JP2019043741A - Fluid opening/closing device and fluid opening/closing method - Google Patents

Fluid opening/closing device and fluid opening/closing method Download PDF

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JP2019043741A
JP2019043741A JP2017170113A JP2017170113A JP2019043741A JP 2019043741 A JP2019043741 A JP 2019043741A JP 2017170113 A JP2017170113 A JP 2017170113A JP 2017170113 A JP2017170113 A JP 2017170113A JP 2019043741 A JP2019043741 A JP 2019043741A
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opening
valve
closing
fluid
passage
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口 嘉 教 谷
Yoshinori Taniguchi
口 嘉 教 谷
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FUJI TECH KK
FUJI TECHNOLOGY KK
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FUJI TECH KK
FUJI TECHNOLOGY KK
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Abstract

To provide a fluid opening/closing device and a fluid opening/closing method adapted to prevent malfunction of a vacuum gate valve.SOLUTION: A fluid opening/closing device 1 is a fluid opening/closing device 1 adapted to open and close a passage 2 through which fluid passes and comprises an on-off valve 3 that opens and closes the passage 2, on-off-valve opening/closing control means that controls opening/closing of the on-off valve 3, a vacuum gate valve arranged to open/close an opening of the passage 2 by a valve plate, an accommodation part that houses the valve plate of the vacuum gate valve, vacuum-gate-valve opening/closing control means that controls opening/closing of the vacuum gate valve, a vacuum chamber that is connected to an outlet of the passage, an accommodation-part opening/closing component 9 that is located between the on-off valve 3 and the vacuum gate valve and opens and closes an opening of the accommodation part, and accommodation-part-opening/closing-component control means 10 that controls opening/closing of the accommodation-part opening/closing component 9. The vacuum gate valve is located downstream of the on-off valve 3 with respect to the fluid flow, so that when the opening of the accommodation part is opened by the accommodation-part opening/closing component 9, the opening of the accommodation part faces the passage 2.SELECTED DRAWING: Figure 3

Description

本発明は、流体開閉装置及び流体の開閉方法に係り、特に、真空ゲートバルブの動作不良を防ぐことができる流体開閉装置及び流体の開閉方法に関する。     The present invention relates to a fluid switching device and a fluid switching method, and more particularly to a fluid switching device and a fluid switching method capable of preventing malfunction of a vacuum gate valve.

通路内を弁板で開閉するようにした真空ゲートバルブがある。     There is a vacuum gate valve which is opened and closed by a valve plate in the passage.

ところが、上記真空ゲートバルブを通路内で開閉すると、例えば、通路を流れる流体、例えば、粉体の場合、真空ゲートバルブの摺動部に粉体が付着し、動作不良を起こすという問題点が生じた。     However, when the vacuum gate valve is opened and closed in the passage, for example, in the case of a fluid flowing in the passage, for example, powder, powder adheres to the sliding portion of the vacuum gate valve, causing a problem of malfunction. The

本発明は、上記の問題点を考慮してなされたもので、真空ゲートバルブの動作不良を防ぐことができる流体開閉装置及び流体の開閉方法を提供することを目的とする。     The present invention has been made in consideration of the above problems, and an object thereof is to provide a fluid switching device and a fluid switching method capable of preventing malfunction of a vacuum gate valve.

請求項１記載の流体開閉装置は、流体が通過する通路を開閉する流体開閉装置であって、前記通路を開閉する開閉弁と、この開閉弁の開閉を制御する開閉弁開閉制御手段と、前記通路の開口部を弁板で開閉するようにした真空ゲートバルブと、この真空ゲートバルブの弁板を収納する収納部と、前記真空ゲートバルブの開閉を制御する真空ゲートバルブ開閉制御手段と、前記通路の出口に接続された真空室と、前記開閉弁と前記真空ゲートバルブとの間にあって、前記収納部の開口部を開閉する収納部開閉部材と、この収納部開閉部材の開閉を制御する収納部開閉部材制御手段と、を備え、前記真空ゲートバルブは、前記開閉弁より前記流体流れの下流に位置し、前記収納部開閉部材により前記収納部の開口部を開としたとき、前記収納部の開口部は、前記通路に臨んでいるものである。     The fluid opening and closing device according to claim 1 is a fluid opening and closing device for opening and closing a passage through which the fluid passes, the opening and closing valve for opening and closing the passage, the opening and closing control means for controlling the opening and closing of the opening and closing valve, A vacuum gate valve in which the opening of the passage is opened and closed by a valve plate, a housing portion for housing the valve plate of the vacuum gate valve, vacuum gate valve opening and closing control means for controlling opening and closing of the vacuum gate valve; A storage unit opening / closing member located between a vacuum chamber connected to the outlet of the passage, the opening / closing valve and the vacuum gate valve and opening / closing the opening of the storage unit, and a storage unit controlling opening / closing of the storage unit opening / closing member A storage unit opening / closing member control unit, wherein the vacuum gate valve is positioned downstream of the fluid flow from the opening / closing valve, and the storage unit opening / closing member opens the opening of the storage unit; of Mouth are those faces to said passage.

また、請求項２記載の流体開閉装置は、請求項１記載の流体開閉装置において、流体は粉体であり、開閉弁開閉制御手段により開閉弁を開、収納部開閉部材制御手段により収納部の開口部を閉、真空ゲートバルブ開閉制御手段により真空ゲートバルブを開として、通路内の流体の流れを許容すると共に、前記通路内の流体が前記真空ゲートバルブの弁板が収納された前記収納部へ侵入するのを阻止し、前記開閉弁開閉制御手段により前記開閉弁を閉、前記収納部開閉部材制御手段により収納部の開口部を開、前記真空ゲートバルブ開閉制御手段により前記真空ゲートバルブを閉として、前記通路内の流体の流れを阻止すると共に、前記真空ゲートバルブの閉により、真空室の真空状態を保持するものである。     The fluid opening and closing device according to claim 2 is the fluid opening and closing device according to claim 1, wherein the fluid is powder, and the opening and closing valve is opened by the opening and closing valve opening and closing unit. The opening portion is closed, and the vacuum gate valve is opened by the vacuum gate valve opening / closing control means to allow the flow of fluid in the passage, and the fluid in the passage is the housing portion in which the valve plate of the vacuum gate valve is housed. The opening / closing valve is closed by the opening / closing valve control unit, the opening of the storage unit is opened by the opening / closing member control unit, and the vacuum gate valve is opened by the vacuum gate valve opening / closing control unit. As closing, the flow of fluid in the passage is blocked, and by closing the vacuum gate valve, the vacuum state of the vacuum chamber is maintained.

また、請求項３記載の流体の開閉方法は、流体が通過する通路を開閉する流体の開閉方法であって、前記通路を開閉する開閉弁と、前記通路の開口部を弁板で開閉するようにした真空ゲートバルブと、この真空ゲートバルブの弁板を収納する収納部と、この収納部の開口部を開閉する収納部開閉部材と、前記通路の出口に接続された真空室と、を備え、前記真空ゲートバルブは、前記開閉弁より前記流体流れの下流に位置し、前記開閉弁及び前記真空ゲートバルブの開により、前記通路内の流体の流れを許容すると共に、前記収納部開閉部材により前記収納部の開口部を閉じて、前記通路内の流体が前記真空ゲートバルブの弁板が収納された前記収納部へ侵入するのを阻止し、前記開閉弁の閉により、前記通路内への流体の流れを阻止すると共に、前記開閉部材により前記収納部の開口部を開として、前記収納部の開口部より前記真空ゲートバルブの弁板を前記通路を横断するように移動させて前記通路を閉とするものである。     The fluid opening and closing method according to claim 3 is a fluid opening and closing method for opening and closing a passage through which the fluid passes, such that an opening and closing valve for opening and closing the passage and an opening of the passage are opened and closed with a valve plate. A storage unit for storing the valve plate of the vacuum gate valve; a storage unit opening / closing member for opening / closing the opening of the storage unit; and a vacuum chamber connected to the outlet of the passage. The vacuum gate valve is located downstream of the fluid flow from the on-off valve, and allows the flow of fluid in the passage by opening the on-off valve and the vacuum gate valve, and the storage unit opening / closing member The opening of the storage portion is closed to prevent the fluid in the passage from intruding into the storage portion in which the valve plate of the vacuum gate valve is stored, and closing the on-off valve brings the valve into the passage. If you block the flow of fluid The opening portion of the storage portion is opened by the opening and closing member, and the valve plate of the vacuum gate valve is moved across the passage from the opening portion of the storage portion to close the passage. .

また、請求項４記載の流体の開閉方法は、請求項３記載の流体の開閉方法において、流体は粉体であり、開閉弁開閉制御手段により開閉弁を開、収納部開閉部材制御手段により収納部の開口部を閉、真空ゲートバルブ開閉制御手段により真空ゲートバルブを開として、通路内の流体の流れを許容すると共に、前記通路内の流体が前記真空ゲートバルブの弁板が収納された前記収納部へ侵入するのを阻止し、前記開閉弁開閉制御手段により前記開閉弁を閉、前記収納部開閉部材制御手段により収納部の開口部を開、前記真空ゲートバルブ開閉制御手段により前記真空ゲートバルブを閉として、前記通路内の流体の流れを阻止すると共に、前記真空ゲートバルブの閉により、真空室の真空状態を保持するものである。     According to a fourth aspect of the present invention, in the fluid opening and closing method according to the third aspect, the fluid is powder, and the on-off valve is opened by the on-off valve on-off control means, and the storage portion on-off member control means is stored. The opening of the unit is closed and the vacuum gate valve is opened by the vacuum gate valve opening / closing control means to allow the flow of fluid in the passage, and the fluid in the passage is the valve plate of the vacuum gate valve The opening / closing valve is closed by the opening / closing control unit, the opening of the storage unit is opened by the opening / closing member control unit, and the vacuum gate is opened by the vacuum gate valve opening / closing control unit. The valve is closed to block the flow of fluid in the passage, and the vacuum gate valve is closed to maintain the vacuum state of the vacuum chamber.

請求項１記載の流体開閉装置によれば、開閉弁及び真空ゲートバルブの開により、通路内の流体の流れを許容すると共に、開閉部材の閉により収納部の開口部を閉じて、通路内の流体の前記収納部への侵入を阻止して真空ゲートバルブの動作不良を防ぐことができ、しかも、開閉弁の閉により、通路内の流体の流れを阻止すると共に、真空ゲートバルブの閉により、真空室の真空状態を保持することができる。     According to the fluid opening and closing device according to claim 1, opening of the opening and closing valve and the vacuum gate valve allows fluid flow in the passage, and closing of the opening and closing member by closing the opening and closing member closes the passage. The fluid can be prevented from entering the storage part to prevent the malfunction of the vacuum gate valve, and the closing of the on-off valve prevents the fluid flow in the passage, and the closing of the vacuum gate valve The vacuum state of the vacuum chamber can be maintained.

また、請求項２記載の流体開閉装置によれば、上述した請求項１記載の発明の効果に加え、通路内の流体が粉体の場合、真空ゲートバルブの弁板が収納された収納部へ粉体が侵入するのを阻止して、真空ゲートバルブの動作不良を防ぐことができる。     Further, according to the fluid opening and closing device of the second aspect, in addition to the effect of the invention of the first aspect described above, when the fluid in the passage is powder, to the storage portion in which the valve plate of the vacuum gate valve is stored. It is possible to prevent powder from entering and prevent malfunction of the vacuum gate valve.

また、請求項３記載の流体の開閉方法によれば、開閉弁及び真空ゲートバルブの開により、通路内の流体の流れを許容すると共に、収納部開閉部材により収納部の開口部を閉じて、通路内の流体が真空ゲートバルブの弁板が収納された収納部へ侵入するのを阻止して、真空ゲートバルブの動作不良を防ぐことができ、しかも、開閉弁の閉により、通路内の流体の流れを阻止すると共に、真空ゲートバルブの閉により、真空室の真空状態を保持することができる。     Further, according to the method for opening and closing the fluid as described in claim 3, the flow of the fluid in the passage is allowed by opening the on-off valve and the vacuum gate valve, and the opening of the storage unit is closed by the storage unit opening and closing member The fluid in the passage can be prevented from intruding into the housing portion in which the valve plate of the vacuum gate valve is housed to prevent the malfunction of the vacuum gate valve, and the fluid in the passage can be prevented by closing the on-off valve. By closing the vacuum gate valve, the vacuum state of the vacuum chamber can be maintained.

また、請求項４記載の流体の開閉方法によれば、上述した請求項３記載の発明の効果に加え、通路内の流体が粉体の場合、真空ゲートバルブの弁板が収納された収納部へ粉体が侵入するのを阻止して、真空ゲートバルブの動作不良を防ぐことができる。     According to the fourth aspect of the present invention, in addition to the effects of the third aspect described above, when the fluid in the passage is powder, a storage portion in which the valve plate of the vacuum gate valve is stored. Powder can be prevented from entering to prevent malfunction of the vacuum gate valve.

図１は、本発明の一実施例の流体開閉装置の概略的一部破断斜視図である。FIG. 1 is a schematic partially broken perspective view of a fluid switching device according to an embodiment of the present invention. 図２は、図１の真空ゲートバルブ開閉制御手段を示す概略的断面図である。FIG. 2 is a schematic cross-sectional view showing the vacuum gate valve opening / closing control means of FIG. 図３は、図１の流体開閉装置の開閉弁及び真空ゲートバルブの開状態時の概略的断面図である。FIG. 3 is a schematic cross-sectional view of the on-off valve and the vacuum gate valve of the fluid on-off device of FIG. 1 in an open state. 図４は、図１の流体開閉装置の開閉弁及び真空ゲートバルブの閉状態時の概略的断面図である。FIG. 4 is a schematic cross-sectional view of the on-off valve and the vacuum gate valve of the fluid on-off device of FIG. 1 in the closed state. 図５（ａ）は、図３の状態の概略的図であり、図５（ｂ）は、図４の状態の概略的図である。FIG. 5 (a) is a schematic view of the state of FIG. 3, and FIG. 5 (b) is a schematic view of the state of FIG.

本発明の一実施例の流体開閉装置及び流体の開閉方法を図面（図１乃至図５）を参照して説明する。
図１に示す１は流体開閉装置で、流体開閉装置１は、流体が通過する通路２を開閉する装置である。 A fluid on-off apparatus and a fluid on-off method according to an embodiment of the present invention will be described with reference to the drawings (FIGS. 1 to 5).
A fluid switching apparatus 1 shown in FIG. 1 is an apparatus for opening and closing a passage 2 through which fluid passes.

３は、通路２を開閉する開閉弁で、開閉弁３は、例えば、バタフライ弁である。この開閉弁３の開閉は、開閉弁開閉制御手段４により制御されるようになっている。
開閉弁開閉制御手段４は、例えば、開閉弁３を通路２内に進退させる手段（例えば、開閉弁３をシリンダーのロッドに機構的に接続して、ロッドを前進させて開閉弁３で通路２を塞ぎ、ロッドを後退させて通路２内の開閉弁３を開く）でも良く、
また、開閉弁開閉制御手段４は、例えば、開閉弁３を通路２内で回動させる手段（例えば、開閉弁３に軸を設け、この軸を回動して、時計回りに回動させて開閉弁３で通路２を塞ぎ、開閉弁３に設けた軸を反時計回りに回動させて通路２内の開閉弁３を開く）でも良く、また、開閉弁開閉制御手段４は、例えば、特開２０１６−１１４２２３に開示されたもの、つまり、開閉弁３に取り付けられた弁棒（図示せず）の軸を回動するもので、エアシリンダー（図示せず）で動くラック（図示せず）に弁棒（図示せず）に取り付けられた平歯車（図示せず）を噛み合わせて行うようにしても良い。 Reference numeral 3 denotes an on-off valve for opening and closing the passage 2. The on-off valve 3 is, for example, a butterfly valve. The opening and closing of the on-off valve 3 is controlled by the on-off valve on-off control means 4.
The on-off valve on-off control means 4 is, for example, means for advancing or retracting the on-off valve 3 into the passage 2 (for example, mechanically connecting the on-off valve 3 to a rod of a cylinder and advancing the rod to move the on-off valve 3 Block, and retract the rod to open the on-off valve 3 in the passage 2).
Further, the on-off valve on-off control means 4 is, for example, means for rotating the on-off valve 3 in the passage 2 (for example, the on-off valve 3 is provided with a shaft, and this shaft is rotated to rotate clockwise. The passage 2 may be closed by the on-off valve 3 and the shaft provided on the on-off valve 3 may be turned counterclockwise to open the on-off valve 3 in the passage 2). What is disclosed in JP-A-2016-114223, that is, it pivots the shaft of a valve rod (not shown) attached to the on-off valve 3 and moves a rack (not shown) that moves with an air cylinder (not shown) May be engaged with a spur gear (not shown) attached to a valve stem (not shown).

５は、通路２の開口部を弁板で開閉するようにした真空ゲートバルブで、この真空ゲートバルブ５は、開閉弁３より流体流れの下流に位置している。
６は、真空ゲートバルブ５の弁板を収納する収納部で、７は、真空ゲートバルブ５の開閉を制御する真空ゲートバルブ開閉制御手段で、
真空ゲートバルブ開閉制御手段７は、例えば、真空ゲートバルブ５の弁板を通路２内に進退させる手段（例えば、エアシリンダー（図示せず）のロッド（図示せず）に接続された真空ゲートバルブ５の弁板を前進させて、通路２の開口部を閉じ、逆に、エアシリンダー（図示せず）のロッド（図示せず）に接続された真空ゲートバルブ５の弁板を後退させて、収納部６に収納させるようにして、通路２の開口部を開）としても良いし、
また、真空ゲートバルブ開閉制御手段７は、例えば、真空ゲートバルブ５の弁板を通路２内に進退させる手段（例えば、エアシリンダー（図示せず）のロッド（図示せず）に歯切りしたラック（図示せず）に平歯車（図示せず）を係合させ、前記平歯車（図示せず）に機構的に接続した継ぎ手Ｔ（図２）を介して真空ゲートバルブ５の弁板を回動させる。例えば、ラック（図示せず）の動きに追随して平歯車（図示せず）を反時計回りに回動させて、継ぎ手Ｔを介して真空ゲートバルブ５の弁板を回動させ開閉弁３で通路２を塞ぎ、逆に、ラック（図示せず）の動きに追随して平歯車（図示せず）を時計回りに回動させて、真空ゲートバルブ５の弁板を後退させて、収納部６に収納させるようにして、通路２の開口部を開としても良い。）でも良い。 A vacuum gate valve 5 is adapted to open and close the opening of the passage 2 with a valve plate, and the vacuum gate valve 5 is located downstream of the on-off valve 3 in the fluid flow.
6 is a storage unit for storing the valve plate of the vacuum gate valve 5, and 7 is a vacuum gate valve opening / closing control means for controlling the opening / closing of the vacuum gate valve 5,
The vacuum gate valve opening / closing control means 7 is, for example, a vacuum gate valve connected to a rod (not shown) of a means (for example, an air cylinder (not shown)) for moving the valve plate of the vacuum gate valve 5 into the passage 2 Advance the valve plate 5 and close the opening of the passage 2 and conversely retract the valve plate of the vacuum gate valve 5 connected to the rod (not shown) of the air cylinder (not shown), The opening of the passage 2 may be opened by being stored in the storage portion 6),
Further, the vacuum gate valve opening / closing control means 7 is, for example, a rack in which a rod (not shown) of a means (for example, an air cylinder (not shown)) for moving the valve plate of the vacuum gate valve 5 into the passage 2 A spur gear (not shown) is engaged with (not shown), and the valve plate of the vacuum gate valve 5 is rotated via a joint T (FIG. 2) mechanically connected to the spur gear (not shown). For example, following the movement of the rack (not shown), the spur gear (not shown) is turned counterclockwise to turn the valve plate of the vacuum gate valve 5 through the joint T. Close the passage 2 with the on-off valve 3 and reversely rotate the spur gear (not shown) clockwise following the movement of the rack (not shown) to retract the valve plate of the vacuum gate valve 5 (The opening of the passage 2 may be opened) so as to be stored in the storage portion 6). Good.

８は、通路２の出口に接続された大気圧より低い圧力に保持される真空室（減圧室）である。９は、開閉弁３と真空ゲートバルブ５との間にあって、収納部６の開口部を開閉する収納部開閉部材で、収納部開閉部材９は、例えば、シリンダ状部材である。
この収納部開閉部材９の開閉は、収納部開閉部材制御手段１０により開閉制御されるようになっている。
収納部開閉部材制御手段１０は、例えば、エアシリンダー１１のロッド１２を進退させて行う。１３は、収納部開閉部材９の外周に接続された接続部材で、接続部材１３の裏面にロッド１２の先端を当接して、接続部材１３は、ロッド１２の動きに追随するようになっている。
そして、収納部開閉部材９により収納部６の開口部を開としたとき、収納部６の開口部は、通路２に臨んでいる。 Reference numeral 8 denotes a vacuum chamber (decompression chamber) connected to the outlet of the passage 2 and maintained at a pressure lower than the atmospheric pressure. A storage unit opening / closing member 9 is located between the opening / closing valve 3 and the vacuum gate valve 5 and opens / closes the opening of the storage unit 6. The storage unit opening / closing member 9 is, for example, a cylindrical member.
Opening and closing of the storage portion opening and closing member 9 is controlled by the storage portion opening and closing member control means 10.
The storage unit opening / closing member control means 10 performs, for example, advancing and retracting the rod 12 of the air cylinder 11. A connecting member 13 is connected to the outer periphery of the storage unit opening / closing member 9 and abuts the tip of the rod 12 on the back surface of the connecting member 13 so that the connecting member 13 follows the movement of the rod 12 .
When the opening of the storage portion 6 is opened by the storage portion opening / closing member 9, the opening of the storage portion 6 faces the passage 2.

上述した流体開閉装置１にあっては、図３及び図５（ａ）に示すように、開閉弁３及び真空ゲートバルブ５の開により、通路２内の流体の流れを許容すると共に、収納部開閉部材９により収納部７の開口部を閉じて、通路２内の流体が真空ゲートバルブ５の弁板が収納された収納部７へ侵入するのを阻止しうることができる。
また、逆に、図４及び図５（ｂ）に示すように、開閉弁３の閉により、通路２内への流体の流れを阻止すると共に、収納部開閉部材９により収納部６の開口部を開として、収納部６の開口部より真空ゲートバルブ５の弁板を通路２を横断するように移動させて通路２を閉とすることができる。 In the fluid opening / closing device 1 described above, as shown in FIGS. 3 and 5 (a), the opening of the opening / closing valve 3 and the vacuum gate valve 5 allows the flow of fluid in the passage 2 and The opening of the storage unit 7 can be closed by the opening / closing member 9 to prevent the fluid in the passage 2 from entering the storage unit 7 in which the valve plate of the vacuum gate valve 5 is stored.
Also, conversely, as shown in FIG. 4 and FIG. 5B, the closing of the on-off valve 3 blocks the flow of fluid into the passage 2 and the opening of the storage section 6 by the storage section opening / closing member 9 , And the valve plate of the vacuum gate valve 5 can be moved across the passage 2 from the opening of the storage portion 6 to close the passage 2.

従って、上述した流体開閉装置（流体の開閉方法）１によれば、開閉弁３及び真空ゲートバルブ５の開により、通路２内の流体の流れを許容すると共に、収納部開閉部材９の閉により収納部６の開口部を閉じて、通路２内の流体の収納部６への侵入を阻止して真空ゲートバルブ５の動作不良を防ぐことができ、しかも、収納部開閉部材９の閉により、通路２内の流体の流れを阻止すると共に、真空ゲートバルブ５の閉により、真空室（減圧室）８の真空（減圧）状態を保持することができる。     Therefore, according to the above-described fluid opening / closing device (fluid opening / closing method) 1, the opening / closing valve 3 and the vacuum gate valve 5 allow the flow of fluid in the passage 2, and the storage portion opening / closing member 9 is closed. By closing the opening of the storage portion 6 to prevent the fluid in the passage 2 from invading into the storage portion 6, malfunction of the vacuum gate valve 5 can be prevented. The flow of fluid in the passage 2 is blocked, and by closing the vacuum gate valve 5, the vacuum (decompression) state of the vacuum chamber (decompression chamber) 8 can be maintained.

なお、流体は液体、気体、粉体の何れかであれば良く、収納部開閉部材９の閉により収納部６の開口部を閉じて、通路２内の流体の収納部６への侵入を阻止して真空ゲートバルブ５を液体、気体及び粉体から保護することができる。
本実施例の流体開閉装置（流体の開閉方法）１においては、例えば、通路２内の流体が粉体の場合、真空ゲートバルブ５の弁板が収納された収納部６へ粉体が侵入するのを阻止して、真空ゲートバルブ５の動作不良を防ぐことができる。 The fluid may be any of liquid, gas, and powder, and the opening of the storage unit 6 is closed by closing the storage unit opening / closing member 9 to prevent the fluid in the passage 2 from invading the storage unit 6. Thus, the vacuum gate valve 5 can be protected from liquid, gas and powder.
In the fluid opening and closing device (fluid opening and closing method) 1 of the present embodiment, for example, when the fluid in the passage 2 is powder, the powder intrudes into the storage portion 6 in which the valve plate of the vacuum gate valve 5 is stored. Can be prevented to prevent the malfunction of the vacuum gate valve 5.

１ 流体開閉装置
２ 通路
３ 開閉弁
４ 開閉弁開閉制御手段
５ 真空ゲートバルブ
６ 収納部
７ 真空ゲートバルブ開閉制御手段
８ 真空室
９ 収納部開閉部材
１０ 納部開閉部材制御手段 Reference Signs List 1 fluid opening / closing device 2 passage 3 opening / closing valve 4 opening / closing valve opening / closing control means 5 vacuum gate valve 6 housing portion 7 vacuum gate valve opening / closing control means 8 vacuum chamber 9 housing portion opening / closing member 10 storage portion opening / closing member control means

Claims (4)

流体が通過する通路を開閉する流体開閉装置であって、
前記通路を開閉する開閉弁と、
この開閉弁の開閉を制御する開閉弁開閉制御手段と、
前記通路の開口部を弁板で開閉するようにした真空ゲートバルブと、
この真空ゲートバルブの弁板を収納する収納部と、
前記真空ゲートバルブの開閉を制御する真空ゲートバルブ開閉制御手段と、
前記通路の出口に接続された真空室と、
前記開閉弁と前記真空ゲートバルブとの間にあって、前記収納部の開口部を開閉する収納部開閉部材と、
この収納部開閉部材の開閉を制御する収納部開閉部材制御手段と、
を備え、
前記真空ゲートバルブは、前記開閉弁より前記流体流れの下流に位置し、
前記収納部開閉部材により前記収納部の開口部を開としたとき、前記収納部の開口部は、前記通路に臨んでいる
ことを特徴とする流体開閉装置。 A fluid opening and closing device for opening and closing a passage through which fluid passes,
An on-off valve for opening and closing the passage;
On-off valve on-off control means for controlling on-off of the on-off valve;
A vacuum gate valve configured to open and close the opening of the passage with a valve plate;
A housing portion for housing a valve plate of the vacuum gate valve;
Vacuum gate valve opening / closing control means for controlling opening / closing of the vacuum gate valve;
A vacuum chamber connected to the outlet of the passage;
A storage unit opening / closing member located between the opening / closing valve and the vacuum gate valve and opening / closing the opening of the storage unit;
A storage unit opening / closing member control unit that controls the opening / closing of the storage unit opening / closing member;
Equipped with
The vacuum gate valve is located downstream of the fluid flow from the on-off valve,
A fluid opening / closing device characterized in that when the opening of the storage unit is opened by the storage unit opening / closing member, the opening of the storage unit faces the passage. 流体は粉体であり、
開閉弁開閉制御手段により開閉弁を開、収納部開閉部材制御手段により収納部の開口部を閉、真空ゲートバルブ開閉制御手段により真空ゲートバルブを開として、通路内の流体の流れを許容すると共に、前記通路内の流体が前記真空ゲートバルブの弁板が収納された前記収納部へ侵入するのを阻止し、
前記開閉弁開閉制御手段により前記開閉弁を閉、前記収納部開閉部材制御手段により収納部の開口部を開、前記真空ゲートバルブ開閉制御手段により前記真空ゲートバルブを閉として、前記通路内の流体の流れを阻止すると共に、前記真空ゲートバルブの閉により、真空室の真空状態を保持する
ことを特徴とする請求項１記載の流体開閉装置。 The fluid is powder and
The opening / closing valve is opened by the opening / closing control means, the opening of the storage portion is closed by the opening / closing member control means, the vacuum gate valve is opened by the vacuum gate valve opening / closing control, and the flow of fluid in the passage is permitted. The fluid in the passage is prevented from intruding into the storage section in which the valve plate of the vacuum gate valve is stored;
The on-off valve is closed by the on-off valve on-off control unit, the opening of the storage unit is opened on the on-off unit open-close member control unit, the vacuum gate valve is closed on the on-off valve control unit, the fluid in the passage The fluid switching device according to claim 1, wherein the vacuum gate valve is closed to maintain the vacuum state of the vacuum chamber by blocking the flow of the fluid. 流体が通過する通路を開閉する流体の開閉方法であって、
前記通路を開閉する開閉弁と、
前記通路の開口部を弁板で開閉するようにした真空ゲートバルブと、
この真空ゲートバルブの弁板を収納する収納部と、
この収納部の開口部を開閉する収納部開閉部材と、
前記通路の出口に接続された真空室と、
を備え、
前記真空ゲートバルブは、前記開閉弁より前記流体流れの下流に位置し、
前記開閉弁及び前記真空ゲートバルブの開により、前記通路内の流体の流れを許容すると共に、前記収納部開閉部材により前記収納部の開口部を閉じて、前記通路内の流体が前記真空ゲートバルブの弁板が収納された前記収納部へ侵入するのを阻止し、
前記開閉弁の閉により、前記通路内への流体の流れを阻止すると共に、前記開閉部材により前記収納部の開口部を開として、前記収納部の開口部より前記真空ゲートバルブの弁板を前記通路を横断するように移動させて前記通路を閉とする
ことを特徴とする流体の開閉方法。 A fluid opening and closing method for opening and closing a passage through which the fluid passes,
An on-off valve for opening and closing the passage;
A vacuum gate valve configured to open and close the opening of the passage with a valve plate;
A housing portion for housing a valve plate of the vacuum gate valve;
A storage unit opening and closing member that opens and closes an opening of the storage unit;
A vacuum chamber connected to the outlet of the passage;
Equipped with
The vacuum gate valve is located downstream of the fluid flow from the on-off valve,
The opening of the open / close valve and the vacuum gate valve allows the flow of fluid in the passage, and the opening / closing member of the storage portion closes the opening of the storage portion, whereby the fluid in the passage is the vacuum gate valve Block the entry of the valve plate of the
The closing of the on-off valve prevents the flow of fluid into the passage, and the opening of the storage unit is opened by the opening and closing member, and the valve plate of the vacuum gate valve is opened from the opening of the storage unit. A method of opening and closing a fluid, which is moved across a passage to close the passage. 流体は粉体であり、
開閉弁開閉制御手段により開閉弁を開、収納部開閉部材制御手段により収納部の開口部を閉、真空ゲートバルブ開閉制御手段により真空ゲートバルブを開として、通路内の流体の流れを許容すると共に、前記通路内の流体が前記真空ゲートバルブの弁板が収納された前記収納部へ侵入するのを阻止し、
前記開閉弁開閉制御手段により前記開閉弁を閉、前記収納部開閉部材制御手段により収納部の開口部を開、前記真空ゲートバルブ開閉制御手段により前記真空ゲートバルブを閉として、前記通路内の流体の流れを阻止すると共に、前記真空ゲートバルブの閉により、真空室の真空状態を保持する
ことを特徴とする請求項３記載の流体の開閉方法。 The fluid is powder and
The opening / closing valve is opened by the opening / closing control means, the opening of the storage portion is closed by the opening / closing member control means, the vacuum gate valve is opened by the vacuum gate valve opening / closing control, and the flow of fluid in the passage is permitted. The fluid in the passage is prevented from intruding into the storage section in which the valve plate of the vacuum gate valve is stored;
The on-off valve is closed by the on-off valve on-off control unit, the opening of the storage unit is opened on the on-off unit open-close member control unit, the vacuum gate valve is closed on the on-off valve control unit, the fluid in the passage 4. The method according to claim 3, wherein the vacuum state of the vacuum chamber is maintained by closing the vacuum gate valve while blocking the flow of the fluid.
JP2017170113A 2017-09-05 2017-09-05 Fluid opening/closing device and fluid opening/closing method Pending JP2019043741A (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2021181800A (en) * 2020-05-19 2021-11-25 株式会社フジ・テクノロジー Fluid opening/closing device, gate valve device, and opening and closing method for fluid

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2021181800A (en) * 2020-05-19 2021-11-25 株式会社フジ・テクノロジー Fluid opening/closing device, gate valve device, and opening and closing method for fluid
JP7370588B2 (en) 2020-05-19 2023-10-30 株式会社フジ・テクノロジー Fluid opening/closing device for vacuum chambers, gate valve devices for vacuum chambers, and fluid opening/closing methods

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