JP2021190550A - Ultrasonic cleaning nozzle unit and ultrasonic cleaning device - Google Patents

Abstract

To sufficiently remove dust each having a different size or an adhesive force in a short time when a cleaned material is cleaned by ejecting an ultrasonic cleaning water.SOLUTION: An ultrasonic cleaning nozzle unit 2 comprises: a first cleaning nozzle 21 ejecting an ultrasonic cleaning water; and a second cleaning nozzle 22 ejecting the ultrasonic cleaning water of a frequency smaller than that of the ultrasonic cleaning water ejected by the first cleaning nozzle 21. The first cleaning nozzle 21 comprises: a first dome type ultrasonic diaphragm 211; a first case 214 having a first open in which a center is matched to a center of the first ultrasonic diaphragm 211, and supports an outer peripheral edge of the first ultrasonic diaphragm 211; and a first supply port 218 supplying a cleaning water into the first case 214. The second cleaning nozzle 22 comprises: a second dome type ultrasonic diaphragm 222; a second case 224 having a second open in which the center is matched to the center of the second ultrasonic diaphragm 222, and supports the outer peripheral edge of the second ultrasonic diaphragm 222; and a second supply port 228 supplying the cleaning water into the second case 224.SELECTED DRAWING: Figure 2

Description

The present invention relates to an ultrasonic cleaning nozzle unit for cleaning an object to be cleaned such as a semiconductor wafer, and an ultrasonic cleaning device.

For example, as disclosed in Patent Document 1 or Patent Document 2, the ultrasonic cleaning nozzle for cleaning an object to be cleaned sprays cleaning water to which ultrasonic vibration is applied onto the object to be cleaned, and ultrasonic vibration is applied. By shaking the dust adhering to the surface of the object to be cleaned and separating the dust from the surface for cleaning, the cleaning efficiency is improved.

Japanese Unexamined Patent Publication No. 2013-158664 Japanese Unexamined Patent Publication No. 2012-096464

For example, when the object to be cleaned is a wafer ground with a grinding wheel, large grinding debris and small grinding debris generated by grinding are mixed and adhered to the surface to be ground of the wafer as dust. Therefore, in the cleaning water to which ultrasonic vibration of one frequency is applied, dust may remain on the surface to be cleaned (surface to be ground) of the wafer.
As a countermeasure, the wafer is washed twice in stages using washing water propagating at least two different frequencies. However, there is a problem that the cleaning time becomes long. Further, since the different frequencies are selected from the frequency bands corresponding to one ultrasonic diaphragm arranged inside the ultrasonic cleaning nozzle, it may not be possible to correspond to the size of dust.

Therefore, the ultrasonic cleaning nozzle equipped with the ultrasonic cleaning nozzle that cleans the object to be cleaned while spraying the cleaning water to which ultrasonic vibration is applied, and the ultrasonic cleaning device equipped with the ultrasonic cleaning nozzle are dusts of different sizes adhering to the object to be cleaned. Or, there is a problem that it is desired to sufficiently remove dust having different adhesive strength in a short time.

INDUSTRIAL APPLICABILITY The present invention for solving the above problems is an ultrasonic cleaning nozzle unit that injects cleaning water to which ultrasonic vibration is applied to an object to be cleaned, and injects at least cleaning water to which ultrasonic vibration is applied. The first cleaning nozzle is provided with a first cleaning nozzle and a second cleaning nozzle that ejects cleaning water to which ultrasonic vibration having a frequency smaller than the ultrasonic vibration applied to the cleaning water injected by the first cleaning nozzle is applied. 1 The cleaning nozzle has a dome-shaped first ultrasonic vibration plate and a first opening whose center is aligned with the center of the concave surface of the first ultrasonic vibration plate, and supports the outer peripheral edge of the first ultrasonic vibration plate. A first case is provided, and a first supply port is formed through the side wall of the first case to supply washing water into the first case, and the second washing nozzle is a dome-shaped second ultrasonic wave. A second case having a vibrating plate, a second opening centered on the center of the concave surface of the second ultrasonic vibrating plate, and supporting the outer peripheral edge of the second ultrasonic vibrating plate, and a side wall of the second case. It is an ultrasonic cleaning nozzle unit provided with a second supply port which is formed through the second case and supplies cleaning water into the second case.

Further, the present invention for solving the above-mentioned problems is an ultrasonic cleaning device provided with the ultrasonic cleaning nozzle unit for cleaning an object to be cleaned, and a holding means for holding the object to be cleaned by a holding portion and the holding. An ultrasonic cleaning device including means and a moving means for moving the ultrasonic cleaning nozzle unit relatively in a direction parallel to the surface to be cleaned of an object to be cleaned held by the holding portion.

In the ultrasonic cleaning apparatus according to the present invention, it is preferable that the ultrasonic cleaning nozzle unit arranges the first cleaning nozzle and the second cleaning nozzle side by side in the moving direction of the object to be cleaned.

In the ultrasonic cleaning apparatus according to the present invention, it is preferable that the ultrasonic cleaning nozzle unit arranges the first cleaning nozzles side by side in the moving direction of the object to be cleaned, lower than the second cleaning nozzle.

In the ultrasonic cleaning device according to the present invention, the moving means includes a rotating means for rotating the object to be cleaned around the center of the object to be cleaned held by the holding portion, and the ultrasonic cleaning nozzle unit as the object to be cleaned. It is preferable to provide a sliding means that intersects the direction of rotation of the object and moves the object to be cleaned in a direction parallel to the surface to be cleaned.

In the ultrasonic cleaning nozzle unit, it is preferable that the first cleaning nozzle and the second cleaning nozzle are arranged side by side in the moving direction moved by the sliding means.

The ultrasonic cleaning nozzle unit according to the present invention, which injects cleaning water to which ultrasonic vibration is applied to an object to be cleaned, has at least a first cleaning nozzle for injecting cleaning water to which ultrasonic vibration is applied and a first cleaning. The first cleaning nozzle is provided with a second cleaning nozzle that ejects cleaning water to which ultrasonic vibration having a frequency smaller than the ultrasonic vibration applied to the cleaning water injected by the nozzle is applied, and the first cleaning nozzle is a dome-shaped first super Penetrating through the side wall of the first case and the first case, which has a first opening aligned with the center of the concave surface of the first ultrasonic vibration plate and the outer peripheral edge of the first ultrasonic vibration plate, and supports the outer peripheral edge of the first ultrasonic vibration plate. It is provided with a first supply port that is formed and supplies cleaning water into the first case, and the second cleaning nozzle is centered on a dome-shaped second ultrasonic vibration plate and a concave surface of the second ultrasonic vibration plate. A second case having a matching second opening and supporting the outer peripheral edge of the second ultrasonic vibrating plate, and a second supply port formed through the side wall of the second case to supply wash water into the second case. By providing, the dust of different sizes or the dust having different adhesive force adhering to the object to be cleaned can be removed in a short time, that is, for example, in a single cleaning operation of the ultrasonic cleaning nozzle unit for the object to be cleaned. Is possible.

Further, the ultrasonic cleaning device according to the present invention is provided with the ultrasonic cleaning nozzle unit, so that dust of different sizes or dust having different adhesive force adhering to the object to be cleaned can be removed, for example, an ultrasonic cleaning nozzle unit. It is possible to remove the object to be cleaned with a single cleaning operation.

In the ultrasonic cleaning apparatus according to the present invention, the ultrasonic cleaning nozzle unit arranges the first cleaning nozzle and the second cleaning nozzle side by side in the moving direction of the object to be cleaned, thereby cleaning the dust adhering to the object to be cleaned efficiently. Can be improved.

Further, in the ultrasonic cleaning apparatus according to the present invention, the ultrasonic cleaning nozzle unit arranges the first cleaning nozzles side by side below the second cleaning nozzle in the moving direction of the object to be cleaned, thereby forming the object to be cleaned. It is possible to further improve the cleaning efficiency of the adhering dust.

In the ultrasonic cleaning apparatus according to the present invention, the moving means is a rotating means for rotating the object to be cleaned around the center of the object to be cleaned held by the holding portion, and the ultrasonic cleaning nozzle unit is the rotation direction of the object to be cleaned. By providing a sliding means that intersects with and moves the object to be cleaned in a direction parallel to the surface to be cleaned, dust of different sizes or dust having different adhesive force adhering to the object to be cleaned can be removed, for example, ultrasonic waves. The cleaning nozzle unit can be removed by a single cleaning operation on the object to be cleaned.

In the ultrasonic cleaning nozzle unit, the first cleaning nozzle and the second cleaning nozzle are arranged side by side in the moving direction moved by the sliding means, so that it is possible to improve the cleaning efficiency of dust adhering to the object to be cleaned. Become.

It is a perspective view which shows an example of the ultrasonic cleaning apparatus of Embodiment 1, which includes the ultrasonic cleaning nozzle unit. It is sectional drawing explaining the state which the upper surface of the object to be cleaned is cleaned by the ultrasonic cleaning apparatus of Embodiment 1. FIG. It is sectional drawing explaining the state which the upper surface of the object to be cleaned is cleaned by the ultrasonic cleaning apparatus of Embodiment 2 provided with the ultrasonic cleaning nozzle unit.

(Embodiment 1)
FIG. 1 is a perspective view showing an example of an ultrasonic cleaning device 1 having an ultrasonic cleaning nozzle unit 2 according to the present invention and cleaning an object to be cleaned 80. In the ultrasonic cleaning device 1 of the first embodiment, at least the holding means 3 for holding the object to be cleaned 80 by the holding portion 30, the holding means 3 and the ultrasonic cleaning nozzle unit 2 are held by the holding portion 30. A moving means 4 for relatively moving the cleaning object 80 in a direction parallel to the surface to be cleaned 802 (horizontal X-axis and Y-axis plane direction in FIG. 1) is provided.

The object to be cleaned 80 shown in FIG. 1 is, for example, a circular plate-shaped semiconductor wafer made of a silicon base material or the like, and has a surface to be cleaned 802 on which a substantially flat upper surface in FIG. 1 is cleaned. The surface to be cleaned 802 has, for example, already been ground, and dust (grinding dust) of different sizes and adhesive strength (not shown) is attached to the surface to be cleaned. On the surface 801 of the object to be cleaned 80 facing downward in FIG. 1, for example, a plurality of devices are formed, and a protective tape (not shown) is attached to protect the surface 801.
The object to be cleaned 80 may be an asslice wafer or the like, which has no device formed and is cut out from a silicon ingot or peeled off.

In the example shown in FIG. 1, the holding means 3 has a circular outer shape, is a porous plate, and includes a holding portion 30 that sucks and holds the object to be cleaned 80, and a frame body 31 that supports the holding portion 30. .. The holding portion 30 communicates with a suction source (not shown), and the suction force generated by the suction source sucking is the exposed surface (upper surface) of the holding portion 30, and the holding surface 302 formed flush with the frame 31. The holding portion 30 can suck and hold the object to be cleaned 80 on the holding surface 302.

In addition, for example, when the object to be cleaned 80 is a work set supported by a tape having a diameter larger than that of the object to be cleaned 80 attached to the surface 801 and an annular frame attached to the tape, it is held. The means 3 may include, for example, a pendulum type fixed clamp or a mechanical clamp as the holding portion. Then, by fixing the annular frame with the holding portions of various clamps, the object to be cleaned 80 may be held via the annular frame.

In the present embodiment, the moving means 4 is a rotating means 42 that rotates the object to be cleaned 80 around the center of the object to be cleaned 80 held by the holding portion 30, and an ultrasonic cleaning nozzle unit 2 of the object to be cleaned 80. A slide means 44 that intersects the rotation direction and moves in the horizontal direction (X-axis Y-axis plane direction) that is parallel to the surface to be cleaned 802 of the object to be cleaned 80 is provided.

The rotating means 42 arranged on the lower side of the holding means 3 is composed of a spindle 420 whose upper end is fixed to the lower surface of the frame 31 and whose axial direction is the Z-axis direction, a motor, or the like, and is connected to the lower end side of the spindle 420. It is provided with at least a rotational drive source 423. As the rotation drive source 423 rotates the spindle 420, the holding means 3 also rotates.

For example, the holding means 3 may be movable in the vertical direction by an elevating means (not shown) including an air cylinder or the like. In the elevating means (not shown), the holding means 3 is raised to position the holding means 3 at the loading / unloading height position of the object to be cleaned 80, and the holding means 3 holding the object to be cleaned 80 is lowered. , The holding means 3 is positioned at the cleaning work height position in the casing 12, which will be described later.

The holding means 3 is housed in, for example, the internal space of the casing 12 shown in FIG. In addition, in FIG. 1, a part of the outer wall 120 and the like of the casing 12 is cut out so that the inside can be grasped. The casing 12 includes an outer wall 120 that surrounds the holding means 3, and a bottom plate 122 that is integrally connected to the lower portion of the outer wall 120 and has an insertion hole in the center through which the spindle 420 is inserted.

The casing 12 is supported by a plurality of legs 124 whose upper ends are fixed to the lower surface of the bottom plate 122. A drainage port (not shown) is formed through the bottom plate 122 in the thickness direction, and a drain hose or the like for discharging the used washing water to the outside of the casing 12 is connected to the drainage port.

In the present embodiment, the slide means 44 swivels and moves the ultrasonic cleaning nozzle unit 2 in the horizontal direction. Specifically, on the bottom plate 122, a side view inverted L-shaped swivel arm 440 constituting the slide means 44 is erected via a bearing (not shown), and on the tip end side of the swivel arm 440, The ultrasonic cleaning nozzle unit 2 is arranged. A nozzle motor 441 is connected to the lower end side of the swivel arm 440.

The ultrasonic cleaning nozzle unit 2 according to the present invention, which injects cleaning water to which ultrasonic vibration is applied onto the object to be cleaned 80 to perform cleaning, includes at least a first cleaning nozzle 21 for injecting cleaning water to which ultrasonic vibration is applied. A second cleaning nozzle 22 for injecting cleaning water to which an ultrasonic vibration having a frequency smaller than that applied to the cleaning water injected by the first cleaning nozzle 21 is applied is provided.

The first cleaning nozzle 21 shown in FIGS. 1 and 2 includes a dome-shaped first ultrasonic diaphragm 211 in which the concave surface 2110 which is a radial curved surface faces the −Z direction side. The first ultrasonic diaphragm 211 is composed of, for example, a piezo element which is a kind of ceramics, but is not limited thereto.

A central electrode 2130 is attached to the center of the upper surface 213 of the first ultrasonic vibrating plate 211, and an AC voltage is applied to the first ultrasonic vibrating plate 211 by applying an AC voltage via the central electrode 2130 and wiring. A first ultrasonic oscillator 91 composed of a high-frequency power supply or the like to be supplied is connected.

For example, a first brim portion 2115 is formed on the outer peripheral portion of the first ultrasonic vibrating plate 211 so as to horizontally project outward in the radial direction, and the first brim portion 2115 is the first ultrasonic vibrating plate 211. It becomes the outer peripheral edge of. The first case has a first opening 2140 in which the entire circumference of the first brim portion 2115, which is the outer peripheral edge of the first ultrasonic diaphragm 211, has a center aligned with the center of the concave surface 2110 of the first ultrasonic diaphragm 211. Supported by 214.

The first case 214 is formed in a celestial cylindrical shape, and a swivel arm 440 is fixed to the upper surface of the top plate 2148.
A first fixing plate 2116 for hollowly fixing the first ultrasonic vibration plate 211 in the first case 214 is attached to the first brim portion 2115 so as to project radially outward from the outer peripheral portion. In the present embodiment, the first fixing plate 2116 is formed in an annular plate shape and is fixed to the inner surface of the side wall of the first case 214. The inside of the first case 214 is a room where the washing water above the first ultrasonic diaphragm 211 does not enter due to the first ultrasonic diaphragm 211 and the first fixing plate 2116, and the first ultrasonic diaphragm. It is divided into a room where the washing water is stored on the lower side of 211.

For example, a plurality of electrodes 2118 are attached to the upper surface side of the first brim portion 2115, which is the outer peripheral edge of the first ultrasonic diaphragm 211, at equal intervals in the circumferential direction, via the electrodes 2118 and wiring. The first ultrasonic oscillator 91 is connected. Therefore, the first ultrasonic diaphragm 211 vibrates as a whole by the first ultrasonic oscillator 91.

The bottom plate 2144 of the first case 214 is formed in a cylindrical shape whose diameter is gradually reduced toward the −Z direction, for example. The first opening 2140 is formed through the lower end thereof.

A first supply port 218 for supplying water to the lower side of, for example, the first ultrasonic diaphragm 211 in the first case 214 is formed through the side wall of the first case 214, and the first supply port 218 is formed. Through a flexible resin tube or the like, it is communicated with a washing water supply source 99 which is composed of a pump or the like and can send, for example, pure water as washing water.

The second cleaning nozzle 22 shown in FIGS. 1 and 2 includes a dome-shaped second ultrasonic diaphragm 222 in which the concave surface 2220, which is a radial curved surface, faces the −Z direction side. The second ultrasonic diaphragm 222 is composed of, for example, a piezo element which is a kind of ceramics, but is not limited thereto.

A central electrode 2230 is attached to the center of the upper surface 223 of the second ultrasonic vibrating plate 222, and an AC voltage is applied to the second ultrasonic vibrating plate 222 via the central electrode 2230 and wiring. A second ultrasonic oscillator 92 composed of a high-frequency power supply or the like to be supplied is connected.

For example, a second brim portion 2225 is formed on the outer peripheral portion of the second ultrasonic vibrating plate 222 so as to horizontally project outward in the radial direction, and the second brim portion 2225 is formed on the second ultrasonic vibrating plate 222. It becomes the outer peripheral edge of. The second case has a second opening 2240 in which the entire circumference of the second brim portion 2225, which is the outer peripheral edge of the second ultrasonic diaphragm 222, has a center aligned with the center of the concave surface 2220 of the second ultrasonic diaphragm 222. Supported by 224.

The second case 224 is formed in a celestial cylindrical shape, and the swivel arm 440 is fixed to the upper surface of the top plate 2247.
A second fixing plate 2226 for hollowly fixing the second ultrasonic vibration plate 222 in the second case 224 is attached to the second brim portion 2225 so as to project radially outward from the outer peripheral portion. In the present embodiment, the second fixing plate 2226 is formed in an annular plate shape and is fixed to the inner surface of the side wall of the second case 224. The inside of the second case 224 is a room where the washing water above the second ultrasonic diaphragm 222 does not enter due to the second ultrasonic diaphragm 222 and the second fixing plate 2226, and the second ultrasonic diaphragm. It is divided into a room where the washing water is stored on the lower side of 222.

For example, a plurality of electrodes 2216 are attached to the upper surface side of the second brim portion 2225, which is the outer peripheral edge of the second ultrasonic diaphragm 222, at equal intervals in the circumferential direction, via the electrodes 2216 and wiring. The second ultrasonic oscillator 92 is connected. Therefore, the second ultrasonic diaphragm 222 vibrates as a whole by the second ultrasonic oscillator 92.

A second supply port 228 for supplying water to the lower side of, for example, the second ultrasonic diaphragm 222 in the second case 224 is formed through the side wall of the second case 224, and the second supply port 228 is formed. It communicates with the washing water supply source 99 via a flexible resin tube or the like.

The bottom plate 2244 of the second case 224 is formed in a cylindrical shape whose diameter is gradually reduced toward the −Z direction, for example. A second opening 2240 is formed through the lower end thereof.

For example, as in the present embodiment, the second case 224, the second ultrasonic diaphragm 222, and the second opening 2240 constituting the second cleaning nozzle 22 are the first case 214 constituting the first cleaning nozzle 21. The size, thickness, and the like may be set larger than those of the first ultrasonic diaphragm 211 and the first opening 1240.

Hereinafter, a case where the object to be cleaned 80 is cleaned by using the ultrasonic cleaning device 1 shown in FIGS. 1 and 2 will be described.
First, the object to be cleaned 80 is placed on the holding surface 302 so that the center of the object to be cleaned 80 substantially coincides with the center of the holding surface 302 of the holding means 3. Then, the suction force generated by the operation of the suction source (not shown) is transmitted to the holding surface 302, so that the holding means 3 sucks and holds the object to be cleaned 80.

After that, as shown in FIG. 2, the rotating means 42 rotates the holding means 3 in the counterclockwise direction when viewed from, for example, the + Z direction. Further, when the nozzle motor 441 shown in FIG. 2 swivels the swivel arm 440, the ultrasonic cleaning nozzle unit 2 is moved above the object to be cleaned 80 sucked and held from the retracted position outside the holding means 3. ..

Pressurized water is sent out from the cleaning water supply source 99, and the water passes through the resin tube and the first ultrasonic diaphragm 211 in the first case 214 of the first cleaning nozzle 21 of the ultrasonic cleaning nozzle unit 2. It is temporarily stored under the second ultrasonic diaphragm 222 in the second case 224 of the second cleaning nozzle 22. Then, the water pressure in the first case 214 rises, the washing water is jetted downward from the first opening 2140, and the water pressure in the second case 224 rises, and the washing water falls downward from the second opening 2240. Is jetted toward. By continuing to supply water from the washing water supply source 99, a predetermined amount of washing water is always stored in the first case 214 and the second case 224.

Further, the first ultrasonic oscillator 91 supplies ultrasonic vibration to the first ultrasonic vibration plate 211. That is, the high-frequency power supply of the first ultrasonic oscillator 91 repeatedly turns on and off the application of voltage at a predetermined frequency (for example, 1 MHz to 10 MHz), so that the first ultrasonic diaphragm 211 expands and contracts in the vertical direction. To generate. Then, the stretching motion becomes mechanical ultrasonic vibration. As a result, ultrasonic vibration is propagated from the concave surface 2110, which is gently recessed when viewed from the first opening 2140 side, to the washing water stored in the first case 214. Further, the ultrasonic vibration propagated from the concave surface 2110 to the washing water concentrates toward the first opening 2140.
Further, the second ultrasonic oscillator 92 supplies the second ultrasonic vibration plate 222 with ultrasonic vibration having a frequency of, for example, 20 kHz to 1 MHz, and the ultrasonic vibration propagated from the concave surface 2220 to the washing water is directed toward the second opening 2240. concentrate.

The curvature of the concave surface 2110 (concave surface 2220 of the second ultrasonic vibration plate 222) of the first ultrasonic diaphragm 211 and the distance from the concave surface 2110 (concave surface 2220) to the first opening 2140 (second opening 2240) are appropriately set. Therefore, the ultrasonic vibration generated from the concave surface 2110 (concave surface 2220) and propagated to the washing water is, for example, several millimeters to several tens of millimeters downward from the first opening 2140 (second opening 2240). The surface to be cleaned 802 of the object to be cleaned 80 positioned at a predetermined position within the range can be focused and concentrated at this position. Then, the cleaning water jetted from the first opening 2140 of the first cleaning nozzle 21 toward the outside is injected as, for example, ultrasonic cleaning water to which ultrasonic vibration having a frequency of 1 MHz to 10 MHz is applied, and the first. 2 The cleaning water ejected from the second opening 2240 of the cleaning nozzle 22 to the outside is an ultrasonic wave having a frequency smaller than the ultrasonic vibration applied to the cleaning water ejected by the first cleaning nozzle 21 at 20 kHz to 1 MHz. The surface to be cleaned 802 of the object to be cleaned 80 can be cleaned by spraying it as ultrasonic cleaning water to which vibration is applied.

The first ultrasonic vibration plate 211 (second ultrasonic vibration plate 222) that generates ultrasonic vibration by the first fixing plate 2116 (second fixing plate 2226) shown in FIG. 2 is the first case 214 (second). Since it is not directly held by the case 224), the first ultrasonic vibrating plate 211 (second ultrasonic vibrating plate 222) easily vibrates, and the first fixing plate 2116 (2116) (effectively for washing water). It is possible to propagate the ultrasonic vibration with a large amplitude amplified by the second fixing plate 2226).

As a result, dust such as processing debris of different sizes and adhesive strength adhering to the surface to be cleaned 802 of the object to be cleaned 80 is subjected to ultrasonic vibration having a frequency of 1 MHz to 10 MHz, and ultrasonic cleaning water and frequency. Is vibrated by ultrasonic cleaning water to which ultrasonic vibration of 20 kHz to 1 MHz is applied, and is separated from the surface to be cleaned 802. It flows radially outward on the surface to be cleaned 802 of the object to be cleaned 80, and flows down from the holding means 3 onto the casing 12 shown in FIG. Further, for example, the ultrasonic cleaning nozzle unit 2 is swiveled so as to pass above the center of the object to be cleaned 80 and reciprocate above the object to be cleaned 80 at a predetermined angle in the direction of arrow R1 shown in FIG. By doing so, the entire surface of the surface to be cleaned 802 of the object to be cleaned 80 is cleaned with ultrasonic cleaning water.

In the ultrasonic cleaning device 1 of the first embodiment, the configuration of the ultrasonic cleaning nozzle unit 2 is not limited to the above example. For example, in the ultrasonic cleaning nozzle unit 2 shown in FIG. 1, the first cleaning nozzle 21 and the second cleaning nozzle 22 move in the moving direction in which the first cleaning nozzle 21 and the second cleaning nozzle 22 move by the sliding means 44. They may be arranged side by side. That is, the first cleaning nozzle 21 and the second cleaning nozzle 22 may be arranged side by side in the direction of arrow R1 on the tip end side of the swivel arm 440 shown in FIG.

(Embodiment 2)
FIG. 3 is a perspective view showing an example of an ultrasonic cleaning device 11 provided with the ultrasonic cleaning nozzle unit 2 according to the present invention described above and cleaning the object to be cleaned 80. The ultrasonic cleaning device 11 of the second embodiment has at least a holding means 5 for holding the object to be cleaned 80 on a holding surface 500 which is an upper surface of a holding portion 50 such as a porous member, a holding means 5, and an ultrasonic cleaning nozzle unit. 2 is provided with a moving means 6 for moving 2 and 2 in the X-axis direction, which is a direction parallel to the surface to be cleaned 802 of the object to be cleaned 80 held by the holding surface 500.

The moving means 6 shown in FIG. 3 is, for example, an electric slider in which the slider 61 moves linearly on the rail 60 extending in the X-axis direction, but is not limited thereto.
A casing 68 for accommodating the holding means 5 is mounted on the slider 61.

For example, when the object to be cleaned 80 can be handled by an annular frame (not shown) around the holding means 5, clamps for sandwiching and fixing the annular frame are spaced evenly in the circumferential direction as holding portions. A plurality of them may be arranged.

The configuration of the ultrasonic cleaning nozzle unit 2 shown in FIG. 3 arranged above the holding means 5 is substantially the same as that described in the first embodiment. In the second embodiment, the ultrasonic cleaning nozzle unit 2 supported by the support arm 17 extending in the X-axis direction can be reciprocated in the Y-axis direction together with the support arm 17 by the Y-axis moving means 18 such as a ball screw mechanism. It has become.

In the ultrasonic cleaning device 11 of the second embodiment, the ultrasonic cleaning nozzle unit 2 has a configuration in which the first cleaning nozzle 21 and the second cleaning nozzle 22 are arranged side by side in the moving direction (X-axis direction) of the object to be cleaned 80. ing.

Hereinafter, a case where the object to be cleaned 80 is cleaned by using the ultrasonic cleaning device 11 shown in FIG. 3 will be described.
First, the object to be cleaned 80 is placed on the holding surface 500 so that the center of the object to be cleaned 80 substantially coincides with the center of the holding surface 500 of the holding means 5, and then the object to be cleaned 80 is sucked and held. ..

Next, the casing 68 and the holding means 5 are fed at a predetermined feeding speed, for example, in the + X direction. Further, as in the case described in the first embodiment, water is supplied to the ultrasonic cleaning nozzle unit 2 from the cleaning water supply source 99, and the cleaning is ejected from the first opening 2140 of the first cleaning nozzle 21 to the outside. Water is sprayed as, for example, ultrasonic washing water to which ultrasonic vibration having a frequency of 1 MHz to 10 MHz is applied, and washing water sprayed from the second opening 2240 of the second washing nozzle 22 to the outside. The cleaning water injected by the first cleaning nozzle 21 is injected as ultrasonic cleaning water to which ultrasonic vibration having a frequency smaller than the ultrasonic vibration of 20 kHz to 1 MHz is applied, and is passed under each of them to be cleaned. The surface to be cleaned 802 of the object 80 can be cleaned. Here, in the second embodiment, in the ultrasonic cleaning nozzle unit 2, the first cleaning nozzles 21 are arranged side by side in the X-axis direction, which is the moving direction of the object to be cleaned 80, below the second cleaning nozzle 22. In this state, the ultrasonic cleaning water ejected by the second cleaning nozzle 22 comes into contact with the object to be cleaned 80 before the ultrasonic cleaning water ejected from the first cleaning nozzle 21.

As a result, dust such as processing debris of different sizes and adhesive strength adhering to the surface to be cleaned 80 of the object to be cleaned 80 is subjected to ultrasonic vibration having a frequency of 20 kHz to 1 MHz, and ultrasonic cleaning water and frequency. Is vibrated by ultrasonic cleaning water to which ultrasonic vibration of 1 MHz to 10 MHz is applied, is separated from the surface to be cleaned 802, and further flows down from the holding means 5 onto the casing 68.

When the holding means 5 is sent in the + X direction to a predetermined position where the object to be cleaned 80 passes under the first cleaning nozzle 21, the holding means 5 is sent back to the −X direction side. Further, the ultrasonic cleaning nozzle unit 2 is moved in the Y-axis direction by the Y-axis moving means 18, and the cleaning line next to the cleaning line in the + X direction and the ultrasonic cleaning nozzle unit 2 are aligned in the Y-axis direction. Is done. Then, the ultrasonic cleaning of the object to be cleaned 80 is performed in the same manner as before, and the entire surface of the surface to be cleaned 802 of the object to be cleaned 8 is cleaned.
The ultrasonic cleaning of the object to be cleaned 80 may be performed even while the holding means 5 is being moved toward the −X direction.

80: Object to be cleaned 802: Surface to be cleaned 801: Surface 1: Ultrasonic cleaning device according to the first embodiment 3: Holding means 30: Holding portion 302: Holding surface 31: Frame 4: Moving means
42: Rotating means 420: Spindle 423: Rotating drive source 44: Sliding means 440: Swing arm 441: Nozzle motor 2: Ultrasonic cleaning nozzle unit 21: First cleaning nozzle 211: First ultrasonic diaphragm 2115: First brim Part 2116: Electrode 2130: Central electrode 91: First ultrasonic oscillator 214: First case 2148: Top plate 2144: Bottom plate 2140: First opening 218: First supply port 99: Washing water supply source 22: Second washing nozzle 222: 2nd ultrasonic diaphragm 2225: 2nd brim 2216: electrode 2130: center electrode 91: 1st ultrasonic oscillator 224: 2nd case 2247: top plate 2244: bottom plate 2240: 2nd opening 228: 2nd supply mouth
11: Ultrasonic cleaning device of the second embodiment 5: Holding means 50: Holding portion 500: Holding surface 6: Moving means 60: Rail 61: Slider 18: Y-axis moving means

Claims (6)

An ultrasonic cleaning nozzle unit that sprays cleaning water to which ultrasonic vibration is applied onto the object to be cleaned to clean it.
At least the first cleaning nozzle that injects the washing water to which ultrasonic vibration is applied and the cleaning water to which the ultrasonic vibration of a frequency smaller than the ultrasonic vibration applied to the cleaning water injected by the first cleaning nozzle is injected are injected. With a second cleaning nozzle,
The first cleaning nozzle is
A dome-shaped first ultrasonic diaphragm and a first case having a first opening whose center is aligned with the center of the concave surface of the first ultrasonic diaphragm and supporting the outer peripheral edge of the first ultrasonic diaphragm. A first supply port, which is formed through the side wall of the first case and supplies wash water into the first case, is provided.
The second cleaning nozzle is
A dome-shaped second ultrasonic diaphragm and a second case having a second opening whose center is aligned with the center of the concave surface of the second ultrasonic diaphragm and supporting the outer peripheral edge of the second ultrasonic diaphragm. , An ultrasonic cleaning nozzle unit including a second supply port formed through the side wall of the second case and supplying cleaning water into the second case. An ultrasonic cleaning device provided with the ultrasonic cleaning nozzle unit according to claim 1 for cleaning an object to be cleaned.
A holding means for holding the object to be cleaned in the holding part,
An ultrasonic cleaning device comprising the holding means and a moving means for moving the ultrasonic cleaning nozzle unit relatively in a direction parallel to the surface to be cleaned of the object to be cleaned held by the holding portion. The ultrasonic cleaning device according to claim 2, wherein the ultrasonic cleaning nozzle unit arranges the first cleaning nozzle and the second cleaning nozzle side by side in the moving direction of the object to be cleaned. The ultrasonic cleaning device according to claim 3, wherein the ultrasonic cleaning nozzle unit arranges the first cleaning nozzles side by side below the second cleaning nozzle in the moving direction of the object to be cleaned. The moving means includes a rotating means for rotating the object to be cleaned around the center of the object to be cleaned held by the holding portion.
The ultrasonic cleaning device according to claim 2, further comprising a sliding means for moving the ultrasonic cleaning nozzle unit in a direction parallel to the surface to be cleaned by intersecting the direction of rotation of the object to be cleaned. The ultrasonic cleaning device according to claim 5, wherein the ultrasonic cleaning nozzle unit is arranged side by side with the first cleaning nozzle and the second cleaning nozzle in a moving direction moved by the sliding means.

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