JP2023018558A - Cassette mounting stage and fixture for the cassette mounting stage - Google Patents

Abstract

To enable a mounting of a cassette at a correct position even by an unskilled operator.SOLUTION: In a cassette mounting stage 40, a cassette having a cassette main body which can house a plurality of workpieces in an inner part, and three or more leg parts 32 formed under a lower end of the cassette main body is mounted. In each leg part 32 of the cassette, a notch 39 containing an inclination surface 391 in which an area of a horizontal cross section is gradually expanded from an upper side to a lower side is formed. The cassette mounting stage 40 comprises: an upper surface 51 of a cassette elevator 50; and three or more engagement parts 44 corresponded to each leg part 32 of the cassette mounted onto the upper surface 51. Each engagement part 44 includes an inclination surface 461 along the inclination surface 391 which is expanded to each leg part 32 of the cassette, and includes a convex part 46 of which the area of the horizontal cross section is gradually increased from the upper side to the lower side. A direction of at least two convex parts 46 of the three or more engagement parts 44 is arranged in non-parallel.SELECTED DRAWING: Figure 5

Description

The present invention relates to a cassette mounting table and a jig for the cassette mounting table.

A processing apparatus such as a grinding apparatus and a cutting apparatus is supplied with a cassette (see, for example, Patent Document 1) that accommodates a plurality of works.

The processing apparatus includes a cassette mounting table, and the cassette mounting table is provided with a positioning member for positioning the position of the cassette to be placed at a predetermined position and a sensor for detecting the presence or absence of the cassette.

On the other hand, in the semiconductor manufacturing process, a cassette that stores wafers in a sealed manner, called a hoop cassette, is also used in order to prevent foreign matter from adhering to the device. By using the FOUP cassette, the wafers are sealed in the cassette in a clean atmosphere, and the wafers are transferred between processing apparatuses in a state in which the wafers are isolated from the outside atmosphere. Such a hoop cassette and a mounting table on which the hoop cassette is mounted are standardized by the SEMI (Semiconductor Equipment and Materials International) standard.

The mounting table on which the FOUP cassette is mounted has positioning pins erected from the mounting surface, and the lower surface of the FOUP cassette has legs with which the positioning pins are engaged.

JP-A-08-809897

In general, hoop cassettes are transported by transport robots, but depending on the factory, workers may transport the cassettes. Inexperienced workers find it difficult to properly place the legs on the positioning pins. was coveted.

SUMMARY OF THE INVENTION It is an object of the present invention to provide a cassette mounting table and a jig for the cassette mounting table that allows even an inexperienced operator to place a cassette in the correct position.

In order to solve the above-described problems and achieve the object, the cassette mounting table of the present invention comprises a cassette body capable of accommodating a plurality of workpieces therein and three or more legs formed at the lower end of the cassette body. a cassette mounting table on which a cassette equipped with the The cassette mounting table includes a base and three or more engaging portions respectively corresponding to the leg portions of the cassette mounted on the base, and the engaging portions widen toward the ends of the leg portions of the cassette. has a slope along the inclined surface of , has a convex portion whose horizontal cross-sectional area increases from top to bottom, and at least two of the three or more engaging portions are non-parallel The position of the cassette is characterized by being arranged.

In the cassette mounting table, the engaging portion is detachably fixed to the cassette mounting table,
The cassette mounting table has a pressure sensor pressed by the leg of the cassette placed thereon, and the engaging portion has an insertion hole adjacent to the protrusion into which the pressure sensor is inserted. Also good.

In the cassette mounting table, the engaging portion may be colored in a color different from that of the base to facilitate visual recognition of the position of the convex portion.

A jig for a cassette mounting table of the present invention has an engaging portion fixed to the cassette mounting table, and an inclined surface along the inclined surface of the leg portion of the cassette mounted on the cassette mounting table. and a protrusion whose horizontal cross-sectional area increases downward.

The present invention has the effect that even an inexperienced operator can place the cassette in the correct position.

FIG. 1 is a perspective view showing a configuration example of a processing apparatus provided with a cassette mounting table according to Embodiment 1. FIG. FIG. 2 is a perspective view showing legs of a cassette placed on a cassette placing table of the processing apparatus shown in FIG. 3 is a plan view schematically showing a cassette mounting table of the processing apparatus shown in FIG. 1. FIG. 4 is a perspective view showing an exploded cassette mounting table jig of the cassette mounting table shown in FIG. 3. FIG. FIG. 5 is a perspective view showing a state in which the notch of the leg portion of the cassette shown in FIG. 1 and the convex portion of the cassette mounting table are opposed to each other. 6 is a plan view schematically showing a state in which a cassette is mounted on the cassette mounting table shown in FIG. 1. FIG. FIG. 7 is a cross-sectional view schematically showing leg portions and engaging portions when a cassette is placed on the cassette placing table shown in FIG.

A form (embodiment) for carrying out the present invention will be described in detail with reference to the drawings. The present invention is not limited by the contents described in the following embodiments. In addition, the components described below include those that can be easily assumed by those skilled in the art and those that are substantially the same. Furthermore, the configurations described below can be combined as appropriate. In addition, various omissions, substitutions, or changes in configuration can be made without departing from the gist of the present invention.

[Embodiment 1]
A cassette mounting table according to Embodiment 1 of the present invention will be described with reference to the drawings. FIG. 1 is a perspective view showing a configuration example of a processing apparatus provided with a cassette mounting table according to Embodiment 1. FIG. FIG. 2 is a perspective view showing legs of a cassette placed on a cassette placing table of the processing apparatus shown in FIG. 3 is a plan view schematically showing a cassette mounting table of the processing apparatus shown in FIG. 1. FIG. 4 is a perspective view showing an exploded cassette mounting table jig of the cassette mounting table shown in FIG. 3. FIG.

A cassette mounting table 40 according to the first embodiment constitutes the processing apparatus 1 shown in FIG. A processing apparatus 1 shown in FIG. 1 is a cutting apparatus for cutting a workpiece 200 . A workpiece 200 to be processed by the processing apparatus 1 shown in FIG. 1 is a wafer such as a disk-shaped semiconductor wafer or an optical device wafer having a substrate 201 made of silicon, sapphire, gallium, or the like. A workpiece 200 has a plurality of dividing lines 203 that intersect each other on a surface 202 , and devices 204 are formed in regions partitioned by the dividing lines 203 . The device 204 is, for example, an integrated circuit such as an IC (Integrated Circuit) or LSI (Large Scale Integration), a CCD (Charge Coupled Device), or an image sensor such as a CMOS (Complementary Metal Oxide Semiconductor).

In the first embodiment, as shown in FIG. 1, the workpiece 200 is in the shape of a disk having a diameter larger than the outer diameter of the workpiece 200, and an adhesive tape 209 having an annular frame 210 attached to the outer edge is attached to the back side of the surface 202. 206 and supported within the opening of the annular frame 210 . The workpiece 200 is cut along a dividing line 203 to be divided into individual devices 204 .

(processing equipment)
The processing apparatus 1 shown in FIG. 1 is a cutting apparatus that holds a work 200 on a holding table 10 and cuts the work 200 along a dividing line 203 with a cutting blade 21 to divide the work 200 into individual devices 204. .

As shown in FIG. 1 , the processing apparatus 1 includes a holding table 10 that sucks and holds a work 200 on a holding surface 11 , a cutting unit 20 that is a processing unit that cuts the work 200 held on the holding table 10 , a holding An imaging unit for imaging a workpiece 200 held on a table 10 and a control unit 100 are provided. As shown in FIG. 1, the processing apparatus 1 is a so-called facing dual type cutting apparatus having two cutting units 20, that is, a two-spindle dicer.

The processing apparatus 1 also includes a moving unit (not shown) that relatively moves the holding table 10 and the cutting unit 20 . The moving unit includes a processing feed unit for processing and feeding the holding table 10 in the X-axis direction parallel to the horizontal direction, and an indexing feed unit for indexing and feeding the cutting unit 20 in the Y-axis direction parallel to the horizontal direction and orthogonal to the X-axis direction. a cutting feed unit that cuts and feeds the cutting unit 20 in the Z-axis direction parallel to the vertical direction orthogonal to both the X-axis direction and the Y-axis direction; and the holding table 10 around the axis parallel to the Z-axis direction. and a rotational movement unit that rotates in the direction of rotation. That is, the moving unit relatively moves the holding table 10 and the cutting unit 20 in the X-axis direction, the Y-axis direction, the Z-axis direction, and around the axis.

The machining feed unit relatively moves the cutting unit 20 and the holding table 10 along the X-axis direction by moving the holding table 10 and the rotary movement unit in the X-axis direction, which is the machining feed direction. . The index feed unit moves the cutting unit 20 and the holding table 10 relatively along the Y axis direction by moving the cutting unit 20 in the Y axis direction, which is the index feed direction. The cutting feed unit relatively moves the cutting unit 20 and the holding table 10 along the Z-axis direction by moving the cutting unit 20 in the Z-axis direction, which is the cutting feed direction. The rotary movement unit is supported by the processing feed unit, supports the holding table 10, and is arranged to be movable together with the holding table 10 in the X-axis direction.

The machining feed unit, the indexing feed unit, and the cutting feed unit include a well-known ball screw provided rotatably around the axis, a well-known motor for rotating the ball screw around the axis, and the holding table 10 or cutting unit 20. It is provided with well-known guide rails that are movably supported in the axial direction, the Y-axis direction, or the Z-axis direction. The rotary movement unit also includes a motor that rotates the holding table 10 around its axis.

The holding table 10 has a disk shape, and a holding surface 11 for holding the workpiece 200 is formed of porous ceramic or the like. In addition, the holding table 10 is provided so as to be movable between a processing area below the cutting unit 20 and a carrying-in/out area separated from below the cutting unit 20 by the machining feed unit, where the workpiece 200 is carried in and out. , are movably provided in the X-axis direction. The holding table 10 is rotatably provided around an axis parallel to the Z-axis direction by a rotary movement unit.

The holding surface 11 of the holding table 10 is connected to a suction source (not shown), and the workpiece 200 placed on the holding surface 11 is sucked and held by suction from the suction source. In the first embodiment, the holding table 10 sucks and holds the back surface 206 side of the work 200 via the adhesive tape 209 . A plurality of clamping portions 12 for clamping the annular frame 210 are provided around the holding table 10, as shown in FIG.

The cutting unit 20 is a processing unit that has a cutting blade 21 attached to a spindle 23 and cuts a work 200 held on the holding table 10 . The cutting units 20 are provided so as to be movable in the Y-axis direction by the indexing feed unit and to be movable in the Z-axis direction by the cutting feed unit with respect to the work 200 held on the holding table 10. there is The cutting unit 20 is provided on a support frame (not shown) erected from the apparatus main body 2 via an indexing feed unit, a cutting feed unit, and the like. The cutting unit 20 can position the cutting blade 21 at an arbitrary position on the holding surface 11 of the holding table 10 by the indexing feed unit and the cutting feed unit.

The cutting unit 20 includes a cutting blade 21, a spindle housing 22 which is movably provided in the Y-axis direction and the Z-axis direction by an indexing feed unit and a cutting feed unit, and a spindle housing 22 which is rotatable about its axis. A spindle 23 having a cutting blade 21 attached to its tip and a spindle motor (not shown) for rotating the spindle 23 around its axis are provided.

The cutting blade 21 is an ultra-thin cutting whetstone having a substantially ring shape. A cutting blade 21 is fixed to the tip of a spindle 23 . In Embodiment 1, the cutting blade 21 is a so-called hub blade that includes an annular circular base and an annular cutting edge that is disposed on the outer peripheral edge of the circular base and cuts the workpiece 200 . The cutting edge is made of abrasive grains such as diamond and CBN (Cubic Boron Nitride) and bonding material such as metal and resin, and is formed to have a predetermined thickness. In addition, in the present invention, the cutting blade 21 may be a so-called washer blade composed only of a cutting edge.

The axial centers of the cutting blade 21 and the spindle 23 of the cutting unit 20 are set parallel to the Y-axis direction.

The imaging unit is fixed to the cutting unit 20 so as to move together with the cutting unit 20 . The imaging unit includes an imaging element that captures an area to be divided of the workpiece 200 before cutting held on the holding table 10 . The imaging device is, for example, a CCD (Charge-Coupled Device) imaging device or a CMOS (Complementary MOS) imaging device. The imaging unit photographs the work 200 held on the holding table 10, obtains an image for performing alignment for aligning the work 200 and the cutting blade 21, etc., and outputs the obtained image to the control unit 100. do.

The processing apparatus 1 also includes an X-axis direction position detection unit (not shown) for detecting the position of the holding table 10 in the X-axis direction, and a Y-axis direction position detection unit (not shown) for detecting the position of the cutting unit 20 in the Y-axis direction. A detection unit and a Z-axis direction position detection unit for detecting the position of the cutting unit 20 in the Z-axis direction are provided. The X-axis direction position detection unit and the Y-axis direction position detection unit can be composed of a linear scale parallel to the X-axis direction or the Y-axis direction and a reading head. The Z-axis direction position detection unit detects the position of the cutting unit 20 in the Z-axis direction using motor pulses. The X-axis direction position detection unit, the Y-axis direction position detection unit and the Z-axis direction position detection unit detect the position of the holding table 10 in the X-axis direction and the lower end of the cutting edge 212 of the cutting unit 20 in the Y-axis direction or the Z-axis direction. Output to control unit 100 .

In the first embodiment, the positions of the holding table 10 and the cutting unit 20 of the processing apparatus 1 in the X-axis direction, the Y-axis direction, and the Z-axis direction are determined based on predetermined reference positions (not shown). In the first embodiment, the position in the X-axis direction, the positions in the Y-axis direction and the Z-axis direction are determined by the distances in the X-axis direction, the Y-axis direction and the Z-axis direction from the reference position. In the first embodiment, the XY coordinates represented by the X-axis direction and the Y-axis direction of the processing apparatus 1 (the distance in the X-axis direction from the reference position indicating the position in the X-axis direction and the reference position indicating the position in the Y-axis direction) A coordinate indicated by a distance in the Y-axis direction from the position) may indicate an arbitrary position of the workpiece 200 held on the holding surface 11 of the holding table 10 .

The processing apparatus 1 also includes a cassette mounting table 40 on which a cassette 30 containing a plurality of workpieces 200 before and after cutting is mounted, a cassette elevator 50 for moving the cassette mounting table 40, that is, the cassette 30 in the Z-axis direction, A cleaning unit 60 that cleans the workpiece 200 after cutting, and a transfer unit 70 that loads the workpiece 200 into and out of the cassette 30 and transfers the workpiece 200 between the cassette 30 , the holding table 10 and the cleaning unit 60 .

The cassette 30 includes a cassette body 31 capable of accommodating a plurality of workpieces 200 therein, and legs 32 formed at the lower end of the cassette body 31 . The cassette main body 31 includes a bottom plate 33 which is a flat lower end, a pair of flat plate-like side plates 34 erected from the end of the bottom plate in the X-axis direction, and the ends of the bottom plate 33 and the pair of side plates 34 on the front side in FIG. and a ceiling plate 36 connected to the upper ends of the pair of side plates 34 and the back plate 35 .

In the cassette main body 31, storage racks 38 projecting from the inner surfaces of the pair of side plates 34 facing each other and supporting the annular frame 210 on the upper surface are arranged on the side plates 34 at intervals in the Z-axis direction. The cassette main body 31 supports the annular frame 210 on the storage racks 38 facing each other along the X-axis direction, and stores the work 200 therein. The cassette main body 31 allows the work 200 to be taken in and out through an opening 37 surrounded by the bottom plate 33, the pair of side plates 34, and the ceiling plate 36 on the center back side of FIG.

The cassette 30 has three or more legs 32 . In Embodiment 1, the cassette 30 has three legs 32 . The leg portion 32 is formed to protrude from the lower surface of the bottom plate 33 of the cassette body 31 . As shown in FIG. 2, the leg portion 32 is formed in a straight bar shape. In Embodiment 1, one of the three legs 32 is provided at the center in the X-axis direction of the end of the bottom plate 33 near the opening 37 in the Y-axis direction, and the other two legs 32 are , are arranged at the end of the bottom plate 33 on the side away from the opening 37 in the Y-axis direction with a space therebetween in the X-axis direction.

In Embodiment 1, one leg 32 is arranged such that its longitudinal direction is parallel to the Y-axis direction. The other two legs 32 intersect both the X-axis direction and the Y-axis direction so that the center of the lower surface of the bottom plate 33 is positioned on the extension of the longitudinal direction. The leg portion 32 is formed with a notch 39 including a slanting surface 391 whose cross-sectional area parallel to the horizontal direction increases from top to bottom.

The notch 39 is formed by notching the leg 32 concavely from the lower surface 321 of the leg 32 , and is formed over the entire length of the leg 32 along the longitudinal direction of the leg 32 . The notch 39 is formed of two inclined surfaces 391 parallel to the longitudinal direction of the leg 32 and one flat surface 392 . The inclined surfaces 391 are arranged at intervals in the width direction of the leg portion 32 and are inclined with respect to both the vertical direction and the horizontal direction so as to approach each other toward the upper end. The flat surface 392 is parallel to the lower surface of the bottom plate 33 and continues to the upper ends of the two inclined surfaces 391 . The notch 39 is parallel to the longitudinal direction of the leg 32, so the longitudinal directions are non-parallel to each other.

As shown in FIG. 3 , the cassette mounting table 40 includes an upper surface 51 that is the base of the cassette elevator 50 , a push sensor 41 that is a pressure sensor, standing pins 42 , and a cassette mounting table jig 43 . The push sensor 41 can be retracted from the upper surface 51 and is biased by a spring or the like in a direction of protruding from the upper surface 51 . When the cassette 30 is mounted on the cassette mounting table 40 , the push sensor 41 is pushed downward by the lower surface 321 of the leg portion 32 of the cassette 30 to indicate that the cassette 30 has been mounted on the cassette mounting table 40 . A signal is output towards the control unit 100 .

The standing pin 42 is formed in a columnar shape standing vertically from the upper surface 51 and has a tapered portion 421 at its upper end. When the cassette 30 is mounted on the cassette mounting table 40 , the tip of the standing pin 42 abuts on the flat surface 392 of the notch 39 of the leg portion 32 of the cassette 30 and is positioned between the two inclined surfaces 391 . , the cassette 30 is positioned on the cassette mounting table 40 .

The push sensor 41, the standing pin 42, and the jig 43 for the cassette mounting table are provided in one-to-one correspondence with the leg portion 32, and three of each are provided in the first embodiment. When three or more legs 32 are provided, it is desirable to provide the same number of push sensors 41, standing pins 42, and cassette mounting table jigs 43 as the number of legs 32, respectively. As shown in FIG. 3, one of the push sensor 41, the standing pin 42, and the cassette mounting table jig 43 extends in the X-axis direction at the end of the upper surface 51 near the holding table 10 in the Y-axis direction. is located in the center of The other two are spaced apart in the X-axis direction at the end of the upper surface 51 away from the holding table 10 in the Y-axis direction.

The cassette mounting table jig 43 has a rectangular engaging portion 44 as shown in FIG. The engaging portions 44 are provided in the same number as the leg portions 32, and in Embodiment 1, three are provided, and in the present invention, three or more may be provided.

The engaging portion 44 is formed in a plate shape with a constant thickness, and is fixed to the upper surface 51 with screws 45 or the like. The engaging portion 44 is detachably fixed to the upper surface 51 of the cassette mounting table 40 by screws 45 . One engaging portion 44 is attached to the center in the X-axis direction of the end of the upper surface 51 near the holding table 10 in the Y-axis direction, and the longitudinal direction thereof is arranged parallel to the Y-axis direction. The other two engaging portions 44 are attached to the end of the upper surface 51 in the Y-axis direction away from the holding table 10 with a space in the X-axis direction, and extend the center of the upper surface 51 in the longitudinal extension. positioned.

The engaging portion 44 has a convex portion 46 . In the embodiment, the outer surface of the engaging portion 44 is colored in a color different from the color of the upper surface 51 to facilitate visual recognition of the position of the upper surface of the convex portion 46 . The convex portion 46 protrudes from the widthwise center of the engaging portion 44 on the upper surface of the engaging portion 44 and extends along the longitudinal direction of the engaging portion 44 . The convex portion 46 is formed so that the horizontal cross-sectional area increases from top to bottom, and has an inclined surface 461 along the widening inclined surface 391 of the leg portion 32 of the cassette 30 . The convex portion 46 is formed of two inclined surfaces 461 parallel to the longitudinal direction of the engaging portion 44 and one flat surface 462 .

The slopes 461 are arranged at intervals in the width direction of the engaging portion 44 and are inclined with respect to both the vertical direction and the horizontal direction so as to approach each other toward the upper end. The flat surface 462 is parallel to the upper surface of the engaging portion 44 and continues to the upper ends of the two slopes 461 . Since the convex portions 46 are parallel to the longitudinal direction of the engaging portion 44, their longitudinal directions are non-parallel to each other. In Embodiment 1, the convex portions 46 of the three engaging portions 44, that is, the three convex portions 46 are non-parallel. It suffices if the longitudinal directions are arranged non-parallel to each other.

When the engaging portion 44 is attached to the upper surface 51 , a push sensor insertion hole 47 into which the push sensor 41 is inserted and an erection pin insertion hole 48 into which the erection pin 42 is inserted penetrate. In the first embodiment, the push sensor insertion hole 47 is arranged adjacent to the engaging portion 44 of the convex portion 46 in the width direction. In the first embodiment, the standing pin insertion hole 48 is arranged adjacent to the engaging portion 44 of the convex portion 46 in the longitudinal direction.

The control unit 100 also controls each component of the processing device 1 to cause the processing device 1 to perform processing operations on the workpiece 200 . Note that the control unit 100 includes an arithmetic processing unit having a microprocessor such as a CPU (central processing unit), a storage device having a memory such as ROM (read only memory) or RAM (random access memory), and an input/output unit. A computer having an interface device. The arithmetic processing device of the control unit 100 performs arithmetic processing according to a computer program stored in the storage device, and outputs control signals for controlling the processing device 1 to each of the processing devices 1 through the input/output interface device. Output to a component.

The control unit 100 includes a display unit 110 configured by a liquid crystal display device for displaying the state of the machining operation, an image, etc., an input unit 120 used by the operator when registering machining content information, etc., and a notification for notifying the operator. It is connected to unit 130 . The input unit 120 is configured by a touch panel provided on the display unit 110 . The notification unit 130 emits at least one of sound and light to notify the operator.

(machining operation)
Next, the processing operation of the processing device 1 will be described. FIG. 5 is a perspective view showing a state in which the notch of the leg portion of the cassette shown in FIG. 1 and the convex portion of the cassette mounting table are opposed to each other. 6 is a plan view schematically showing a state in which a cassette is mounted on the cassette mounting table shown in FIG. 1. FIG. FIG. 7 is a cross-sectional view schematically showing leg portions and engaging portions when a cassette is placed on the cassette placing table shown in FIG.

In the processing apparatus 1 configured as described above, the processing conditions are set in the control unit 100 and the cassette 30 containing the workpiece 200 is installed on the cassette mounting table 40 . At this time, as shown in FIG. 5, the notch 39 formed in each leg 32 is opposed to the protrusion 46 of the engaging portion 44 in the Z-axis direction. Then, as shown in FIG. 6, the convex portion 46 is positioned in each notch 39, and as shown in FIG. , and the tips of the standing pins 42 are brought into close contact with the flat surface 392 to position the cassette 30 on the cassette mounting table 40 .

Then, a signal indicating that the cassette 30 has been placed on the cassette placing table 40 is output from all the push sensors 41 to the control unit 100, and the control unit 100 positions the cassette 30 on the cassette placing table 40. Recognize that. Also, if the control unit 100 does not receive a signal from at least one push sensor 41 indicating that the cassette 30 has been placed on the cassette placing table 40, it operates the notification unit 130 to notify the operator.

The processing apparatus 1 starts the processing operation when the control unit 100 receives a processing operation start instruction from an operator or the like. When the processing operation is started, the control unit 100 controls the conveying unit 70 to take out one work 200 from the cassette 30 and attach it to the holding surface 11 of the holding table 10 in the loading/unloading area via the adhesive tape 209 . Place. In the processing operation, the processing apparatus 1 suction-holds the work 200 on the holding surface 11 via the adhesive tape 209 and clamps the annular frame 210 with the clamping section 12 .

In the processing apparatus 1, the control unit 100 rotates the spindle 23 around the axis, the control unit 100 controls the moving unit to move the holding table 10 below the imaging unit, and the imaging unit sucks and holds the holding table 10. Then, the workpiece 200 is imaged and alignment is performed. In the machining operation, the control unit 100 controls the moving unit and the like based on the machining conditions, and moves the cutting blade 21 and the workpiece 200 relative to each other along the planned dividing line 203 while cutting the workpiece 200. The cutting blade 21 is made to cut into the dividing line 203 until it reaches the adhesive tape 209 to perform cutting. The processing apparatus 1 cuts the dividing lines 203 of the work 200 according to the processing conditions to divide the work 200 into individual devices 204 . After cutting all the dividing lines 203 of the workpiece 200, the processing apparatus 1 moves the holding table 10 from the processing area toward the loading/unloading area.

The processing apparatus 1 stops the movement of the holding table 10 in the loading/unloading area, stops the suction holding of the work 200 on the holding table 10, releases the clamping of the clamp section 12, and moves the work 200 to the holding table by the transport unit 70. 10 to the cleaning unit 60 . After washing the work 200 with the washing unit 60 , the processing apparatus 1 carries the cut work 200 into the cassette 30 with the transport unit 70 . After cutting all the workpieces 200 in the cassette 30, the processing apparatus 1 ends the processing operation.

In the cassette mounting table 40 and the cassette mounting table jig 43 according to the first embodiment described above, the convex portion 46 having the inclined surface 461 along the inclined surface 391 of the leg portion 32 provided on the lower surface of the bottom plate 33 of the cassette 30 Prepare. For this reason, the cassette mounting table 40 and the cassette mounting table jig 43 position the cassette 30 as the cassette 30 is lowered, so that even an unskilled worker can correctly mount the cassette 30 . As a result, the cassette mounting table 40 and the cassette mounting table jig 43 have the effect that even an inexperienced operator can mount the cassette 30 at the correct position.

In addition, since the engaging portions 44 of the cassette mounting table 40 and the cassette mounting table jig 43 are colored in a color different from that of the upper surface 51, the operator can easily recognize the position where the cassette 30 should be mounted.

It should be noted that the present invention is not limited to the above embodiments. That is, various modifications can be made without departing from the gist of the present invention. In Embodiment 1, the processing device 1 is a cutting device, but the present invention is not limited to the cutting device, and may be various processing devices such as a grinding device that grinds the workpiece 200, for example. Further, in the present invention, the workpiece 200 is not limited to a wafer, and may be a plate-shaped workpiece such as various package substrates, ceramic substrates, glass substrates, and the like.

Reference Signs List 1 processing device 30 cassette 31 cassette body 32 leg 39 notch 40 cassette mounting table 41 push sensor (pressure sensor)
43 cassette mounting table jig 44 engaging portion 46 convex portion 47 push sensor insertion hole (insertion hole)
51 upper surface (base)
200 workpiece 391 inclined surface 461 inclined surface

Claims (4)

A cassette mounting table on which a cassette is mounted, comprising a cassette body capable of accommodating a plurality of workpieces therein and three or more legs formed at the lower end of the cassette body,
The leg portion of the cassette is formed with a notch including a slanted surface that widens from top to bottom, and the area of the horizontal cross section increases from top to bottom;
The cassette mounting table comprises a base and three or more engaging portions respectively corresponding to the leg portions of the cassette mounted on the base,
the engaging portion has a slanted surface along the sloping surface of the leg portion of the cassette, and has a convex portion whose horizontal cross-sectional area increases from top to bottom;
A cassette mounting table on which the cassette is positioned by arranging the convex portions of at least two of the three or more engaging portions in non-parallel directions. The engaging portion is detachably fixed to the cassette mounting table,
The cassette mounting table has a pressure sensor that is pressed by the legs of the mounted cassette,
2. The cassette mounting table according to claim 1, wherein said engaging portion has an insertion hole adjacent to said protrusion into which said pressure sensor is inserted. 3. The cassette mounting table according to claim 1, wherein the engaging portion is colored in a color different from that of the base to facilitate visual recognition of the position of the projection. an engaging portion fixed to the cassette mounting table;
a projection having an inclined surface along the widening inclined surface of the leg portion of the cassette mounted on the cassette mounting table, and having a horizontal cross-sectional area that increases from top to bottom;
A jig for a cassette mounting table, comprising:

Images