JP2021136407A - Carry-out method and carry-out device - Google Patents

Abstract

To reduce the risk of damaging a workpiece during unloading.SOLUTION: A holding table includes a holding unit having a holding surface for holding a workpiece through a tape, a suction unit that sucks and holds the tape on the outer peripheral side of the holding unit, and a frame support unit having a support surface that supports a frame on the outer peripheral side of the suction unit. A carry-out method includes a tape adhesion step 1001 of bringing the tape on the outer peripheral side of the suction unit into close contact with the holding table to form a closed space including the holding surface and the suction unit, a suction holding release step 1002 of injecting gas from the suction unit to allow the gas to enter between the tape and the holding surface to release the sticking of the tape to the holding surface in a state in which the tape adhesion step 1001 is performed and the closed space is formed, and a carry-out step 1003 of releasing the sticking of the frame to the support surface and carrying out a work unit from the holding table after performing the suction holding release step 1002.SELECTED DRAWING: Figure 9

Description

The present invention relates to a unloading method and a unloading device for unloading a work unit from a holding table.

For example, a wafer after dicing with a conventionally used cutting device (see, for example, Patent Document 1) has been inspected for chipping size and chip size with a microscope, but it is desired to inspect the same portion on the front and back surfaces of the wafer. There is a request.

In the conventional method of inspecting the front side with a microscope and then inspecting the back side with a microscope, for example, a specific part on the wafer surface is identified based on a notch, an image is taken, the wafer is inverted, and then the notch is used as a reference again. It was very troublesome to identify a specific part on the back surface of the wafer and take an image. In addition, the observation position may shift.

Therefore, the applicant has devised an inspection device that can easily inspect the same part on the front and back sides of the work. On the other hand, in order to capture an image of the held surface of a work held by a holding table in a cutting device or a laser machining device, a machining device provided with a camera below the holding table has also been proposed (for example, Patent Document 2 and Patent). Reference 3).

JP-A-2018-166178 Japanese Unexamined Patent Publication No. 2010-82644 JP-A-2010-87141

In the holding table for holding the work by the devices shown in Patent Documents 2 and 3, the holding surface of the holding table is made of glass so that the held surface of the work can be imaged.

It is preferable to avoid forming suction holes on the holding surface in order to enable imaging on the entire surface of the holding surface, and tape is formed on the outer peripheral portion of the work so that the work does not move during imaging or processing. Is considered to be in the form of suction and holding. Then, in order to obtain a clear captured image, the holding surface is preferably a smooth surface.

However, in such a configuration, the tape is sucked by the suction part, so that the tape in the area where the work is attached comes into close contact with the glass which is a smooth surface, and the work is removed from the table after observing the work. Even so, there is a problem that it is difficult to remove. If the work is forcibly carried out while the work is in close contact with the holding surface via the tape, the work may be damaged. Therefore, improvement in the work carrying-out method has been eagerly desired.

Therefore, an object of the present invention is to provide a carry-out method and a carry-out device capable of reducing the risk of damaging the work during carry-out.

In order to solve the above-mentioned problems and achieve the object, the carrying-out method of the present invention holds and holds a work unit including a work, a tape attached to the work, and a frame to which the tape is attached. A method of carrying out the work unit from the table. The holding table has a holding portion including a holding surface for holding the work via the tape, and a suction portion for sucking and holding the tape on the outer peripheral side of the holding portion. And a frame support portion including a support surface that supports the frame on the outer peripheral side of the suction portion, and the work is provided via the tape attached to the holding surface by suction-holding the tape at the suction portion. Is held and the frame is supported by the frame support portion, and the tape on the outer peripheral side of the suction portion is brought into close contact with the holding table to include the holding surface and the suction portion. The tape adhesion step for forming the closed space and the tape adhesion step are performed, and a gas is injected from the suction portion in the state where the closed space is formed, and the gas is allowed to enter between the tape and the holding surface. After performing the suction holding release step for releasing the sticking of the tape to the holding surface and the suction holding release step, the work unit is released from the holding table by releasing the adhesion of the frame to the support surface. It is characterized by having a carry-out step for carrying out.

In the carrying-out method, the frame support portion is integrally formed with the suction portion, and in the tape adhesion step, the frame is pressed by a transport unit having a holding portion for holding the frame, and the support surface is pressed. It may be in close contact with.

In the carrying-out method, the frame support portion is formed integrally with the suction portion, the holding table further includes a frame fixing portion for fixing the frame, and in the tape adhesion step, the frame fixing portion is used. By fixing the frame, the frame may be brought into close contact with the support surface.

In the carry-out method, the support surface may be formed lower than the tape suction holding surface for sucking the tape of the suction portion.

The unloading device of the present invention includes a holding portion including a holding surface for holding the work via a tape attached to the work, a suction portion for sucking and holding the tape on the outer peripheral side of the holding portion, and a suction portion of the suction portion. A holding table that includes a frame support portion including a support surface that supports a frame to which the tape is attached on the outer peripheral side, and holds the work, the tape, and a work unit having the frame, and one end thereof. A flow path that communicates with the suction unit and the other end is selectively connected to the suction source and the gas supply source, a close contact unit that can bring the frame into close contact with the support surface, and a control unit that controls each component. In a state where the control unit connects the suction part and the suction source to the flow path, sucks and holds the tape in the suction part, and holds the work unit on the holding table. The feature is that the frame is brought into close contact with the support surface by the close contact unit, the suction portion and the gas supply source are connected to the flow path, and the tape is released from sticking to the holding surface. do.

The present invention has an effect that the risk of damaging the work at the time of carrying out can be reduced.

FIG. 1 is a perspective view showing a configuration example of an inspection device which is a unloading device according to the first embodiment. FIG. 2 is a perspective view of the work unit to be carried out of the inspection device shown in FIG. FIG. 3 is a plan view of the holding table of the inspection device shown in FIG. FIG. 4 is a cross-sectional view taken along the line IV-IV in FIG. FIG. 5 is a plan view showing a state in which the work unit is placed on the holding table shown in FIG. FIG. 6 is a cross-sectional view taken along the line VI-VI in FIG. FIG. 7 is a cross-sectional view of a main part showing a state in which the holding table shown in FIG. 5 holds the work unit. FIG. 8 is a perspective view showing an imaging unit of the inspection device shown in FIG. FIG. 9 is a flowchart showing the flow of the carrying-out method according to the first embodiment. FIG. 10 is a cross-sectional view of a main part of a work unit and a holding table showing a tape adhesion step of the carrying-out method shown in FIG. FIG. 11 is a cross-sectional view of a main part of the work unit and the holding table showing the suction holding release step of the carrying-out method shown in FIG. FIG. 12 is a cross-sectional view of a main part of the work unit and the holding table showing the unloading step of the unloading method shown in FIG. FIG. 13 is a perspective view showing a configuration example of a processing device which is a unloading device according to the second embodiment. FIG. 14 is a perspective view showing a holding table and an imaging camera of the processing apparatus shown in FIG. FIG. 15 is a cross-sectional view of a main part showing a state in which the holding table of the unloading device according to the first embodiment and the second modification of the second embodiment holds the work unit. FIG. 16 is a cross-sectional view of a main part showing a state in which the holding table of the unloading device according to the first embodiment and the second modification of the second embodiment holds the work unit.

An embodiment (embodiment) for carrying out the present invention will be described in detail with reference to the drawings. The present invention is not limited to the contents described in the following embodiments. In addition, the components described below include those that can be easily assumed by those skilled in the art and those that are substantially the same. Further, the configurations described below can be combined as appropriate. In addition, various omissions, substitutions or changes of the configuration can be made without departing from the gist of the present invention.

[Embodiment 1]
The unloading device according to the first embodiment of the present invention will be described with reference to the drawings. FIG. 1 is a perspective view showing a configuration example of an inspection device which is a unloading device according to the first embodiment. FIG. 2 is a perspective view of the work unit to be carried out from the inspection device shown in FIG. FIG. 3 is a plan view of the holding table of the inspection device shown in FIG. FIG. 4 is a cross-sectional view taken along the line IV-IV in FIG. FIG. 5 is a plan view showing a state in which the work unit is placed on the holding table shown in FIG. FIG. 6 is a cross-sectional view taken along the line VI-VI in FIG. FIG. 7 is a cross-sectional view of a main part showing a state in which the holding table shown in FIG. 5 holds the work unit. FIG. 8 is a perspective view showing an imaging unit of the inspection device shown in FIG.

In the inspection device 1 which is the unloading device shown in FIG. 1 according to the first embodiment, the work unit 210 shown in FIG. 2 is carried into the holding table 10, the work of the work unit 210 is inspected, and the work after the inspection is inspected. This is a device for carrying out the work unit 210 from the holding table 10 that holds the unit 210. As shown in FIG. 2, the work unit 210 to be carried in, inspected, and carried out from the inspection device 1 shown in FIG. 1 includes a work 200, a tape 206, and an annular frame 207.

The work 200 is a wafer such as a disk-shaped semiconductor wafer or an optical device wafer whose substrate 201 is silicon, sapphire, gallium arsenide, SiC (silicon carbide) or the like. In the work 200, the device 204 is formed on the surface 202 of the substrate 201 in a region partitioned in a grid pattern by a plurality of streets 203.

The device 204 is, for example, an integrated circuit such as an IC (Integrated Circuit) or an LSI (Large Scale Integration), an image sensor such as a CCD (Charge Coupled Device), or a CMOS (Complementary Metal Oxide Semiconductor).

The tape 206 is formed in a disk shape having an outer diameter larger than the outer diameter of the work 200, and in the first embodiment, the tape 206 is attached to the back surface 205 on the back side of the front surface 202 of the substrate 201 of the work 200. The frame 207 is formed in an annular shape having an inner diameter larger than the outer diameter of the work 200, and the outer edge portion of the tape 206 is attached to support the work 200 in the inner opening.

Further, in the first embodiment, in the work unit 210, the work 200 is divided into individual devices 204 by a dividing groove 208 formed along the street 203. In the first embodiment, the dividing groove 208 is formed by a cutting device that cuts the work 200 along the street 203, but in the present invention, a laser beam having a wavelength that is absorbent to the work 200 is emitted along the street 203. After irradiating the work 200 with a laser device for ablation processing or irradiating the work 200 with a laser beam having a wavelength that is transparent to the work 200 along the street 203 to form a modified layer serving as a fracture starting point on the work 200. It may be formed by an expanding device that expands the tape 206 and divides the work 200 with the modified layer as the starting point of breakage.

(Inspection device)
The inspection device 1 shown in FIG. 1 holds the work 200 of the carried-in work unit 210 on the holding table 10, inspects the work 200, and displays the work unit 210 including the inspected work 200 from the holding table 10. It is a device to carry out. As described above, the inspection device 1 is also a device for inspecting the work 200 of the work unit 210. As shown in FIG. 1, the inspection device 1 includes a device main body 2, a holding table 10 for holding the work unit 210, a moving unit 20, an imaging unit 30, a transport unit 40, and a control unit 100.

The apparatus main body 2 includes a base 4 whose upper surface 3 is flat along the horizontal direction, and a plurality of support columns 5 that support the corners of the base 4. The apparatus main body 2 is provided with a work loading portion 6 on which the work unit 210 is placed on the upper surface 3 of the base 4. In the first embodiment, one work unit 210 is placed on the work loading unit 6, but the present invention is not limited to this, and for example, a plurality of work units 210 are accommodated at intervals in the vertical direction. A cassette may be placed.

Further, the apparatus main body 2 is provided with an opening 7 penetrating the base 4 in the center of the base 4. The opening 7 is formed in a rectangular shape in which the X-axis direction parallel to the horizontal direction and the longitudinal direction are parallel. One end of the opening 7 in the X-axis direction is arranged next to the work loading portion 6 in the Y-axis direction. The Y-axis direction is a direction parallel to the horizontal direction and orthogonal to the X-axis direction.

The moving unit 20 relatively moves the holding table 10 and the imaging unit 30, and includes a holding table moving unit 21 and an imaging unit moving unit 22.

The holding table moving unit 21 moves the holding table 10 and the imaging unit 30 relatively in the X-axis direction by moving the holding table 10 in the X-axis direction parallel to the horizontal direction. The holding table moving unit 21 is a holding table extending over an loading / unloading area 101 in which the work unit 210 is carried in / out of the holding table 10 and an inspection area 102 in which the work 200 of the work unit 210 held in the holding table 10 is inspected. 10 is moved in the X-axis direction.

The image pickup unit moving unit 22 moves the holding table 10 and the image pickup unit 30 relatively in the Y axis direction by moving the image pickup unit 30 in the Y axis direction.

The holding table moving unit 21 and the imaging unit moving unit 22 are known motors 212 and 222 that rotate the well-known ball screws 211 and 221 and the ball screws 211 and 221 rotatably provided around the axis center. Also provided are well-known guide rails 213 and 223 that movably support the holding table 10 or the imaging unit 30 in the X-axis direction or the Y-axis direction.

In the first embodiment, in the holding table moving unit 21, the ball screw 211 and the guide rail 213 position the opening 7 of the upper surface 3 of the base 4 between the ball screws 211 and the base 4 of the apparatus main body 2 in the Y-axis direction. It is arranged on the upper surface 3. Further, in the first embodiment, the holding table moving unit 21 is moved in the X-axis direction by the ball screw 211 that rotates around the axis, and the first support member 214 that supports one end of the holding table 10 in the Y-axis direction. And a second support member 215 that is movably provided in the X-axis direction by the guide rail 213 and supports the other end of the holding table 10 in the Y-axis direction.

In the first embodiment, the image pickup unit moving unit 22 has a gate-shaped support in which a ball screw 221 and a guide rail 223 are arranged on the upper surface 3 of the base 4 so as to straddle an opening 7, a ball screw 211, and a guide rail 213. It is arranged on the frame 8. Further, the image pickup unit moving unit 22 is provided so as to move in the Y-axis direction by the ball screw 221 rotating around the axis and to be movable in the Y-axis direction by the guide rail 223, and to support the image pickup unit 30. A support member 224 is provided.

The holding table 10 holds the work 200 of the work unit 210 on the holding surface 111. As shown in FIGS. 3 and 4, the holding table 10 includes a disk-shaped holding portion 11 and an annular frame body 12.

The holding portion 11 is made of a transparent transparent member such as quartz glass, borosilicate glass, sapphire, calcium fluoride, lithium fluoride, magnesium fluoride, etc., and the upper surface is a holding surface 111 for holding the work 200. For this purpose, the holding portion 11 includes a holding surface 111. In the first embodiment, the holding portion 11 is formed so that the holding surface 111 is a flat smooth surface along the horizontal direction. In the holding portion 11, the back surface 205 side of the work 200 is placed on the holding surface 111 via the tape 206. Therefore, the holding surface 111 holds the work 200 via the tape 206 to which the work 200 is attached. The holding portion 11 is formed in a disk shape having a constant thickness.

The frame body 12 is made of a magnetic metal. The frame body 12 is integrally formed on the frame support portion 13 with an annular frame support portion 13 having an inner diameter smaller than the outer diameter of the holding portion 11 and an outer diameter larger than the outer diameter of the holding portion 11. An annular suction portion 14 having an inner diameter equal to the outer diameter of the holding portion 11 and having an outer diameter larger than the outer diameter of the holding portion 11 and a diameter smaller than the outer diameter of the frame support portion 13 is provided. The frame support portion 13 and the suction portion 14 are arranged at positions coaxial with each other, and are formed in an annular shape having a constant thickness. Further, since the frame support portion 13 and the suction portion 14 are arranged at positions coaxial with each other and the outer diameter of the frame support portion 13 is larger than the outer diameter of the suction portion 14, in the present invention, the frame body 12 At the outer edge portion, the frame support portion 13 is arranged on the outer peripheral side of the suction portion 14.

The suction portion 14 is formed to be thicker than the thickness of the holding portion 11, and the outer edge of the holding portion 11 is fixed to the inner peripheral surface to surround the holding portion 11 over the entire circumference. Therefore, the suction portion 14 is arranged on the outer peripheral side of the holding portion 11. The upper surface 141 of the suction portion 14 is formed flat along the horizontal direction. In the suction unit 14, the tape 206 of the work unit 210 is placed on the upper surface 141, and the tape 206 is held on the outer peripheral side of the holding unit 11. The upper surface 141 of the suction unit 14 is a tape suction holding surface that sucks and holds the tape 206 of the work unit 210. Further, in the first embodiment, the upper surface 141 of the suction portion 14 is located about 1 mm above the holding surface 111.

The suction portion 14 is selectively connected to a suction groove 142, which is a suction port that opens to the upper surface 141, and one end communicating with the suction groove 142 and the other end to the suction source 144 and the gas supply source 145 via a switching valve 143. The flow path 146 is provided. The suction source 144 sucks the gas, and the gas supply source 145 supplies the gas.

In the first embodiment, as shown in FIG. 3, a plurality of suction grooves 142 are formed on the holding surface 111, and in the first embodiment, a plurality of suction grooves 142 are formed in circles having different diameters and are arranged concentrically. An annular groove 147 and a communication groove 148 in which a plurality of annular grooves 147 are communicated with each other are provided. One end of the communication groove 148 opens above the holding surface 111 on the inner peripheral surface of the suction portion 14.

The switching valve 143 has a state in which the suction groove 142 and the suction source 144 are connected, a state in which the suction groove 142 and the gas supply source 145 are connected, and a state in which both the suction source 144 and the gas supply source 145 are connected to the suction groove 142. It can be switched to the shutoff state. When the switching valve 143 connects the suction groove 142 and the suction source 144, the suction unit 14 sucks and holds the tape 206 of the work unit 210 on the upper surface 141 which is the tape suction holding surface on the outer peripheral side of the holding part 11.

The frame support portion 13 is integrally formed with the suction portion 14. The upper surface 131 on the outer peripheral side of the frame support portion 13 with respect to the suction portion 14 is formed flat along the horizontal direction, and is arranged below the upper surface 141 which is the tape suction holding surface of the suction portion 14, and is arranged with the upper surface 141. A step 132 is formed between the two. On the upper surface 131 of the frame support portion 13 on the outer peripheral side of the suction portion 14, the frame 207 of the work unit 210 is placed on the outer peripheral side of the suction portion 14, and the frame 207 is placed on the outer peripheral side of the suction portion 14 via the tape 206. It is a support surface that supports.

Therefore, the frame support portion 13 includes an upper surface 131 that is a support surface that supports the frame 207 of the work unit 210 on the outer peripheral side of the suction portion 14, and the upper surface 131 that is the support surface sucks the tape 206 of the suction portion 14. It is formed lower than the upper surface 141, which is the tape suction holding surface. In the first embodiment, the upper surface 131 of the frame support portion 13 is arranged below the upper surface 141 of the suction portion 14 by the sum of the thickness of the frame 207 and the thickness of the tape 206. It may be arranged on the same plane as the upper surface 141 of the suction portion 14.

Further, in the holding table 10, both ends of the frame supporting portion 13 of the frame body 12 in the Y-axis direction are supported by the first supporting member 214 and the second supporting member 215 of the holding table moving unit 21, and the holding table moving unit 21 moves the carry-in / out area 101 and the inspection area 102 in the X-axis direction.

In the holding table 10, as shown in FIGS. 5 and 6, the work unit 210 is placed on the holding surface 111, the upper surface 141 which is the tape suction holding surface, and the upper surface 131 which is the support surface. When the work unit 210 is mounted, the holding table 10 is switched to a state in which the switching valve 143 shuts off both the suction source 144 and the gas supply source 145 from the suction groove 142, as shown in FIG. The holding surface 111 faces the tape 206 at a distance.

The holding table 10 is switched to a state in which the switching valve 143 communicates with the suction groove 142 and the suction source 144 in a state where the work unit 210 is placed, and the suction groove 142 is sucked by the suction source 144. Then, in the holding table 10, since the communication groove 148 opens above the holding surface 111 on the inner peripheral surface of the suction portion 14, the gas between the tape 206 and the holding surface 111 is sucked, and FIG. 7 As shown in the above, with the tape 206 attached to the holding surface 111, the suction unit 14 sucks and holds the tape 206 to hold the work unit 210. In this way, as shown in FIG. 7, in the work unit 210, the holding table 10 sucks and holds the tape 206 at the suction unit 14, so that the work 200 is attached to the holding surface 111 via the tape 206 attached to the holding surface 111. At the same time as being placed, the frame 207 is supported by the frame support portion 13.

The imaging unit 30 is formed in a columnar shape parallel to the Z-axis direction whose longitudinal direction is orthogonal to both the X-axis direction and the Y-axis direction, and is provided by the imaging unit moving unit 22 so as to be movable in the Y-axis direction. A 31 is provided, a first imaging camera 32 provided at the upper end of the unit main body 31, and a second imaging camera 33 provided at the lower end of the unit main body 31. The first image pickup camera 32 and the second image pickup camera 33 are provided on the upper end portion and the lower end portion of the unit main body 31 so as to be movable in the Z-axis direction by the elevating unit 34, respectively.

The elevating unit 34 uses a well-known ball screw rotatably provided around the axis, a well-known motor that rotates the ball screw around the axis, and a first imaging camera 32 or a second imaging camera 33 in the Z-axis direction. It is equipped with a well-known guide rail that supports it so that it can be moved freely.

The first image pickup camera 32 includes a plurality of image pickup elements that are arranged above the holding portion 11 of the holding table 10 and image the work 200 of the work unit 210 held by the holding portion 11 from above. The image sensor is, for example, a CCD (Charge-Coupled Device) image sensor or a CMOS (Complementary MOS) image sensor. The first imaging camera 32 images the work 200 held by the holding unit 11 of the holding table 10 and outputs the obtained image to the control unit 100. In the first embodiment, the first imaging camera 32 images the surface 202 side of the work 200.

The second image pickup camera 33 includes a plurality of image pickup elements that are arranged below the holding portion 11 of the holding table 10 and image the work 200 of the work unit 210 held by the holding portion 11 via the holding portion 11. The image sensor is, for example, a CCD (Charge-Coupled Device) image sensor or a CMOS (Complementary MOS) image sensor. The second imaging camera 33 takes an image of the work 200 held by the holding unit 11 of the holding table 10 from below the work 200 through the holding unit 11, and outputs the obtained image to the control unit 100. In the first embodiment, the second imaging camera 33 images the back surface 205 side of the work 200 through the holding portion 11. In the first embodiment, the first imaging camera 32 and the second imaging camera 33 image the front surface 202 side and the back surface 205 side of the work 200 at the same position.

The transport unit 40 transports the work unit 210 over the work loading section 6 and the holding table 10 of the loading / unloading area 101. The transport unit 40 includes a holding unit 41 that holds the frame 207 that supports the work 200, an elevating unit 42 that moves the holding unit 41 in the Z-axis direction, and a holding unit 41 together with the elevating unit 42 in the Y-axis direction. It is provided with a horizontal movement unit (not shown) to be moved to. The holding unit 41 includes a unit main body 43 having a holding shape in a planar shape, and a suction holding portion 44 provided at each tip of the unit main body 43 to suck and hold the frame 207.

The transport unit 40 sucks and holds the frame 207 of the work unit 210 on the work loading unit 6 by the suction holding portion 44 of the holding unit 41, raises the holding unit 41 by the elevating unit 42, and carries in and out the area by the horizontal moving unit. It is moved to the upper part of the holding table 10 of 101. The transport unit 40 lowers the holding unit 41, places the work unit 210 on the holding table 10, releases the suction holding of the suction holding unit 44, and moves the work unit 210 from the work loading unit 6 to the loading / unloading area 101. Is conveyed to the holding table 10.

Further, the transport unit 40 sucks and holds the frame 207 of the work unit 210 on the holding table 10 of the loading / unloading area 101 by the suction holding portion 44 of the holding unit 41, raises the holding unit 41 by the elevating unit 42, and raises the holding unit 41 in the horizontal direction. The moving unit moves it to the upper part of the work loading unit 6. The transport unit 40 lowers the holding unit 41, places the work unit 210 on the work loading section 6, releases the suction holding of the suction holding section 44, and holds the work unit 210 in the holding table 10 of the loading / unloading area 101. To the work loading section 6.

The control unit 100 controls each of the above-described components of the inspection device 1 to cause the inspection device 1 to perform an inspection operation and a carry-out operation on the work 200. The control unit 100 is an arithmetic processing device having a microprocessor such as a CPU (central processing unit), a storage device having a memory such as a ROM (read only memory) or a RAM (random access memory), and input / output. A computer having an interface device. In the arithmetic processing unit of the control unit 100, the arithmetic processing unit performs arithmetic processing according to the computer program stored in the storage device, and the control signal for controlling the inspection apparatus 1 is inspected via the input / output interface apparatus. Output to the above-mentioned component of 1.

Further, the inspection device 1 is connected to a display unit 110 which is connected to the control unit 100 and is composed of a liquid crystal display device or the like for displaying the state of processing operation and an image, and is connected to the control unit 100 and the operator can perform processing content information and the like. It is connected to an input unit (not shown) used when registering. In the first embodiment, the input unit is composed of at least one of a touch panel provided on the display unit 110 and an external input device such as a keyboard.

In the inspection device 1 having the above-described configuration, the inspection content information is registered in the control unit 100 by the operator from the input unit or the like, and the work unit 210 including the pre-inspection work 200 in which the dividing groove 208 is formed is mounted on the work input unit 6. When the control unit 100 receives an instruction to start the inspection operation from the operator, the inspection operation is started. In the inspection operation, the control unit 100 controls the transport unit 40 to carry the work unit 210 from the work loading unit 6 to the holding table 10 located in the loading / unloading area 101, and the work 200 is placed on the holding surface 111. Is placed.

In the inspection device 1, the control unit 100 controls the switching valve 143, connects the suction groove 142 and the suction source 144 to the flow path 146, sucks and holds the tape 206 on the upper surface 141 of the suction portion 14, and holds the holding surface. The work 200 is held on the 111 via the tape 206, and the frame 207 is held on the upper surface 131 of the frame support portion 13 via the tape 206. When the holding table 10 holds the work unit 210, the tape 206 is sucked and held by the suction unit 14, so that the tape 206 is attached to the holding surface 111, and the work 200 is attached to the holding surface 111 via the tape 206. The frame 207 is supported by the frame support portion 13 while being held by the holding surface 111.

In the inspection operation, in the inspection device 1, the control unit 100 controls the holding table moving unit 21 and the imaging unit moving unit 22, moves the holding table 10 holding the work 200 to the inspection area 102, and takes an image with the work 200. While moving the cameras 32 and 33 relatively in the X-axis direction and the Y-axis direction, the first image pickup camera 32 and the second image pickup camera 33 take an image of a predetermined position of the work 200 defined by the inspection content information. To get. In the inspection operation, in the inspection device 1, the control unit 100 inspects the work 200 based on the images captured and acquired by the first imaging camera 32 and the second imaging camera 33. In the first embodiment, the same position of the work 200 is imaged by the first imaging camera 32 and the second imaging camera 33.

In the first embodiment, the inspection device 1 performs a predetermined inspection based on the images captured and acquired by the first imaging camera 32 and the second imaging camera 33 by the control unit 100, and stores the inspection results. In the first embodiment, the inspection device 1 performs the inspection, the size of the device 204, the width of the dividing groove 208, and both edges of the dividing groove 208 from the images captured and acquired by the first imaging camera 32 and the second imaging camera 33. The size of the chipping that occurs in is detected, but in the present invention, the inspection is not limited to these.

The inspection device 1 captures all the positions of the work 200 defined by the inspection content information with the first imaging camera 32 and the second imaging camera 33, and when the inspection of the work 200 held on the holding table is completed, the holding table 10 Is moved to the carry-in / out area 101, and the holding table 10 is stopped at the carry-in / out area 101.

(How to carry out)
Next, the carrying-out method according to the first embodiment will be described with reference to the drawings. FIG. 9 is a flowchart showing the flow of the carrying-out method according to the first embodiment. FIG. 10 is a cross-sectional view of a main part of a work unit and a holding table showing a tape adhesion step of the carrying-out method shown in FIG. FIG. 11 is a cross-sectional view of a main part of the work unit and the holding table showing the suction holding release step of the carrying-out method shown in FIG. FIG. 12 is a cross-sectional view of a main part of the work unit and the holding table showing the unloading step of the unloading method shown in FIG.

The unloading method is a method of unloading the work unit 210 from the holding table 10 of the inspection device 1, and is an unloading operation of the work unit 210 of the inspection device 1. At the start of the carry-out method, the work 200 is held via the tape 206 attached to the holding surface 111 by sucking and holding the tape 206 by the suction portion 14, and the frame 207 is supported by the frame support portion 13. It has become. As shown in FIG. 9, the carry-out method includes a tape adhesion step 1001, a suction holding release step 1002, and a carry-out step 1003.

The tape adhesion step 1001 is a step in which the tape 206 on the outer peripheral side of the suction portion 14 is brought into close contact with the holding table 10 to form a closed space 300 including the holding surface 111 and the suction portion 14. In the tape adhesion step 1001, the inspection device 1 controls the transport unit 40 by the control unit 100 to suck the frame 207 of the work unit 210 on the holding table 10 of the loading / unloading area 101 by the suction holding portion 44 of the holding unit 41. Hold and press the holding unit 41 against the holding table 10 with the elevating unit 42. Thus, in the first embodiment, in the tape adhesion step 1001, the inspection device 1 is a support surface of the frame support portion 13 of the table 10 in which the transport unit 40 holds the tape 206 on the outer peripheral side of the suction portion 14 via the frame 207. The tape 206 on the outer peripheral side of the suction portion 14 is brought into close contact with the upper surface 131, which is the support surface of the frame support portion 13 of the holding table 10, and is sucked through the frame 207. It is not necessary to press the tape 206 on the outer peripheral side of the portion 14.

In the first embodiment, in the tape adhesion step 1001, in the inspection device 1, the control unit 100 controls the transport unit 40 to adhere the tape 206 on the outer peripheral side of the suction unit 14 to the upper surface 131 of the frame support portion 13 of the holding table 10. After that, as shown in FIG. 10, the switching valve 143 is switched to a state in which both the suction source 144 and the gas supply source 145 are shut off from the suction groove 142, and the process proceeds to the suction holding release step 1002. In this way, in the tape adhesion step 1001 of the carry-out method, the control unit 100 connects the suction groove 142 and the suction source 144 to the flow path 146, sucks and holds the tape 206 to the suction unit 14, and holds the work unit 210 on the holding table 10. The frame 207 is brought into close contact with the upper surface 131 which is the support surface by the transport unit 40 having the holding unit 41 which is the holding portion for holding the frame 207, and the closed space 300 is formed.

In the first embodiment, the transport unit 40 functions as a close contact unit capable of bringing the frame 207 into close contact with the upper surface 131 which is a support surface. The closed space 300 is a space that includes the holding surface 111 and the suction portion 14 between the holding table 10 and the tape 206 that are blocked from the outside by the tape 206 and the upper surface 131 being in close contact with each other. Further, in the first embodiment, after the transport unit 40 presses the tape 206 on the outer peripheral side of the suction portion 14 against the upper surface 131 which is the support surface of the frame support portion 13 of the holding table 10 via the frame 207, the switching valve 143 is pressed. Both the suction source 144 and the gas supply source 145 are switched to a state of being cut off from the suction groove 142, but in the present invention, the transport unit 40 holds the tape 206 on the outer peripheral side of the suction portion 14 via the frame 207. The switching valve 143 may be switched to a state in which both the suction source 144 and the gas supply source 145 are cut off from the suction groove 142 before being pressed against the upper surface 131 which is the support surface of the frame support portion 13.

In the suction holding release step 1002, the tape adhesion step 1001 is performed to form the closed space 300, and the gas is injected from the suction unit 14 to allow the gas to enter between the tape 206 and the holding surface 111 to allow the gas to enter between the tape 206 and the holding surface 111. This is a step of releasing the sticking to 111. In the suction holding release step 1002, the inspection device 1 is in a state where the control unit 100 controls the transport unit 40 and the tape 206 on the outer peripheral side of the suction unit 14 is brought into close contact with the upper surface 131 of the frame support portion 13 of the holding table 10. As shown in FIG. 11, the switching valve 143 is switched to a state in which the suction groove 142 and the gas supply source 145 are connected, and the process proceeds to the carry-out step 1003.

Then, since the tape 206 and the upper surface 131 are in close contact with each other, the gas from the gas supply source 145 passes through the flow path 146 and the suction groove 142 from the communication groove 148 to the holding surface 111 and the tape 206, that is, the closed space 300. Is supplied to. The supplied gas pushes up the tape 206 on the holding surface 111, and the tape 206 attached to the holding surface 111 is separated from the holding surface 111 and is released from being attached to the holding surface 111. In this way, in the suction holding release step 1002, the control unit 100 connects the suction groove 142 of the suction unit 14 and the gas supply source 145 to the flow path 146 to release the sticking of the tape 206 to the holding surface 111.

The carry-out step 1003 is a step of releasing the close contact of the frame 207 to the upper surface 131 and carrying out the work unit 210 from the holding table 10 after performing the suction holding release step 1002. In the carry-out step 1003, in the inspection device 1, the control unit 100 controls the transport unit 40, and as shown in FIG. 12, the suction holding unit 44 raises the holding unit 41 that sucks and holds the frame 207, and the frame 207. The adhesion of the tape 206 on the outer peripheral side of the suction portion 14 attached to the upper surface 131 to the upper surface 131 is released. In the carry-out step 1003, in the inspection device 1, the control unit 100 controls the transport unit 40, the work unit 210 is moved to the upper side of the work loading unit 6 by the horizontal movement unit, and the work unit 210 is moved from above the holding table 10. Carry out.

In the carry-out step 1003, in the inspection device 1, the control unit 100 controls the transport unit 40, lowers the holding unit 41, places the work unit 210 on the work loading unit 6, and holds the suction holding unit 44 for suction. Is released, the holding unit 41 is retracted from the work loading unit 6, and the carrying-out method, that is, the inspection operation is completed.

In the present invention, the frame 207 may be sucked and held by the suction holding portion 44 of the holding unit 41 by the carrying-out step 1003 for carrying out the frame 207, and the holding unit 41 may be held during the tape adhesion step 1001 and the suction holding release step 1002. The frame 207 may not be sucked and held by the suction holding portion 44 of the above.

In the carry-out method according to the first embodiment described above, gas is injected from the suction groove 142 in the suction holding release step 1002 with the tape 206 on the outer peripheral side of the suction portion 14 in close contact with the upper surface 131 in the tape contact step 1001. As a result, gas is allowed to enter the closed space 300 between the tape 206 and the holding surface 111, and the tape 206 is released from sticking to the holding surface 111. Therefore, in the carry-out method, in the carry-out step 1003, the work 200 is carried out in a state where the tape 206 is not attached to the holding surface 111, so that the devices 204 of the work 200 rub against each other when the work 200 is carried out from the holding table 10. The risk of damage can be reduced. As a result, the carry-out method has an effect that the risk of damaging the work 200 at the time of carry-out can be reduced.

Further, in the transport method, since the frame 207 is pressed by the transport unit 40 in the tape contact step 1001, the tape 206 on the outer peripheral side of the suction portion 14 can be brought into close contact with the upper surface 131, and the suction groove 142 in the suction hold release step 1002. By injecting gas from the tape 206, the tape 206 can be released from sticking to the holding surface 111.

Further, when the work 200 is carried out from the holding table 10, the inspection device 1 which is a carry-out device has the suction groove 142 and the gas supply source 145 in a state where the tape 206 on the outer peripheral side of the suction portion 14 is in close contact with the upper surface 131. Therefore, the gas can enter the closed space 300 between the tape 206 and the holding surface 111, and the tape 206 can be released from sticking to the holding surface 111. As a result, since the inspection device 1 carries out the work 200 in a state where the tape 206 is not attached to the holding surface 111, the possibility that the devices 204 of the work 200 are rubbed against each other and damaged at the time of carrying out is reduced. It has the effect of being able to do it.

Further, in the inspection device 1, since the upper surface 131 of the frame support portion 13 is lower than the upper surface 141 of the suction portion 14, the closed space 300 between the holding surface 111 and the tape 206 is sealed by the upper surface 141 of the suction portion 14. When the suction groove 142 is sucked by the suction source 144, the time required to attach the tape 206 to the holding surface 111 can be suppressed as compared with the case where the upper surfaces 131 and 141 are located on the same plane.

Further, in the inspection device 1, since the upper surface 141 of the suction unit 14 is located about 1 mm above the holding surface 111, outside air enters the holding surface 111 when the work 200 is held on the holding table 10. Since this can be suppressed, the tape 206 can be attached to the holding surface 111 in a single hour.

[Embodiment 2]
The unloading device and the unloading method according to the second embodiment of the present invention will be described with reference to the drawings. FIG. 13 is a perspective view showing a configuration example of a processing device which is a unloading device according to the second embodiment. FIG. 14 is a perspective view showing a holding table and an imaging camera of the processing apparatus shown in FIG. In FIGS. 13 and 14, the same parts as those in the first embodiment are designated by the same reference numerals, and the description thereof will be omitted.

In the processing device 1-1 shown in FIG. 13, which is the unloading device according to the second embodiment, the work unit 210 is carried into the holding table 10 and the work 200 of the work unit 210 is cut (corresponding to processing) and processed. This is a cutting device that carries out the later work unit 210 from the holding table 10. In the processing apparatus 1-1 shown in FIG. 13, the work 200 is held by the holding table 10 and cut by the cutting blade 51 along the street 203 to form a dividing groove 208 in the street 203, and the work 200 is individually formed. A cutting device that divides into devices 204. That is, in the second embodiment, the dividing groove 208 is not formed in the work 200 of the work unit 210 before cutting.

As shown in FIG. 13, the processing apparatus 1-1 includes a holding table 10, a cutting unit 50, a moving unit 20-1, a first imaging camera 32, and a control unit 100. As shown in FIG. 14, the holding table 10 of the processing apparatus 1-1 according to the second embodiment is a housing 15 that is moved in the X-axis direction parallel to the horizontal direction by the X-axis moving unit 23 of the moving unit 20-1. Is supported by.

In the second embodiment, the housing 15 has a lower plate 151 that is moved in the X-axis direction by the X-axis moving unit 23 and is parallel to the horizontal direction, a side plate 152 that stands up from the outer edge of the lower plate 151, and a side plate 152 whose outer edge is the side plate 152. It is provided with an upper plate 153 which is connected to the upper end of the above plate and is parallel to the lower plate 151 and has a hole (not shown) formed in the center. Further, the holding table 10 according to the second embodiment holds the work 200 on the holding surface 111 and is rotatably supported by the upper plate 153 around the axis parallel to the Z-axis direction.

The moving unit 20-1 includes an X-axis moving unit 23 which is a machining feed unit shown in FIGS. 13 and 14, a Y-axis moving unit 24 which is an indexing feed unit shown in FIG. 13, and a cutting feed unit shown in FIG. A Z-axis moving unit 25 and a rotating moving unit 26 that rotates the holding table 10 shown in FIGS. 13 and 14 around the axis are provided.

The X-axis moving unit 23 moves the lower plate 151 of the housing 15 in the X-axis direction, so that the holding table 10 and the cutting unit 50 are relatively moved in the X-axis direction. The X-axis moving unit 23 holds the holding table 10 in the X-axis direction over the loading / unloading area 101 in which the work 200 is carried in / out of the holding table 10 and the machining area 103 in which the work 200 held in the work 200 is machined. Move to. The Y-axis moving unit 24 moves the holding table 10 and the cutting unit 50 relatively in the Y-axis direction by moving the cutting unit 50 in the Y-axis direction. The Z-axis moving unit 25 moves the holding table 10 and the cutting unit 50 relatively in the Z-axis direction by moving the cutting unit 50 in the Z-axis direction.

The X-axis moving unit 23, the Y-axis moving unit 24, and the Z-axis moving unit 25 are a well-known ball screw rotatably provided around the axis, a well-known motor for rotating the ball screw around the axis, and a holding table 10. Alternatively, a well-known guide rail that movably supports the cutting unit 50 in the X-axis direction, the Y-axis direction, or the Z-axis direction is provided.

The rotary movement unit 26 rotates the holding table 10 around the axis. The rotary movement unit 26 rotates around the holding table 10 in a range of more than 180 degrees and less than 360 degrees around the axis. The rotational movement unit 26 includes a motor 261 fixed to the side plate 152 of the housing 15, a pulley 262 connected to the output shaft of the motor 261 and a pulley 262 wound around the outer periphery of the frame support portion 13 of the holding table 10. It is provided with a belt 263 that moves along the outer peripheral surface of the frame support portion 13. When the motor 261 is rotated, the rotary movement unit 26 moves the belt 263 along the outer peripheral surface of the frame support portion 13 by the pulley 262, and rotates the holding table 10 around the axis. Further, in the first embodiment, the rotational movement unit 26 can rotate the holding table 10 by 220 degrees in both one direction around the axis and the other direction in the opposite direction of one direction.

The cutting unit 50 is a processing unit that cuts the work 200 held by the holding portion 11 of the holding table 10 with the cutting blade 51. The cutting unit 50 is provided so as to be movable in the Y-axis direction by the Y-axis moving unit 24 with respect to the work 200 held by the holding portion 11 of the holding table 10, and is provided in the Z-axis direction by the Z-axis moving unit 25. It is provided so that it can be moved. The cutting unit 50 is provided on the support frame 9 erected from the apparatus main body 2-1 via the Y-axis moving unit 24, the Z-axis moving unit 25, and the like.

The cutting unit 50 can position the cutting blade 51 at an arbitrary position on the holding surface 111 of the holding table 10 by the Y-axis moving unit 24 and the Z-axis moving unit 25. The cutting unit 50 rotates about the axis of the cutting blade 51, the spindle housing 52 movably provided in the Y-axis direction and the Z-axis direction by the Y-axis moving unit 24 and the Z-axis moving unit 25, and the spindle housing 52. It includes a spindle 53 that is freely provided, is rotated by a motor, and has a cutting blade 51 mounted on the tip.

The cutting blade 51 cuts the work 200 held by the holding table 10, and is an ultra-thin cutting grindstone having a substantially ring shape. In the first embodiment, the cutting blade 51 is a so-called hub blade including an annular circular base and an annular cutting blade disposed on the outer peripheral edge of the circular base to cut the work 200. The cutting edge is composed of abrasive grains such as diamond and CBN (Cubic Boron Nitride) and a bonding material (bonding material) such as metal and resin, and is formed to have a predetermined thickness. In the present invention, the cutting blade 51 may be a so-called washer blade composed of only the cutting blade.

The spindle 53 rotates around the axis by a motor to rotate the cutting blade 51 around the axis. The axes of the cutting blade 51 and the spindle 53 of the cutting unit 50 are parallel to the Y-axis direction.

In the second embodiment, the first imaging camera 32 is fixed to the cutting unit 50 so as to move integrally with the cutting unit 50.

Further, in the second embodiment, the processing apparatus 1-1 includes a second imaging camera 33 as shown in FIG. Note that FIG. 14 shows the second imaging camera 33 next to the holding table 10 in the Y-axis direction. However, in the actual processing apparatus 1-1, the second imaging camera 33 is arranged below the holding portion 11 of the holding table 10. Further, in the second embodiment, the second imaging camera 33 is movably arranged in the Y-axis direction by the second Y-axis moving unit 27 provided in the apparatus main body 2, and is moved in the Y-axis direction by the second Y-axis moving unit 27. The second Z-axis moving unit 28 provided on the erection pillar 17 erected from the moving plate 16 is movably arranged in the Z-axis direction. In the second embodiment, the second imaging camera 33 is attached to the other end of the horizontally extending member 18 to which one end is attached to the elevating member that can move in the Z-axis direction by the second Z-axis moving unit 28.

The second Y-axis moving unit 27 and the second Z-axis moving unit 28 are a well-known ball screw rotatably provided around the axis, a well-known motor that rotates the ball screw around the axis, a moving plate, or a second imaging camera. It is provided with a well-known guide rail that movably supports 33 in the Y-axis direction or the Z-axis direction.

Further, the processing apparatus 1-1 includes a cassette elevator 61 on which a cassette 60 accommodating a plurality of work units 210 including the work 200 before and after cutting is placed and the cassette 60 is moved in the Z-axis direction, and a work 200 after cutting. It is provided with a cleaning unit 62 for cleaning the work unit 62, and a transport unit 40 for moving the work unit 210 in and out of the cassette 60 and transporting the work unit 210 between the cassette 60, the holding table 10, and the cleaning unit 62.

In the second embodiment, as in the first embodiment, the control unit 100 has an arithmetic processing device having a microcomputer such as a CPU (central processing unit) and a ROM (read only memory) or a RAM (random access memory). It is a computer having a storage device having various memories and an input / output interface device, and controls each of the above-mentioned components of the processing device 1-1 to cause the processing device 1-1 to perform a processing operation on the work 200. It is a thing. In the arithmetic processing unit of the control unit 100, the arithmetic processing unit performs arithmetic processing according to a computer program stored in the storage device, and a control signal for controlling the processing apparatus 1-1 is transmitted via an input / output interface device. Output to the above-mentioned components of the processing device 1-1.

In the processing device 1-1 having the above-described configuration, the processing content information is registered in the control unit 100 by the operator from the input unit or the like, and the cassette 60 accommodating a plurality of work units 210 including the work 200 before cutting is set in the cassette elevator 61. When the control unit 100 is installed and receives a machining operation start instruction from the operator, the machining operation is started. In the machining operation, in the machining apparatus 1-1, the control unit 100 controls the transport unit 40 to take out one work unit 210 from the cassette 60, carry it into the holding table 10 located in the carry-in / out area 101, and carry it into the holding surface. Place it on 111. In the processing device 1-1, the control unit 100 controls the switching valve 143 to connect the suction groove 142 and the suction source 144 to the flow path 146, and the work unit 210 is placed on the holding table 10 as in the first embodiment. Hold.

In the machining operation, in the machining apparatus 1-1, the control unit 100 controls the X-axis moving unit 23 and the second Y-axis moving unit 27 to move the holding table 10 holding the work 200 to the machining area 103 and hold it. The work 200 of the work unit 210 held by the unit 11 is imaged by the first imaging camera 32 to perform alignment for aligning the work 200 and the cutting blade 51.

In the machining operation, in the machining apparatus 1-1, the control unit 100 controls the moving unit 20-1 and the cutting unit 50, and the holding table 10 and the cutting blade 51 of the cutting unit 50 are relatively relative to each other along the street 203. While moving, the cutting blade 51 is cut into the street 203 until it reaches the tape 206, a dividing groove 208 is formed in the work 200 along the street 203, and the work 200 is cut along the street 203.

In the second embodiment, in the machining operation, the machining device 1-1 first captures a predetermined position of the work 200 defined by the machining content information while machining the work 200 of the work unit 210 held on the holding table 10. An image is taken by the camera 32 and the second imaging camera 33, a calf check is performed, and the result is stored. In the calf check, the machining of the work 200 is performed to determine whether or not the deviation of the dividing groove 208 formed by cutting from a desired position and the size of chipping generated at both edges of the dividing groove 208 are within a predetermined range. It means to check the condition. In the machining operation, when the machining of the work 200 is completed, the machining device 1-1 moves the holding table 10 to the loading / unloading area 101 and stops the holding table 10 at the loading / unloading area 101. In the machining operation, in the machining device 1-1, the control unit 100 carries out the carry-out method according to the first embodiment, carries out the work unit 210 from the holding table 10, and conveys the work unit 210 to the cleaning unit 62.

In the machining operation, the machining device 1-1 controls the transport unit 40 by the control unit 100 to accommodate the work unit 210 cleaned by the cleaning unit 62 in the cassette 60. The processing apparatus 1-1 ends the processing operation when the work 200 of all the work units 210 in the cassette 60 is cut.

In the carry-out method and processing apparatus 1-1 according to the second embodiment, the tape 206 and the holding surface are formed by injecting gas from the suction groove 142 in a state where the tape 206 on the outer peripheral side of the suction portion 14 is in close contact with the upper surface 131. Gas is allowed to enter the closed space 300 between the tape 206 and the tape 206, and the tape 206 is released from sticking to the holding surface 111. As a result, the unloading method and the processing device 1-1 according to the second embodiment carry out the work 200 in a state where the tape 206 is not attached to the holding surface 111. Therefore, when the work 200 is carried out from the holding table 10, the work 200 is carried out. This has the effect of reducing the risk of the devices 204 rubbing against each other and being damaged.

[Modification example]
A unloading device and a unloading method according to a modification of the first and second embodiments of the present invention will be described with reference to the drawings. FIG. 15 is a cross-sectional view of a main part showing a state in which the holding table of the unloading device according to the first embodiment and the second modification of the second embodiment holds the work unit. FIG. 16 is a cross-sectional view of a main part showing a state in which the holding table of the unloading device according to the first embodiment and the second modification of the second embodiment holds the work unit. In FIGS. 15 and 16, the same parts as those in the first embodiment are designated by the same reference numerals, and the description thereof will be omitted.

As shown in FIGS. 15 and 16, the holding tables 10-1 and 10-2 of the unloading device 1-2 according to the first and second modifications fix the frame 207 when holding the work unit 210. The frame fixing portions 19-1 and 19-2 are further provided, and in the tape adhesion step 1001, the suction portion 14 attached to the frame 207 is fixed by fixing the frame 207 with the frame fixing portions 19-1 and 19-2. The tape 206 on the outer peripheral side is brought into close contact with the upper surfaces 131 and 131-2, which are the support surfaces. The frame fixing portions 19-1 and 19-2 function as a close contact unit capable of bringing the tape 206 on the outer peripheral side of the suction portion 14 attached to the frame 207 into close contact with the upper surfaces 131 and 131-2.

In the first modification shown in FIG. 15, the frame fixing portion 19-1 is exposed on the upper surface 131 of the frame support portion 13, the frame 207 is attracted by the magnetic force, and the frame 207 is attracted to the upper surface 131 of the frame support portion 13. It is a permanent magnet that is fixed to.

In the second modification shown in FIG. 16, the frame support portion 13-2 is fixed to the outer peripheral side of the suction portion 14 of the holding table 10-2, and the upper surface 131-2 is a support surface that supports the frame 207. It is a side clamp member. In the modified example 2 shown in FIG. 16, the frame fixing portion 19-2 is rotatably provided on the frame supporting portion 13-2 by a rotary air cylinder 191 and is connected to the upper surface 131-2 of the frame supporting portion 13-2. It is a clamp member that fixes the frame 207 to the upper surface 131-2 of the frame support portion 13-2 by sandwiching the frame 207 and the tape 206 on the outer peripheral side of the suction portion 14 between them.

The carry-out method and carry-out device 1-2 according to the first and second modifications are made by injecting gas from the suction groove 142 in a state where the tape 206 on the outer peripheral side of the suction portion 14 is in close contact with the upper surface 131. Since the attachment of the 206 to the holding surface 111 is released, the work 200 is carried out in a state where the tape 206 is released from the holding surface 111 as in the first embodiment. Therefore, the holding tables 10-1, 10 are released. It is possible to reduce the possibility that the devices 204 of the work 200 are rubbed against each other and damaged when the work 200 is carried out from -2.

Further, the unloading method and unloading device 1-2 according to the modified examples 1 and 2 are attached to the frame 207 by fixing the frame 207 with the frame fixing portions 19-1 and 19-2 in the tape adhesion step 1001. Since the tape 206 on the outer peripheral side of the suction portion 14 is brought into close contact with the upper surfaces 131 and 131-2, the tape 206 is attached to the holding surface 111 by injecting gas from the suction groove 142 in the suction holding release step 1002. It can be released.

The present invention is not limited to the above embodiments and modifications. That is, it can be modified in various ways without departing from the gist of the present invention. In the above embodiment, the unloading device is the processing device 1-1, which is the cutting unit 50 in which the inspection device 1 or the processing unit cuts the work 200, but the present invention is not limited to the cutting unit 50. As the processing unit, a laser processing apparatus including a laser beam irradiation unit including a laser oscillator, a condenser lens and the like may be used.

Further, in the present invention, the frame fixing portions 19-1 and 19-2 are not limited to the configurations of the above-mentioned modifications 1 and 2, but may be an electromagnet, are connected to the suction source, and are mounted on the upper surface 131. It may be a suction hole that is closed by the placed frame 207.

1 Inspection device (unloading device)
1-1 Processing equipment (unloading equipment)
1-2 Carry-out device 10, 10-2 Holding table 11 Holding part 13 Frame support part 14 Suction part 19-1, 19-2 Frame fixing part (adhesion unit)
40 Conveyance unit (close contact unit)
41 Holding unit (holding part)
100 Control unit 111 Holding surface 131 Top surface (support surface)
141 Top surface (tape suction holding surface)
144 Suction source 145 Gas supply source 146 Flow path 200 Work 206 Tape 207 Frame 210 Work unit 300 Closed space 1001 Tape adhesion step 1002 Suction hold release step 1003 Carry-out step

Claims (5)

A method of carrying out the work unit from a holding table that holds the work, a tape attached to the work, and a frame to which the tape is attached.
The holding table has a holding portion including a holding surface for holding the work via the tape, a suction portion for sucking and holding the tape on the outer peripheral side of the holding portion, and a supporting surface for supporting the frame on the outer peripheral side of the suction portion. With frame support, including
By sucking and holding the tape with the suction portion, the work is held through the tape attached to the holding surface, and the frame is supported by the frame support portion.
A tape adhesion step in which the tape on the outer peripheral side of the suction portion is brought into close contact with the holding table to form a closed space including the holding surface and the suction portion.
The tape adhesion step is performed, and in a state where the closed space is formed, a gas is injected from the suction portion to allow the gas to enter between the tape and the holding surface to release the sticking of the tape to the holding surface. Suction hold release step and
A carry-out method comprising the carry-out step of carrying out the suction holding release step, then releasing the contact of the frame with the support surface, and carrying out the work unit from the holding table. The frame support portion is formed integrally with the suction portion.
The carry-out method according to claim 1, wherein in the tape adhesion step, the frame is pressed by a transport unit having a holding portion for holding the frame so that the frame is brought into close contact with the support surface. The frame support portion is formed integrally with the suction portion.
The holding table further includes a frame fixing portion for fixing the frame.
The carry-out method according to claim 1, wherein in the tape adhesion step, the frame is brought into close contact with the support surface by fixing the frame with the frame fixing portion. The carry-out method according to any one of claims 1 to 3, wherein the support surface is formed lower than the tape suction holding surface that sucks the tape of the suction portion. A holding portion including a holding surface that holds the work via a tape attached to the work, a suction portion that sucks and holds the tape on the outer peripheral side of the holding portion, and the tape is attached on the outer peripheral side of the suction portion. A holding table comprising a frame support portion including a support surface for supporting the frame to be worn, and holding the work, the tape, and the work unit with the frame.
A flow path in which one end communicates with the suction part and the other end is selectively connected to the suction source and the gas supply source.
A close contact unit capable of bringing the frame into close contact with the support surface,
It is equipped with a control unit that controls each component.
The control unit
In a state where the suction part and the suction source are connected to the flow path, the tape is sucked and held by the suction part, and the work unit is held by the holding table, the frame is supported by the close contact unit. A unloading device characterized in that the suction portion and the gas supply source are connected to the flow path so that the tape is released from sticking to the holding surface.

Images