JP2021091042A5 - - Google Patents
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- Publication number
- JP2021091042A5 JP2021091042A5 JP2019223026A JP2019223026A JP2021091042A5 JP 2021091042 A5 JP2021091042 A5 JP 2021091042A5 JP 2019223026 A JP2019223026 A JP 2019223026A JP 2019223026 A JP2019223026 A JP 2019223026A JP 2021091042 A5 JP2021091042 A5 JP 2021091042A5
- Authority
- JP
- Japan
- Prior art keywords
- polishing
- polished
- uneven shape
- direction perpendicular
- stage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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- 238000005498 polishing Methods 0.000 claims 17
- 230000001154 acute effect Effects 0.000 claims 2
- 238000002347 injection Methods 0.000 claims 2
- 239000007924 injection Substances 0.000 claims 2
- 239000002002 slurry Substances 0.000 claims 2
- 239000007788 liquid Substances 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
Claims (6)
被研磨物に作用するための回転可能な研磨工具と、
研磨スラリーを供給するスラリーノズルと、
前記研磨工具を前記被研磨物に押圧するための研磨ステージと、
前記研磨ステージと前記被研磨物との間に液体を噴射する噴射ノズルと、
を備え、
前記研磨ステージの表面には凹凸形状が付与され、
前記凹凸形状は、前記研磨ステージの平面視において、前記凹凸形状の長辺が前記被研磨物の進行方向と垂直な方向に対して０°より大きく９０°より小さい角度を有する、
研磨装置。 A polishing apparatus for continuously polishing a member having an object to be polished formed on the surface of a film-like base material,
a rotatable abrasive tool for acting on an object to be polished;
a slurry nozzle for supplying abrasive slurry;
a polishing stage for pressing the polishing tool against the object to be polished;
an injection nozzle for injecting a liquid between the polishing stage and the object to be polished;
with
The surface of the polishing stage is provided with an uneven shape ,
In the planar view of the polishing stage, the long side of the uneven shape has an angle of greater than 0° and less than 90° with respect to a direction perpendicular to the direction of movement of the object to be polished.
polishing equipment.
請求項１に記載の研磨装置。 The injection nozzle is arranged so that the nozzle is aligned with the recessed portion of the uneven shape.
The polishing apparatus according to claim 1.
請求項１または２に記載の研磨装置。 With respect to a direction perpendicular to the direction of movement of the object to be polished, the size of the acute angle formed by the long side of the uneven shape with the direction perpendicular to the direction of movement of the uneven shape is such that the short side of the uneven shape less than the magnitude of the acute angle made with the direction perpendicular to the direction of travel,
3. A polishing apparatus according to claim 1 or 2 .
請求項１から３のいずれか一項に記載の研磨装置。 Among the long and short sides of the uneven shape, the interval between the sides having a small angle with respect to the direction perpendicular to the direction of movement of the object to be polished is larger than the interval between the other sides.
A polishing apparatus according to any one of claims 1 to 3 .
請求項１から４のいずれか一項に記載の研磨装置。 In the uneven shape, the long side of the uneven shape has a smaller angle with respect to the direction perpendicular to the traveling direction of the object to be polished on the central portion side of the polishing stage than on the end portion side of the polishing stage.
A polishing apparatus according to any one of claims 1 to 4 .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2019223026A JP7457913B2 (en) | 2019-12-10 | 2019-12-10 | Polishing equipment and polishing method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2019223026A JP7457913B2 (en) | 2019-12-10 | 2019-12-10 | Polishing equipment and polishing method |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2021091042A JP2021091042A (en) | 2021-06-17 |
| JP2021091042A5 true JP2021091042A5 (en) | 2022-12-01 |
| JP7457913B2 JP7457913B2 (en) | 2024-03-29 |
Family
ID=76311358
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2019223026A Active JP7457913B2 (en) | 2019-12-10 | 2019-12-10 | Polishing equipment and polishing method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP7457913B2 (en) |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002166342A (en) | 2000-11-30 | 2002-06-11 | Toppan Printing Co Ltd | Lengthy metal sheet polishing device |
| US20100258173A1 (en) | 2009-04-13 | 2010-10-14 | Joseph Laia | Polishing a thin metallic substrate for a solar cell |
-
2019
- 2019-12-10 JP JP2019223026A patent/JP7457913B2/en active Active
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