JP2021014939A - 加熱装置 - Google Patents
加熱装置 Download PDFInfo
- Publication number
- JP2021014939A JP2021014939A JP2019128936A JP2019128936A JP2021014939A JP 2021014939 A JP2021014939 A JP 2021014939A JP 2019128936 A JP2019128936 A JP 2019128936A JP 2019128936 A JP2019128936 A JP 2019128936A JP 2021014939 A JP2021014939 A JP 2021014939A
- Authority
- JP
- Japan
- Prior art keywords
- heating
- sheet
- plate
- pair
- housing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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- 238000010438 heat treatment Methods 0.000 title claims abstract description 245
- 239000000463 material Substances 0.000 claims abstract description 47
- 230000007246 mechanism Effects 0.000 claims abstract description 36
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 10
- 239000003795 chemical substances by application Substances 0.000 claims description 10
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 8
- 229910052751 metal Inorganic materials 0.000 claims description 7
- 239000002184 metal Substances 0.000 claims description 7
- 229910052757 nitrogen Inorganic materials 0.000 claims description 5
- 229910052799 carbon Inorganic materials 0.000 claims description 4
- 239000000919 ceramic Substances 0.000 claims description 4
- 239000010439 graphite Substances 0.000 claims description 4
- 229910002804 graphite Inorganic materials 0.000 claims description 4
- 230000005855 radiation Effects 0.000 claims description 4
- 238000012360 testing method Methods 0.000 description 24
- 239000011810 insulating material Substances 0.000 description 6
- 238000000034 method Methods 0.000 description 4
- 238000009423 ventilation Methods 0.000 description 4
- 238000004378 air conditioning Methods 0.000 description 3
- 230000002093 peripheral effect Effects 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 238000009529 body temperature measurement Methods 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 239000011491 glass wool Substances 0.000 description 2
- 239000011261 inert gas Substances 0.000 description 2
- 239000011490 mineral wool Substances 0.000 description 2
- 229920003002 synthetic resin Polymers 0.000 description 2
- 239000000057 synthetic resin Substances 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 239000010425 asbestos Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 239000007799 cork Substances 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000002845 discoloration Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 229910052500 inorganic mineral Inorganic materials 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000011707 mineral Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000004745 nonwoven fabric Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000004080 punching Methods 0.000 description 1
- 229910052895 riebeckite Inorganic materials 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
Landscapes
- Tunnel Furnaces (AREA)
- Furnace Details (AREA)
- Control Of Resistance Heating (AREA)
- Resistance Heating (AREA)
Abstract
Description
12a 開口
10 ハウジング
20A、20B 一対の加熱部
21 加熱板
21a 放射剤層
22 面状ヒータ
30 支持板(支持部材)
40 ロッドレスシリンダ(搬出入機構)
51 高さ調整機構(調整機構)
52 雰囲気置換用供給ノズル
S シート状物
PS 加熱開始位置
PE 加熱終了位置
Claims (7)
- シート状物を加熱するための加熱装置であって、
前記シート状物が搬出入される開口が形成されたハウジングと、
前記ハウジング内に設けられ、所定の間隔をあけて配置される一対の加熱部と、
前記シート状物を支持する支持部材と、
前記一対の加熱部の外に設けられ、前記支持部材を前記一対の加熱部の間の空間に対して搬出入する搬出入機構とを備える加熱装置。 - 前記搬出入機構は、前記ハウジングの外に配置される請求項1に記載の加熱装置。
- 前記各加熱部は、
前記シート状物の各面に対向する加熱板と、
前記加熱板を加熱するヒータとを備える請求項1または2に記載の加熱装置。 - 前記加熱板は、金属板、セラミック板またはカーボングラファイトを含む板である請求項3に記載の加熱装置。
- 前記加熱板は、前記シート状物と対向する面に遠赤外線を放射する放射剤が塗布された放射剤層を有する請求項3または4に記載の加熱装置。
- 前記一対の加熱部の間隔を調整する調整機構をさらに備える請求項1から5のいずれかに記載の加熱装置。
- 前記ハウジング内に窒素を充填させるための窒素供給ノズルをさらに備える請求項1から6のいずれかに記載の加熱装置。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2019128936A JP7318378B2 (ja) | 2019-07-11 | 2019-07-11 | 加熱装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2019128936A JP7318378B2 (ja) | 2019-07-11 | 2019-07-11 | 加熱装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2021014939A true JP2021014939A (ja) | 2021-02-12 |
JP7318378B2 JP7318378B2 (ja) | 2023-08-01 |
Family
ID=74530575
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2019128936A Active JP7318378B2 (ja) | 2019-07-11 | 2019-07-11 | 加熱装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP7318378B2 (ja) |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01174891A (ja) * | 1987-12-28 | 1989-07-11 | Yamatake Honeywell Co Ltd | 加熱炉の被加熱物品移送装置 |
JPH0336488A (ja) * | 1989-06-30 | 1991-02-18 | Matsushita Electric Ind Co Ltd | 焼成炉 |
JP2003100651A (ja) * | 2001-09-26 | 2003-04-04 | Dainippon Screen Mfg Co Ltd | 基板熱処理装置 |
JP2006183886A (ja) * | 2004-12-27 | 2006-07-13 | Kyocera Corp | 焼成炉、及びこれを用いた被処理体の焼成方法、並びに太陽電池素子の製造方法 |
JP2006286222A (ja) * | 2005-03-31 | 2006-10-19 | Noritake Co Ltd | 真空加熱炉用プレート型遠赤外線ヒータ |
JP2012021688A (ja) * | 2010-07-13 | 2012-02-02 | Panasonic Electric Works Co Ltd | 加熱装置 |
JP2013053811A (ja) * | 2011-09-05 | 2013-03-21 | Ihi Corp | 加熱炉および連続加熱炉 |
-
2019
- 2019-07-11 JP JP2019128936A patent/JP7318378B2/ja active Active
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01174891A (ja) * | 1987-12-28 | 1989-07-11 | Yamatake Honeywell Co Ltd | 加熱炉の被加熱物品移送装置 |
JPH0336488A (ja) * | 1989-06-30 | 1991-02-18 | Matsushita Electric Ind Co Ltd | 焼成炉 |
JP2003100651A (ja) * | 2001-09-26 | 2003-04-04 | Dainippon Screen Mfg Co Ltd | 基板熱処理装置 |
JP2006183886A (ja) * | 2004-12-27 | 2006-07-13 | Kyocera Corp | 焼成炉、及びこれを用いた被処理体の焼成方法、並びに太陽電池素子の製造方法 |
JP2006286222A (ja) * | 2005-03-31 | 2006-10-19 | Noritake Co Ltd | 真空加熱炉用プレート型遠赤外線ヒータ |
JP2012021688A (ja) * | 2010-07-13 | 2012-02-02 | Panasonic Electric Works Co Ltd | 加熱装置 |
JP2013053811A (ja) * | 2011-09-05 | 2013-03-21 | Ihi Corp | 加熱炉および連続加熱炉 |
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JP7318378B2 (ja) | 2023-08-01 |
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