JP2021173744A - 圧力センサーを通る流れ - Google Patents

圧力センサーを通る流れ Download PDF

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Publication number
JP2021173744A
JP2021173744A JP2020142395A JP2020142395A JP2021173744A JP 2021173744 A JP2021173744 A JP 2021173744A JP 2020142395 A JP2020142395 A JP 2020142395A JP 2020142395 A JP2020142395 A JP 2020142395A JP 2021173744 A JP2021173744 A JP 2021173744A
Authority
JP
Japan
Prior art keywords
reservoir
flow
pressure transducer
path
transducers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2020142395A
Other languages
English (en)
Japanese (ja)
Other versions
JP2021173744A5 (OSRAM
Inventor
ムッド ダニエル
Mudd Daniel
サリーム モハメッド
Saleem Mohamed
ナガラジャン アルン
Nagarajan Arun
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Illinois Tool Works Inc
Original Assignee
Illinois Tool Works Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Illinois Tool Works Inc filed Critical Illinois Tool Works Inc
Publication of JP2021173744A publication Critical patent/JP2021173744A/ja
Publication of JP2021173744A5 publication Critical patent/JP2021173744A5/ja
Priority to JP2025102626A priority Critical patent/JP2025134849A/ja
Pending legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F7/00—Volume-flow measuring devices with two or more measuring ranges; Compound meters
    • G01F7/005—Volume-flow measuring devices with two or more measuring ranges; Compound meters by measuring pressure or differential pressure, created by the use of flow constriction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L11/00—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00
    • G01L11/04—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00 by acoustic means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
    • G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
    • G01F1/36—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction
    • G01F1/363—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction with electrical or electro-mechanical indication
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
    • G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
    • G01F1/36—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction
    • G01F1/37—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction the pressure or differential pressure being measured by means of communicating tubes or reservoirs with movable fluid levels, e.g. by U-tubes
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
    • G01F1/20—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by detection of dynamic effects of the flow
    • G01F1/206—Measuring pressure, force or momentum of a fluid flow which is forced to change its direction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
    • G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
    • G01F1/36—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction
    • G01F1/40—Details of construction of the flow constriction devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
    • G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
    • G01F1/50—Correcting or compensating means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/76—Devices for measuring mass flow of a fluid or a fluent solid material
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/76—Devices for measuring mass flow of a fluid or a fluent solid material
    • G01F1/86—Indirect mass flowmeters, e.g. measuring volume flow and density, temperature or pressure
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F15/00—Details of, or accessories for, apparatus of groups G01F1/00 - G01F13/00 insofar as such details or appliances are not adapted to particular types of such apparatus
    • G01F15/005—Valves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F15/00—Details of, or accessories for, apparatus of groups G01F1/00 - G01F13/00 insofar as such details or appliances are not adapted to particular types of such apparatus
    • G01F15/12—Cleaning arrangements; Filters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F5/00—Measuring a proportion of the volume flow
    • G01F5/005—Measuring a proportion of the volume flow by measuring pressure or differential pressure, created by the use of flow constriction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L13/00—Devices or apparatus for measuring differences of two or more fluid pressure values
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P5/00—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft
    • G01P5/14—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft by measuring differences of pressure in the fluid
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Automation & Control Theory (AREA)
  • Aviation & Aerospace Engineering (AREA)
  • Acoustics & Sound (AREA)
  • Measuring Volume Flow (AREA)
  • Flow Control (AREA)
JP2020142395A 2020-04-17 2020-08-26 圧力センサーを通る流れ Pending JP2021173744A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2025102626A JP2025134849A (ja) 2020-04-17 2025-06-18 圧力センサーを通る流れ

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US16/852,090 US12181328B2 (en) 2020-04-17 2020-04-17 Flow through pressure sensor structured to remove dead volume
US16/852,090 2020-04-17

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2025102626A Division JP2025134849A (ja) 2020-04-17 2025-06-18 圧力センサーを通る流れ

Publications (2)

Publication Number Publication Date
JP2021173744A true JP2021173744A (ja) 2021-11-01
JP2021173744A5 JP2021173744A5 (OSRAM) 2023-09-05

Family

ID=72234657

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2020142395A Pending JP2021173744A (ja) 2020-04-17 2020-08-26 圧力センサーを通る流れ
JP2025102626A Pending JP2025134849A (ja) 2020-04-17 2025-06-18 圧力センサーを通る流れ

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2025102626A Pending JP2025134849A (ja) 2020-04-17 2025-06-18 圧力センサーを通る流れ

Country Status (6)

Country Link
US (2) US12181328B2 (OSRAM)
EP (1) EP3896402B1 (OSRAM)
JP (2) JP2021173744A (OSRAM)
KR (1) KR20210128886A (OSRAM)
CN (1) CN113532725A (OSRAM)
TW (1) TWI889697B (OSRAM)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102024110339A1 (de) * 2024-04-12 2025-10-16 Festo Se & Co. Kg Massenstromregelventil zur Inertgasversorgung eines Waferbehälters

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005507996A (ja) * 2001-10-12 2005-03-24 ホリバ エステック，インコーポレーテッド 質量流量装置を作製および使用するためのシステム及び方法
US20190078914A1 (en) * 2017-09-12 2019-03-14 Silicon Microstructures, Inc. Pressure sensor cap having flow path with dimension variation
WO2020060957A1 (en) * 2018-09-18 2020-03-26 Swagelok Company Fluid monitoring module arrangements

Family Cites Families (14)

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Publication number Priority date Publication date Assignee Title
DE2919192A1 (de) 1978-05-26 1979-11-29 Sperry Rand Corp Durchflussmesseinrichtung
US6119710A (en) * 1999-05-26 2000-09-19 Cyber Instrument Technologies Llc Method for wide range gas flow system with real time flow measurement and correction
US6539968B1 (en) * 2000-09-20 2003-04-01 Fugasity Corporation Fluid flow controller and method of operation
JP3845615B2 (ja) * 2002-03-12 2006-11-15 アドバンス電気工業株式会社 流量センサー
WO2006004674A2 (en) 2004-06-25 2006-01-12 Rivatek Incorporated Software correction method and apparatus for a variable orifice flow meter
US20100018309A1 (en) * 2007-02-21 2010-01-28 Pino Marcovecchio Fluid level measuring method and system therefor
WO2012064809A1 (en) * 2010-11-12 2012-05-18 Siemens Healthcare Diagnostics Inc. Real time measurements of fluid volume and flow rate using two pressure transducers
US9188989B1 (en) * 2011-08-20 2015-11-17 Daniel T. Mudd Flow node to deliver process gas using a remote pressure measurement device
US9958302B2 (en) 2011-08-20 2018-05-01 Reno Technologies, Inc. Flow control system, method, and apparatus
KR102373840B1 (ko) * 2012-09-21 2022-03-11 엔테그리스, 아이엔씨. 압력 조절식 유체 보관 및 운반 용기의 스파이크 압력 방지 관리
SG11201600458RA (en) * 2013-07-23 2016-02-26 Entegris Inc Remote delivery of chemical reagents
KR102240813B1 (ko) * 2013-09-06 2021-04-14 일리노이즈 툴 워크스 인코포레이티드 절대 압력 및 차압 변환기
WO2016176596A1 (en) * 2015-04-30 2016-11-03 Schlumberger Technology Corporation Multiphase flow meters and related methods
CN207779957U (zh) * 2017-12-11 2018-08-28 重庆晓微城企业孵化器有限公司 一种用于生物电池传感器的阳极组件

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005507996A (ja) * 2001-10-12 2005-03-24 ホリバ エステック，インコーポレーテッド 質量流量装置を作製および使用するためのシステム及び方法
US20190078914A1 (en) * 2017-09-12 2019-03-14 Silicon Microstructures, Inc. Pressure sensor cap having flow path with dimension variation
WO2020060957A1 (en) * 2018-09-18 2020-03-26 Swagelok Company Fluid monitoring module arrangements

Also Published As

Publication number Publication date
TWI889697B (zh) 2025-07-11
JP2025134849A (ja) 2025-09-17
US12181328B2 (en) 2024-12-31
EP3896402A1 (en) 2021-10-20
US20210325223A1 (en) 2021-10-21
TW202140156A (zh) 2021-11-01
KR20210128886A (ko) 2021-10-27
US20250207963A1 (en) 2025-06-26
CN113532725A (zh) 2021-10-22
EP3896402B1 (en) 2024-01-24

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