JP2021170566A - Sheet peeling device and sheet peeling method - Google Patents

Sheet peeling device and sheet peeling method Download PDF

Info

Publication number
JP2021170566A
JP2021170566A JP2020072106A JP2020072106A JP2021170566A JP 2021170566 A JP2021170566 A JP 2021170566A JP 2020072106 A JP2020072106 A JP 2020072106A JP 2020072106 A JP2020072106 A JP 2020072106A JP 2021170566 A JP2021170566 A JP 2021170566A
Authority
JP
Japan
Prior art keywords
peeling
peeling tape
adhesive sheet
holding
tape
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2020072106A
Other languages
Japanese (ja)
Other versions
JP7454434B2 (en
Inventor
孝之 丸山
Takayuki Maruyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Lintec Corp
Original Assignee
Lintec Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lintec Corp filed Critical Lintec Corp
Priority to JP2020072106A priority Critical patent/JP7454434B2/en
Publication of JP2021170566A publication Critical patent/JP2021170566A/en
Application granted granted Critical
Publication of JP7454434B2 publication Critical patent/JP7454434B2/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

To provide a sheet peeling device and a sheet peeling method, with which it is possible to prevent a peeling tape from being wastefully consumed.SOLUTION: A sheet peeling device EA comprises: holding means 10 for unwinding a peeling tape PT and holding the peeling tape PT with a holding member 17; pressing means 20 having a pressing member 22 for pressing the peeling tape PT held by the holding means 10 against an adhesive sheet AS pasted to an adherend WK and pasting it threto; peeling means 30 for adding a tensile force to the peeling tape PT pasted to the adhesive sheet AS to separate the adhesive sheet AS from the adherend WK; and cutting means 40 juxtaposed to the pressing member 22 in an unwinding direction of the peeling tape PT and having a cutting member 42 for cutting off the peeling tape PT from which the adhesive sheet AS is separated. The holding member 17 holds the peeling tape PT at a position other than between the pressing member 22 and the cutting member 42.SELECTED DRAWING: Figure 1

Description

本発明は、シート剥離装置およびシート剥離方法に関する。 The present invention relates to a sheet peeling device and a sheet peeling method.

被着体に貼付された接着シートに剥離用テープを貼付し、当該剥離用テープに張力を付与して被着体から接着シートを剥離するシート剥離装置が知られている(例えば、特許文献1参照)。 A sheet peeling device is known in which a peeling tape is attached to an adhesive sheet attached to an adherend and tension is applied to the peeling tape to peel the adhesive sheet from the adherend (for example, Patent Document 1). reference).

特開2017−50364号公報JP-A-2017-50364

特許文献1に記載されたシート剥離装置10(シート剥離装置)では、吸引手段23F(保持部材)が、剥離用テープPT(剥離用テープ)を接着シートAS(接着シート)に押圧して貼付する押圧ヘッド25C(押圧部材)と、剥離用テープを切断する切断刃72(切断部材)との間の位置で剥離用テープを保持するので、押圧手段と切断手段との間隔が広くなる。このため、剥離用テープにおける繰出方向の先端部から被着体に貼付される貼付部までの長さが長くなり、剥離用テープを無駄に消費するという不都合を発生する。 In the sheet peeling device 10 (sheet peeling device) described in Patent Document 1, the suction means 23F (holding member) presses the peeling tape PT (peeling tape) against the adhesive sheet AS (adhesive sheet) to attach it. Since the release tape is held at a position between the pressing head 25C (pressing member) and the cutting blade 72 (cutting member) for cutting the release tape, the distance between the pressing means and the cutting means is widened. For this reason, the length from the tip end portion of the release tape in the feeding direction to the attachment portion attached to the adherend becomes long, which causes the inconvenience of wasting the release tape.

本発明の目的は、剥離用テープを無駄に消費することを防止することができるシート剥離装置およびシート剥離方法を提供することにある。 An object of the present invention is to provide a sheet peeling device and a sheet peeling method capable of preventing wasteful consumption of the peeling tape.

本発明は、請求項に記載した構成を採用した。 The present invention has adopted the configuration described in the claims.

本発明によれば、保持部材が押圧部材と切断部材との間以外の位置で剥離用テープを保持するため、押圧部材と切断部材との間隔が広くならず、剥離用テープの先端部から貼付部までの長さが短くなるので、剥離用テープを無駄に消費することを防止することができる。
また、剥離用テープの繰出方向に交差する交差方向に保持部材を押圧部材と並設すれば、保持部材で保持した剥離用テープを押圧部材で確実に押圧することができる。
According to the present invention, since the holding member holds the peeling tape at a position other than between the pressing member and the cutting member, the distance between the pressing member and the cutting member is not widened, and the tape is attached from the tip of the peeling tape. Since the length to the portion is shortened, it is possible to prevent wasteful consumption of the peeling tape.
Further, if the holding member is juxtaposed with the pressing member in the intersecting direction intersecting the feeding direction of the peeling tape, the peeling tape held by the holding member can be reliably pressed by the pressing member.

本発明の一実施形態に係るシート剥離装置の説明図。The explanatory view of the sheet peeling apparatus which concerns on one Embodiment of this invention. シート剥離装置の動作説明図。The operation explanatory drawing of the sheet peeling apparatus.

以下、本発明の一実施形態を図1、2に基づいて説明する。
なお、本実施形態におけるX軸、Y軸、Z軸は、それぞれが直交する関係にあり、X軸およびY軸は、所定平面内の軸とし、Z軸は、前記所定平面に直交する軸とする。さらに、本実施形態では、Y軸と平行な図1の手前方向から観た場合を基準とし、方向を示した場合、「上」がZ軸の矢印方向で「下」がその逆方向、「左」がX軸の矢印方向で「右」がその逆方向、「前」がY軸と平行な図1中手前方向で「後」がその逆方向とする。
Hereinafter, an embodiment of the present invention will be described with reference to FIGS. 1 and 2.
The X-axis, Y-axis, and Z-axis in the present embodiment are orthogonal to each other, the X-axis and the Y-axis are axes in a predetermined plane, and the Z-axis is an axis orthogonal to the predetermined plane. do. Further, in the present embodiment, when viewed from the front direction of FIG. 1 parallel to the Y axis, when the direction is shown, "up" is the arrow direction of the Z axis, "down" is the opposite direction, and ""Left" is the direction of the arrow on the X-axis, "right" is the opposite direction, "front" is the middle front direction parallel to the Y-axis, and "rear" is the opposite direction.

本発明のシート剥離装置EAは、剥離用テープPTを繰り出し、当該剥離用テープPTを保持部材としての吸引手段17で保持する保持手段10と、保持手段10で保持された剥離用テープPTを、被着体WKに貼付された接着シートASに押圧して貼付する押圧部材22を有する押圧手段20と、接着シートASに貼付された剥離用テープPTに張力を付与し、被着体WKから接着シートASを剥離する剥離手段30と、押圧部材22に対して剥離用テープPTの繰出方向である右方向に並設され、接着シートASを剥離した剥離用テープPTを切断する切断部材としての切断刃42を有する切断手段40とを備え、接着シートASが剥離された被着体WKを支持する支持手段50の近傍に配置されている。 The sheet peeling device EA of the present invention feeds out the peeling tape PT and holds the peeling tape PT by the suction means 17 as a holding member, and the peeling tape PT held by the holding means 10. Tension is applied to the pressing means 20 having the pressing member 22 having the pressing member 22 attached to the adhesive sheet AS attached to the adherend WK and the peeling tape PT attached to the adhesive sheet AS, and the adhesive sheet WK is adhered to the adhesive sheet AS. The peeling means 30 for peeling the sheet AS and the peeling tape PT that are juxtaposed with respect to the pressing member 22 in the right direction, which is the feeding direction of the peeling tape PT, are cut as a cutting member for cutting the peeling tape PT that has peeled the adhesive sheet AS. A cutting means 40 having a blade 42 is provided, and the adhesive sheet AS is arranged in the vicinity of the supporting means 50 for supporting the detached adherend WK.

保持手段10は、回転軸11Aを中心に回転可能な回転アーム11Bに支持され、剥離用テープPTを支持する支持ローラ11と、駆動機器としての回動モータ12の図示しない出力軸に支持された駆動ローラ13と、回転アーム11Bを駆動ローラ13方向に付勢する付勢手段としてのばね14と、駆動機器としての直動モータ15の出力軸15Aに支持された収容手段16と、収容手段16内に収容された減圧ポンプや真空エジェクタ等の吸引手段17と、駆動機器としての直動モータ18の出力軸18Aに支持され、剥離用テープPTを収容手段16の底面16Aに当接させる補助ローラ19とを備えている。
底面16Aには、前後方向に所定間隔をあけて設けられ、吸引手段17に接続する複数の吸引孔16Bと、当該複数の吸引孔16Bの間に設けられ、前後方向に延設された貫通孔16Cと、貫通孔16Cよりも剥離用テープPTの繰出方向先端側に設けられ、前後方向に延設された貫通孔16Dとが形成されている。
吸引手段17は、押圧部材22と切断刃42との間以外の位置で剥離用テープPTを保持するものであって、本実施形態では、図1中AAを付した図に示すように、剥離用テープPTの繰出方向に交差する交差方向である前後方向に押圧部材22と並設されている。
The holding means 10 is supported by a rotary arm 11B that can rotate around the rotary shaft 11A, and is supported by a support roller 11 that supports the peeling tape PT and an output shaft (not shown) of the rotary motor 12 as a drive device. The drive roller 13, the spring 14 as an urging means for urging the rotary arm 11B in the direction of the drive roller 13, the accommodating means 16 supported by the output shaft 15A of the linear motion motor 15 as the driving device, and the accommodating means 16. An auxiliary roller supported by a suction means 17 such as a decompression pump or a vacuum ejector housed inside and an output shaft 18A of a linear motion motor 18 as a drive device, and abutting the peeling tape PT against the bottom surface 16A of the housing means 16. It has 19 and.
The bottom surface 16A is provided with a predetermined interval in the front-rear direction, and is provided between a plurality of suction holes 16B connected to the suction means 17 and the plurality of suction holes 16B, and is a through hole extending in the front-rear direction. The 16C and the through hole 16D provided on the tip side of the peeling tape PT in the feeding direction and extending in the front-rear direction are formed from the through hole 16C.
The suction means 17 holds the peeling tape PT at a position other than between the pressing member 22 and the cutting blade 42, and in the present embodiment, as shown in the figure with AA in FIG. 1, the peeling means 17 holds the peeling tape PT. It is juxtaposed with the pressing member 22 in the front-rear direction, which is the crossing direction intersecting the feeding direction of the tape PT.

押圧手段20は、収容手段16内に収容された駆動機器としてのリニアモータ21と、リニアモータ21のスライダ21Aに支持され、収容手段16の貫通孔16Cから突没可能に設けられた押圧部材22と、押圧部材22に設けられたコイルヒータやヒートパイプの加熱側等の加熱手段23とを備えている。 The pressing means 20 is supported by a linear motor 21 as a driving device housed in the accommodating means 16 and a slider 21A of the linear motor 21, and is provided so as to be recessed from the through hole 16C of the accommodating means 16. And a heating means 23 such as a coil heater provided on the pressing member 22 and a heating side of a heat pipe.

剥離手段30は、駆動機器としてのリニアモータ31と、リニアモータ31のスライダ31Aに支持された駆動機器としての回動モータ32と、回動モータ32の図示しない出力軸に支持された押え付けローラ33と、駆動機器としての直動モータ34の出力軸34Aに回転可能に支持されたピンチローラ35と、駆動機器としてのリニアモータ36のスライダ36Aに回転可能に支持された案内ローラ37とを備えている。 The peeling means 30 includes a linear motor 31 as a drive device, a rotary motor 32 as a drive device supported by the slider 31A of the linear motor 31, and a pressing roller supported by an output shaft (not shown) of the rotary motor 32. 33, a pinch roller 35 rotatably supported by an output shaft 34A of a linear motor 34 as a drive device, and a guide roller 37 rotatably supported by a slider 36A of a linear motor 36 as a drive device. ing.

切断手段40は、収容手段16内に収容された駆動機器としてのリニアモータ41と、リニアモータ41のスライダ41Aに支持され、収容手段16の貫通孔16Dから突没可能に設けられた切断刃42とを備えている。 The cutting means 40 is supported by a linear motor 41 as a drive device housed in the accommodating means 16 and a slider 41A of the linear motor 41, and a cutting blade 42 is provided so as to be recessed from the through hole 16D of the accommodating means 16. And have.

支持手段50は、駆動機器としてのリニアモータ51と、リニアモータ51のスライダ51Aに支持され、減圧ポンプや真空エジェクタ等の図示しない減圧手段によって吸着保持が可能な支持面52A有するテーブル52とを備えている。 The support means 50 includes a linear motor 51 as a drive device, and a table 52 having a support surface 52A supported by a slider 51A of the linear motor 51 and capable of suction and holding by a decompression means (not shown) such as a decompression pump or a vacuum ejector. ing.

以上のシート剥離装置EAの動作を説明する。
先ず、図1中実線で示す初期位置に各部材が配置されたシート剥離装置EAに対し、当該シート剥離装置EAの使用者(以下、単に「使用者」という)が同図のように剥離用テープPTをセットし、当該剥離用テープPTにおける繰出方向の先端部PT1および被着体WKに貼付される貼付部PT2を所定位置に位置させた後、図示しない操作パネルやパーソナルコンピュータ等の入力手段を介して自動運転開始の信号を入力する。すると、保持手段10が吸引手段17を駆動し、当該吸引手段17での剥離用テープPTの吸着保持を開始する。
The operation of the above sheet peeling device EA will be described.
First, with respect to the sheet peeling device EA in which each member is arranged at the initial position shown by the solid line in FIG. 1, the user of the sheet peeling device EA (hereinafter, simply referred to as “user”) is used for peeling as shown in the figure. After setting the tape PT and positioning the tip PT1 in the feeding direction of the peeling tape PT and the sticking portion PT2 to be stuck to the adherend WK at predetermined positions, an input means such as an operation panel or a personal computer (not shown) is used. The signal for starting automatic operation is input via. Then, the holding means 10 drives the suction means 17, and the suction means 17 starts sucking and holding the peeling tape PT.

次いで、使用者または、多関節ロボットやベルトコンベア等の図示しない搬送手段が、図1中実線で示すように、接着シートASが貼付された被着体WKを支持面52A上の所定の位置に載置すると、支持手段50が図示しない減圧手段を駆動し、支持面52Aでの被着体WKの吸着保持を開始する。その後、支持手段50がリニアモータ51を駆動し、テーブル52を左方に移動させ、図1中二点鎖線で示すように、接着シートASの左端部が押圧部材22の直下に位置した時点で、リニアモータ51の駆動を停止する。次に、保持手段10が直動モータ18を駆動し、図1中二点鎖線で示すように、補助ローラ19を収容手段16の下方から退避させた後、回動モータ12および直動モータ15を駆動し、剥離用テープPTを繰り出しながら、収容手段16を接着シートASの直上の所定位置まで下降させる。そして、押圧手段20が加熱手段23およびリニアモータ21を駆動し、加熱された押圧部材22を下降させ、図2(A)に示すように、保持手段10で保持された剥離用テープPTの貼付部PT2を被着体WKに貼付された接着シートASの左端部に押圧して貼付する。 Next, the user or a transport means (not shown) such as an articulated robot or a belt conveyor places the adherend WK to which the adhesive sheet AS is attached at a predetermined position on the support surface 52A as shown by the solid line in FIG. When mounted, the support means 50 drives a decompression means (not shown) to start adsorbing and holding the adherend WK on the support surface 52A. After that, the support means 50 drives the linear motor 51 to move the table 52 to the left, and when the left end portion of the adhesive sheet AS is located directly below the pressing member 22 as shown by the alternate long and short dash line in FIG. , The drive of the linear motor 51 is stopped. Next, the holding means 10 drives the linear motion motor 18, and as shown by the alternate long and short dash line in FIG. 1, the auxiliary roller 19 is retracted from below the accommodating means 16, and then the rotary motor 12 and the linear motion motor 15 The accommodating means 16 is lowered to a predetermined position directly above the adhesive sheet AS while feeding out the peeling tape PT. Then, the pressing means 20 drives the heating means 23 and the linear motor 21 to lower the heated pressing member 22, and as shown in FIG. 2 (A), the peeling tape PT held by the holding means 10 is attached. The portion PT2 is pressed and attached to the left end portion of the adhesive sheet AS attached to the adherend WK.

接着シートASへの剥離用テープPTの貼付が完了すると、保持手段10が吸引手段17の駆動を停止した後、押圧手段20がリニアモータ21を駆動するとともに、保持手段10が直動モータ15を駆動し、押圧部材22および収容手段16を初期位置に復帰させる。次いで、剥離手段30が直動モータ34を駆動し、ピンチローラ35と押え付けローラ33とで剥離用テープPTを所定の押圧力で挟み込む。その後、支持手段50がリニアモータ51を駆動し、図2(B)に示すように、テーブル52を左方に移動させ、接着シートASの左端部を押え付けローラ33の最下部の直下に位置させる。次に、保持手段10が回動モータ12を駆動し、剥離用テープPTを所定長さ巻き取るとともに、リニアモータ31を駆動し、図2(B)中二点鎖線で示すように、押え付けローラ33の最下部で剥離用テープPTを折り曲げながらその折り曲げ部を押圧する。そして、剥離手段30および支持手段50が回動モータ32およびリニアモータ36、51を駆動し、図2(C)中実線で示すように、テーブル52を左方に移動させながら、押え付けローラ33を反時計回転方向に回転させるとともに、案内ローラ37を右方に移動させ、剥離用テープPTに張力を付与する。これにより、接着シートASは、剥離用テープPTに続いて押え付けローラ33の最下部で押え付けられながら被着体WKから剥離され、案内ローラ37によって右方に案内される。 When the attachment of the peeling tape PT to the adhesive sheet AS is completed, the holding means 10 stops driving the suction means 17, the pressing means 20 drives the linear motor 21, and the holding means 10 drives the linear motor 15. It is driven to return the pressing member 22 and the accommodating means 16 to the initial positions. Next, the peeling means 30 drives the linear motion motor 34, and the peeling tape PT is sandwiched between the pinch roller 35 and the pressing roller 33 with a predetermined pressing pressure. After that, the support means 50 drives the linear motor 51, moves the table 52 to the left as shown in FIG. 2 (B), presses the left end of the adhesive sheet AS, and is positioned directly below the lowermost portion of the roller 33. Let me. Next, the holding means 10 drives the rotary motor 12, winds up the peeling tape PT by a predetermined length, drives the linear motor 31, and presses the stripping tape PT as shown by the chain double-dashed line in FIG. 2 (B). While bending the peeling tape PT at the lowermost part of the roller 33, the bent portion is pressed. Then, the peeling means 30 and the supporting means 50 drive the rotary motor 32 and the linear motors 36 and 51, and as shown by the solid line in FIG. 2C, the pressing roller 33 moves the table 52 to the left. Is rotated counterclockwise, and the guide roller 37 is moved to the right to apply tension to the peeling tape PT. As a result, the adhesive sheet AS is peeled off from the adherend WK while being pressed by the lowermost portion of the pressing roller 33 following the peeling tape PT, and is guided to the right by the guiding roller 37.

図2(C)中二点鎖線で示すように、被着体WKから接着シートAS全体が剥離されると、剥離手段30および支持手段50が回動モータ32およびリニアモータ36、51の駆動を停止する。次いで、保持手段10が直動モータ18を駆動し、補助ローラ19を初期位置に復帰させた後、吸引手段17を駆動し、当該吸引手段17での剥離用テープPTの吸着保持を開始する。その後、切断手段40がリニアモータ41を駆動し、図2(D)に示すように、切断刃42を下降させ、接着シートASを剥離した剥離用テープPTを切断し、剥離用テープPTに新たな先端部PT1を形成する。なお、接着シートASは、その自重によって箱や袋等の図示しない回収手段内に落下して回収される。次に、使用者または図示しない搬送手段がテーブル52上の被着体WKを次工程に搬送すると、各手段がそれぞれの駆動機器を駆動し、各部材を初期位置に復帰させ、以降同様の動作が繰り返される。 As shown by the alternate long and short dash line in FIG. 2C, when the entire adhesive sheet AS is peeled from the adherend WK, the peeling means 30 and the supporting means 50 drive the rotary motor 32 and the linear motors 36 and 51. Stop. Next, the holding means 10 drives the linear motion motor 18 to return the auxiliary roller 19 to the initial position, and then drives the suction means 17 to start sucking and holding the peeling tape PT by the suction means 17. After that, the cutting means 40 drives the linear motor 41, lowers the cutting blade 42 as shown in FIG. 2D, cuts the peeling tape PT from which the adhesive sheet AS has been peeled off, and newly replaces the peeling tape PT. Form a tip PT1. The adhesive sheet AS is collected by dropping into a collection means (not shown) such as a box or a bag due to its own weight. Next, when the user or a transport means (not shown) transports the adherend WK on the table 52 to the next step, each means drives each drive device to return each member to the initial position, and the same operation thereafter. Is repeated.

以上のような実施形態によれば、吸引手段17が押圧部材22と切断刃42との間以外の位置で剥離用テープPTを保持するため、押圧部材22と切断刃42との間隔が広くならず、剥離用テープPTの先端部PT1から貼付部PT2までの長さが短くなるので、剥離用テープPTを無駄に消費することを防止することができる。 According to the above embodiment, since the suction means 17 holds the peeling tape PT at a position other than between the pressing member 22 and the cutting blade 42, if the distance between the pressing member 22 and the cutting blade 42 is wide. However, since the length from the tip portion PT1 of the peeling tape PT to the sticking portion PT2 is shortened, it is possible to prevent the peeling tape PT from being wasted.

以上のように、本発明を実施するための最良の構成、方法等は、前記記載で開示されているが、本発明は、これに限定されるものではない。すなわち、本発明は、主に特定の実施形態に関して特に図示され、かつ説明されているが、本発明の技術的思想および目的の範囲から逸脱することなく、以上述べた実施形態に対し、形状、材質、数量、その他の詳細な構成において、当業者が様々な変形を加えることができるものである。また、上記に開示した形状、材質などを限定した記載は、本発明の理解を容易にするために例示的に記載したものであり、本発明を限定するものではないから、それらの形状、材質などの限定の一部もしくは全部の限定を外した部材の名称での記載は、本発明に含まれる。 As described above, the best configuration, method, etc. for carrying out the present invention are disclosed in the above description, but the present invention is not limited thereto. That is, the present invention is particularly illustrated and described primarily with respect to a particular embodiment, but without departing from the scope of the technical idea and object of the invention, the shape, with respect to the embodiments described above. Various modifications can be made by those skilled in the art in terms of material, quantity, and other detailed configurations. Further, the description limiting the shape, material, etc. disclosed above is exemplarily described for facilitating the understanding of the present invention, and does not limit the present invention. Therefore, those shapes, materials, etc. The description by the name of the member which removes a part or all of the limitation such as is included in the present invention.

例えば、保持手段10は、回転アーム11B、回動モータ12、駆動ローラ13、およびばね14に代えてまたは併用して、駆動機器としての回動モータの出力軸で支持ローラ11を支持し、当該回動モータで支持ローラ11を回転させる構成を採用してもよいし、付勢手段としてばね14に代えてまたは併用して、ゴム、樹脂等の弾性部材、駆動機器や、駆動ローラ13とで剥離用テープPTを挟み込むピンチローラを採用してもよいし、単数または3つ以上の吸引手段17を備えていてもよいし、補助ローラ19に代えてまたは併用して、棒状部材、板状部材、エアの吹き付けで等で剥離用テープPTを底面16Aに当接させる構成を採用してもよいし、剥離用テープPTを吸引手段17のみで保持可能であれば、補助ローラ19を備えていなくてもよい。
保持手段10は、回転アーム11Bを駆動ローラ13方向に付勢することなく剥離用テープPTを支持してもよく、この場合、駆動ローラ13とで剥離用テープPTを挟み込むピンチローラ等を採用すればよい。
吸引孔16Bおよび吸引手段17は、収容手段16における前後方向の中央の位置に配置されてもよいし、押圧手段20および貫通孔16Cと位置を入れ替えて配置されてもよい。
吸引手段17は、収容手段16に収容されていなくてもよいし、吸引孔16Bを介さずに直接剥離用テープPTを吸着保持してもよいし、減圧ポンプや真空エジェクタに配管を介して接続されたノズルやパッド等を採用してもよいし、押圧部材22と切断刃42との間以外の位置で、剥離用テープPTの繰出方向とその交差方向とに交わる方向に押圧部材22と並設されてもよく、例えば、押圧部材22の前方および後方の少なくとも一方の吸引手段17が押圧部材22に並設され、他方が押圧部材22に対して剥離用テープPTの繰出方向上流側(左方)に並設されていてもよい。
保持部材は、吸引手段17に代えてまたは併用してメカチャックやチャックシリンダ等の把持手段、クーロン力、接着剤(接着シート、接着テープ)、粘着剤(粘着シート、粘着テープ)、磁力、ベルヌーイ吸着、駆動機器等で剥離用テープPTを保持する構成を採用してもよい。
For example, the holding means 10 supports the support roller 11 with the output shaft of the rotary motor as a drive device in place of or in combination with the rotary arm 11B, the rotary motor 12, the drive roller 13, and the spring 14. A configuration in which the support roller 11 is rotated by a rotation motor may be adopted, or as an urging means, in place of or in combination with the spring 14, an elastic member such as rubber or resin, a drive device, or a drive roller 13 may be used. A pinch roller that sandwiches the peeling tape PT may be adopted, a single or three or more suction means 17 may be provided, or a rod-shaped member or a plate-shaped member may be provided in place of or in combination with the auxiliary roller 19. A configuration may be adopted in which the peeling tape PT is brought into contact with the bottom surface 16A by blowing air or the like, or if the peeling tape PT can be held only by the suction means 17, the auxiliary roller 19 is not provided. You may.
The holding means 10 may support the peeling tape PT without urging the rotary arm 11B in the direction of the drive roller 13. In this case, a pinch roller or the like that sandwiches the peeling tape PT with the drive roller 13 is adopted. Just do it.
The suction hole 16B and the suction means 17 may be arranged at a central position in the front-rear direction of the accommodating means 16, or may be arranged so as to be interchanged with the pressing means 20 and the through hole 16C.
The suction means 17 may not be housed in the storage means 16, may directly suck and hold the peeling tape PT without passing through the suction hole 16B, or may be connected to a decompression pump or a vacuum ejector via a pipe. A nozzle, a pad, or the like may be adopted, or the pressing member 22 is aligned with the pressing member 22 in a direction intersecting the feeding direction and the intersecting direction of the peeling tape PT at a position other than between the pressing member 22 and the cutting blade 42. For example, at least one suction means 17 in front of and behind the pressing member 22 may be provided in parallel with the pressing member 22, and the other is on the upstream side (left) of the peeling tape PT with respect to the pressing member 22 in the feeding direction. It may be installed side by side.
The holding member is a gripping means such as a mechanical chuck or a chuck cylinder, a Coulomb force, an adhesive (adhesive sheet, adhesive tape), an adhesive (adhesive sheet, adhesive tape), magnetic force, Bernoulli, instead of or in combination with the suction means 17. A configuration in which the peeling tape PT is held by suction, drive equipment, or the like may be adopted.

押圧手段20は、収容手段16に収容されていなくてもよいし、剥離用テープPTとして感圧接着性のものが採用された場合、加熱手段23があってもよいし、なくてもよい。 The pressing means 20 may or may not be accommodated in the accommodating means 16, and when a pressure-sensitive adhesive tape PT is adopted as the peeling tape PT, the heating means 23 may or may not be present.

剥離手段30は、回動モータ12の駆動、回動モータ32の駆動およびリニアモータ51の駆動のうち、少なくとも1つの駆動で接着シートASを剥離してもよいし、接着シートASにおける被着体WKから剥離された領域を被着体WKに貼付されている領域に接触するように押え付けてもよいし、接触しないように押え付けてもよいし、接着シートASの左端部、中間部、右端部等、どの位置で接着シートASを押え付けてもよいし、押え付けローラ33の最下部以外の位置で接着シートASの折り曲げ部を押え付けてもよいし、ピンチローラ35に代えてまたは併用して、板状部材やエアの吹き付け等で押え付けローラ33とで剥離用テープPT等を挟み込んでもよいし、直動モータ34以外の駆動機器でピンチローラ35を移動させてもよいし、リニアモータ36以外の駆動機器で案内ローラ37を移動させてもよいし、案内ローラ37に代えてまたは併用して、棒状部材、エアの吹き付け等で接着シートASを案内する構成を採用してもよい。 The peeling means 30 may peel the adhesive sheet AS by at least one of the drive of the rotary motor 12, the drive of the rotary motor 32, and the drive of the linear motor 51, or the adherend in the adhesive sheet AS. The area peeled off from the WK may be pressed so as to come into contact with the area attached to the adherend WK, or may be pressed so as not to come into contact with the adhesive sheet AS at the left end portion, the intermediate portion, and the like. The adhesive sheet AS may be pressed at any position such as the right end, or the bent portion of the adhesive sheet AS may be pressed at a position other than the bottom of the pressing roller 33, instead of the pinch roller 35 or. In combination with this, the peeling tape PT or the like may be sandwiched between the pressing roller 33 by blowing a plate-shaped member or air, or the pinch roller 35 may be moved by a driving device other than the linear motor 34. The guide roller 37 may be moved by a drive device other than the linear motor 36, or the adhesive sheet AS may be guided by a rod-shaped member, air blowing, or the like in place of or in combination with the guide roller 37. good.

切断手段40は、収容手段16に収容されていなくてもよい。 The cutting means 40 does not have to be housed in the housing means 16.

支持手段50は、被着体WKを移動させずにまたは移動させつつ、剥離用テープPTを移動させてもよいし、リニアモータ51に代えてまたは併用して、多関節ロボット等の他の駆動機器で被着体WKと剥離用テープPTとを移動させてよいし、本発明のシート剥離装置EAに備わっていてもよいし、備わっていなくてもよい。 The support means 50 may move the peeling tape PT without or while moving the adherend WK, or may use the linear motor 51 in place of or in combination with another drive such as an articulated robot. The adherend WK and the peeling tape PT may be moved by the device, and may or may not be provided in the sheet peeling device EA of the present invention.

本発明における手段および工程は、それら手段および工程について説明した動作、機能または工程を果たすことができる限りなんら限定されることはなく、まして、前記実施形態で示した単なる一実施形態の構成物や工程に全く限定されることはない。例えば、保持手段は、剥離用テープを繰り出し、当該剥離用テープを保持部材で保持するものであればどのような工程でもよく、出願当初の技術常識に照らし合わせてその技術範囲内のものであればなんら限定されることはない(その他の手段および工程も同じ)。 The means and processes in the present invention are not limited as long as they can perform the operations, functions or processes described for the means and processes, much less the components of the mere embodiment shown in the above-described embodiment. It is not limited to the process at all. For example, the holding means may be any process as long as the peeling tape is fed out and the peeling tape is held by the holding member, and the holding means may be within the technical range in light of the common general technical knowledge at the time of filing. There is no limitation (the same applies to other means and processes).

接着シートAS、剥離用テープPTおよび被着体WKの材質、種別、形状等は、特に限定されることはない。例えば、接着シートASおよび被着体WKは、円形、楕円形、三角形や四角形等の多角形、その他の形状であってもよいし、接着シートASおよび剥離用テープPTは、感圧接着性、感熱接着性等の接着形態のものであってもよい。また、接着シートASは、例えば、接着剤層だけの単層のもの、基材と接着剤層との間に中間層を有するもの、基材の上面にカバー層を有する等3層以上のもの、更には、基材を接着剤層から剥離することのできる所謂両面接着シートのようなものであってもよく、両面接着シートは、単層又は複層の中間層を有するものや、中間層のない単層又は複層のものであってよい。また、被着体WKとしては、例えば、食品、樹脂容器、シリコン半導体ウエハや化合物半導体ウエハ等の半導体ウエハ、回路基板、光ディスク等の情報記録基板、ガラス板、鋼板、陶器、木板または樹脂等の単体物であってもよいし、それら2つ以上で形成された複合物であってもよく、任意の形態の部材や物品なども対象とすることができる。なお、接着シートASは、機能的、用途的な読み方に換え、例えば、情報記載用ラベル、装飾用ラベル、保護シート、ダイシングテープ、ダイアタッチフィルム、ダイボンディングテープ、記録層形成樹脂シート等の任意のシート、フィルム、テープ等でもよい。 The materials, types, shapes, etc. of the adhesive sheet AS, the peeling tape PT, and the adherend WK are not particularly limited. For example, the adhesive sheet AS and the adherend WK may have a circular shape, an elliptical shape, a polygonal shape such as a triangle or a quadrangle, or any other shape, and the adhesive sheet AS and the peeling tape PT have pressure-sensitive adhesiveness. It may be in an adhesive form such as heat-sensitive adhesiveness. Further, the adhesive sheet AS is, for example, a single layer having only an adhesive layer, a material having an intermediate layer between the base material and the adhesive layer, a material having a cover layer on the upper surface of the base material, and the like having three or more layers. Further, it may be a so-called double-sided adhesive sheet capable of peeling the base material from the adhesive layer, and the double-sided adhesive sheet may have a single-layer or multi-layer intermediate layer or an intermediate layer. It may be a single layer or a multi-layer without. The adherend WK includes, for example, foods, resin containers, semiconductor wafers such as silicon semiconductor wafers and compound semiconductor wafers, circuit substrates, information recording substrates such as optical disks, glass plates, steel plates, pottery, wood plates or resins. It may be a single product, or a composite product formed of two or more of them, and any form of a member or an article can be targeted. The adhesive sheet AS can be read in a functional and versatile manner, for example, an information description label, a decorative label, a protective sheet, a dicing tape, a die attach film, a die bonding tape, a recording layer forming resin sheet, or the like. Sheets, films, tapes, etc. may be used.

前記実施形態における駆動機器は、回動モータ、直動モータ、リニアモータ、単軸ロボット、2軸または3軸以上の関節を備えた多関節ロボット等の電動機器、エアシリンダ、油圧シリンダ、ロッドレスシリンダおよびロータリシリンダ等のアクチュエータ等を採用することができる上、それらを直接的又は間接的に組み合せたものを採用することもできる。
前記実施形態において、ローラ等の回転部材が採用されている場合、当該回転部材を回転駆動させる駆動機器を備えてもよいし、回転部材の表面や回転部材自体をゴムや樹脂等の変形可能な部材で構成してもよいし、回転部材の表面や回転部材自体を変形しない部材で構成してもよいし、ローラの代わりに回転するまたは回転しないシャフトやブレード等の他の部材を採用してもよいし、押圧ローラや押圧ヘッド等の押圧手段や押圧部材といった被押圧物を押圧するものが採用されている場合、上記で例示したものに代えてまたは併用して、ローラ、丸棒、ブレード材、ゴム、樹脂、スポンジ等の部材を採用したり、大気やガス等の気体の吹き付けにより押圧する構成を採用したりしてもよいし、押圧するものをゴムや樹脂等の変形可能な部材で構成してもよいし、変形しない部材で構成してもよいし、支持手段が採用されている場合、メカチャックやチャックシリンダ等の把持手段、クーロン力、接着剤(接着シート、接着テープ)、粘着剤(粘着シート、粘着テープ)、磁力、ベルヌーイ吸着、吸引吸着、駆動機器等で被支持部材を支持する構成を採用してもよいし、切断手段や切断部材等の被切断部材を切断または、被切断部材に切込や切断線を形成するものが採用されている場合、上記で例示したものに代えてまたは併用して、カッター刃、レーザカッタ、イオンビーム、火力、熱、水圧、電熱線、気体や液体等の吹付け等で切断するものを採用したり、適宜な駆動機器を組み合わせたもので切断するものを移動させて切断するようにしたりしてもよい。
The drive device in the above embodiment is an electric device such as a rotary motor, a linear motor, a linear motor, a single-axis robot, an articulated robot having two or three or more axes of joints, an air cylinder, a hydraulic cylinder, and a rodless. In addition to being able to employ actuators such as cylinders and rotary cylinders, it is also possible to adopt a combination of these directly or indirectly.
In the above embodiment, when a rotating member such as a roller is adopted, a driving device for rotationally driving the rotating member may be provided, or the surface of the rotating member or the rotating member itself can be deformed by rubber, resin, or the like. It may be composed of a member, the surface of the rotating member or the rotating member itself may be composed of a member that does not deform, or another member such as a shaft or a blade that rotates or does not rotate may be adopted instead of the roller. Alternatively, when a pressing means such as a pressing roller or a pressing head or a pressing member that presses a pressed object is adopted, a roller, a round bar, or a blade may be used in place of or in combination with the above-exemplified one. A member such as a material, rubber, resin, or sponge may be adopted, or a structure that presses by blowing a gas such as air or gas may be adopted, or a deformable member such as rubber or resin may be used to press. It may be composed of a member that does not deform, or if a support means is adopted, a gripping means such as a mechanical chuck or a chuck cylinder, a Coulomb force, an adhesive (adhesive sheet, adhesive tape). , Adhesive (adhesive sheet, adhesive tape), magnetic force, Bernoulli suction, suction suction, drive equipment, etc. may be used to support the supported member, or the cut member such as the cutting means or the cutting member may be cut. Alternatively, if the member to be cut uses a member that forms a cut or a cutting line, the cutter blade, laser cutter, ion beam, thermal power, heat, hydraulic pressure, etc., can be used in place of or in combination with those exemplified above. It is also possible to adopt a device that cuts by spraying a heating wire, gas, liquid, or the like, or a device that is combined with an appropriate drive device to move the device to be cut.

EA…シート剥離装置
10…保持手段
17…吸引手段(保持部材)
20…押圧手段
22…押圧部材
30…剥離手段
40…切断手段
42…切断刃(切断部材)
AS…接着シート
PT…剥離用テープ
WK…被着体
EA ... Sheet peeling device 10 ... Holding means 17 ... Suction means (holding member)
20 ... Pressing means 22 ... Pressing member 30 ... Peeling means 40 ... Cutting means 42 ... Cutting blade (cutting member)
AS ... Adhesive sheet PT ... Peeling tape WK ... Adhesive

Claims (3)

剥離用テープを繰り出し、当該剥離用テープを保持部材で保持する保持手段と、
前記保持手段で保持された剥離用テープを、被着体に貼付された接着シートに押圧して貼付する押圧部材を有する押圧手段と、
前記接着シートに貼付された剥離用テープに張力を付与し、前記被着体から前記接着シートを剥離する剥離手段と、
前記押圧部材に対して前記剥離用テープの繰出方向に並設され、前記接着シートを剥離した剥離用テープを切断する切断部材を有する切断手段とを備え、
前記保持部材は、前記押圧部材と前記切断部材との間以外の位置で前記剥離用テープを保持することを特徴とするシート剥離装置。
A holding means for feeding out the peeling tape and holding the peeling tape with a holding member,
A pressing means having a pressing member that presses and attaches the peeling tape held by the holding means to the adhesive sheet attached to the adherend.
A peeling means for peeling the adhesive sheet from the adherend by applying tension to the peeling tape attached to the adhesive sheet.
A cutting means having a cutting member which is juxtaposed with respect to the pressing member in the feeding direction of the peeling tape and cuts the peeling tape from which the adhesive sheet has been peeled off is provided.
The holding member is a sheet peeling device that holds the peeling tape at a position other than between the pressing member and the cutting member.
前記保持部材は、前記剥離用テープの繰出方向に交差する交差方向に前記押圧部材と並設されていることを特徴とする請求項1に記載のシート剥離装置。 The sheet peeling device according to claim 1, wherein the holding member is arranged side by side with the pressing member in an intersecting direction intersecting the feeding direction of the peeling tape. 剥離用テープを繰り出し、当該剥離用テープを保持部材で保持する保持工程と、
前記保持工程で保持された剥離用テープを、被着体に貼付された接着シートに押圧部材で押圧して貼付する押圧工程と、
前記接着シートに貼付された剥離用テープに張力を付与し、前記被着体から前記接着シートを剥離する剥離工程と、
前記押圧部材に対して前記剥離用テープの繰出方向に並設された切断部材で、前記接着シートを剥離した剥離用テープを切断する切断工程とを実施し、
前記保持工程では、前記押圧部材と前記切断部材との間以外の位置で、前記剥離用テープを前記保持部材で保持することを特徴とするシート剥離方法。
A holding step of feeding out the peeling tape and holding the peeling tape with a holding member,
A pressing step of pressing the peeling tape held in the holding step with a pressing member against the adhesive sheet attached to the adherend and attaching the peeling tape to the adhesive sheet.
A peeling step of applying tension to the peeling tape attached to the adhesive sheet to peel the adhesive sheet from the adherend.
A cutting step of cutting the peeling tape from which the adhesive sheet has been peeled off is performed with a cutting member arranged side by side with respect to the pressing member in the feeding direction of the peeling tape.
The sheet peeling method is characterized in that, in the holding step, the peeling tape is held by the holding member at a position other than between the pressing member and the cutting member.
JP2020072106A 2020-04-14 2020-04-14 Sheet peeling device and sheet peeling method Active JP7454434B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2020072106A JP7454434B2 (en) 2020-04-14 2020-04-14 Sheet peeling device and sheet peeling method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2020072106A JP7454434B2 (en) 2020-04-14 2020-04-14 Sheet peeling device and sheet peeling method

Publications (2)

Publication Number Publication Date
JP2021170566A true JP2021170566A (en) 2021-10-28
JP7454434B2 JP7454434B2 (en) 2024-03-22

Family

ID=78149868

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2020072106A Active JP7454434B2 (en) 2020-04-14 2020-04-14 Sheet peeling device and sheet peeling method

Country Status (1)

Country Link
JP (1) JP7454434B2 (en)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5149122B2 (en) 2008-10-22 2013-02-20 リンテック株式会社 Sheet peeling apparatus and peeling method
JP5317280B2 (en) 2009-07-16 2013-10-16 株式会社タカトリ Protective tape peeling device
JP6562778B2 (en) 2015-08-31 2019-08-21 リンテック株式会社 Sheet peeling apparatus and peeling method

Also Published As

Publication number Publication date
JP7454434B2 (en) 2024-03-22

Similar Documents

Publication Publication Date Title
JP3200938U (en) Sheet peeling device
JP2019009149A (en) Sheet sticking device and sticking method
JP6951904B2 (en) Pressing device and pressing method, and sheet pasting device and sheet pasting method
JP2021048378A (en) Sheet sticking apparatus and sheet sticking method
WO2021256219A1 (en) Sheet pasting device and sheet pasting method
JP2021170566A (en) Sheet peeling device and sheet peeling method
JP3220900U (en) Sheet peeling device
JP6216583B2 (en) Sheet sticking device and sticking method
JP6796952B2 (en) Sheet pasting device and pasting method
JP3226909U (en) Sheet pasting device
WO2022030535A1 (en) Sheet supply device and sheet supply method
JP3235872U (en) Sheet pasting device
JP7441734B2 (en) Transfer device and method
JP2019073325A (en) Sheet feeder and sheet feeding method
JP7296221B2 (en) Sheet cutting device and sheet cutting method
JP7296222B2 (en) Sheet peeling device and sheet peeling method
JP7346092B2 (en) Sheet collection device and sheet collection method
JP7149059B2 (en) Sheet sticking device and sticking method
JP6990592B2 (en) Sheet peeling device and sheet peeling method
JP7064891B2 (en) Sheet pasting device and sheet pasting method
JP2022034363A (en) Sheet supply device and sheet supply method
JP2023141063A (en) Sheet pasting device and sheet pasting method
JP2020194834A (en) Support device and support method
JP2022041179A (en) Sheet sticking device and sheet sticking method
JP6672079B2 (en) Sheet sticking device and sticking method

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20230210

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20231130

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20231205

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20240201

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20240305

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20240311

R150 Certificate of patent or registration of utility model

Ref document number: 7454434

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150