JP2021181800A - Fluid opening/closing device, gate valve device, and opening and closing method for fluid - Google Patents

Abstract

To provide a fluid opening/closing device capable of preventing malfunction of a gate valve.SOLUTION: A fluid opening/closing device 1 is constituted so that a first valve element slides by contact with an inlet-side first annular seal member and an inlet-side second annular seal member by first gate valve opening/closing control means 4, a vacuum chamber inlet-side passage 21 is closed when a first closing portion 51A is positioned at an opening portion of the vacuum chamber inlet-side passage 21, the vacuum chamber inlet-side passage 21 is opened when a first valve element-side opening portion 51B is positioned at the opening portion of the vacuum chamber inlet-side passage 21, a second valve element slides by contact with an outlet-side first annular seal member and an outlet-side second annular seal member by second gate valve opening/closing control means, a vacuum chamber outlet-side passage is closed when a second closing portion 51A' is positioned at an opening portion of the vacuum chamber outlet-side passage, and the vacuum chamber outlet-side passage is opened when a second valve element-side opening portion 51B' is positioned at the opening portion of the vacuum chamber outlet-side passage.SELECTED DRAWING: Figure 1

Description

The present invention relates to a fluid opening / closing device, a gate valve device, and a fluid opening / closing method, and more particularly to a fluid opening / closing device, a gate valve device, and a fluid opening / closing method capable of preventing malfunction of the gate valve.

There is a gate valve that opens and closes in the passage with a valve plate.

However, when the gate valve is opened and closed in the passage, for example, in the case of a fluid flowing through the passage, for example, powder, the powder adheres to the sliding portion of the gate valve, causing a problem of malfunction.

The present invention has been made in consideration of the above problems, and an object of the present invention is to provide a fluid opening / closing device, a gate valve device, and a method for opening / closing a fluid, which can prevent malfunction of a gate valve.

The fluid switching device according to claim 1 is a fluid switching device that opens and closes a passage through which fluid passes, and is a first on-off valve that opens and closes a passage on the vacuum chamber inlet side of the passage, and a first on-off valve. A first on-off valve opening / closing control means for controlling opening / closing, and an opening / closing of the vacuum chamber inlet-side passage located downstream of the first on-off valve and sliding on the first valve body to open / close. A first gate valve, a first gate valve opening / closing control means for controlling the opening / closing of the first gate valve, and a vacuum chamber located downstream of the first gate valve to the fluid flow. A second on-off valve for opening and closing the vacuum chamber outlet-side passage, which is a passage on the outlet side of the vacuum chamber, a second on-off valve opening / closing control means for controlling the opening / closing of the second on-off valve, and the second on-off valve opening / closing control means. A second gate valve located downstream of the on-off valve and having the opening of the vacuum chamber outlet side passage slid to open and close with the second valve body, and the second gate valve. A second gate valve opening / closing control means for controlling opening / closing, a vacuum chamber inlet-side passage main body having the vacuum chamber inlet-side passage, and a vacuum chamber outlet-side passage main body having the vacuum chamber outlet-side passage are provided. The valve body 1 is provided with a first closed portion that closes the opening of the vacuum chamber inlet side passage and a first valve body side opening having the same size as the opening of the vacuum chamber inlet side passage. The first annular seal member on the inlet side faces the front surface of the first valve body on the vacuum chamber inlet side passage body, and the second annular seal member on the inlet side faces the back surface of the first valve body. The seal member is provided, and the second annular seal member on the inlet side is raised by the first elevating means and comes into contact with the back surface of the first valve body, and is brought into contact with the back surface of the first valve body by the first elevating means. It descends and does not abut on the back surface of the first valve body, the first elevating means moves up and down by the first elevating control means, and the first elevating means descends by the first elevating control means. The second annular seal member on the inlet side is not brought into contact with the back surface of the first valve body, and the first valve body is moved to the first valve body on the inlet side by the first gate valve opening / closing control means. The first valve body-side opening is located at the opening of the vacuum chamber inlet-side passage, and then the first elevating means is provided by the first elevating control means. The second annular seal member on the inlet side is brought into contact with the back surface of the first valve body to open the vacuum chamber inlet side passage, and the first elevating control means is used to open the first. The elevating means is lowered to form the second ring on the entrance side. The seal member is not brought into contact with the back surface of the first valve body, and the first valve body is brought into contact with the inlet-side first annular seal member by the first gate valve opening / closing control means. The first closure is located at the opening of the vacuum chamber inlet-side passage by sliding, and then the first elevating means is raised by the first elevating control means to raise the first elevating means to form the second ring on the inlet side. The seal member is brought into contact with the back surface of the first valve body to close the vacuum chamber inlet side passage, and the second valve body has a second valve body that closes the opening of the vacuum chamber outlet side passage. A second valve body side opening having the same size as the closed portion and the opening of the vacuum chamber outlet side passage is provided, and the outlet of the vacuum chamber outlet side passage body faces the surface of the second valve body. An outlet-side second annular seal member is provided so that the side first annular seal member faces the back surface of the second valve body, and the outlet-side second annular seal member is a second. The second elevating means raises and abuts on the back surface of the second valve body, and the second elevating means lowers and does not abut on the back surface of the second valve body. The second elevating means is lowered by the control means so that the second annular seal member on the outlet side is not brought into contact with the back surface of the second valve body, and the second gate valve open / close control means is used to bring the second. The valve body of 2 abuts on the second annular seal member on the outlet side and slides, the second valve body side opening is located at the opening of the vacuum chamber outlet side passage, and then the second valve body is located. The second elevating means is raised by the elevating control means of the above, and the second annular seal member on the outlet side is brought into contact with the back surface of the second valve body to open the vacuum chamber outlet side passage. The second elevating means is lowered by the second elevating control means so that the second annular seal member on the outlet side is not brought into contact with the back surface of the second valve body, and the second gate valve is opened and closed. The second valve body is brought into contact with the second annular seal member on the outlet side and slid by the control means, the second closed portion is located at the opening of the passage on the outlet side of the vacuum chamber, and then the second closed portion is located. The second elevating means is raised by the second elevating control means to bring the outlet-side second annular seal member into contact with the back surface of the second valve body to close the vacuum chamber outlet-side passage. Is to be.

The method for opening and closing the fluid according to claim 2 is a method for opening and closing the fluid for opening and closing the passage of the fluid switching device according to claim 1, wherein the vacuum chamber outlet side passage is the second on-off valve and the second on-off valve. With the gate valve closed and the vacuum chamber inlet side passage closed by the first on-off valve and the first gate valve, a fluid is guided to the vacuum chamber inlet side passage to guide the fluid to the first gate valve. Then, the first on-off valve is opened to guide the fluid to the vacuum chamber, then the first on-off valve is closed, and then the first gate valve is closed to close the vacuum chamber. After the generation process, the second gate valve is opened, then the second on-off valve is opened, and the fluid is discharged from the vacuum chamber by opening the passage on the outlet side of the vacuum chamber. It is something to do.

The gate valve device according to claim 3 is a gate valve device that opens and closes a passage through which a fluid passes, and is a gate valve that opens and closes by sliding the opening of the passage with a valve body, and the gate. A gate valve opening / closing control means for controlling the opening / closing of the valve and a passage main body having the passage are provided. An opening on the body side is provided, and the passage body has a first annular sealing member facing the front surface of the valve body and a second annular sealing member facing the back surface of the valve body. The second annular seal member is provided by the elevating means to rise and abut on the back surface of the valve body, and the elevating means descends and does not abut on the back surface of the valve body. The elevating means is lowered by the elevating control means to bring the second annular seal member out of contact with the back surface of the valve body, and the gate valve opening / closing control means is used to bring the valve body up and down. However, the valve body side opening is located at the opening of the passage by abutting against the first annular seal member and sliding, and then the elevating means is raised by the elevating control means to raise the second elevating means. The annular seal member is brought into contact with the back surface of the valve body to open the passage, the elevating means is lowered by the elevating control means, and the annular seal member of 2 is not applied to the back surface of the valve body. The valve body is brought into contact with the gate valve opening / closing control means, and the valve body is brought into contact with the first annular seal member and slid. The elevating means is raised to bring the second annular seal member into contact with the back surface of the valve body to open the passage.

According to the fluid opening / closing device according to claim 1, since the first valve body abuts on the first annular seal member on the inlet side and slides by the first gate valve opening / closing control means, the vacuum chamber inlet side passage. The fluid inside can prevent the intrusion of the first valve body into the operating portion, the malfunction of the first valve body due to the invasion of the fluid into the operating portion can be prevented, and the second valve body can be prevented from malfunctioning. Since the second valve body abuts on the first annular seal member on the outlet side and slides by the gate valve opening / closing control means, the fluid in the vacuum chamber outlet side passage enters the operating portion of the second valve body. It is possible to prevent the second valve body from malfunctioning due to the intrusion of fluid into the operating portion, and moreover, when opening and closing the vacuum chamber inlet side passage, the first valve body The front and back sides are the first annular seal member on the inlet side, and the second annular seal member on the inlet side. Since the seal is sealed by the annular seal member and the second annular seal member on the outlet side, the airtightness can be maintained.

Further, according to the method for opening and closing the fluid according to claim 2, the front and back of the first valve body are attached to the inlet side first annular seal member, the inlet side second annular seal member, and the second valve body. Not only does the front and back contact the second annular seal member on the outlet side and the second annular seal member on the outlet side to maintain the vacuum state of the vacuum chamber, but the surface of the first valve body is on the inlet side. Since the fluid moves while abutting against the first annular seal member, the fluid in the passage on the inlet side of the vacuum chamber can be prevented from entering the operating portion of the first valve body, and the fluid can enter the operating portion. The accompanying malfunction of the first valve body can be prevented, and the surface of the second valve body moves while abutting against the first annular seal member on the outlet side, so that the fluid in the vacuum chamber outlet side passage is used. Can prevent the second valve body from entering the operating portion, and can prevent the second valve body from malfunctioning due to the intrusion of the fluid into the operating portion.

Further, according to the gate valve device according to claim 3, the valve body slides in contact with the first seal annular member by the gate valve opening / closing control means, so that the fluid in the passage enters the operating portion of the valve body. It is possible to prevent the intrusion of the valve body and prevent the malfunction of the valve body due to the intrusion of the fluid into the operating portion. Moreover, when the passage is opened and closed, the front and back surfaces of the valve body are sealed by the first annular seal member and the second annular seal member, respectively, so that airtightness can be maintained.

FIG. 1 is a schematic partially broken perspective view of a fluid switchgear according to an embodiment of the present invention. FIG. 2 is a schematic plan view showing a state in which the vacuum chamber inlet side passage (vacuum chamber outlet side passage) of FIG. 1 is closed. FIG. 3 is a schematic perspective view showing a part of FIG. 2 removed. FIG. 4 is a schematic plan view showing a state in which the vacuum chamber inlet side passage (vacuum chamber outlet side passage) of FIG. 1 is opened. FIG. 5 is a schematic perspective view showing a part of FIG. 4 removed. FIG. 6A is a schematic diagram showing the relationship between the first gate valve (second gate valve) of FIG. 1 and the first gate valve open / close control means (second gate valve open / close control means). Yes, FIG. 6 (b) is a schematic partially enlarged view showing a part of FIG. 6 (a) in an enlarged manner. 7 (a), (b), (c), and (d) are schematic cross-sectional views showing the movement of the first gate valve (second gate valve) of FIG. 1, and FIG. 7 (a) is a vacuum. FIG. 7B is a schematic cross-sectional view showing a state in which the chamber inlet side passage (vacuum chamber outlet side passage) is closed, and FIG. 7B is a second annular seal member on the inlet side (second annular seal member on the outlet side). Is a schematic cross-sectional view in a state of being separated from the first valve body (second valve body), and in FIG. 7 (c), the first valve body (second valve body) is a passage on the inlet side of the vacuum chamber. FIG. 7 (d) is a schematic cross-sectional view of a state in which the (vacuum chamber outlet side passage) is moved to open, and FIG. 7 (d) shows an inlet side second annular seal member (outlet side second annular seal member). ) Is in contact with the first valve body (second valve body). FIG. 8A is a schematic cross-sectional view showing a state in which the vacuum chamber inlet side passage is closed by the first on-off valve and the first gate valve, and FIG. 7B is a schematic cross-sectional view showing the first gate valve. It is a schematic cross-sectional view of the open state. FIG. 9A is a schematic cross-sectional view of a state in which the first on-off valve is open, and FIG. 9B is a schematic cross-sectional view of a state in which a fluid is taken into the vacuum chamber. 10 (a) is a schematic cross-sectional view in a state where the first on-off valve is closed, and FIG. 10 (b) is a schematic cross-sectional view in a state where the first gate valve is closed. FIG. 11A is a schematic cross-sectional view of a state in which a fluid is generated in a vacuum chamber, and FIG. 11B is a schematic cross-sectional view of a state in which a second gate valve is opened. be. FIG. 12 (a) is a schematic cross-sectional view in a state where the second on-off valve is open, and FIG. 12 (b) is a schematic cross-sectional view in a state where the fluid in the vacuum chamber is discharged. 13 (a) is a schematic cross-sectional view in a state where the first on-off valve is closed, and FIG. 13 (b) is a schematic cross-sectional view in a state where the second gate valve is closed.

A fluid switching device, a gate valve device, and a fluid opening / closing method according to an embodiment of the present invention will be described with reference to the drawings (FIGS. 1 to 13).
1 shown in FIG. 1 is a fluid switchgear, and the fluid switchgear 1 opens and closes a passage 2 through which a fluid X (for example, particles, powder, etc.) passes.

Reference numeral 3 is a first on-off valve for opening and closing the vacuum chamber inlet-side passage 21 of the passage 2, and the first on-off valve 3 is, for example, a butterfly valve. The opening and closing of the first on-off valve 3 is controlled by the first on-off valve opening / closing control means 4. Reference numeral 210 is a vacuum chamber entrance side passage main body having the vacuum chamber entrance side passage 21.
The first on-off valve opening / closing control means 4 is, for example, a means for advancing / retreating the first on-off valve 3 into the vacuum chamber inlet side passage 21 (for example, the first on-off valve 3 is mechanically connected to the rod of the cylinder. Then, the rod may be advanced to block the vacuum chamber inlet side passage 21 with the first on-off valve 3, and the rod may be retracted to open the first on-off valve 3 in the vacuum chamber inlet-side passage 21).
Further, the first on-off valve opening / closing control means 4 is, for example, a means for rotating the first on-off valve 3 in the vacuum chamber inlet side passage 21 (for example, a shaft is provided on the first on-off valve 3 and the shaft is provided. Is rotated clockwise to block the vacuum chamber inlet side passage 21 with the first on-off valve 3, and the shaft provided on the first on-off valve 3 is rotated counterclockwise to block the vacuum chamber. The first on-off valve 3 in the inlet-side passage 21 may be opened), and the first on-off valve opening / closing control means 4 is, for example, the one disclosed in Japanese Patent Application Laid-Open No. 2016-114223, that is, the first opening / closing. It rotates the axis of a valve rod (not shown) attached to the valve 3, and is flat attached to the valve rod (not shown) on a rack (not shown) that is driven by an air cylinder (not shown). Gears (not shown) may be meshed with each other.

Reference numeral 5 is a first gate valve located downstream of the first on-off valve 3 and having the opening of the vacuum chamber inlet-side passage 21 slid by the first valve body 51 to open and close. ..
The first valve body 51 includes a first closing portion 51A that closes the opening of the vacuum chamber inlet side passage 21 and a first valve body side opening 51B having the same size as the opening of the vacuum chamber inlet side passage 21. It is provided.
Further, the first annular seal member S1 on the inlet side faces the back surface 51D of the first valve body 51 so as to face the surface 51C of the first valve body 51 on the vacuum chamber inlet side passage main body 210. A second annular seal member S2 on the inlet side is provided, respectively.
Reference numeral 7 is a first gate valve opening / closing control means for controlling the opening / closing of the first gate valve 5.
The first gate valve opening / closing control means 7 is connected to, for example, a means for advancing / retreating the first valve body 51 of the first gate valve 5 into the vacuum chamber inlet side passage 21 (for example, a rod of an air cylinder 50). The first valve body 51 is advanced to close the opening of the vacuum chamber inlet side passage 21, and conversely, the first valve body 51 of the first gate valve 5 connected to the rod of the air cylinder 50 is retracted. The opening of the vacuum chamber entrance side passage 21 is opened.

Further, the second annular seal member S1 on the inlet side is raised by the first elevating means 100 and comes into contact with the back surface of the first valve body 51, and is lowered by the first elevating means 100 to be the first. It does not abut on the back surface of the valve body 51. The first elevating means 100 is adapted to be elevated by the first elevating control means 200 [see FIGS. 6 (a) (b) and 7 (a) (b) (c) (d)].
The first elevating means 100 is lowered by the first elevating control means 200 so that the second annular seal member S2 on the inlet side is not brought into contact with the back surface of the first valve body 51 [FIGS. 7 (a). 7 (b)], the first gate valve opening / closing control means 7 causes the first valve body 51 to come into contact with the first annular seal member S1 on the inlet side and slide to the vacuum chamber inlet side passage 21. The first valve body side opening 51B is located in the opening [see FIG. 7 (c)], and then the first elevating means 100 is raised by the first elevating control means 200 to form a second annular shape on the inlet side. The seal member S2 is brought into contact with the back surface of the first valve body 51 to open the vacuum chamber inlet side passage 21 [see FIG. 7 (d)].
The first elevating means 100 is lowered by the first elevating control means 200 [in the direction opposite to the arrow in FIG. 7D], and the second annular seal member S2 on the inlet side is placed on the back surface of the first valve body 51. [State in FIG. 7 (c)], the first valve body 51 is brought into contact with the first annular seal member S1 on the inlet side and slid by the first gate valve opening / closing control means 7. The first closed portion 51A is located at the opening of the vacuum chamber inlet side passage 21 [state of FIG. 7 (b) from the direction opposite to the arrow of FIG. 7 (c)], and then by the first elevating control means 200. The first elevating means 100 is raised to bring the second annular seal member S2 on the inlet side into contact with the back surface of the first valve body 51 to close the vacuum chamber inlet side passage 21 [FIG. 7A). reference].

Therefore, in the closed state of the first on-off valve 3, the first valve body 51 is brought into contact with the first annular seal member S1 on the inlet side by the first gate valve opening / closing control means 7 and slides to the vacuum chamber. When the first closed portion 51A is located in the opening of the inlet side passage 21, the vacuum chamber inlet side passage 21 is closed, and when the first valve body side opening 51B is located in the opening of the vacuum chamber inlet side passage 21. , The vacuum chamber entrance side passage passage 21 is opened. Moreover, when the vacuum chamber inlet side passage 21 is opened and closed, the front and back surfaces of the first valve body 51 are sealed by the inlet side first annular seal member S1 and the inlet side second annular seal member S2, respectively. Therefore, the airtightness can be maintained.

Reference numeral 8 is a vacuum chamber (decompression chamber) located downstream of the first gate valve 5 and held at a pressure lower than the atmospheric pressure. Reference numeral 220 denotes a vacuum chamber outlet side passage main body having the vacuum chamber outlet side passage 22.
Reference numeral 3'is a second on-off valve for opening and closing the vacuum chamber outlet-side passage 22 which is a passage on the outlet side of the vacuum chamber 8, and the second on-off valve 3'is the same as the first on-off valve 3 described above. The second on-off valve 3'is, for example, a butterfly valve.
Reference numeral 4'is a second on-off valve opening / closing control means for controlling the opening / closing of the second on-off valve 3', and the second on-off valve opening / closing control means 4'is the above-mentioned first on-off valve on-off control means 4 and Similarly, the second on-off valve opening / closing control means 4'is, for example, a means for rotating the second on-off valve 3'in the vacuum chamber outlet side passage 22 (for example, the second on-off valve 3'. A shaft is provided, and this shaft is rotated and rotated clockwise to block the vacuum chamber inlet side passage 22 with the second on-off valve 3', and the shaft provided on the second on-off valve 3'is counterclockwise. The second on-off valve 3'in the vacuum chamber outlet side passage 22 may be opened by rotating it around), and the second on-off valve opening / closing control means 4'is disclosed in, for example, Japanese Patent Application Laid-Open No. 2016-114223. That is, the one that rotates the shaft of the valve rod (not shown) attached to the second on-off valve 3', and the valve is attached to the rack (not shown) that is driven by the air cylinder (not shown). Spur gears (not shown) attached to a rod (not shown) may be engaged with each other.

The second on-off valve 3'is located downstream of the fluid flow from the second on-off valve 3', and the opening of the vacuum chamber outlet side passage 22 is slid by the second valve body 51'to open and close. In the gate valve, the second gate valve 5'is similar to the first gate valve 5 described above.
Like the first valve body 51, the second valve body 51'has the same size as the second closed portion 51A'that closes the opening of the vacuum chamber outlet side passage 22 and the opening of the vacuum chamber outlet side passage 22. A second valve body side opening 51B'is provided.
Further, the first annular seal member S1'on the outlet side so as to face the surface 51C'of the second valve body 51'to the vacuum chamber outlet side passage main body 220 is provided on the back surface 51D'of the second valve body 51'. A second annular seal member S2'on the outlet side is provided so as to face each other.

Further, the second annular seal member S2'on the outlet side rises by the second elevating means 100'and comes into contact with the back surface of the second valve body 51', and descends by the second elevating means 100'. The second valve body 51'is not in contact with the back surface. The second elevating means 100'is moved up and down by the second elevating control means 200' [see FIGS. 6 (a) (b) and 7 (a) (b) (c) (d). ].
The second elevating means 100'is lowered by the second elevating control means 200'to bring the second annular seal member S2'on the outlet side out of contact with the back surface of the second valve body 51'[FIG. 7 (Fig. 7). From a) to the state of FIG. (B)], the second valve body 51'is abutted against the first annular seal member S1'on the outlet side and slid by the second gate valve opening / closing control means 7'to create a vacuum. The second valve body side opening 51B'is located at the opening of the chamber exit side passage 22 [see FIG. 7 (c)], and then the second elevating means 100'is raised by the second elevating control means 200'. The second annular seal member S2'on the outlet side is brought into contact with the back surface of the second valve body 51'to open the vacuum chamber outlet side passage 22 [see FIG. 7 (d)].
The second elevating means 100'is lowered by the second elevating control means 200'[in the direction opposite to the arrow in FIG. 7 (d)], and the outlet side second annular seal member S2'is used as the second valve body. The second valve body 51'is brought into contact with the back surface of the 51' [state of FIG. 7 (c)] by the second gate valve opening / closing control means 7', and the second valve body 51'is placed on the outlet side first annular seal member S1'. The second closed portion 51A'is located at the opening of the vacuum chamber outlet side passage 22 [state of FIG. 7 (b) from the direction opposite to the arrow of FIG. 7 (c)], and then slides. The second elevating means 100'is raised by the second elevating control means 200'to bring the second annular seal member S2'on the outlet side into contact with the back surface of the second valve body 51', and the vacuum chamber outlet side. The passage 22 is closed [see FIG. 7 (a)].

Therefore, with the second on-off valve 3'closed, the second valve body 51' comes into contact with the outlet-side first annular seal member S1'and slides by the second gate valve open / close control means 7'. Then, when the second closed portion 51A'is located in the opening of the vacuum chamber outlet side passage 22, the vacuum chamber outlet side passage 22 is closed, and the second valve body side opening is in the opening of the vacuum chamber outlet side passage 22. When 51B'is located, the vacuum chamber exit side passage passage 22 is opened. Moreover, when the vacuum chamber outlet side passage 22 is opened and closed, the front and back surfaces of the second valve body 51'are formed by the outlet side first annular seal member S1'and the outlet side second annular seal member S2'. Since each is sealed, airtightness can be maintained.

According to the above-mentioned fluid opening / closing device 1, the first valve body 51 abuts on the first annular seal member S1 on the inlet side and slides by the first gate valve opening / closing control means 4, so that the vacuum chamber inlet side. The fluid in the passage 21 can prevent the first valve body 51 from entering the operating portion, and the malfunction of the first valve body 51 due to the intrusion of the fluid into the operating portion can be prevented. , The second valve body 51'slides in contact with the first annular seal member S1' on the outlet side by the second gate valve opening / closing control means 4', so that the fluid in the vacuum chamber outlet side passage 22 slides. It is possible to prevent the second valve body 51'from entering the operating portion, prevent the second valve body 51' from malfunctioning due to the intrusion of fluid into the operating portion, and further, the vacuum chamber inlet. When opening and closing the side passage 21, the front and back surfaces of the first valve body 51 are formed by the inlet side first annular seal member S1 and the inlet side first annular seal member S2 to form the vacuum chamber outlet side passage 22. In opening and closing, the front and back surfaces of the second valve body 51'are sealed by the outlet-side first annular seal member S1'and the outlet-side first annular seal member S2', respectively, and thus airtightness. Can be retained.

Next, a method of opening and closing the fluid using the above-mentioned fluid switching device 1 will be described with reference to FIGS. 8 to 13.
The vacuum chamber outlet side passage 22 is closed by the second on-off valve 3'and the second gate valve 5', and the vacuum chamber inlet side passage 21 is closed by the first on-off valve 3 and the first gate valve 5. [FIG. 8 (a)], the first gate valve 5 is opened [FIG. 8 (b)].
Next, the first on-off valve 3 is opened [FIG. 9 (a)] to guide the fluid X into the vacuum chamber 8 [FIG. 9 (b)].
After that, the first on-off valve 3 is closed [FIG. 10 (a)], and then the first gate valve 5 is closed to confine the fluid X in the vacuum chamber 8 [FIG. 10 (b)].
Then, the fluid X is generated in the vacuum chamber 8 [FIG. 11 (a)], and after the generation process, the second gate valve 5'is opened [FIG. 11 (b)].
After that, the second on-off valve 3'is opened [FIG. 12 (a)], and the fluid X is discharged from the vacuum chamber 8 [FIG. 12 (b)].
Then, in order to receive the fluid X to be processed next, the second on-off valve 3'is closed [see FIG. 13 (a)], and then the second gate valve 5'is closed [FIG. 13 (b). )reference].

Next, according to the above-described fluid opening / closing method, the front surface of the first valve body 51 is the inlet-side first annular seal member S1, and the back surface of the first valve body 51 is the inlet-side second annular seal. In contact with the member S2, the front surface of the second valve body 51'is the outlet side first annular seal member S1', and the back surface of the second valve body 51'is the outlet side second annular seal member. Not only does it abut on S2'to maintain the vacuum state of the vacuum chamber 8, but the surface of the first valve body 51 moves while abutting on the first annular seal member S1 on the inlet side, so that the vacuum chamber inlet The fluid in the side passage 21 can prevent the first valve body 51 from entering the operating portion, and the malfunction of the first valve body 51 due to the intrusion of the fluid into the operating portion can be prevented. Further, since the surface of the second valve body 51'moves while abutting against the first annular seal member S1'on the outlet side, the fluid in the vacuum chamber outlet side passage 22 operates the second valve body 51'. It is possible to prevent the intrusion into the portion, and it is possible to prevent the malfunction of the second valve body 51'due to the intrusion of the fluid into the operating portion.

In the above-described embodiment, the vacuum chamber inlet side passage 21 is opened and closed by the first gate valve 5, and the vacuum chamber outlet side passage 22 is opened and closed by the second gate valve 5'. Is not limited to this, and can be similarly applied to general passages.

In this case, the gate valve device that opens and closes the passage 2 (21 or 22) through which the fluid passes slides the opening of the passage 2 (21 or 22) with the valve body (51 or 51') to open and close. A passage body (210) having a gate valve (5 or 5'), a gate valve opening / closing control means (7 or 7') for controlling the opening / closing of the gate valve (5 or 5'), and a passage 2 (21 or 22). Or 220), and the valve body (51 or 51') has a closed portion (51A or 51A') that closes the opening of the passage 2 (21 or 22) and an opening of the passage 2 (21 or 22). A valve body side opening (51B or 51B') of the same size is provided, and a first annular sealing member (S1) is provided in the passage body (210 or 220) so as to face the surface of the valve body (51 or 51'). Alternatively, a second annular sealing member (S2 or S2') is provided so that the S1') faces the back surface of the valve body (51 or 51'), respectively, and the second annular sealing member (S2 or S2') is provided. S2') rises by the elevating means (100 or 100') and comes into contact with the back surface of the valve body (51 or 51'), and descends by the elevating means (100 or 100') to the valve body (51 or 51'). The elevating means (100 or 100') is lifted and lowered by the elevating control means (200 or 200'), and the elevating means (100 or 100') is lifted and lowered by the elevating control means (200 or 200'). The second annular seal member (S2 or S2') is brought into non-contact with the back surface of the valve body (51 or 51'), and the valve body (51') is used by the gate valve opening / closing control means (7, 7'). , 51') abuts on the first annular seal member (S1 or S1') and slides, and the valve body side opening (51B or 51B') is located at the opening of the passage 2 (21 or 22). After that, the elevating means (100 or 100') is raised by the elevating control means (200 or 200'), and the second annular sealing member (S2 or S2') is placed on the back surface of the valve body (51 or 51'). The abutment is made to open the passage 2 (21 or 22), and the elevating means (100 or 100') is lowered by the elevating control means (200 or 200') to lower the second annular sealing member (S2 or S2'). ) Is not brought into contact with the back surface of the valve body (51 or 51'), and the valve body (51 or 51') is subjected to the first annular sealing member (S1 or) by the gate valve opening / closing control means (7 or 7'). The closed portion (51A or 51A') is located at the opening of the passage 2 (21 or 22) by abutting on S1') and sliding. After that, the elevating means (100 or 100') is raised by the elevating control means (200 or 200'), and the second annular sealing member (S2 or S2') is applied to the back surface of the valve body (51 or 51'). The passage 2 (21 or 22) is opened in contact with each other.

According to the gate valve device described above, the valve body (51 or 51') slides in contact with the first seal annular member (S1 or S1') by the gate valve opening / closing control means (7 or 7'). Therefore, the fluid in the passage 2 (21 or 22) can prevent the valve body (51 or 51') from entering the operating portion, and the valve body (51 or 51') accompanying the invasion of the fluid into the operating portion. ) Can be prevented from malfunctioning. Moreover, when the passage 2 (21 or 22) is opened and closed, the front and back surfaces of the valve body (51 or 51') are a first annular seal member (S1 or S1') and a second annular seal member (S1 or S1'). Since each is sealed by S2 or S2'), airtightness can be maintained.

1 Fluid opening / closing device 2 Passage 21 Vacuum chamber inlet side passage 22 Vacuum chamber outlet side passage 3 First on-off valve 3'Second on-off valve 4 First gate valve opening / closing control means 4'Second gate valve on-off control means 5 1st gate valve 5'2nd gate valve 8 Vacuum chamber 51 1st valve body 51'2nd valve body 51A 1st closed part 51A' 2nd closed part 51B 1st valve body side opening 51B'Second valve body side opening S1 Inlet side first annular seal member S1' Outlet side first annular seal member S2 Inlet side second annular seal member S2' Outlet side second annular seal Element

Claims (3)

A fluid switchgear that opens and closes the passage through which fluid passes.
A first on-off valve that opens and closes the vacuum chamber entrance side passage of the passage,
A first on-off valve opening / closing control means for controlling the opening / closing of the first on-off valve,
A first gate valve located downstream of the fluid flow from the first on-off valve and sliding the opening of the vacuum chamber inlet-side passage with the first valve body to open and close.
A first gate valve opening / closing control means for controlling the opening / closing of the first gate valve,
A vacuum chamber located downstream of the fluid flow from the first gate valve,
A second on-off valve that opens and closes the vacuum chamber outlet-side passage, which is the vacuum chamber outlet-side passage, and
A second on-off valve opening / closing control means for controlling the opening / closing of the second on-off valve,
A second gate valve located downstream of the fluid flow from the second on-off valve and sliding the opening of the vacuum chamber outlet side passage with the second valve body to open and close.
A second gate valve opening / closing control means for controlling the opening / closing of the second gate valve,
The vacuum chamber entrance side passage main body having the vacuum chamber entrance side passage,
The vacuum chamber outlet side passage main body having the vacuum chamber outlet side passage is provided.
The first valve body is provided with a first closing portion that closes the opening of the vacuum chamber inlet side passage and a first valve body side opening having the same size as the opening of the vacuum chamber inlet side passage. ,
The first annular seal member on the inlet side faces the front surface of the first valve body on the vacuum chamber inlet side passage body, and the second ring member on the inlet side faces the back surface of the first valve body. An annular sealing member is provided, respectively.
The second annular seal member on the inlet side rises by the first elevating means and comes into contact with the back surface of the first valve body, and descends by the first elevating means to the first valve body. Non-contact with the back side of
The first elevating means is moved up and down by the first elevating control means.
The first elevating means is lowered by the first elevating control means so that the second annular seal member on the inlet side is not brought into contact with the back surface of the first valve body, and the first gate valve is opened and closed. The first valve body is brought into contact with the first annular seal member on the inlet side and slid by the control means, and the first valve body side opening is located at the opening of the vacuum chamber inlet side passage. After that, the first elevating means is raised by the first elevating control means to bring the inlet-side second annular seal member into contact with the back surface of the first valve body, and the vacuum chamber inlet-side passage. Open and
The first elevating means is lowered by the first elevating control means so that the second annular seal member on the inlet side is not brought into contact with the back surface of the first valve body, and the first gate valve is made. The opening / closing control means causes the first valve body to abut on and slide the first annular seal member on the inlet side, and the first closed portion is located at the opening of the vacuum chamber inlet side passage, and then the first closed portion is located. The first elevating means is raised by the first elevating control means, and the inlet-side second annular seal member is brought into contact with the back surface of the first valve body to form the vacuum chamber inlet-side passage. Closed and closed
The second valve body is provided with a second closing portion that closes the opening of the vacuum chamber outlet side passage and a second valve body side opening having the same size as the opening of the vacuum chamber outlet side passage. ,
The first annular seal member on the outlet side faces the front surface of the second valve body on the vacuum chamber outlet side passage body, and the second ring member on the outlet side faces the back surface of the second valve body. An annular sealing member is provided, respectively.
The outlet-side second annular seal member rises by the second elevating means and comes into contact with the back surface of the second valve body, and descends by the second elevating means to the second valve body. Non-contact with the back side of
The second elevating means is lowered by the second elevating control means so that the second annular seal member on the outlet side is not brought into contact with the back surface of the second valve body, and the second gate valve is opened and closed. The second valve body is brought into contact with the second annular seal member on the outlet side and slid by the control means, and the second valve body side opening is located at the opening of the vacuum chamber outlet side passage. After that, the second elevating means is raised by the second elevating control means to bring the outlet side second annular seal member into contact with the back surface of the second valve body, and the vacuum chamber outlet side passage. Open and
The second elevating means is lowered by the second elevating control means so that the outlet-side second annular seal member is not brought into contact with the back surface of the second valve body, and the second gate valve is made. The second valve body is brought into contact with the second annular seal member on the outlet side and slid by the opening / closing control means, and the second closing portion is located at the opening of the passage on the outlet side of the vacuum chamber, and then the second closing portion is located. The second elevating means is raised by the second elevating control means, and the outlet side second annular seal member is brought into contact with the back surface of the second valve body to form the vacuum chamber outlet side passage. A fluid opening / closing device characterized by being closed. A method for opening and closing a fluid that opens and closes a passage of the fluid switchgear according to claim 1.
The vacuum chamber outlet side passage is closed by the second on-off valve and the second gate valve, and the vacuum chamber inlet side passage is closed by the first on-off valve and the first gate valve. Guide the fluid to the vacuum chamber inlet side passage and
The first gate valve is opened, and then the first on-off valve is opened to guide the fluid into the vacuum chamber.
After that, the first on-off valve was closed, and then the first gate valve was closed to generate and process the fluid in the vacuum chamber.
After the generation process, the second gate valve is opened, and then the second on-off valve is opened, and the fluid is discharged from the vacuum chamber by opening the passage on the outlet side of the vacuum chamber. How to open and close. A gate valve device that opens and closes the passage through which fluid passes.
A gate valve that slides the opening of the passage with a valve body to open and close,
A gate valve opening / closing control means for controlling the opening / closing of this gate valve,
With a passage body having the passage,
The valve body is provided with a closed portion that closes the opening of the passage and an opening on the valve body side that is the same size as the opening of the passage.
A first annular seal member is provided on the passage body so as to face the surface of the valve body, and a second annular seal member is provided so as to face the back surface of the valve body.
The second annular seal member rises by the elevating means and abuts on the back surface of the valve body, and descends by the elevating means and does not abut on the back surface of the valve body.
The elevating means is moved up and down by the elevating control means.
The elevating means is lowered by the elevating control means to bring the second annular seal member out of contact with the back surface of the valve body, and the gate valve opening / closing control means causes the valve body to have the first annular shape. The valve body side opening is located at the opening of the passage by abutting on the seal member and sliding, and then the elevating means is raised by the elevating control means to move the second annular seal member to the valve body. The passage is opened by contacting it with the back surface of the
The elevating means is lowered by the elevating control means so that the annular seal member of 2 is not brought into contact with the back surface of the valve body, and the valve body is made of the first annular body by the gate valve opening / closing control means. The closed portion is located at the opening of the passage by abutting against the seal member and sliding, and then the elevating means is raised by the elevating control means to move the second annular seal member to the back surface of the valve body. A gate valve device characterized in that the passage is opened by abutting against a gate valve device.

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