KR101738257B1 - Probe alignment measurement method for probe rotary type atomic force microscope - Google Patents

Probe alignment measurement method for probe rotary type atomic force microscope Download PDF

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KR101738257B1
KR101738257B1 KR1020150128771A KR20150128771A KR101738257B1 KR 101738257 B1 KR101738257 B1 KR 101738257B1 KR 1020150128771 A KR1020150128771 A KR 1020150128771A KR 20150128771 A KR20150128771 A KR 20150128771A KR 101738257 B1 KR101738257 B1 KR 101738257B1
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probe
rotation
center
contact point
angle
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KR20170031815A (en
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이상헌
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안동대학교 산학협력단
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q20/00—Monitoring the movement or position of the probe
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/30—Testing of optical devices, constituted by fibre optics or optical waveguides
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
    • G01Q60/38—Probes, their manufacture, or their related instrumentation, e.g. holders

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  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
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  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
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  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)

Abstract

The present invention relates to a probe alignment measurement method of a probe rotation type atomic microscope, comprising the steps of: a) confirming whether the rotation of the probe of the atomic microscope is a vertical axis or a longitudinal axis; and b) The probe 100 is contacted to the specimen 200 having a plurality of grooves arranged in parallel on the surface thereof to perform scanning scanning and the result of the scanning is converted into data of the orthogonal coordinate system to calculate the distance and angle between the contact point of the probe 100 and the center of rotation And calculating an offset compensation value according to the offset compensation value; c) measuring a z-axis change with respect to a rotation angle of the flat plate type specimen 300 when the probe is rotated about its length axis as a result of the determination in the step a) Calculating an offset compensation value by calculating a distance and an angle between the contact point and the rotation center; and d) after performing the step b) or c), correcting the correction value according to the rotation angle .

Description

TECHNICAL FIELD [0001] The present invention relates to a probe alignment measurement method for a probe rotating type atomic force microscope,

The present invention relates to a probe alignment measurement method of a probe rotation type atomic microscope, and more particularly, to a method of measuring alignment of a probe center and a rotation center and correcting the alignment degree.

In general, an atomic microscope uses a cantilever-type probe to detect the surface state of a three-dimensional structure.

When the cantilever type probe is in contact with the surface of the specimen to be measured, the precision stage (3-axis: X-Y-Z) is scanned on a plane (2-axis, X-Y) and the probe is bent according to the height of the specimen.

The sensor for measuring the bending of the probe transmits the change of the bending to the controller, and the controller is moved in the height (Z-axis) direction of the precision stage so that the degree of bending of the probe is always kept constant. At this time, in order to maintain the constant bending of the probe, the amount of movement of the precision stage in the height direction becomes the height information of the specimen.

The friction characteristics of the specimen can be measured through the torsion information as well as the bending information of the probe.

Since the cantilever type probe is directional, it is impossible to scan the precision stage in any direction. Therefore, in order to measure the surface properties of the anisotropic material showing different characteristics depending on the direction, it is necessary to rotate the specimen. Such a work requires a long time and a lot of know-how and at the same time,

In order to overcome the above-mentioned conventional disadvantages, an atomic microscope capable of rotating in the height direction of the probe is disclosed in Japanese Patent Application No. 10-1469365 (registered on Nov. 28, 2014, an atomic microscope capable of rotating the probe and a scanning method using the same) .

Specifically, the specimen is mounted on a precision stage. The probe, the probe alignment device, and the rotation drive section are connected in series. The probe alignment device coincides the contact point with the probe specimen and the rotation center , So that the contact between the specimen and the probe tip is always made at the same point regardless of the rotation.

In addition, the conventional atomic microscope measures three-dimensional information of a specimen, but it does not measure the three-dimensional information because the sidewall information of the specimen is excluded and only the height information is measured. In order to solve this problem of the conventional atomic microscope, an atomic microscope which can rotate the probe about the longitudinal axis of the probe has been proposed.

A registered patent No. 10-1350570 (registered on Jan. 6, 2014, a device and method for acquiring stereoscopic images) describes an atomic microscope capable of rotating about the longitudinal axis of a probe, It is suitable.

However, in the probe-rotating type atomic microscope as described above, there is an error between the specimen contact point of the probe and the rotation center of the rotation drive part due to the mechanical machining error.

Conventionally, the mismatch between the specimen contact point and the rotation center of the probe should be corrected using an alignment mechanism using an alignment mechanism. However, since it is not easy to measure the degree of mismatch (alignment degree) and the error is on the order of nanometers, there is a problem in that accurate correction can not be easily performed due to the limit of the resolution even if the alignment mechanism is used.

SUMMARY OF THE INVENTION The present invention has been made in view of the above problems, and it is an object of the present invention to provide a probe alignment measuring method for a probe rotating type atomic microscope capable of accurately measuring an alignment degree between a specimen contact point of a probe and a rotation center of the probe.

According to another aspect of the present invention, there is provided a method of measuring probe alignment of a probe rotating type atomic microscope, comprising the steps of: a) confirming whether the rotation of a probe of an atomic force microscope is a vertical axis or a longitudinal axis; and b) As a result of the determination, in the case of the vertical axis rotation, the probe 100 is contacted to the test piece 200 having a plurality of grooves arranged in parallel to each other on the surface thereof, and the result of the scan is converted into data of the orthogonal coordinate system, And calculating an offset compensation value according to the calculated distance and angle; and c) when the length of the probe shaft is rotated as a result of the determination in the step a), the flat specimen 300 is rotated about the z axis Calculating a distance and an angle between the probe contact point and the center of rotation to calculate an offset compensation value; and d) calculating the offset compensation value based on the rotation angle after performing the step b) or c) And a step of outputting a correction value stage mill.

By measuring the degree of alignment between the probe contact point of the present invention and the rotation center of the probe and compensating for the difference according to the measurement result, the surface characteristics in an arbitrary direction of the anisotropic material and the complete three- So that the measurement can be performed with accuracy.

1 is a flow chart of a probe alignment measurement method of a probe rotating type atomic microscope according to a preferred embodiment of the present invention.
2 is an explanatory diagram of a probe alignment measurement method of a probe rotating type atomic microscope according to a preferred embodiment of the present invention.
3 is an explanatory view showing the direction of rotation scan of the probe contact point.
4 is an explanatory diagram of a probe alignment measurement method of a probe rotating type atomic microscope according to another embodiment of the present invention.

Hereinafter, a probe alignment measurement method of the probe-type atomic force microscope of the present invention will be described in detail with reference to the accompanying drawings.

FIG. 1 is a flow chart of a probe alignment measurement method of a probe rotating type atomic microscope according to a preferred embodiment of the present invention, FIG. 2 is an explanatory diagram of a method for measuring an alignment degree in the case of vertical axis rotation, And is an explanatory diagram of the alignment degree measuring method.

Referring to FIGS. 1 to 3, the probe alignment measurement method of the probe rotating type atomic microscope according to the preferred embodiment of the present invention includes the steps of (S10) confirming whether the rotation of the probe of the atomic force microscope is a vertical axis or a longitudinal axis The probe 100 is scanned and scanned by contacting the probe 200 with a plurality of grooves parallel to each other on the surface in the case of the vertical axis rotation and the scan result is converted into data in the orthogonal coordinate system, (S20) of calculating a distance and an angle between the contact point and the rotation center, and calculating an offset compensation value according to the distance and the angle, and a step (S20) (S30) of calculating the offset compensation value by calculating a distance and an angle between the probe contact point and the rotation center by measuring the z-axis change of the probe contact point and the rotation center of the probe, and after performing the step S20 or S30 (Step S40) of outputting a correction value of the precision stage according to the rotation angle.

The step S20 includes using a test piece 200 having a plurality of grooves 210 formed on the surface thereof and a step S21 of contacting the test piece 200 with the probe 100 at a boundary point between the grooves 210 (S23) of acquiring three-dimensional data of a polar coordinate system by scanning the probe (100) while rotating the probe (100) a plurality of times, converting the polar coordinate system into three-dimensional data of an orthogonal coordinate system (S24 A step S25 of calculating the distance between the contact point and the rotation center of the probe, a step S26 of confirming the profile of the rotation angle, a step S27 of calculating an angle between the probe contact point and the center of rotation, A step (S28) of calculating an offset between the probe contact point and the rotation center, and a step (S29) of calculating an offset compensation value according to the rotation angle.

The step S30 includes a step S31 of preparing a flat plate specimen, a step S32 of measuring a z-axis change with respect to the rotation angle while performing a rotation scan, a step S33 calculating a distance between the probe contact point and the center of rotation A step S34 of calculating an offset between the probe contact point and the rotation center, a step S36 of calculating an offset compensation value according to the rotation angle, .

Hereinafter, the configuration and operation of the probe alignment measurement method of the probe rotating type atomic microscope according to the preferred embodiment of the present invention will be described in detail.

First, in step S10, the control unit of the atomic microscope determines the rotation direction of the probe of the atomic force microscope. That is, whether the probe 100 is rotating along a vertical axis which is an axis perpendicular to the probe 100, or whether the probe 100 is rotating along a longitudinal axis which is a direction parallel to the probe 100.

This will be described in more detail later, but different types of devices may require different specimens to calculate the offset between the contact point and the center of rotation of the probe.

If it is determined that the probe 100 is rotated along the vertical axis, the specimen 200 having the grooves 210 parallel to each other and elongated in one direction on the upper surface, as shown in FIG. 2 (a) .

Next, as shown in step S22, the probe 100 is brought into contact with the specimen 200 having the long grooves 210 formed in one direction on the upper surface thereof. At this time, the contact position is a boundary portion of the groove 210.

Then, in step S23, the probe 100 is rotated with respect to the vertical axis to perform scanning.

When one rotation scan is completed, a rotation scan is performed after moving in the y-axis direction, and height information of the plane of the sample 200 is obtained. In this case, the plane information is stored in the polar coordinate system in the obtained three-dimensional data.

Next, in step S24, an arbitrary value is set as an offset, which is a distance between the contact point of the probe 100 and the rotation center of the probe, and the polar coordinate value of the plane is converted into a rectangular coordinate system. Dimensional data can be obtained.

From the three-dimensional data of the orthogonal coordinate system, the value of the width W of the groove 210 in the specimen 200 can be measured. The measured value is different from the actual value because the distance between two centers is defined as an arbitrary value at the time of coordinate conversion.

Next, in step S25, the width W of the groove 210 of the test piece 200 is actually measured, and the width of the groove 210 obtained through calculation is compared with each other to obtain the difference therebetween.

Thus, an offset, which is a distance between the contact point of the probe 100 and the rotation center of the probe, can be obtained.

Next, in step S26, as shown in FIG. 2B, considering only one of several rotational scans in the y-axis direction, the starting point of the scan (the contact point of the probe) Begin at the boundary point. If we refer to the contact point of the probe, the center of rotation is located on the circle represented by the path center because it is a distance r of the distance between the two points.

And the circle line represents the path of the probe when performing a rotation scan at an arbitrary rotation center of the circumference of the path center . The path of this probe also has circular motion with a radius r of the distance between two points.

To have an enlarged view of a portion of (c) of Figure 2 (b) of Figure 1, the center of rotation (C (x m, y m )) is the center of rotation in the first quadrant in a rectangular coordinate system set up by the probe contacts the reference point is The presence of the disease is shown in more detail.

First, in the case of a rotation scan, the profile of the surface step can be obtained by starting the rotation scan from the boundary point in the groove of the specimen.

At this time, the angle of rotation at which the profile is initially increased is set to &thetas; p and recorded.

After then, to know the offset distance (r of) through multiple rotational scanning, as described above as in the S27 step, θ p is also known, through the equation below, it can be determined for each (α) between the two points.

Figure 112015088439327-pat00001

Then, as shown in S28 step can be obtained an offset (offset) obtaining the distance (r of) and angle (α) the relationship between the probe contact point and the rotational center two points, it is also possible to correct by calculating the offset compensation value, as in the S29 step .

Specifically, the angle between the two points is obtained by using only the information of the halaman in the rotation type scan to obtain the length between the two points. FIG. 3 shows the direction of the rotation scan for obtaining a normal three-dimensional image according to the position of the rotation center with respect to the probe contact point. Jyeoteumeuro previously determined that the distance r of between the two points, the center of rotation (c) are present in a circle having a radius of r based on the probe contacts the main phase. 3 (a), the scan is performed in the counterclockwise direction to scan the image with the rotation center as a reference, and the profile obtained by the scan scans the concave point of the groove and ascends to the convex point . Here, the angle at the rising edge is defined as? P , and the relationship between the distance and the angle between the two points can be summarized by the following three relational expressions.

Figure 112015088439327-pat00002

Figure 112015088439327-pat00003

Figure 112015088439327-pat00004

Where α is the angle between two points, β is the angle with which α is always equal to π / 2, X pr is the width of the groove, and X u is the horizontal distance between two points . The following equations (2) through (4) can be summarized as follows.

Figure 112015088439327-pat00005

In the above equation (5), since the values of all variables except α are known, α can finally be obtained.

As shown in Fig. 3, the angle between two points can be obtained in a similar manner to that of Fig. 3 (a) even when the center of rotation is at an arbitrary position. The difference is the difference between the direction of the rotation scan depending on the position and whether the edge for obtaining &thetas; p is rising or falling.

4 is an explanatory diagram of the step S30 showing a method of measuring the offset between the probe contact point and the rotation center in the longitudinal axis rotatory atomic microscope of the probe.

As shown in step S31 and FIG. 4A, if the probe 100 is rotated along the longitudinal axis as a result of the determination in step S10, the flat specimen 300 is prepared, which is different from the vertical axis rotatable atomic microscope.

Next, as shown in step S32 and FIG. 4B, in a state in which the probe 100 is in contact with the flat specimen 300, rotation is performed based on the rotation center point p as shown in FIG. 3 (b) .

At this time, the value of the z-axis changes according to the difference between the contact point of the probe 100 and the center of rotation of the longitudinal axis.

4 (b), when the probe 100 is rotated, since the rotation center point p is located above the contact point, the tip of the probe moves along the path shown by the dotted line, do. However, since the contact point can be controlled uniformly in the atomic microscope, when the control is performed, the z-axis precision stage of the actual atomic microscope is changed in the z-axis direction due to the path of the actual contact point according to the rotation angle as shown in the following graph As shown in FIG.

That is, in step S33, the difference between the contact point of the probe 100 and the rotation center point p of the longitudinal axis is represented by a displacement in the z-axis direction, and the relationship between the probe contact point and the rotation center can be defined as a polar coordinate system.

When the maximum change amount is obtained from the change in the rotation angle of the z-axis precision stage, the distance between the contact point and the rotation center can be obtained.

Then, in step S34, the angle between the probe contact point and the center of rotation is calculated.

Fig. 4 (b) shows the case where the center of rotation is on the same line with the contact point in the z-axis direction, but in reality, the center of rotation may not be co-linear with the contact point in the z-axis direction as shown in Fig. In this case, the driving of the z-axis actuator similar to that of FIG. 4 (b) is performed, but the angle of the maximum driving point of the z-axis actuator is changed. That is, if two points exist on the same z-axis, the maximum z-value is obtained when the rotation angle is 0. If the two points are not on the same z-axis, the angle of the section in which the maximum driving point of the z- The angular relationship between the centers of rotation is shown.

Next, in step S35, the offset between the probe contact point and the center of rotation is calculated. In step S36, a compensation value is calculated.

As described above, the position between the probe contact point and the rotation center can be obtained from the maximum movement value of the z-axis actuator and the angle at which the maximum movement value occurs, which becomes an offset value, and this offset value is corrected .

4 (d) and 4 (e), the rotation center is located below the probe contact point. In this case, it can be seen that the z-axis actuator is moved downward.

It will be apparent to those skilled in the art that various modifications and variations can be made in the present invention without departing from the spirit and scope of the invention will be.

100: probe 200, 300: sample
210: Home

Claims (3)

delete a) scanning the probe 100 by contacting the probe 100 with the specimen 200 having the plurality of grooves 210 arranged at regular intervals on the surface thereof, the probe 100 of the atomic microscope rotating around the vertical axis, Calculating a distance and an angle between the contact point of the probe 100 and the center of rotation by converting the result into data of the orthogonal coordinate system, and calculating an offset compensation value according to the distance;
b) outputting a correction value of the precision stage according to the rotation angle after performing the step a)
The step a)
Preparing the specimen 200,
Positioning the probe (100) on the test piece (200) at a boundary point of the groove (210)
Scanning the probe 100 while rotating the probe 100 a plurality of times about a vertical axis to obtain height information of the specimen 200 as three-dimensional data of a polar coordinate system;
Transforming the three-dimensional data of the polar coordinate system into three-dimensional data of a rectangular coordinate system by setting a distance between the contact point and the rotation center of the probe 100 to an arbitrary value,
Comparing the width of the groove 210 obtained through calculation in the three-dimensional data of the orthogonal coordinate system with the actual width of the groove 210 of the specimen 200;
Calculating an actual distance between the contact point and the center of rotation of the probe 100 by comparing the width and the actual width of the groove 210 obtained through the calculation;
Confirming a profile of the angle of rotation obtained by rotation of the probe (100) about a vertical axis,
Obtaining a rotation angle (? P ) whose height changes first in the profile for the rotation angle;
Calculating an angle between the contact point and the center of rotation of the probe 100 using an actual distance between the calculated contact point of the probe 100 and the center of rotation and a rotation angle p obtained from the profile of the rotation angle,
Calculating an offset between the contact point and the center of rotation of the probe 100 using the distance between the contact point and the center of rotation of the probe 100 and the angle between the contact point and the center of rotation of the probe 100,
And calculating an offset compensation value according to the rotation angle. A method of measuring a probe alignment degree of a probe rotating type atomic microscope.
a) The probe 100 of the atomic force microscope is rotated about its longitudinal axis, and the change of the z-axis of the flat plate-shaped specimen 300 with respect to the rotation angle is measured. The contact point between the probe 100 and the specimen 300 Calculating an offset compensation value by calculating a distance and an angle between the rotation center and the rotation center;
b) outputting a precision stage correction value according to the rotation angle after performing the step a)
The step a)
Preparing the flat type specimen 300,
Measuring the amount of change in the z-axis direction of the probe 100 by rotating the probe 100 with the longitudinal axis as the center of rotation and controlling the contact point between the probe 100 and the specimen 300 to be constant; ,
Obtaining a maximum change amount from the variation amount in the z-axis direction and obtaining a distance between the contact point and the rotation center from the maximum variation amount;
Obtaining a rotation angle at which the maximum change amount is generated;
Calculating an offset between the contact point and the center of rotation from a distance and a rotation angle between the contact point and the center of rotation;
And calculating an offset compensation value according to the rotation angle.
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JP2007512512A (en) * 2003-11-13 2007-05-17 レニショウ　パブリック　リミテッド　カンパニー Error compensation method for coordinate measuring machine with joint probe head
KR101163972B1 (en) * 2002-03-22 2012-07-09 일렉트로 싸이언티픽 인더스트리이즈 인코포레이티드 Test probe alignment apparatus, probe alignment apparatus, and alignment apparatus

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101163972B1 (en) * 2002-03-22 2012-07-09 일렉트로 싸이언티픽 인더스트리이즈 인코포레이티드 Test probe alignment apparatus, probe alignment apparatus, and alignment apparatus
JP2007512512A (en) * 2003-11-13 2007-05-17 レニショウ　パブリック　リミテッド　カンパニー Error compensation method for coordinate measuring machine with joint probe head

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