circuit 132, and a reading unit 133.

  The drive unit 131 is, for example, a motor, and moves the measurement head 200 in the vertical direction with respect to the measurement object S on the optical surface plate 111, as indicated by a thick arrow in FIG. Thus, the optical path length of the measurement light can be adjusted over a wide range. Here, the optical path length of the measurement light is an optical length until the measurement light reflected by the measurement object S is input to the port 245 d after the measurement light is output from the port 245 d of the light guide 240 described later. It is the length of the light path.

  The drive circuit 132 is connected to the control substrate 210 and drives the drive unit 131 based on control by the control substrate 210. The reading unit 133 is, for example, an optical linear encoder, and detects the amount of drive of the drive unit 131 to detect the position of the measuring head 200 in the vertical direction. Further, the reading unit 133 gives the detection result to the control board 210.

  The optical unit 230 includes a light emitting unit 231 and a measuring unit 232. The light emitting unit 231 includes, for example, an SLD (super luminescent diode) as a light source, and emits emitted light having relatively low coherence. Specifically, the coherence of emitted light is higher than the coherence of light emitted by an LED (light emitting diode) or white light, and lower than the coherence of laser light. Therefore, the emitted light has a wavelength bandwidth narrower than the wavelength bandwidth of the light emitted by the LED or the white light and wider than the wavelength bandwidth of the laser light. Light emitted from the optical unit 230 is input to the light guide unit 240.

  Interference light is output from the light guiding unit 240 to the measuring unit 232. FIG. 4 is a schematic view showing the configuration of the measurement unit 232. As shown in FIG. As shown in FIG. 4, the measuring unit 232 includes lenses 232a and 232c, a spectral unit 232b, and a light receiving unit 232d. The interference light output from the optical fiber 242 of the light guide 240 described later is substantially collimated by passing through the lens 232 a and is incident on the light splitting unit 232 b. The spectral unit 232 b is, for example, a reflective diffraction grating. The light incident on the light splitting unit 232b is split to reflect light at different angles for each wavelength, and is focused at a different one-dimensional position for each wavelength by passing through the lens 232c.

  The light receiving unit 232 d includes, for example, an imaging device (one-dimensional line sensor) in which a plurality of pixels are arranged in a one-dimensional manner. The imaging device may be a multi-split PD (photodiode), a CCD (charge coupled device) camera, a CMOS (complementary metal oxide semiconductor) image sensor, or another device. The light receiving unit 232 d is disposed such that the plurality of pixels of the imaging device receive light at a plurality of focusing positions that are different for each wavelength formed by the lens 232 c.

  An analog electric signal (hereinafter referred to as a light reception signal) corresponding to the amount of light received is output from each pixel of the light receiving unit 232 d and is applied to the control substrate 210 in FIG. 3. Thereby, the control substrate 210 acquires data indicating the relationship between each pixel (wavelength of interference light) of the light receiving unit 232 d and the light receiving amount. The control substrate 210 calculates the height of the portion of the measurement target S by performing predetermined calculations and processing on the data.

  As shown in FIG. 3, the light guide 240 includes four optical fibers 241, 242, 243 and 244, a fiber coupler 245 and a lens 246. The fiber coupler 245 has a so-called 2 × 2 configuration, and includes four ports 245a, 245b, 245c, 245d and a main body 245e. The ports 245a and 245b and the ports 245c and 245d are provided in the main body 245e so as to face each other with the main body 245e interposed therebetween.

  The optical fiber 241 is connected between the light emitting unit 231 and the port 245a. The optical fiber 242 is connected between the measurement unit 232 and the port 245b. The optical fiber 243 is connected between the reference unit 250 and the port 245c. The optical fiber 244 is connected between the focusing unit 260 and the port 245d. In the present embodiment, the optical fiber 243 is longer than the optical fibers 241, 242 and 244. The lens 246 is disposed on the optical path between the optical fiber 243 and the reference unit 250.

  The light emitted from the light emitting unit 231 is input to the port 245 a through the optical fiber 241. A part of the emitted light input to the port 245a is output from the port 245c as a reference light. The reference light is substantially collimated by passing through the optical fiber 243 and the lens 246, and is guided to the reference unit 250. Also, the reference light reflected by the reference unit 250 is input to the port 245 c through the lens 246 and the optical fiber 243.

  The other part of the emitted light input to the port 245a is output as measurement light from the port 245d. The measurement light is irradiated to the measurement object S through the optical fiber 244, the focusing unit 260 and the scanning unit 270. Also, part of the measurement light reflected by the measurement target S is input to the port 245 d through the scanning unit 270, the focusing unit 260 and the optical fiber 244. The reference light input to the port 245 c and the measurement light input to the port 245 d are output as interference light from the port 245 b, and are guided to the measurement unit 232 through the optical fiber 242.

(3) Reference Section FIG. 5 is a schematic view showing the configuration of the reference section 250. As shown in FIG. As shown in FIG. 5, the reference unit 250 includes a fixed unit 251, a linear guide 251g linearly extending, movable units 252a and 252b, a fixed mirror 253, movable mirrors 254a, 254b and 254c, drive units 255a and 255b, and a drive circuit. 256a, 256b and a reading unit 257a, 257b. The fixing portion 251 and the linear guide 251 g are fixed to the main body of the measuring head 200. The movable portions 252a and 252b are attached to the linear guide 251g so as to be movable along the direction in which the linear guide 251g extends.

  The fixed mirror 253 is attached to the fixed portion 251. The movable mirrors 254a and 254c are attached to the movable portion 252a. The movable mirror 254b is attached to the movable portion 252b. The movable mirror 254c is used as a so-called reference mirror. The movable mirror 254c is preferably configured by a corner cube. In this case, the arrangement of the optical members can be easily performed.

  The reference light output from the optical fiber 243 is substantially collimated by passing through the lens 246, and then sequentially reflected by the fixed mirror 253, the movable mirror 254a, the movable mirror 254b, and the movable mirror 254c. The reference light reflected by the movable mirror 254 c is sequentially reflected by the movable mirror 254 b, the movable mirror 254 a and the fixed mirror 253, and is input to the optical fiber 243 through the lens 246.

  The driving units 255a and 255b are, for example, voice coil motors, and move the movable units 252a and 252b with respect to the fixed unit 251 along the direction in which the linear guide 251g extends, as indicated by the white arrows in FIG. . In this case, the distance between the fixed mirror 253 and the movable mirror 254a, the distance between the movable mirror 254a and the movable mirror 254b, and the movable mirror 254b and the movable mirror 254c in the direction parallel to the moving direction of the movable portions 252a and 252b. The distance between and changes. Thereby, the optical path length of the reference light can be adjusted.

  Here, the optical path length of the reference light is an optical path length until the reference light reflected by the movable mirror 254 c is input to the port 245 c after the reference light is output from the port 245 c of FIG. 3 is there. When the difference between the optical path length of the reference light and the optical path length of the measurement light is smaller than a predetermined value, interference light between the reference light and the measurement light is output from the port 245b of FIG.

  In the present embodiment, the movable parts 252a and 252b move in the opposite direction to each other along the direction in which the linear guide 251g extends, but the present invention is not limited to this. Only one of the movable portion 252a and the movable portion 252b may move along the direction in which the linear guide 251g extends, and the other may not move. In this case, the other non-moving movable portions 252a and 252b may be fixed as the non-movable portion to the fixed portion 251 or the main body of the measurement head 200 instead of the linear guide 251g.

  The drive circuits 256a and 256b are connected to the control substrate 210 of FIG. 3 and drive the drive units 255a and 255b based on the control of the control substrate 210. The reading units 257a and 257b are, for example, optical linear encoders. The reading unit 257a detects the relative position of the movable unit 252a with respect to the fixed unit 251 by reading the driving amount of the driving unit 255a, and gives the detection result to the control substrate 210. The reading unit 257 b detects the relative position of the movable unit 252 b with respect to the fixed unit 251 by reading the driving amount of the driving unit 255 b, and gives the detection result to the control substrate 210.

(4) Focusing Unit FIG. 6 is a schematic view showing a configuration of the focusing unit 260. As shown in FIG. As shown in FIG. 6, the focusing unit 260 includes a fixed unit 261, a movable unit 262, a movable lens 263, a drive unit 264, a drive circuit 265, and a reading unit 266. The movable portion 262 is attached to the fixed portion 261 so as to be movable along one direction. The movable lens 263 is attached to the movable portion 262. The movable lens 263 is used as an objective lens to focus the measurement light passing therethrough.

  The measurement light output from the optical fiber 244 is guided to the scanning unit 270 in FIG. 3 through the movable lens 263. In addition, a part of the measurement light reflected by the measurement target S in FIG. 3 passes through the scanning unit 270 and is then input to the optical fiber 244 through the movable lens 263.

  The drive unit 264 is, for example, a voice coil motor, and moves the movable unit 262 in one direction (the traveling direction of the measurement light) with respect to the fixed unit 261, as indicated by a thick arrow in FIG. Thereby, the focus of the measurement light can be located on the surface of the measurement object S.

  The drive circuit 265 is connected to the control substrate 210 of FIG. 3 and drives the drive unit 264 based on control by the control substrate 210. The reading unit 266 is, for example, an optical linear encoder, and detects the relative position of the movable unit 262 (movable lens 263) with respect to the fixed unit 261 by reading the driving amount of the drive unit 264. Further, the reading unit 266 gives the detection result to the control substrate 210.

  A collimator lens may be disposed between the optical fiber 244 and the movable lens 263 to collimate the measurement light output from the optical fiber 244. In this case, the measurement light incident on the movable lens 263 is collimated, and the beam diameter of the measurement light does not change regardless of the movement position of the movable lens, so that the movable lens can be formed in a small size.

(5) Scanning Unit FIG. 7 is a schematic view showing a configuration of the scanning unit 270. As shown in FIG. As shown in FIG. 7, the scanning unit 270 includes deflection units 271 and 272, drive circuits 273 and 274, and reading units 275 and 276. The deflection unit 271 is formed of, for example, a galvano mirror, and includes a drive unit 271a and a reflection unit 271b. The drive unit 271a is, for example, a motor having a substantially vertical rotation axis. The reflective portion 271b is attached to the rotation shaft of the drive portion 271a. The measurement light which has passed through the focusing unit 260 from the optical fiber 244 of FIG. 3 is guided to the reflecting unit 271 b. When the drive unit 271a rotates, the reflection angle of the measurement light reflected by the reflection unit 271b changes in a substantially horizontal plane.

  The deflecting unit 272 is, for example, a galvano mirror similar to the deflecting unit 271, and includes a drive unit 272a and a reflecting unit 272b. The drive unit 272a is, for example, a motor having a horizontal rotation axis. The reflective portion 272b is attached to the rotation axis of the drive portion 272a. The measurement light reflected by the reflection unit 271 b is guided to the reflection unit 272 b. As the drive unit 272a rotates, the reflection angle of the measurement light reflected by the reflection unit 272b changes in a substantially vertical plane.

  Thus, when the drive units 271a and 272a rotate, the measurement light is scanned in two directions orthogonal to each other on the surface of the measurement object S in FIG. Thereby, measurement light can be irradiated to arbitrary positions on the surface of measurement subject S. The measurement light irradiated to the measurement object S is reflected on the surface of the measurement object S. A part of the reflected measurement light is sequentially reflected by the reflecting portion 272b and the reflecting portion 271b, and is then guided to the focusing portion 260 in FIG.

  The drive circuits 273 and 274 are connected to the control substrate 210 of FIG. 3 and drive the drive units 271 a and 272 a based on the control of the control substrate 210. The reading units 275 and 276 are, for example, optical rotary encoders. The reading unit 275 detects the angle of the reflecting unit 271 b by reading the driving amount of the driving unit 271 a, and gives the detection result to the control substrate 210. The reading unit 276 detects the angle of the reflecting unit 272 b by reading the driving amount of the driving unit 272 a, and gives the detection result to the control substrate 210.

(6) Operation Mode The optical scanning height measurement apparatus 400 of FIG. 1 operates in an operation mode selected by the user from a plurality of operation modes. Specifically, the operation mode includes a setting mode, a measurement mode and a height gauge mode. FIG. 8 is a view showing an example of the selection screen 341 displayed on the display unit 340 of the light scanning height measuring device 400. As shown in FIG.

  As shown in FIG. 8, on the selection screen 341 of the display unit 340, a setting button 341a, a measurement button 341b, and a height gauge button 341c are displayed. When the user operates the setting button 341a, the measurement button 341b and the height gauge button 341c using the operation unit 330 of FIG. 1, the optical scanning height measuring device 400 operates in the setting mode, the measurement mode and the height gauge mode.

  In the following description, among the users, a skilled user who manages the measurement operation of the measurement object S is appropriately referred to as a measurement manager, and a user who performs the measurement operation of the measurement object S under the management of the measurement administrator. Is appropriately called a measurement worker. The setting mode is mainly used by the measurement manager, and the measurement mode is mainly used by the measurement operator.

  Here, in the optical scanning height measuring device 400, a three-dimensional coordinate system unique to the space including the measurement area V of FIG. 2 is defined in advance by the X axis, the Y axis, and the Z axis. Here, the X axis and the Y axis are parallel to and orthogonal to the optical surface plate 111 of FIG. 2, and the Z axis is orthogonal to the X axis and the Y axis. In each operation mode, data of coordinates specified by the above-mentioned coordinate system and data of plane coordinates on an image acquired by imaging of the imaging unit 220 are transmitted between the control unit 310 and the control substrate 210. FIG. 9 is a diagram showing the contents of data transmitted between control unit 310 and control substrate 210 in each operation mode.

  In the setting mode, the measurement manager can register information on the desired measurement object S in the light scanning height measurement device 400. Specifically, the measurement manager places the desired measurement object S on the optical surface plate 111 of FIG. 2, and images the measurement object S by the imaging unit 220 of FIG. Further, the measurement manager designates a portion to be measured of the measurement target S displayed on the display unit 340 of FIG. 1 as a measurement point on the image. In this case, as shown in FIG. 9A, the control unit 310 gives plane coordinates (Ua, Va) specified by the measurement point designated on the image to the control substrate 210.

  The control board 210 specifies three-dimensional coordinates (Xc, Yc, Zc) of the position corresponding to the plane coordinates (Ua, Va) in the measurement area V of FIG. 2, and specifies the specified three-dimensional coordinates (Xc, Yc, Zc) is given to the control unit 310. The control unit 310 stores the three-dimensional coordinates (Xc, Yc, Zc) given by the control substrate 210 in the storage unit 320 of FIG. In addition, the control unit 310 calculates the height of the portion corresponding to the measurement point based on the three-dimensional coordinates (Xc, Yc, Zc) stored in the storage unit 320 and information such as a reference surface described later, and the calculation result Are stored in the storage unit 320.

  The measurement mode is used to measure the height of the portion corresponding to the measurement point for the measurement object S of the same type as the measurement object S whose information is registered in the optical scanning height measurement apparatus 400 in the setting mode. . Specifically, the measurement worker places, on the optical surface plate 111, the measurement target S of the same type as the measurement target S whose information is registered in the optical scanning height measurement apparatus 400 in the setting mode, and captures an image. The image is taken by the unit 220. In this case, as shown in FIG. 9B, the control unit 310 gives the control board 210 three-dimensional coordinates (Xc, Yc, Zc) stored in the storage unit 320 in the setting mode.

  The control substrate 210 calculates three-dimensional coordinates (Xb, Yb, Zb) of the portion of the measurement target S corresponding to the measurement point based on the acquired three-dimensional coordinates (Xc, Yc, Zc). Further, the control board 210 gives the calculated three-dimensional coordinates (Xb, Yb, Zb) to the control unit 310. The control unit 310 calculates the height of the portion corresponding to the measurement point based on the three-dimensional coordinates (Xb, Yb, Zb) given by the control substrate 210 and information such as a reference surface described later. Further, the control unit 310 causes the display unit 340 of FIG. 1 to display the calculation result.

  Thus, in the measurement mode, the measurement operator can acquire the height of the position without specifying the portion of the measurement object S to be measured. Therefore, even if the measurement operator is not skilled, it is possible to easily and accurately measure the shape of the desired part of the measurement object. In addition, since the three-dimensional coordinates (Xc, Yc, Zc) are stored in the storage unit 320 in the setting mode, in the measurement mode, corresponding to the measurement points based on the stored three-dimensional coordinates (Xc, Yc, Zc) Can be identified quickly.

  In the present embodiment, three-dimensional coordinates (Xc, Yc, Zc) corresponding to plane coordinates (Ua, Va) are specified in the setting mode and stored in storage unit 320, but the present invention is not limited to this. . In the setting mode, plane coordinates (Xc, Yc) corresponding to plane coordinates (Ua, Va) may be specified, and the component Zc of the Z axis may not be specified. In this case, the specified plane coordinates (Xc, Yc) are stored in the storage unit 320. In the measurement mode, the plane coordinates (Xc, Yc) stored in the storage unit 320 are given to the control substrate 210.

  The height gauge mode is used to designate the desired part of the measurement object S as a measurement point on the screen while the user confirms the measurement object S on the screen, and to measure the height of the part. Specifically, the user mounts the desired measurement target S on the optical surface plate 111, and images the measurement target S by the imaging unit 220. In addition, the user designates a portion to be measured on the image of the measurement object S displayed on the display unit 340 as a measurement point. In this case, as shown in FIG. 9C, the control unit 310 gives plane coordinates (Ua, Va) specified by the measurement point designated on the image to the control substrate 210.

  The control board 210 specifies three-dimensional coordinates (Xc, Yc, Zc) of the position corresponding to the plane coordinates (Ua, Va) in the measurement area V of FIG. 2, and specifies the specified three-dimensional coordinates (Xc, Yc, Based on Zc), three-dimensional coordinates (Xb, Yb, Zb) of the portion of the measurement object S corresponding to the measurement point are calculated. Further, the control board 210 gives the calculated three-dimensional coordinates (Xb, Yb, Zb) to the control unit 310. The control unit 310 calculates the height of the portion corresponding to the measurement point based on the three-dimensional coordinates (Xb, Yb, Zb) given by the control substrate 210 and information such as a reference surface described later, and displays the calculation result It is displayed on the part 340.

  Coordinate conversion information and position conversion information are stored in advance in the storage unit 320 of FIG. The coordinate conversion information indicates plane coordinates (Xc, Yc) corresponding to plane coordinates (Ua, Va) at each position in the height direction (Z-axis direction) in the measurement area V. Further, the control substrate 210 can irradiate the measurement light to a desired position in the measurement area V by controlling the positions of the movable portions 252a and 252b in FIG. 5 and the angles of the reflection portions 271b and 272b in FIG. it can. The position conversion information indicates the relationship between the coordinates in the measurement area V, the positions of the movable portions 252a and 252b, and the angles of the reflecting portions 271b and 272b.

  The control system configured by the control unit 310 and the control substrate 210 uses three-dimensional coordinates (Xc, Yc, Zc) and three-dimensional coordinates (Xb) of positions corresponding to measurement points by using coordinate conversion information and position conversion information. , Yb, Zb) can be identified. Details of coordinate conversion information and position conversion information will be described later.

(7) Control System of Optical Scanning Height Measurement Device (a) Overall Configuration of Control System FIG. 10 is a block diagram showing a control system of the optical scanning height measurement device 400 of FIG. As shown in FIG. 10, the control system 410 includes a reference image acquisition unit 1, a position information acquisition unit 2, a drive control unit 3, a reference surface identification unit 4, an allowance acquisition unit 5, a registration unit 6 and a deflection direction acquisition unit 7. , Detection unit 8 and image analysis unit 9. The control system 410 also includes a reference position acquisition unit 10, a light reception signal acquisition unit 11, a distance information calculation unit 12, a coordinate calculation unit 13, a determination unit 14, a physical quantity calculation unit 15, a measurement image acquisition unit 16, a correction unit 17, and an inspection. A section 18 and a report preparation section 19 are included. Further, the control system 410 includes a selection unit 21, a warning presentation unit 22, a coordinate number setting unit 23 and an alternative presentation unit 24.

  When the control board 210 and the control unit 310 in FIG. 1 execute the system program stored in the storage unit 320, the functions of the components of the control system 410 described above are realized. In FIG. 10, the flow of common processing in all the operation modes is indicated by a solid line, the flow of processing in the setting mode is indicated by an alternate long and short dashed line, and the flow of processing in the measurement mode is indicated by a dotted line. The same applies to FIG. 35 described later. The flow of processing in the height cage mode is substantially equal to the flow of processing in the setting mode. Hereinafter, in order to facilitate understanding, each component of the control system 410 will be described separately in the setting mode and the measurement mode.

(B) Setting Mode The measurement manager places the desired measurement object S on the optical surface plate 111 of FIG. 2, and images the measurement object S by the imaging unit 220 of FIG. The reference image acquisition unit 1 acquires image data generated by the imaging unit 220 as reference image data, and causes the display unit 340 in FIG. 1 to display an image based on the acquired reference image data as a reference image. The reference image displayed on the display unit 340 may be a still image or a moving image that is sequentially updated. The measurement manager can designate a portion to be measured of the measurement object S as a measurement point and designate a reference point in the measurement area V on the reference image displayed on the display unit 340. In the present example, the reference point is a point for defining a reference surface which is a reference when calculating the height of the measurement object S. The reference point may be designated on the optical surface plate 111 or may be designated on the measurement object S.

  The position information acquisition unit 2 receives the designation of the measurement point on the reference image acquired by the reference image acquisition unit 1 and acquires the position of the received measurement point (the above-mentioned plane coordinates (Ua, Va)). Further, the position information acquisition unit 2 receives specification of the reference point using the reference image, and acquires the position of the received reference point. The position information acquisition unit 2 can also receive a plurality of measurement points, and can also receive a plurality of reference points.

  The drive control unit 3 acquires the position of the measurement head 200 from the reading unit 133 of the elevating unit 130 in FIG. 3 and controls the drive circuit 132 in FIG. 3 based on the acquired position of the measurement head 200. As a result, the measuring head 200 is moved to a desired position in the vertical direction. Further, the drive control unit 3 acquires the position of the movable lens 263 from the reading unit 266 of the focusing unit 260 in FIG. 6, and controls the drive circuit 265 in FIG. 6 based on the acquired position of the movable lens 263. Thereby, the movable lens 263 is moved so that the measurement light is focused in the vicinity of the surface of the measurement object S.

  Further, the drive control unit 3 drives the drive circuits 273 and 274 in FIG. 7 and FIG. 5 based on the position conversion information stored in the storage unit 320 in FIG. 1 and the position acquired by the position information acquisition unit 2. The circuits 256a and 256b are controlled. As a result, the angles of the reflecting portions 271b and 272b of the deflecting portions 271 and 272 in FIG. 7 are adjusted, and the measuring light is irradiated to the portion of the measuring area V corresponding to the measuring point and the reference point. Further, in response to the change in the optical path length of the measurement light, the optical path length of the reference light is adjusted such that the difference between the optical path length of the measurement light and the optical path length of the reference light becomes equal to or less than a predetermined value. The portion of the measurement area V corresponding to the reference point is an example of the first target portion, and the portion of the control target S corresponding to the measurement point is an example of the second target portion.

  By the operation of the drive control unit 3 described above, the coordinates of the measurement area V corresponding to the measurement point and the reference point are calculated by the coordinate calculation unit 13 as described later. Details of the operation of the drive control unit 3 will be described later. The process of calculating the coordinates of the portion of the measurement object S corresponding to the measurement point will be described below, but the process of calculating the coordinates of the portion of the measurement region V corresponding to the reference point is also the measurement object S corresponding to the measurement point It is similar to the process of calculating the coordinates of the part of

  The reference surface identification unit 4 identifies a reference surface based on one or more coordinates calculated by the coordinate calculation unit 13 corresponding to the one or more reference points acquired by the position information acquisition unit 2. In the present example, the reference plane is a plane passing through one or more reference points, or an approximate plane to a plurality of reference points. For example, the measurement manager can input an allowable value for the height of the measurement point acquired by the position information acquisition unit 2. The tolerance value is used to inspect the measurement object S in the measurement mode described later, and includes a design value and a tolerance from the design value. The allowable value acquisition unit 5 receives the input allowable value.

  As described later, the coordinate calculation unit 13 may not be able to calculate the coordinates of the portion of the measurement area V corresponding to the reference point. Therefore, when the coordinates corresponding to all the designated reference points are calculated, the reference surface identification unit 4 identifies the reference surface based on the coordinates. On the other hand, when the coordinates corresponding to at least one reference point are not calculated, the reference surface identification unit 4 performs coordinate loss processing.

  The selection unit 21 selects which of the first process and the second process is to be performed as the coordinate loss process. For example, when the measurement manager operates the operation unit 330 of FIG. 1 to designate one of the first process and the second process, the selection unit 21 selects one of the designated processes. When the first process is selected by the selection unit 21, the reference plane identification unit 4 does not identify the reference plane as the coordinate loss process.

  When the second process is selected by the selection unit 21, the reference surface identification unit 4 determines whether or not the reference surface can be identified by the coordinates calculated by the coordinate calculation unit 13 as coordinate loss processing. If the reference plane can be identified, the reference plane is identified based on the calculated coordinates. When the reference plane can not be identified only by the calculated coordinates, the reference plane identification unit 4 does not identify the reference plane.

  When the second process is selected by the selection unit 21, the number-of-coordinates setting unit 23 sets the number of coordinates necessary to specify the reference plane (hereinafter, referred to as the required number of coordinates). For example, when the reference plane is a plane, the reference plane can be specified if the calculated coordinates are three or more, and the reference plane can not be specified if the calculated coordinates are two or less. Therefore, the required number of coordinates is set to "3". When the calculated coordinates are three or more, the reference surface identification unit 4 identifies the reference surface based on those coordinates, and when the calculated coordinates are two or less, the reference surface identification unit 4 does not specify the reference plane.

  The warning presenting unit 22 performs at least one reference point by the coordinate calculation unit 13 in at least one of the case where the first process is selected by the selection unit 21 and the case where the second process is selected by the selection unit 21. The warning information is presented when the coordinates of the part corresponding to are not calculated. The presentation mode of the warning information when the first process is selected and the presentation mode of the warning information when the second process is selected may be different from each other. The warning information may be displayed on the display unit 340 of FIG. 1 and may be presented by sound, light or the like. An example of presenting warning information will be described later.

  When the coordinates of the part corresponding to at least one reference point is not calculated by the coordinate calculation unit 13, the alternative presentation unit 24 uses the part of the measurement area V as a substitute for the part where the coordinates are not calculated. Identify and present the identified alternative to the user. Details of the presentation of the alternative part will be described later.

  The registration unit 6 registers the reference image data acquired by the reference image acquisition unit 1, the position acquired by the position information acquisition unit 2 and the tolerance value set by the tolerance value acquisition unit 5 in association with each other. Specifically, the registration unit 6 causes the storage unit 320 to store registration information indicating the relationship between the reference image data, the positions of the measurement points and the reference points, and the tolerance value corresponding to each measurement value. Multiple reference planes may be set. In this case, the registration unit 6 associates and registers, for each reference surface, a reference point corresponding to the reference surface, a measurement point corresponding to the reference surface, and an allowance corresponding to each measurement value.

  The deflection direction acquisition unit 7 acquires the angles of the reflection units 271b and 272b from the reading units 275 and 276 in FIG. The detection unit 8 detects the deflection directions of the deflection units 271 and 272 based on the angles of the reflection units 271 b and 272 b acquired by the deflection direction acquisition unit 7. Further, as the imaging by the imaging unit 220 is continued, the measurement light on the measurement object S appears in the reference image. The image analysis unit 9 analyzes the reference image data acquired by the reference image acquisition unit 1. The detection unit 8 detects plane coordinates indicating the irradiation position on the reference image of the measurement light deflected by the deflection units 271 and 272 based on the analysis result of the image analysis unit 9.

  The reference position acquisition unit 10 acquires the positions of the movable units 252a and 252b from the reading units 257a and 257b of the reference unit 250 in FIG. The light reception signal acquisition unit 11 acquires a light reception signal from the light reception unit 232 d of FIG. 4. The distance information calculation unit 12 performs predetermined calculation and processing on data indicating the relationship between the wavelength of the interference light and the light reception amount based on the light reception signal acquired by the light reception unit 232 d. This operation and processing include, for example, wavelength-to-wavenumber frequency axis conversion and wavenumber Fourier transform.

  The distance information calculation unit 12 outputs the measurement light emission position and the measurement target in the measurement head 200 of FIG. 2 based on the data obtained by the processing and the positions of the movable portions 252a and 252b acquired by the reference position acquisition unit 10. Distance information indicating the distance between the object S and the irradiation position of the measurement light is calculated. The emission position of the measurement light in the measurement head 200 is, for example, the position of the port 245 d of the fiber coupler 245 in FIG. 3.

  The coordinate calculation unit 13 detects the irradiation position of the measurement light on the measurement object S based on the deflection directions of the deflection units 271 and 272 detected by the detection unit 8 and the distance information calculated by the distance information calculation unit 12. Three-dimensional coordinates (Xc, Yc, Zc) are calculated. The three-dimensional coordinates (Xc, Yc, Zc) of the irradiation position of the measurement light are made up of coordinates Zc in the height direction and plane coordinates (Xc, Yc) in a plane orthogonal to the height direction.

  The coordinate calculation unit 13 measures the measurement light based on the plane coordinates indicating the irradiation position on the reference image of the measurement light detected by the detection unit 8 and the deflection directions of the deflection units 271 and 272 using, for example, a triangular distance measurement method. The three-dimensional coordinates of the irradiation position of may be calculated. Alternatively, the coordinate calculation unit 13 may measure the irradiation position of the measurement light based on plane coordinates indicating the irradiation position on the reference image of the measurement light detected by the detection unit 8 and the distance information calculated by the distance information calculation unit 12. Three-dimensional coordinates may be calculated.

  The determination unit 14 determines whether the portion of the measurement target S corresponding to the measurement point or a portion in the vicinity thereof is irradiated with the measurement light. Specifically, based on the calculated coordinate in the height direction and the coordinate conversion information stored in the storage unit 320, the coordinate calculation unit 13 calculates plane coordinates corresponding to the measurement points registered by the registration unit 6 ( The plane coordinates (Xa ′, Ya ′) described later are acquired. In addition, the determination unit 14 determines whether or not the plane coordinates (Xc, Yc) calculated by the coordinate calculation unit 13 are within a predetermined range from plane coordinates (Xa ′, Ya ′) corresponding to the measurement point. judge.

  Alternatively, the image analysis unit 9 may specify plane coordinates (plane coordinates (Uc, Vc) described later) of the irradiation position of the measurement light in the reference image by analyzing the reference image data. In this case, the determination unit 14 determines in advance the plane coordinates (Uc, Vc) of the irradiation position of the measurement light specified by the image analysis unit 9 from the plane coordinates (Ua, Va) of the measurement point registered by the registration unit 6. It is determined whether or not it is within the specified range.

  When the determination unit 14 determines that the measurement light is not irradiated to the portion of the measurement target S corresponding to the measurement point and the portion in the vicinity thereof, the drive control unit 3 moves the irradiation position of the measurement light In this way, drive circuits 273 and 274 of FIG. 7 and drive circuits 256a and 256b of FIG. 5 are controlled. When it is determined by the determination unit 14 that the measurement light is irradiated to the portion of the measurement target S corresponding to the measurement point or the vicinity thereof, the drive control unit 3 fixes the irradiation position of the measurement light Thus, the drive circuits 273 and 274 and the drive circuits 256a and 256b are controlled.

  The coordinate calculation unit 13 provides the reference surface identification unit 4 with the coordinates calculated for the reference point. The physical quantity calculation unit 15 is a physical quantity based on the reference plane acquired by the reference plane identification unit 4 based on the three-dimensional coordinates (Xc, Yc, Zc) calculated by the coordinate calculation unit 13 corresponding to the measurement points. Calculate Physical quantities include height, diameter, flatness, curvature and the like. In the present example, the physical quantity calculation unit 15 calculates the height of the target portion of the measurement object S based on the plane specified as the reference plane. For example, the physical quantity calculation unit 15 calculates the length from the reference plane to the three-dimensional coordinates (Xc, Yc, Zc) in the vertical line of the reference plane passing through the three-dimensional coordinates (Xc, Yc, Zc) as the height. The physical quantity calculation unit 15 causes the display unit 340 to display the calculated height. The registration unit 6 sets the three-dimensional coordinates (Xc, Yc, Zc) calculated by the coordinate calculation unit 13 and the heights calculated by the physical quantity calculation unit 15 to reference image data, positions of measurement points, positions of reference points, and tolerances Register as registration information in association with the value.

(C) Measurement mode The measurement operator places the measurement object S of the same type as the measurement object S whose registration information is registered in the setting mode on the optical surface plate 111 of FIG. 2, and the imaging unit of FIG. An image is taken at 220. The measurement image acquisition unit 16 acquires image data generated by the imaging unit 220 as measurement image data, and causes the display unit 340 in FIG. 1 to display an image based on the acquired measurement image data as a measurement image.

  The correction unit 17 corrects the deviation of the measurement image data with respect to the reference image data based on the registration information registered by the registration unit 6. Thereby, the correction unit 17 sets the measurement point and the reference point corresponding to the registration information registered by the registration unit 6 in the measurement image data.

  The drive control unit 3 controls the drive circuits 273 and 274 of FIG. 7 and the drive circuits 256 a and 256 b of FIG. 5 based on the registration information registered by the registration unit 6 in the setting mode. Thereby, the three-dimensional coordinates of the portion of the measurement area V corresponding to the measurement point and the reference point set by the correction unit 17 are calculated by the coordinate calculation unit 13. Here, since the drive control unit 3 performs control based on the three-dimensional coordinates and height registered in the setting mode, the coordinate calculation unit 13 corresponds to the measurement point and the reference point set by the correction unit 17. The three-dimensional coordinates of the portion of the measurement region V can be efficiently calculated.

  The processing of the deflection direction acquisition unit 7 and the detection unit 8 in the measurement mode is the same as the processing of the deflection direction acquisition unit 7 and the detection unit 8 in the setting mode. The processing of the image analysis unit 9 in the measurement mode is the image analysis in the setting mode except that the measurement image data acquired by the measurement image acquisition unit 16 is used instead of the reference image data acquired by the reference image acquisition unit 1 It is similar to the process of part 9. The processes of the reference position acquisition unit 10, the light reception signal acquisition unit 11, and the distance information calculation unit 12 in the measurement mode are the same as the processes of the reference position acquisition unit 10, the light reception signal acquisition unit 11, and the distance information calculation unit 12 in the setting mode. is there.

  The coordinate calculation unit 13 detects the irradiation position of the measurement light on the measurement object S based on the deflection directions of the deflection units 271 and 272 detected by the detection unit 8 and the distance information calculated by the distance information calculation unit 12. Three-dimensional coordinates (Xb, Yb, Zb) are calculated. The coordinate calculation unit 13 measures the measurement light on the measurement object S based on plane coordinates indicating the irradiation position on the measurement image of the measurement light detected by the detection unit 8 and the distance information calculated by the distance information calculation unit 12. The three-dimensional coordinates (Xb, Yb, Zb) of the irradiation position of may be calculated. The three-dimensional coordinates (Xb, Yb, Zb) of the irradiation position of the measurement light are composed of the coordinate Zb in the height direction and the plane coordinates (Xb, Yb) in a plane orthogonal to the height direction.

  The process of the determination unit 14 in the measurement mode is that the measurement point set by the correction unit 17 is used instead of the measurement point registered by the registration unit 6 and the third order is used instead of the three-dimensional coordinate (Xc, Yc, Zc) The process is the same as the process of the determination unit 14 in the setting mode except that original coordinates (Xb, Yb, Zb) are used. Thereby, the coordinate calculation unit 13 calculates the coordinates corresponding to the reference point set by the correction unit 17.

  The reference surface identification unit 4 identifies a reference surface based on the coordinates corresponding to the reference point calculated by the coordinate calculation unit 13. Further, as in the setting mode, when the coordinate corresponding to at least one reference point is not calculated, the reference surface specifying unit 4 may perform the coordinate loss process.

  The warning presentation unit 22 may present warning information when the coordinates of the portion corresponding to at least one reference point are not calculated, as in the setting mode. The substitute presentation unit 24 may present substitute substitute parts for parts where coordinates are not calculated, as in the setting mode.

  The physical quantity calculation unit 15 calculates the portion of the measurement target S based on the reference plane acquired by the reference plane identification unit 4 based on the three-dimensional coordinates (Xb, Yb, Zb) calculated by the coordinate calculation unit 13. Calculate the height.

  The inspection unit 18 inspects the measurement target S based on the physical quantity (height) calculated by the physical quantity calculation unit 15 and the tolerance value registered in the registration unit 6. Specifically, when the calculated height is within the range of tolerance based on the design value, the inspection unit 18 determines that the measurement object S is a non-defective item. On the other hand, when the calculated height is out of the range of the tolerance based on the design value, the inspection unit 18 determines that the measurement object S is a defective product.

  The report creation unit 19 creates a report based on the inspection result by the inspection unit 18 and the measurement image acquired by the measurement image acquisition unit 16. Thereby, the measurement worker can easily report the measurement value of the height or the test result of the measurement object S to the measurement manager or other users using the report. The report is prepared according to a pre-determined writing style. FIG. 11 is a view showing an example of a report prepared by the report preparation unit 19.

  In the description format of FIG. 11, the report 420 includes a name display field 421, an image display field 422, a status display field 423, a result display field 424, and a guarantee display field 425. In the name display field 421, the name of the report 420 (in the example of FIG. 11, "inspection report") is displayed. In the image display column 422, a measurement image of an inspection object is displayed. The status display column 423 displays the name of the inspection target, the identification number of the inspection target, the name of the measurement worker, the inspection date and the like.

  In the result display column 424, the inspection result on the inspection object is displayed. Specifically, in the result display column 424, names of various inspection items set as inspection objects, measurement values and determination results are displayed in the form of a list in a state of being associated with design values and tolerances. Ru. The warranty display field 425 is a blank for being signed or sealed. The measurement operator and the measurement manager can guarantee the inspection result by signing or sealing the warranty display section 425.

  The report creation unit 19 may create the report 420 only for the measurement target S determined to be non-defective by the inspection unit 18. Such a report 420 is attached to a delivery note to guarantee the quality of the product when delivering the product to be inspected to the customer. Further, the report creation unit 19 may create the report 420 only for the measurement target S determined to be a defective product by the inspection unit 18. Such a report 420 is used in-house to analyze the cause that the product to be inspected is determined to be defective.

  In the present embodiment, the result display column 424 of the report 420 is displayed in a state where the measured value of the height of the portion of the measurement object S and the determination result of the inspection item set for the portion are associated. However, the present invention is not limited thereto. One of the measurement value of the height and the determination result of the inspection item may be displayed in the result display field 424 of the report 420, and the other may not be displayed.

(D) Height Gauge Mode The user places a desired measurement object S on the optical surface plate 111 of FIG. 2, and images the measurement object S by the imaging unit 220 of FIG. The reference image acquisition unit 1 acquires the image data generated by the imaging unit 220, and causes the display unit 340 in FIG. 1 to display an image based on the acquired image data. The user designates a portion to be measured as a measurement point on the image displayed on the display unit 340.

  The position information acquisition unit 2 receives the designation of the measurement point on the image acquired by the reference image acquisition unit 1, and acquires the position (the above-mentioned plane coordinates (Ua, Va)) of the received measurement point. Further, the position information acquisition unit 2 receives specification of the reference point using the reference image, and acquires the position of the received reference point. The position information acquisition unit 2 can also receive a plurality of measurement points, and can also receive a plurality of reference points.

  Drive control unit 3 generates drive circuits 273 and 274 of FIG. 7 and drive circuit 256a of FIG. 5 based on the position conversion information stored in storage unit 320 of FIG. 1 and the position acquired by position information acquisition unit 2. , 256b. Thus, the measurement light is irradiated to the portion of the measurement region V corresponding to the measurement point and the reference point, and the optical path length of the reference light is adjusted.

  By the operation of the drive control unit 3 described above, the coordinate calculation unit 13 calculates the coordinates of the portion of the measurement area V corresponding to the measurement point and the reference point. The reference surface identification unit 4 identifies the reference surface based on the coordinates calculated by the coordinate calculation unit 13 in correspondence with the reference points acquired by the position information acquisition unit 2. Further, as in the setting mode, when the coordinate corresponding to at least one reference point is not calculated, the reference surface specifying unit 4 may perform the coordinate loss process. The warning presentation unit 22 may present warning information when the coordinates of the portion corresponding to at least one reference point are not calculated, as in the setting mode. The substitute presentation unit 24 may present substitute substitute parts for parts where coordinates are not calculated, as in the setting mode.

  The processes of the deflection direction acquisition unit 7, the detection unit 8, the image analysis unit 9, the reference position acquisition unit 10, the light reception signal acquisition unit 11 and the distance information calculation unit 12 in the height gauge mode are the deflection direction acquisition unit 7 and the detection unit in the setting mode. The processing is the same as the processing of the image analysis unit 9, the reference position acquisition unit 10, the light reception signal acquisition unit 11, and the distance information calculation unit 12.

  The coordinate calculation unit 13 measures the measurement object S based on the deflection direction of the deflection units 271 and 272 detected by the detection unit 8 or the irradiation position of the measurement light and the distance information calculated by the distance information calculation unit 12. Three-dimensional coordinates (Xb, Yb, Zb) of the light irradiation position are calculated. The coordinate calculation unit 13 measures the measurement light on the measurement object S based on plane coordinates indicating the irradiation position on the measurement image of the measurement light detected by the detection unit 8 and the distance information calculated by the distance information calculation unit 12. The three-dimensional coordinates (Xb, Yb, Zb) of the irradiation position of may be calculated. The processes of the determination unit 14 and the physical quantity calculation unit 15 in the height gauge mode are the same as the processes of the determination unit 14 and the physical quantity calculation unit 15 in the setting mode.

(8) Overall Operation Flow of Control System FIGS. 12 to 17 are flowcharts showing an example of an optical scanning height measurement process performed in the optical scanning height measurement device 400 of FIG. A series of processes described below are executed by the control unit 310 and the control substrate 210 in a constant cycle when the power of the optical scanning height measurement apparatus 400 is in the on state. The light scanning height measurement process includes a designated measurement process and an actual measurement process described later. In the following description, the designated measurement process and the actual measurement process of the light scanning height measurement process are performed by the control substrate 210, and the other processes of the light scanning height measurement process are performed by the control unit 310. The invention is not limited to this. For example, all processing of the light scanning height measurement processing may be performed by the control substrate 210 or the control unit 310.

  In the initial state, it is assumed that the power of the optical scanning height measuring device 400 is turned on in a state where the measurement object S is placed on the optical surface plate 111 of FIG. At this time, the selection screen 341 of FIG. 8 is displayed on the display unit 340 of FIG.

  When the light scanning height measurement process is started, the control unit 310 determines whether the setting mode is selected by the operation of the operation unit 330 by the user (step S101). More specifically, control unit 310 determines whether or not the setting button 341a of FIG. 8 has been operated by the user.

  When the setting mode is not selected, the control unit 310 proceeds to the process of step S201 of FIG. 15 described later. On the other hand, when the setting mode is selected, the control unit 310 causes the display unit 340 of FIG. 1 to display a setting screen 350 of FIG. 28 described later (step S102). On the setting screen 350, the reference image of the measurement area V of FIG. 2 acquired at a constant cycle by the imaging unit 220 is displayed in real time.

  In the light scanning height measuring apparatus 400 according to the present embodiment, in order to realize the correction function of the correction unit 17 of FIG. 10, it is necessary to set the pattern image and the search area in the setting mode. The pattern image means an image of a portion including at least the measurement object S in the entire region of the reference image displayed at the time designated by the user. Further, the search area means a range (a range within the imaging field of the imaging unit 220) in which a portion similar to the pattern image is searched in the measurement image after the pattern image is set in the setting mode.

  Therefore, control unit 310 determines whether or not the search area has been designated by the operation of operation unit 330 by the user (step S103). If no search area is specified, the control unit 310 proceeds to the process of step S105 described later. On the other hand, when the search area is specified, the control unit 310 sets information of the specified search area by storing the information in the storage unit 320 (step S104).

  Next, the control unit 310 determines whether or not the pattern image has been designated by the operation of the operation unit 330 by the user (step S105). If no pattern image is specified, the control unit 310 proceeds to the process of step S107 described later. On the other hand, when the pattern image is designated, the control unit 310 sets information of the designated pattern image by storing the information in the storage unit 320 (step S106). The information on the pattern image also includes information indicating the position of the pattern image in the reference image. A specific setting example of the pattern image and the search area by the user will be described later.

  Next, the control unit 310 determines whether or not the search area and the pattern image have been set by the processes of steps S104 and S106 (step S107). When at least one of the search area and the pattern image is not set, the control unit 310 returns to the process of step S103. On the other hand, when the search area and the pattern image are set, control unit 310 determines whether or not the setting of the reference surface is accepted (step S108).

  When control unit 310 receives the setting of the reference surface in step S108, control unit 310 determines whether or not the designation of the reference point is received on the reference image displayed on display unit 340 by the operation of operation unit 330 by the user ( Step S109). If the control unit 310 does not receive designation of the reference point, the control unit 310 proceeds to the process of the subsequent step S111. On the other hand, when the control unit 310 receives designation of the reference point, it instructs the control substrate 210 to perform designated measurement processing and gives plane coordinates (Ua, Va) specified by the designated reference point on the image. (See FIG. 9 (a)). Thereby, the control substrate 210 performs the designated measurement process (step S110), and gives the coordinates (Xc, Yc, Zc) specified by the designated measurement process to the control unit 310. Details of the designated measurement process will be described later.

  Thereafter, the control unit 310 determines whether designation of the reference point is completed by the operation of the operation unit 330 by the user (step S111). When the designation of the reference point is not completed, the control unit 310 returns to the process of step S109. On the other hand, when the designation of the reference points is completed, the control unit 310 determines whether the coordinates (Xc, Yc, Zc) corresponding to all the designated reference points have been calculated (step S112).

  When coordinates (Xc, Yc, Zc) corresponding to all designated reference points are calculated, control unit 310 specifies a reference plane based on the calculated coordinates (Xc, Yc, Zc) (step S113). In this case, information indicating the coordinates of the reference plane based on the coordinates (Xc, Yc, Zc) corresponding to the designated reference point, for example, the plane coordinates (Xc, Yc) corresponding to each reference point or each reference point The corresponding coordinates (Xc, Yc, Zc) are stored in storage unit 320.

  Here, the information indicating the coordinates of the reference surface may include a reference surface constraint condition for determining the reference surface. The reference surface restraint conditions include, for example, conditions such that the reference surface is parallel to the mounting surface, or that the reference surface is parallel to another surface stored in advance. In the case of the reference surface restraint condition that the reference surface is parallel to the mounting surface, when the coordinates (Xb, Yb, Zb) for one reference point are calculated, the plane represented by Z = Zb is specified as the reference surface. Be done. That is, the number of coordinates required to specify the reference plane is one.

  When the coordinates (Xc, Yc, Zc) corresponding to at least one reference point are not calculated in step S112, control unit 310 determines whether or not the first process is selected as the coordinate loss process. (Step S114). When the first process is selected, the control unit 310 presents warning information without specifying a reference surface (step S115). For example, an error message is displayed on the display unit 340 of FIG. Thereafter, the control unit 310 returns to step S109, and accepts re-designation of the reference point. In this case, as described later, the alternative part may be presented on the setting screen 350 (FIG. 46), and the designated measurement process may be automatically performed on the alternative part.

  When the first process is not selected as the coordinate loss process, that is, when the second process is selected, the control unit 310 can specify the reference plane by the calculated coordinates (Xc, Yc, Zc) It is determined whether or not it is (step S116). For example, when the number of calculated coordinates (Xc, Yc, Zc) is equal to or more than the number of necessary coordinates set in advance, it is determined that the reference plane can be identified, and the calculated coordinates (Xc, Yc, Zc) If the number of Zc) is smaller than the number of necessary coordinates set in advance, it is determined that identification of the reference plane is impossible. It should be noted that among the designated reference points, the proportion of the reference point for which coordinates are to be calculated is set in advance, and the proportion of the reference points for which the coordinates are actually calculated is greater than the predetermined proportion. It may be determined that identification is possible.

  If the reference plane can be identified, the control unit 310 proceeds to step S113, and identifies the reference plane based on the calculated coordinates (Xc, Yc, Zc). If the reference plane can not be identified, the control unit 310 proceeds to step S115 and presents warning information without specifying the reference plane. For example, as in the case where the first process is selected in step S114, an error message is displayed on the display unit 340 of FIG.

  When the reference surface can be specified in step S116, warning information may be presented in addition to the specification of the reference surface in step S113. In that case, as the warning information, for example, information for confirming the reference point for which the coordinates (Xc, Yc, Zc) were not calculated is displayed on the display unit 340 of FIG.

  After the reference plane is specified in step S113, the control unit 310 determines whether the setting related to the measurement of the measurement object S is received (step S121 in FIG. 14). More specifically, control unit 310 determines whether or not the setting for specifying the portion of measurement object S for which the physical quantity (height in this example) is to be measured has been accepted (step S121).

  If the setting regarding measurement has not been received, the control unit 310 determines whether another setting has been received (step S130). Other settings include settings regarding the above-mentioned tolerance value, an index to be displayed on the measurement image in the measurement mode, a comment, and the like. If another setting is accepted, the control unit 310 acquires information on the setting and stores the information in the storage unit 320 (step S131). Thereafter, the control unit 310 proceeds to the process of step S126 described later.

  When the setting regarding measurement is accepted in step S121, control unit 310 determines whether or not the user designates the point as a measurement point on the reference image displayed on display unit 340 by the operation of operation unit 330. (Step S122). If the control unit 310 does not receive designation of a point, the control unit 310 proceeds to the process of the subsequent step S124. On the other hand, when receiving the designation of a point, the control unit 310 instructs the control substrate 210 to perform the designated measurement process and also determines the plane coordinates specified by the designated point on the image, as in step S110 described above. Give Ua, Va). Thus, the control board 210 performs the designated measurement process (step S123), and gives the coordinates (Xc, Yc, Zc) specified by the designated measurement process to the control unit 310.

  Thereafter, the control unit 310 determines whether or not designation of a point as a measurement point has been completed by the operation of the operation unit 330 by the user (step S124). When the designation of the point is not completed, the control unit 310 returns to the process of step S122.

  On the other hand, when the designation of the point is completed, the control unit 310 performs measurement by storing in the storage unit 320 the coordinates (Xc, Yc, Zc) of one or more measurement points acquired in the designated measurement process of step S123. Setting of points is performed (step S125).

  Next, control unit 310 determines whether the completion of setting has been instructed or a new setting has been instructed (step S126). When a new setting is instructed, that is, when the completion of the setting is not instructed, control unit 310 returns to the process of step S108.

  On the other hand, when the completion of setting is instructed, control unit 310 associates the information set in any of steps S103 to S113, S121 to S125, and S131 with each other and registers the information as registration information (step S127). Thereafter, the optical scanning height measurement process ends in the setting mode. The file of registration information to be registered is stored in the storage unit 320 after being given a specific file name by the user. At this time, the information temporarily stored in the storage unit 320 for setting may be deleted in any of steps S103 to S113, S121 to S125, and S131.

  Here, in step S127, when the reference plane is set in the process of step S112, the control unit 310 sets the height of the measurement point based on the reference plane and the specified coordinates (Xc, Yc, Zc). Is calculated and the calculation result is included in the registration information. If the reference plane is already set at the time of step S125, the height of the measurement point is determined based on the set reference plane and the specified coordinates (Xc, Yc, Zc) in step S125. It may be calculated. In this case, the calculation result may be displayed on the setting screen 350 (FIG. 35) as the height of the measurement point.

  When the setting mode is not selected in step S101 described above, the control unit 310 determines whether the measurement mode is selected by the operation of the operation unit 330 by the user (step S201 in FIG. 15). More specifically, control unit 310 determines whether or not the measurement button 341b of FIG. 8 has been operated by the user. When the measurement mode is selected, the control unit 310 causes the display unit 340 of FIG. 1 to display a measurement screen 360 of FIG. 39 described later (step S202). On the measurement screen 360, the measurement image of the measurement area V of FIG. 2 acquired at a constant cycle by the imaging unit 220 is displayed in real time.

  Next, the control unit 310 determines whether the file of the registration information is designated by the operation of the operation unit 330 by the user (step S203). Specifically, it is determined whether or not the user has specified a file name of registration information. When no file is specified, the control unit 310 is in a standby state until the file specification is received. On the other hand, when receiving the designation of the file, control unit 310 reads the file of the designated registration information from storage unit 320 (step S204). When the file of the designated registration information is not stored in the storage unit 320, the control unit 310 may display information indicating that the designated file does not exist on the display unit 340.

  Next, the control unit 310 acquires information of the registered pattern image from the read registration information, and superimposes and displays the acquired pattern image on the measurement image displayed on the display unit 340 (step S205). At this time, the control unit 310 acquires a search area in addition to the pattern image. As described above, the information on the pattern image also includes information indicating the position of the pattern image in the reference image. Therefore, the pattern image is superimposed on the measurement image at the same position as the position set in the setting mode.

  Here, the pattern image may be displayed semi-transparently. In this case, the user can easily compare the measurement image of the measurement object S currently imaged and the reference image of the measurement object S acquired in the setting mode. Then, the user can perform the positioning operation of the measuring object S on the optical surface plate 111.

  Next, the control unit 310 compares the pattern image and the measurement image (step S206). Specifically, the control unit 310 extracts the edge of the measurement target S in the pattern image as a reference edge, and searches whether there is an edge having a shape corresponding to the reference edge in the acquired search area. Do.

  In this case, the edge portion of the measurement object S in the measurement image is considered to be most similar to the reference edge. Therefore, when the portion of the measurement image most similar to the reference edge is detected, the control unit 310 calculates how much the detected portion deviates from the reference edge on the image, and the detected portion is The amount of rotation from the reference edge on the image is calculated (step S207).

  Next, the control unit 310 acquires the information of the reference point and the measurement point registered from the read registration information, and corrects the information of the acquired measurement point based on the calculated deviation amount and rotation amount (step S208). The processes of steps S206 to S208 correspond to the function of the correction unit 17 in FIG. According to this configuration, even when the measurement object in the correction image is displaced or rotated relative to the measurement object in the pattern image, the reference point and the measurement point can be easily identified and corrected with high accuracy. .

  Next, the control unit 310 instructs the control substrate 210 to perform an actual measurement process for each of the corrected reference points, and gives the coordinates (Xc, Yc, Zc) of the corrected reference points (FIG. 9 (b)) reference). Thus, the control board 210 performs an actual measurement process of each reference point (step S209), and gives the control unit 310 the coordinates (Xb, Yb, Zb) specified by the actual measurement process. Details of the actual measurement process will be described later.

  Next, the control unit 310 determines whether coordinates (Xb, Yb, Zb) corresponding to all the corrected reference points have been calculated (step S210). When the coordinates (Xb, Yb, Zb) corresponding to all the reference points are calculated, the control unit 310 specifies the reference plane based on the calculated coordinates (Xb, Yb, Zb) (step S211).

  In step S210, when the coordinates (Xb, Yb, Zb) corresponding to at least one reference point are not calculated, the control unit 310 determines whether or not the first process is selected as the coordinate loss process. (Step S212). When the first process is selected, the control unit 310 presents warning information without specifying a reference plane, as in step S115 (step S213). Thereafter, the optical scanning height measurement process ends in the measurement mode. In this case, re-designation of the reference point may be accepted without ending the light scanning height measurement process. Further, as described later, the alternative part may be presented on the measurement screen 360 (FIG. 39), and the designated measurement process may be automatically performed on the alternative part.

  When the first process is not selected as the coordinate loss process, that is, when the second process is selected, the control unit 310 can specify the reference plane by the calculated coordinates (Xb, Yb, Zb) It is determined whether or not (step S214). If the reference plane can be identified, the control unit 310 proceeds to step S211, and identifies the reference plane based on the calculated coordinates (Xb, Yb, Zb). If the reference plane can not be identified, the control unit 310 proceeds to step S213 and presents warning information without specifying the reference plane. When the reference surface can be specified in step S214, in addition to the reference surface being specified in step S211, warning information may be presented.

  After the reference plane is specified in step S211, the control unit 310 instructs the control substrate 210 to perform an actual measurement process for each of the corrected measurement points, and the coordinates (Xc, Yc, Zc) of the corrected measurement points. (See FIG. 9 (b)). Thus, the control substrate 210 performs an actual measurement process of each measurement point (step S215), and provides the control unit 310 with the coordinates (Xb, Yb, Zb) specified by the actual measurement process.

  Next, control unit 310 calculates the height of the measurement point based on the specified reference plane and the acquired coordinates (Xb, Yb, Zb), and stores the calculation result in storage unit 320 as the measurement result. . In addition, various processing according to the registered other information is performed (step S216). As various processes according to other registered information, for example, when an allowance is included in the read registration information, whether or not the calculation result of the height is within the tolerance range set by the allowance. There may be an inspection process to determine. Thereafter, the optical scanning height measurement process ends in the measurement mode.

  If the measurement mode is not selected in step S201 described above, the control unit 310 determines whether the height gauge mode is selected by the operation of the operation unit 330 by the user (step S221 in FIG. 17). More specifically, control unit 310 determines whether or not the height gauge button 341c of FIG. 8 has been operated by the user. When the height gauge mode is not selected, the control unit 310 returns to the process of step S101.

  On the other hand, when the height gauge mode is selected, control unit 310 causes display unit 340 in FIG. 1 to display setting screen 350 in FIG. 29 described later (step S222). Thereafter, the control unit 310 sets the reference plane based on the operation of the operation unit 330 by the user (step S223). This setting process is the same as the process of steps S109 to S116 described above.

  Thereafter, when the control unit 310 receives designation of a point, it instructs the control substrate 210 to perform designated measurement processing, and gives plane coordinates (Ua, Va) specified by the designated point on the image (see FIG. 9 (c)). Thus, the control board 210 performs designated measurement processing (step S224). In addition, the control board 210 controls the positions of the movable parts 252a and 252b in FIG. 5 and the reflection parts 271b and 272b in FIG. 7 based on the coordinates (Xc, Yc, Zc) specified by the designated measurement process and the position conversion information. The angle is adjusted to irradiate measurement light (step S225).

  Subsequently, the control substrate 210 measures the object based on the light receiving signal output from the light receiving unit 232 d of FIG. 4, the positions of the movable units 252 a and 252 b of FIG. 5, and the deflection directions of the deflection units 271 and 272 of FIG. The three-dimensional coordinates (Xb, Yb, Zb) of the portion irradiated with the measurement light on the object S are calculated and given to the control unit 310 (step S226).

  The control board 210 controls the light receiving signal output from the light receiving unit 232 d of FIG. 4, the position of the movable units 252 a and 252 b of FIG. 5, and the image obtained by the imaging unit 220 of FIG. The three-dimensional coordinates (Xb, Yb, Zb) of the portion of the measurement object S irradiated with the measurement light may be calculated based on the plane coordinates indicating the irradiation position of the measurement light.

  Next, the control unit 310 acquires information of the set reference plane, and a portion to which the measurement light is irradiated on the measurement object S based on the reference plane and the acquired coordinates (Xb, Yb, Zb) The calculated height is displayed on the display unit 340 as the measurement result. For example, when the reference plane is a plane, the control unit 310 extends from the reference plane when the perpendicular of the reference plane passing through the acquired coordinates (Xb, Yb, Zb) to the coordinates (Xb, Yb, Zb) The length of the perpendicular is calculated as the height, and the calculation result is displayed on the display unit 340 as the measurement result. In addition, the control unit 310 is configured to measure the object corresponding to the measurement point at a plane coordinate indicating the irradiation position of the measurement light on the image acquired by the imaging unit 220 or at a plane coordinate specified by the point designated on the image. A green "+" mark indicating that the height of the portion S has been calculated is displayed on the display unit 340 (step S227).

  Subsequently, control unit 310 determines whether an additional point is designated by the operation of operation unit 330 by the user (step S228). If an additional point is specified, the control unit 310 returns to the process of step S224. Thus, the process of steps S224 to S228 is repeated until no additional point is specified. If no additional points are specified, the optical scan height measurement process ends in height gauge mode.

  According to the height gauge mode described above, the user can designate the reference point and the reference plane by designating the point on the image. Also, the user can acquire the measurement result of the height by designating the measurement point on the screen. Furthermore, the user can continue measurement while maintaining the reference surface by specifying a plurality of measurement points.

(9) Designated Measurement Process FIGS. 18 and 19 are flowcharts showing an example of the designated measurement process by the control board 210. 20 and 21 are explanatory diagrams for describing the designated measurement process of FIGS. 18 and 19. Here, the case of calculating the three-dimensional coordinates of the portion of the measurement object S will be described as an example. In each of FIGS. 20 (a), (b) and (c) and FIGS. 21 (a) and (b), the measurement object S mounted on the optical surface plate 111 on the left side, the imaging unit 220 and the scanning unit While the positional relationship with 270 is shown by a side view, the image displayed on the display part 340 by the imaging of the imaging part 220 is shown on the right side. The image displayed on the display unit 340 includes the image SI of the measurement object S. In the following description, plane coordinates on the image displayed on the display unit 340 will be referred to as screen coordinates.

  The control board 210 starts the designated measurement process by receiving a command of the designated measurement process from the control unit 310. Therefore, the control board 210 acquires screen coordinates (Ua, Va) given along with a command from the control unit 310 (step S301).

  On the right side of FIG. 20A, screen coordinates (Ua, Va) are shown on the image displayed on the display unit 340. Further, on the left side of FIG. 20A, a portion of the measurement target S corresponding to the screen coordinates (Ua, Va) is indicated by a point P0.

  In step S301, among the coordinates of the point P0 corresponding to the screen coordinates (Ua, Va), the Z-axis component (the component in the height direction) is unknown. Therefore, the control board 210 assumes that the component of the Z axis of the point P0 designated by the user is "Za" (step S302). In this case, as shown in FIG. 20B, the assumed Z-axis component does not necessarily coincide with the Z-axis component of the actually designated point P0.

  Next, the control board 210 calculates planar coordinates (Xa, Ya) corresponding to the screen coordinates (Ua, Va) when the component of the Z axis is assumed to be “Za” based on the above coordinate conversion information. (Step S303). Thereby, as shown in FIG. 20B, the coordinates (Xa, Ya, Za) of the virtual point P1 corresponding to the screen coordinates (Ua, Va) and the assumed Z-axis component are obtained. In the present example, “Za” is an intermediate position in the Z direction in the measurement area V of FIG.

  Next, on the basis of the coordinates (Xa, Ya, Za) and position conversion information obtained by the process of step S303, the control board 210 detects the positions of the movable parts 252a and 252b in FIG. The angle is adjusted to irradiate measurement light (step S304).

  In this case, if the component of the Z-axis assumed in step S302 is largely deviated from the component of the Z-axis of the actually designated point P0, as shown in the side view on the left side of FIG. The irradiation position of the measurement light on the object S is largely deviated from the actually designated point P0. Therefore, the following processing is performed.

  By the process of step S304, an irradiation portion (light spot) of the measurement light emitted from the scanning unit 270 to the measurement object S appears on the image acquired by the imaging unit 220. In this case, the screen coordinates of the irradiated portion of the measurement light can be easily detected using image processing or the like. In the drawing on the right side of FIG. 20C, the irradiated portion (light spot) of the measurement light appearing on the image displayed on the display unit 340 is indicated by a circle.

  After the process of step S304, the control substrate 210 detects plane coordinates indicating the irradiation position of the measurement light on the image acquired by the imaging unit 220 as screen coordinates (Uc, Vc), and the reflection unit 271b in FIG. The deflection direction of the measurement light is detected from the angle 272b (step S305).

  Next, the control substrate 210 coordinates (Xc, Yc, coordinates) coordinates of the irradiation position P2 of the measurement light on the measurement object S or the optical surface plate 111 based on the detected screen coordinates (Uc, Vc) and the deflection direction. It is assumed that Zc) (step S306).

  Here, as shown in FIG. 20C, when the irradiation position P2 deviates from the point P0, the screen coordinates (Uc, Vc) also deviate from the screen coordinates (Ua, Va). Therefore, the control board 210 calculates an error (Ua-Uc, Va-Vc) of the detected screen coordinates (Uc, Vc) with respect to the screen coordinates (Ua, Va), and the calculated error is predetermined. It is determined whether it is within the determination range (step S307). The determination range used at this time may be set by the user, or may be set in advance at the factory shipment of the optical scanning height measuring device 400.

  In step S307, when the errors (Ua-Uc, Va-Vc) are within the predetermined determination range, the control board 210 uses the coordinates (Xc, Yc, Zc) determined in the previous step S306 as the user. To specify the coordinates designated by the (step S308), and end the designated measurement process. Thereafter, the control substrate 210 gives the identified coordinates (Xc, Yc, Zc) to the control unit 310.

  In step S307, when the error (Ua-Uc, Va-Vc) is out of a predetermined determination range, the control substrate 210 deflects the measurement light based on the above-mentioned error (Ua-Uc, Va-Vc). The direction is adjusted (step S309). Specifically, for example, the relationship between the error on the screen coordinates corresponding to the X axis and the Y axis and the angle to be adjusted of the reflection units 271b and 272b is stored in advance in the storage unit 320 as an error correspondence relationship. Furthermore, as indicated by the white arrow in FIG. 21A, the control substrate 210 deflects the measurement light based on the calculated error (Ua-Uc, Va-Vc) and the error correspondence relation. Fine-tune the

  Thereafter, the control board 210 returns to the process of step S305. Thus, the processing of steps S305 to S307 is performed again after the deflection direction of the measurement light is finely adjusted. As a result, finally, as shown in FIG. 21 (b), the errors (Ua-Uc, Va-Vc) fall within the determination range, thereby corresponding to the reference point and the measurement point designated by the user. Coordinates (Xc, Yc, Zc) are specified.

  In this example, the coordinates of the coordinates (Xc, Yc, Zc) of the irradiation position P2 are calculated by the process of step S306, but the present invention is not limited to this. The coordinates (Xc, Yc, Zc) of the irradiation position P2 may be calculated by the processes of steps S405 and S406 in the designated measurement process of FIGS. 22 and 23 described later.

  22 and 23 are flowcharts showing another example of the designated measurement process by the control substrate 210. FIG. 24 is an explanatory diagram for describing the designated measurement process of FIG. 22 and FIG. In each of FIGS. 24 (a) and 24 (b), the positional relationship between the measurement object S mounted on the optical surface plate 111 on the left side and the imaging unit 220 and the scanning unit 270 is shown in a side view. The image displayed on the display unit 340 by the imaging of the imaging unit 220 is shown in FIG.

  When the designated measurement process is started, the control board 210 acquires screen coordinates (Ua, Va) given along with a command from the control unit 310 (step S401). Subsequently, the control board 210 assumes that the component of the Z axis of the point P0 designated by the user is “Za” (step S402), as in the process of step S302 described above. In this case, as in the example of FIG. 20 (b), the assumed Z-axis component does not necessarily coincide with the Z-axis component of the actually designated point P0.

  Next, in the control substrate 210, plane coordinates (Xa, Ya) corresponding to the screen coordinates (Ua, Va) when the Z-axis component is assumed to be “Za” as in the process of step S303 above. Is calculated (step S403). Further, the control board 210 controls the movable portion 252a of FIG. 5 based on the coordinates (Xa, Ya, Za) of the virtual point P1 obtained by the process of step S403 and the position conversion information, as in the process of step S304 described above. The position of 252b and the angles of the reflecting portions 271b and 272b in FIG. 7 are adjusted to irradiate measurement light (step S404). In step S404, the relationship between the point P0 designated by the user and the irradiation position of the measurement light irradiated to the measurement object S is the same as the state shown in FIG. 20 (c). Thereafter, the subsequent processing is performed such that the irradiation position of the measurement light on the measurement object S actually coincides with or approaches the designated point P0.

  First, the control substrate 210 detects the positions of the movable parts 252a and 252b in FIG. 5 and detects the deflection direction of the measurement light from the angles of the reflection parts 271b and 272b in FIG. 7 (step S405).

  Next, the control substrate 210 outputs the measurement light emission position and the measurement object S based on the positions of the movable portions 252a and 252b detected in the immediately preceding step S405 and the light reception signal acquired by the light reception portion 232d of FIG. Calculate the distance between the measurement light and the irradiation position of In addition, the control substrate 210 coordinates the coordinates of the irradiation position P2 of the measurement light on the measurement target S or the optical surface plate 111 based on the calculated distance and the deflection direction of the measurement light detected in the immediately preceding step S405. It is assumed that Xc, Yc, Zc) (step S406).

  By the process of step S406 described above, the component "Zc" of the Z axis of the irradiation position P2 of the measurement light is estimated to be a value that matches or is close to the component of the Z axis of the point P0 designated by the user . Therefore, the control board 210 calculates plane coordinates (Xa ′, Ya ′) corresponding to the screen coordinates (Ua, Va) when the component of the Z axis is assumed “Zc” based on the coordinate conversion information. (Step S407). Thus, as shown in FIG. 24A, the screen coordinates (Ua, Va) and the coordinates (Xa ', Ya', Zc) of the virtual point P3 corresponding to the assumed Z-axis component are obtained.

  Next, the control substrate 210 calculates an error (Xa′−Xc, Ya′−Yc) of the plane coordinates (Xc, Yc) of the irradiation position P2 with respect to the plane coordinates (Xa ′, Ya ′) of the virtual point P3. Then, it is determined whether the calculated error is within a predetermined determination range (step S408). The determination range used at this time may be set by the user, or may be set in advance at the factory shipment of the optical scanning height measuring device 400.

  In step S408, when the error (Xa '-Xc, Ya'-Yc) is within the predetermined determination range, the control substrate 210 determines the coordinates (Xc, Yc) of the irradiation position P2 determined in the previous step S406. , Zc) as coordinates designated by the user (step S409), and the designated measurement process is ended. Thereafter, the control substrate 210 gives the identified coordinates (Xc, Yc, Zc) to the control unit 310.

  In step S408, when the error (Xa'-Xc, Ya'-Yc) is out of the predetermined determination range, the control substrate 210 determines the coordinates (Xa ', of the virtual point P3 obtained in the immediately preceding step S407. Ya 'and Zc are set as coordinates (Xa, Ya, Za) to be irradiated with the measurement light in step S404 above (step S410). Thereafter, the control substrate 210 returns to the process of step S404 described above.

  As a result, after the deflection direction of the measurement light is changed, the processes of steps S404 to S408 are performed again. As a result, finally, as shown in FIG. 24 (b), the errors (Xa'-Xc, Ya'-Yc) fall within the judgment range, so that the reference point and the measurement point designated by the user are obtained. The corresponding coordinates (Xc, Yc, Zc) are identified.

  In this example, the coordinates of the coordinates (Xc, Yc, Zc) of the irradiation position P2 are calculated by the processing of steps S405 and S406, but the present invention is not limited to this. The coordinates of the coordinates (Xc, Yc, Zc) of the irradiation position P2 may be calculated by the process of step S306 in the designated measurement process of FIGS. 18 and 19.

  In such a designated measurement process, the reflected light can not be properly received depending on the irradiation position of the measurement light, the shape of the measurement object, and the like. 25 to 27 are diagrams for describing an example in the case where reflected light can not be received properly.

  In the example of FIG. 25, the measurement light is emitted to the portion P11 on the horizontal surface of the measurement object S located at the end of the measurement region V. In the example of FIG. 26, the measurement light is emitted to the portion P12 on the inclined surface of the measurement object S directed to the outside of the measurement head 200. In such a case, since the incident angle of the measurement light is large, the light amount of the reflected light returning to the scanning unit 270 of the measurement head 200 is reduced. The incident angle is an angle between the direction perpendicular to the surface irradiated with the measurement light and the irradiation direction of the measurement light. In the example of FIG. 27, the measurement light is emitted to the portion P13 on the bottom surface of the recess provided in the measurement object S. In this case, most of the reflected light is blocked in the recess, so the amount of light reflected back to the scanning portion 270 of the measuring head 200 is reduced.

  In order to calculate the coordinates of the irradiation position of the measurement light, it is necessary to receive a certain amount of light received. Therefore, as in the example of FIGS. 25 to 27, when the light amount of the reflected light returning to the scanning unit 270 is small, the three-dimensional coordinates of the irradiation position of the measurement light can not be appropriately calculated. In addition, even when the irradiation position of the measurement light is on the mirror surface or when the measurement light is irradiated to the light transmitting portion, the reflected light is not appropriately received, and it is difficult to calculate the three-dimensional coordinates.

  In the present embodiment, when the three-dimensional coordinates corresponding to at least one reference point are not calculated, the coordinate loss process selected in advance is performed. When the first process is selected as the coordinate loss process, the reference plane is not identified. In this case, it is prevented that a reference plane different from the user's request is identified. This prevents the decrease in the reliability of the calculated physical quantity (height). On the other hand, if the second process is selected as coordinate loss processing and the reference plane can be identified by the calculated three-dimensional coordinates, the reference plane is identified based on the calculated three-dimensional coordinates. In this case, the physical quantity can be efficiently calculated without re-specifying the reference point. Thus, different coordinate missing processes can be selectively performed according to the purpose. Therefore, the convenience of the user can be enhanced and the reference surface can be appropriately identified.

(10) Actual Measurement Process The control substrate 210 starts the actual measurement process by receiving an instruction of the actual measurement process from the control unit 310. The actual measurement process of the measurement points will be described below. The actual measurement process of the reference point is the same as the actual measurement process of the measurement point. When the actual measurement process is started, the control board 210 first acquires coordinates (Xc, Yc, Zc) of measurement points given from the control unit 310 together with a command.

  Here, even if the measurement light is irradiated based on the coordinates (Xc, Yc, Zc) of the measurement point set in the setting mode and the position conversion information, depending on the shape of the measurement object S measured in the measurement mode The plane coordinates of the irradiation position of the measurement light on the measurement object S may be largely deviated from the coordinates of the measurement point.

  For example, if the component of the Z axis of the portion of the measurement target S corresponding to the measurement point is largely deviated from “Zc”, the plane coordinates of the measurement point at which the plane coordinates of the irradiation position of the measurement light are also set (Xc, Yc Greatly deviate from). Therefore, in the actual measurement process, the plane coordinates of the irradiation position of the measurement light are adjusted to be within a certain range from the plane coordinates (Xc, Yc) of the measurement point.

  Specifically, the control board 210 sets, for example, (Ua, Va) screen coordinates corresponding to the acquired coordinates (Xc, Yc, Zc) of the acquired measurement points, and then coordinates (Xc) of the acquired measurement points. , Yc, Zc) are coordinates (Xa, Ya, Za) of the virtual point P1 obtained by the process of step S303 of FIG. Next, the control substrate 210 performs the processes of steps S304 to S308 in FIGS. 18 and 19. Subsequently, based on the coordinates (Xc, Yc, Zc) identified in the process of step S308 and the position conversion information, the control board 210 positions the movable parts 252a and 252b in FIG. 5 and the reflection part 271b in FIG. The measurement light is irradiated by adjusting the angle 272 b.

  Subsequently, the control substrate 210 measures the object based on the light receiving signal output from the light receiving unit 232 d of FIG. 4, the positions of the movable units 252 a and 252 b of FIG. 5, and the deflection directions of the deflection units 271 and 272 of FIG. The three-dimensional coordinates (Xb, Yb, Zb) of the portion on the object S irradiated with the measurement light are calculated and given to the control unit 310. Thus, the actual measurement process ends. The control substrate 210 is a light receiving signal output from the light receiving unit 232 d in FIG. 4, the positions of the movable units 252 a and 252 b in FIG. 5, and the irradiation position of measurement light on the image acquired by the imaging unit 220 in FIG. The three-dimensional coordinates (Xb, Yb, Zb) of the portion of the measurement object S irradiated with the measurement light may be calculated based on the plane coordinates indicating.

  Alternatively, the control substrate 210 may execute the actual measurement process as follows. The control board 210 sets, for example, the coordinates (Xc, Yc, Zc) of the acquired measurement points after setting the screen coordinates corresponding to the acquired coordinates (Xc, Yc, Zc) of the measurement points as (Ua, Va). Let (Xa, Ya, Za) be the coordinates of the virtual point P1 obtained by the process of step S403 in FIG. Next, the control substrate 210 performs the processing of steps S404 to S409 in FIGS. Subsequently, based on the coordinates (Xc, Yc, Zc) specified in the process of step S 408 and the position conversion information, the control board 210 positions the movable parts 252 a and 252 b in FIG. 5 and the reflection part 271 b in FIG. The measurement light is irradiated by adjusting the angle 272 b.

  After that, the control substrate 210 receives the light receiving signal output from the light receiving unit 232 d in FIG. 4, the positions of the movable units 252 a and 252 b in FIG. 5, and the deflection directions of the deflection units 271 and 272 in FIG. The three-dimensional coordinates (Xb, Yb, Zb) of the portion of the measurement object S irradiated with the measurement light are calculated based on the above, and are given to the control unit 310. Alternatively, the control substrate 210 may be a light receiving signal output from the light receiving unit 232 d in FIG. 4, the positions of the movable units 252 a and 252 b in FIG. 5, and the irradiation position of measurement light on the image acquired by the imaging unit 220 in FIG. The three-dimensional coordinates (Xb, Yb, Zb) of the portion of the measurement object S irradiated with the measurement light are calculated based on the plane coordinates indicating.

  Also in the actual measurement process, as in the case of the designated measurement process, a sufficient amount of received light may not be obtained, and the coordinates corresponding to the reference point may not be calculated. Therefore, also in the actual measurement process, as in the case of the designated measurement process, it is preferable that the coordinate drop process selected in advance is performed when the coordinates corresponding to at least one reference point are not calculated.

(11) Operation Example Using Setting Mode and Measurement Mode FIGS. 28 to 35 are diagrams for explaining an operation example of the optical scanning height measuring device 400 in the setting mode. In the following, the user of the optical scanning height measurement apparatus 400 will be described separately for the measurement manager and the measurement worker.

  First, the measurement manager positions the measurement target S, which is the reference of height measurement, on the optical surface plate 111, and operates the setting button 341a of FIG. 8 using the operation unit 330 of FIG. Thus, the optical scanning height measuring device 400 starts the operation of the setting mode. In this case, for example, as shown in FIG. 23, a setting screen 350 is displayed on the display unit 340 of FIG. The setting screen 350 includes an image display area 351 and a button display area 352. In the image display area 351, an image of the measurement object S currently captured is displayed as a reference image RI. In each of FIGS. 28 to 35 and each of FIGS. 36 to 45 which will be described later, a contour indicating the shape of the measurement object S in the reference image RI displayed in the image display area 351 and the measurement image MI to be described later It is indicated by a thick solid line.

  At the start time of the setting mode, a search area button 352 a, a pattern image button 352 b and a setting completion button 352 c are displayed in the button display area 352. The measurement manager operates, for example, the search area button 352 a and performs a drag operation or the like on the image display area 351. Thus, the search area SR is set as shown by a dotted line in FIG. Also, the measurement manager operates, for example, the pattern image button 352 b to perform a drag operation or the like on the image display area 351. Thereby, the pattern image PI can be set as indicated by an alternate long and short dash line in FIG.

  After setting the search area SR and the pattern image PI, the measurement manager operates the setting completion button 352 c. Thereby, the setting of the search area SR and the pattern image PI is completed, and the display mode of the setting screen 350 is switched as shown in FIG. Specifically, in the image display area 351, the index indicating the set search area SR and the pattern image PI is removed. Further, in the button display area 352, in place of the search area button 352a and the pattern image button 352b of FIG. 28, a point designation button 352d and a reference surface setting button 352e are displayed.

  The measurement manager operates the point designation button 352 d to perform a click operation or the like on the image display area 351. Thereby, one or more (four in this example) reference points are designated as indicated by the “+” mark in FIG. Thereafter, the measurement manager operates the reference surface setting button 352 e.

  When three-dimensional coordinates corresponding to all designated reference points are calculated, the reference plane (in the present example, a plane) is specified based on those coordinates, and image display is performed as shown by a two-dot chain line in FIG. An index indicating the reference plane RF specified in the area 351 is displayed. Here, when coordinates corresponding to four or more reference points are calculated, it is not necessary that all the four or more reference points be included in the reference plane RF. In this case, the reference plane RF is specified, for example, such that the distance between the plurality of reference points is generally small. Similarly, when a reference surface constraint condition for determining a reference surface is defined, for example, the reference surface is parallel to the mounting surface, or the reference surface is parallel to another surface previously stored. In the case where conditions such as that are determined, if coordinates corresponding to two or more reference points are calculated, it is not necessary that all the two or more reference points be included in the reference plane RF. A plurality of reference planes RF may be specified by repeating the operations of the point designation button 352d and the reference plane setting button 352e.

  If the three-dimensional coordinates corresponding to at least one reference point among the plurality of designated reference points are not calculated, the coordinate loss process selected in advance is performed. When the first process is selected as the coordinate loss process, the reference surface is not identified, and as shown in FIG. 32, warning information is presented. In the example of FIG. 32, error messages EM1 and EM2 and an error mark EK are displayed as warning information. The error message EM1 is a character string for notifying the measurement manager that the reference plane has not been identified. The error message EM2 and the error mark EM are a character string and a mark (in this example, an “x” mark) for notifying the measurement manager of the reference point whose coordinates were not calculated. The error mark EK is displayed so as to overlap with the “+” mark representing the reference point whose coordinates were not calculated. Instead of the error mark EK, the “+” mark representing the reference point whose coordinates were not calculated may be changed to, for example, red. When the reference plane is not specified as in the example of FIG. 32, the measurement manager re-specifies a position different from the reference point for which the coordinates were not calculated as the reference point.

  When the second process is selected as the coordinate loss process, the reference plane RF is specified based on the calculated coordinates, and as shown in FIG. 33, an index indicating the specified reference plane RF is displayed. Further, in the example of FIG. 33, as in the example of FIG. 32, an error mark EM for notifying the measurement manager of the reference point whose index has not been calculated is displayed as the warning information. In addition to the error mark EM, an error message EM2 of FIG. 32 may be displayed.

  When the reference plane RF is specified, the measurement manager operates the setting completion button 352 c. Thereby, the setting of the reference plane RF is completed, and the display mode of the setting screen 350 is switched as shown in FIG. Specifically, in the image display area 351, an index indicating one or more reference points used for setting the reference plane RF is removed. Further, in the button display area 352, an allowance value button 352g is displayed instead of the reference surface setting button 352e of FIG.

  The measurement manager operates the point designation button 352 d to perform a click operation or the like on the image display area 351. Thereby, measurement points are designated as shown by “+” marks in FIG. At this time, in the case where a plurality of reference planes RF are set, one selection is accepted from among the plurality of reference planes RF set as the reference planes RF as the reference of the designated measurement point. In addition, when the above-mentioned designated measurement processing is performed for the designated measurement point and the height of the portion of the measurement target S corresponding to the measurement point can be calculated, the portion of the measurement target S corresponding to the measurement point The height is displayed on the image display area 351. At this time, it may be shown that the height of the portion of the measurement object S corresponding to the measurement point can be calculated by changing the color of the “+” mark, for example, to green.

  On the other hand, when the designated measurement process described above is performed for the designated measurement point and the height of the portion of the measurement object S corresponding to the measurement point can not be calculated, an error message such as “FAIL” appears on the image display area 351. May be displayed. At this time, it may be indicated that the height of the portion of the measurement object S corresponding to the measurement point can not be calculated by changing the color of the “+” mark to, for example, red.

  When a plurality of measurement points are designated, it may be possible to designate measurement path information. For example, it may be possible to set information such as setting measurement paths in accordance with the designation order of a plurality of measurement points, or setting measurement paths such that the measurement path is shortest.

  At the time of designation of the measurement point, the measurement manager can further set the design value and the tolerance as the tolerance value for each measurement point by operating the tolerance value button 352g. Finally, the measurement manager operates the setting completion button 352c. Thereby, a series of information including the reference point, the measurement point, and the tolerance value are associated with one another and stored in the storage unit 320 as registration information. At this time, the registration information is given a specific file name. The file name may be set by the measurement manager.

  As shown in FIGS. 30 to 35, the reference image RI is superimposed on the reference point designated by the measurement manager and the index "+" indicating the position of the measurement point. Thereby, the measurement manager can easily confirm the designated reference point and measurement point by visually recognizing the index superimposed and displayed on the reference image RI of the measurement object S.

  Here, in the present invention, the order of setting of the reference point and the measurement point in the setting mode is not limited to the above example. The setting of the reference point and the measurement point may be performed as follows.

  36 to 38 are diagrams for explaining another operation example of the optical scanning height measuring device 400 in the setting mode. In this example, after setting the search area SR and the pattern image PI, as shown in FIG. 38, in the button display area 352, a setting completion button 352c, point specification button 352d, reference surface setting button 352e, tolerance value button 352g, reference The point setting button 352 h and the measurement point setting button 352 i are displayed.

  In this state, the measurement manager operates the point designation button 352 d to perform a click operation or the like on the image display area 351. At this time, as shown by “+” marks in FIG. 36, the measurement manager designates a plurality of (five in this example) points that can be reference points or measurement points.

  Next, the measurement manager operates the reference point setting button 352 h or the measurement point setting button 352 i for each designated point to determine whether the point is to be used as a reference point or to be used as a measurement point. Furthermore, the measurement manager operates the reference surface setting button 352 e after determining one or more points as the reference points. As a result, as shown in FIG. 37, one or more (three in this example) reference points are displayed in the image display area 351 as indicated by a dotted “+” mark. In addition, as indicated by a two-dot chain line, a reference plane based on one or more reference points is displayed. If the three-dimensional coordinates corresponding to at least one reference point among the plurality of designated reference points are not calculated, the coordinate loss process selected in advance is performed as in the examples of FIGS. 32 and 33. . In this case, information corresponding to the selected first or second processing is displayed.

  In addition, one or more (two in this example) measurement points are displayed as indicated by the solid “+” mark. Thereafter, as shown in FIG. 31, the height of the portion of the measurement target S corresponding to the designated measurement point is displayed on the image display area 351. At this time, the measurement manager can set the design value and the tolerance as the allowable value for each measurement point by operating the allowable value button 352 g as in the above example. Finally, the measurement manager operates the setting completion button 352c.

  39 to 45 are diagrams for describing an operation example of the optical scanning height measurement device 400 in the measurement mode. The measurement operator positions the measurement object S to be measured for height measurement on the optical surface plate 111, and operates the measurement button 341b of FIG. 8 using the operation unit 330 of FIG. Thereby, the optical scanning height measuring device 400 starts the operation in the measurement mode. In this case, for example, as shown in FIG. 39, a measurement screen 360 is displayed on the display unit 340 of FIG. The measurement screen 360 includes an image display area 361 and a button display area 362. In the image display area 361, an image of the measurement object S currently captured is displayed as a measurement image MI.

  At the start time of the measurement mode, a file read button 362 a is displayed in the button display area 362. The measurement worker operates the file read button 362 a to select the file name instructed by the measurement manager. Thereby, registration information of height measurement corresponding to the measurement object S placed on the optical surface plate 111 is read.

  When the registration information is read, as shown in FIG. 40, the pattern image PI corresponding to the read registration information is superimposed and displayed on the measurement image MI of the image display area 361 in a semitransparent state. Further, the measurement button 362 b is displayed in the button display area 362. In this case, the measurement operator can position the measurement target S at a more appropriate position on the optical surface plate 111 as shown in FIG. 41 while referring to the pattern image PI.

  The measurement worker operates the measurement button 362 b after the positioning operation of the measurement object S. Thereby, as shown in FIG. 42, the reference point and the measurement point are set on the measurement image MI based on the registration information. In this case, the positions of the registered reference point and measurement point are corrected based on the comparison between the pattern image PI and the measurement image MI. In FIG. 42, the reference point is indicated by a dotted “+” mark, and the measurement point is indicated by a solid “+” mark. Subsequently, three-dimensional coordinates corresponding to the specified reference point are calculated, and the reference plane RF is specified based on the coordinates.

  If the three-dimensional coordinates corresponding to at least one of the plurality of set reference points are not calculated, the coordinate loss process selected in advance is performed as in the setting mode. When the first process is selected as the coordinate loss process, the reference surface is not identified, and as shown in FIG. 43, warning information is presented. In the example of FIG. 43, as in the example of FIG. 32, error messages EM1 and EM2 and an error mark EK are displayed as warning information. In this case, the measurement operator may be able to re-specify the reference point.

  When the second process is selected as the coordinate loss process, as shown in FIG. 44, the reference plane RF is specified based on the calculated coordinates. In the example of FIG. 44, as in the example of FIG. 33, the error mark EM is displayed as the warning information.

  When the reference plane RF is specified, the heights from the reference plane of the plurality of portions of the measurement target S corresponding to the set measurement point are measured. If the read registration information includes an allowance, the quality of the corresponding part of the measurement point is determined based on the allowance.

  As a result, as shown in FIG. 45, the height of the portion of the measurement target S corresponding to each of the set measurement points is displayed on the image display area 361. Further, the height of the portion of the measurement target S corresponding to each set measurement point is displayed on the button display area 362, and the result of the quality determination based on the tolerance value is displayed as the inspection result.

(12) Measurement of Substitute Part If the three-dimensional coordinate of the part corresponding to the designated reference point is not calculated, a substitute part that is a substitute for that part may be presented. FIG. 46 is a diagram for describing a presentation example of the alternative part. Here, the case where the first process is selected as the coordinate missing process in the setting mode will be described as an example. In the example of FIG. 46, among the designated reference points BP1 to BP4, three-dimensional coordinates of the reference point BP4 are not calculated. Therefore, an alternative portion BP4 'that is an alternative to the portion corresponding to the reference point BP4 is identified, and the alternative portion BP4' is displayed on the reference image RI by the "o" mark.

  As a method of specifying the alternative portion BP4 ', for example, a range of alternative regions centered on the reference point BP4 is specified on the reference image RI. An arbitrary position within the alternative area is identified as an alternative candidate point. The above-described designated measurement process is performed on the identified alternative candidate points. When the three-dimensional coordinates corresponding to the alternative candidate point are calculated by the designated measurement process, the part corresponding to the alternative candidate point is specified as the alternative part. If the three-dimensional coordinates corresponding to the alternative candidate point are not calculated, another position is identified as an alternative candidate point in the alternative area, and designated measurement processing is performed on the alternative candidate point. The same process is repeated until the three-dimensional coordinates corresponding to the alternative candidate points are calculated, and when the three-dimensional coordinates are calculated, the part corresponding to the alternative candidate points is identified as the alternative part.

  In addition, the reference image RI may be analyzed, and a substitute portion may be identified based on the analysis result. For example, in the reference image RI, a portion where three-dimensional coordinates are difficult to be calculated, such as a shaded portion and a mirror surface portion, may be detected, and a substitute portion may be identified in an area excluding these portions.

  By presenting the alternative part in this manner, the user can easily and efficiently respecify the reference point. This improves the work efficiency of the user.

  In the measurement mode, alternative parts may be presented as well. In that case, the alternative part may be identified based on the information of the reference point registered in the setting mode. For example, a substitute candidate point is tentatively specified in the measurement mode, and three-dimensional coordinates corresponding to the substitute candidate point are calculated. Subsequently, the three-dimensional coordinates corresponding to the alternative candidate point and the three-dimensional coordinates corresponding to the reference point registered in the setting mode are compared. The part corresponding to the alternative candidate point is specified as the alternative part only when the difference is within the predetermined range.

  After the substitute part is identified, the reference point may be automatically re-designated instead of presenting the substitute part to the user. In this case, the drive control unit 3 controls the deflection units 271 and 272 so that the measurement light is irradiated to the alternative portion. Thus, the reference plane can be identified based on the automatically calculated three-dimensional coordinates of the alternative portion without redesigning the reference point by the user.

(13) Effects In the optical scanning height measuring device 400 according to the present embodiment, the measuring light is deflected by the deflecting units 271 and 272 and irradiated to the portions corresponding to the respective reference points, and the reflected light is received by the light receiving unit. Light is received by 232 d. A process for calculating three-dimensional coordinates of a portion corresponding to the reference point is performed based on the deflection direction of the deflection units 271 and 272 or the irradiation position of the measurement light and the light reception signal output by the light reception unit 232 d. A reference plane is specified based on the calculated three-dimensional coordinates, and a physical quantity based on the reference plane is calculated. In this case, the user can set a desired reference plane by setting the reference point at an arbitrary position. Therefore, physical quantities can be measured with a high degree of freedom.

  In addition, when the three-dimensional coordinates of the portion corresponding to at least one reference point are not calculated, the coordinate loss process selected in advance is performed. When the first process is selected as the coordinate loss process, the reference plane is not identified. In this case, it is prevented that a reference plane different from the user's request is identified. This prevents the decrease in the reliability of the calculated physical quantity. On the other hand, if the second process is selected as coordinate loss processing and the reference plane can be identified by the calculated three-dimensional coordinates, the reference plane is identified based on the calculated three-dimensional coordinates. In this case, the physical quantity can be efficiently calculated without re-specifying the reference point. Thus, different coordinate missing processes can be selectively performed according to the purpose. Therefore, the convenience of the user can be enhanced and the reference surface can be appropriately identified.

  Further, in the present embodiment, even if the position of the measurement object in the reference image and the position of the measurement object in the measurement image are different, on the measurement image so as to correspond to the reference point designated on the reference image. Reference points are identified. Thus, a reference point can be designated on the reference image in the setting mode, and three-dimensional coordinates of a portion corresponding to the reference point can be easily calculated in the measurement mode. As a result, the amount of work of the user required to measure the physical quantity is reduced, and the convenience of the user is further enhanced.

  Further, in the present embodiment, at least one of the reference by the coordinate calculation unit is at least one of when the first process is selected as the coordinate missing process and when the second process is selected as the coordinate missing process. Warning information is presented when the three-dimensional coordinates of the portion corresponding to the point are not calculated. This allows the user to easily recognize that the three-dimensional coordinates of at least one first target portion have not been calculated. As a result, the user can efficiently redesign the reference point as needed.

(14) Other Embodiments (a) In the above embodiment, the plane is specified as the reference plane, and the height based on the reference plane is calculated as the physical quantity, but other reference planes may be specified. Other physical quantities may be calculated. For example, cylindrical surfaces, spherical surfaces, and other curved surfaces may be identified as reference surfaces. When a cylindrical surface or a sphere is specified as the reference surface, the diameter (diameter or radius) of the cylindrical surface or the sphere may be calculated as the physical quantity. Also, when a plane is specified as the reference plane, the flatness may be calculated as the physical quantity.

  (B) In the above embodiment, the coordinate dropout process is performed in each of the setting mode, the measurement mode, and the height gauge mode, but the coordinate dropout process may be performed in only one or two of these modes.

  (C) In the setting mode, when the physical quantity of the portion of the measurement target S corresponding to the measurement point can not be calculated in the setting mode, the physical quantity calculation unit 15 may cause the display unit 340 to display an error message such as “FAIL”. In this case, the measurement manager can recognize that the physical quantity of the portion of the measurement target S corresponding to the measurement point can not be calculated by visually recognizing the display unit 340. Thereby, the measurement manager changes the position of the measuring object S or the optical scanning height measuring device 400 so that the physical quantity of the portion of the measuring object S can be calculated, or specifies the position of the measuring point It can be changed.

  (D) The optical scanning height measuring device 400 may be configured to be able to insert a drawing and a comment into a reference image acquired in the setting mode or a measurement image acquired in the measurement mode. Thereby, the measurement condition of the measuring object S can be recorded in more detail. Further, the drawing and the comment inserted into the reference image may be registered as registration information.

  For example, a frame line indicating a search area set in the setting mode may be drawn on the reference image. In this case, in the measurement mode, the frame line is displayed on the measurement image. Thereby, in the measurement mode, it becomes easy for the measurement worker to place the measurement object S on the optical surface plate 111 so that the measurement object S fits within the frame line displayed in the measurement image. As a result, it is possible to efficiently correct the deviation of the measurement image data with respect to the reference image data.

  (E) The reference image acquisition unit 1 may cause the display unit 340 to display a bird's-eye view by performing image processing on the acquired reference image. Similarly, the measurement image acquisition unit 16 may display a bird's-eye view on the display unit 340 by performing image processing on the acquired measurement image.

  (F) In the above embodiment, the reference image acquisition unit 1 and the measurement image acquisition unit 16 acquire a captured image of the measurement object S by the imaging unit 220 as a reference image and a measurement image, respectively. It is not limited. The reference image acquisition unit 1 and the measurement image acquisition unit 16 may acquire CAD (Computer Aided Design) images of the measurement object S prepared in advance as a reference image and a measurement image, respectively.

  Alternatively, when the measurement light is irradiated to a plurality of portions of the measurement target S, the physical quantity calculation unit 15 can calculate the heights of the plurality of portions of the measurement target S. Therefore, the reference image acquisition unit 1 and the measurement image acquisition unit 16 may acquire the distance image of the measurement object S as the reference image and the measurement image based on the heights of the plurality of portions of the measurement object S. .

  When a CAD image or a distance image is used as a reference image, the measurement manager correctly specifies a desired reference point and measurement point on the CAD image or the distance image while recognizing the three-dimensional shape of the measurement object S. can do. In addition, when a distance image is used as the reference image and the measurement image, the distance image may be generated at high speed by reducing the resolution.

  (G) In the above embodiment, the measurement operator designates the file of registration information at the start of the measurement mode, but the present invention is not limited to this. For example, an ID (Identification) tag corresponding to a file of registration information may be attached to the measurement object S. In this case, when the measurement object S and the ID tag are imaged by the imaging unit 220 at the start of the measurement mode, the file of the registration information corresponding to the tag is automatically designated. According to this configuration, the measurement operator does not have to specify a file of registration information at the start of the measurement mode. Therefore, the process of step S203 of FIG. 15 is omitted.

  (H) In the above embodiment, the physical quantity of the measuring object S is calculated by the spectral interference method, but the present invention is not limited to this. The physical quantity of the measurement target S may be calculated by another method such as a white light interference method, a confocal method, a triangular distance measurement method, or a TOF (Time Of Flight) method.

  (I) In the above embodiment, the operation mode of the light scanning height measurement device 400 includes a plurality of operation modes, and the light scanning height measurement device 400 operates in the operation mode selected by the user. Is not limited to this. The operation mode of the light scanning height measurement device 400 does not include a plurality of operation modes and includes only a single operation mode, and the light scanning height measurement device 400 may operate in the operation mode. For example, the operation mode of the light scanning height measurement device 400 does not include the setting mode and the measurement mode, and the light scanning height measurement device 400 may operate in the same operation mode as the height gauge mode.

  (J) In the above embodiment, the light guide 240 includes the optical fibers 241 to 244 and the fiber coupler 245, but the present invention is not limited thereto. The light guiding unit 240 may include a half mirror instead of the optical fibers 241 to 244 and the fiber coupler 245.

(15) Correspondence Between Each Component of the Claim and Each Part of the Embodiment Hereinafter, an example of correspondence between each component of the claim and each part of the embodiment will be described, but the present invention is not limited to the following example. It is not limited.

  In the above embodiment, the light scanning height measuring device 400 is an example of a shape measuring device, the measurement object S is an example of a measurement object, and the light emitting portion 231 is an example of a light emitting portion. The units 271 and 272 are an example of a deflection unit, the light receiving unit 232 d is an example of a light receiving unit, the position information acquisition unit 2 is an example of a position information acquisition unit, and the drive control unit 3 is an example of a drive control unit. The coordinate calculation unit 13 is an example of a coordinate calculation unit, the reference surface identification unit 4 is an example of a reference surface identification unit, the physical quantity calculation unit 15 is an example of a physical quantity calculation unit, and the selection unit 21 is an example of a selection unit It is. The reference image acquisition unit 1 is an example of a reference image acquisition unit, the measurement image acquisition unit 16 is an example of a measurement image acquisition unit, the correction unit 17 is an example of a correction unit, and the warning presentation unit 22 is a warning presentation. The coordinate number setting unit 23 is an example of the coordinate number setting unit, and the alternative presentation unit 24 is an example of the alternative presentation unit.

  As each component of a claim, other various elements having the configuration or function described in the claim can also be used.

DESCRIPTION OF SYMBOLS 1 ... Reference image acquisition part, 2 ... Position information acquisition part, 3 ... Drive control part, 4 ... Reference surface identification part, 5 ... Tolerance value acquisition part, 6 ... Registration part, 7 ... Deflection direction acquisition part, 8 ... Detection part , 9 ... image analysis unit, 10 ... reference position acquisition unit, 11 ... light reception signal acquisition unit, 12 ... distance information calculation unit, 13 ... coordinate calculation unit, 14 ... determination unit, 15 ... physical quantity calculation unit, 16 ... measurement image acquisition Part 17 17 offset correction part 18 examination part 19 report preparation part 21 selection part 22 warning presentation part 23 coordinate number setting part 24 alternate presentation part 100 stand part 110 ... installation unit, 111, 460 ... optical surface plate, 120 ... holding unit, 130 ... elevation unit, 131, 255a, 255b, 264, 271a, 272a ... drive unit, 132, 256a, 256b, 265, 273, 274, 471 ... Drive circuit, 133, 257a, 257 , 266, 275, 276, 472 ... reading unit, 200 ... measuring head, 210, 310 ... control substrate, 220 ... imaging unit, 230 ... optical unit, 231 ... light emitting unit, 231 ... corrected light emitting unit, 232 ... measurement Unit: 232a, 232c, 246: Lens, 232b: Spectroscopic unit, 232d: Light receiving unit, 240: Light guide unit, 241, 242, 243, 244: Optical fiber, 245: Fiber coupler, 245a, 245b, 245c, 245d: Port, 245e: Body part, 250: Reference part, 251, 261: Fixed part, 251g: Linear guide, 252a, 252b, 262: Movable part, 253: Fixed mirror, 254a, 254b, 254c: Movable mirror, 260: Joint Focusing part, 263 ... movable lens, 270 ... scanning part, 271, 272 ... deflecting part, 271 b, 272 b ... reflecting part, 00 ... processing device, 310 ... controller, 320 ... storage unit, 330 ... operating unit, 340 ... display unit, 360 ... measurement screen, 362a ... file read button 400 ... optical scanning height measuring device, V ... measured region

Claims (8)

A light emitting unit that emits light;
A deflecting unit that deflects the light emitted from the light emitting unit and irradiates the measurement area including the measurement object;
A light receiving unit that receives light from the measurement area and outputs a light receiving signal indicating a light receiving amount;
A position information acquisition unit that acquires first position information representing positions of a plurality of reference points in the measurement area;
The deflection unit is configured to irradiate light to a plurality of first target portions of the measurement area respectively corresponding to the plurality of reference points based on the first position information acquired by the position information acquisition unit. A drive control unit that controls
Processing for calculating three-dimensional coordinates of each first target portion based on the deflection direction of the deflection unit or the irradiation position of light deflected by the deflection unit and the light reception signal output by the light reception unit Coordinate calculation unit to be performed,
When three-dimensional coordinates of the plurality of first target portions are calculated by the coordinate calculation unit, the reference plane is determined based on the three-dimensional coordinates of the plurality of first target portions calculated by the coordinate calculation unit. A reference surface specifying unit that specifies and performs coordinate dropout processing that is selected in advance when three-dimensional coordinates of at least one first target portion are not calculated by the coordinate calculation unit;
A physical quantity calculation unit that calculates a physical quantity based on the reference plane identified by the reference plane identification unit;
A selector configured to select which one of a first process and a second process is to be performed as the coordinate loss process;
The reference surface identification unit does not identify the reference surface when the first processing is selected by the selection unit, and the second processing is selected by the selection unit and calculated by the coordinate calculation unit. The shape measuring device which specifies the reference plane based on the calculated three-dimensional coordinates when the reference plane can be specified by the calculated three-dimensional coordinates. The first position information represents positions of a plurality of reference points on a reference image including a measurement object,
A reference image acquisition unit that acquires the reference image;
A measurement image acquisition unit that acquires a measurement image including a measurement object;
Based on the comparison between the reference image acquired by the reference image acquisition unit and the measurement image acquired by the measurement image acquisition unit, the measurement images respectively correspond to the plurality of reference points on the reference image And a correction unit that specifies a plurality of positions as a plurality of correction reference points,
The drive control unit controls the deflection unit such that light is emitted to the plurality of first target portions based on the plurality of correction reference points specified by the correction unit. Shape measuring device. The position information acquisition unit further acquires second position information representing the position of the measurement point on the measurement object,
The drive control unit is configured to cause the light to be irradiated to a second target portion of the measurement object corresponding to the measurement point based on the second position information acquired by the position information acquisition unit. Control the department,
The coordinate calculation unit determines three-dimensional coordinates of the second target portion based on the deflection direction of the deflection unit or the irradiation position of light deflected by the deflection unit and the light reception signal output by the light reception unit. Calculate
The reference plane is a plane,
The physical quantity calculation unit may set the second object based on the reference surface based on the reference surface acquired by the reference surface acquisition unit and the coordinates of the second target portion calculated by the coordinate calculation unit. The shape measuring device according to claim 1, wherein the height of the part is calculated as the physical quantity. The shape measurement device according to any one of claims 1 to 3, wherein the physical quantity calculation unit does not calculate the physical quantity when the reference surface specification unit does not specify the reference surface. In at least one of the case where the first process is selected by the selection unit and the case where the second process is selected by the selection unit, the coordinate calculation unit performs at least one of the first target portions The shape measuring device according to any one of claims 1 to 4, further comprising a warning presenting unit that presents warning information when three-dimensional coordinates are not calculated. A coordinate number setting unit configured to set the number of three-dimensional coordinates of a first target portion necessary to specify the reference plane when the second process is selected by the selection unit,
When the second process is selected by the selection unit and the number of three-dimensional coordinates calculated by the coordinate calculation unit is equal to or more than the number set by the coordinate number setting unit, the reference surface identification unit The shape measuring device according to any one of claims 1 to 5, wherein the reference plane is specified based on the calculated three-dimensional coordinates. When the coordinates of the at least one first target portion are not calculated by the coordinate calculation unit, an alternative portion of the measurement area to be substituted for the first target portion for which the coordinates are not calculated is specified and specified. The shape measurement device according to any one of claims 1 to 6, further comprising an alternative presentation unit that presents the user with the selected alternative portion. The drive control unit is configured to substitute the measurement area as a substitute for the first target portion for which the coordinates were not calculated when the coordinates of the at least one first target portion were not calculated by the coordinate calculation unit. Control the deflection unit so that light is emitted to the part;
The shape measurement device according to any one of claims 1 to 6, wherein the coordinate calculation unit calculates three-dimensional coordinates of the alternative portion.

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