JP2021519700A5 - - Google Patents

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Publication number
JP2021519700A5
JP2021519700A5 JP2020552898A JP2020552898A JP2021519700A5 JP 2021519700 A5 JP2021519700 A5 JP 2021519700A5 JP 2020552898 A JP2020552898 A JP 2020552898A JP 2020552898 A JP2020552898 A JP 2020552898A JP 2021519700 A5 JP2021519700 A5 JP 2021519700A5
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JP
Japan
Prior art keywords
mass flow
flow controller
controller assembly
housing
housing portion
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Application number
JP2020552898A
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English (en)
Japanese (ja)
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JP7382339B2 (ja
JP2021519700A (ja
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Priority claimed from PCT/US2019/024583 external-priority patent/WO2019191428A1/en
Publication of JP2021519700A publication Critical patent/JP2021519700A/ja
Publication of JP2021519700A5 publication Critical patent/JP2021519700A5/ja
Application granted granted Critical
Publication of JP7382339B2 publication Critical patent/JP7382339B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2020552898A 2018-03-30 2019-03-28 Ｍｅｍｓに基づくコリオリ質量流コントローラ Active JP7382339B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201862650657P 2018-03-30 2018-03-30
US62/650,657 2018-03-30
PCT/US2019/024583 WO2019191428A1 (en) 2018-03-30 2019-03-28 Mems-based coriolis mass flow controller

Publications (3)

Publication Number Publication Date
JP2021519700A JP2021519700A (ja) 2021-08-12
JP2021519700A5 true JP2021519700A5 (cg-RX-API-DMAC7.html) 2023-08-17
JP7382339B2 JP7382339B2 (ja) 2023-11-16

Family

ID=68060516

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2020552898A Active JP7382339B2 (ja) 2018-03-30 2019-03-28 Ｍｅｍｓに基づくコリオリ質量流コントローラ

Country Status (4)

Country Link
US (1) US11860016B2 (cg-RX-API-DMAC7.html)
JP (1) JP7382339B2 (cg-RX-API-DMAC7.html)
KR (1) KR102662822B1 (cg-RX-API-DMAC7.html)
WO (1) WO2019191428A1 (cg-RX-API-DMAC7.html)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110987916B (zh) * 2019-12-17 2021-01-05 中国科学院半导体研究所 一种微流控芯片及其检测方法
US12417899B2 (en) * 2022-03-16 2025-09-16 Applied Materials, Inc. Integrated showerhead
US12601621B2 (en) 2022-03-30 2026-04-14 Applied Materials, Inc. Methods of manufacturing plasma generating cells for a plasma source

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6526839B1 (en) * 1998-12-08 2003-03-04 Emerson Electric Co. Coriolis mass flow controller and capacitive pick off sensor
US6418954B1 (en) * 2001-04-17 2002-07-16 Mks Instruments, Inc. System and method for dividing flow
US7921737B2 (en) * 2008-02-11 2011-04-12 Integrated Sensing Systems, Inc. Microfluidic device and method of operation
US8272274B2 (en) * 2008-02-11 2012-09-25 Integrated Sensing Systems Inc. Microfluidic device and methods of operation and making
KR101336868B1 (ko) * 2012-08-22 2013-12-05 한국에너지기술연구원 마이크로웨이브 플라즈마를 이용한 바이오디젤 생산 부산물로부터 합성가스 급속 생산 장치 및 방법
US10114387B2 (en) 2013-03-12 2018-10-30 Illinois Tool Works Inc. Mass flow controller with near field communication and/or USB interface to receive power from external device
US9454158B2 (en) * 2013-03-15 2016-09-27 Bhushan Somani Real time diagnostics for flow controller systems and methods
US10214817B2 (en) * 2013-10-16 2019-02-26 The Board Of Trustees Of The University Of Illinois Multi-metal films, alternating film multilayers, formation methods and deposition system
JP6481282B2 (ja) * 2014-08-15 2019-03-13 アルメックスコーセイ株式会社 気体流量制御装置および気体流量制御弁

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