JP2021028958A - 載置台及び基板処理装置 - Google Patents
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Abstract
Description
図1は、本実施形態に係る基板処理装置100の構成を示す概略断面図である。基板処理装置100は、気密に構成され、電気的に接地電位とされた処理容器1を有する。処理容器1は、円筒形状であり、例えばアルミニウムから構成される。処理容器1内には、ウエハWを載置する載置台2が設けられている。載置台2は、基台2a及び静電チャック6を有する。基台2aは、導電性の金属、例えばアルミニウムから構成される。支持台4は載置台2を支持する。
次に、図2を参照して、載置台2の構成について説明する。図2は、図1の基板処理装置100における載置台2を拡大して示す概略断面図である。図2は、リフターピン61を上昇させてウエハWを支持した場合を示す。
一実施形態の変形例に係る載置台2について、図3及び図4を参照しながら説明する。図3(a)〜(c)、図4(a)及び(b)は、一実施形態の変形例に係る載置台2の一例を示す図である。なお、以下では、インナースリーブ201、アウタースリーブ202及びOリング203についての変形例の構成について説明するが、インナースリーブ204、アウタースリーブ205及びOリング206についても同様に変形例の構成が可能である。
2 載置台
2a 基台
5 エッジリング
6 静電チャック
7、8 接着層
15 ガス供給部
16 シャワーヘッド
21 載置面
30a、30b ガス用貫通孔
61 リフターピン
62 昇降機構
100 基板処理装置
200a、200b ピン用貫通孔
201、204 インナースリーブ
202、205 アウタースリーブ
203、206 Oリング
Claims (9)
- ウエハを載置する載置面を有し、第1貫通孔が形成されたウエハ載置部と、
前記ウエハ載置部の裏面に第1接着層によって接着され、前記第1貫通孔の孔径よりも大きい孔径を有し、前記第1貫通孔と連通する第2貫通孔が形成された基台と、
前記第2貫通孔の内部に、封止部材とともに前記基台から脱着可能に設けられる筒状のスリーブと、
前記ウエハ載置部の裏面と前記スリーブとの間に前記第1接着層と離間して設けられ、前記第1接着層を封止する前記封止部材と、を有し、
前記スリーブの先端の外周又は内周の少なくともいずれかに延在して周方向に凸部が形成され、
前記封止部材は、前記スリーブの先端面に押し当てられ、伸縮する、
載置台。 - 前記封止部材は、接着層により固定されていない、
請求項1に記載の載置台。 - 前記スリーブは、
第1のスリーブと、前記第1のスリーブの外側に設けられる第2のスリーブとを有し、
少なくとも前記第1のスリーブは前記封止部材とともに前記基台から脱着可能に設けられる、
請求項1又は2に記載の載置台。 - 前記封止部材は、前記第1のスリーブと前記第2のスリーブと前記ウエハ載置部の裏面とにより囲まれる空間に、前記第2のスリーブと離間して配置される、
請求項3に記載の載置台。 - 前記第2のスリーブは、前記第2貫通孔の内部にて第2接着層によって前記基台に接着されている、
請求項4に記載の載置台。 - 前記ウエハ載置部の裏面と前基台とを接着する前記第1接着層と、前記第2のスリーブと前記基台とを接着する前記第2接着層とは異なる材料から形成されている、
請求項1〜5のいずれか一項に記載の載置台。 - 前記第1貫通孔と前記第2貫通孔とにより形成される孔は、ウエハを保持するリフターピンが貫通する孔と、伝熱ガスを供給する孔との少なくともいずれかである、
請求項1〜6のいずれか一項に記載の載置台。 - 前記封止部材は、Oリングである、
請求項1〜7のいずれか一項に記載の載置台。 - 処理容器と、
前記処理容器内に設けられた載置台と、を有し、
前記載置台は、
ウエハを載置する載置面を有し、第1貫通孔が形成されたウエハ載置部と、
前記ウエハ載置部の裏面に第1接着層によって接着され、前記第1貫通孔の孔径よりも大きい孔径を有し、前記第1貫通孔と連通する第2貫通孔が形成された基台と、
前記第2貫通孔の内部に、封止部材とともに前記基台から脱着可能に設けられる筒状のスリーブと、
前記ウエハ載置部の裏面と前記スリーブとの間に前記第1接着層と離間して設けられ、前記第1接着層を封止する前記封止部材と、を有し、
前記スリーブの先端の外周又は内周の少なくともいずれかに延在して周方向に凸部が形成され、
前記封止部材は、前記スリーブの先端面に押し当てられ、伸縮する、
基板処理装置。
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JP2019148131A JP7339062B2 (ja) | 2019-08-09 | 2019-08-09 | 載置台及び基板処理装置 |
TW109125279A TW202111840A (zh) | 2019-08-09 | 2020-07-27 | 載置台及基板處理裝置 |
KR1020200094281A KR20210018079A (ko) | 2019-08-09 | 2020-07-29 | 적재대 및 기판 처리 장치 |
US16/943,600 US20210043489A1 (en) | 2019-08-09 | 2020-07-30 | Placement stage and substrate processing apparatus |
CN202010760225.2A CN112349645A (zh) | 2019-08-09 | 2020-07-31 | 载置台和基板处理装置 |
JP2023134840A JP2023164442A (ja) | 2019-08-09 | 2023-08-22 | 載置台 |
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WO2023068171A1 (ja) * | 2021-10-20 | 2023-04-27 | 東京エレクトロン株式会社 | プラズマ処理装置及び基板支持器 |
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US10950483B2 (en) * | 2017-11-28 | 2021-03-16 | Taiwan Semiconductor Manufacturing Co., Ltd. | Systems and methods for fixed focus ring processing |
CN115679271A (zh) * | 2021-07-22 | 2023-02-03 | 北京北方华创微电子装备有限公司 | 半导体工艺腔室 |
TWI814341B (zh) * | 2022-04-14 | 2023-09-01 | 相弘科技股份有限公司 | 具有防止異常放電之襯套設計的晶圓承載裝置 |
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