JP2021070127A - Dresser board top face height measuring method - Google Patents

Abstract

To measure a dress grindstone height of a dresser board and shorten a dress time.SOLUTION: A height of a top face 61a of a dress grindstone 61 is measured by performing the following processes: a holding process in which a dresser board 6 is held on a holding surface 20a by use of carry-in means 5A in such a manner that a center To of the holding surface 20a and a center Go of a dress grindstone 61 are deviated; positioning process in which holding means 2 in the state that the dresser board 6 is held on the holding surface 20a is positioned at a position, where a height of a top face 61a of the dress grindstone 61 of the dresser board 6 can be measured by a top face height gauge 102, by use of positioning means 8 having horizontal moving means 80 and rotating means 81; and a top face height measuring process in which the height of top face 61a of the dress grindstone 61 held on the holding surface 20a is measured by use of the top face height gauge 102.SELECTED DRAWING: Figure 4

Description

The present invention relates to a method for measuring the height of the upper surface of a dresser board.

In the grinding apparatus for grinding the workpiece, the workpiece held on the holding surface of the chuck table is ground using a grinding wheel. If the grinding process is continuously performed, the grinding force of the grinding wheel may decrease. Causes of the decrease in grinding force include, for example, clogging caused by adhesion of grinding debris to the grinding surface of the grinding wheel, and fouling in which the abrasive grains exposed on the grinding surface are flattened.

Therefore, the grinding force of the grinding wheel is restored by grinding the ground surface with a dressing wheel to expose a new grinding surface.
As disclosed in Patent Document 1, the dressing is performed by holding a plate-shaped dresser board on the holding surface and bringing the grinding surface of the grinding wheel into contact with the dressing wheel arranged on the dresser board. The dressing time should be short because the grinding process will be interrupted when the dresser board is held on the holding surface.
In order to shorten the dressing time, it is necessary to measure the height of the upper surface of the dressing wheel of the dresser board and quickly position the grinding wheel at the height at which the grinding surface of the grinding wheel contacts the upper surface of the dressing wheel.

Japanese Unexamined Patent Publication No. 2009-142906

However, since the dress grindstone is arranged only in the center of the base, there is a problem that it cannot be measured by a height gauge that measures the height of the upper surface of the work piece.
Therefore, there is a problem to be solved that the dressing time is shortened by measuring the height of the upper surface of the dressing wheel of the dresser board.

In the present invention, a holding means for holding a work piece on a holding surface and rotating the holding surface around the center of the holding surface, and a work piece held on the holding surface are ground by a grinding surface of a grinding wheel. The height of the upper surface of the grinding means, the positioning means for positioning the holding means at the grinding position for grinding the workpiece held by the holding wheel by the grinding wheel, and the workpiece held on the holding surface is measured. Using a grinding device including a height gauge, the substrate of the dresser board composed of a base having an area covering the holding surface and a dress grindstone formed in the center of the upper surface of the substrate is held on the holding surface of the dress grindstone. A method for measuring the height of the upper surface of a dresser board, which measures the height of the upper surface, wherein the center of the holding surface and the center of the dress grindstone are shifted to hold the dresser board on the holding surface, and the holding step. The holding means for holding the dresser board on the holding surface is placed on the holding surface positioned in the positioning step and the positioning step of positioning the height of the upper surface of the dress grindstone of the dresser board so as to be measurable by the height gauge. It is a method of measuring the top surface height of a dresser board including a top surface height measuring step of measuring the top surface height of the held dress grindstone with the height gauge.
The grinding device has a holding portion for holding the dresser board, a carrying means for carrying the dresser board held by the holding portion onto the holding surface, and a temporary placing table on which the dresser board is temporarily placed. The dressing board is temporarily placed on the temporary table before the holding step, and the holding step prepared for the top surface height measuring method is temporarily placed on the temporary table. It is desirable that the dresser board is held by the holding surface by shifting the center of the holding surface and the center of the dress grindstone by the carrying-in means.

By using the top surface height measuring method of this measuring method, the height of the top surface of the dress grindstone can be measured even for a dress grindstone having a relatively small area. Then, after measuring the height of the upper surface of the dress grindstone, the grinding wheel is rotated around the rotation axis, and the grinding wheel is ground using the grinding feed means based on the measured height of the upper surface of the dress grindstone. The grinding wheel can be dressed by lowering it and bringing the lower surface of the grinding wheel into contact with the upper surface of the dressing wheel.

It is a perspective view which shows the whole grinding apparatus. It is a perspective view which shows the state which holds the dresser board on the holding surface. It is a perspective view which showed the position of the contactor of the top surface height gauge on the dresser board. It is a perspective view which shows the state of measuring the height of a dress grindstone.

1 Processing device The grinding device 1 shown in FIG. 1 is a grinding device that grinds a workpiece W using a grinding wheel 340. Hereinafter, the grinding device 1 will be described.

As shown in FIG. 1, the grinding device 1 includes a base 10 extending in the Y-axis direction and a column 11 erected on the + Y direction side of the base 10.

A holding means 2 is arranged on the base 10. The holding means 2 includes a disc-shaped suction portion 20 and an annular frame body 21 that supports the suction portion 20. A large number of pores are formed in the suction portion 20, and the upper surface of the suction portion 20 is a holding surface 20a on which the workpiece W is held. The holding surface 20a and the upper surface 21a of the frame 21 are flush with each other.

A suction source 26 is connected to the holding surface 20a. When the work piece W is placed on the holding surface 20a and the suction source 26 is used to exert the suction force, the generated suction force is transmitted to the holding surface 20a through the large number of pores described above. The work piece W is sucked and held on the holding surface 20a.

The grinding device 1 includes a positioning means 8. The positioning means 8 has a function of positioning the holding means 2 at a grinding position where the workpiece W held on the holding surface 20a is ground by the grinding wheel 340. The positioning means 8 includes a horizontal moving means 80 and a rotating means 81.

Inside the base 10, a horizontal moving means 80 for horizontally moving the holding means 2 in the Y-axis direction is arranged. For example, the holding means 2 is positioned below the grinding means 3 by horizontally moving the holding means 2 in the Y-axis direction using the horizontal moving means 80 while the workpiece W is held by the holding means 2. be able to.

A rotating means 81 is connected to the holding means 2. The rotating means 81 includes a motor 810 and an encoder 811 that controls the amount of rotation of the motor 810. The holding means 2 can be rotated by an appropriate angle using the motor 810 based on the electric signal output from the encoder 811.
By horizontally moving and rotating the holding means 2 by using the horizontal moving means 80 and the rotating means 81, the holding means 2 can be positioned at the grinding position.

Further, a cover 27 and a bellows 28 stretchably connected to the cover 27 are arranged around the holding means 2. For example, when the holding means 2 is driven by the horizontal moving means 80 and moves in the Y-axis direction, the cover 27 moves in the Y-axis direction together with the holding means 2, and the bellows 28 expands and contracts.

On the side surface of the column 11 on the −Y direction side, a grinding feed means 4 that supports the grinding means 3 so as to be able to move up and down is arranged. The grinding means 3 includes a spindle 30 having a rotating shaft 35 in the Z-axis direction, a housing 31 that rotatably supports the spindle 30, a spindle motor 32 that rotationally drives the spindle 30 around the rotating shaft 35, and a spindle 30. An annular mount 33 connected to the lower end of the mount 33 and a grinding wheel 34 detachably attached to the lower surface of the mount 33 are provided.
The grinding wheel 34 includes a wheel base 341 and a plurality of substantially rectangular grinding wheels 340 arranged in an annular shape on the lower surface of the wheel base 341, and the lower surface of the grinding wheel 340 grinds the workpiece W. The grinding surface is 340a.

The grinding feed means 4 rotates a ball screw 40 having a rotation shaft 45 in the Z-axis direction, a pair of guide rails 41 arranged parallel to the ball screw 40, and a ball screw 40 around the rotation shaft 45. It includes a shaft motor 42, an elevating plate 43 in which an internal nut is screwed into a ball screw 40 and a side portion is in sliding contact with a guide rail 41, and a holder 44 which is connected to the elevating plate 43 and supports the grinding means 3.

When the ball screw 40 is driven by the Z-axis motor 42 and the ball screw 40 rotates about the rotation shaft 45, the elevating plate 43 moves up and down in the Z-axis direction while being guided by the guide rail 41. The grinding means 3 held in the holder 44 moves in the Z-axis direction.

For example, a thickness measuring means 100 is arranged on the base 10. The thickness measuring means 100 includes, for example, a housing 103 arranged on the −X direction side of the base 10 of the grinding device 1. A holding surface height gauge 101 and an upper surface height gauge 102 are arranged on the side surface of the housing 103.
The holding surface height gauge 101 includes a first contactor 101a. By bringing the first contactor 101a of the holding surface height gauge 101 into contact with the upper surface 21a of the frame body 21, the height of the holding surface 20a of the suction portion 20 flush with the upper surface 21a of the frame body 21 can be measured. it can.
The upper surface height gauge 102 includes a second contact 102a. For example, the height of the upper surface Wa of the workpiece W is increased by bringing the second contact 102a of the upper surface height gauge 102 into contact with the upper surface Wa of the workpiece W while the workpiece W is held on the holding surface 20a. Can be measured.

A water supply nozzle 90 is arranged in the vicinity of the thickness measuring means 100. The water supply nozzle 90 is connected to the water source 9. The water supply nozzle 90 can inject the water supplied from the water source 9 toward the holding surface 20a of the holding means 2.

A cassette mounting portion 12 is provided on the −Y direction side of the base 10.
A cassette 70 is mounted on the cassette mounting portion 12. The cassette 70 contains the workpiece W before grinding. Further, the cassette 70 can accommodate the workpiece W or the like after the grinding process.

A robot 71 is arranged on the + Y direction side of the cassette 70. The robot 71 includes a robot hand 710 and a shaft portion 711 that rotatably supports the robot hand 710. The workpiece W housed in the cassette 70 can be taken out from the cassette 70 by using the robot hand 710, and the workpiece W can be conveyed by turning the robot hand 710 around the shaft portion 711.

A temporary placement table 13 on which the workpiece W before grinding is temporarily placed is arranged on the + X direction side in the movable range of the robot hand 710, and on the −X direction side in the movable range of the robot hand 710. A cleaning region 14 for cleaning the workpiece W after grinding is provided.

Alignment means 72 is provided on the temporary table 13. The workpiece W that has been carried out from the cassette 70 and placed on the temporary table 13 is aligned at a predetermined position by the alignment means 72.

A spinner cleaning means 73 is provided in the cleaning region 14. The spinner cleaning means 73 includes a spinner table 730 that holds the workpiece W and rotates, and a cleaning water supply nozzle 731 that ejects cleaning water toward the workpiece W held by the spinner table 730. ..
For example, the workpiece W after grinding can be placed on the spinner table 730, and the workpiece W can be cleaned by supplying cleaning water from the cleaning water supply nozzle 731.

A carry-in means 5A is arranged at a position adjacent to the temporary storage table 13. The carry-in means 5A has a function of holding the workpiece W or the like aligned on the temporary storage table 13 and carrying it onto the holding surface 20a of the holding means 2.
The carry-in means 5A includes an arm 51 that vertically suspends the ring-shaped first holding portion 50 and the first holding portion 50.
A circular opening 500 is formed in the center of the first holding portion 50. The lower surface 50b of the first holding portion 50 is a suction surface that sucks and holds the upper surface Wa of the workpiece W.

A shaft portion 510 having a rotation shaft 55 in the Z-axis direction is connected to the end portion of the arm 51. For example, a rotating means (not shown) for rotating the shaft portion 510 around the rotating shaft 55 is connected to the shaft portion 510.

An annular member 52 is connected to the end of the arm 51 on the side not connected to the shaft portion 510. For example, three through holes 520 are formed through the annular member 52 at equal intervals on the circumference.

The carry-in means 5A includes a number (for example, three) of bolts 53 corresponding to the number of through holes 520 of the annular member 52. The bolt 53 is loosely fitted through the through hole 520, and the lower portion of the bolt 53 is connected to the upper surface 50a of the first holding portion 50. The bolt 53 is, for example, a stripper bolt or the like, and a thread cutting (not shown) formed in the lower part of the bolt 53 is screwed into a screw hole (not shown) formed in the upper surface 50a of the first holding portion 50. 1 It is assumed that it is fastened to the holding portion 50.
Further, the brim portion provided on the upper portion of the first holding portion 50 is formed to have a diameter larger than that of the through hole 520, and limits the lowering range of the bolt 53. For example, when the lower surface 50b of the first holding portion 50 receives a pressing force in the + Z direction from the workpiece W or the like when the workpiece W or the like is held by the first holding portion 50, the first holding portion 50 and the bolt 53 Can rise by a certain distance with respect to the annular member 52.

The carry-out means 5B is arranged on the −X direction side of the carry-in means 5A. The unloading means 5B has a function of unloading the workpiece W after grinding from the holding means 2.
The carry-out means 5B includes a disc-shaped second holding portion 57 in place of the ring-shaped first holding portion 50 provided in the carry-in means 5A. A threaded bolt 53 is screwed into a screw hole (not shown) formed on the upper surface 57a of the second holding portion 57, and the second holding portion 57 is connected to the bolt 53. The lower surface 57b of the second holding portion 57 is a suction surface that sucks and holds the upper surface Wa of the workpiece W.
Since the other configurations of the carry-out means 5B are the same as those of the carry-in means 5A, the same reference numerals are given and the description thereof will be omitted.

For example, a dresser board 6 is housed inside the cassette 70. The dresser board 6 includes a disc-shaped substrate 60 having upper and lower surfaces having an area covering the holding surface 20a, and a circular dress grindstone 61 formed in the center of the upper surface 60a of the substrate 60. The dress grindstone 61 is formed to have a smaller diameter than the substrate 60.
The grinding wheel 340 can be dressed by bringing the rotating grinding wheel 340 into contact with the upper surface 61a of the dressing wheel 61 of the dresser board 6.

When grinding the workpiece W, first, a robot 71 is used to take out one workpiece W from the cassette 70 and temporarily place it on the temporary storage table 13.

Then, after the alignment is performed using the alignment means 72, the lower surface 50b of the first holding portion 50 is brought into contact with the workpiece W temporarily placed on the temporary placement table 13, and suction is performed by a suction means (not shown) or the like. The force is transmitted to the lower surface 50b of the first holding portion 50. As a result, the workpiece W is held by the first holding portion 50.

While the workpiece W is held by the first holding portion 50, the shaft portion 510 is rotated around the rotating shaft 55 to rotate the arm 51, so that the arm 51 is positioned in advance in the movable range of the arm 51. The workpiece W is placed on the holding surface 20a of the holding means 2. After that, the suction source 26 is operated to transmit the generated suction force to the holding surface 20a to suck and hold the workpiece W on the holding surface 20a.

Next, the holding means 2 is moved in the + Y direction by using the horizontal moving means 80, and is positioned below the grinding means 3. After the holding means 2 holding the workpiece W is positioned below the grinding means 3, the spindle motor 32 is used to rotate the grinding wheel 340 around the rotating shaft 35, and a motor (not shown) or the like is used. The workpiece W held on the holding means 2 and the holding surface 20a of the holding means 2 is rotated at high speed around the rotating shaft 85. While the grinding wheel 340 and the workpiece W are rotating, the grinding means 3 is lowered by using the grinding feed means 4, and the grinding surface 340a of the grinding wheel 340 is brought into contact with the upper surface Wa of the workpiece W. Therefore, the workpiece W can be ground.

2 Top surface height measurement method (temporary placement process)
A method of measuring the height of the upper surface 61a of the dress grindstone 61 of the dresser board 6 will be described using the above-mentioned grinding device 1. First, the dresser board 6 is pulled out from the cassette 70 using the robot 71 shown in FIG. 1 and temporarily placed on the temporary storage table 13.

(Holding process)
Next, the alignment means 72 is used to align the dresser board 6 temporarily placed on the temporary placement table 13.
After that, the dresser board 6 is brought into contact with the lower surface 50b of the first holding portion 50 of the carrying-in means 5A. At this time, by aligning the center of the ring of the first holding portion 50 with the center of the upper surface 61a of the dress grindstone 61 and bringing the substrate 60 into contact with the lower surface 50b of the first holding portion 50, the first holding portion 50 The dress grindstone 61 protrudes from the opening 500.

The first holding is performed by transmitting the suction force to the lower surface 50b of the first holding portion 50 by using a suction means (not shown) or the like in a state where the upper surface 60a of the substrate 60 is in contact with the lower surface 50b of the first holding portion 50. The dresser board 6 is sucked and held in the portion 50.
Here, the holding means 2 is moved in the −Y direction in advance by using the horizontal moving means 80, and the holding means 2 is positioned in the range of motion of the arm 51 of the carrying-in means 5A.
Then, the arm 51 is swiveled around the shaft portion 510 so that the dresser board 6 is displaced from the center To of the holding surface 20a of the holding means 2 and the center Go of the upper surface 61a of the dress grindstone 61. It is placed on the holding surface 20a.

Then, with the dresser board 6 mounted on the holding surface 20a, the suction source 26 is operated to transmit the suction force generated to the holding surface 20a. As a result, the dresser board 6 is held on the holding surface 20a.

(Positioning process)
Next, the holding means 2 in which the dresser board 6 is held on the holding surface 20a is moved in the + Y direction by using the horizontal moving means 80, and the upper surface of the substrate 60 is positioned below the height gauge 102 as shown in FIG. ..
At this time, as shown in FIGS. 2 and 3, the horizontal position of the second contact 102a of the upper surface height gauge 102 is positioned at the point P separated from the center Go of the upper surface 61a of the dress grindstone 61 by a distance R. However, the distance R from the center Go of the upper surface 61a of the dress grindstone 61 to the point P is larger than the diameter D of the upper surface 61a of the dress grindstone 61.

After that, the water supply nozzle 90 and the like are controlled to inject the water L supplied from the water source 9 from the water supply nozzle 90 toward the holding surface 20a of the holding means 2. Then, the water L comes into contact with the exposed portion of the holding surface 20a that is not in contact with the lower surface 60b of the substrate 60, and enters the inside of a large number of pores of the holding surface 20a. As a result, a water film (water seal) is formed on the holding surface 20a, and a vacuum leak of the holding surface 20a is prevented.

Next, the dresser board 6 is rotated and controlled by using the motor 810 based on the signal output from the encoder 811 of the rotating means 81, and the dresser board 6 is rotated by a predetermined rotation angle about the rotation shaft 85. As a result, as shown in FIG. 4, the holding means 2 is positioned at a position where the second contact 102a of the upper surface height gauge 102 contacts the upper surface 61a of the dress grindstone 61.
In this way, the height of the upper surface 61a of the dress grindstone 61 of the dresser board 6 can be measured by the upper surface height gauge 102 by the horizontal movement in the + Y direction using the horizontal moving means 80 and the rotational movement using the rotating means 81. The holding means 2 is positioned at such a position.

(Top surface height measurement process)
As described above, the dresser board 6 is held by the holding means 2, the holding means 2 is positioned at a position where the height of the upper surface 61a of the dress grindstone 61 can be measured using the upper surface height gauge 102, and then the upper surface height gauge 102 is placed on the dress grindstone. The height of the upper surface 61a of the dress grindstone 61 is measured by contacting the upper surface 61a of the dress grindstone 61.

By using the upper surface height measuring method of this measuring method, the height of the upper surface 61a of the dress grindstone 61 can be measured even for the dress grindstone 61 having a relatively small area.
Then, after measuring the height of the upper surface 61a of the dress grindstone 61, the grinding wheel 340 is rotated around the rotation shaft 35, and the grinding feed means is based on the measured height of the upper surface 61a of the dress grindstone 61. The grinding wheel 340 can be dressed by lowering the grinding wheel 340 using No. 4 and bringing the lower surface of the grinding wheel 340 into contact with the upper surface 61a of the dressing wheel 61.

Further, for example, the height of the upper surface 61a as the limit height at which the dressing wheel 61 can be used is determined in advance, and this measurement is performed every time the grinding wheel 340 is dressed (or every time the dressing wheel 61 is dressed a predetermined number of times). By measuring the height of the upper surface 61a of the dressing wheel 61 using the method, the dress is worn when the dress of the grinding wheel 340 is worn and the height of the upper surface 61a of the dressing wheel 61 reaches the limit height. It can be known that the usage limit of the grindstone 61 has been reached.

The first holding portion 50 provided in the carrying-in means 5A may be a small-diameter disc-shaped suction pad. When the dresser board 6 is held by using the first holding portion 50, a position away from the center of the substrate 60 is attracted to the first holding portion 50. As a result, the center of the upper surface 61a of the dress grindstone 61 of the dresser board 6 held by the first holding portion 50 and the center of the first holding portion 50 deviate from each other. It is not necessary to adjust the positional relationship between the center To of the holding surface 20a of the holding means 2 and the center of the first holding portion 50, and the mounting can be performed quickly. As a result, the time required for dressing the grinding wheel 340 can be further shortened.

1: Grinding device 10: Base 11: Column 12: Cassette mounting part 13: Temporary placing table 14: Cleaning area 2: Holding means 20: Suction part 20a: Holding surface 21: Frame body 21a: Top surface of frame body 26: Suction Source 27: Cover 28: Bellows 3: Grinding means 30: Spindle 31: Housing 32: Spindle motor 33: Mount 34: Grinding wheel 340: Grinding grind 340a: Bottom surface of grinding grind 341: Wheel base 35: Rotating shaft 4: Grinding Feeding means 40: Ball screw 41: Guide rail 42: Z-axis motor 43: Lifting plate 44: Holder 45: Rotating shaft 5A: Carrying means 50: First holding part 50a: Top surface 50b: Bottom surface 500: Opening 51: Arm 510: Shaft Part 52: Circular member 520: Through hole 53: Bolt 55: Rotating shaft 57: Second holding part 57a: Upper surface 57b: Lower surface
6: Dresser board 60: Substrate 60a: Top surface of substrate 61: Dress grindstone 61a: Top surface of dress grindstone 70: Cassette 71: Robot 710: Robot hand 711: Shaft 72: Alignment means 73: Spinner cleaning means 730: Spinner table 731: Washing water supply nozzle 8: Positioning means 80: Horizontal moving means 81: Rotating means 810: Motor 811: Encoder 85: Rotating shaft 9: Water source 90 :: Water supply nozzle 100: Thickness measuring means 101: Holding surface height gauge 101a: 1st contact 102: Top height gauge 102a: 2nd contact 103: Housing W: Work piece Wa: Top surface of work piece D: Diameter R: Distance Go: Center of top surface of dress grindstone To: Center of holding surface P: Position of the first contact of the top height gauge

Claims (2)

A holding means for holding a work piece on a holding surface and rotating the holding surface around the center of the holding surface, and a grinding means for grinding the work piece held on the holding surface by a grinding surface of a grinding wheel. A positioning means for positioning the holding means at a grinding position for grinding the workpiece held by the holding grindstone and a height gauge for measuring the height of the upper surface of the workpiece held on the holding surface. Using a grinding device provided, the substrate of the dresser board composed of a substrate having an area covering the holding surface and a dress grindstone formed in the center of the upper surface of the substrate is held on the holding surface, and the height of the upper surface of the dress grindstone is adjusted. It is a method of measuring the height of the top surface of the dresser board to be measured.
A holding step of shifting the center of the holding surface and the center of the dress grindstone to hold the dresser board on the holding surface, and
In the holding step, the holding means for holding the dresser board on the holding surface is positioned so that the height of the upper surface of the dress grindstone of the dresser board can be measured by the height gauge.
The top surface height measuring step of measuring the top surface height of the dress grindstone held on the holding surface positioned in the positioning step with the height gauge,
A method of measuring the height of the top surface of a dresser board. The grinding device includes a carrying-in means having a holding portion for holding the dresser board and carrying the dresser board held by the holding portion onto the holding surface, and a temporary placing table on which the dresser board is temporarily placed. ,
A temporary placement step of temporarily placing the dresser board on the temporary placement table is provided before the holding step.
In the holding step, the dresser board temporarily placed on the temporary storage table is displaced by the carrying-in means from the center of the holding surface and the center of the dress grindstone to hold the dresser board on the holding surface.
The method for measuring the height of the upper surface of the dresser board according to claim 1.

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