TWI889697B - 用於移除在感測器組件中的滯留體積之裝置、系統及方法 - Google Patents

用於移除在感測器組件中的滯留體積之裝置、系統及方法

Info

Publication number
TWI889697B
TWI889697B TW109127488A TW109127488A TWI889697B TW I889697 B TWI889697 B TW I889697B TW 109127488 A TW109127488 A TW 109127488A TW 109127488 A TW109127488 A TW 109127488A TW I889697 B TWI889697 B TW I889697B
Authority
TW
Taiwan
Prior art keywords
pressure sensor
flow
reservoir
path
sensor
Prior art date
Application number
TW109127488A
Other languages
English (en)
Chinese (zh)
Other versions
TW202140156A (zh
Inventor
丹尼爾 莫德
穆罕默德 薩萊姆
阿朗 那加拉真
Original Assignee
美商伊利諾工具工程公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 美商伊利諾工具工程公司 filed Critical 美商伊利諾工具工程公司
Publication of TW202140156A publication Critical patent/TW202140156A/zh
Application granted granted Critical
Publication of TWI889697B publication Critical patent/TWI889697B/zh

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
    • G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
    • G01F1/36—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction
    • G01F1/37—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction the pressure or differential pressure being measured by means of communicating tubes or reservoirs with movable fluid levels, e.g. by U-tubes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
    • G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
    • G01F1/36—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction
    • G01F1/363—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction with electrical or electro-mechanical indication
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L11/00—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00
    • G01L11/04—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00 by acoustic means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F7/00—Volume-flow measuring devices with two or more measuring ranges; Compound meters
    • G01F7/005—Volume-flow measuring devices with two or more measuring ranges; Compound meters by measuring pressure or differential pressure, created by the use of flow constriction
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
    • G01F1/20—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by detection of dynamic effects of the flow
    • G01F1/206—Measuring pressure, force or momentum of a fluid flow which is forced to change its direction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
    • G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
    • G01F1/36—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction
    • G01F1/40—Details of construction of the flow constriction devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
    • G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
    • G01F1/50—Correcting or compensating means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/76—Devices for measuring mass flow of a fluid or a fluent solid material
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/76—Devices for measuring mass flow of a fluid or a fluent solid material
    • G01F1/86—Indirect mass flowmeters, e.g. measuring volume flow and density, temperature or pressure
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F15/00—Details of, or accessories for, apparatus of groups G01F1/00 - G01F13/00 insofar as such details or appliances are not adapted to particular types of such apparatus
    • G01F15/005—Valves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F15/00—Details of, or accessories for, apparatus of groups G01F1/00 - G01F13/00 insofar as such details or appliances are not adapted to particular types of such apparatus
    • G01F15/12—Cleaning arrangements; Filters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F5/00—Measuring a proportion of the volume flow
    • G01F5/005—Measuring a proportion of the volume flow by measuring pressure or differential pressure, created by the use of flow constriction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L13/00—Devices or apparatus for measuring differences of two or more fluid pressure values
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P5/00—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft
    • G01P5/14—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft by measuring differences of pressure in the fluid
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Automation & Control Theory (AREA)
  • Aviation & Aerospace Engineering (AREA)
  • Acoustics & Sound (AREA)
  • Measuring Volume Flow (AREA)
  • Flow Control (AREA)
TW109127488A 2020-04-17 2020-08-13 用於移除在感測器組件中的滯留體積之裝置、系統及方法 TWI889697B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US16/852,090 US12181328B2 (en) 2020-04-17 2020-04-17 Flow through pressure sensor structured to remove dead volume
US16/852,090 2020-04-17

Publications (2)

Publication Number Publication Date
TW202140156A TW202140156A (zh) 2021-11-01
TWI889697B true TWI889697B (zh) 2025-07-11

Family

ID=72234657

Family Applications (1)

Application Number Title Priority Date Filing Date
TW109127488A TWI889697B (zh) 2020-04-17 2020-08-13 用於移除在感測器組件中的滯留體積之裝置、系統及方法

Country Status (6)

Country Link
US (2) US12181328B2 (OSRAM)
EP (1) EP3896402B1 (OSRAM)
JP (2) JP2021173744A (OSRAM)
KR (1) KR20210128886A (OSRAM)
CN (1) CN113532725A (OSRAM)
TW (1) TWI889697B (OSRAM)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102024110339A1 (de) * 2024-04-12 2025-10-16 Festo Se & Co. Kg Massenstromregelventil zur Inertgasversorgung eines Waferbehälters

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4235105A (en) * 1978-05-26 1980-11-25 Sperry Corporation Hydraulic actuator controls
JP2003337053A (ja) * 2002-03-12 2003-11-28 Advance Denki Kogyo Kk 流量センサー

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6119710A (en) * 1999-05-26 2000-09-19 Cyber Instrument Technologies Llc Method for wide range gas flow system with real time flow measurement and correction
US6539968B1 (en) * 2000-09-20 2003-04-01 Fugasity Corporation Fluid flow controller and method of operation
ATE395652T1 (de) 2001-10-12 2008-05-15 Horiba Stec Inc System und verfahren zur herstellung und verwendung einer massenströmungseinrichtung
WO2006004674A2 (en) 2004-06-25 2006-01-12 Rivatek Incorporated Software correction method and apparatus for a variable orifice flow meter
US20100018309A1 (en) * 2007-02-21 2010-01-28 Pino Marcovecchio Fluid level measuring method and system therefor
WO2012064809A1 (en) * 2010-11-12 2012-05-18 Siemens Healthcare Diagnostics Inc. Real time measurements of fluid volume and flow rate using two pressure transducers
US9188989B1 (en) * 2011-08-20 2015-11-17 Daniel T. Mudd Flow node to deliver process gas using a remote pressure measurement device
US9958302B2 (en) 2011-08-20 2018-05-01 Reno Technologies, Inc. Flow control system, method, and apparatus
KR102373840B1 (ko) * 2012-09-21 2022-03-11 엔테그리스, 아이엔씨. 압력 조절식 유체 보관 및 운반 용기의 스파이크 압력 방지 관리
SG11201600458RA (en) * 2013-07-23 2016-02-26 Entegris Inc Remote delivery of chemical reagents
KR102240813B1 (ko) * 2013-09-06 2021-04-14 일리노이즈 툴 워크스 인코포레이티드 절대 압력 및 차압 변환기
WO2016176596A1 (en) * 2015-04-30 2016-11-03 Schlumberger Technology Corporation Multiphase flow meters and related methods
US10655989B2 (en) 2017-09-12 2020-05-19 Silicon Microstructures, Inc. Pressure sensor cap having flow path with dimension variation
CN207779957U (zh) * 2017-12-11 2018-08-28 重庆晓微城企业孵化器有限公司 一种用于生物电池传感器的阳极组件
EP3853563B1 (en) * 2018-09-18 2024-11-06 Swagelok Company Fluid monitoring module arrangements

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4235105A (en) * 1978-05-26 1980-11-25 Sperry Corporation Hydraulic actuator controls
JP2003337053A (ja) * 2002-03-12 2003-11-28 Advance Denki Kogyo Kk 流量センサー

Also Published As

Publication number Publication date
JP2025134849A (ja) 2025-09-17
US12181328B2 (en) 2024-12-31
JP2021173744A (ja) 2021-11-01
EP3896402A1 (en) 2021-10-20
US20210325223A1 (en) 2021-10-21
TW202140156A (zh) 2021-11-01
KR20210128886A (ko) 2021-10-27
US20250207963A1 (en) 2025-06-26
CN113532725A (zh) 2021-10-22
EP3896402B1 (en) 2024-01-24

Similar Documents

Publication Publication Date Title
CN110073181B (zh) 用于大范围质量流量检验的方法和设备
TWI463287B (zh) 流量比率控制裝置
CN101460659B (zh) 利用压差测量的气流控制
KR100539042B1 (ko) 반도체 장치의 제조 장치 및 제조 방법, 및 반도체 제조장치의 클리닝 방법
KR100276836B1 (ko) 필터소자의 완전도를 신속하게 시험하기 위한 방법 및 장치
CN107064420B (zh) 一种大气中中等挥发性有机物的在线监测系统及监测方法
KR100781407B1 (ko) 기판 처리 장치
KR102871073B1 (ko) 반도체 제조 장치의 파이프를 통한 유체 흐름 측정 장치
JP2025134849A (ja) 圧力センサーを通る流れ
JPH05157679A (ja) フィルタエレメントの完全性をテストする方法及び装置
KR20120101490A (ko) 다중 구역 압력 제어기 및 제어 방법
KR100875333B1 (ko) 반도체 제조 장치 및 반도체 제조 방법
KR20210014682A (ko) 공기 중 분자 오염을 측정하기 위한 스테이션 및 방법
TW201947339A (zh) 用於多通道質量流量和比例控制系統的方法和設備
US20230266156A1 (en) Method and Apparatus for Pressure Based Mass Flow Control
JP2005504908A (ja) 流体を滴下させる装置と、この方法
WO2008133698B1 (en) Hydrodynamic isolation method and apparatus
KR101027645B1 (ko) 샘플링 포트 클리닝 수단을 구비한 가스 모니터링 시스템
CN111830796B (zh) 具有新型抽排组件的浸液供给回收装置以及浸液抽排方法
TWI605883B (zh) 用於在一室中之光學組件之交叉流清洗之裝置及方法
US6053058A (en) Atmosphere concentration monitoring for substrate processing apparatus and life determination for atmosphere processing unit of substrate processing apparatus
TW202141018A (zh) 用於測量空浮分子污染之站體及方法
CN113113332A (zh) 半导体工艺腔漏的侦测方法
JPH04353743A (ja) 不純物吸着量の評価方法及びその評価用装置
US20110214748A1 (en) Systems and Methods for Purging a Valve in a Liquid Flow Line