JP2023167868A - Ultrasonic water injection nozzle - Google Patents

Abstract

To increase an amplitude quantity of ultrasonic vibrations in an ultrasonic water injection nozzle.SOLUTION: In an ultrasonic water injection nozzle 2, high-frequency power is supplied for an ultrasonic diaphragm 3 via two pairs of electrodes, a circular positive electrode 36 and a negative electrode 39 and an annular positive electrode 37 and negative electrode 39. Thus, it is possible to increase (for example, to double) a current amount flowing in the ultrasonic diaphragm 3 in comparison with when only a pair of electrodes is used. Therefore, it is possible to increase an amplitude quantity of ultrasonic vibration 600 of the ultrasonic diaphragm 3 propagated to the ultrasonic water 501. As a result, it is possible to give large ultrasonic vibrations to a release layer 105 of an ingot 100. Thus, with the release layer 105 as an interface, it is possible to release a workpiece 107 from the ingot 100 in a short time.SELECTED DRAWING: Figure 3

Description

The present invention relates to an ultrasonic water jet nozzle.

In an ultrasonic water injection nozzle that cleans objects by spraying ultrasonic water propagated by ultrasonic waves, an ultrasonic diaphragm is disposed in a reservoir for temporarily storing water, as disclosed in Patent Document 1. ing. Cleaning is performed by supplying high-frequency power to this ultrasonic diaphragm and spraying water into which ultrasonic waves have propagated from a reservoir.

The ultrasonic water jet nozzle is used not only for cleaning the object to be washed, but also for peeling a workpiece from an ingot, as disclosed in Patent Document 2.

JP2021-009947A Japanese Patent Application Publication No. 2021-176165

In order to increase the cleaning and stripping power, it is conceivable to propagate large amplitude ultrasonic vibrations into the water. In order to increase the amplitude of ultrasonic vibrations, it is conceivable to increase the amount of current flowing through the ultrasonic diaphragm. However, the amount of current flowing through the ultrasonic diaphragm is limited by the structure of the ultrasonic diaphragm. Therefore, it is difficult to increase the amount of current flowing through the ultrasonic diaphragm, that is, to increase the amplitude of the ultrasonic vibration, simply by increasing the high-frequency power applied to the ultrasonic diaphragm.

Therefore, an object of the present invention is to increase the amplitude of ultrasonic vibration in an ultrasonic water injection nozzle.

The ultrasonic water injection nozzle of the present invention (this ultrasonic water injection nozzle) is an ultrasonic water injection nozzle that injects ultrasonic water in which ultrasonic vibrations are propagated to a target object, and receives high frequency power to generate ultrasonic waves. A dome-shaped ultrasonic diaphragm that oscillates vibrations; a water reservoir that supports the outer circumference of the ultrasonic diaphragm and temporarily stores water on the concave side of the ultrasonic diaphragm; The ultrasonic diaphragm is provided with a water supply port for supplying water, and an injection port that faces the concave surface of the ultrasonic diaphragm and injects water in the water reservoir, and the ultrasonic diaphragm is arranged at the center of the convex surface side. A circular positive electrode, an annular positive electrode arranged with an annular gap on the outside of the circular positive electrode, and a negative electrode connected to the concave side, wherein the circular positive electrode and the negative electrode The annular positive electrode and the negative electrode are connected to a second high frequency power source, and the ultrasonic wave is generated by supplying high frequency power to the circular positive electrode and the annular positive electrode. The diaphragm is vibrated and ultrasonic water is injected from the injection port.
The present ultrasonic water injection nozzle may include an amplification plate projecting outward from the outer periphery of the ultrasonic diaphragm, and a case that supports the amplification plate and forms the water reservoir.

This ultrasonic water injection nozzle is configured to vibrate the ultrasonic diaphragm by supplying high frequency power to the circular positive electrode and the annular positive electrode of the ultrasonic diaphragm, and to inject ultrasonic water from the injection port. ing. That is, in this ultrasonic water injection nozzle, high frequency power is supplied to the ultrasonic diaphragm through two pairs of electrodes: a circular positive electrode and a negative electrode, and an annular positive electrode and a negative electrode. This makes it possible to increase the amount of current flowing through the ultrasonic diaphragm compared to the case where only one pair of electrodes is used. Therefore, it is possible to increase the amplitude of the ultrasonic vibration of the ultrasonic diaphragm that is propagated to the ultrasonic water.

Therefore, when peeling a workpiece from an ingot as a target object using this ultrasonic water jet nozzle, large ultrasonic vibrations can be applied to the workpiece to be peeled off, so the workpiece can be peeled off in a short time. can. Furthermore, when cleaning a workpiece using the ultrasonic water jet nozzle, it is possible to shorten the cleaning time and remove large amounts of dirt from the workpiece.

It is a perspective view showing the composition of an ultrasonic water injection device. It is an explanatory view showing the composition of an ultrasonic water injection device. FIG. 2 is a cross-sectional view showing the configuration of an ultrasonic water jet nozzle. It is a top view showing the electrode of an ultrasonic water injection nozzle.

FIG. 1 is a perspective view showing the configuration of an ultrasonic water injection device 1 according to this embodiment. In this embodiment, the ultrasonic water injection device 1 is used to inject ultrasonic water onto an ingot 100 as a target object shown in FIG. 2 to separate a workpiece 107 from the ingot 100.

Ingot 100 is made of SiC, for example, and has a cylindrical shape. The ingot 100 has a peeling layer 105 formed by a laser processing device (not shown) on its surface 101 side. The ultrasonic water injection device 1 peels the workpiece 107 from the ingot 100 using this peeling layer 105 as a base point.

As shown in FIGS. 1 and 2, the ultrasonic water injection device 1 includes a holding table 10 that holds an ingot 100, an ultrasonic water injection nozzle 2 that injects ultrasonic water, and an ultrasonic water injection nozzle 2 that holds an ingot 100. It includes a moving mechanism 4 that moves relative to the ultrasonic water injection device 100, and a control unit 70 that controls the operation of the ultrasonic water injection device 1.

The ingot 100 is held by the holding table 10 from the back side 102, as shown in FIG. The holding table 10 includes a disk-shaped holding section 11 and a frame 12 that supports the holding section 11. The holding part 11 is a plate made of a porous material, and has a holding surface 13 formed flush with the upper surface of the frame 12. By communicating the holding portion 11 with a suction source (not shown), the suction force of the suction source is transmitted to the holding surface 13 . Thereby, the holding table 10 can hold the ingot 100 by suction using the holding surface 13.

Further, the holding table 10 is configured to be movable in the vertical direction by a lifting mechanism (not shown) including an air cylinder or the like. This elevating mechanism raises the holding table 10 and positions the holding table 10 at a height position for carrying in and carrying out the ingot 100. Further, the elevating mechanism lowers the holding table 10 holding the ingot 100, and positions the holding table 10 at a peeling work height position within the casing 14.

The holding table 10 is housed in the internal space of the casing 14 shown in FIG. The housing 14 includes an outer wall 120 surrounding the holding table 10 and a bottom plate 122. The bottom plate 122 is integrally connected to the lower part of the outer wall 120 and has an insertion hole (not shown) in the center through which the spindle 41 is inserted.
Note that in FIG. 1, a part of the outer wall 120 of the housing 14 is cut away to show the inside of the housing 14.

The housing 14 is supported by a plurality of legs 124. The upper ends of the legs 124 are fixed to the lower surface of the bottom plate 122. A drain port (not shown) is formed through the bottom plate 122 in the thickness direction. A member (such as a drain hose) for discharging used water to the outside of the housing 14 is connected to this drain port.

The moving mechanism 4 moves the ultrasonic water jet nozzle 2 relative to the surface 101 of the ingot 100 held on the holding table 10 in parallel to this surface. As shown in FIG. 2, the moving mechanism 4 includes a rotating mechanism 40 that rotates the ingot 100 held in the holding part 11, and an ultrasonic water jet nozzle 2 that rotates the ingot 100 in the horizontal direction (direction parallel to the XY plane (surface 101)). and a slide mechanism 44 for moving.

The rotation mechanism 40 is arranged below the holding table 10. The rotation mechanism 40 rotates the ingot 100 held by the holding part 11 around a rotation axis A1 passing through the center of the holding part 11. The rotation mechanism 40 includes a spindle 41, a spindle motor 42 that rotationally drives the spindle 41, and an encoder 43.

The spindle 41 has its upper end fixed to the lower surface of the frame 12 of the holding table 10, and extends in the Z-axis direction. The spindle motor 42 is connected to the lower end side of the spindle 41. The holding table 10 is rotated by the spindle motor 42 rotating the spindle 41 as shown by arrow R2. As a result, the ingot 100 held on the holding table 10 is rotated. The encoder 43 detects the rotation angle of the holding table 10 by detecting the rotation angle of the spindle motor 42 .

The slide mechanism 44 is configured to pivot the ultrasonic water jet nozzle 2 in the horizontal direction, which is a direction parallel to the surface 101 of the ingot 100.

The slide mechanism 44 detects a rotation arm 45 extending in the horizontal direction, a rotation shaft 48 that rotates while supporting the rotation arm 45, a rotation motor 46 connected to the lower end side of the rotation shaft 48, and a rotation angle of the rotation motor 46. It is equipped with an encoder 47 for

As shown in FIG. 1, the rotation shaft 48 is erected on the bottom plate 122 of the housing 14 via a bearing (not shown) or the like. The swing shaft 48 supports the base end side of the swing arm 45 by its tip. The ultrasonic water jet nozzle 2 is disposed on the tip side of the swing arm 45. The swing motor 46 swings the swing arm 45 by rotating the swing shaft 48 . The encoder 47 detects the horizontal position of the ultrasonic water injection nozzle 2 disposed at the tip of the swing arm 45 by detecting the rotation angle of the swing motor 46 .

The ultrasonic water injection nozzle 2 injects ultrasonic water in which ultrasonic vibrations are propagated onto a target object. In this embodiment, as shown in FIG. 2, the ultrasonic water injection nozzle 2 injects ultrasonic water onto the ingot 100, which is the target object, to peel the workpiece 107 from the ingot 100. As shown in FIGS. 2 and 3, the ultrasonic water injection nozzle 2 includes a case 20 that temporarily stores water 500 supplied from a water source 60, an injection port 241 formed on the lower surface of the case 20, and an injection port. The ultrasonic diaphragm 3 is provided inside the case 20 so as to face the ultrasonic diaphragm 241 .

The case 20 includes a bottom plate 21, a top plate 22 facing the bottom plate 21 in the Z-axis direction, and a substantially cylindrical side wall 23 connecting the bottom plate 21 and the top plate 22. The tip of the swing arm 45 shown in FIG. 1 is fixed to the top surface of the top plate 22.

The inside of the case 20 is divided into two upper and lower chambers by the ultrasonic diaphragm 3, namely, a first chamber 221 above the ultrasonic diaphragm 3 and a second chamber 222 below the ultrasonic diaphragm 3. It is sectioned. A water supply port 231 is formed through the side wall 23 of the second chamber 222 on the lower side.

The water supply port 231 is used to supply water 500 to the second chamber 222 between the ultrasonic diaphragm 3 and the injection port 241 in the case 20 . This water supply port 231 is communicated with the water source 60 via a flexible resin tube or the like. The water source 60 includes a pump and the like and is configured to supply water 500 such as pure water. Water 500 supplied from the water source 60 is temporarily stored in the second chamber 222 of the case 20.

A nozzle portion 24 that protrudes in the -Z direction is formed on the bottom plate 21. The diameter of the nozzle portion 24 gradually decreases toward the tip. The nozzle portion 24 is provided with a jetting port 241 at the tip thereof, which jets the water 500 in the second chamber 222 of the case 20 . Note that the nozzle portion 24 may have a shape that is not reduced in diameter toward the injection port 241.

The disc-shaped ultrasonic diaphragm 3 is arranged in the case 20 at a position facing the injection port 241 . The ultrasonic diaphragm 3 is formed into a circular dome shape when viewed from above, and is a concave spherical plate whose lower surface, which is the surface facing the injection port 241, is concave. That is, the injection port 241 is arranged to face the concave surface of the ultrasonic diaphragm 3 .

This ultrasonic diaphragm 3 is configured to receive high frequency power and oscillate ultrasonic vibrations. The ultrasonic diaphragm 3 propagates ultrasonic vibrations 600 to the water 500 stored in the second chamber 222 of the case 20, as shown in FIG.

As shown in FIG. 3, the ultrasonic diaphragm 3 includes a concave spherical plate-shaped dome portion 30 and a flange portion 31 that protrudes outward in the radial direction from the outer peripheral edge of the dome portion 30.

The dome portion 30 is composed of a piezoelectric plate, for example, a piezo element which is a type of ceramic. The lower surface 261 of the dome section 30 forms a concave surface of the ultrasonic diaphragm 3, while the upper surface 262 of the dome section 30 forms a convex surface of the ultrasonic diaphragm 3.

The annular plate-shaped collar portion 31 of the ultrasonic diaphragm 3 is integrally formed with the dome portion 30 and integrally protrudes outward in the radial direction from the outer peripheral edge of the dome portion 30 . Like the dome portion 30, the collar portion 31 is composed of a piezo element or the like.

Further, as shown in FIGS. 3 and 4, the ultrasonic diaphragm 3 has a circular positive electrode 36 disposed on the upper surface 262 side of the dome portion 30 at the center of the upper surface 262, and an annular positive electrode 36 on the outside of the circular positive electrode 36. It includes an annular positive electrode 37 arranged with a gap and a negative electrode terminal 38 connected to the lower surface 261 of the dome part 30.

The annular positive electrode 37 is arranged on the upper surface 262 of the dome portion 30 so as to concentrically surround the circular positive electrode 36 with an annular gap therebetween.
The negative electrode terminal 38 is arranged in an annular manner on the upper surface of the collar portion 31 with an annular gap left outside the annular positive electrode 37 . The negative electrode terminal 38 is electrically connected to a negative electrode 39 formed so as to cover the lower surface 261 of the dome portion 30, as shown in FIG.
The negative electrode 39 is connected to the lower surface 261 of the dome portion 30 and is made of, for example, a metal layer. The outer peripheral portion of the negative electrode 39 is formed to wrap around the outer peripheral edge of the collar portion 31 and cover the lower and upper surfaces of the collar portion 31 . The negative electrode terminal 38 is formed on the upper surface of the collar portion 31 covered with the outer peripheral portion of the negative electrode 39, so that the negative electrode terminal 38 and the negative electrode 39 are electrically connected. Note that in FIG. 4, the drawing of the negative electrode 39 is omitted.

Further, as shown in FIGS. 2 and 3, a first high-frequency power source 91 is connected to the circular positive electrode 36 of the ultrasonic diaphragm 3 and the negative electrode terminal 38 connected to the negative electrode 39. The first high frequency power supply 91 supplies first high frequency power to the ultrasonic diaphragm 3 via the circular positive electrode 36 and the negative electrode terminal 38. As a result, the entire ultrasonic diaphragm 3 is ultrasonically vibrated by the first high frequency power.

On the other hand, a second high-frequency power source 92 is connected to the annular positive electrode 37 of the ultrasonic diaphragm 3 and the negative electrode terminal 38 connected to the negative electrode 39. The second high frequency power supply 92 supplies second high frequency power to the ultrasonic diaphragm 3 via the annular positive electrode 37 and the negative electrode terminal 38 . Thereby, the entire ultrasonic diaphragm 3 is ultrasonically vibrated by the second high frequency power.

Note that the second high frequency power may be power having the same frequency and amplitude as the first high frequency power, or may be power having a frequency and amplitude different from the first high frequency power.

The ultrasonic vibrations of the ultrasonic diaphragm 3 are transmitted as ultrasonic vibrations 600 from the concave lower surface 261 of the ultrasonic diaphragm 3 toward the water 500 temporarily stored in the second chamber 222 of the case 20. radiated. That is, in this embodiment, the lower surface 261 becomes a radiation surface that radiates the ultrasonic vibration 600.

Further, the ultrasonic water jet nozzle 2 includes an amplification plate 32 extending outward from the outer periphery of the collar portion 31 of the ultrasonic diaphragm 3 . The amplifying plate 32 has an end portion of its outer circumferential portion supported by the side wall 23 of the second chamber 222 of the case 20, and fixes the dome portion 30 in the case 20 in a hollow manner. The amplifying plate 32 amplifies the ultrasonic vibration 600 by a portion not supported by the side wall 23.

In this way, the second chamber 222 of the case 20 supports the collar portion 31, which is the outer peripheral portion of the ultrasonic diaphragm 3, via the amplification plate 32, and is temporarily attached to the concave side of the ultrasonic diaphragm 3. Functions as a water reservoir for storing water. That is, the case 20 is configured to support the amplification plate 32 and form a second chamber 222 that is a water reservoir.

The control unit 70 shown in FIG. 1 includes a CPU that performs arithmetic processing according to a control program, a storage medium such as a memory, and the like. The control unit 7 executes various processes and centrally controls each component of the ultrasonic water injection device 1 . For example, the control unit 70 controls each member of the ultrasonic water injection device 1 to perform a peeling operation to peel the workpiece 107 from the ingot 100 held on the holding table 10.

The peeling operation by the ultrasonic water injection device 1 will be explained below.

First, the operator places the holding table 10 on the holding surface 13 so that the center of the ingot 100 approximately coincides with the center of the holding surface 13 of the holding table 10, as shown in FIG. Thereafter, the control unit 70 operates a suction source (not shown) to transmit suction force to the holding surface 13 . As a result, the holding surface 13 of the holding table 10 suction-holds the back surface 102 of the ingot 100.

Thereafter, the control unit 70 controls the rotation mechanism 40 to rotate the holding table 10 holding the ingot 100 in the direction of arrow R2. The control unit 70 also controls the swing motor 46 of the slide mechanism 44 to rotate the swing shaft 48 in the direction of arrow R1. As a result, the rotating arm 45 is pivoted, the ultrasonic water injection nozzle 2 is moved from the retracted position outside the holding table 10 to above the ingot 100, and the injection port 241 of the ultrasonic water injection nozzle 2 is 100 faces a surface 101.

After that, the control unit 70 starts sending water 500 from the water source 60. Water 500 passes through water supply port 231 and is temporarily stored in second chamber 222 of case 20 in ultrasonic water injection nozzle 2 .

When a predetermined amount of water 500 is accumulated in the second chamber 222 of the case 20 and the pressure in the second chamber 222 increases, the water 500 is injected downward from the injection port 241. Note that by continuing to supply the water 500 from the water source 60, the amount of water 500 in the second chamber 222 is maintained at a predetermined amount.

Also, at this time, the control unit 70 controls the first high-frequency power source 91 to connect the circular positive electrode 36 of the ultrasonic diaphragm 3 to the negative electrode 39 connected to the negative electrode terminal 38 (see FIG. 3). Supplying first high frequency power. Further, the control unit 70 controls the second high-frequency power supply 92 to supply the second high-frequency power to the annular positive electrode 37 and the negative electrode 39 connected to the negative electrode terminal 38 in the ultrasonic diaphragm 3 .

As a result, voltage application is repeatedly turned on and off at a predetermined frequency using the first high-frequency power and the second high-frequency power, and the dome portion 30 undergoes an expansion and contraction movement in the vertical direction. This stretching motion becomes mechanical ultrasonic vibration. That is, the first high frequency power and the second high frequency power are supplied at the same frequency.

Thereby, the entire ultrasonic diaphragm 3 including the dome portion 30 causes the water 500 to vibrate ultrasonically. That is, the ultrasonic vibration 600 amplified by the amplification plate 32 is propagated from the ultrasonic diaphragm 3 to the water 500 temporarily stored in the second chamber 222 of the case 20 . The ultrasonic vibrations 600 propagated to the water 500 are concentrated toward the injection port 241 . That is, the focal point of the ultrasonic vibration 600 is formed near the injection port 241.

Due to the propagation of such ultrasonic vibrations, ultrasonic water 501, which is water to which ultrasonic vibrations 600 have been propagated, is jetted outward from the injection port 241 of the nozzle portion 24. In this embodiment, as shown in FIG. 2, ultrasonic water 501 is injected from the injection port 241 of the nozzle section 24 toward the surface 101, which is the end surface of the ingot 100 on the side where the workpiece 107 is generated.

Also, at this time, the control unit 70 relatively moves the ingot 100 and the ultrasonic water jet nozzle 2 in a direction parallel to the surface 101 of the ingot 100. In the present embodiment, the rotation arm 45 is rotated by the rotation motor 46, so that the ultrasonic water jet nozzle 2 moves above the ingot 100, which is rotating together with the holding table 10, between the center and the outer peripheral edge of the ingot 100. It rotates back and forth between the two. As a result, the ultrasonic water 501 is sprayed onto the entire surface 101 of the ingot 100.

By such jetting of the ultrasonic water 501, the workpiece 107, which is a plate-shaped object, is peeled off from the ingot 100 using the peeling layer 105 of the ingot 100 as an interface. Furthermore, the surface 101 of the ingot 100 is cleaned by spraying the ultrasonic water 501.

After the workpiece 107 is peeled off, the control unit 70 holds the workpiece 107 using a transport member (not shown) and transports the workpiece 107 to the outside of the ultrasonic water injection device 1 .

As described above, the ultrasonic water jet nozzle 2 according to the present embodiment supplies the first high frequency power to the circular positive electrode 36 on the ultrasonic diaphragm 3 and supplies the second high frequency power to the annular positive electrode 37. By doing so, the ultrasonic diaphragm 3 is vibrated and ultrasonic water is injected from the injection port 241.

That is, in the ultrasonic water injection nozzle 2, high frequency power is supplied to the ultrasonic diaphragm 3 through two pairs of electrodes: a circular positive electrode 36 and a negative electrode 39, and an annular positive electrode 37 and a negative electrode 39. There is. This makes it possible to increase the amount of current flowing through the ultrasonic diaphragm 3 (for example, double it) compared to the case where only one pair of electrodes is used. Therefore, the amplitude of the ultrasonic vibration 600 of the ultrasonic diaphragm 3 propagated to the ultrasonic water 501 can be increased. As a result, large ultrasonic vibrations can be applied to the peeling layer 105 of the ingot 100. Therefore, the workpiece 107 can be peeled from the ingot 100 in a short time using the peeling layer 105 as an interface.

Note that the control unit 70 causes the period of the first high-frequency power applied to the circular positive electrode 36 and the negative electrode 39 to match the period of the second high-frequency power applied to the annular positive electrode 37 and the negative electrode 39. is preferred. As a result, the amplitude of the ultrasonic diaphragm 3 vibrated by the first high-frequency power and the second high-frequency power can be favorably increased, so the amplitude of the ultrasonic vibration 600 can be easily increased. .

Further, in this embodiment, an ultrasonic diaphragm 3 that generates ultrasonic vibrations 600 is held on the side wall 23 of the case 20 via an amplification plate 32. Therefore, when high-frequency power is supplied to the ultrasonic diaphragm 3, the ultrasonic diaphragm 3 easily vibrates. Thereby, the large amplitude ultrasonic vibration 600 amplified by the amplification plate 32 can be effectively propagated through the water 500.

Note that in this embodiment, the dome portion 30 and the collar portion 31 of the ultrasonic diaphragm 3 are composed of piezo elements. In this regard, the dome portion 30 and the collar portion 31 may be composed of a vibrating body other than a piezo element.

Furthermore, when the ultrasonic water 501 is injected onto the surface 101 of the ingot 100 from the injection port 241 to peel off the workpiece 107, the distance between the injection port 241 and the surface 101 of the ingot 100 is determined regardless of the thickness of the ingot 100. It is preferable to keep constant. For this purpose, an elevating mechanism for elevating and lowering the holding table 10 may be used. Alternatively, the moving mechanism 4 of the ultrasonic water injection device 1 may include a nozzle elevating mechanism for elevating and lowering the ultrasonic water injection nozzle 2, and the ultrasonic water injection nozzle 2 may be moved up and down by this nozzle elevating mechanism.

Further, the ultrasonic water injection device 1 can also function as a cleaning device that cleans a workpiece as a target object. This work may be, for example, the work 107 peeled from the ingot 100. In this case, the top surface of the workpiece held by the holding table 10 can be cleaned by jetting ultrasonic water from the ultrasonic water jet nozzle 2 onto the top surface of the workpiece. The ultrasonic water injection device 1 can apply ultrasonic vibrations of large amplitude to the workpiece, thereby making it possible to shorten the cleaning time and removing large amounts of dirt from the workpiece.

Further, in this embodiment, the ultrasonic water injection device 1 includes two high-frequency power sources, a first high-frequency power source 91 and a second high-frequency power source 92. In this regard, the first high frequency power source 91 and the second high frequency power source 92 may be one power source that can individually output the first high frequency power and the second high frequency power.

1: Ultrasonic water injection device, 2: Ultrasonic water injection nozzle, 3: Ultrasonic diaphragm, 4: Movement mechanism,
10: Holding table, 11: Holding section, 12: Frame, 13: Holding surface, 14: Housing,
20: Case, 21: Bottom plate, 22: Top plate, 23: Side wall, 24: Nozzle part,
30: Dome part, 31: Collar part, 32: Amplification plate,
36: Circular positive electrode, 37: Annular positive electrode, 38: Negative electrode terminal, 39: Negative electrode,
40: Rotation mechanism, 41: Spindle, 42: Spindle motor, 43: Encoder,
44: Slide mechanism, 45: Swivel arm, 46: Swivel motor, 47: Encoder,
48: Rotating shaft, 60: Water source, 70: Control unit, 91: First high frequency power supply,
92: second high frequency power supply, 100: ingot, 101: front surface, 102: back surface,
105: Peeling layer, 107: Work, 120: Outer wall, 122: Bottom plate, 124: Legs,
221: first chamber, 222: second chamber, 231: water supply port, 241: injection port, 261: bottom surface,
262: Top surface, 500: Water, 501: Ultrasonic water, 600: Ultrasonic vibration

Claims (2)

An ultrasonic water injection nozzle that injects ultrasonic water in which ultrasonic vibrations are propagated to a target object,
A dome-shaped ultrasonic diaphragm that receives high-frequency power and oscillates ultrasonic vibrations,
a water reservoir portion that supports the outer peripheral portion of the ultrasonic diaphragm and temporarily stores water on the concave side of the ultrasonic diaphragm, a water supply port that supplies water to the water reservoir portion, and the ultrasonic vibration a jetting port facing the concave surface of the plate and jetting water in the water reservoir,
The ultrasonic diaphragm includes a circular positive electrode placed in the center of the convex side, an annular positive electrode placed outside the circular positive electrode with an annular gap, and a negative electrode connected to the concave side. and
The circular positive electrode and the negative electrode are connected to a first high frequency power source, and the annular positive electrode and the negative electrode are connected to a second high frequency power source,
An ultrasonic water injection nozzle that vibrates the ultrasonic diaphragm by supplying high frequency power to the circular positive electrode and the annular positive electrode, and injects ultrasonic water from the injection port. comprising an amplification plate projecting outward from the outer periphery of the ultrasonic diaphragm, and a case supporting the amplification plate and forming the water reservoir;
The ultrasonic water jet nozzle according to claim 1.

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