JP2021124483A5 - - Google Patents

Download PDF

Info

Publication number
JP2021124483A5
JP2021124483A5 JP2020020561A JP2020020561A JP2021124483A5 JP 2021124483 A5 JP2021124483 A5 JP 2021124483A5 JP 2020020561 A JP2020020561 A JP 2020020561A JP 2020020561 A JP2020020561 A JP 2020020561A JP 2021124483 A5 JP2021124483 A5 JP 2021124483A5
Authority
JP
Japan
Prior art keywords
light
measurement
beam splitting
guide section
polarizing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2020020561A
Other languages
English (en)
Japanese (ja)
Other versions
JP2021124483A (ja
JP7433954B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2020020561A priority Critical patent/JP7433954B2/ja
Priority claimed from JP2020020561A external-priority patent/JP7433954B2/ja
Priority to US17/160,992 priority patent/US11378386B2/en
Publication of JP2021124483A publication Critical patent/JP2021124483A/ja
Publication of JP2021124483A5 publication Critical patent/JP2021124483A5/ja
Application granted granted Critical
Publication of JP7433954B2 publication Critical patent/JP7433954B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2020020561A 2020-02-10 2020-02-10 レーザ干渉装置 Active JP7433954B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2020020561A JP7433954B2 (ja) 2020-02-10 2020-02-10 レーザ干渉装置
US17/160,992 US11378386B2 (en) 2020-02-10 2021-01-28 Laser interference device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2020020561A JP7433954B2 (ja) 2020-02-10 2020-02-10 レーザ干渉装置

Publications (3)

Publication Number Publication Date
JP2021124483A JP2021124483A (ja) 2021-08-30
JP2021124483A5 true JP2021124483A5 (https=) 2023-02-17
JP7433954B2 JP7433954B2 (ja) 2024-02-20

Family

ID=77177055

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2020020561A Active JP7433954B2 (ja) 2020-02-10 2020-02-10 レーザ干渉装置

Country Status (2)

Country Link
US (1) US11378386B2 (https=)
JP (1) JP7433954B2 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7820154B2 (ja) * 2022-01-06 2026-02-25 株式会社ミツトヨ レーザ干渉装置
CN115752831A (zh) * 2022-11-25 2023-03-07 合肥维信诺科技有限公司 一种应力测量装置

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3471239A (en) * 1966-01-10 1969-10-07 Singer General Precision Interferometric apparatus
JPH08304721A (ja) * 1995-05-10 1996-11-22 Nikon Corp 走査光学装置
DE19815241A1 (de) 1998-04-04 1999-10-07 Heidenhain Gmbh Dr Johannes Positionsmeßeinrichtung
EP1031868B1 (de) * 1999-02-26 2003-05-14 Dr. Johannes Heidenhain GmbH Kompensierter Parallel-Strahlteiler mit zwei Platten sowie Interferometer
JP3400393B2 (ja) 1999-10-13 2003-04-28 株式会社ミツトヨ レーザ干渉装置

Similar Documents

Publication Publication Date Title
KR101812608B1 (ko) 일체형 편광간섭계 및 이를 적용한 스냅샷 분광편광계
JP3689681B2 (ja) 測定装置及びそれを有する装置群
CN104034257B (zh) 一种菲索型准共光路结构的同步相移干涉测量装置及方法
CN110537134A (zh) 增强现实设备及其中所采用的光学系统
JP4455024B2 (ja) 複屈折測定装置
WO2002077617A1 (en) Angle-of-rotation measuring device and angle-of-rotation measuring method
TWI507657B (zh) Displacement sensor
US11199400B2 (en) Optical angle sensor
JP2021124483A5 (https=)
CN108225193A (zh) 衍射光栅外差式二维位移测量系统及方法
JP6558960B2 (ja) レーザ光合成分岐装置及びレーザ測定装置
KR101910084B1 (ko) 평행빔 광학 소자 및 이를 이용한 간섭계
JP2015232562A5 (https=)
JP2018151278A (ja) 計測装置
JP2010032342A (ja) 斜入射干渉計
TW542902B (en) Birefringent beam combiners for polarized beams in interferometers
KR20090049351A (ko) 편광을 이용하는 고효율 레이저 초음파 결함검사 장치 및방법
WO2008010482A1 (fr) Procédé de mesure d'élasticité optique et son dispositif
CN115335179A (zh) 激光功率监测装置和激光功率监测方法
JPH0385514A (ja) 円偏光発生装置
RU2005130289A (ru) Эллипсометр
KR102158520B1 (ko) 분광편광계의 광경로차를 자동으로 조절하는 장치
WO2011083760A1 (ja) 光マイクロホン
JP6169420B2 (ja) 光学干渉計
JP2005233772A (ja) 干渉計