JP2021067586A - Visual inspection device - Google Patents

Visual inspection device Download PDF

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JP2021067586A
JP2021067586A JP2019194016A JP2019194016A JP2021067586A JP 2021067586 A JP2021067586 A JP 2021067586A JP 2019194016 A JP2019194016 A JP 2019194016A JP 2019194016 A JP2019194016 A JP 2019194016A JP 2021067586 A JP2021067586 A JP 2021067586A
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visual inspection
inspected
movable body
work
inspection apparatus
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秀章 上條
Hideaki Kamijo
秀章 上條
孝 藤澤
Takashi Fujisawa
孝 藤澤
吉村　俊哉
Toshiya Yoshimura
俊哉 吉村
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Nidec Instruments Corp
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Nidec Sankyo Corp
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Priority to JP2019194016A priority Critical patent/JP2021067586A/en
Priority to CN202011144954.1A priority patent/CN112710672A/en
Publication of JP2021067586A publication Critical patent/JP2021067586A/en
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/8901—Optical details; Scanning details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/8914—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the material examined
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/8901—Optical details; Scanning details
    • G01N2021/8908—Strip illuminator, e.g. light tube

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  • Textile Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Manipulator (AREA)

Abstract

To provide a visual inspection device that can inspect properly an inspection surface of a work with a curved surface part at high magnification.SOLUTION: A visual inspection device 1 inspects the visual aspect by imaging an inspection surface 11 including a curved surface part 112 of a work 10. The visual inspection device 1 includes an imaging device 20 for imaging the inspection surface 11, a mobile body 80 including the imaging device 20, a guide unit 40 forming a guide mechanism 90 guiding the mobile body 80 along the shape of the inspection surface 11 in contact with a contact part 81 of the mobile body 80, and a robot arm 50 moving the mobile body 80 along the shape of the inspection surface 11. The visual inspection device 1 includes a dumper device 60 connected to both the robot arm 50 side and the mobile body 80 side. The dumper device 60 presses the contact part 81 of the mobile body 80 on the guide unit 40 with elasticity.SELECTED DRAWING: Figure 1

Description

本発明は、曲面部を有するワークの被検査面を検査する外観検査装置に関する。 The present invention relates to an appearance inspection device that inspects a surface to be inspected of a work having a curved surface portion.

ロボットアームに撮像装置を取り付け、この撮像装置で、曲面部を有するワークの被検査面を検査する外観検査装置が提案されている（特許文献１参照）。特許文献１の外観検査装置は、ワークの被検査面を撮影する撮像装置と、撮像装置をワークの曲面部に沿って移動させるロボットアームと、撮像装置が撮影した画像を読み込むことでワーク被検査面の傷等を検出するとともにロボットアームを制御する制御部とを備える。上記外観検査装置であれば、ロボットアームによって、ワークの被検査面の法線方向から、撮像装置で被検査面を撮影するとともに、撮像装置をワークの曲面部に沿って移動させることができるので、曲面部を有するワークの被検査面を検査することが可能となる。 A visual inspection device has been proposed in which an image pickup device is attached to a robot arm and the surface to be inspected of a workpiece having a curved surface portion is inspected with this image pickup device (see Patent Document 1). The appearance inspection device of Patent Document 1 includes an image pickup device that captures an image of the surface to be inspected of the work, a robot arm that moves the image pickup device along a curved surface portion of the work, and a work inspection device by reading an image taken by the image pickup device. It is equipped with a control unit that detects scratches on the surface and controls the robot arm. With the above-mentioned visual inspection device, the robot arm can take an image of the surface to be inspected by the imaging device from the normal direction of the surface to be inspected of the work, and the imaging device can be moved along the curved surface portion of the work. , It becomes possible to inspect the surface to be inspected of the work having the curved surface portion.

特開２００８−４６１０３号公報Japanese Unexamined Patent Publication No. 2008-46103

上記外観検査装置において、ワークの被検査面を高倍率（高精度）で検査するためには、撮像装置で用いられるレンズを高倍率なレンズにする必要がある。この場合、レンズは、被写界深度が浅くなり、例えば、０．７μｍ／ｄｏｔの分解能を有するレンズの場合、被写界深度は３０μｍ程度となる。一方、撮像装置を取り付けたロボットアームは、サーボ制御されている影響により１００〜３００μｍ程度の振動量で振動している。このような場合、撮像装置の被写界深度より、ロボットアームの振動量の方が大きいため、ワークの被検査面で安定してピントが合わず、ワークの被検査面を高精度に検査することができないという問題がある。 In the above-mentioned visual inspection device, in order to inspect the surface to be inspected of the work with high magnification (high accuracy), it is necessary to use a high-magnification lens for the lens used in the imaging device. In this case, the depth of field of the lens becomes shallow. For example, in the case of a lens having a resolution of 0.7 μm / dot, the depth of field is about 30 μm. On the other hand, the robot arm to which the image pickup device is attached vibrates with a vibration amount of about 100 to 300 μm due to the influence of servo control. In such a case, since the vibration amount of the robot arm is larger than the depth of field of the imaging device, the surface to be inspected of the work is not stably in focus, and the surface to be inspected of the work is inspected with high accuracy. There is a problem that it cannot be done.

以上の問題に鑑みて、本願発明の課題は、曲面部を有するワークの被検査面を高い倍率で適正に検査することができる外観検査装置を提供することにある。 In view of the above problems, an object of the present invention is to provide an appearance inspection apparatus capable of appropriately inspecting the surface to be inspected of a work having a curved surface portion at a high magnification.

上記課題を解決するために、本発明は、ワークの曲面部を含む被検査面の外観を検査する外観検査装置において、前記被検査面を撮像するための撮像装置と、前記撮像装置および前記ワークのうちの一方を含む可動体と、前記可動体の被当接部に当接し、前記可動体を前記被検査面の形状に沿うように案内するガイド機構を構成するガイド部と、前記可動体を前記被検査面の形状に沿うように移動させるロボットアームと、前記ロボットアームの側および前記可動体の側の双方に接続され、前記被当接部を前記ガイド部に弾性をもって押し付けるダンパ装置と、を備えることを特徴とする。 In order to solve the above problems, the present invention relates to an image pickup device for inspecting the appearance of a surface to be inspected including a curved surface portion of the work, an image pickup device for imaging the surface to be inspected, the image pickup device, and the work. A movable body including one of the two, a guide portion constituting a guide mechanism that abuts on the contacted portion of the movable body and guides the movable body along the shape of the surface to be inspected, and the movable body. A robot arm that moves the device along the shape of the surface to be inspected, and a damper device that is connected to both the robot arm side and the movable body side and elastically presses the contacted portion against the guide portion. , It is characterized in that.

本発明において、ロボットアームは、撮像装置およびワークのうちの一方を含む可動体を、ワークの被検査面の形状に沿って移動させるため、撮像装置は、ワークの曲面部を含む被検査面に対して適正な位置でワークの被検査面を撮像することができる。また、ロボットアームの側およびホルダの側の双方にダンパ装置が接続されており、ダンパ装置は、可動体の被当接部をガイド部に弾性をもって押し付ける。従って、サーボ制御による振動がロボットアームに発生した場合でも、撮像装置の振動を抑制することができる。それ故、撮像装置に高倍率なレンズを用いたために被写界深度が浅くなったとしても、ワークの
被検査面が撮像装置の被写界深度内に位置する。それ故、曲面部を有するワークの被検査面を高い倍率で適正に撮像し、検査することができる。 In the present invention, the robot arm moves a movable body including one of the image pickup device and the work along the shape of the surface to be inspected of the work, so that the image pickup device is moved to the surface to be inspected including the curved surface portion of the work. On the other hand, the surface to be inspected of the work can be imaged at an appropriate position. Further, a damper device is connected to both the robot arm side and the holder side, and the damper device elastically presses the contacted portion of the movable body against the guide portion. Therefore, even when the vibration due to the servo control is generated in the robot arm, the vibration of the image pickup apparatus can be suppressed. Therefore, even if the depth of field becomes shallow due to the use of a high-magnification lens in the image pickup apparatus, the surface to be inspected of the work is located within the depth of field of the image pickup apparatus. Therefore, the surface to be inspected of the work having the curved surface portion can be appropriately imaged and inspected at a high magnification.

本発明において、前記ロボットアームは、前記ロボットアームは、前記撮像装置の中心光軸と、前記被検査面のうち、前記撮像装置の中心光軸と重なる位置における法線方向との相対位置関係が一定となるように前記可動体の姿勢を調整する態様を採用することができる。例えば、前記ロボットアームは、前記撮像装置の中心光軸と、前記被検査面のうち、前記撮像装置の中心光軸と重なる位置における法線方向とが一致するように前記可動体の姿勢を調整する態様を採用することができる。なお、撮像装置の中心光軸と被検査面の法線方向との相対位置関係とは、中心光軸と法線方向とが成す角度を意味する。 In the present invention, the robot arm has a relative positional relationship between the central optical axis of the imaging device and the normal direction at a position of the surface to be inspected that overlaps the central optical axis of the imaging device. A mode in which the posture of the movable body is adjusted so as to be constant can be adopted. For example, the robot arm adjusts the posture of the movable body so that the central optical axis of the imaging device and the normal direction of the surface to be inspected at a position overlapping the central optical axis of the imaging device coincide with each other. It is possible to adopt the embodiment of the above. The relative positional relationship between the central optical axis of the image pickup apparatus and the normal direction of the surface to be inspected means the angle formed by the central optical axis and the normal direction.

本発明において、前記ガイド部は、前記被検査面の断面形状と同一のガイド面を構成している態様を採用することができる。 In the present invention, the guide portion can adopt an aspect in which the guide surface has the same cross-sectional shape as the surface to be inspected.

本発明において、前記ガイド部は、前記ワークと同一形状を有する部材である態様を採用することができる。 In the present invention, the guide portion can adopt an embodiment in which the member has the same shape as the work.

本発明において、前記ガイド部は、前記ワークの一部の領域である態様を採用してもよい。 In the present invention, the guide portion may adopt an aspect that is a part region of the work.

本発明において、前記曲面部の断面形状が放物線であり、前記ガイド部は、離間する２箇所で固定されて前記２箇所の間で放物線状に撓んだ線状部材を含む態様を採用することができる。 In the present invention, the cross-sectional shape of the curved surface portion is a parabola, and the guide portion includes an embodiment in which a linear member is fixed at two separated locations and bent in a parabolic shape between the two locations. Can be done.

本発明において、前記被当接部が前記被検査面の断面形状と同一のガイド面を構成している態様を採用することができる。 In the present invention, it is possible to adopt an embodiment in which the contacted portion constitutes a guide surface having the same cross-sectional shape as the surface to be inspected.

本発明において、前記可動体が前記撮像装置を含む態様を採用することができる。この場合、前記可動体は、照明装置を含み、前記ロボットアームは、前記照明装置の中心光軸と、前記被検査面のうち、前記照明装置の中心光軸と重なる位置における法線方向との相対位置関係が一定となるように前記可動体の姿勢を調整する態様を採用することができる。なお、照明装置の中心光軸と被検査面の法線方向との相対位置関係とは、中心光軸と法線方向とが成す角度を意味する。 In the present invention, an embodiment in which the movable body includes the image pickup device can be adopted. In this case, the movable body includes a lighting device, and the robot arm has a normal direction of the central optical axis of the lighting device and a position of the surface to be inspected that overlaps the central optical axis of the lighting device. An embodiment in which the posture of the movable body is adjusted so that the relative positional relationship is constant can be adopted. The relative positional relationship between the central optical axis of the lighting device and the normal direction of the surface to be inspected means the angle formed by the central optical axis and the normal direction.

本発明において、前記可動体が前記ワークを含む態様を採用してもよい。 In the present invention, the mode in which the movable body includes the work may be adopted.

本発明において、前記撮像装置は、ラインセンサカメラまたはエリアセンサカメラである態様を採用することができる。 In the present invention, the image pickup apparatus can adopt an aspect of being a line sensor camera or an area sensor camera.

本発明において、前記ロボットアームは、６軸ロボットアームである態様を採用することができる。 In the present invention, the robot arm can adopt an aspect of being a 6-axis robot arm.

本発明において、ロボットアームは、撮像装置およびワークのうちの一方を含む可動体を、ワークの被検査面の形状に沿って移動させるため、撮像装置は、ワークの曲面部を含む被検査面に対して適正な位置でワークの被検査面を撮像することができる。また、ロボットアームの側およびホルダの側の双方にダンパ装置が接続されており、ダンパ装置は、可動体の被当接部をガイド部に弾性をもって押し付ける。従って、サーボ制御による振動がロボットアームに発生した場合でも、撮像装置の振動を抑制することができる。それ故、撮像装置に高倍率なレンズを用いたため、被写界深度が浅くなったとしても、ワークの
被検査面が撮像装置の被写界深度内に位置する。それ故、曲面部を有するワークの被検査面を高い倍率で適正に撮像し、検査することができる。 In the present invention, the robot arm moves a movable body including one of the image pickup device and the work along the shape of the surface to be inspected of the work, so that the image pickup device is moved to the surface to be inspected including the curved surface portion of the work. On the other hand, the surface to be inspected of the work can be imaged at an appropriate position. Further, a damper device is connected to both the robot arm side and the holder side, and the damper device elastically presses the contacted portion of the movable body against the guide portion. Therefore, even when the vibration due to the servo control is generated in the robot arm, the vibration of the image pickup apparatus can be suppressed. Therefore, since a high-magnification lens is used for the image pickup apparatus, the surface to be inspected of the work is located within the depth of field of the image pickup apparatus even if the depth of field becomes shallow. Therefore, the surface to be inspected of the work having the curved surface portion can be appropriately imaged and inspected at a high magnification.

本発明の実施形態１に係る外観検査装置の構成を模式的に示す説明図。The explanatory view which shows typically the structure of the appearance inspection apparatus which concerns on Embodiment 1 of this invention. 図１に示す外観検査装置に用いたロボットアームの説明図。The explanatory view of the robot arm used for the visual inspection apparatus shown in FIG. 図１に示す外観検査装置において、曲面部等を撮像する様子を示す説明図。An explanatory view showing a state of imaging a curved surface portion and the like in the visual inspection apparatus shown in FIG. 本発明の実施形態２に係る外観検査装置の構成を模式的に示す説明図。The explanatory view which shows typically the structure of the appearance inspection apparatus which concerns on Embodiment 2 of this invention. 図４に示す外観検査装置において、曲面部等を撮像する様子を示す説明図。An explanatory view showing a state of imaging a curved surface portion and the like in the visual inspection apparatus shown in FIG. 本発明の実施形態３に係る外観検査装置の構成を模式的に示す説明図。The explanatory view which shows typically the structure of the appearance inspection apparatus which concerns on Embodiment 3 of this invention. 本発明の実施形態４に係る外観検査装置の説明図。The explanatory view of the appearance inspection apparatus which concerns on Embodiment 4 of this invention.

図面を参照しながら、本発明の実施形態に係る外観検査装置を説明する。なお、以下の説明において。互いに直交する３方向をＸ軸方向、Ｙ軸方向、およびＺ軸方向として説明する。また、Ｘ軸方向の一方側にＸ１を付し、Ｘ軸方向の他方側にＸ２に付し、Ｙ軸方向の一方側にＹ１を付し、Ｙ軸方向の他方側にＹ２に付し、Ｚ軸方向の一方側にＺ１を付し、Ｚ軸方向の他方側にＺ２に付して説明する。また、被検査面１１に対する法線が延在する方向を法線方向Ｌｖとして図示してある。 The visual inspection apparatus according to the embodiment of the present invention will be described with reference to the drawings. In the following explanation. The three directions orthogonal to each other will be described as the X-axis direction, the Y-axis direction, and the Z-axis direction. Further, X1 is attached to one side in the X-axis direction, X2 is attached to the other side in the X-axis direction, Y1 is attached to one side in the Y-axis direction, and Y2 is attached to the other side in the Y-axis direction. Z1 will be attached to one side in the Z-axis direction, and Z2 will be attached to the other side in the Z-axis direction. Further, the direction in which the normal line extends with respect to the surface to be inspected 11 is shown as the normal direction Lv.

［実施形態１）
（全体構成）
図１は、本発明の実施形態１に係る外観検査装置１の構成を模式的に示す説明図である。なお、図１には、ロボットアーム５０をロボットアーム５０による移動方向である矢印Ｆで示してある。 [Embodiment 1)
(overall structure)
FIG. 1 is an explanatory diagram schematically showing the configuration of the visual inspection apparatus 1 according to the first embodiment of the present invention. In addition, in FIG. 1, the robot arm 50 is indicated by an arrow F which is a moving direction by the robot arm 50.

図１に示す外観検査装置１は、ワーク１０の曲面部１１２を含む被検査面１１の外観を検査する装置である。このため、外観検査装置１は、被検査面１１を撮像するための撮像装置２０を有している。また、外観検査装置１は、撮像装置２０およびワーク１０のうちの一方を含む可動体８０と、可動体８０の被当接部８１に当接し、可動体８０を被検査面１１の形状に沿うように案内するガイド機構９０を構成するガイド部４０と、ガイド機構９０に沿って可動体８０を被検査面１１の形状に沿うように移動させるロボットアーム５０とを有している。ロボットアーム５０は、支持部材７０を介して可動体８０を駆動する。 The visual inspection device 1 shown in FIG. 1 is a device that inspects the appearance of the surface to be inspected 11 including the curved surface portion 112 of the work 10. Therefore, the visual inspection device 1 has an imaging device 20 for imaging the surface to be inspected 11. Further, the visual inspection device 1 abuts on the movable body 80 including one of the image pickup device 20 and the work 10 and the contacted portion 81 of the movable body 80, and the movable body 80 follows the shape of the surface to be inspected 11. It has a guide portion 40 constituting the guide mechanism 90 for guiding the moving body 90, and a robot arm 50 for moving the movable body 80 along the guide mechanism 90 so as to follow the shape of the surface to be inspected 11. The robot arm 50 drives the movable body 80 via the support member 70.

可動体８０は、撮像装置２０を含む。このため、ワーク１０は固定されている。ワーク１０は、Ｘ軸方向に延在する被検査面１１をＺ軸方向の一方側Ｚ１に向けた板状部材である。ワーク１０の被検査面１１には、Ｘ軸方向の中間部分に平面部１１１が設けられ、Ｘ軸方向の一方側Ｘ１の端部、およびＸ軸方向の他方側Ｘ２の端部の各々に凸状の曲面部１１２が設けられている。かかる構成のワーク１０としては、例えば、携帯型ディスプレイを挙げることができる。 The movable body 80 includes an imaging device 20. Therefore, the work 10 is fixed. The work 10 is a plate-shaped member in which the surface to be inspected 11 extending in the X-axis direction is directed to one side Z1 in the Z-axis direction. The surface to be inspected 11 of the work 10 is provided with a flat surface portion 111 in the middle portion in the X-axis direction, and is convex on each of the end portion of one side X1 in the X-axis direction and the end portion of the other side X2 in the X-axis direction. A curved surface portion 112 is provided. As the work 10 having such a configuration, for example, a portable display can be mentioned.

ガイド部４０は、Ｘ軸方向に延在するガイド面４１をＺ軸方向の一方側Ｚ１に向けた部材である。ガイド面４１には、Ｘ軸方向の中間部分に平面部４１１が設けられ、Ｘ軸方向の一方側Ｘ１の端部、およびＸ軸方向の他方側Ｘ２の端部の各々に凸状の曲面部４１２が設けられている。ガイド面４１のＸＺ断面は、ワーク１０の被検査面１１のＸＺ断面と形状およびサイズが同一である。 The guide portion 40 is a member in which the guide surface 41 extending in the X-axis direction is directed to one side Z1 in the Z-axis direction. The guide surface 41 is provided with a flat surface portion 411 at an intermediate portion in the X-axis direction, and a curved surface portion having a convex shape on each of an end portion of one side X1 in the X-axis direction and an end portion of the other side X2 in the X-axis direction. 412 is provided. The XZ cross section of the guide surface 41 has the same shape and size as the XZ cross section of the surface to be inspected 11 of the work 10.

可動体８０は、ワーク１０に対してＺ軸方向の一方側Ｚ１で撮像レンズ２１をＺ軸方向の他方側Ｚ２に向けた撮像装置２０と、撮像装置２０を保持するホルダ３０とを有してい
る。ホルダ３０は、ガイド部４０に対して当接する板部３１と、板部３１からワーク１０の被検査面１１と対向するようにＹ軸方向の他方側Ｙ２に延在したアーム部３２とを有しており、板部３１によって、可動体８０の被当接部８１が構成されている。アーム部３２には、撮像レンズ２１をワーク１０に向けた撮像装置２０が保持されている。従って、撮像装置２０の撮像レンズ２１は、板部３１とＸ軸方向の同一の位置にある。撮像装置２０は、ラインセンサカメラまたはエリアセンサカメラである。本形態において、撮像装置２０は、ラインセンサカメラである。 The movable body 80 has an image pickup device 20 in which the image pickup lens 21 is directed to the other side Z2 in the Z axis direction on one side Z1 in the Z-axis direction with respect to the work 10, and a holder 30 for holding the image pickup device 20. There is. The holder 30 has a plate portion 31 that comes into contact with the guide portion 40, and an arm portion 32 that extends from the plate portion 31 to the other side Y2 in the Y-axis direction so as to face the surface to be inspected 11 of the work 10. The plate portion 31 constitutes the contacted portion 81 of the movable body 80. The arm portion 32 holds an image pickup device 20 in which the image pickup lens 21 is directed toward the work 10. Therefore, the image pickup lens 21 of the image pickup apparatus 20 is at the same position as the plate portion 31 in the X-axis direction. The image pickup device 20 is a line sensor camera or an area sensor camera. In this embodiment, the image pickup device 20 is a line sensor camera.

このように構成した外観検査装置１において、ロボットアーム５０の側と可動体８０の側とに接続するように、ダンパ装置６０が設けられている。例えば、ホルダ３０は、板部３１からＺ軸方向の一方側Ｚ１に向けて延在する軸部３３を有しており、軸部３３は、ロボットアーム５０に保持された支持部材７０の軸穴（図示せず）に軸線方向に移動可能に支持されている。また、軸部３３の周りには、ダンパ装置６０が設けられている。 In the visual inspection device 1 configured in this way, a damper device 60 is provided so as to connect to the side of the robot arm 50 and the side of the movable body 80. For example, the holder 30 has a shaft portion 33 extending from the plate portion 31 toward one side Z1 in the Z-axis direction, and the shaft portion 33 is a shaft hole of the support member 70 held by the robot arm 50. It is supported so as to be movable in the axial direction (not shown). A damper device 60 is provided around the shaft portion 33.

ダンパ装置６０は、例えば、圧縮コイルバネ６１である。圧縮コイルバネ６１は、板部３１と支持部材７０の間で圧縮されている。従って、圧縮コイルバネ６１の一方の端部は板部３１に接続され、圧縮コイルバネ６１の他方の端部は支持部材７０に接続されている。それ故、ダンパ装置６０（圧縮コイルバネ６１）は、可動体８０の被当接部８１（ホルダ３０の板部３１）をガイド部４０に弾性をもって押し付けている。 The damper device 60 is, for example, a compression coil spring 61. The compression coil spring 61 is compressed between the plate portion 31 and the support member 70. Therefore, one end of the compression coil spring 61 is connected to the plate portion 31, and the other end of the compression coil spring 61 is connected to the support member 70. Therefore, the damper device 60 (compression coil spring 61) elastically presses the contacted portion 81 (plate portion 31 of the holder 30) of the movable body 80 against the guide portion 40.

（ロボットアーム５０の構成、および本形態の主な効果）
図２は、図１に示す外観検査装置１に用いたロボットアーム５０の説明図である。図３は、図１に示す外観検査装置１において、曲面部１１２等を撮像する様子を示す説明図である。 (Structure of robot arm 50 and main effects of this embodiment)
FIG. 2 is an explanatory view of the robot arm 50 used in the visual inspection device 1 shown in FIG. FIG. 3 is an explanatory view showing a state in which the curved surface portion 112 and the like are imaged in the visual inspection apparatus 1 shown in FIG.

図２に示すように、ロボットアーム５０は、第１軸Ｌ１周り、第２軸Ｌ２周り、第３軸Ｌ３周り、第４軸Ｌ４周り、第５軸Ｌ５周り、および第６軸Ｌ６周りに回転可能な回転部を有する６軸ロボットアームである。 As shown in FIG. 2, the robot arm 50 rotates around the first axis L1, around the second axis L2, around the third axis L3, around the fourth axis L4, around the fifth axis L5, and around the sixth axis L6. A 6-axis robot arm with a possible rotating part.

本形態の外観検査装置１を用いて、ワーク１０の被検査面１１の傷等の有無を検査するには、まず、ロボットアーム５０に対して教示作業を行い、ロボットアーム５０の制御装置（図示せず）に対し、検査プログラムを保持させる。かかる教示作業では、まず、撮像装置２０を含む可動体８０をガイド機構９０に沿ってＸ軸方向に手動で移動させるとともに、ガイド機構９０に沿ってＺ軸方向に手動で移動させ、その際の動きを検査プログラムとして記憶させる。 In order to inspect the work 10 for scratches or the like on the surface to be inspected 11 using the visual inspection device 1 of the present embodiment, first, a teaching operation is performed on the robot arm 50, and a control device for the robot arm 50 (FIG. (Not shown), let the inspection program be retained. In such teaching work, first, the movable body 80 including the image pickup device 20 is manually moved in the X-axis direction along the guide mechanism 90, and is manually moved in the Z-axis direction along the guide mechanism 90. Memorize the movement as an inspection program.

また、可動体８０を移動させる際に可動体８０の姿勢を切り換え、図３に実線で示すように、撮像装置２０によってワーク１０の被検査面１１の平面部１１１を撮像する際、および図３に一点鎖線で示すように、撮像装置２０によってワーク１０の被検査面１１の曲面部１１２を撮像する際のいずれにおいても、撮像レンズ２１の中心光軸Ｌ０と、ワーク１０の被検査面１１（平面部１１１および曲面部１１２）のうち、中心光軸Ｌ０と重なる位置における法線方向Ｌｖとの相対位置関係が同一となるように教示作業を行う。本形態では、撮像レンズ２１の中心光軸Ｌ０と、ワーク１０の被検査面１１のうち、中心光軸Ｌ０と重なる位置における法線方向Ｌｖとが一致するように教示作業を行う。従って、撮像レンズ２１の中心光軸Ｌ０上における撮像装置２０とワーク１０の被検査面１１との距離が一定に保持される。 Further, when the movable body 80 is moved, the posture of the movable body 80 is switched, and as shown by a solid line in FIG. 3, when the flat surface portion 111 of the surface to be inspected 11 of the work 10 is imaged by the imaging device 20, and in FIG. As shown by a single point chain line, the central optical axis L0 of the image pickup lens 21 and the surface to be inspected 11 of the work 10 ( Of the flat surface portion 111 and the curved surface portion 112), the teaching work is performed so that the relative positional relationship with the normal direction Lv at the position overlapping the central optical axis L0 is the same. In this embodiment, the teaching work is performed so that the central optical axis L0 of the image pickup lens 21 and the normal direction Lv at the position of the surface to be inspected 11 of the work 10 overlap with the central optical axis L0 coincide with each other. Therefore, the distance between the image pickup device 20 and the surface to be inspected 11 of the work 10 on the central optical axis L0 of the image pickup lens 21 is kept constant.

それ故、ロボットアーム５０によって、ホルダ３０をガイド面４１に沿ってＸ軸方向に移動させる間、撮像装置２０によってワーク１０の被検査面１１を撮像すれば、撮像装置２０は、ワーク１０の曲面部１１２を含む被検査面１１全体に対して適正な距離の位置で
ワーク１０の被検査面１１を撮像することができる。また、撮像結果を制御部において画像解析すれば、傷等の有無を検査することができる。 Therefore, if the image pickup device 20 images the surface to be inspected 11 of the work 10 while the robot arm 50 moves the holder 30 along the guide surface 41 in the X-axis direction, the image pickup device 20 will be a curved surface of the work 10. The surface to be inspected 11 of the work 10 can be imaged at a position at an appropriate distance with respect to the entire surface to be inspected 11 including the portion 112. Further, if the image pickup result is image-analyzed by the control unit, the presence or absence of scratches or the like can be inspected.

また、本形態の外観検査装置１では、ロボットアーム５０の側および可動体８０の側の双方にダンパ装置６０が接続されているため、ダンパ装置６０は、可動体８０の被当接部８１をガイド部４０に弾性をもって押し付ける。従って、サーボ制御による振動がロボットアーム５０に発生した場合でも、撮像装置２０の振動を抑制することができる。それ故、撮像装置２０の撮像レンズ２１を高倍率なレンズにしたために撮像レンズ２１の被写界深度が浅くなったとしても、ワーク１０の被検査面１１が撮像装置２０の被写界深度内に位置する。よって、曲面部１１２を有するワーク１０の被検査面１１を高い倍率で適正に撮像し、検査することができる。例えば、撮像レンズ２１の被写界深度が３０μｍ程度である場合にロボットアーム５０に１００〜３００μｍ程度の振動が発生している場合でも、ワーク１０の被検査面１１を高い倍率で適正に撮像し、検査することができる。 Further, in the visual inspection device 1 of the present embodiment, since the damper device 60 is connected to both the side of the robot arm 50 and the side of the movable body 80, the damper device 60 connects the contacted portion 81 of the movable body 80. It is elastically pressed against the guide portion 40. Therefore, even when the vibration due to the servo control is generated in the robot arm 50, the vibration of the image pickup apparatus 20 can be suppressed. Therefore, even if the depth of field of the image pickup lens 21 becomes shallow because the image pickup lens 21 of the image pickup apparatus 20 is made into a high-magnification lens, the surface to be inspected 11 of the work 10 is within the depth of field of the image pickup apparatus 20. Located in. Therefore, the surface 11 to be inspected of the work 10 having the curved surface portion 112 can be appropriately imaged and inspected at a high magnification. For example, when the depth of field of the image pickup lens 21 is about 30 μm, even if the robot arm 50 vibrates about 100 to 300 μm, the surface 11 to be inspected of the work 10 is properly imaged at a high magnification. , Can be inspected.

［実施形態１の変形例１］
上記実施形態１では、撮像装置２０を可動体８０の側に設けたが、ワーク１０を可動体８０の側に設けてもよい。 [Modification 1 of Embodiment 1]
In the first embodiment, the image pickup device 20 is provided on the side of the movable body 80, but the work 10 may be provided on the side of the movable body 80.

［実施形態１の変形例２］
上記実施形態１では、ガイド部４０をワーク１０のＹ軸方向の一方側に配置したが、ワーク１０のＹ軸方向の両側にガイド部４０を配置してもよい。 [Modification 2 of Embodiment 1]
In the first embodiment, the guide portions 40 are arranged on one side of the work 10 in the Y-axis direction, but the guide portions 40 may be arranged on both sides of the work 10 in the Y-axis direction.

上記実施形態１では、ワーク１０よりＹ軸方向の幅が狭い部材をガイド部４０として用いたが、ワーク１０とサイズおよび形状が同一の部材をガイド部４０として用いてもよい。例えば、ワーク１０と同時に製造された部材をガイド部４０として用いてもよい。 In the first embodiment, a member having a width narrower in the Y-axis direction than the work 10 is used as the guide portion 40, but a member having the same size and shape as the work 10 may be used as the guide portion 40. For example, a member manufactured at the same time as the work 10 may be used as the guide portion 40.

上記実施形態１では、ワーク１０とは別の部材をガイド部４０として用いたが、ワーク１０の被検査面１１と異なる位置に、被検査面１１と同一形状の領域が一部に存在する場合、かかる一部の領域をガイド部として用いてもよい。 In the first embodiment, a member different from the work 10 is used as the guide portion 40, but a region having the same shape as the inspected surface 11 is partially present at a position different from the inspected surface 11 of the work 10. , Such a part of the area may be used as a guide unit.

［実施形態２］
図４は、本発明の実施形態２に係る外観検査装置１の構成を模式的に示す説明図である。図５は、図４に示す外観検査装置１において、曲面部１１３等を撮像する様子を示す説明図である。なお、図４には、ロボットアーム５０をロボットアーム５０による移動方向である矢印Ｆで示してある。また、本形態の基本的な構成は、実施形態１と同様であるため、共通する部分には同一の符号を付して説明する。 [Embodiment 2]
FIG. 4 is an explanatory diagram schematically showing the configuration of the visual inspection apparatus 1 according to the second embodiment of the present invention. FIG. 5 is an explanatory view showing a state in which the curved surface portion 113 and the like are imaged in the visual inspection apparatus 1 shown in FIG. In FIG. 4, the robot arm 50 is indicated by an arrow F, which is the direction of movement by the robot arm 50. Further, since the basic configuration of this embodiment is the same as that of the first embodiment, the common parts will be described with the same reference numerals.

図４に示す外観検査装置１も、実施形態１と同様、ワーク１０の曲面部１１２を含む被検査面１１の外観を検査する装置である。このため、外観検査装置１は、被検査面１１を撮像するための撮像装置２０を有している。また、外観検査装置１は、撮像装置２０およびワーク１０のうちの一方を含む可動体８０と、可動体８０の被当接部８１に当接し、可動体８０を被検査面１１の形状に沿うように案内するガイド機構９０を構成するガイド部４０と、可動体８０をガイド機構９０に沿って移動させるロボットアーム５０とを有している。 Similar to the first embodiment, the visual inspection device 1 shown in FIG. 4 is also a device for inspecting the appearance of the surface to be inspected 11 including the curved surface portion 112 of the work 10. Therefore, the visual inspection device 1 has an imaging device 20 for imaging the surface to be inspected 11. Further, the visual inspection device 1 abuts on the movable body 80 including one of the image pickup device 20 and the work 10 and the contacted portion 81 of the movable body 80, and the movable body 80 follows the shape of the surface to be inspected 11. It has a guide portion 40 that constitutes a guide mechanism 90 that guides the movable body 80, and a robot arm 50 that moves the movable body 80 along the guide mechanism 90.

実施形態１において、可動体８０は撮像装置２０を含んでいたのに対し、本形態において、可動体８０は、ワーク１０を含む。このため、撮像装置２０は、ワーク１０に対してＺ軸方向の他方側Ｚ２で撮像レンズ２１をＺ軸方向の一方側Ｚ１に向けた状態で固定されている。ワーク１０は、Ｘ軸方向に延在する被検査面１１をＺ軸方向の他方側Ｚ２に向けた板状部材である。ワーク１０の被検査面１１には、Ｘ軸方向の中間部分に平面部１１１
が設けられ、Ｘ軸方向の一方側Ｘ１の端部、およびＸ軸方向の他方側Ｘ２の端部の各々に凹状の曲面部１１３が設けられている。 In the first embodiment, the movable body 80 includes the imaging device 20, whereas in the present embodiment, the movable body 80 includes the work 10. Therefore, the image pickup device 20 is fixed to the work 10 in a state where the image pickup lens 21 is directed to the one side Z1 in the Z-axis direction on the other side Z2 in the Z-axis direction. The work 10 is a plate-shaped member in which the surface to be inspected 11 extending in the X-axis direction is directed to the other side Z2 in the Z-axis direction. The surface to be inspected 11 of the work 10 has a flat surface portion 111 in the middle portion in the X-axis direction.
Is provided, and a concave curved surface portion 113 is provided at each of the end portion of one side X1 in the X-axis direction and the end portion of the other side X2 in the X-axis direction.

ガイド部４０は、Ｙ軸方向に延在する軸体４５であり、可動体８０を案内するガイド面３８０は可動体８０の被当接部８１に構成されている。ここで、撮像装置２０の撮像レンズ２１は、軸体４５（ガイド部４０）とＸ軸方向の同一の位置にある。撮像装置２０は、ラインセンサカメラまたはエリアセンサカメラである。本形態において、撮像装置２０は、ラインセンサカメラである。 The guide portion 40 is a shaft body 45 extending in the Y-axis direction, and the guide surface 380 for guiding the movable body 80 is formed in the contacted portion 81 of the movable body 80. Here, the image pickup lens 21 of the image pickup apparatus 20 is at the same position in the X-axis direction as the shaft body 45 (guide portion 40). The image pickup device 20 is a line sensor camera or an area sensor camera. In this embodiment, the image pickup device 20 is a line sensor camera.

より具体的には、可動体８０は、ワーク１０と、ワーク１０を保持するホルダ３５とを有している。ホルダ３５は、ワーク１０をＹ軸方向の両側から保持する保持部３６と、保持部３６を繋ぐ連結部３７とを有している。また、ホルダ３５は、保持部３６に対してＹ軸方向の両側でＸ軸方向に延在するレール部３８を有しており、レール部３８は、可動体８０の被当接部８１として、ガイド部４０（軸体４５）に対してＺ軸方向の一方側Ｚ１から当接している。従って、レール部３８のＺ軸方向の他方側Ｚ２の面がガイド面３８０になっている。 More specifically, the movable body 80 has a work 10 and a holder 35 for holding the work 10. The holder 35 has a holding portion 36 that holds the work 10 from both sides in the Y-axis direction, and a connecting portion 37 that connects the holding portions 36. Further, the holder 35 has a rail portion 38 extending in the X-axis direction on both sides in the Y-axis direction with respect to the holding portion 36, and the rail portion 38 serves as a contacted portion 81 of the movable body 80. It is in contact with the guide portion 40 (shaft body 45) from one side Z1 in the Z-axis direction. Therefore, the surface of the rail portion 38 on the other side Z2 in the Z-axis direction is the guide surface 380.

本形態において、レール部３８は、Ｘ軸方向の中間部分が直線部分になっており、Ｘ軸方向の一方側Ｘ１端部、およびＸ軸方向の他方側Ｘ２の端部の各々に湾曲部が設けられている。従って、ガイド面３８０には、Ｘ軸方向の中間部分に平面部３８１が設けられ、Ｘ軸方向の一方側Ｘ１の端部、およびＸ軸方向の他方側Ｘ２の端部の各々に凹部状の曲面部３８２が設けられている。ガイド面３８０のＸＺ断面は、ワーク１０の被検査面１１のＸＺ断面と形状およびサイズが同一である。 In the present embodiment, the rail portion 38 has a straight portion at the intermediate portion in the X-axis direction, and curved portions at each of the end portion of one side X1 in the X-axis direction and the end portion of the other side X2 in the X-axis direction. It is provided. Therefore, the guide surface 380 is provided with a flat surface portion 381 in the intermediate portion in the X-axis direction, and has a concave shape at each of the end portion of one side X1 in the X-axis direction and the end portion of the other side X2 in the X-axis direction. A curved surface portion 382 is provided. The XZ cross section of the guide surface 380 has the same shape and size as the XZ cross section of the surface 11 to be inspected of the work 10.

このように構成した外観検査装置１において、ロボットアーム５０の側とホルダ３５の側とに接続するように、ダンパ装置６０が設けられている。例えば、ホルダ３５は、連結部３７からＺ軸方向の一方側Ｚ１に向けて延在する軸部３９を有しており、軸部３９は、ロボットアーム５０に保持された支持部材７０の軸穴（図示せず）に軸線方向に移動可能に支持されている。また、軸部３９の周りには、ダンパ装置６０が設けられている。 In the visual inspection device 1 configured in this way, a damper device 60 is provided so as to connect to the side of the robot arm 50 and the side of the holder 35. For example, the holder 35 has a shaft portion 39 extending from the connecting portion 37 toward one side Z1 in the Z-axis direction, and the shaft portion 39 is a shaft hole of the support member 70 held by the robot arm 50. It is supported so as to be movable in the axial direction (not shown). A damper device 60 is provided around the shaft portion 39.

ダンパ装置６０は、例えば、圧縮コイルバネ６１である。ここで、圧縮コイルバネ６１は、板部３１と支持部材７０の間で圧縮されている。従って、圧縮コイルバネ６１の一方の端部は連結部３７に接続され、圧縮コイルバネ６１の他方の端部は支持部材７０に接続されている。それ故、ダンパ装置６０（圧縮コイルバネ６１）は、可動体８０の被当接部８１（レール部３８）をガイド部４０（軸体４５)に弾性をもって押し付けている。 The damper device 60 is, for example, a compression coil spring 61. Here, the compression coil spring 61 is compressed between the plate portion 31 and the support member 70. Therefore, one end of the compression coil spring 61 is connected to the connecting portion 37, and the other end of the compression coil spring 61 is connected to the support member 70. Therefore, the damper device 60 (compression coil spring 61) elastically presses the contacted portion 81 (rail portion 38) of the movable body 80 against the guide portion 40 (shaft body 45).

ロボットアーム５０は、図２を参照して説明した６軸ロボットアームである。本形態の外観検査装置１を用いて、ワーク１０の被検査面１１の傷等の有無を検査するには、まず、ロボットアーム５０に対して教示作業を行い、ロボットアーム５０の制御装置（図示せず）に対し、検査プログラムを保持させる。かかる教示作業では、まず、ワーク１０を含む可動体８０をガイド機構９０に沿ってＸ軸方向に手動で移動させるとともに、ガイド機構９０に沿ってＺ軸方向に手動で移動させ、その際の動きを検査プログラムとして記憶させる。 The robot arm 50 is a 6-axis robot arm described with reference to FIG. In order to inspect the work 10 for scratches or the like on the surface to be inspected 11 using the visual inspection device 1 of the present embodiment, first, a teaching operation is performed on the robot arm 50, and a control device for the robot arm 50 (FIG. (Not shown), let the inspection program be retained. In such teaching work, first, the movable body 80 including the work 10 is manually moved in the X-axis direction along the guide mechanism 90, and is manually moved in the Z-axis direction along the guide mechanism 90, and the movement at that time. Is stored as an inspection program.

また、可動体８０を移動させる際に軸体４５を支点に可動体８０の姿勢を切り換え、図５に実線で示すように、撮像装置２０によってワーク１０の被検査面１１の平面部１１１を撮像する際、および図５に一点鎖線で示すように、撮像装置２０によってワーク１０の被検査面１１の曲面部１１３を撮像する際のいずれにおいても、撮像レンズ２１の中心光軸Ｌ０と、ワーク１０の被検査面１１（平面部１１１および曲面部１１３）のうち、中心光軸Ｌ０と重なる位置における法線方向Ｌｖとの相対位置関係が同一となるように教示作
業を行う。本形態では、撮像レンズ２１の中心光軸Ｌ０と、ワーク１０の被検査面１１のうち、中心光軸Ｌ０と重なる位置における法線方向Ｌｖとが一致するように教示作業を行う。従って、撮像レンズ２１の中心光軸Ｌ０上における撮像装置２０とワーク１０の被検査面１１との距離が一定に保持される。 Further, when the movable body 80 is moved, the posture of the movable body 80 is switched with the shaft body 45 as a fulcrum, and as shown by a solid line in FIG. 5, the flat surface portion 111 of the surface to be inspected 11 of the work 10 is imaged by the image pickup device 20. The central optical axis L0 of the image pickup lens 21 and the work 10 are both when the image pickup device 20 is used to image the curved surface portion 113 of the surface to be inspected 11 of the work 10 as shown by the one-point chain line in FIG. The teaching work is performed so that the relative positional relationship with the normal direction Lv at the position overlapping the central optical axis L0 of the surface to be inspected 11 (planar portion 111 and curved surface portion 113) is the same. In this embodiment, the teaching work is performed so that the central optical axis L0 of the image pickup lens 21 and the normal direction Lv at the position of the surface to be inspected 11 of the work 10 overlap with the central optical axis L0 coincide with each other. Therefore, the distance between the image pickup device 20 and the surface to be inspected 11 of the work 10 on the central optical axis L0 of the image pickup lens 21 is kept constant.

それ故、ロボットアーム５０によって、ホルダ３０をガイド面４１に沿ってＸ軸方向に移動させる間、撮像装置２０によってワーク１０の被検査面１１を撮像すれば、撮像装置２０は、ワーク１０の曲面部１１３を含む被検査面１１全体に対して適正な距離の位置でワーク１０の被検査面１１を撮像することができる。 Therefore, if the image pickup device 20 images the surface to be inspected 11 of the work 10 while the robot arm 50 moves the holder 30 along the guide surface 41 in the X-axis direction, the image pickup device 20 will be a curved surface of the work 10. The surface to be inspected 11 of the work 10 can be imaged at a position at an appropriate distance with respect to the entire surface to be inspected 11 including the portion 113.

また、本形態の外観検査装置１では、ロボットアーム５０の側および可動体８０の側の双方にダンパ装置６０が接続されているため、ダンパ装置６０は、可動体８０の被当接部８１をガイド部４０に弾性をもって押し付ける。従って、サーボ制御による振動がロボットアーム５０に発生した場合でも、撮像装置２０の振動を抑制することができる。従って、撮像装置２０の撮像レンズ２１を高倍率なレンズにしたために撮像レンズ２１の被写界深度が浅くなったとしても、ワーク１０の被検査面１１が撮像装置２０の被写界深度内に位置する。それ故、曲面部１１２を有するワーク１０の被検査面１１を高い倍率で適正に撮像し、検査することができる。 Further, in the visual inspection device 1 of the present embodiment, since the damper device 60 is connected to both the side of the robot arm 50 and the side of the movable body 80, the damper device 60 connects the contacted portion 81 of the movable body 80. It is elastically pressed against the guide portion 40. Therefore, even when the vibration due to the servo control is generated in the robot arm 50, the vibration of the image pickup apparatus 20 can be suppressed. Therefore, even if the depth of field of the image pickup lens 21 becomes shallow because the image pickup lens 21 of the image pickup apparatus 20 is made into a high-magnification lens, the surface to be inspected 11 of the work 10 is within the depth of field of the image pickup apparatus 20. To position. Therefore, the surface to be inspected 11 of the work 10 having the curved surface portion 112 can be appropriately imaged and inspected at a high magnification.

［実施形態２の変形例］
上記実施形態２では、軸体４５をガイド部４０とし、レール部３８を可動体８０の被当接部８１としたが、軸体４５を可動体８０の被当接部８１とし、レール部３８をガイド部４０としてもよい。また、実施形態２では、ワーク１０を可動体８０の側に設けたが、撮像装置２０を可動体８０の側に設けてもよい。 [Modified Example of Embodiment 2]
In the second embodiment, the shaft body 45 is the guide portion 40 and the rail portion 38 is the contacted portion 81 of the movable body 80, but the shaft body 45 is the contacted portion 81 of the movable body 80 and the rail portion 38. May be used as the guide unit 40. Further, in the second embodiment, the work 10 is provided on the side of the movable body 80, but the imaging device 20 may be provided on the side of the movable body 80.

［実施形態３］
図６は、本発明の実施形態３に係る外観検査装置１の構成を模式的に示す説明図である。なお、図６には、ロボットアーム５０をロボットアーム５０による移動方向である矢印Ｆで示してある。また、本形態の基本的な構成は、実施形態１と同様であるため、共通する部分には同一の符号を付して説明する。 [Embodiment 3]
FIG. 6 is an explanatory diagram schematically showing the configuration of the visual inspection apparatus 1 according to the third embodiment of the present invention. In FIG. 6, the robot arm 50 is indicated by an arrow F, which is the direction of movement by the robot arm 50. Further, since the basic configuration of this embodiment is the same as that of the first embodiment, the common parts will be described with the same reference numerals.

図６に示す外観検査装置１は、ワーク１０の曲面部１１４を含む被検査面１１の外観を検査する装置である。このため、外観検査装置１は、被検査面１１を撮像するための撮像装置２０を有している。また、外観検査装置１は、撮像装置２０およびワーク１０のうちの一方を含む可動体８０と、可動体８０の被当接部８１に当接し、可動体８０を被検査面１１の形状に沿うように案内するガイド機構９０を構成するガイド部４０と、可動体８０をガイド機構９０に沿って移動させるロボットアーム５０とを有している。 The visual inspection device 1 shown in FIG. 6 is a device that inspects the appearance of the surface to be inspected 11 including the curved surface portion 114 of the work 10. Therefore, the visual inspection device 1 has an imaging device 20 for imaging the surface to be inspected 11. Further, the visual inspection device 1 abuts on the movable body 80 including one of the image pickup device 20 and the work 10 and the contacted portion 81 of the movable body 80, and the movable body 80 follows the shape of the surface to be inspected 11. It has a guide portion 40 that constitutes a guide mechanism 90 that guides the movable body 80, and a robot arm 50 that moves the movable body 80 along the guide mechanism 90.

可動体８０は、撮像装置２０を含む。このため、ワーク１０は固定されている。ワーク１０は、Ｘ軸方向に延在する被検査面１１をＺ軸方向の一方側Ｚ１に向けた板状部材である。ここで、ワーク１０の被検査面１１は、断面が放物線の凸状の曲面部１１４が設けられている。 The movable body 80 includes an imaging device 20. Therefore, the work 10 is fixed. The work 10 is a plate-shaped member in which the surface to be inspected 11 extending in the X-axis direction is directed to one side Z1 in the Z-axis direction. Here, the surface to be inspected 11 of the work 10 is provided with a curved surface portion 114 having a convex parabolic cross section.

ガイド部４０は、Ｘ軸方向に延在する線状部材４９である。本形態において、線状部材４９は、互いに離間する水平方向に移動可能な２箇所（点４９１、４９２）の間で放物線状に撓んでおり、ワーク１０の曲面部１１４と、曲率半径等が同一である。曲率半径等の調整は点４９１、４９２間の距離を調節することで可能である。 The guide portion 40 is a linear member 49 extending in the X-axis direction. In the present embodiment, the linear member 49 is bent in a parabolic shape between two horizontally movable points (points 491 and 492) that are separated from each other, and has the same radius of curvature as the curved surface portion 114 of the work 10. Is. The radius of curvature and the like can be adjusted by adjusting the distance between the points 491 and 492.

可動体８０は、ワーク１０に対してＺ軸方向の一方側Ｚ２で撮像レンズ２１をＺ軸方向の他方側Ｚ２に向けた撮像装置２０と、撮像装置２０を保持する中空のホルダ３４とを有
しており、可動体８０は、ロボットアーム５０に保持された支持部材７０によってＸ軸方向に駆動される。撮像装置２０は、ラインセンサカメラまたはエリアセンサカメラである。本形態において、撮像装置２０は、ラインセンサカメラである。ホルダ３４は、ガイド部４０（線状部材４９）が貫通する円弧状の筒部３４０を有しており、筒部３４０によって、可動体８０の被当接部８１が構成されている。 The movable body 80 has an image pickup device 20 in which the image pickup lens 21 is directed to the other side Z2 in the Z axis direction on one side Z2 in the Z-axis direction with respect to the work 10, and a hollow holder 34 for holding the image pickup device 20. The movable body 80 is driven in the X-axis direction by the support member 70 held by the robot arm 50. The image pickup device 20 is a line sensor camera or an area sensor camera. In this embodiment, the image pickup device 20 is a line sensor camera. The holder 34 has an arc-shaped tubular portion 340 through which the guide portion 40 (linear member 49) penetrates, and the tubular portion 340 constitutes the contacted portion 81 of the movable body 80.

このように構成した外観検査装置１において、ロボットアーム５０の側と可動体８０の側とに接続するように、ダンパ装置６０が設けられている。例えば、筒部３４０と、ロボットアーム５０に保持された支持部材７０との間にはダンパ装置６０が設けられている。ダンパ装置６０は、例えば、圧縮コイルバネ６１である。ここで、圧縮コイルバネ６１は、筒部３４０と支持部材７０の間で圧縮されている。従って、圧縮コイルバネ６１の一方の端部は筒部３４０に接続され、圧縮コイルバネ６１の他方の端部は支持部材７０に接続されている。それ故、ダンパ装置６０（圧縮コイルバネ６１）は、可動体８０の被当接部８１（筒部３４０）をガイド部４０（線状部材４９）に弾性をもって押し付けている。 In the visual inspection device 1 configured in this way, a damper device 60 is provided so as to connect to the side of the robot arm 50 and the side of the movable body 80. For example, a damper device 60 is provided between the tubular portion 340 and the support member 70 held by the robot arm 50. The damper device 60 is, for example, a compression coil spring 61. Here, the compression coil spring 61 is compressed between the tubular portion 340 and the support member 70. Therefore, one end of the compression coil spring 61 is connected to the tubular portion 340, and the other end of the compression coil spring 61 is connected to the support member 70. Therefore, the damper device 60 (compression coil spring 61) elastically presses the contacted portion 81 (cylinder portion 340) of the movable body 80 against the guide portion 40 (linear member 49).

本形態の外観検査装置１を用いて、ワーク１０の被検査面１１の傷等の有無を検査するには、まず、ロボットアーム５０に対して教示作業を行い、ロボットアーム５０の制御装置（図示せず）に対し、検査プログラムを保持させる。かかる教示作業では、まず、撮像装置２０を含む可動体８０をガイド機構９０に沿ってＸ軸方向に手動で移動させるとともに、ガイド機構９０に沿ってＺ軸方向に手動で移動させ、その際の動きを検査プログラムとして記憶させる。 In order to inspect the work 10 for scratches or the like on the surface to be inspected 11 using the visual inspection device 1 of the present embodiment, first, a teaching operation is performed on the robot arm 50, and a control device for the robot arm 50 (FIG. (Not shown), let the inspection program be retained. In such teaching work, first, the movable body 80 including the image pickup device 20 is manually moved in the X-axis direction along the guide mechanism 90, and is manually moved in the Z-axis direction along the guide mechanism 90. Memorize the movement as an inspection program.

その結果、撮像レンズ２１の中心光軸Ｌ０と、ワーク１０の被検査面１１のうち、中心光軸Ｌ０と重なる位置における法線方向Ｌｖとの相対位置関係が同一となる。本形態では、撮像レンズ２１の中心光軸Ｌ０と、ワーク１０の被検査面１１のうち、中心光軸Ｌ０と重なる位置における法線方向Ｌｖとが一致する。また、撮像レンズ２１の中心光軸Ｌ０上における撮像装置２０とワーク１０の被検査面１１との距離が一定に保持される。 As a result, the relative positional relationship between the central optical axis L0 of the image pickup lens 21 and the normal direction Lv at the position of the surface to be inspected 11 of the work 10 that overlaps with the central optical axis L0 becomes the same. In this embodiment, the central optical axis L0 of the image pickup lens 21 and the normal direction Lv at the position of the surface to be inspected 11 of the work 10 overlapping the central optical axis L0 coincide with each other. Further, the distance between the image pickup device 20 and the surface to be inspected 11 of the work 10 on the central optical axis L0 of the image pickup lens 21 is kept constant.

従って、ロボットアーム５０によって、ホルダ３０をガイド部４０に沿ってＸ軸方向に移動させる間、撮像装置２０によってワーク１０の被検査面１１を撮像すれば、撮像装置２０は、ワーク１０の曲面部１１４を含む被検査面１１全体に対して適正な距離の位置でワーク１０の被検査面１１を撮像することができる。 Therefore, if the image pickup device 20 images the surface to be inspected 11 of the work 10 while the robot arm 50 moves the holder 30 along the guide portion 40 in the X-axis direction, the image pickup device 20 will be the curved surface portion of the work 10. The surface to be inspected 11 of the work 10 can be imaged at a position at an appropriate distance with respect to the entire surface to be inspected 11 including 114.

また、本形態の外観検査装置１では、ロボットアーム５０の側および可動体８０の側の双方にダンパ装置６０が接続されているため、ダンパ装置６０は、可動体８０の被当接部８１をガイド部４０に弾性をもって押し付ける。従って、サーボ制御による振動がロボットアーム５０に発生した場合でも、撮像装置２０の振動を抑制することができる。従って、撮像装置２０の撮像レンズ２１を高倍率なレンズにしたために撮像レンズ２１の被写界深度が浅くなったとしても、ワーク１０の被検査面１１が撮像装置２０の被写界深度内に位置する。それ故、曲面部１１２を有するワーク１０の被検査面１１を高い倍率で適正に撮像し、検査することができる。 Further, in the visual inspection device 1 of the present embodiment, since the damper device 60 is connected to both the side of the robot arm 50 and the side of the movable body 80, the damper device 60 connects the contacted portion 81 of the movable body 80. It is elastically pressed against the guide portion 40. Therefore, even when the vibration due to the servo control is generated in the robot arm 50, the vibration of the image pickup apparatus 20 can be suppressed. Therefore, even if the depth of field of the image pickup lens 21 becomes shallow because the image pickup lens 21 of the image pickup apparatus 20 is made into a high-magnification lens, the surface to be inspected 11 of the work 10 is within the depth of field of the image pickup apparatus 20. To position. Therefore, the surface to be inspected 11 of the work 10 having the curved surface portion 112 can be appropriately imaged and inspected at a high magnification.

［実施形態４］
図７は、本発明の実施形態４に係る外観検査装置１の説明図である。上記実施形態１〜３では、ロボットアーム５０が、撮像装置２０の中心光軸Ｌ０と、被検査面１１のうち、中心光軸Ｌ０と重なる位置における法線方向Ｌｖとが一致するように可動体８０の姿勢を調整した。但し、図７に示すように、ロボットアーム５０が、撮像装置２０の中心光軸Ｌ０と、被検査面１１のうち、撮像装置２０の中心光軸Ｌ０と重なる位置における法線方向Ｌｖとの相対位置関係が一定となるように可動体８０の姿勢を調整する態様であれば、撮像装置２０の中心光軸Ｌ０と被検査面１１に対する法線方向Ｌｖとが一致する態様に限定
されない。 [Embodiment 4]
FIG. 7 is an explanatory view of the visual inspection apparatus 1 according to the fourth embodiment of the present invention. In the first to third embodiments, the robot arm 50 is a movable body so that the central optical axis L0 of the image pickup apparatus 20 and the normal direction Lv at the position of the surface to be inspected 11 overlapping the central optical axis L0 coincide with each other. The posture of 80 was adjusted. However, as shown in FIG. 7, the robot arm 50 is relative to the central optical axis L0 of the imaging device 20 and the normal direction Lv at a position of the surface to be inspected 11 that overlaps the central optical axis L0 of the imaging device 20. The mode in which the posture of the movable body 80 is adjusted so that the positional relationship is constant is not limited to the mode in which the central optical axis L0 of the image pickup apparatus 20 and the normal direction Lv with respect to the surface to be inspected 11 coincide with each other.

また、可動体８０が照明装置２５を含む場合、図７に示すように、ロボットアーム５０が、可動体８０を駆動する際、ロボットアーム５０が、撮像装置２０の中心光軸Ｌ０と、被検査面１１のうち、中心光軸Ｌ０と重なる位置における法線方向Ｌｖとの相対位置関係が一定となるように可動体８０の姿勢を調整するとともに、ロボットアーム５０が、照明装置２５の中心光軸Ｌ２５と、被検査面１１のうち、中心光軸Ｌ２５と重なる位置における法線方向Ｌｖとの相対位置関係が一定となるように可動体８０の姿勢を調整することが好ましい。 When the movable body 80 includes the lighting device 25, as shown in FIG. 7, when the robot arm 50 drives the movable body 80, the robot arm 50 is inspected with the central optical axis L0 of the image pickup device 20. The posture of the movable body 80 is adjusted so that the relative positional relationship with the normal direction Lv at the position overlapping the central optical axis L0 of the surface 11 is constant, and the robot arm 50 adjusts the posture of the movable body 80, and the robot arm 50 uses the central optical axis of the lighting device 25. It is preferable to adjust the posture of the movable body 80 so that the relative positional relationship between the L25 and the normal Lv at the position of the surface to be inspected 11 overlapping the central optical axis L25 is constant.

［他の実施形態］
上記形態において、ダンパ装置６０として圧縮コイルバネ６１を用いたが、板バネ等、他の種類のバネを用いてもよい。また、ダンパ装置６０として、エアシリンダー等の流体圧シリンダを用いてもよい。また、ダンパ装置６０として、ゴムやゲル状部材等の粘弾性部材を用いてもよい。 [Other Embodiments]
In the above embodiment, the compression coil spring 61 is used as the damper device 60, but other types of springs such as leaf springs may be used. Further, as the damper device 60, a fluid pressure cylinder such as an air cylinder may be used. Further, as the damper device 60, a viscoelastic member such as a rubber or a gel-like member may be used.

上記形態において、ワーク１０の曲面部は、Ｘ軸方向のみに沿って湾曲していたが、Ｘ軸方向およびＹ軸方向の双方に沿って湾曲した曲面部を備えたワーク１０を検査するための外観検査装置に本発明を適用してもよい。 In the above embodiment, the curved surface portion of the work 10 is curved only along the X-axis direction, but for inspecting the work 10 having the curved surface portion curved along both the X-axis direction and the Y-axis direction. The present invention may be applied to a visual inspection apparatus.

上記実施形態１において、ガイド部４０のガイド面４１がＸ軸方向に連続して延在していたが、ガイド部４０のガイド面４１がＸ軸方向の複数箇所に分割して配置されている態様であってもよい。同様に、上記実施形態２において、レール部３８のガイド面３８０がＸ軸方向に連続して延在していたが、レール部３８のガイド面３８０がＸ軸方向の複数箇所に分割して配置されている態様であってもよい。 In the first embodiment, the guide surface 41 of the guide portion 40 extends continuously in the X-axis direction, but the guide surface 41 of the guide portion 40 is divided and arranged at a plurality of locations in the X-axis direction. It may be an embodiment. Similarly, in the second embodiment, the guide surface 380 of the rail portion 38 extends continuously in the X-axis direction, but the guide surface 380 of the rail portion 38 is divided and arranged at a plurality of locations in the X-axis direction. It may be the aspect that has been done.

１…外観検査装置、１０…ワーク、１１…被検査面、２０…撮像装置、２１…撮像レンズ、３０、３４、３５…ホルダ、３１…板部、３２…アーム部、３３、３９…軸部、３６…保持部、３７…連結部、３８…レール部、４０…ガイド部、４１、３８０…ガイド面、４５…軸体、４９…線状部材、５０…ロボットアーム、６０…ダンパ装置、６１…圧縮コイルバネ、７０…支持部材、８０…可動体、８１…被当接部、９０…ガイド機構、１１１、３８１、４１１…平面部、１１２、１１３、１１４、３８２、４１２…曲面部、３４０…筒部、４９１、４９２…点、Ｌ０、Ｌ２５…中心光軸、Ｌｖ…法線 1 ... Appearance inspection device, 10 ... Work, 11 ... Surface to be inspected, 20 ... Imaging device, 21 ... Imaging lens, 30, 34, 35 ... Holder, 31 ... Plate part, 32 ... Arm part, 33, 39 ... Shaft part , 36 ... Holding part, 37 ... Connecting part, 38 ... Rail part, 40 ... Guide part, 41, 380 ... Guide surface, 45 ... Shaft body, 49 ... Linear member, 50 ... Robot arm, 60 ... Damper device, 61 ... compression coil spring, 70 ... support member, 80 ... movable body, 81 ... contacted portion, 90 ... guide mechanism, 111, 381, 411 ... flat surface portion, 112, 113, 114, 382, 412 ... curved surface portion, 340 ... Cylinder, 491, 492 ... point, L0, L25 ... central optical axis, Lv ... normal

Claims (13)

ワークの曲面部を含む被検査面の外観を検査する外観検査装置において、
前記被検査面を撮像するための撮像装置と、
前記撮像装置および前記ワークのうちの一方を含む可動体と、
前記可動体の被当接部に当接し、前記可動体を前記被検査面の形状に沿うように案内するガイド機構を構成するガイド部と、
前記可動体を前記被検査面の形状に沿うように移動させるロボットアームと、
前記ロボットアームの側および前記可動体の側の双方に接続され、前記被当接部を前記ガイド部に弾性をもって押し付けるダンパ装置と、
を備えることを特徴とする外観検査装置。 In an appearance inspection device that inspects the appearance of the surface to be inspected including the curved surface of the work,
An imaging device for imaging the surface to be inspected and
A movable body including the imaging device and one of the workpieces,
A guide portion that constitutes a guide mechanism that abuts on the contacted portion of the movable body and guides the movable body along the shape of the surface to be inspected.
A robot arm that moves the movable body along the shape of the surface to be inspected,
A damper device that is connected to both the robot arm side and the movable body side and elastically presses the contacted portion against the guide portion.
A visual inspection device comprising. 請求項１に記載の外観検査装置において、
前記ロボットアームは、前記撮像装置の中心光軸と、前記被検査面のうち、前記撮像装置の中心光軸と重なる位置における法線方向との相対位置関係が一定となるように前記可動体の姿勢を調整することを特徴とする外観検査装置。 In the visual inspection apparatus according to claim 1,
The robot arm is a movable body such that the relative positional relationship between the central optical axis of the imaging device and the normal direction at a position of the surface to be inspected that overlaps the central optical axis of the imaging device is constant. A visual inspection device characterized by adjusting the posture. 請求項２に記載の外観検査装置において、
前記ロボットアームは、前記撮像装置の中心光軸と、前記被検査面のうち、前記撮像装置の中心光軸と重なる位置における法線方向とが一致するように前記可動体の姿勢を調整することを特徴とする外観検査装置。 In the visual inspection apparatus according to claim 2,
The robot arm adjusts the posture of the movable body so that the central optical axis of the imaging device and the normal direction of the surface to be inspected at a position overlapping the central optical axis of the imaging device coincide with each other. A visual inspection device characterized by. 請求項１から３までの何れか一項に記載の外観検査装置において、
前記ガイド部は、前記被検査面の断面形状と同一のガイド面を構成していることを特徴とする外観検査装置。 In the visual inspection apparatus according to any one of claims 1 to 3,
The visual inspection apparatus, wherein the guide portion constitutes a guide surface having the same cross-sectional shape as the surface to be inspected. 請求項４に記載の外観検査装置において、
前記ガイド部は、前記ワークと同一形状を有する部材であることを特徴とする外観検査装置。 In the visual inspection apparatus according to claim 4,
The visual inspection device is characterized in that the guide portion is a member having the same shape as the work. 請求項４に記載の外観検査装置において、
前記ガイド部は、前記ワークの一部の領域であることを特徴とする外観検査装置。 In the visual inspection apparatus according to claim 4,
The visual inspection apparatus, wherein the guide portion is a part of the area of the work. 請求項４に記載の外観検査装置において、
前記曲面部の断面形状が放物線であり、
前記ガイド部は、離間する２箇所で固定されて前記２箇所の間で放物線状に撓んだ線状部材を含むことを特徴とする外観検査装置。 In the visual inspection apparatus according to claim 4,
The cross-sectional shape of the curved surface is a parabola.
The visual inspection apparatus, wherein the guide portion includes a linear member that is fixed at two separated locations and bent in a parabolic shape between the two locations. 請求項１から７までの何れか一項に記載の外観検査装置において、
前記被当接部は、前記被検査面の断面形状と同一のガイド面を構成していることを特徴とする外観検査装置。 In the visual inspection apparatus according to any one of claims 1 to 7.
The visual inspection apparatus, wherein the contacted portion constitutes a guide surface having the same cross-sectional shape as the surface to be inspected. 請求項１から８までの何れか一項に記載の外観検査装置において、
前記可動体は、前記撮像装置を含むことを特徴とする外観検査装置。 In the visual inspection apparatus according to any one of claims 1 to 8.
The movable body is a visual inspection device including the image pickup device. 請求項９に記載の外観検査装置において、
前記可動体は、照明装置を含み、
前記ロボットアームは、前記照明装置の中心光軸と、前記被検査面のうち、前記照明装置の中心光軸と重なる位置における法線方向との相対位置関係が一定となるように前記可動体の姿勢を調整することを特徴とする外観検査装置。 In the visual inspection apparatus according to claim 9,
The movable body includes a lighting device.
The robot arm is of the movable body so that the relative positional relationship between the central optical axis of the lighting device and the normal direction of the surface to be inspected at a position overlapping the central optical axis of the lighting device is constant. A visual inspection device characterized by adjusting the posture. 請求項１から８までの何れか一項に記載の外観検査装置において、
前記可動体は、前記ワークを含むことを特徴とする外観検査装置。 In the visual inspection apparatus according to any one of claims 1 to 8.
The movable body is a visual inspection apparatus including the work. 請求項１から１１までの何れか一項に記載の外観検査装置において、
前記撮像装置は、ラインセンサカメラまたはエリアセンサカメラであることを特徴とする外観検査装置。 In the visual inspection apparatus according to any one of claims 1 to 11.
The image pickup device is a visual inspection device characterized by being a line sensor camera or an area sensor camera. 請求項１から１２までの何れか一項に記載の外観検査装置において、
前記ロボットアームは、６軸ロボットアームであることを特徴とする外観検査装置。 In the visual inspection apparatus according to any one of claims 1 to 12,
The robot arm is a visual inspection device characterized by being a 6-axis robot arm.
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