JP2021535407A - 少なくとも１つの物体の位置を決定する測定ヘッド - Google Patents

少なくとも１つの物体の位置を決定する測定ヘッド Download PDF

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Publication number
JP2021535407A
JP2021535407A JP2021534824A JP2021534824A JP2021535407A JP 2021535407 A JP2021535407 A JP 2021535407A JP 2021534824 A JP2021534824 A JP 2021534824A JP 2021534824 A JP2021534824 A JP 2021534824A JP 2021535407 A JP2021535407 A JP 2021535407A
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JP
Japan
Prior art keywords
optical
fiber
measuring head
light
sensor
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2021534824A
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English (en)
Japanese (ja)
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JP2021535407A5 (enExample
Inventor
モハン オイゲン，セラル
ゼント，ロベルト
ブルーダー，イングマル
Original Assignee
トリナミクス ゲゼルシャフト ミット ベシュレンクテル ハフツング
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Application filed by トリナミクス ゲゼルシャフト ミット ベシュレンクテル ハフツング filed Critical トリナミクス ゲゼルシャフト ミット ベシュレンクテル ハフツング
Publication of JP2021535407A publication Critical patent/JP2021535407A/ja
Publication of JP2021535407A5 publication Critical patent/JP2021535407A5/ja
Pending legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/481—Constructional features, e.g. arrangements of optical elements
    • G01S7/4818—Constructional features, e.g. arrangements of optical elements using optical fibres
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/026—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring distance between sensor and object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/06—Systems determining position data of a target
    • G01S17/08—Systems determining position data of a target for measuring distance only
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/06—Systems determining position data of a target
    • G01S17/42—Simultaneous measurement of distance and other co-ordinates
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/88—Lidar systems specially adapted for specific applications
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/481—Constructional features, e.g. arrangements of optical elements
    • G01S7/4811—Constructional features, e.g. arrangements of optical elements common to transmitter and receiver
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/481—Constructional features, e.g. arrangements of optical elements
    • G01S7/4817—Constructional features, e.g. arrangements of optical elements relating to scanning
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/103—Scanning systems having movable or deformable optical fibres, light guides or waveguides as scanning elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/02—Optical fibres with cladding with or without a coating
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/36—Mechanical coupling means
    • G02B6/3616—Holders, macro size fixtures for mechanically holding or positioning fibres, e.g. on an optical bench
    • G02B6/3624—Fibre head, e.g. fibre probe termination

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Electromagnetism (AREA)
  • Optics & Photonics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
JP2021534824A 2018-08-24 2019-08-23 少なくとも１つの物体の位置を決定する測定ヘッド Pending JP2021535407A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP18190749.4 2018-08-24
EP18190749 2018-08-24
PCT/EP2019/072622 WO2020039084A1 (en) 2018-08-24 2019-08-23 A measurement head for determining a position of at least one object

Publications (2)

Publication Number Publication Date
JP2021535407A true JP2021535407A (ja) 2021-12-16
JP2021535407A5 JP2021535407A5 (enExample) 2022-08-30

Family

ID=63405075

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021534824A Pending JP2021535407A (ja) 2018-08-24 2019-08-23 少なくとも１つの物体の位置を決定する測定ヘッド

Country Status (6)

Country Link
US (1) US20210364610A1 (enExample)
EP (1) EP3841351A1 (enExample)
JP (1) JP2021535407A (enExample)
KR (1) KR20210046044A (enExample)
CN (1) CN113015882A (enExample)
WO (1) WO2020039084A1 (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102711559B1 (ko) 2017-11-17 2024-09-30 트리나미엑스 게엠베하 적어도 하나의 대상체의 위치를 결정하는 검출기
DE102018128962A1 (de) * 2018-11-19 2020-05-20 Rheinmetall Waffe Munition Gmbh Verfahren zur Bestimmung der Position eines Objektes, Vorrichtung zur Bestimmung der Position eines Objektes und System
US20240263937A1 (en) 2021-07-02 2024-08-08 Trinamix Gmbh Measurement head
US20230023043A1 (en) * 2021-07-21 2023-01-26 Waymo Llc Optimized multichannel optical system for lidar sensors
CN114413750B (zh) * 2021-12-01 2023-09-15 广西交科集团有限公司 基于激光散射光斑的定位传感器、定位系统及定位方法
US20250306467A1 (en) * 2024-04-02 2025-10-02 Taiwan Semiconductor Manufacturing Company, Ltd. Lithographic apparatus, inspection method, and method for performing lithography process
CN118688915B (zh) * 2024-07-19 2024-12-31 烟台新药创制山东省实验室 一种激光共聚焦光路中单模光纤耦合装置及方法

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005287900A (ja) * 2004-04-01 2005-10-20 Hamamatsu Univ School Of Medicine 内視鏡
JP2013186808A (ja) * 2012-03-09 2013-09-19 Lintec Corp タッチパネル部材貼付用粘着剤、タッチパネル部材貼付用粘着シート、及びタッチパネル装置
US20160015259A1 (en) * 2014-07-16 2016-01-21 Microcube, Llc Minimally invasive access channels into bodily regions
JP2016015248A (ja) * 2014-07-02 2016-01-28 株式会社豊田自動織機 蓄電装置ユニット
US20180084981A1 (en) * 2016-09-23 2018-03-29 Canon Usa Inc. Spectrally encoded endoscopy apparatus and methods
WO2018091640A2 (en) * 2016-11-17 2018-05-24 Trinamix Gmbh Detector for optically detecting at least one object

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6786099B2 (en) * 2002-02-14 2004-09-07 Kla-Tencor Technologies Corporation Surface photo-acoustic film measurement device and technique
CN102770810B (zh) * 2010-02-23 2016-01-06 Asml荷兰有限公司 光刻设备和器件制造方法
WO2012110924A1 (en) 2011-02-15 2012-08-23 Basf Se Detector for optically detecting at least one object
GB2501542A (en) * 2012-04-28 2013-10-30 Bae Systems Plc Abnormal behaviour detection in video or image surveillance data
CA2890066C (en) * 2012-11-01 2021-11-09 Sio2 Medical Products, Inc. Coating inspection method
KR102088685B1 (ko) 2012-12-19 2020-03-13 바스프 에스이 적어도 하나의 물체를 광학적으로 검출하기 위한 검출기
US9989623B2 (en) 2013-06-13 2018-06-05 Basf Se Detector for determining a longitudinal coordinate of an object via an intensity distribution of illuminated pixels
US9593941B2 (en) 2014-09-24 2017-03-14 Hood Technology Corporation Clearance detection system and method using frequency identification

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005287900A (ja) * 2004-04-01 2005-10-20 Hamamatsu Univ School Of Medicine 内視鏡
JP2013186808A (ja) * 2012-03-09 2013-09-19 Lintec Corp タッチパネル部材貼付用粘着剤、タッチパネル部材貼付用粘着シート、及びタッチパネル装置
JP2016015248A (ja) * 2014-07-02 2016-01-28 株式会社豊田自動織機 蓄電装置ユニット
US20160015259A1 (en) * 2014-07-16 2016-01-21 Microcube, Llc Minimally invasive access channels into bodily regions
US20180084981A1 (en) * 2016-09-23 2018-03-29 Canon Usa Inc. Spectrally encoded endoscopy apparatus and methods
WO2018091640A2 (en) * 2016-11-17 2018-05-24 Trinamix Gmbh Detector for optically detecting at least one object

Also Published As

Publication number Publication date
KR20210046044A (ko) 2021-04-27
EP3841351A1 (en) 2021-06-30
US20210364610A1 (en) 2021-11-25
CN113015882A (zh) 2021-06-22
WO2020039084A1 (en) 2020-02-27

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