JP2021001824A - Surface property measuring device and surface property measurement method - Google Patents

Abstract

To provide a surface property measuring device and a surface property measurement method capable of accurately measuring a sectional shape along a vertical direction of an object to be measured by using an upward stylus and a downward stylus.SOLUTION: A surface property measurement method executes: an upward scanning step (step S2) of relatively moving a detector in the X-axis direction such that an upward stylus scans an object to be measured along the X-axis direction; a downward scanning step (step S4) of relatively moving a measurement arm in the X-axis direction such that a downward stylus scans an object to be measured along the X-axis direction; and a position correction step (step S3) of relatively moving the measurement arm in the Y-axis direction by an offset amount Δy in the Y-axis direction between the upward stylus and the downward stylus between the upward scanning step and the downward scanning step.SELECTED DRAWING: Figure 10

Description

The present invention relates to a surface texture measuring device and a surface texture measuring method.

Conventionally, a surface property measuring device for measuring the surface property of a device to be measured by scanning the surface of the object to be measured with a stylus is known. Such a surface texture measuring device includes a measuring arm supported by a rotating shaft and a stylus provided at the tip of the measuring arm, and the stylus in contact with the surface of the object to be measured is in the measuring direction (X-axis). It is displaced in the vertical direction (Z-axis direction) according to the surface height of the object to be measured while moving relative to the direction (Y-axis direction). The surface texture of the object to be measured is measured based on the change in the displacement of the stylus along the measurement direction.

Further, a type of surface texture measuring device including two styluses, an upward stylus and a downward stylus, is known so that the surface textures on both the upper and lower sides of the object to be measured can be easily measured (see, for example, Patent Document 1). .. In the surface texture measuring apparatus described in Patent Document 1, offset amounts Δx, Δy, and Δz are calculated as information indicating the mutual positional relationship between the upward stylus and the downward stylus. Then, the thickness of the object to be measured and the like are measured by correcting the relationship between the measurement data by the upward stylus and the measurement data by the downward stylus by the offset amount.

Japanese Unexamined Patent Publication No. 2012-211891

However, the surface texture measuring device described in Patent Document 1 does not eliminate the actual offset amount between the upward stylus and the downward stylus. Therefore, when an offset amount Δx or Δy exists between the upward stylus and the downward stylus, the contact position of each stylus with respect to the object to be measured is displaced in the X-axis direction or the Y-axis direction. In particular, when the contact position of each stylus is displaced (Δy) in a direction (for example, the Y-axis direction) orthogonal to the measurement direction (for example, the X-axis direction), the upward stylus and the downward stylus are viewed from the vertical direction. They will draw different scanning lines. That is, since the scanning lines of the upward stylus and the downward stylus do not overlap when viewed from the vertical direction, the cross-sectional shape (for example, the thickness and hole diameter of the object to be measured) along the Z-axis direction of the object to be measured is accurate. Cannot be evaluated.

An object of the present invention is to provide a surface texture measuring device and a surface texture measuring method capable of accurately evaluating a cross-sectional shape of an object to be measured along the vertical direction by using an upward stylus and a downward stylus.

The surface property measuring device of the present invention has a stage on which an object to be measured is placed, a measuring arm whose tip is in contact with the object to be measured and can be displaced in the vertical direction, and a measuring arm protruding upward from the tip. The upward stylus provided as described above, the downward stylus provided so as to project downward from the tip portion, and the first direction and the second direction orthogonal to the vertical direction and the vertical direction and orthogonal to each other. A relative movement mechanism capable of relatively moving the measuring arm and the stage along each direction, and the upward stylus or the downward stylus scanning the object to be measured along the first direction. A first scanning control unit that controls the relative movement mechanism is provided, and the first scanning control unit is after either the upward stylus or the downward stylus scans the object to be measured. Before the other scans the object to be measured, the measuring arm is relatively moved in the second direction by the amount of the offset amount in the second direction between the upward stylus and the downward stylus. It is a feature.
Information on the amount of offset between the upward stylus and the downward stylus can be obtained by using a conventional technique such as Japanese Patent Application Laid-Open No. 2012-211891.

In such a configuration, even if there is an offset amount in the second direction between the upward stylus and the downward stylus, the upward stylus is used when measuring the object to be measured along the first direction. The position of contact with the object to be measured and the position of the downward stylus with contact with the object to be measured can be aligned with each other in the second direction. Therefore, since the scanning lines of each stylus can be overlapped with respect to the object to be measured when viewed from the vertical direction, the cross-sectional shape of the object to be measured along the vertical direction and the first direction can be accurately evaluated.

The surface texture measuring apparatus of the present invention further includes a second scanning control unit that controls the relative movement mechanism so that the upward stylus or the downward stylus scans the object to be measured along the second direction. In the second scanning control unit, one of the upward stylus and the downward stylus scans the object to be measured, and before the other scans the object to be measured, the upward stylus is upward. It is preferable to move the measuring arm relative to the first direction by the amount of the offset amount between the stylus and the downward stylus in the first direction.
According to such a configuration, it is possible to obtain the effect of exchanging the first direction and the second direction described above. That is, even when there is an offset amount in the first direction between the upward stylus and the downward stylus, when the object to be measured is measured along the second direction, the subject is viewed from the vertical direction. The scanning lines of each stylus on the object to be measured can be overlapped. Therefore, the cross-sectional shape of the object to be measured along the vertical direction and the second direction can be accurately evaluated.

In the surface property measuring method of the present invention, a stage on which an object to be measured is placed, a measuring arm whose tip is in contact with the object to be measured and can be displaced in the vertical direction, and a measuring arm projecting upward from the tip. The upward stylus provided as described above, the downward stylus provided so as to project downward from the tip portion, and the first direction and the second direction orthogonal to the vertical direction and the vertical direction and orthogonal to each other. In a surface property measuring device including a relative moving mechanism capable of moving the measuring arm relative to the stage along each direction, the upward stylus moves the object to be measured along the first direction. An upward scanning step that moves the measuring arm relative to the first direction so as to scan, and the measuring arm so that the downward stylus scans the object to be measured along the first direction. The amount of offset in the second direction between the upward stylus and the downward stylus between the downward scanning step for relative movement in the first direction and the upward scanning step and the downward scanning step. It is characterized in that a position correction step of relatively moving the measuring arm in the second direction is executed.
According to such a method, the same effect as the effect of the surface texture measuring device described above can be obtained.

The perspective view which shows the surface property measuring apparatus which concerns on one Embodiment of this invention. The schematic diagram which shows the detector of the said embodiment. The block diagram which shows the control part of the said embodiment. The figure which shows the vicinity of the tip of the measuring arm enlarged. The figure which shows the vicinity of the tip of the measuring arm enlarged. The schematic diagram which shows the state of measuring the reference sphere in the Y-axis direction. The schematic diagram which shows the state of measuring the reference sphere in the X-axis direction. The schematic diagram for demonstrating the offset calculation method of the said Embodiment. The schematic diagram for demonstrating the offset calculation method of the said Embodiment. The flowchart for demonstrating the surface texture measurement method (X-axis direction measurement) of the said embodiment. The schematic diagram which shows the state of scanning the cylinder which is an example of an object to be measured. The schematic diagram which shows the state of scanning the cylinder which is an example of an object to be measured. The schematic diagram which shows the state in which the upward stylus or the downward stylus is brought into contact with a cylinder which is an example of an object to be measured. The flowchart for demonstrating the surface texture measurement method (Y-axis direction measurement) of the said Embodiment. The schematic diagram which shows the state which the upward stylus or the downward stylus was brought into contact with a sphere which is an example of an object to be measured.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.
In FIG. 1, the surface texture measuring device 1 of the present embodiment measures the surface texture of the object to be measured by copying and scanning the surface of the object to be measured, and the device main body 10 on which the object to be measured is set. A control unit 50 that controls the apparatus main body 10 is provided.

[Device body]
The apparatus main body 10 of the present embodiment has substantially the same configuration as the conventional one. Hereinafter, the configuration of the apparatus main body 10 will be briefly described with reference to FIGS. 1 and 2. In the present embodiment, the vertical direction of the apparatus main body 10 is the Z-axis direction, one direction orthogonal to the Z-axis is the Y-axis direction, and the directions orthogonal to the Z-axis direction and the Y-axis direction are the X-axis directions. ..

As shown in FIG. 1, the apparatus main body 10 is a relative that moves the base 11, the stage 12 installed on the base 11, the detector 20 including the measuring arm 24, and the stage 12 and the detector 20 relative to each other. It includes a moving mechanism 40.

The relative movement mechanism 40 includes a Y-axis drive mechanism 41 that moves the stage 12 in the Y-axis direction with respect to the base 11, a column 42 erected on the upper surface of the base 11, and a Z slider 43 supported by the column 42. A Z-axis drive mechanism 44 that moves the Z slider 43 up and down in the Z-axis direction with respect to the column 42, and an X-axis drive mechanism 47 that moves the detector 20 in the X-axis direction with respect to the Z slider 43.
The Y-axis drive mechanism 41, the Z-axis drive mechanism 44, and the X-axis drive mechanism 47 each include an actuator such as a feed screw mechanism and a sensor for detecting a drive amount in each axial direction.

As shown in FIG. 2, the detector 20 measures with a bracket 22 suspended and supported by an X-axis drive mechanism 47 and a measuring arm 24 rotatably supported by a rotating shaft 23 provided on the bracket 22. It includes an upward stylus 26A and a downward stylus 26B provided at the tip end portion 241 of the arm 24. The upward stylus 26A and the downward stylus 26B may be collectively referred to as the stylus 26A and 26B.

The upward stylus 26A protrudes upward from the tip portion 241 of the measuring arm 24, and the downward stylus 26B protrudes downward from the tip portion 241 of the measuring arm 24. When the styli 26A and 26B provided on the tip portion 241 of the measuring arm 24 are displaced in the vertical direction, the measuring arm 24 rotates with the rotation shaft 23 as a fulcrum.

Further, the detector 20 applies an urging force to the displacement amount detecting unit 27 for detecting the vertical displacement amount of the stylus 26A and 26B and the tip portion 241 of the measuring arm 24, and applies the urging force upward or downward. It is further provided with a measuring force applying means (not shown) for switching to.

In such a device main body 10, the detector 20 including the measuring arm 24 is moved in the Y-axis direction with respect to the stage 12 or while the upward stylus 26A or the downward stylus 26B is in contact with the surface to be measured. Move relative to the X-axis direction. In the present embodiment, "moving the detector 20 (or the measuring arm 24) relative to the stage 12 in the Y-axis direction" means that the Y-axis drive mechanism 41 moves the stage 12 in the Y-axis direction. The phrase "moving the detector 20 (or the measuring arm 24) relative to the stage 12 in the X-axis direction" means that the X-axis drive mechanism 47 moves the detector 20 in the X-axis direction. To do.
When the detector 20 moves relative to the stage 12 in the Y-axis direction or the X-axis direction, the upward stylus 26A or the downward stylus 26B is displaced according to the Z-axis direction position of the surface to be measured. Is scanned in the Y-axis direction or the X-axis direction. During this scanning, the displacement amount detecting unit 27 detects the displacement amount of the stylus 26A and 26B, so that measurement data indicating the position of the surface to be measured along the Y-axis direction or the X-axis direction in the Z-axis direction can be obtained.

[Control unit]
The control unit 50 will be described with reference to FIG. The control unit 50 is composed of a computer such as a personal computer, and includes a storage unit 51 composed of a memory or the like, and a calculation unit 52 composed of a CPU (Central Processing Unit) or the like. Then, the calculation unit 52 functions as a movement control unit 521, an offset amount calculation unit 522, and a shape analysis unit 523 by reading and executing the measurement program stored in the storage unit 51.

The movement control unit 521 controls the relative movement of the detector 20 with respect to the stage 12 by driving and controlling the relative movement mechanism 40. Further, the movement control unit 521 includes a Y-axis scanning control unit 521A (corresponding to the second scanning control unit of the present invention) and an X-axis scanning control unit 521B (corresponding to the first scanning control unit of the present invention). There is. The Y-axis scanning control unit 521A drives and controls the relative movement mechanism 40 so that the styli 26A and 26B scan the object to be measured in the Y-axis direction. The X-axis scanning control unit 521B drives and controls the relative movement mechanism 40 so that the styli 26A and 26B scan the object to be measured in the X-axis direction.
The offset amount calculation unit 522 calculates the offset amounts Δx, Δy, and Δz, which will be described later.
The shape analysis unit 523 analyzes the shape of the object to be measured (thickness, inner diameter, etc. of the object to be measured) based on the measurement data of the stylus 26A and 26B.
The storage unit 51 stores the measurement program, offset amounts Δx, Δy, Δz, measurement data, and the like.

Further, the control unit 50 may include an operation unit 53, a display unit 54, and the like.
The operation unit 53 is composed of, for example, a keyboard, a joystick, or the like, and can specify various operation commands and data input.
The display unit 54 displays the shape data of the object to be measured analyzed by the shape analysis unit 523.

[Offset amount calculation method]
4 and 5 are enlarged views of the vicinity of the tip portion 241 of the measuring arm 24. As shown in FIGS. 4 and 5, the X-axis direction and the Y-axis direction are between the tips 26A1 and 26B1 of the stylus 26A and 26B due to the mounting error of the stylus 26A and 26B with respect to the measuring arm 24. (Offset amounts Δx, Δy between styli 26A and 26B) may occur in each direction. Further, structurally, there is a deviation in the Z-axis direction (offset amount Δz between the stylus 26A and 26B) between the tip portions 26A1 and 26B1 of the stylus 26A and 26B.
In the present embodiment, the method for calculating the offset amounts Δx, Δy, Δz described above is the same as the method disclosed in, for example, Japanese Patent Application Laid-Open No. 2012-211891. The following will be briefly described.

First, as shown in FIG. 6, the downward stylus 26B scans the upper side surface of the reference sphere 9 set on the stage 12 in the Y-axis direction. Then, the scanning in the Y-axis direction is repeated while shifting the detector 20 by a predetermined pitch in the X-axis direction. As a result, a plurality of Y-axis upper shape measurement data of the reference sphere 9 can be obtained. The offset amount calculation unit 522 obtains the highest position among the plurality of Y-axis upper shape measurement data as the upper maximum diameter portion of the reference sphere 9.

Similarly, the upward stylus 26A scans the lower side surface of the reference sphere 9 set on the stage 12 in the Y-axis direction. Then, the scanning in the Y-axis direction is repeated while shifting the detector 20 by a predetermined pitch in the X-axis direction. As a result, a plurality of Y-axis lower shape measurement data of the reference sphere 9 can be obtained. The offset amount calculation unit 522 obtains the highest position among the plurality of Y-axis lower shape measurement data as the upper maximum diameter portion of the reference sphere 9.

Next, as shown in FIG. 7, the downward stylus 26B contacts the upper maximum diameter portion of the reference sphere 9 and scans the upper side surface of the reference sphere 9 in the X-axis direction. As a result, the X-axis upper shape measurement data of the reference sphere 9 can be obtained.
Similarly, the upward stylus 26A contacts the lower maximum diameter portion of the reference sphere 9 and scans the lower side surface of the reference sphere 9 in the X-axis direction. As a result, the X-axis lower shape measurement data of the reference sphere 9 can be obtained.

Next, as shown in FIG. 8, the offset amount calculation unit 522 sets the first center coordinate O1 obtained from the Y-axis upper shape measurement data and the second center coordinate O2 obtained from the Y-axis lower shape measurement data. calculate. Then, the difference in the Y-axis direction between the first center coordinate O1 and the second center coordinate O2 is calculated as the offset amount Δy of the upward stylus 26A and the downward stylus 26B in the Y-axis direction.
Further, as shown in FIG. 9, the offset amount calculation unit 522 calculates the third center coordinate O3 obtained from the X-axis upper shape measurement data and the fourth center coordinate O4 obtained from the X-axis lower shape measurement data. To do. Then, as the offset amount Δx in the Y-axis direction and the offset amount Δz in the Z-axis direction of the upward stylus 26A and the downward stylus 26B, the difference in the X-axis direction between the third center coordinate O3 and the fourth center coordinate O4 and The difference in the Z-axis direction is calculated respectively.
The offset amounts Δx, Δy, and Δz calculated as described above are stored in the storage unit 51.

〔Measuring method〕
The surface texture measuring device 1 of the present embodiment uses the offset amount Δy calculated above when measuring the object to be measured in the X-axis direction, and is described above when measuring the object to be measured in the Y-axis direction. The offset amount Δx calculated in is used.

(Measurement in X-axis direction)
Hereinafter, an example of the X-axis measurement method using the offset amount Δy will be described with reference to the flowchart shown in FIG.
In the following, as shown in FIGS. 11 and 12, a case where the inner diameter of the tubular body W1 which is an example of the object to be measured is measured along the axial direction will be described. In this case, the axes of the tubular body W1 are arranged parallel to the X-axis direction.

First, as shown in FIG. 13, the detector 20 is arranged so that the upward stylus 26A comes into contact with the reference position P1 of the cylinder W1 by operating the relative movement mechanism 40 (step S1). The reference position P1 corresponds to the uppermost portion of the inner peripheral surface of the tubular body W1 in the Y-axis direction.
In step S1, the relative movement mechanism 40 may be operated by the operator operating the operation unit 53 while visually observing the tubular body W1. Alternatively, the X-axis scanning control unit 521B may operate the relative movement mechanism 40 by analyzing the design information of the tubular body W1 and the measurement data in the Y-axis direction in advance.

Next, the X-axis scanning control unit 521B operates the X-axis drive mechanism 47, so that the upward stylus 26A scans the inner peripheral surface of the tubular body W1 in the X-axis direction as shown in FIG. 11 (step S2). Upward scanning step). During step S2, the displacement amount detecting unit 27 detects the displacement amount of the upward stylus 26A.

Next, the X-axis scanning control unit 521B operates the relative movement mechanism 40 to arrange the detector 20 so that the downward stylus 26B comes into contact with the reference position P2 of the cylinder W1 (step S3).
The reference position P2 of the present embodiment is the same position as the reference position P1 in the Y-axis direction. That is, the reference position P2 corresponds to the lowermost portion of the inner peripheral surface of the tubular body W1 in the Y-axis direction.

To specifically explain this step S3, first, the X-axis scanning control unit 521B operates the Z-axis drive mechanism 44 to separate the upward stylus 26A from the inner peripheral surface of the tubular body W1. Then, the X-axis scanning control unit 521B operates the X-axis drive mechanism 47 to arrange the detector 20 at the same position as the X-axis direction position in step S1 and operates the Y-axis drive mechanism 41 to operate the detector. 20 is moved in the Y-axis direction by an offset amount Δy (position correction step). Then, the Z-axis drive mechanism 44 is operated until the downward stylus 26B comes into contact with the inner peripheral surface of the tubular body W1.
When the detector 20 is moved by the offset amount Δy in step S3, it is moved to the side where the deviation of the downward stylus 26B with respect to the upward stylus 26A is eliminated.
As a result, the downward stylus 26B comes into contact with the reference position P2 of the tubular body W1.

Next, the X-axis scanning control unit 521B operates the X-axis drive mechanism 47, so that the downward stylus 26B scans the inner peripheral surface of the tubular body W1 in the X-axis direction as shown in FIG. 12 (step S4). Downward scanning step). During step S4, the displacement amount detecting unit 27 detects the displacement amount of the downward stylus 26B.

Next, the shape analysis unit 523 increases the measurement data of the inner peripheral surface of the tubular body W1 (upper measurement data) obtained in step S2 and the measurement data of the inner peripheral surface of the tubular body W1 obtained in step S4 (lower). Based on the side measurement data), it is calculated how the inner diameter of the tubular body W1 changes along the axial direction (X-axis direction) (step S5).
In step S5, the upper measurement data and the lower measurement data are corrected as disclosed in Japanese Patent Application Laid-Open No. 2012-211891. In this correction, by using the offset amounts Δx, Δy, and Δz between the styli 26A and 26B, a process of adjusting the interrelationship between the upper measurement data and the lower measurement data is performed.
With the above, the measurement in the X-axis direction of the tubular body W1 is completed.

(Measurement in Y-axis direction)
The above description of the X-axis direction measurement can be similarly applied to the Y-axis direction measurement by exchanging the X-axis direction and the Y-axis direction.
Hereinafter, an example of the Y-axis direction measurement will be described with reference to the flowchart shown in FIG. In the following, as shown in FIG. 15, a case where the outer peripheral surface of the sphere W2, which is an example of the object to be measured, is measured along a direction orthogonal to the axial direction (Y-axis direction) will be described.

First, by operating the relative movement mechanism 40, the downward stylus 26B is brought into contact with the reference position P3 on the surface of the sphere W2 (step S6). The reference position P3 of the sphere W2 corresponds to the uppermost portion of the surface of the sphere W2.
In step S6, the relative movement mechanism 40 may be operated by the operator operating the operation unit 53 while visually observing the sphere W2. Alternatively, the X-axis scanning control unit 521B may operate the relative movement mechanism 40 by analyzing the design information of the sphere W2, the measurement data in the Y-axis direction in advance, and the like.

Next, the Y-axis scanning control unit 521A operates the Y-axis drive mechanism 41, so that the downward stylus 26B scans the surface of the sphere W2 in the Y-axis direction (step S7; downward scanning step). During step S7, the displacement amount detecting unit 27 detects the displacement amount of the upward stylus 26A.

Next, the Y-axis scanning control unit 521A operates the relative movement mechanism 40 to bring the upward stylus 26A into contact with the reference position P4 of the sphere W2 (step S8).
Here, the reference position P4 of the present embodiment is the same position as the reference position P3 in the X-axis direction. That is, the reference position P4 is located on the line in the Y-axis direction passing through the lowermost portion of the surface of the sphere W2.

More specifically, the Y-axis scanning control unit 521A separates the downward stylus 26B from the surface of the sphere W2 by operating the Z-axis drive mechanism 44. Then, the Y-axis scanning control unit 521A operates the Y-axis drive mechanism 41 to arrange the detector 20 at the same position in the Y-axis direction as in step S6, and operates the X-axis drive mechanism 47 to operate the detector 20. The offset amount Δx is moved in the X-axis direction (position correction step). Then, the Z-axis drive mechanism 44 is operated until the upward stylus 26A comes into contact with the surface of the sphere W2.
When the detector 20 is moved by the offset amount Δx in step S8, it is moved to the side where the deviation of the upward stylus 26A with respect to the downward stylus 26B is eliminated.
As a result, the upward stylus 26A comes into contact with the reference position P4 of the sphere W2.

Next, the Y-axis scanning control unit 521A operates the Y-axis drive mechanism 41, so that the upward stylus 26A scans the surface of the sphere W2 in the Y-axis direction (step S9; upward scanning step). During this step S9, the displacement amount detecting unit 27 detects the displacement amount of the upward stylus 26A.

Next, the shape analysis unit 523 uses the measurement data of the surface of the sphere W2 obtained in step S6 (upper measurement data) and the measurement data of the surface of the sphere W2 obtained in step S8 (lower measurement data). Based on this, the cross-sectional shape of the sphere W2 (how the dimensions of the sphere W2 in the Z-axis direction change along the Y-axis direction) is evaluated (step S10).
In step S10, as in step S5 described above, correction processing using the offset amounts Δx, Δy, and Δz between the stylus 26A and 26B is performed.
With the above, the measurement in the Y-axis direction of the sphere W2 is completed.

[Effect of this embodiment]
In the surface texture measuring device 1 of the present embodiment, when the X-axis scanning control unit 521B measures the object to be measured in the X-axis direction, after one of the stylus 26A and 26B scans the object to be measured. Before the other scans the object to be measured, the measuring arm 24 is relatively moved in the Y-axis direction by an offset amount Δy in the Y-axis direction between the stylus 26A and 26B.
Further, in the surface texture measuring device 1, when the Y-axis scanning control unit 521A measures the object to be measured in the Y-axis direction, one of the stylus 26A and 26B scans the object to be measured, and the other Moves the measuring arm 24 relative to the X-axis direction by an offset amount Δx in the X-axis direction between the stylus 26A and 26B before scanning the object to be measured.

In such an embodiment, even when an offset amount Δy in the Y-axis direction exists between the stylus 26A and 26B, when the object to be measured is measured in the X-axis direction, the upward stylus 26A is the object to be measured. The position where the downward stylus 26B contacts the object to be measured can be made to coincide with each other in the Y-axis direction. Therefore, since the scanning lines of the stylus 26A and 26B can be overlapped with respect to the object to be measured when viewed from the vertical direction, it is possible to accurately evaluate the cross-sectional shape of the object to be measured along the X-axis direction and the Z-axis direction. it can.

Further, even when the offset amount Δx in the X-axis direction exists between the stylus 26A and 26B, the position where the upward stylus 26A contacts the object to be measured when the object to be measured is measured along the Y-axis direction. And the position where the downward stylus 26B contacts the object to be measured can be aligned with each other in the X-axis direction. Therefore, since the scanning lines of the styli 26A and 26B can be overlapped with respect to the object to be measured when viewed from the vertical direction, it is possible to accurately evaluate the cross-sectional shape of the object to be measured along the Y-axis direction and the Z-axis direction. it can.

In particular, in the present embodiment, the object to be measured is the tubular body W1, and when scanning the inner peripheral surface of the tubular body W1, the stylus 26A is relative to the central axis of the tubular body W1 when viewed from above and below. , 26B scanning lines can be overlapped (see FIG. 13). As a result, the inner diameter of the tubular body W1 can be accurately evaluated along the axial direction.

Further, when the object to be measured is a sphere W2 and the surface of the sphere W2 is scanned, the scanning lines of the styli 26A and 26B can be overlapped with the center of the sphere W2 when viewed from above and below (FIG. FIG. 15). Thereby, the cross-sectional shape passing through the center of the sphere W2 can be accurately evaluated.
In the above-mentioned example, the case where the sphere W2 is measured in the Y-axis direction is described, but the same effect can be obtained when the sphere W2 is measured in the X-axis direction.

[Modification example]
The present invention is not limited to the above-described embodiment, and modifications within the range in which the object of the present invention can be achieved are included in the present invention.
For example, the scanning order of the styli 26A and 26B in the above embodiment can be arbitrarily changed.
Further, the first direction of the present invention may correspond to either the X-axis direction or the Y-axis direction of the embodiment. Similarly, the second direction of the present invention may correspond to either the X-axis direction or the Y-axis direction of the embodiment.
Further, in the above-described embodiment, the tubular body W1 and the spherical body W2 are exemplified as the objects to be measured, but the present invention is not limited to this, and various shapes of objects to be measured can be measured.

The relative movement mechanism 40 of the above embodiment is configured such that the Y-axis drive mechanism 41 moves the stage 12 in the Y-axis direction and the X-axis drive mechanism 47 moves the detector 20 in the X-axis direction. The present invention is not limited to this. For example, the relative movement mechanism 40 may be configured to move the stage 12 in each of the Y-axis directions and the X-axis directions, or move the detector 20 in each of the Y-axis directions and the X-axis directions. It may be configured to be possible.

The method for calculating the offset amounts Δx, Δy, and Δz described in the above embodiment is an example, and may be obtained by another method.
For example, the offset amounts Δx, Δy, and Δz may be calculated at once based on the three-dimensional data obtained by scanning a plurality of reference spheres 9 in the Y-axis direction while shifting the reference sphere 9 by a predetermined pitch in the X-axis direction.
Alternatively, the offset amounts Δx, Δy, and Δz may be calculated at once based on the three-dimensional data obtained by scanning a plurality of reference spheres 9 in the X-axis direction while shifting the reference sphere 9 by a predetermined pitch in the Y-axis direction.

Further, as a method for calculating the offset amounts Δx, Δy, and Δz at a higher altitude, a method applying the measurement method described in the above embodiment may be performed.
For example, first, the offset amount Δy is calculated by any of the methods described above. After that, a downward scanning step in which the downward stylus 26B is brought into contact with the upper maximum diameter portion of the reference sphere 9 to scan the reference sphere 9 in the X-axis direction, and the upward stylus 26A is placed on the lower maximum diameter portion of the reference sphere 9. Each of the upward scanning steps of contacting and scanning the reference sphere 9 in the X-axis direction is performed. Here, after performing one of the scanning steps and before performing the other scanning step, a position correction step is performed in which the detector 20 is moved relative to the stage 12 in the Y-axis direction by an offset amount of Δy. Based on the data obtained by such a method, more accurate offset amounts Δx and Δz can be calculated.

In steps S3, S8 and the like of the above-described embodiment, the movement control unit 521 automatically controls the relative movement mechanism 40 to move the detector 20 by an offset amount Δx or Δy, but the present invention is limited to this. Absent. For example, the relative movement mechanism 40 may be manually controlled by the measurer inputting a movement instruction for an offset amount Δx or Δy to the operation unit 53.

In the X-axis direction measurement of the above embodiment, in step S3, the detector 20 is relatively moved by the offset amount Δy in the Y-axis direction, but at the same time, the detector 20 is relatively moved by the offset amount Δx in the X-axis direction. You may let me.
Similarly, in the Y-axis direction measurement of the above embodiment, in step S8, the detector 20 is relatively moved by the offset amount Δx in the X-axis direction, but at the same time, the detector 20 is offset in the Y-axis direction by the offset amount Δy. May be moved relative to each other.
In such a modification, the detector 20 is moved in the measurement direction (X-axis direction or Y-axis direction) by the offset amount (Δx or Δy), and the difference between the upper measurement data and the lower measurement data. There will be a gap. Therefore, when correcting the measurement data, it is desirable to make a correction to eliminate the deviation.
According to such a modification, in addition to the above-mentioned effect, each scanning range of the upward scanning and the downward scanning of the object to be measured can be made to match the scanning direction. As a result, when evaluating the dimensions of the object to be measured in the Z-axis direction, measurement data near the boundary of the scanning range, which was not available in the prior art, can be used, and evaluation in a wider range becomes possible. ..
Further, when the object to be measured is a sphere, if each scanning range of the upward scanning and the downward scanning can be matched with the scanning direction, the stylus 26A, 26B with respect to the spherical surface between the upward scanning and the downward scanning can be performed. The range of contact angles can be matched. Thereby, the reliability of the measurement data can be improved.

1 ... Surface texture measuring device, 10 ... Device body, 11 ... Base, 12 ... Stage, 20 ... Detector, 22 ... Bracket, 23 ... Rotating shaft, 24 ... Measuring arm, 241 ... Tip, 26A ... Upward stylus, 26B ... downward stylus, 27 ... displacement amount detection unit, 40 ... relative movement mechanism, 41 ... Y-axis drive mechanism, 42 ... column, 43 ... Z slider, 44 ... Z-axis drive mechanism, 47 ... X-axis drive mechanism, 50 ... Control unit, 51 ... Storage unit, 52 ... Calculation unit, 521 ... Movement control unit, 521A ... Y-axis scanning control unit, 521B ... X-axis scanning control unit, 522 ... Displacement amount calculation unit, 523 ... Shape analysis unit, 53 ... Operation unit, 54 ... Display unit, 9 ... Reference sphere, O1 ... 1st center coordinate, O2 ... 2nd center coordinate, O3 ... 3rd center coordinate, O4 ... 4th center coordinate, P1 to P4 ... Reference position, W1 ... Cylinder, W2 ... Sphere, Δx, Δy, Δz ... Offset amount.

Claims (3)

The stage on which the object to be measured is placed and
A measuring arm whose tip is in contact with the object to be measured and can be displaced in the vertical direction.
An upward stylus provided so as to project upward from the tip portion,
A downward stylus provided so as to protrude downward from the tip portion, and
A relative movement mechanism capable of relatively moving the measuring arm and the stage along the vertical direction and the first direction and the second direction orthogonal to the vertical direction and orthogonal to each other.
A first scanning control unit that controls the relative movement mechanism so that the upward stylus or the downward stylus scans the object to be measured along the first direction is provided.
The first scanning control unit is the upward stylus after one of the upward stylus and the downward stylus has scanned the object to be measured and before the other has scanned the object to be measured. A surface property measuring device, characterized in that the measuring arm is relatively moved in the second direction by an amount of offset between the stylus and the downward stylus in the second direction. The surface property measuring device according to claim 1.
Further comprising a second scanning control unit that controls the relative movement mechanism such that the upward stylus or the downward stylus scans the object under test along the second direction.
The second scanning control unit is the upward stylus after one of the upward stylus and the downward stylus has scanned the object to be measured and before the other has scanned the object to be measured. A surface property measuring device, characterized in that the measuring arm is relatively moved in the first direction by an amount of offset between the stylus and the downward stylus in the first direction. The stage on which the object to be measured is placed and
A measuring arm whose tip is in contact with the object to be measured and can be displaced in the vertical direction.
An upward stylus provided so as to project upward from the tip portion,
A downward stylus provided so as to protrude downward from the tip portion, and
A surface property comprising a relative moving mechanism capable of moving the measuring arm relative to the stage along each of the vertical direction and the first direction and the second direction orthogonal to the vertical direction and orthogonal to each other. In the measuring device
An upward scanning step that moves the measuring arm relative to the first direction so that the upward stylus scans the object to be measured along the first direction.
A downward scanning step that moves the measuring arm relative to the first direction so that the downward stylus scans the object to be measured along the first direction.
Between the upward scanning step and the downward scanning step, the measuring arm is relatively moved in the second direction by the amount of the offset amount in the second direction between the upward stylus and the downward stylus. A surface texture measuring method characterized by performing a position correction step and performing.

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