JP7370588B2 - Fluid opening/closing device for vacuum chambers, gate valve devices for vacuum chambers, and fluid opening/closing methods - Google Patents

Description

Application of Article 30, Paragraph 2 of the Patent Act 1. Publication facts ▲1▼ Website publication date March 11, 2020 ▲2▼ Website address https://www. fujitechnology. co. jp/ ▲3▼Publisher: Fuji Technology Co., Ltd. ▲4▼Contents of the disclosed invention: Fuji Technology Co., Ltd., on the website of Fuji Technology Co., Ltd. published at the website at the above address, The fluid opening/closing device, gate valve device, and fluid opening/closing method invented by Yoshinori were disclosed. 2. Facts regarding inheritance of the right to obtain a patent, etc. ▲1▼Inventor of the disclosed invention: Yoshinori Taniguchi (within Fuji Technology Co., Ltd., 11-7 Idogaya Shimamachi, Minami-ku, Yokohama, Kanagawa Prefecture) ▲2▼Disclosure of the invention Person who has the right to obtain a patent at the time of the causing act (right holder at the time of the act) Fuji Technology Co., Ltd. (11-7 Idogaya Shimomachi, Minami-ku, Yokohama, Kanagawa Prefecture) ▲3▼Patent applicant (stated in the application form) Fuji Technology Co., Ltd. ▲4▼Publisher Fuji Technology Co., Ltd. ▲5▼Succession of the right to obtain a patent The invention disclosed by the disclosure act described in the disclosure facts was invented by Yoshinori Taniguchi. The right to obtain a patent for the invention was transferred from Yoshinori Taniguchi to Fuji Technology Co., Ltd. on March 2, 2020. At the time of publication, March 11, 2020, Fuji Technology Co., Ltd. held the right to obtain a patent for the invention. Then, on May 19, 2020, Fuji Technology Co., Ltd. filed a patent application. ▲6▼ Regarding the relationship between the right holder at the time of the act and the publisher Fuji Technology Co., Ltd., the right holder at the time of the act, has provided information regarding the fluid opening/closing device, gate valve device, and fluid opening/closing method as stated in the disclosure facts. It was published as follows.

The present invention relates to a fluid opening/closing device for a vacuum chamber , a gate valve device for a vacuum chamber, and a method for opening/closing fluid, and more particularly, the present invention relates to a fluid opening/closing device for a vacuum chamber that can prevent malfunction of a gate valve , and a fluid opening/closing device for a vacuum chamber that can prevent malfunction of a gate valve. The present invention relates to a gate valve device and a fluid opening/closing method.

There is a gate valve that uses a valve plate to open and close the inside of a passage.

However, when the gate valve is opened and closed within the passage, for example, if the fluid flowing through the passage, such as powder, adheres to the sliding portion of the gate valve, causing malfunction.

The present invention has been made in consideration of the above problems, and provides a fluid opening/closing device for a vacuum chamber , a gate valve device for a vacuum chamber, and a fluid opening/closing method that can prevent malfunctions of gate valves. The purpose is to

The fluid switching device for a vacuum chamber according to claim 1 is a fluid switching device for a vacuum chamber that opens and closes a passage through which a fluid passes, and includes a first on-off valve that opens and closes a passage on the vacuum chamber inlet side of the passage; a first on-off valve opening/closing control means for controlling opening and closing of the first on-off valve; a first gate valve slidably opened and closed by a first valve body; a first gate valve opening/closing control means for controlling opening and closing of the first gate valve; a vacuum chamber located downstream of the flow of the vacuum chamber, a second on-off valve that opens and closes the vacuum chamber outlet side passage, which is a passage on the outlet side of this vacuum chamber, and a second on-off valve that controls opening and closing of the second on-off valve. an on-off valve opening/closing control means; and a second on-off valve located downstream of the fluid flow from the second on-off valve and configured to open and close by sliding the opening of the vacuum chamber outlet side passage with a second valve body. a gate valve, a second gate valve opening/closing control means for controlling opening and closing of the second gate valve, a vacuum chamber entrance passage main body having the vacuum chamber entrance passage, and a vacuum chamber exit passage. a vacuum chamber outlet side passage main body, and the first valve body has a first closing part that closes the opening of the vacuum chamber entrance side passage and a same size as the opening of the vacuum chamber entrance side passage. A first valve body side opening is provided, and an inlet side first annular seal member is provided in the vacuum chamber inlet side passage main body so as to face the surface of the first valve body. A second annular seal member on the inlet side is provided so as to face the back surface, and the second annular seal member on the inlet side is raised by a first elevating means to reach the back surface of the first valve body. The first lifting means lowers the valve body to non-contact with the back surface of the first valve body, and the first lifting means moves up and down by the first lifting control means, The first lifting/lowering means is lowered by the lifting/lowering control means so that the second annular seal member on the inlet side does not come into contact with the back surface of the first valve body, and the first gate valve opening/closing controlling means lowers the first lifting/lowering means. The first valve body is slid in contact with the first annular seal member on the inlet side, the first valve body side opening is located at the opening of the vacuum chamber inlet side passage, and then the first valve body side opening is located at the opening of the vacuum chamber inlet side passage. the first lifting/lowering means is raised by the first lifting/lowering control means to bring the second annular sealing member on the entrance side into contact with the back surface of the first valve body to open the passage on the vacuum chamber entrance side; The first elevating means is lowered by the first elevating control means so that the second annular seal member on the inlet side does not come into contact with the back surface of the first valve body, and the first elevating means The opening/closing control means causes the first valve body to slide in contact with the first annular sealing member on the inlet side, and the first closing part is located at the opening of the passage on the inlet side of the vacuum chamber, and then , the first elevating means is raised by the first elevating control means to bring the second annular sealing member on the inlet side into contact with the back surface of the first valve body to open the vacuum chamber inlet side passage. and the second valve body includes a second closing part that closes the opening of the vacuum chamber outlet side passage, and a second valve body side opening having the same size as the opening of the vacuum chamber outlet side passage. is provided in the vacuum chamber outlet side passage main body, and an outlet side first annular seal member is provided in the vacuum chamber outlet side passage main body so as to face the surface of the second valve body, and an outlet side so as to face the back surface of the second valve body. A second annular seal member on the outlet side is provided, and the second annular seal member on the outlet side is raised by a second elevating means to abut on the back surface of the second valve body, and the second annular seal member on the outlet side The second elevating means is moved up and down by a second elevating control means, and the second elevating means is moved up and down by a second elevating control means. The elevating means is lowered so that the second annular sealing member on the outlet side does not come into contact with the back surface of the second valve body, and the second valve body is moved by the second gate valve opening/closing control means. The second valve body side opening is positioned at the opening of the vacuum chamber outlet side passage by sliding it in contact with the second annular sealing member on the outlet side, and then the second lifting control means The second elevating means is raised to bring the second annular seal member on the outlet side into contact with the back surface of the second valve body to open the vacuum chamber outlet side passage, and the second elevating control means The second elevating means is lowered to bring the second annular sealing member on the outlet side out of contact with the back surface of the second valve body, and the second gate valve opening/closing control means lowers the second annular seal member on the outlet side. The valve body contacts and slides the second annular sealing member on the outlet side, the second closing part is located at the opening of the passage on the outlet side of the vacuum chamber, and then the second elevation control is performed. The second elevating means is raised by the means to bring the second annular seal member on the outlet side into contact with the back surface of the second valve body, thereby closing the passage on the outlet side of the vacuum chamber, and removing the passage from the vacuum chamber. When discharging the fluid, the second gate valve is opened, and then the second on-off valve is opened to open the vacuum chamber outlet side passage, thereby discharging the fluid from the vacuum chamber.

Further, a fluid opening/closing method according to claim 2 is a fluid opening/closing method for opening and closing a passage of the fluid opening/closing device for a vacuum chamber according to claim 1, wherein the vacuum chamber outlet side passage is connected to the second opening/closing valve. and closed by the second gate valve, and with the vacuum chamber inlet side passage closed by the first on-off valve and the first gate valve, introducing the fluid into the vacuum chamber inlet side passage, 1 gate valve is opened, and then the first on-off valve is opened to guide the fluid into the vacuum chamber, and then the first on-off valve is closed, and then the first gate valve is closed. , the fluid is generated in the vacuum chamber, and after the generation process, the second gate valve is opened, and then the second opening/closing valve is opened to open the vacuum chamber outlet passage, thereby causing the fluid to flow from the vacuum chamber. This is for discharging the fluid.

Further, the gate valve device according to claim 3 is a gate valve device provided on the exit side of a vacuum chamber that opens and closes a passage through which a fluid passes, and the gate valve device is provided on the exit side of the vacuum chamber, which is the passage on the exit side of the vacuum chamber. an on-off valve for opening and closing the passage; an on-off valve opening/closing control means for controlling the opening and closing of the on-off valve; A gate valve configured to slide to open and close, a gate valve opening/closing control means for controlling opening and closing of the gate valve, and a passage main body having the passage, and the valve body includes a passage that closes an opening of the passage. A valve body side opening having the same size as the closing portion and the opening of the passage is provided, and a first annular sealing member is provided on the back surface of the valve body so as to face the surface of the valve body in the passage main body. Second annular seal members are provided to face each other, and the second annular seal members are raised by a lifting means to abut against the back surface of the valve body, and lowered by the lifting means. The elevating means is moved up and down by an elevating control means, and the elevating means is lowered by the elevating control means so that the second annular seal member is not in contact with the back surface of the valve element. and the gate valve opening/closing control means causes the valve body to come into contact with and slide the first annular seal member, so that the valve body side opening is located at the opening of the passage, and then the lifting/lowering operation is performed. The control means raises the elevating means to bring the second annular seal member into contact with the back surface of the valve body to open the passage, and the elevating means lowers the elevating means to open the passage. A second annular sealing member is made not to contact the back surface of the valve body, and the gate valve opening/closing control means causes the valve body to come into contact with and slide against the first annular sealing member, thereby opening the passageway. The closing portion is located at , and then the elevating means is raised by the elevating control means to bring the second annular sealing member into contact with the back surface of the valve body to close the passage, and the vacuum chamber is closed. When discharging the fluid from the vacuum chamber, the gate valve is opened, and then the on-off valve is opened to open the vacuum chamber outlet passage, thereby discharging the fluid from the vacuum chamber.

According to the fluid switching device for a vacuum chamber according to claim 1, since the first valve body slides in contact with the first annular sealing member on the inlet side by the first gate valve opening/closing control means, the vacuum Fluid in the chamber inlet side passage can be prevented from entering the operating section of the first valve element, and malfunction of the first valve element due to intrusion of fluid into the operating section can be prevented. Since the second valve element slides in contact with the first annular sealing member on the outlet side by the second gate valve opening/closing control means, the fluid in the passage on the outlet side of the vacuum chamber causes the operation of the second valve element. It is possible to prevent the fluid from entering the operating section, and to prevent malfunction of the second valve body due to the intrusion of fluid into the operating section. The front and back sides of the second valve body are connected to the outlet by a first annular seal member on the inlet side and a second annular seal member on the inlet side. Since the first annular seal member on the side and the second annular seal member on the outlet side seal each other, airtightness can be maintained.

According to the fluid opening/closing method according to claim 2, the front and back surfaces of the first valve body are connected to the first annular seal member on the inlet side and the second annular seal member on the inlet side. The front and back surfaces of the first valve body are in contact with a second annular seal member on the outlet side and a second annular seal member on the outlet side, respectively, to maintain the vacuum state of the vacuum chamber, and the surface of the first valve body is on the inlet side. Since it moves while coming into contact with the first annular seal member, the fluid in the vacuum chamber inlet side passage can be prevented from entering into the operating section of the first valve body. In addition, since the surface of the second valve body moves while contacting the first annular sealing member on the outlet side, the fluid in the outlet side passage of the vacuum chamber can be prevented from malfunctioning. can prevent the second valve body from entering into the actuating portion, and can prevent malfunction of the second valve body due to the intrusion of fluid into the actuating portion.

Further, according to the gate valve device for a vacuum chamber according to claim 3, since the valve body slides in contact with the first seal annular member by the gate valve opening/closing control means, the fluid in the passage is caused to flow through the valve body. It is possible to prevent fluid from entering the operating section, and malfunction of the valve body due to fluid entering the operating section can be prevented. Moreover, when the passage is opened and closed, the front and back sides of the valve body are sealed by the first annular seal member and the second annular seal member, so that airtightness can be maintained.

FIG. 1 is a schematic partially cutaway perspective view of a fluid switching device for a vacuum chamber according to an embodiment of the present invention. FIG. 2 is a schematic plan view showing a state in which the vacuum chamber inlet side passage (vacuum chamber outlet side passage) of FIG. 1 is closed. FIG. 3 is a schematic perspective view with a portion of FIG. 2 removed. FIG. 4 is a schematic plan view showing a state in which the vacuum chamber inlet side passage (vacuum chamber outlet side passage) of FIG. 1 is opened. FIG. 5 is a schematic perspective view with a portion of FIG. 4 removed. FIG. 6(a) is a schematic diagram showing the relationship between the first gate valve (second gate valve) and the first gate valve opening/closing control means (second gate valve opening/closing control means) in FIG. 6(b) is a schematic partially enlarged view showing a part of FIG. 6(a). 7(a), (b), (c), and (d) are schematic cross-sectional views showing the movement of the first gate valve (second gate valve) in FIG. FIG. 7B is a schematic cross-sectional view of the chamber inlet side passage (vacuum chamber outlet side passage) in a closed state, and FIG. 7(b) shows the second annular seal member on the inlet side (the second annular seal member on the outlet side). 7(c) is a schematic cross-sectional view of a state in which the first valve body (second valve body) is separated from the first valve body (second valve body), and FIG. FIG. 7(d) is a schematic cross-sectional view of the state in which the passage is moved to open the outlet side passage of the vacuum chamber, and FIG. ) is a schematic cross-sectional view of a state where the valve body (second valve body) is in contact with the first valve body (second valve body). FIG. 8(a) is a schematic cross-sectional view of the vacuum chamber inlet side passage closed by the first on-off valve and the first gate valve, and FIG. FIG. 3 is a schematic cross-sectional view in an open state. FIG. 9(a) is a schematic cross-sectional view with the first on-off valve open, and FIG. 9(b) is a schematic cross-sectional view with fluid taken into the vacuum chamber. FIG. 10(a) is a schematic sectional view with the first on-off valve closed, and FIG. 10(b) is a schematic sectional view with the first gate valve closed. FIG. 11(a) is a schematic cross-sectional view of the state in which the fluid in the vacuum chamber is being generated, and FIG. 11(b) is a schematic cross-sectional view of the state in which the second gate valve is opened. be. FIG. 12(a) is a schematic cross-sectional view with the second on-off valve open, and FIG. 12(b) is a schematic cross-sectional view with the fluid in the vacuum chamber discharged. FIG. 13(a) is a schematic sectional view with the first on-off valve closed, and FIG. 13(b) is a schematic sectional view with the second gate valve closed.

DESCRIPTION OF THE PREFERRED EMBODIMENTS A fluid switching device for a vacuum chamber , a gate valve device for a vacuum chamber, and a fluid switching method according to an embodiment of the present invention will be described with reference to the drawings (FIGS. 1 to 13).
Reference numeral 1 shown in FIG. 1 is a fluid switching device for a vacuum chamber , and the fluid switching device 1 for a vacuum chamber opens and closes a passage 2 through which a fluid X (for example, particles, powder, etc.) passes.

3 is a first on-off valve that opens and closes the vacuum chamber inlet side passage 21 of the passage 2, and the first on-off valve 3 is, for example, a butterfly valve. The opening and closing of the first on-off valve 3 is controlled by a first on-off valve opening/closing control means 4. 210 is a vacuum chamber entrance side passage main body having a vacuum chamber entrance side passage 21.
The first on-off valve on-off control means 4 includes, for example, means for moving the first on-off valve 3 into and out of the vacuum chamber inlet passage 21 (for example, mechanically connecting the first on-off valve 3 to a rod of a cylinder). (The rod may be moved forward to close the vacuum chamber inlet passage 21 with the first on-off valve 3, and the rod may be moved back to open the first on-off valve 3 in the vacuum chamber inlet passage 21.)
Further, the first on-off valve on-off control means 4 includes, for example, a means for rotating the first on-off valve 3 within the vacuum chamber inlet side passage 21 (for example, a shaft is provided on the first on-off valve 3, and the first on-off valve 3 is provided with a shaft, The vacuum chamber inlet passage 21 is closed by the first on-off valve 3 by turning it clockwise, and the shaft provided in the first on-off valve 3 is turned counterclockwise to close the vacuum chamber inlet side passage 21 with the first on-off valve 3. The first on-off valve 3 in the inlet side passage 21 may be opened), and the first on-off valve on-off control means 4 may be, for example, the one disclosed in JP-A No. 2016-114223, that is, the first on-off valve 3 in the inlet side passage 21. This is a device that rotates the shaft of a valve stem (not shown) attached to the valve 3, and a flat plate attached to the valve stem (not shown) on a rack (not shown) that is moved by an air cylinder (not shown). This may be done by meshing gears (not shown).

Reference numeral 5 designates a first gate valve located downstream of the first on-off valve 3 in the fluid flow and configured to open and close the opening of the vacuum chamber inlet side passage 21 by sliding it with a first valve body 51. .
The first valve body 51 has a first closing part 51A that closes the opening of the vacuum chamber inlet passage 21 and a first valve body opening 51B having the same size as the opening of the vacuum chamber inlet passage 21. It is provided.
Further, the first annular seal member S1 on the inlet side is arranged in the vacuum chamber inlet side passage main body 210 so as to face the front surface 51C of the first valve body 51, and the first annular seal member S1 on the inlet side faces the back surface 51D of the first valve body 51. A second annular seal member S2 on the inlet side is provided.
7 is a first gate valve opening/closing control means for controlling opening/closing of the first gate valve 5;
The first gate valve opening/closing control means 7 includes, for example, a means for moving the first valve body 51 of the first gate valve 5 into and out of the vacuum chamber inlet passage 21 (e.g., a means connected to a rod of an air cylinder 50). The first valve body 51 is advanced to close the opening of the vacuum chamber inlet side passage 21, and conversely, the first valve body 51 of the first gate valve 5 connected to the rod of the air cylinder 50 is retreated. In this way, the opening of the vacuum chamber inlet side passage 21 is opened.

Further, the second annular seal member S1 on the inlet side is raised by the first lifting means 100 and comes into contact with the back surface of the first valve body 51, and is lowered by the first lifting means 100 to the first position. It does not come into contact with the back surface of the valve body 51. The first elevating means 100 is raised and lowered by a first elevating control means 200 [see FIGS. 6(a), (b), and FIGS. 7(a), (b), (c), and (d)].
The first elevating means 100 is lowered by the first elevating control means 200 so that the second annular seal member S2 on the inlet side does not come into contact with the back surface of the first valve body 51 [Figs. 7(b) state], the first valve body 51 is caused to slide in contact with the first annular seal member S1 on the inlet side by the first gate valve opening/closing control means 7, and the first valve body 51 is caused to slide in contact with the first annular seal member S1 on the inlet side, thereby opening the vacuum chamber inlet side passage 21. The first valve body side opening 51B is located at the opening [see FIG. 7(c)], and then the first elevation control means 200 raises the first elevation means 100 to open the second annular opening on the inlet side. The sealing member S2 is brought into contact with the back surface of the first valve body 51 to open the vacuum chamber inlet side passage 21 [see FIG. 7(d)],
The first elevating means 100 is lowered by the first elevating control means 200 [in the opposite direction to the arrow in FIG. [the state shown in FIG. 7(c)], and the first valve body 51 is caused to come into contact with and slide against the first annular seal member S1 on the inlet side by the first gate valve opening/closing control means 7, The first closing portion 51A is located at the opening of the vacuum chamber inlet side passage 21 [the state shown in FIG. 7(b) from the direction opposite to the arrow in FIG. 7(c)], and then the first elevation control means 200 The first elevating means 100 is raised to bring the second annular seal member S2 on the inlet side into contact with the back surface of the first valve body 51 to close the vacuum chamber inlet side passage 21 [FIG. 7(a) reference].

Therefore, when the first on-off valve 3 is in the closed state, the first valve body 51 slides in contact with the first annular seal member S1 on the inlet side by the first gate valve on-off control means 7, and the vacuum chamber When the first closing part 51A is located at the opening of the inlet side passage 21, the vacuum chamber inlet side passage 21 is closed, and when the first valve body side opening 51B is positioned at the opening of the vacuum chamber inlet side passage 21. , the vacuum chamber inlet side passageway 21 is opened. Moreover, when opening and closing the vacuum chamber inlet side passage 21, the front and back surfaces of the first valve body 51 are sealed by the first annular seal member S1 on the inlet side and the second annular seal member S2 on the inlet side, respectively. Therefore, airtightness can be maintained.

8 is a vacuum chamber (decompression chamber) located downstream of the first gate valve 5 in the fluid flow and maintained at a pressure lower than atmospheric pressure. 220 is a vacuum chamber outlet side passage main body having a vacuum chamber outlet side passage 22.
3' is a second on-off valve that opens and closes the vacuum chamber outlet side passage 22 which is the outlet side passage of the vacuum chamber 8; the second on-off valve 3' is similar to the first on-off valve 3 described above; The second on-off valve 3' is, for example, a butterfly valve.
4' is a second on-off valve opening/closing control means for controlling the opening and closing of the second on-off valve 3', and the second on-off valve opening/closing control means 4' is similar to the first on-off valve opening/closing control means 4 described above. Similarly, the second on-off valve on-off control means 4' is, for example, a means for rotating the second on-off valve 3' within the vacuum chamber outlet side passage 22 (for example, a means for rotating the second on-off valve 3' A shaft is provided, and the shaft is rotated clockwise to close the vacuum chamber inlet passage 22 with the second on-off valve 3', and the shaft provided on the second on-off valve 3' is rotated counterclockwise. The second on-off valve 3' in the vacuum chamber outlet side passage 22 may be opened by rotating the second on-off valve opening/closing control means 4', for example, as disclosed in JP-A No. 2016-114223. In other words, the shaft of the valve stem (not shown) attached to the second on-off valve 3' rotates, and the valve is mounted on a rack (not shown) that is moved by an air cylinder (not shown). This may be achieved by meshing spur gears (not shown) attached to a rod (not shown).

5' is located downstream of the second on-off valve 3' in the fluid flow, and is configured to open and close the opening of the vacuum chamber outlet side passage 22 by sliding it with a second valve body 51'. The second gate valve 5' is similar to the first gate valve 5 described above.
Like the first valve body 51, the second valve body 51' includes a second closing part 51A' that closes the opening of the vacuum chamber outlet side passage 22 and a second closing part 51A' having the same size as the opening of the vacuum chamber outlet side passage 22. A second valve body side opening 51B' is provided.
In addition, a first annular sealing member S1' on the outlet side is attached to the vacuum chamber outlet side passage main body 220 so as to face the surface 51C' of the second valve body 51'. A second annular seal member S2' on the outlet side is provided so as to face each other.

Further, the second annular sealing member S2' on the outlet side is raised by the second elevating means 100' and comes into contact with the back surface of the second valve body 51', and is lowered by the second elevating means 100'. and does not come into contact with the back surface of the second valve body 51'. The second elevating means 100' is raised and lowered by a second elevating control means 200' [see FIGS. 6(a)(b), 7(a)(b)(c)(d) ].
The second elevating means 100' is lowered by the second elevating control means 200' so that the second annular seal member S2' on the outlet side does not come into contact with the back surface of the second valve body 51' [FIG. a) to figure (b)], the second valve body 51' is caused to slide against the first annular sealing member S1' on the outlet side by the second gate valve opening/closing control means 7', and the vacuum is released. The second valve body side opening 51B' is located at the opening of the chamber outlet side passage 22 [see FIG. 7(c)], and then the second elevating means 100' is raised by the second elevating control means 200'. Then, the second annular sealing member S2' on the outlet side is brought into contact with the back surface of the second valve body 51' to open the vacuum chamber outlet side passage 22 [see FIG. 7(d)].
The second elevating means 100' is lowered by the second elevating control means 200' [in the opposite direction to the arrow in FIG. 51' [the state shown in FIG. 7(c)], and the second valve body 51' is caused to close to the outlet side first annular seal member S1' by the second gate valve opening/closing control means 7'. The second closing part 51A' is positioned at the opening of the vacuum chamber outlet side passage 22 [the state shown in FIG. 7(b) from the direction opposite to the arrow in FIG. 7(c)], and then, The second elevating means 100' is raised by the second elevating control means 200', and the second annular sealing member S2' on the outlet side is brought into contact with the back surface of the second valve body 51', and the second elevating means 100' is brought into contact with the back surface of the second valve body 51'. The passage 22 is closed [see FIG. 7(a)].

Therefore, when the second on-off valve 3' is in the closed state, the second valve body 51' is caused to come into contact with and slide against the first annular seal member S1' on the outlet side by the second gate valve on-off control means 7'. However, when the second closing part 51A' is located at the opening of the vacuum chamber outlet side passage 22, the vacuum chamber outlet side passage 22 is closed, and the second valve body side opening is located at the opening of the vacuum chamber outlet side passage 22. When 51B' is positioned, the vacuum chamber outlet side passage passage 22 is opened. Moreover, when opening and closing the vacuum chamber outlet side passage 22, the front and back surfaces of the second valve body 51' are sealed by the first annular seal member S1' on the outlet side and the second annular seal member S2' on the outlet side. , are each sealed, so airtightness can be maintained.

According to the fluid switching device 1 described above, the first valve body 51 slides in contact with the first annular seal member S1 on the inlet side by the first gate valve opening/closing control means 4, so that the first valve body 51 slides in contact with the first annular seal member S1 on the inlet side. The fluid in the passage 21 can be prevented from entering the operating section of the first valve element 51, and malfunction of the first valve element 51 due to the intrusion of fluid into the operating section can be prevented. Since the second valve body 51' slides in contact with the first annular seal member S1' on the outlet side by the second gate valve opening/closing control means 4', the fluid in the vacuum chamber outlet side passage 22 is It is possible to prevent the second valve element 51' from entering into the operating section, and prevent malfunction of the second valve element 51' due to the intrusion of fluid into the operating section. When the side passage 21 is opened and closed, the front and back sides of the first valve body 51 are connected to the vacuum chamber outlet side passage 22 by the first annular seal member S1 on the inlet side and the first annular seal member S2 on the inlet side. During opening and closing, the front and back sides of the second valve body 51' are sealed by the first annular seal member S1' on the outlet side and the first annular seal member S2' on the outlet side, so that the airtightness is maintained. can be retained.

Next, a fluid opening/closing method using the above-described fluid opening/closing device 1 will be described with reference to FIGS. 8 to 13.
A state in which the vacuum chamber outlet side passage 22 is closed by the second on-off valve 3' and the second gate valve 5', and the vacuum chamber inlet side passage 21 is closed by the first on-off valve 3 and the first gate valve 5. [FIG. 8(a)], and the first gate valve 5 is opened [FIG. 8(b)].
Next, the first on-off valve 3 is opened [FIG. 9(a)], and the fluid X is introduced into the vacuum chamber 8 [FIG. 9(b)].
Thereafter, the first on-off valve 3 is closed [FIG. 10(a)], and then the first gate valve 5 is closed to confine the fluid X in the vacuum chamber 8 [FIG. 10(b)].
Then, the fluid X is generated in the vacuum chamber 8 [FIG. 11(a)], and after the generation process, the second gate valve 5' is opened [FIG. 11(b)].
Thereafter, the second on-off valve 3' is opened [FIG. 12(a)], and the fluid X is discharged from the vacuum chamber 8 [FIG. 12(b)].
Then, in order to receive the fluid X to be processed next, the second on-off valve 3' is closed [see FIG. 13(a)], and then the second gate valve 5' is closed [see FIG. 13(b)]. )reference].

Next, according to the fluid opening/closing method described above, the front surface of the first valve body 51 is connected to the inlet side first annular seal member S1, and the back surface of the first valve body 51 is connected to the inlet side second annular seal member S1. In contact with the member S2, the surface of the second valve body 51' is a first annular seal member S1' on the outlet side, and the back surface of the second valve body 51' is a second annular seal member S1' on the outlet side. The surface of the first valve body 51 not only maintains the vacuum state of the vacuum chamber 8 by contacting S2', but also moves while contacting the first annular seal member S1 on the entrance side, so that the surface of the first valve body 51 moves while contacting the first annular seal member S1 on the entrance side. The fluid in the side passage 21 can be prevented from entering the operating section of the first valve element 51, and malfunction of the first valve element 51 due to the intrusion of fluid into the operating section can be prevented. Further, since the surface of the second valve body 51' moves while contacting the first annular seal member S1' on the outlet side, the fluid in the vacuum chamber outlet side passage 22 acts on the second valve body 51'. This can prevent fluid from entering the operating section, and malfunction of the second valve body 51' due to fluid entering the operating section can be prevented.

In the embodiment described above, the vacuum chamber inlet side passage 21 was opened and closed by the first gate valve 5, and the vacuum chamber outlet side passage 22 was opened and closed by the second gate valve 5'. is not limited to this, and can be similarly applied to general passages.

In this case, the gate valve device that opens and closes the passage 2 (21 or 22) through which the fluid passes is opened and closed by sliding the opening of the passage 2 (21 or 22) with the valve body (51 or 51'). A passage main body (210) having a gate valve (5 or 5'), a gate valve opening/closing control means (7 or 7') for controlling opening and closing of the gate valve (5 or 5'), and a passage 2 (21 or 22). or 220), and the valve body (51 or 51') includes a blocking part (51A or 51A') that closes the opening of the passage 2 (21 or 22) and an opening of the passage 2 (21 or 22). A valve body side opening (51B or 51B') of the same size is provided, and a first annular seal member (S1 A second annular seal member (S2 or S2') is provided such that the second annular seal member (S2 or S2') faces the back surface of the valve body (51 or 51'), and S2') is raised by the lifting means (100 or 100') and comes into contact with the back surface of the valve body (51 or 51'), and is lowered by the lifting means (100 or 100') to touch the back side of the valve body (51 or 51'). '), the lifting means (100 or 100') is raised and lowered by the raising and lowering control means (200 or 200'), and the raising and lowering means (100 or 100') is raised and lowered by the raising and lowering control means (200 or 200'). is lowered so that the second annular seal member (S2 or S2') does not come into contact with the back surface of the valve body (51 or 51'), and the gate valve opening/closing control means (7, 7') closes the valve body (51 or 51'). , 51') is slid in contact with the first annular seal member (S1 or S1'), and the valve body side opening (51B or 51B') is located at the opening of the passage 2 (21 or 22). Then, the lifting control means (200 or 200') raises the lifting means (100 or 100') to place the second annular seal member (S2 or S2') on the back surface of the valve body (51 or 51'). The second annular seal member (S2 or S2') is brought into contact with the passage 2 (21 or 22) to open the passage 2 (21 or 22), and the lifting means (100 or 100') is lowered by the lifting control means (200 or 200'). ) is not brought into contact with the back surface of the valve body (51 or 51'), and the gate valve opening/closing control means (7 or 7') causes the valve body (51 or 51') to close to the first annular seal member (S1 or S1'), the closing part (51A or 51A') is positioned at the opening of the passage 2 (21 or 22), and then the elevation control means (200 or 200') moves the elevation means (100 or 100') is raised to bring the second annular seal member (S2 or S2') into contact with the back surface of the valve body (51 or 51') to open the passage 2 (21 or 22). .

According to the above-described gate valve device, the valve body (51 or 51') slides in contact with the first seal annular member (S1 or S1') by the gate valve opening/closing control means (7 or 7'). Therefore, the fluid in the passage 2 (21 or 22) can be prevented from entering the actuating part of the valve body (51 or 51'), and the fluid in the valve body (51 or 51') can be prevented from entering the actuating part. ) malfunction can be prevented. Moreover, when opening and closing the passage 2 (21 or 22), the front and back surfaces of the valve body (51 or 51') are connected to a first annular seal member (S1 or S1'), a second annular seal member ( S2 or S2'), respectively, so that airtightness can be maintained.

1 Fluid opening/closing device 2 Passage 21 Vacuum chamber inlet side passage 22 Vacuum chamber outlet side passage 3 First opening/closing valve 3' Second opening/closing valve 4 First gate valve opening/closing control means 4' Second gate valve opening/closing control means 5 First gate valve 5' Second gate valve 8 Vacuum chamber 51 First valve body 51' Second valve body 51A First closing part 51A' Second closing part 51B First valve body side opening 51B' Second valve body side opening S1 First annular seal member on the inlet side S1' First annular seal member on the outlet side S2 Second annular seal member on the inlet side S2' Second annular seal on the outlet side Element

Claims (3)

A fluid opening/closing device for a vacuum chamber that opens and closes a passage through which a fluid passes,
a first on-off valve that opens and closes the vacuum chamber entrance side passage of the passage;
a first on-off valve opening/closing control means for controlling opening and closing of the first on-off valve;
a first gate valve located downstream of the fluid flow from the first on-off valve and configured to open and close the opening of the vacuum chamber inlet side passage by sliding it with a first valve body;
a first gate valve opening/closing control means for controlling opening/closing of the first gate valve;
a vacuum chamber located downstream of the fluid flow from the first gate valve;
a second on-off valve that opens and closes a vacuum chamber outlet side passage that is an outlet side passage of the vacuum chamber;
a second on-off valve opening/closing control means for controlling opening/closing of the second on-off valve;
a second gate valve located downstream of the fluid flow from the second on-off valve, and configured to open and close the opening of the vacuum chamber outlet side passage by sliding it with a second valve body;
a second gate valve opening/closing control means for controlling opening/closing of the second gate valve;
a vacuum chamber entrance side passage main body having the vacuum chamber entrance side passage;
a vacuum chamber outlet side passage main body having the vacuum chamber outlet side passage;
The first valve body is provided with a first closing portion that closes the opening of the vacuum chamber inlet side passage and a first valve body side opening having the same size as the opening of the vacuum chamber inlet side passage. ,
A first annular seal member on the inlet side faces the surface of the first valve body in the passage main body on the inlet side of the vacuum chamber, and a second annular seal member on the inlet side faces the back surface of the first valve body. annular sealing members are provided, respectively;
The second annular sealing member on the inlet side is raised by the first lifting means and comes into contact with the back surface of the first valve body, and is lowered by the first raising and lowering means to touch the first valve body. non-contact with the back side of
The first elevating means is raised and lowered by a first elevating control means,
The first elevating and lowering means is lowered by the first elevating and lowering control means so that the second annular seal member on the inlet side does not come into contact with the back surface of the first valve body, and the first gate valve is opened and closed. The control means causes the first valve body to slide in contact with the first annular sealing member on the inlet side, and the first valve body side opening is located at the opening of the vacuum chamber inlet side passage, Thereafter, the first elevating and lowering means is raised by the first elevating and lowering control means to bring the second annular sealing member on the inlet side into contact with the back surface of the first valve body, thereby opening the vacuum chamber inlet side passageway. Open the
The first elevating means is lowered by the first elevating control means so that the second annular seal member on the inlet side does not come into contact with the back surface of the first valve body, and the first elevating means The opening/closing control means causes the first valve body to slide in contact with the first annular sealing member on the inlet side, and the first closing part is located at the opening of the passage on the inlet side of the vacuum chamber, and then , the first elevating means is raised by the first elevating control means to bring the second annular sealing member on the inlet side into contact with the back surface of the first valve body to open the vacuum chamber inlet side passage. close,
The second valve body is provided with a second closing part that closes the opening of the vacuum chamber outlet side passage, and a second valve body side opening having the same size as the opening of the vacuum chamber outlet side passage. ,
A first annular seal member on the outlet side faces the surface of the second valve body in the passage main body on the outlet side of the vacuum chamber, and a second annular seal member on the outlet side faces the back surface of the second valve body. annular sealing members are provided, respectively;
The second annular sealing member on the outlet side is raised by the second elevating means and comes into contact with the back surface of the second valve body, and is lowered by the second elevating means and is brought into contact with the back surface of the second valve body. non-contact with the back side of
The second elevating means is raised and lowered by a second elevating control means,
The second elevating and lowering means is lowered by the second elevating and lowering control means so that the second annular sealing member on the outlet side does not come into contact with the back surface of the second valve body, and the second gate valve is opened and closed. The control means causes the second valve body to slide in contact with the second annular sealing member on the outlet side, and the second valve body side opening is located at the opening of the vacuum chamber outlet side passage, Thereafter, the second elevating means is raised by the second elevating control means to bring the second annular sealing member on the outlet side into contact with the back surface of the second valve body, thereby opening the vacuum chamber outlet side passage. Open the
The second elevating and lowering means is lowered by the second elevating and lowering control means so that the second annular sealing member on the outlet side does not come into contact with the back surface of the second valve body, and the second elevating and lowering means is lowered. The opening/closing control means causes the second valve body to slide in contact with the second annular sealing member on the outlet side, and the second closing part is located at the opening of the outlet side passage of the vacuum chamber, and then , the second elevating means is raised by the second elevating control means to bring the second annular sealing member on the outlet side into contact with the back surface of the second valve body to open the outlet side passage of the vacuum chamber. close,
When discharging the fluid from the vacuum chamber, the second gate valve is opened, and then the second on-off valve is opened to open the vacuum chamber outlet passage, thereby discharging the fluid from the vacuum chamber. A fluid switching device for a vacuum chamber characterized by the following. A fluid opening/closing method for opening/closing a passage of the fluid switching device for a vacuum chamber according to claim 1, comprising:
with the vacuum chamber outlet side passage closed by the second on-off valve and the second gate valve, and the vacuum chamber inlet passage closed by the first on-off valve and the first gate valve, guiding a fluid to the vacuum chamber entrance side passage;
opening the first gate valve, then opening the first on-off valve to introduce the fluid into the vacuum chamber;
After that, the first on-off valve is closed, and then the first gate valve is closed, and the fluid is generated in the vacuum chamber,
After the generation process, the second gate valve is opened, and then the second opening/closing valve is opened to discharge the fluid from the vacuum chamber by opening the vacuum chamber outlet side passage. How to open and close. A gate valve device provided on the outlet side of a vacuum chamber that opens and closes a passage through which fluid passes,
an on-off valve that opens and closes a vacuum chamber outlet side passage that is an outlet side passage of the vacuum chamber;
An on-off valve opening/closing control means for controlling opening and closing of the on-off valve;
a gate valve located downstream of the fluid flow from the on-off valve, the gate valve being opened and closed by sliding the opening of the vacuum chamber outlet side passage with a valve body;
Gate valve opening/closing control means for controlling opening/closing of the gate valve;
a passage main body having the passage;
The valve body is provided with a closing part that closes the opening of the passage and a valve body side opening having the same size as the opening of the passage,
A first annular seal member is provided in the passage main body to face the surface of the valve body, and a second annular seal member is provided to face the back surface of the valve body,
The second annular seal member is raised by the lifting means and comes into contact with the back surface of the valve body, and is lowered by the raising and lowering means so as not to come into contact with the back surface of the valve body,
The elevating means is elevated and lowered by an elevating control means,
The lifting control means lowers the lifting means so that the second annular seal member does not come into contact with the back surface of the valve body, and the gate valve opening/closing control means moves the valve body toward the first annular seal member. The valve body side opening is positioned at the opening of the passage by sliding in contact with the seal member, and then the lifting means is raised by the lifting control means to move the second annular seal member to the valve body. to open the passage by contacting the back side of the
The lifting control means lowers the lifting means so that the second annular seal member does not come into contact with the back surface of the valve body, and the gate valve opening/closing control means moves the valve body into the first annular shape. The closing portion is positioned at the opening of the passage, and then the elevating means is raised by the elevating control means to move the second annular sealing member toward the valve body. The passage is closed by contacting the back side,
When discharging the fluid from the vacuum chamber, the gate valve is opened, and then the opening/closing valve is opened to open the vacuum chamber outlet passage, thereby discharging the fluid from the vacuum chamber. Gate valve device for rooms.

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