JP2021188887A - Vapor chamber and manufacturing method of vapor chamber - Google Patents

Abstract

To provide a vapor chamber having an excellent heat transport characteristic, and a manufacturing method of the vapor chamber.SOLUTION: In a vapor chamber having a working fluid in an internal space which is formed between a first face of a first metal plate and an inner face of a second metal plate, the first metal plate has: at least one or more recessed flow passages formed at the first face; at least one or more protrusions protruding toward the inner face of the second metal plate from the first face, and abutting on the inner face of the second metal plate at apex faces; and a first irregular shape part group having at least one or more first irregular shape parts formed at a part of apexes of the first protrusions, and forming a clearance between the inner face of the second metal plate and itself.SELECTED DRAWING: Figure 1

Description

The present disclosure relates to a vapor chamber and a method for manufacturing a vapor chamber.

Electronic components such as semiconductor elements mounted on electric and electronic devices such as notebook computers, digital cameras, and mobile phones tend to generate more heat due to high-density mounting due to higher performance. In order to drive electrical and electronic equipment normally for a long period of time, it is necessary to efficiently cool the electronic components.

For example, Patent Document 1 describes a vapor chamber including a first metal sheet, a second metal sheet laminated on the first metal sheet, and a sealed space having a vapor flow path portion and a liquid flow path portion. There is. In the vapor chamber of Patent Document 1, each of the liquid flow paths has a plurality of mainstream grooves extending in the first direction through which the liquid working fluid passes, and a communication groove is provided between a pair of mainstream grooves adjacent to each other. A row of protrusions including a plurality of liquid flow path protrusions arranged in the first direction is provided via the communication groove, and the connecting groove communicates with a pair of corresponding mainstream grooves, and the width of the connecting groove is larger than the width of the mainstream groove. Is also big.

However, in the vapor chamber of Patent Document 1, the cooling performance of the vapor chamber is insufficient because the propulsive force of the working fluid of the liquid phase for flowing in the thickness direction of the vapor chamber is small. Further, since the metal sheets are joined by diffusion joining, it is considered that the entire contact portion between the metal sheets is joined. Therefore, if the vapor chamber receives heat for a long period of time, the entire metal sheet may be distorted. Further, the flow path portion of the vapor chamber is formed by etching processing using an etching solution, and the metal sheets are joined by diffusion bonding. As described above, since the process of forming the flow path portion and the process of joining the metal sheet are performed by completely different methods, it takes time to manufacture the vapor chamber.

International Publication No. 2019/066969

An object of the present disclosure is to provide a vapor chamber and a method for manufacturing a vapor chamber having excellent heat transport properties.

[1] A vapor chamber having a working fluid in an internal space formed between a first surface of a first metal plate and an inner surface of a second metal plate, wherein the first metal plate is on the first surface. At least one recessed flow path provided and at least one first surface projecting from the first surface toward the inner surface of the second metal plate and having a top surface abutting on the inner surface of the second metal plate. A first variant comprising at least one or more first variants that are provided on a portion of the top of the first overhang and that form a gap between the first overhang and the inner surface of the second metal plate. A vapor chamber characterized by having a group.
[2] The first deformed portion group includes the first deformed portion on the top surface side protruding from the top surface of the first protruding portion toward the inner surface of the second metal plate, and the second metal. The vapor chamber according to the above [1], wherein the plate is provided on the inner surface and has a recess facing the first deformed portion on the top surface side.
[3] The first deformed portion group is provided at a corner between the top surface of the first protrusion and the side surface of the first protrusion, and the top surface and the side surface of the first protrusion are provided. The vapor chamber according to the above [1] or [2], comprising the first deformed portion on the corner side connected to the above.
[4] The first deformed portion group is provided on the side surface of the top portion of the first protruding portion, and includes the first deformed portion on the side surface side of the top portion protruding toward the side surface of the adjacent first protruding portion. , The vapor chamber according to any one of the above [1] to [3].
[5] The second metal plate projects from at least one recessed flow path provided on the inner surface and the inner surface toward the first surface of the first metal plate, and the top surface thereof is the first metal. At least one or more protrusions abutting on the top surface of the first protrusion of the plate, and the top surface of the first protrusion of the first metal plate provided on a part of the top of the protrusion. The vapor chamber according to any one of the above [1] to [4], comprising a second metal plate deformed portion group having at least one deformed portion forming a gap between the two.
[6] Further having a third metal plate joined to the second surface side facing the first surface of the first metal plate, and at least one of the recessed flow paths is the said of the first metal plate. The vapor chamber according to any one of the above [1] to [5], which penetrates from the first surface to the second surface.
[7] The first metal plate projects from the second surface toward the inner surface of the third metal plate, and at least one or more second protruding portions whose top surface abuts on the inner surface of the third metal plate. And a second variant portion group provided with at least one second variant portion provided on a part of the top portion of the second protrusion and forming a gap between the third metal plate and the inner surface thereof. The vapor chamber according to the above [6], further comprising.
[8] The third metal plate projects from at least one recessed flow path provided on the inner surface and the inner surface toward the second surface of the first metal plate, and the top surface thereof is the first metal. At least one or more protrusions abutting on the top surface of the second protrusion of the plate, and the top surface of the second protrusion of the first metal plate provided on a part of the top of the protrusion. The vapor chamber according to the above [7], comprising a third metal plate deformed portion group having at least one deformed portion forming a gap between the and the metal plate.
[9] The vapor chamber according to any one of the above [1] to [8], wherein the first metal plate has a welded portion on at least the first surface.
[10] The vapor chamber according to any one of [1] to [9] above, wherein the first metal plate has a welded portion on a side surface.
[11] The method for manufacturing a vapor chamber according to any one of the above [1] to [10], which comprises a laser processing step of forming the recessed flow path and the first deformed portion group with a laser. A method for manufacturing a vapor chamber, which is characterized in that.
[12] The method for manufacturing a vapor chamber according to the above [11], further comprising a laser welding step of welding at least the first metal plate and the second metal plate with a laser after the laser processing step.

According to the present disclosure, it is possible to provide a vapor chamber and a method for manufacturing a vapor chamber having excellent heat transport characteristics.

FIG. 1 is a perspective view showing an example of the vapor chamber of the first embodiment. FIG. 2 is a cross-sectional view taken along the line AA of FIG. FIG. 3 is a perspective view showing another example of the vapor chamber of the first embodiment. FIG. 4 is a schematic view showing an example of a welded portion of the vapor chamber of FIG. FIG. 5 is a schematic view showing another example of the welded portion of the vapor chamber of FIG. FIG. 6 is a perspective view showing an example of the vapor chamber of the second embodiment. FIG. 7 is a cross-sectional view taken along the line BB of FIG. FIG. 8 is a perspective view showing another example of the vapor chamber of the second embodiment.

Hereinafter, a detailed description will be given based on the embodiment.

As a result of diligent research, the present inventor focused on the internal structure of the vapor chamber and increased the propulsive force of the working fluid of the liquid phase to flow in the thickness direction of the vapor chamber, thereby increasing the propulsive force of the working fluid in the vapor chamber. And the working fluid of the gas phase was circulated efficiently to improve the heat transport characteristics.

The vapor chamber of the embodiment is a vapor chamber having a working fluid in an internal space formed between the first surface of the first metal plate and the inner surface of the second metal plate, and the first metal plate is the same. At least one recessed flow path provided on the first surface, and at least one that projects from the first surface toward the inner surface of the second metal plate and the top surface abuts on the inner surface of the second metal plate. At least one or more first deformed portions that are provided on a part of the top of the first protruding portion and that form a gap between the one or more first protruding portions and the inner surface of the second metal plate. It has a first variant group to be provided.

(First Embodiment)
FIG. 1 is a perspective view showing an example of the vapor chamber of the first embodiment. FIG. 2 is a cross-sectional view taken along the line AA of FIG. FIG. 1 shows a partially transparent state so that the internal structure of the vapor chamber can be seen for convenience. Further, in FIG. 2, the direction in which the working fluid F (L) of the liquid phase flows is indicated by a black arrow.

As shown in FIGS. 1 and 2, the vapor chamber 1 of the first embodiment has a first metal plate 10 and a second metal plate 20. The first metal plate 10 and the second metal plate 20 are joined so that the first surface 10a of the first metal plate 10 and the inner surface 20a of the second metal plate 20 face each other. That is, the inside of the first metal sheet 10 and the second metal sheet 20 is closed. Further, the vapor chamber 1 has a working fluid in the internal space S formed between the first surface 10a of the first metal plate 10 and the inner surface 20a of the second metal plate 20. The internal space S is sealed by the first metal plate 10 and the second metal plate 20. A working fluid is sealed in the internal space S provided inside the vapor chamber 1.

Examples of the working fluid enclosed in the internal space S include pure water, ethanol, methanol, acetone, and a fluorine-based solvent from the viewpoint of the cooling performance of the vapor chamber 1.

The first metal plate 10 constituting the vapor chamber 1 projects from at least one recessed flow path 11 provided on the first surface 10a of the first metal plate 10 and the first surface 10a of the first metal plate 10. It has at least one or more first protruding portions 12 and a first deformed portion group 13 provided in a part of the first protruding portions 12.

As shown in FIG. 1, the recessed flow path 11 is provided on the first surface 10a side of the first metal plate 10 and is recessed toward the second surface 10b facing the first surface 10a. For example, the plurality of recessed flow paths 11 extend in a predetermined direction.

The first protruding portion 12 provided on the first surface 10a side of the first metal plate 10 projects from the first surface 10a of the first metal plate 10 toward the inner surface 20a of the second metal plate 20. The top surface 121 of the first protrusion 12 abuts on the inner surface 20a of the second metal plate 20. The first protrusion 12 extends along the extending direction of the recessed flow path 11.

The first deformed portion group 13 included in the first metal plate 10 is provided on a part of the top portion 12a of the extending first protruding portion 12. The first variant portion group 13 includes at least one or more first variant portions (for example, 13a, 13b, 13c, etc.). The first deformed portion forms a gap S1 with the inner surface 20a of the second metal plate 20.

As shown in FIG. 2, the first deformed portion is clearly different from the shape of the top portion 12a of the first protruding portion 12. Therefore, a gap S1 is provided between the first deformed portion and the inner surface 20a of the second metal plate 20. On the other hand, in the top portion 12a not provided with the first deformed portion, the top surface 121 and the inner surface 20a of the second metal plate are in contact with each other. As described above, in the top portion 12a provided with the first deformed portion, the first deformed portion and the inner surface 20a of the second metal plate face each other through the gap S1. Further, even in the state where the first deformed portion and the inner surface 20a of the second metal plate are in contact with each other in the top portion 12a provided with the first deformed portion, the contact state is local and the contact area is concerned. Is smaller than the contact area between the top surface 121 of the top portion 12a having no first deformed portion and the inner surface 20a of the second metal plate.

As described above, the shape of the gap S1 formed by the first deformed portion group 13 is the contact gap between the top surface 121 of the top portion 12a without the first deformed portion and the inner surface 20a of the second metal plate. Clearly different. The gap S1 gives a propulsive force through which the working fluid of the liquid phase flows to the working fluid of the liquid phase, like a capillary phenomenon acting on the working fluid of the liquid phase. Specifically, the gap S1 exerts a driving force for the flow of the working fluid of the liquid phase for flowing in the thickness direction of the vapor chamber 1, that is, in the height direction of the first protrusion 12. As shown by the arrow F (L), the working fluid of the liquid phase such as droplets scattered on the side surface 12b of the first projecting portion 12 can easily penetrate into the gap S1 and thus the second metal plate 20. It can be easily moved to the inner surface 20a.

As described above, when the gap S1 formed between the first deformed portion group 13 of the first metal plate 10 and the inner surface of the second metal plate 20 is provided in the internal space S, the working fluid of the liquid phase protrudes. It easily flows from the side surface 12b of the 12 to the inner surface 20a of the second metal plate 20. Therefore, the turbulence of the flow of the working fluid of the liquid phase flowing along the thickness direction of the vapor chamber 1 is suppressed, and the working fluid of the liquid phase also flows satisfactorily in the thickness direction of the vapor chamber 1. In addition to the good circulation flow of the working fluid along the in-plane direction, which is the direction perpendicular to the thickness direction of the vapor chamber 1, the working fluid of the liquid phase also flows well in the thickness direction of the vapor chamber 1, so that the internal space is internal. Heat transport within S is improved. Therefore, the vapor chamber 1 can have excellent heat transport characteristics.

Further, when the gap S1 is provided in the internal space S by the first deformed portion group 13, the working fluid flows satisfactorily along the thickness direction of the vapor chamber 1 and the in-plane direction of the vapor chamber 1. For example, the circulating flow of the working fluid is good regardless of the posture of the vapor chamber 1, such as a state in which the vapor chamber 1 shown in FIG. 1 is tilted 90 degrees on a paper surface or a state in which the vapor chamber 1 is turned upside down. As described above, the heat transport characteristics of the vapor chamber 1 are excellent because the circulation flow of the working fluids of the liquid phase and the gas phase is good regardless of the arrangement state of the vapor chamber 1.

If a gap S1 that gives the working fluid of the liquid phase a propulsive force for flowing the working fluid of the liquid phase as described above can be provided in the vapor chamber 1, the first deformed portion group 13 can be formed on the entire extending top portion 12a. It may be arranged over or locally. Further, when the first metal plate 10 has a plurality of first deformed portions, the shapes of the plurality of first deformed portions may be all the same, partially the same, or all different for the same reason. ..

Further, the first deformed portion group 13 includes a first deformed portion 13a on the top surface side protruding from the top surface 121 of the first protruding portion 12 toward the inner surface 20a of the second metal plate 20, and the second metal plate 20. Is provided on the inner surface 20a and preferably has a recess 25 facing the first deformed portion 13a on the top surface side.

As shown in FIG. 2, a gap S1 is formed between the first deformed portion 13a on the top surface side and the inner surface 20a and the recess 25. The gap S1 is provided on the top surface 121 side of the first protruding portion 12. If the gap S1 can be provided in the vapor chamber 1, the first deformed portion 13a on the top surface side may or may not contact the recess 25 of the inner surface 20a of the second metal plate 20. .. For the same reason, the shape of the recess 25 is not limited.

When the first metal plate 10 has a plurality of first deformed portions 13a, the plurality of first deformed portions 13a may be scattered, aggregated, or connected, and these may be interspersed with each other. It may be in a combined state.

When the first metal plate 10 has the first deformed portion 13a on the top surface side and the second metal plate 20 has the recess 25, it is formed between the first deformed portion 13a on the top surface side and the recess 25. The gap S1 more efficiently imparts a propulsive force for the flow of the working fluid of the liquid phase to flow in the thickness direction of the vapor chamber 1 to the working fluid of the liquid phase. Therefore, the heat transport characteristics of the vapor chamber 1 are further improved.

Further, the first deformed portion group 13 is provided at the corner portion 12c between the top surface 121 of the first protrusion 12 and the side surface 12b of the first protrusion 12, and the side surface of the top surface 121 and the first protrusion 12 is provided. It is preferable to provide a first deformed portion 13b on the corner side connected to the 12b.

The first deformed portion 13b on the corner side is inclined from the top surface 121 of the first protruding portion 12 to the side surface 12b of the first protruding portion 12. The first deformed portion 13b on the corner side does not come into contact with the inner surface 20a of the second metal plate 20, and is not in contact with the inner surface 20a. Therefore, a gap S1 is formed between the first deformed portion 13b on the corner side and the inner surface 20a of the second metal plate 20. The gap S1 is provided on the corner portion 12c side of the first protruding portion 12.

On the other hand, in the first protruding portion 12 not provided with the first deformed portion 13b on the corner portion side, the corner portion 12c of the first protruding portion 12 is in contact with the inner surface 20a of the second metal plate 20 without being inclined. There is. Therefore, the gap S1 is not formed on the corner portion 12c side of the first protruding portion 12.

When the first metal plate 10 has a plurality of first deformed portions 13b, the plurality of first deformed portions 13b may be scattered, connected, or in a state in which they are combined. Further, when the first metal plate 10 has one first deformed portion 13b, the first deformed portion 13b may extend over the entire extending top portion 12a.

When the first metal plate 10 has the first deformed portion 13b on the corner side, the gap S1 formed between the first deformed portion 13b on the corner side and the inner surface 20a of the second metal plate 20 is a vapor chamber. The propulsive force of the flow of the working fluid of the liquid phase for flowing in the thickness direction of 1 is more efficiently applied to the working fluid of the liquid phase. In addition, the wettability of the working fluid of the liquid phase is also improved. Therefore, the heat transport characteristics of the vapor chamber 1 are further improved.

Further, the first deformed portion group 13 is provided on the side surface 122 of the top portion 12a of the first protruding portion 12, and has a first deformed portion 13c on the side surface side of the top portion that protrudes toward the side surface 12b of the adjacent first protruding portion 12. It is preferable to prepare.

The first deformed portion 13c on the side surface side of the top protrudes from the side surface 122 of the top 12a of the first protruding portion 12. The side surface of the first deformed portion 13c is not in contact with the inner surface 20a of the second metal plate 20 and is not in contact with the inner surface 20a. Therefore, a gap S1 is formed between the first deformed portion 13c on the side surface side of the top portion and the inner surface 20a of the second metal plate 20. The gap S1 is provided on the side surface side of the top of the first protruding portion 12.

On the other hand, the first protruding portion 12 that does not have the first deformed portion 13c on the side surface side of the top does not have a configuration corresponding to the first deformed portion 13c on the side surface side of the top. Therefore, the gap S1 is not formed on the side surface side of the top of the first protruding portion 12 that does not have the first deformed portion 13c.

When the first metal plate 10 has a plurality of first deformed portions 13c, the plurality of first deformed portions 13c may be scattered, aggregated, or connected, and these may be interspersed with each other. It may be in a combined state.

When the first metal plate 10 has the first deformed portion 13c on the side surface side of the top, the gap S1 formed between the side surface of the first deformed portion 13c on the side surface side of the top and the inner surface 20a of the second metal plate 20 is formed. The driving force of the flow of the working fluid of the liquid phase for flowing in the thickness direction of the vapor chamber 1 is more efficiently applied to the working fluid of the liquid phase. Therefore, the heat transport characteristics of the vapor chamber 1 are further improved.

The shape of the gap S1 provided between the first deformed portion constituting the first deformed portion group 13 and the inner surface 20a of the second metal plate 20 differs depending on the type of the first deformed portion. Among the gaps S1 formed by the various types of first deformed portions and the inner surface 20a, as described above, the first deformed portion 13a on the top surface side, the first deformed portion 13b on the corner side, and the side surface side of the top surface. The gap S1 formed by the first deformed portion 13c and the inner surface 20a of the above further improves the heat transport characteristics of the vapor chamber 1.

The abundance ratio and arrangement state of the first deformed portion 13a on the top surface side, the first deformed portion 13b on the corner side, and the first deformed portion 13c on the side surface side of the top surface are appropriately determined according to the desired specification of the vapor chamber 1. Set.

Further, it is preferable that the recessed flow path 11 has a groove depth d longer than the groove width w. When the groove depth d of the recessed flow path 11 is longer than the groove width w of the recessed flow path 11, the propulsive force of the working fluid flow exerted by the gap S1 increases. Therefore, the heat transport characteristics of the vapor chamber 1 are further improved.

Further, the groove width w and the groove depth d of the recessed flow path 11 have good heat transport characteristics when the aspect ratio (d / w) is large, and conversely, when the aspect ratio (d / w) is small, the recessed flow path 11 can be easily machined. From the balance between heat transport characteristics and processability, d / w is preferably 0.1 or more and 10.0 or less, more preferably 0.5 or more and 2.0 or less, and further preferably 0.75 or more and 1.3 or less. be.

Further, when the first metal plate 10 includes a plurality of recessed flow paths 11, it is preferable that the plurality of recessed flow paths 11 extend in parallel with each other. When a plurality of recessed flow paths 11 extend in parallel, the groove spacing p of the adjacent recessed flow paths 11 is preferably 10 μm or more and 1000 μm or less, more preferably 20 μm or more and 500 μm or less, and further preferably 50 μm or more and 200 μm or less. .. The groove spacing p of the recessed flow paths 11 is the distance between the center lines of the groove widths of the adjacent recessed flow paths 11.

Formation of the recessed flow path 11, the first protruding portion 12, and the first deformed portion group 13 for improving the heat transport characteristics of the vapor chamber 1, particularly the first deformed portion 13a on the top surface side and the first on the corner side. For the formation of the first deformed portion group 13 having the deformed portion 13b and the first deformed portion 13c on the side surface side of the top, processing using a laser is preferable, and processing using a fiber laser is more preferable. In the laser processing, the recessed flow path 11, the first protruding portion 12, and the first deformed portion group 13 can be formed into a desired shape in a short time, and the recessed flow path 11 and the first protruding portion 12 are formed. 1 Deformed portion group 13 can be formed at the same time. Therefore, the vapor chamber 1 can be easily manufactured in a short time.

If the vapor chamber 1 is manufactured by a conventional method, the recessed flow path 11 may be formed by an etching process using an etching solution to form a recessed flow path 11 or the like, or a step of forming a first irregular portion group 13. , The first protruding portion 12 and the first deformed portion group 13 need to be formed in different steps. Therefore, such a manufacturing method is complicated and time-consuming.

Further, as the material constituting the first metal plate 10 and the second metal plate 20, copper, a copper alloy, aluminum, an aluminum alloy, and stainless steel are preferable from the viewpoints of high thermal conductivity and ease of processing by a laser. Among them, aluminum and aluminum alloys are more preferable for the purpose of weight reduction, and stainless steel is more preferable for the purpose of increasing mechanical strength. Further, depending on the usage environment, tin, tin alloy, titanium, titanium alloy, nickel, nickel alloy or the like may be used for the first metal plate 10 and the second metal plate 20.

Further, for example, a heating element (not shown) is attached to the outer surface 20b of the second metal plate 20. When the vapor chamber 1 and the heating element are thermally connected, the heating element is cooled by the vapor chamber. A heating element is a member such as an electronic component that generates heat during operation, such as a semiconductor element.

FIG. 3 is a perspective view showing another example of the vapor chamber 1 of the first embodiment.

As shown in FIG. 3, it is preferable that the second metal plate 20 has at least one recessed flow path 21, at least one protruding portion 22, and a second metal plate deformed portion group 23.

The recessed flow path 21 of the second metal plate 20 is provided on the inner surface 20a. The recessed flow path 21 of the second metal plate 20 has the same configuration as the recessed flow path 11 of the first metal plate 10.

The protrusion 22 projects from the inner surface 20a of the second metal plate 20 toward the first surface 10a of the first metal plate 10, and the top surface of the protrusion 22 is the top surface of the first protrusion 12 of the first metal plate 10. It abuts on 121. The protruding portion 22 of the second metal plate 20 has the same configuration as the first protruding portion 12 of the first metal plate 10.

The second metal plate deformed portion group 23 of the second metal plate 20 is provided on a part of the top portion of the protruding portion 22 of the second metal plate 20, and is provided with the top surface 121 of the first protruding portion 12 of the first metal plate 10. It comprises at least one variant that forms a gap between the two. The second metal plate deformed portion group 23 of the second metal plate 20 has the same configuration as the deformed portion group 13 of the first metal plate 10.

When the second metal plate 20 has a recessed flow path 21, a protruding portion 22, and a second metal plate deformed portion group 23, a gap is further formed by the second metal plate deformed portion group 23. This gap has the same configuration as the above-mentioned gap S1. Therefore, the working fluid of the liquid phase such as droplets scattered on the side surface of the protruding portion 22 of the second metal plate 20 can easily move to the first metal plate 10 side by easily entering the gap. .. Therefore, the heat transport characteristics of the vapor chamber 1 are further improved.

Further, since the recessed flow path 21 of the second metal plate 20 is connected to the recessed flow path 11 of the first metal plate 10, heat transport in the internal space S of the vapor chamber 1 is further improved. As a result, the heat transport characteristics of the vapor chamber 1 are further improved.

Further, the second metal plate deformed portion group 23 of the second metal plate 20 has the same configuration as the first deformed portion 13a on the top surface side provided on the first metal plate 10, and the corners of the deformed portion 23a on the top surface side. At least one of the deformed portion 23b on the corner side having the same configuration as the first deformed portion 13b on the portion side and the deformed portion 23c on the side surface side of the top having the same configuration as the first deformed portion 13c on the side surface side of the top. It is preferable to provide a deformed portion. When the second metal plate deformed portion group 23 of the second metal plate 20 includes the deformed portions 23a, 23b, 23c, the heat transport characteristics of the vapor chamber 1 are further improved by the mechanism as described above.

FIG. 4 is a schematic view showing an example of a welded portion of the vapor chamber 1. FIG. 5 is a schematic view showing another example of the welded portion of the vapor chamber 1.

As shown in FIG. 4, the first metal plate 10 preferably has a welded portion 40 on at least the first surface 10a. That is, since the first metal plate 10 has the welded portion 40 on the first surface 10a of the outer edge 10c, the first surface 10a of the first metal plate 10 and the inner surface 20a of the second metal plate 20 are welded to each other.

The welded portion 40 provided in such a place can be formed by solder or the like conventionally adopted in addition to the above laser. In such a joining method, the first metal plate 10 and the second metal plate 20 can be easily joined.

Further, as shown in FIG. 5, it is preferable that the first metal plate 10 has a welded portion 40 on the side surface. That is, by having the welded portions 40 on the side surface of the first metal plate 10 on the side of the second metal plate 20 and the side surface of the second metal plate 20 on the side of the first metal plate 10, the first metal plate 10 and the second metal The plates 20 and the plates 20 are welded to each other.

When the welded portion 40 is provided on the side surface of the vapor chamber 1, no welding mark is formed on the second surface 10b of the first metal plate 10 or the outer surface 20b of the second metal plate 20. Therefore, the vapor chamber can be used without additional processing such as removing weld marks. For such welding, processing using a laser is preferable, and among them, processing using a fiber laser is more preferable.

Next, the method of manufacturing the above-mentioned vapor chamber 1 will be described.

The method for manufacturing the vapor chamber 1 includes a laser processing step of forming the recessed flow path 11 and the first deformed portion group 13 with a laser. In laser machining, it is easy to control the machining of the concave flow path 11 into a desired shape, and it can be formed in a short time. Further, by forming the recessed flow path 11, the first protruding portion 12 can be formed. Further, the first deformed portion group 13 can be formed at the same time while forming the concave flow path 11 and the first protruding portion 12. Among the lasers, the fiber laser is more excellent in processing control and short-time processing. On the other hand, in the etching process using the etching solution used in the conventional vapor chamber, it is difficult to form the recessed flow path 11, the first protruding portion 12, and the first deformed portion group 13 at one time.

Further, it is preferable that the method for manufacturing the vapor chamber 1 further includes a laser welding step of welding at least the first metal plate 10 and the second metal plate 20 with a laser after the laser processing step. By welding the first metal plate 10 and the second metal plate 20 with a laser, the vapor chamber 1 having the internal space S inside can be easily manufactured. If the laser used in the laser processing process and the laser used in the laser welding process are the same, the vapor chamber can be easily manufactured in a shorter time.

Specifically, the first surface 10a of the first metal plate 10 including the recessed flow path 11, the first protruding portion 12, the first deformed portion group 13, and the like, and the inner surface 20a of the second metal plate 20 face each other. The laser is applied to the first metal plate 10 and the second metal plate 20 in a state where the outer edge 10c of the first metal plate 10 and the inner surface 20a of the metal plate 20 are in contact with each other.

For example, the outer edge 10c, which is the contact portion between the first metal plate 10 and the second metal plate 20, may be irradiated with the laser from the first metal plate 10 side, or the outer edge 10c may be irradiated with the laser from the second metal plate 20 side. You may. In such laser irradiation, the welded portion 40 is formed at least on the outer edge 10c of the first surface 10a of the first metal plate 10.

Further, the contact portion between the first metal plate 10 and the second metal plate 20 may be irradiated with a laser from the in-plane direction of the vapor chamber 1. In such laser irradiation, a welded portion 40 is formed between the side surface of the first metal plate 10, specifically, the side surface of the first metal plate 10 and the side surface of the second metal plate 20.

Further, in the laser welding step, the above laser irradiation may be combined.

In this way, in the vapor chamber 1, processing using a laser is performed. Therefore, there is a high degree of freedom in designing the first surface 10a of the first metal plate 10 including the recessed flow path 11, the first protruding portion 12, the first deformed portion group 13, and the like, which are structures in the internal space of the vapor chamber 1. ..

Further, the recess 25 provided on the inner surface 20a of the second metal plate 20 may be formed by a laser or the like. Further, the recess 25 adjusts the force of contacting the first deformed portion 13a on the first metal plate 10 side with the inner surface 20a of the second metal plate 20 when the first metal plate 10 and the second metal plate 20 are welded. It can also be formed by doing so.

Further, the vapor chamber 1 is suitably used for electronic devices such as mobile phones, which are required to have good heat transport characteristics even in various postures. The electronic device provided with the vapor chamber 1 has the high heat transfer characteristics of the vapor chamber 1 even under various usage conditions.

According to the embodiment described above, the propulsive force of the working fluid of the liquid phase for flowing in the thickness direction of the vapor chamber is increased by the gap S1 formed from the first deformed portion group or the like. The working fluid of the liquid phase, such as droplets scattered on the side surface of the first protrusion, can easily move to the inner surface of the second metal plate. As described above, since the working fluid of the liquid phase flows well in the thickness direction of the vapor chamber, the vapor chamber can have excellent heat transport characteristics.

In the above, as shown in FIG. 1, a plurality of recessed flow paths 11 extend in parallel with each other, but the plurality of recessed flow paths 11 may intersect with each other. When the first metal plate 10 has an intersection that intersects a plurality of recessed flow paths 11, heat transport in the internal space S is further improved. Therefore, the heat transport characteristics of the vapor chamber 1 are further improved.

Further, in the above, as shown in FIG. 1, an example in which a plurality of recessed flow paths 11 and a plurality of first protrusions 12 extend in parallel with each other is shown, but a plurality of recessed flow paths 11 and a plurality of first protrusions 11 are shown. The portions 12 may extend concentrically.

(Second Embodiment)
FIG. 6 is a perspective view showing an example of the vapor chamber of the second embodiment. FIG. 7 is a cross-sectional view taken along the line BB of FIG.

In the embodiments shown below, the same components as those of the vapor chamber configuration of the first embodiment are designated by the same reference numerals, and duplicate description will be omitted or simplified.

The vapor chamber 2 of the second embodiment is basically the same as the configuration of the vapor chamber 1 of the first embodiment except that the configuration of the third metal substrate is added. Therefore, the different configurations will be mainly described here.

As shown in FIGS. 6 to 7, the vapor chamber 2 further has a third metal plate 30 joined to the second surface 10b side facing the first surface 10a of the first metal plate 10, and the recessed flow path 11 At least one of the above penetrates from the first surface 10a to the second surface 10b of the first metal plate 10. The material constituting the third metal plate 30 is the same as that of the first metal plate 10 and the second metal plate 20.

At least one or more recessed flow paths 11 penetrate from the first surface 10a to the second surface 10b of the first metal plate 10 along the thickness direction of the vapor chamber 2. Since the volume of the recessed flow path 11 is increased, the heat transport in the internal space S is improved, and the heat transport characteristics of the vapor chamber 2 are improved.

In the vapor chamber 2, the first metal plate 10 and the third metal plate 30 face each other so that the second surface 10b of the first metal plate 10 and the inner surface 30a of the third metal plate 30 which are the back surfaces of the first surface 10a face each other. Be joined. That is, the inside of the first metal sheet 10 and the second metal sheet 20 is closed. Further, the vapor chamber 2 is provided between the first metal plate 10 and the second metal plate 20 and between the first metal plate 10 and the third metal plate 30, that is, between the second metal plate 20 and the third metal plate 30. It has a working fluid in the formed internal space S. Therefore, the heat of the vapor chamber 2 can be released to the outside from the third metal plate 30 in addition to the second metal plate 20, and the heat transport characteristics of the vapor chamber 2 are improved.

Further, as shown in FIG. 7, it is preferable that the first metal plate 10 has at least one or more second protruding portions 15 and a second deformed portion group 16.

The second protruding portion 15 projects from the second surface 10b of the first metal plate 10 toward the inner surface 30a of the third metal plate 30, and the top surface abuts on the inner surface 30a of the third metal plate 30. The second protruding portion 15 has the same configuration as the first protruding portion 12.

The second deformed portion group 16 on the second surface 10b side is provided on a part of the top of the second protruding portion 15 and forms a gap S2 with the inner surface 30a of the third metal plate 30 at least one or more. It is provided with a second variant of. The second deformed portion group 16 on the second surface 10b side has the same configuration as the first deformed portion group 13 on the first surface 10a side.

From the same viewpoint as the reason why the first deformed portion group 13 improves the heat transport characteristics, the second deformed portion group 16 has the same configuration as the first deformed portion 13a on the top surface side, and is the second on the top surface side. The deformed portion 16a, the second deformed portion 16b on the corner side having the same configuration as the first deformed portion 13b on the corner side, and the first deformed portion 16b on the side surface side of the top having the same configuration as the first deformed portion 13c on the side surface side of the top. 2 It is preferable to include at least one variant portion of the variant portion 16c. The gap S2 formed between the second deformed portion 16a on the top surface side, the second deformed portion 16b on the corner side, and the second deformed portion 16c on the side surface side of the top surface and the inner surface 30a of the third metal plate 30 is formed. The heat transport characteristics of the vapor chamber 2 are further improved. Further, it is preferable that the third metal plate 30 has a recess 35 having the same structure as the recess 25 of the second metal plate 20 on the inner surface 30a.

FIG. 8 is a perspective view showing another example of the vapor chamber 2 of the second embodiment.

As shown in FIG. 8, it is preferable that the third metal plate 30 has at least one recessed flow path 31, at least one protruding portion 32, and a third metal plate deformed portion group 33.

The recessed flow path 31 of the third metal plate 30 is provided on the inner surface 30a of the third metal plate 30. The recessed flow path 31 of the third metal plate 30 has the same configuration as the recessed flow path 11 of the first metal plate 10.

The protrusion 32 projects from the inner surface 30a of the third metal plate 30 toward the second surface 10b of the first metal plate 10, and the top surface of the protrusion 32 is the top surface of the second protrusion 15 of the first metal plate 10. Contact with. The protruding portion 32 of the third metal plate 30 has the same configuration as the first protruding portion 12 of the first metal plate 10.

The third metal plate deformed portion group 33 of the third metal plate 30 is provided on a part of the top of the protruding portion 32 of the extending third metal plate 30, and the top of the second protruding portion 15 of the first metal plate 10 is provided. It comprises at least one variant that forms a gap with the surface. The third metal plate deformed portion group 33 of the third metal plate 30 has the same configuration as the deformed portion group 13 of the first metal plate 10.

When the third metal plate 30 has a recessed flow path 31, a protruding portion 32, and a third metal plate deformed portion group 33, a gap is further formed by the third metal plate deformed portion group 33. This gap has the same configuration as the above-mentioned gap S1. Therefore, the working fluid of the liquid phase such as droplets scattered on the side surface of the protruding portion 32 of the third metal plate 30 can easily move to the first metal plate 10 side by easily entering the gap. .. Therefore, the heat transport characteristics of the vapor chamber 2 are further improved.

Further, since the recessed flow path 31 of the third metal plate 30 is connected to the recessed flow path 11 of the first metal plate 10, heat transport in the internal space S of the vapor chamber 2 is further improved. As a result, the heat transport characteristics of the vapor chamber 2 are further improved.

Further, the third metal plate deformed portion group 33 of the third metal plate 30 has a top-side deformed portion 33a and a corner having the same configuration as the top-side first deformed portion 13a provided on the first metal plate 10. At least one of the deformed portion 33b on the corner side having the same configuration as the first deformed portion 13b on the portion side and the deformed portion 33c on the side surface side of the top having the same configuration as the first deformed portion 13c on the side surface side of the top. It is preferable to provide a deformed portion. When the third metal plate deformed portion group 33 of the third metal plate 30 includes the deformed portions 33a, 33b, 33c, the heat transport characteristics of the vapor chamber 2 are further improved by the mechanism as described above.

Further, in the vapor chamber 2, the first metal plate 10 may have welded portions 40 on the first surface 10a and the second surface 10b on the outer edge 10c. Further, the first metal plate 10 has a welded portion 40 on the side surface, that is, the side surface of the first metal plate 10 on the side of the second metal plate 20 and the side surface of the second metal plate 20 on the side of the first metal plate 10. , The welded portion 40 may be provided on the side surface of the first metal plate 10 on the side of the third metal plate 30 and the side surface of the third metal plate 30 on the side of the first metal plate 10. In this way, the first metal plate 10 and the second metal plate 20, and the first metal plate 10 and the third metal plate 30 are welded together.

According to the embodiment described above, in the vapor chamber having the third metal plate in addition to the second metal plate and the recessed flow path penetrating from the first surface to the second surface of the first metal plate, the recess flow Since the volume of the path is increased, heat transport in the internal space S is improved. Furthermore, heat can be released to the outside of the vapor chamber from the third metal plate. Therefore, the heat transport characteristics of the vapor chamber are further improved.

Although the embodiments have been described above, the present invention is not limited to the above embodiments, but includes all aspects included in the concept of the present disclosure and the scope of claims, and various modifications are made within the scope of the present disclosure. be able to.

1, 2 Vapor chamber 10 1st metal plate 10a 1st surface of 1st metal plate 10b 2nd surface of 1st metal plate 10c Outer edge of 1st metal plate 11 Recessed flow path 12 1st protruding part 12a 1st protruding part Top 121 Top surface 122 Top side surface 12b First protrusion side surface 12c First protrusion corner 13 First variant group 13a Top side first variant 13b Corner side first variant 13c 1st deformed part on the side surface side of the top 15 2nd protruding part 16 2nd deformed part group 16a 2nd deformed part on the top side 16b 2nd deformed part on the corner side 16c 2nd deformed part on the side surface side of the top 20 2nd metal Plate 20a Inner surface of the second metal plate 20b Outer surface of the second metal plate 21 Recessed flow path 22 Protruding part of the second metal plate 23 Deformed part group of the second metal plate 23a Deformed part on the top surface side 23b Deformed part on the corner side 23c Deformed part on the side surface of the top 25 Recessed part 30 Third metal plate 30a Inner surface of the third metal plate 30b Outer surface of the third metal plate 31 Recessed flow path 32 Protruding part of the third metal plate 33 Third metal plate deformed part group 33a Top surface Deformed part on the side 33b Deformed part on the corner side 33c Deformed part on the side surface side of the top 35 Recessed part 40 Welding part S Internal space S1, S2 Gap F (L) Flow of working fluid of liquid phase

Claims (12)

A vapor chamber having a working fluid in an internal space formed between a first surface of a first metal plate and an inner surface of a second metal plate.
The first metal plate is
At least one recessed flow path provided on the first surface and
At least one or more first projecting portions projecting from the first surface toward the inner surface of the second metal plate and having a top surface abutting on the inner surface of the second metal plate.
It has a first deformed portion group provided on a part of the top of the first protruding portion and having at least one or more first deformed portions forming a gap between the second metal plate and the inner surface thereof. A vapor chamber characterized by that. The first deformed portion group includes the first deformed portion on the top surface side protruding from the top surface of the first protruding portion toward the inner surface of the second metal plate.
The vapor chamber according to claim 1, wherein the second metal plate is provided on the inner surface and has a recess facing the first deformed portion on the top surface side. The first deformed portion group is provided at a corner between the top surface of the first protrusion and the side surface of the first protrusion, and is connected to the top surface and the side surface of the first protrusion. The vapor chamber according to claim 1 or 2, further comprising the first variant portion on the corner side. The first variant portion group is provided on the side surface of the top portion of the first protrusion portion, and includes the first deformed portion on the side surface side of the top portion that protrudes toward the side surface of the adjacent first protrusion portion. The vapor chamber according to any one of 1 to 3. The second metal plate is
At least one recessed flow path provided on the inner surface and
At least one or more protrusions that project from the inner surface toward the first surface of the first metal plate and the top surface abuts on the top surface of the first protrusion of the first metal plate.
A second metal plate variant provided on a portion of the top of the protrusion and comprising at least one variant that forms a gap between the first metal plate and the top surface of the first protrusion. With the group,
The vapor chamber according to any one of claims 1 to 4. It further has a third metal plate joined to the second surface side facing the first surface of the first metal plate, and at least one of the recessed flow paths is the first surface of the first metal plate. The vapor chamber according to any one of claims 1 to 5, which penetrates from to the second surface. The first metal plate is
At least one second projecting portion that projects from the second surface toward the inner surface of the third metal plate and the top surface abuts on the inner surface of the third metal plate.
A second variant portion group having at least one second variant portion provided on a part of the top portion of the second protrusion and forming a gap between the third metal plate and the inner surface thereof.
The vapor chamber according to claim 6, further comprising. The third metal plate is
At least one recessed flow path provided on the inner surface and
At least one or more protrusions that project from the inner surface toward the second surface of the first metal plate and the top surface abuts on the top surface of the second protrusion of the first metal plate.
A third metal plate variant provided on a portion of the top of the protrusion and comprising at least one variant that forms a gap between the first metal plate and the top surface of the second protrusion. With the group,
7. The vapor chamber according to claim 7. The vapor chamber according to any one of claims 1 to 8, wherein the first metal plate has a welded portion on at least the first surface. The vapor chamber according to any one of claims 1 to 9, wherein the first metal plate has a welded portion on a side surface. The method for manufacturing a vapor chamber according to any one of claims 1 to 10.
A method for manufacturing a vapor chamber, which comprises a laser processing step of forming the recessed flow path and the first deformed portion group with a laser. The method for manufacturing a vapor chamber according to claim 11, further comprising a laser welding step of welding at least the first metal plate and the second metal plate with a laser after the laser processing step.

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