JP2021017378A - Method for manufacturing hollow structural member - Google Patents

Abstract

To provide a method for easily producing a hollow structural member having a thick hollow structure.SOLUTION: A method of this invention for producing a hollow structural member 30 includes following steps of: preparing a plurality of ceramic sheets 11, 12 which contain at least ceramic powder and binder and are formed into a sheet shape; forming a through-hole 12a, a notch 12b or a recess 12c in at least one ceramic sheet 12 of the plurality of ceramic sheets 11, 12; laminating the plurality of ceramic sheets 11, 12 in the thickness direction to manufacture a ceramic sheet laminate 10 having a hollow structure; heating and integrating the ceramic sheet laminate 10 to manufacture a hollow structure 20 comprising a ceramic temporary sintered body or a ceramic sintered body having a hollow structure; placing the ceramic powder 21 on at least one surface in the thickness direction of the hollow structure 20 and heating it while pressing it in the thickness direction, thereby manufacturing the hollow structure member 30 comprising a ceramic sintered body in which the hollow structure 20 and a portion derived from the ceramic powder 21 are integrated.SELECTED DRAWING: Figure 1

Description

The present invention relates to a method for producing a hollow structural member.

In semiconductor manufacturing equipment, heaters, susceptors, etc. that heat a substrate placed on the surface have electrodes built in the ceramic base material, and a hollow structure flow path through which a cooling medium for cooling the ceramic base material flows. It is provided with a hollow structural member.

In Patent Document 1, in the hollow structure of such a hollow structure, a recess is formed in the joint surface of at least one ceramic sintered body, and a plurality of ceramic sintered bodies are diffusion-bonded (solid-state bonding). It was formed as being derived from the recess.

Further, in Patent Document 2, a through hole, a notch or a recess is formed in at least one of a plurality of ceramic sheets, and a ceramic sheet laminate formed by laminating these ceramic sheets in the thickness direction is fired. By doing so, a ceramic sintered body having a hollow structure derived from the through hole, notch or recess was formed.

Japanese Unexamined Patent Publication No. 2012-71995 Japanese Unexamined Patent Publication No. 2007-12795

However, since the ceramic sintered body has a high hardness, it is difficult to polish it so that the surface roughness of the joint surface becomes small enough to allow diffusion bonding.

Further, when forming a ceramic sheet laminate, in order to increase the thickness of the ceramic sheet laminate, it is necessary to laminate a large number of ceramic sheets, and it takes a long time to produce a ceramic sheet laminate having a desired thickness. Problems such as occur.

The present invention has been made in view of such circumstances, and an object of the present invention is to provide a method capable of easily producing a hollow structure member having a thick hollow structure.

In the method for producing the first hollow structural member of the present invention, a plurality of ceramic sheets formed in a sheet shape containing at least ceramic powder and a binder are prepared, and at least one of the plurality of ceramic sheets is prepared. A step of forming through holes, cutouts or recesses in the ceramic sheet and laminating the plurality of ceramic sheets in the thickness direction to prepare a ceramic sheet laminate having a hollow structure, and heating the ceramic sheet laminate. A step of manufacturing a hollow structure made of a ceramic calcined body or a ceramic sintered body which is integrated and has a hollow structure, and a ceramic powder is placed on at least one surface of the hollow structure in the thickness direction and then in the thickness direction. It is characterized by including a step of producing a hollow structural member made of a ceramic sintered body in which the hollow structure and a portion derived from the ceramic powder are integrated by heating while pressurizing.

According to the first method for producing a hollow structure member of the present invention, a hollow structure member made of a ceramic sintered body in which a hollow structure and a portion derived from ceramic powder are integrated is produced. While maintaining the hollow structure in the hollow structure, the hollow structure member is thicker than the hollow structure by the portion derived from the ceramic powder. This makes it possible to easily manufacture a hollow structure member having a thick hollow structure.

In the method for producing the second hollow structural member of the present invention, a plurality of ceramic sheets formed in a sheet shape containing at least ceramic powder and a binder are prepared, and at least one of the plurality of ceramic sheets is prepared. A step of forming through holes, cutouts or recesses in the ceramic sheet and laminating the plurality of ceramic sheets in the thickness direction to prepare a ceramic sheet laminate having a hollow structure, and heating the ceramic sheet laminate. A ceramic molded body formed by integrating and producing a hollow structure made of a ceramic calcined body or a ceramic sintered body having a hollow structure, and molding ceramic powder on at least one surface of the hollow structure in the thickness direction. Alternatively, the hollow structure and the ceramic molded body or the ceramic molded body are formed by superimposing a degreased body made by heating the ceramic molded body or a ceramic heated body made of a ceramic calcined body and heating the ceramic molded body while pressurizing in the thickness direction. It is characterized by including a step of producing a hollow structural member made of a ceramic sintered body in which a portion derived from the ceramic heating body is integrated.

According to the second method for manufacturing a hollow structure member of the present invention, a hollow structure member made of a ceramic sintered body in which a hollow structure and a portion derived from a ceramic molded body or a ceramic heating body are integrated is manufactured. The hollow structure member is thicker than the hollow structure by the portion derived from the ceramic molded body or the ceramic heating body while maintaining the hollow structure in the hollow structure. This makes it possible to easily manufacture a hollow structure member having a thick hollow structure.

In the present invention, the hollow structure in the hollow structure or the hollow structure member is a structure having a space that is closed inside the hollow structure or the hollow structure member and does not communicate with the outside, as well as in the hollow structure or the hollow structure member. It is meant to include a structure having a space that opens at the peripheral edge and communicates with the outside.

In the method for producing the first or second hollow structure member of the present invention, it is preferable to produce the hollow structure by heating the ceramic sheet laminate at normal pressure and integrating them.

In this case, it is possible to maintain the hollow structure in the ceramic sheet laminated body by the hollow structure, and by extension, the hollow structure member in a state where the hollow structure is held without losing its shape.

The flowchart which shows the manufacturing method of the hollow structure member which concerns on 1st Embodiment of this invention. Schematic cross-sectional view showing a ceramic sheet laminate. A schematic cross-sectional view showing a state of being arranged in a hollow structure and a ceramic powder mold. Schematic cross-sectional view showing a hollow structural member. FIG. 6 is a schematic cross-sectional view showing another aspect of the ceramic sheet laminate. FIG. 3 is a schematic cross-sectional view showing still another aspect of the ceramic sheet laminate. FIG. 6 is a schematic cross-sectional view showing a ceramic sheet laminate in the method for producing a hollow structural member according to a second embodiment of the present invention. A schematic cross-sectional view showing a state in which a hollow structure and a ceramic molded body or a ceramic heated body are arranged in a mold. Schematic cross-sectional view showing a hollow structural member. The schematic cross-sectional view which shows the hollow structure member of Example 1. FIG. The schematic cross-sectional view which shows the hollow structure member of Example 4. FIG. FIG. 6 is a schematic cross-sectional view showing a hollow structural member of Example 5.

A method for manufacturing the hollow structural member 30 according to the embodiment of the present invention will be described with reference to the drawings. In the drawings, the hollow structural member 30 and the constituent elements are deformed in order to clarify them, and do not represent the actual ratio, and the directions such as up and down are merely examples.

As shown in FIG. 1, the method for manufacturing the hollow structure member 30 according to the first embodiment of the present invention includes a ceramic sheet laminate forming step STEP1, a hollow structure manufacturing step STEP2, and a hollow structure member manufacturing step STEP3. There is.

Green sheet laminate manufacturing step STEP1 is a step of manufacturing a ceramic sheet laminate 10 having a hollow structure by a sheet lamination method with reference to FIG. 2A. Specifically, a plurality of ceramic sheets 11 and 12 formed in a sheet shape containing at least ceramic powder and a binder are prepared, and at least one of the ceramic sheets 11 and 12 has a thickness. This is a step of forming a through hole 12a in the direction and laminating the plurality of ceramic sheets 11 and 12 in the thickness direction (vertical direction in FIG. 2A) to produce a ceramic sheet laminate 10 having a hollow structure. The ceramic sheets 11 and 12 may be laminated via a bonding agent such as an adhesive.

In the ceramic sheet laminate 10, at least one ceramic sheet 11 having no through hole 12a is arranged on both sides of the ceramic sheet 12 having the through hole 12a formed in the thickness direction. As a result, the ceramic sheet laminate 10 has a hollow structure having a hollow space S that does not communicate with the outside.

As shown in FIG. 3A, at least one of the ceramic sheets 11 and 12 is formed with a notch 12b penetrating in the thickness direction, and the notch 12b is formed in the ceramic sheet laminate 10. At least one ceramic sheet 11 without a notch 12b or a through hole 12a may be arranged on both sides of the ceramic sheet 12 in the thickness direction. Also by this, the ceramic sheet laminate 10 forms a hollow structure having a hollow space S communicating with the outside on the side surface thereof.

Further, as shown in FIG. 3B, at least one of the ceramic sheets 11 and 12 is formed with a recess 12c that does not penetrate in the thickness direction, and the side of the ceramic sheet laminate 10 on which the recess 12c is formed is formed. At least one ceramic sheet 11 may be arranged so as to make surface contact with the surface of the ceramic sheet 12.

Further, although not shown, a recess may be formed in the surface-contacting ceramic sheet 11 at a position facing the recess 12c or at a position unrelated to the position of the recess 12c. Further, the recess 12c may be opened to the outside on the side surface of the ceramic sheet 12, or may be closed without being opened to the outside.

In addition to those exemplified above, the ceramic sheet laminate 10 may have any hollow structure, for example, one or a plurality of hollow spaces that are closed inside or communicate with the outside on any surface. It may have S. Further, a core may be inserted from resin or the like inside the through hole 12a, the notch 12b and the recess 12c. This makes it possible to further improve the maintenance of the hollow space S in the hollow structure manufacturing step STEP2.

Further, the hollow space may communicate with the outside on the surface of the ceramic sheet laminate 10 in the thickness direction. However, when the hollow space S is opened on the surface on which the ceramic powder 21 is placed in the hollow structure manufacturing step STEP2, the ceramic powder 21 flows into the hollow space by inserting a core made of resin or the like. It is preferable to prevent this.

Ceramic sheets 11 and 12, aluminum nitride (AlN), yttrium oxide _{(Y 2 O} 3), alumina _{(Al 2 O} 3), sintering aid in ceramic powder such as silicon carbide (SiC), a binder such as an organic binder It is formed into a thin plate by using a known method such as a doctor blade method by mixing a material to which or a plasticizer is added with a solvent, and is also called a ceramic green sheet or the like.

The thickness of the ceramic sheets 11 and 12 is 0.1 mm or more and 2.0 mm or less, preferably 0.3 mm or more and 0.7 mm or less. The thickness and the like of the plurality of ceramic sheets 11 and 12 may be different. Further, the number or total thickness of the ceramic sheets 11 and 12 constituting the ceramic sheet laminate 10 is not particularly limited, but the ceramic sheet 11 is heated when the ceramic sheet laminate 10 is heated in the hollow structure manufacturing step STEP2. The thickness of the ceramic sheet laminate 10 is preferably 20 mm or less, and more preferably 10 mm or less so that peeling or the like does not occur between 12 and 12 and the whole is similarly heated and integrated.

Further, a metal or a material containing a metal may be embedded in the ceramic laminate 10 in order to form a hollow structural member 30 that functions as an internal electrode or the like. For example, the conductor paste may be applied on the ceramic sheets 11 and 12 by printing or the like, and the ceramic sheets 11 and 12 may be stacked on the conductive paste. Further, through holes or recesses may be formed in the ceramic sheets 11 and 12, and a mesh metal, a foil-like metal, or the like may be arranged therein, or a conductor paste may be filled by printing or the like.

Hollow structure manufacturing step STEP2 is a step of heating and integrating the ceramic sheet laminate 10 to prepare the hollow structure 20 having a hollow structure with reference to FIG. 2B.

Specifically, the ceramic sheet laminate 10 is heated at 900 ° C. or higher at a temperature lower than the sintering temperature at which the ceramic particles contained in the ceramic sheets 11 and 12 start necking and sintering proceeds due to the volume diffusion of the particles. A hollow structure 20 having a hollow structure made of a ceramic calcined body is produced. Alternatively, the ceramic sheet laminate 10 is made of a ceramic sintered body by heating at 900 ° C. or higher at a temperature equal to or higher than the sintering temperature at which sintering proceeds due to volume diffusion of ceramic particles contained in the ceramic sheets 11 and 12. A hollow structure 20 having a hollow structure is produced.

In the hollow structure manufacturing step STEP2, it is preferable to heat the ceramic sheet laminated body 10 at normal pressure in a slightly pressurized state, for example, to the extent that a weight is placed. As a result, the hollow structure in the ceramic sheet laminate 10 is maintained in the hollow structure 20 in a state where the shape is maintained without being deformed.

In the hollow structure member manufacturing step STEP3, referring to FIGS. 2B and 2C, the ceramic powder 21 is placed on at least one surface of the hollow structure 20 in the thickness direction, and the ceramic powder 21 is heated while being pressurized in the thickness direction. This is a step of producing a hollow structural member 30 made of a ceramics sintered body in which a hollow structure 20 and a portion derived from the ceramic powder 21 are integrated.

The ceramic powder 21 is prepared by appropriately adding an additive such as a sintering aid and an organic binder and an additive such as a plasticizer to the ceramic powder used as the raw material of the ceramic sheets 11 and 12 and mixing them to prepare a molding raw material. It is made into powder by pressure molding using a molding material. The mixing method may be either wet or dry, and for example, a mixer such as a ball mill or a vibration mill can be used.

In addition, a metal or a material containing a metal may be embedded in the ceramic powder 21 in order to form a hollow structural member 30 that functions as an internal electrode or the like. For example, a mesh metal, a foil-like metal, or the like may be embedded in the ceramic powder 21.

In the hollow structure member manufacturing step STEP3, heating and pressurization may be performed by using a hot press method. In this case, the hollow structure 20 is placed in the mold, the mold above the hollow structure 20 is filled with the ceramic powder, and then the ceramic particles contained in the ceramic sheets 11 and 12 and the ceramic powder 21 are subjected to uniaxial pressurization. Heating is performed at a temperature higher than the sintering temperature at which sintering proceeds due to volume diffusion. Further, the ceramic powder 21 is spread in the lower part of the mold by a predetermined thickness, the hollow structure 20 is placed on the hollow structure 20, the ceramic powder is filled in the mold above the mold, and then uniaxial pressurization is performed. However, heating is performed at a temperature equal to or higher than the sintering temperature at which sintering proceeds due to volume diffusion of the ceramic particles contained in the ceramic sheets 11 and 12 and the ceramic powder 21.

As a result, the hollow structure member 30 made of a ceramic sintered body in which the hollow structure 20 and the portion derived from the ceramic powder 21 are integrally sintered is produced. The hollow structure member 30 is thicker than the hollow structure 20 by the portion derived from the ceramic powder 21 while maintaining the hollow space S in the hollow structure 20.

Hereinafter, the method for manufacturing the hollow structure member 30 according to the second embodiment of the present invention is different from the method for manufacturing the hollow structure member 30 according to the first embodiment described above in the hollow structure member manufacturing step STEP3.

In the second embodiment of the present invention, in the hollow structure member manufacturing step STEP3, the above-mentioned ceramic powder 21 is formed on at least one surface of the hollow structure 20 in the thickness direction with reference to FIGS. 4B and 4C. By superimposing the ceramic molded body 22 or the heated ceramics heated body 23 and heating the ceramic molded body 22 while pressurizing in the thickness direction, the hollow structure 20 and the ceramic molded body 22 or the ceramic heated body 23 are formed. This is a step of producing a hollow structural member 30 made of a ceramics sintered body in which the derived portion is integrated.

The ceramic molded body 22 is formed by forming a ceramic sheet powder 21 into a predetermined shape using a mold or the like. In addition, a metal or a material containing a metal may be embedded in the ceramic powder 21 in order to form a hollow structural member 30 that functions as an internal electrode or the like, and these may be incorporated in the ceramic molded body 22.

The ceramic heating body 23 is produced by heating the ceramic molded body 22. Specifically, the ceramic molded body 22 is made of a degreased body by heating the ceramic molded body 22 at a temperature of 500 ° C. or higher and lower than 900 ° C. in an atmosphere of air or nitrogen gas to perform degreasing treatment. Alternatively, the ceramic molded body 22 is heated at 900 ° C. or higher at a temperature lower than the sintering temperature at which the ceramic particles contained in the ceramic powder 21 start necking and sintering proceeds due to the volume diffusion of the particles. A ceramic heating body 23 made of a calcined body is produced.

In the hollow structure member manufacturing step STEP3, heating and pressurization may be performed by using a hot press method. In this case, the hollow structure 20 is placed in the mold, the ceramic molded body 22 or the ceramic heating body 23 is placed in the mold above the hollow structure 20, and then the ceramics contained in the ceramic powder 31 are subjected to uniaxial pressurization. Heating is performed at a temperature higher than the sintering temperature at which sintering proceeds by volume diffusion of the particles. Further, the ceramic molded body 22 or the ceramic heating body 23 is placed in the lower part of the mold, the hollow structure 20 is placed on the ceramic molded body 22, and another ceramic molded body 22 or the ceramic heating body is placed in the mold above the hollow structure 20. After placing 23, while performing uniaxial pressurization, heating is performed at a temperature equal to or higher than the sintering temperature at which sintering proceeds by volume diffusion of ceramic particles.

As a result, the hollow structure member 30 made of a ceramic sintered body in which the hollow structure 20 and the portion derived from the ceramic molded body 22 or the ceramic heating body 23 are integrally sintered is produced. The hollow structure member 30 is thicker than the hollow structure 20 by the portion derived from the ceramic molded body 22 or the ceramic heating body 23 while maintaining the hollow space S in the hollow structure 20. ..

Hereinafter, with reference to FIGS. 5 to 7, as Examples 1 to 4, hollow structural members 40 and 50 having a diameter of 80 mm, a thickness of 15 mm, and a cross section of the hollow space S having a side of 5 mm are produced, and Examples are made. As No. 5, a hollow structural member 60 having a diameter of 330 mm, a thickness of 15 mm, and a hollow space S having a cross section of 5 mm on a side was produced.

(Example 1)
As step 1 of the ceramic sheet laminate forming step STEP1, a ceramic sheet laminate 10 is produced by laminating a plurality of ceramic sheets 11 and 12 having a thickness of 0.65 mm using aluminum nitride (AlN) as a main raw material with reference to FIG. 2A. did. The plurality of green sheets 11 and 12 used here are a ceramic sheet 11 on which a tungsten paste serving as an electrode 42 (see FIG. 5) is printed on the surface, and a ceramic sheet 12 having a through hole 12a having a diameter of 5 mm formed by punching. And an unprocessed ceramic sheet 11 are included. The ceramic sheet laminate 10 was produced by laminating these plurality of green sheets 11 and 12 in a desired order.

Next, as the hollow structure manufacturing step STEP2, the ceramic sheet laminate 10 is fired at 1800 ° C. at a temperature at which sintering by volume diffusion of particles proceeds at normal pressure in a reducing atmosphere, and is processed after firing to have a diameter of 80 mm. , A hollow structure 20 made of a ceramic sintered body having a thickness of 10 mm was produced.

Next, as the hollow structure member manufacturing step STEP3, after the hollow structure 20 is installed in the carbon mold, the carbon mold is filled with ceramic powder 21 containing aluminum nitride as a main component, and the temperature is raised to 1850 ° C. while applying a pressure of 2 MPa. Uniaxial hot press firing to heat was performed. As a result, as shown in FIG. 5, the hollow structure member 40 in which the portion 41 derived from the hollow structure 20 and the portion 43 derived from the ceramic powder 21 on one surface side in the thickness direction of the hollow structure 20 are integrated. Was produced. An electrode 42 is built in a portion 41 of the hollow structure member 40 derived from the hollow structure 20.

(Example 2)
With reference to FIG. 4B, this was carried out except that the ceramic heating body 23 made of a degreased body was placed on the hollow structure 20 instead of filling the carbon mold with the ceramic powder 21 containing aluminum nitride as a main component. The hollow structural member 40 was produced by the same method as in Example 1.

(Example 3)
A plain weave mesh with a wire diameter of 0.1 mm and a mesh size of 50 made of molybdenum (Mo) between the hollow structure 20 and the ceramic heating body 23 without using the ceramic sheet 11 on which the tungsten paste used as the electrode 42 is printed on the surface. A hollow structural member was produced by the same method as in Example 2 except that the electrode was placed. Although not shown, the hollow structure member has a structure in which an electrode is interposed between a portion derived from the hollow structure 20 and a portion derived from the ceramic heating body 23.

(Example 4)
After producing the hollow structure member 20 by the same method as in Example 1, the hollow structure 20 was installed in a carbon mold in a state of being turned upside down. Next, the other surface side of the hollow structure 20 in the carbon mold was filled with ceramic powder 21 containing aluminum nitride as a main component, and uniaxial hot press firing was performed by heating to 1850 ° C. while applying a pressure of 2 MPa.

As a result, as shown in FIG. 6, the hollow structure member 50 in which the portion 51 derived from the hollow structure 20 and the portions 53 and 54 derived from the ceramic powder 21 on both sides in the thickness direction of the hollow structure 20 are integrated. Was produced. According to Example 4, it was confirmed that a thicker hollow structural member 50 can be easily produced.

(Example 5)
As shown in FIG. 7, the hollow structure member 60 of the fifth embodiment has the hollow structure of the first embodiment except that the electrode 63 is embedded inside the portion 62 derived from the ceramic powder 21 and the diameter thereof is 330 mm. It is the same as the member 40.

In Example 5, a hollow structure 20 having an electrode 64 built therein is produced in the same manner as in Example 1, and after installing the hollow structure 20 in a carbon mold, a cellamics powder 21 containing aluminum nitride as a main component is placed in the carbon mold. (See FIG. 2B) is filled, and an electrode 63 made of molybdenum, a wire diameter of 0.1 mm, and a plain weave mesh having a mesh size of 50 is placed on the electrode 63, and aluminum nitride is the main component on the electrode 63. After filling the seramics powder 21, uniaxial hot press firing was performed by heating to 1850 ° C. while applying a pressure of 2 MPa.

As a result, as shown in FIG. 7, electrodes 63 and 64 are embedded in the portion 61 derived from the hollow structure 20 and the portion 62 derived from the ceramic powder 21 on one surface side in the thickness direction of the hollow structure 20, respectively. The hollow structural member 60 was produced. According to the hollow structure member 60 of the fifth embodiment, one embedded electrode can function as a heater electrode, and the other electrode can function as an electrostatic adsorption electrode or a high frequency generation electrode.

10 ... Ceramic sheet laminate, 11, 12 ... Ceramic sheet, 12a ... Through hole, 12b ... Notch, 12c ... Recessed structure, 20 ... Hollow structure, 21 ... Ceramic powder, 22 ... Ceramic molded body, 23 ... Ceramic heating body , 30, 40, 50, 60 ... Hollow structural member, 41, 51, 61 ... Part derived from hollow structure, 42, 52, 63, 64 ... Electrode, 43, 53, 54, 62 ... Derived from ceramic powder Part, S ... Hollow space.

Claims (3)

A plurality of ceramic sheets formed into a sheet containing at least ceramic powder and a binder are prepared, and through holes, notches or recesses are formed in at least one of the plurality of ceramic sheets. A step of laminating the plurality of ceramic sheets in the thickness direction to prepare a ceramic sheet laminate having a hollow structure, and
A step of heating and integrating the ceramic sheet laminate to produce a hollow structure made of a ceramic calcined body or a ceramic sintered body having a hollow structure.
Ceramic powder is placed on at least one surface of the hollow structure in the thickness direction and then heated while being pressurized in the thickness direction to integrate the hollow structure and the portion derived from the ceramic powder. A method for producing a hollow structural member, which comprises a step of producing a hollow structural member made of a sintered body. A plurality of ceramic sheets formed into a sheet containing at least ceramic powder and a binder are prepared, and through holes, notches or recesses are formed in at least one of the plurality of ceramic sheets. A step of laminating the plurality of ceramic sheets in the thickness direction to prepare a ceramic sheet laminate having a hollow structure, and
A step of heating and integrating the ceramic sheet laminate to produce a hollow structure made of a ceramic calcined body or a ceramic sintered body having a hollow structure.
A ceramic molded body formed by molding ceramic powder or a degreased body formed by heating the ceramic molded body or a ceramic heated body made of a ceramic calcined body is superposed on at least one surface of the hollow structure in the thickness direction. A step of producing a hollow structural member made of a ceramic sintered body in which the hollow structure and the ceramic molded body or a portion derived from the ceramic heated body are integrated by heating while pressurizing in the thickness direction. A method for producing a hollow structural member, which comprises. The method for producing a hollow structure member according to claim 1 or 2, wherein the hollow structure is produced by heating the ceramic sheet laminate at normal pressure and integrating them.

Images