JP2021110030A5 - - Google Patents
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- Publication number
- JP2021110030A5 JP2021110030A5 JP2020135695A JP2020135695A JP2021110030A5 JP 2021110030 A5 JP2021110030 A5 JP 2021110030A5 JP 2020135695 A JP2020135695 A JP 2020135695A JP 2020135695 A JP2020135695 A JP 2020135695A JP 2021110030 A5 JP2021110030 A5 JP 2021110030A5
- Authority
- JP
- Japan
- Prior art keywords
- dichlorosilane
- film forming
- forming method
- containing gas
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- MROCJMGDEKINLD-UHFFFAOYSA-N dichlorosilane Chemical compound Cl[SiH2]Cl MROCJMGDEKINLD-UHFFFAOYSA-N 0.000 claims 1
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020227026933A KR102639411B1 (ko) | 2020-01-15 | 2020-11-30 | 성막 방법, 성막 장치 및 반도체 장치의 제조 방법 |
| PCT/JP2020/044478 WO2021145077A1 (ja) | 2020-01-15 | 2020-11-30 | 成膜方法、成膜装置、および半導体装置の製造方法 |
| US17/758,819 US20230037960A1 (en) | 2020-01-15 | 2020-11-30 | Film forming method, film forming device, and method for manufacturing semiconductor device |
| CN202080092277.5A CN114929933A (zh) | 2020-01-15 | 2020-11-30 | 成膜方法、成膜装置以及半导体装置的制造方法 |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2020004161 | 2020-01-15 | ||
| JP2020004161 | 2020-01-15 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2021110030A JP2021110030A (ja) | 2021-08-02 |
| JP2021110030A5 true JP2021110030A5 (enrdf_load_stackoverflow) | 2023-03-13 |
| JP7668093B2 JP7668093B2 (ja) | 2025-04-24 |
Family
ID=77059218
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2020135695A Active JP7668093B2 (ja) | 2020-01-15 | 2020-08-11 | 成膜方法、成膜装置、および半導体装置の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP7668093B2 (enrdf_load_stackoverflow) |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10144629A (ja) * | 1996-11-11 | 1998-05-29 | Mitsubishi Electric Corp | バリアメタルの製造方法 |
| JP6091273B2 (ja) * | 2013-03-19 | 2017-03-08 | 株式会社日立製作所 | 半導体装置とその製造方法 |
| JP6624998B2 (ja) * | 2016-03-30 | 2019-12-25 | 東京エレクトロン株式会社 | ボロンドープシリコンゲルマニウム膜の形成方法および形成装置 |
| US11401607B2 (en) * | 2017-06-02 | 2022-08-02 | Eugenus, Inc. | TiSiN coating method |
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2020
- 2020-08-11 JP JP2020135695A patent/JP7668093B2/ja active Active