CN105953703A - Form measuring device and calibration method of same - Google Patents
Form measuring device and calibration method of same Download PDFInfo
- Publication number
- CN105953703A CN105953703A CN201610133196.0A CN201610133196A CN105953703A CN 105953703 A CN105953703 A CN 105953703A CN 201610133196 A CN201610133196 A CN 201610133196A CN 105953703 A CN105953703 A CN 105953703A
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- Prior art keywords
- axis
- turntable
- measurement
- calibration
- contact pilotage
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
- G01B5/20—Measuring arrangements characterised by the use of mechanical techniques for measuring contours or curvatures
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
- G01B21/04—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
- G01B21/042—Calibration or calibration artifacts
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B3/00—Measuring instruments characterised by the use of mechanical techniques
- G01B3/30—Bars, blocks, or strips in which the distance between a pair of faces is fixed, although it may be preadjustable, e.g. end measure, feeler strip
Abstract
The invention provides a form measuring device and a calibration method of the same. A calibration gauge having plane symmetry is set in a position other than a rotation center of a rotary table. The calibration gauge is measured while the rotary table is driven to rotate. Offset of a measurement axis is determined based on a phase pattern of the rotary table when a stylus head detects the calibration gauge.
Description
Technical field
The present invention relates to the calibration steps of form measuring instrument.
Background technology
Example as form measuring instrument, it is known to roundness measuring device.Roundness measuring device includes turning
Motivation structure and critically measurement have the radius change of round-shaped testee.
First, the structure of roundness measuring device is briefly described.Fig. 1 is the outside drawing of roundness measuring device 100.
The most do not mark the X-axis of lathe coordinate system, Y-axis and Z axis.X-axis is from left to right on paper.
Y-axis is from front to back on paper.Z axis is from bottom to top.
Roundness measuring device 100 includes measurement apparatus main body 200, master computer 110, control station 120 and fortune
Movement controller 130.
Measurement apparatus main body 200 includes bearing 210, turntable 220 and measurement of coordinates portion 300.
Turntable 220 includes rotary driver 221 and mounting table 223.Rotary driver 221 is arranged on bearing
On 210 and make discoid mounting table 223 rotate.On the side of rotary driver 221 circumferentially just
Knob 222 is adjusted to by 90 ° be arranged at intervals with.By adjustment knob 222 is operated, can be at X
Direction of principal axis, Y direction and Z-direction are each upper adjusts mounting table 223, so that mounting table 223 energy
Enough placed in the middle and in level.In the case of testee is arranged on mounting table 223, this measured object
Body rotates together with mounting table 223.
Measurement of coordinates portion 300 includes Z axis post 310, Z slide block 320, X arm 330, head keeper 340 and visits
Survey device head 350.
Z axis post 310 is to be parallel to the erection of Z axis on bearing 210.Z slide block 320 is with can be in Z side
The mode being shifted on (above-below direction) arranges Z axis post 310.X arm 330 is with can be in the X direction
The mode retreated is supported on Z slide block 320.Head keeper 340 is " L " character form component and installs at cardinal extremity
To X arm 330 foremost.Detector head 350 is installed to head keeper 340 foremost.
Head keeper 340 is carrying out rotating centered by the rotary shaft 331 extended along X-direction
Mode is arranged.Slewing area is such as confined to the scope of 0 °～-90 °.As shown in Figure 2, head keeper
In the case of 340 is perpendicular, this is referred to as " vertical position ".As shown in Figure 3, head keeper 340 in
In the case of level, this is referred to as " flat-hand position ".
Detector head 350 is rod-type electric micrometer, and installs to head keeper 340 foremost.Detection
Device head 350 includes contact pilotage 360, and the contact pilotage being provided with contact testee foremost of this contact pilotage 360
361.Contact pilotage 360 is can tilt so that in the way of foremost can be to be shifted in the X-axis direction
Arrange.In this example, rod-type electric micrometer is used；But, detector head 350 can also is that flat
Row shift-type electric micrometer, or some other existing detector heads can be used.
In the case of head keeper 340 is in vertical position (Fig. 2), by the side of rotary head keeper 340
Calibration screw member 341 set on face, can make detector head 350 that trickle shifting occurs in the Y direction
Position.Alternatively, in the case of head keeper 340 is in flat-hand position (Fig. 3), kept by rotary head
Calibration screw member 342 set on the end face of part 340, can make detector head 350 send out in the Y direction
Raw slight displacement.
Additionally, the angle of contact pilotage 360, the inclination angle of head keeper 340, the advance and retreat amount of X arm 330 and Z are sliding
The position (lifting amount) of block 320 is detected by respective encoder (not shown).
Master computer 110 be include CPU (CPU), store pre-programmed ROM and
The terminal of RAM.There is provided to motion controller 130 together with by predetermined work instruction, main
Computer 110 is additionally based upon the data that measurement apparatus main body 200 obtained and performs such as testee W's
The calculating of shape analysis etc..Master computer 110 also provides a user with via monitor 112, keyboard and mouse
Input/output interface.By the action bars set by control station 120 or the manual operation panel of operation button,
Work is provided to indicate to motion controller 130.Motion controller 130 performs driving of measurement apparatus main body 200
Dynamic control.
In the case of the circularity measuring testee, connect with the surface of testee at contact pilotage head 361
Make turntable 220 rotate under the state touched to drive.So that contact pilotage head 361 can scan (tracking) measured object
The surface of body.In other words, in the case of testee rotates owing to the rotation of turntable 220 drives,
Contact pilotage head 361 is shifted in the X-axis direction according to the radius change of testee.Specifically, X arm
330 retreat according to the radius change of testee, thus contact pilotage head 361 is shifted in the X-axis direction
And contact pilotage head 361 follows the surface of testee.In the case of turntable 220 completes and once rotates,
Z slide block 320 is shifted over up or down and repeats the circumferencial direction scanning of testee.Contact pilotage 360
The position of angle, the position of X arm 330 and Z slide block 320 examined by respective encoder (not shown)
Survey, and obtain the shift amount of contact pilotage head 361 as measurement data.Based on this measurement data carry out by
Survey the shape analysis (that is, circularity or the analysis of cylindricity) of object.
During using the measurement of roundness measuring device 100, it is necessary to first carry out axle alignment so that turntable
The pivot center of 220 and measurement axis L of contact pilotage head 361 are at grade with crossing at right angle.Measurement axis L
Refer to the center through contact pilotage head 361 and the imaginary line parallel with X-axis.Contact pilotage head 361 is due to X arm 330
Advance and retreat and be shifted over.Therefore, measurement axis L is corresponding to (the i.e.) (shape fixing in the position of Z slide block 320
Under state) the movable direction of contact pilotage head 361.It addition, make the task that measurement axis L is directed in this manual
It is referred to as " measurement axis alignment ".
The hypothesis of task is measured under the measurement axis L pivot center off plumb state with turntable 220
In the case of, the displacement of contact pilotage head 361 is apparently not the most corresponding with the radius change of testee.
Such as, the situation or the head that change at the inclination angle of the situation or contact pilotage 360 of changing contact pilotage 360 are protected
In the case of the angle (posture) of gripping member 340 changes, it is necessary to carry out " measurement axis alignment ".
Traditionally, " measurement axis alignment " it has been carried out as follows (for example, with reference to Japan Patent 5,292,564 and Japan
JP 2012-145492).First, prepare front end and there is the cue ball 90 of spheroid.Cue ball 90 is arranged on turntable
The center (seeing Fig. 2 and 3) of 220, then centers.In other words, by center and the turntable of spheroid
The pivot center alignment of 220.Then, make contact pilotage head 361 contact this spheroid, and in this condition, turn
Dynamic Y-direction calibration screw member (341 or 342), and determine the maximum X-direction achieving contact pilotage head 361
The position of displacement.Once find the position that the X-direction displacement of contact pilotage head 361 is maximum, then make Y-direction calibrate
Screw member (341 or 342) stops at this point.
Above-mentioned process can be used to carry out " measurement axis alignment " exactly.But, owing to cue ball 90 must
The center of turntable 220 must be arranged on, it is therefore necessary to temporarily remove testee.Then, " survey is being carried out
Amount axle alignment " after, testee must be once again set up on turntable 220 and must be the most placed in the middle.?
Under some situations, contact pilotage 360 or the posture of head keeper 340 may be changed during measuring testee
May change.Change contact pilotage 360 every time or posture needs said process, when so can spend when changing
Between and energy, and make improve measure efficiency become difficulty.
The present invention reduces the time and efforts needed for measurement axis alignment, and improve form measuring instrument
Measurement efficiency.
Summary of the invention
According to the present invention for determining that, in the method for axle offset of form measuring instrument, described shape is surveyed
Amount device includes: turntable, it is used for placing testee, and described turntable can be centered by Z axis
Rotate；And measurement of coordinates portion, it has touching of being configured to detect described testee
Syringe needle, and described measurement of coordinates portion is configured to make described contact pilotage head to retreat along the direction parallel with X-axis,
Wherein X-axis, Y-axis and Z axis are mutually orthogonal to one another, and described measurement of coordinates portion is also configured to use described touching
Syringe needle performs the tracking measurement on the surface along described testee, and described calibration steps includes following step
Rapid: to use through the center of described contact pilotage head and the imaginary line parallel with X-axis as the feelings of measurement axis
Under condition, it is arranged on the position in addition to the center of rotation of described turntable by having face symmetric calibration meter；
When driving described turntable to rotate, measure described calibration meter；And based on described contact pilotage head to described
The phase pattern of described turntable when calibration meter detects, judges that described measurement axis is relative to described turn
Whether the rotary shaft of platform offsets.
In the present invention, it is preferred to, measurement result based on described calibration meter determines that detection starts phase place
θ i, detection terminate phase theta f and peak phase theta p, and it is that described contact pilotage head is opened that wherein said detection starts phase theta i
Begin the detection of described calibration meter time the phase place of described turntable, it is described contact pilotage that described detection terminates phase theta f
Head terminates the phase place of described turntable during the detection of described calibration meter, and described peak phase theta p is measured value
The phase place of described turntable when showing peak value；And axle offset desired value M is being defined as M={ (θ p
-θ is i)-(θ f-θ p) } in the case of, according to described axle offset desired value M for the most still bear judge described
The direction of the skew of measurement axis.
In the present invention, it is preferred to, described calibration meter is to be set in advance on the side of described turntable.
In the present invention, it is preferred to, described calibration meter is complete sphere or part sphere.
In the calibration steps according to the form measuring instrument of the present invention, it is possible on the direction of Y-axis
The position of described contact pilotage head and the position of described turntable are carried out trickle calibration；Performing for determining
After the method for the axle offset stating form measuring instrument, by the judged result of the offset direction of described measurement axis
Display is on a monitor；And the position of described contact pilotage head is entered by user with reference to the display of described monitor
The trickle calibration of row.
In the calibration steps according to the form measuring instrument of the present invention, described form measuring instrument includes:
Turntable, it is used for placing testee, and described turntable can rotate centered by Z axis；With
And measurement of coordinates portion, it has the contact pilotage head being configured to detect described testee, and institute
State measurement of coordinates portion to be configured to make described contact pilotage head retreat along the direction parallel with X-axis, wherein X-axis, Y
Axle and Z axis are mutually orthogonal to one another, and described measurement of coordinates portion is also configured to use described contact pilotage head and performs
Along the tracking measurement on the surface of described testee, wherein can on the direction of Y-axis to described
The position of contact pilotage head and the position of described turntable carry out trickle calibration, and described calibration steps includes following step
Rapid: to use through the center of described contact pilotage head and the imaginary line parallel with X-axis as the feelings of measurement axis
Under condition, it is arranged on the position in addition to the center of rotation of described turntable by having face symmetric calibration meter；
When driving described turntable to rotate, measure described calibration meter；Based on described contact pilotage head to described calibration
The phase pattern of described turntable when meter detects, judges that described measurement axis is relative to described turntable
Whether rotary shaft offsets；And after having judged whether described measurement axis offsets, by described
The judgment result displays of the offset direction of measurement axis is on a monitor so that user can be with reference to described supervision
The display of device carries out the trickle calibration of the position of described contact pilotage head.
In the calibration steps according to the form measuring instrument of the present invention, wherein said form measuring instrument bag
Including: turntable, it is used for placing testee, and described turntable can rotate centered by Z axis；
Measurement of coordinates portion, it has the contact pilotage head being configured to detect described testee, and described
Measurement of coordinates portion is configured to make described contact pilotage head retreat along the direction parallel with X-axis, wherein X-axis, Y
Axle and Z axis are mutually orthogonal to one another, and described measurement of coordinates portion is also configured to use described contact pilotage head and performs
Along the tracking measurement on the surface of described testee, wherein there is face symmetric calibration meter and be arranged on and remove
Position beyond the center of rotation of described turntable；And master computer, it is carried out via motion controller
Described turntable and the job control in described measurement of coordinates portion, described calibration steps comprises the following steps: adopting
In the case of through the center of described contact pilotage head and the imaginary line parallel with X-axis as measurement axis, logical
Cross described master computer to determine the axle offset of described form measuring instrument；Turn driving described turntable to carry out
Time dynamic, measure described calibration meter by described master computer；And by described master computer, based on institute
State the contact pilotage head phase pattern to the described described turntable calibrated when meter detects to judge described measurement
Whether axle offsets relative to the rotary shaft of described turntable.
A kind of in the program of the axle offset determining form measuring instrument according to the present invention, described shape
Shape measurement apparatus includes: turntable, and it is used for placing testee, and described turntable can be with Z axis
Center rotates；Measurement of coordinates portion, it has touching of being configured to detect described testee
Syringe needle, and described measurement of coordinates portion is configured to make described contact pilotage head to retreat along the direction parallel with X-axis,
Wherein X-axis, Y-axis and Z axis are mutually orthogonal to one another, and described measurement of coordinates portion is also configured to use described touching
Syringe needle performs the tracking measurement on the surface along described testee, wherein has the symmetric calibration in face
Meter is arranged on the position in addition to the center of rotation of described turntable；And master computer, it is via motion control
Device processed carries out described turntable and the job control in described measurement of coordinates portion.Using through described contact pilotage head
Center and the imaginary line parallel with X-axis as measurement axis in the case of, this program pass through described analytic accounting
Calculation machine determines the axle offset of described form measuring instrument；When driving described turntable to rotate, pass through
Described calibration meter measured by described master computer；And by described master computer, based on described contact pilotage head pair
The phase pattern of described turntable when described calibration meter detects is to judge that described measurement axis is relative to institute
Whether the rotary shaft stating turntable offsets.
According to a kind of form measuring instrument of the present invention, including turntable, it is used for placing testee,
And described turntable can rotate centered by Z axis；Calibration is counted, and it has face symmetry, and described
Calibration meter is positioned at the position in addition to the center of rotation of described turntable；And measurement of coordinates portion, its have by
It is configured to the contact pilotage head that described testee is detected, and described measurement of coordinates portion is configured to make
Described contact pilotage head is retreated along the direction parallel with X-axis, and wherein X-axis, Y-axis and Z axis are mutually orthogonal to one another,
Described measurement of coordinates portion is also configured to use described contact pilotage head and performs the table along described testee
The tracking measurement in face.
Accompanying drawing explanation
In the following detailed description, by the way of the non-limiting example of the exemplary embodiments of the present invention
The present invention is further illustrated with reference to described multiple accompanying drawings, the most in the accompanying drawings, identical reference
Represent similar parts, and wherein:
Fig. 1 is the outside drawing of roundness measuring device；
Fig. 2 illustrates vertical position；
Fig. 3 illustrates flat-hand position；
Fig. 4 is the flow chart illustrating the process for the method making the measurement axis of roundness measuring device be directed at；
Fig. 5 is the flow chart illustrating the process for the method making the measurement axis of roundness measuring device be directed at；
Fig. 6 is the flow chart illustrating the process for the method making the measurement axis of roundness measuring device be directed at；
Fig. 7 illustrates the state that calibration meter is arranged on turntable；
Fig. 8 is shown in the exemplary operation in the case of measurement axis is directed at；
Fig. 9 is shown in the exemplary operation in the case of measurement axis is directed at；
Figure 10 is shown in the exemplary operation in the case of measurement axis is directed at；
Figure 11 is shown in the exemplary operation in the case of measurement axis is directed at；
Figure 12 is shown in the exemplary operation in the case of measurement axis is directed at；
Figure 13 is shown in the exemplary operation in the case of measurement axis is directed at；
Figure 14 is shown in the exemplary operation in the case of measurement axis is directed at；
Figure 15 is shown in measurement axis and the situation of skew occurs relative to the pivot center of turntable in negative Y-direction
Under exemplary operation；
Figure 16 is shown in measurement axis and the situation of skew occurs relative to the pivot center of turntable in negative Y-direction
Under exemplary operation；
Figure 17 is shown in measurement axis and the situation of skew occurs relative to the pivot center of turntable in negative Y-direction
Under exemplary operation；
Figure 18 is shown in measurement axis and the situation of skew occurs relative to the pivot center of turntable in negative Y-direction
Under exemplary operation；
Figure 19 is shown in measurement axis and the situation of skew occurs relative to the pivot center of turntable in negative Y-direction
Under exemplary operation；
Figure 20 is shown in measurement axis and the situation of skew occurs relative to the pivot center of turntable in positive Y-direction
Under exemplary operation；
Figure 21 is shown in measurement axis and the situation of skew occurs relative to the pivot center of turntable in positive Y-direction
Under exemplary operation；
Figure 22 is shown in measurement axis and the situation of skew occurs relative to the pivot center of turntable in positive Y-direction
Under exemplary operation；
Figure 23 is shown in measurement axis and the situation of skew occurs relative to the pivot center of turntable in positive Y-direction
Under exemplary operation；
Figure 24 is shown in measurement axis and the situation of skew occurs relative to the pivot center of turntable in positive Y-direction
Under exemplary operation；
Figure 25 illustrates the first variation that calibration meter is arranged on the side of turntable；
Figure 26 illustrates that calibration meter is not the second variation of spheroid；And
Figure 27 illustrates that calibration meter is not the second variation of spheroid.
Detailed description of the invention
Details depicted herein is citing, and is only used for discussing illustratively the mesh of embodiments of the invention
, and be to provide for being considered as most useful in terms of the principle of the present invention and concept and being easiest to reason
Solve explanation and present.In this respect, it is not attempt to than the details needed for the basic comprehension of the present invention
More detailed mode illustrates the CONSTRUCTED SPECIFICATION of the present invention, and the explanation wherein utilizing accompanying drawing to be carried out makes in reality
The various forms how being capable of the present invention in trampling will be apparent to those skilled in the art.
The reference of each assembly that reference accompanying drawing and reference are assigned in accompanying drawing is to illustrate the present invention's
Embodiment.
First embodiment
Calibration steps for form measuring instrument (roundness measuring device 100) illustrates first embodiment.Figure
4,5 and 6 is the flow chart of the process illustrating the calibration steps according to the present embodiment.Illustrate to follow these stream
The order of journey figure.
In the case of the measurement shaft alignement carrying out roundness measuring device 100, first calibration meter 500 is set
Put on turntable 220 (ST100).Fig. 7 illustrates and calibration meter 500 is arranged on the state on turntable 220.School
Quasi-meter 500 is referred to as the cue ball with spherical front end.The position arranging calibration meter 500 can be except turntable
Excentral any position of 220.Preferably, the distance from the center of turntable 220 is the biggest.Example
As, in the region of the adjacent edges that calibration meter 500 can be arranged on turntable 220.
Can also pre-set and calibration meter 500 is arranged on the mounting table 223 of turntable 220 screw thread used
Hole etc..
Owing to arranging the position of calibration meter 500 beyond the center of turntable 220, therefore as it is shown in fig. 7, quilt
Survey object W and may remain in the center of turntable 220.In other words, make measurement axis on time, it is not necessary to
Testee W is removed from turntable 220.Even if such as changing contact pilotage during measuring testee W
360 or the angle of contact pilotage 360 or head keeper 340 Angulation changes in the case of, testee W
Can also be held in place by and calibrate meter 500 can be arranged in the vacant region of turntable 220.
(therefore, without again carrying out centering of turntable 220 and testee W after making measurement axis alignment).
Once calibration meter 500 is arranged on turntable 220, " measurement " calibration meter 500 (ST200).
Although some redundancy, but Additional Remarks here relates to term.Although illustrating " ' measurement ' calibration meter
500 (ST200) ", but this does not imply that operator expects to obtain the precise shapes data of calibration meter 500.
If it is desire to the precise shapes data of calibration meter 500 self, the most as shown in Figures 2 and 3, calibration meter 500 need to
The center of turntable 220 to be arranged on.In this example, calibration meter 500 be arranged on the center of turntable 220 with
Outward, the shape data of calibration meter 500 cannot therefore be obtained.
In the present embodiment, contact pilotage head 361 is made to be pointed to the calibration meter of position at center away from turntable 220
500 carry out profiling scanning, and use during this scanning the contact between contact pilotage head 361 and calibration meter 500
Mode carrys out the skew of computation and measurement axle L by reasoning." contact pilotage head 361 is made to be pointed to away from turntable 220
The calibration meter 500 of the position of the heart carries out profiling scanning " action and quilt to the center being arranged on turntable 220
The action that survey object measures " makes contact pilotage head 361 on turntable 220 when turntable 220 rotates
Object carry out profiling scanning " aspect is same action.It practice, calibrate meter 500 in order to " measurement "
(ST200) operation controls can be identical with the part programs being used for measuring testee.Therefore, in order to
Convenient, also by " the calibration meter 500 making the position that contact pilotage head 361 is pointed to center away from turntable 220 is carried out
Profiling scan " action be referred to as " measurement ".
In this example, as first mode, it is considered to the situation that measurement axis L has been directed at.(measurement axis L pair
Measurement axis L of the accurate pivot center representing turntable 220 and contact pilotage head 361 is handed over right angle at grade
Fork.This definition applies also in full.) Fig. 8～14 be shown in the case of measurement axis L is directed at exemplary
Operation.In the state shown in Fig. 8, measurement axis L is through the center of turntable 220；In other words, measure
Axle L is directed at.(therefore, it is not necessary to measurement axis L is calibrated.But, user cannot judge measurement axis L
Whether it is directed at).
First, as shown in Figure 8, it is assumed that calibration meter 500 is arranged far from the position at the center of turntable 220.
Then, the measurement of calibration meter 500 is started.This measurement operation itself can utilize roundness measuring device 100 (main
Computer 110) upper default measurement part programs performs.Turntable 220 turns from the state shown in Fig. 8
Dynamic.(in this example, the clockwise direction along figure rotates).In the state shown in Fig. 9, i.e.
Making in the case of contact pilotage head 361 is retreated along measurement axis L, contact pilotage head 361 does not has phase with calibration meter 500 yet
Contact.
In the case of rotation is advanced further compared with the state shown in Fig. 9, as shown in Figure 10, calibration
The lateral surface of meter 500 contacts with contact pilotage head 361.Connecing between contact pilotage head 361 and calibration meter 500 will be started
The phase place of the turntable 220 during the time point touched is appointed as θ i.Here, as example, θ i=32 °.
In the case of the lateral surface of contact pilotage head 361 with calibration meter 500 contacts, it is thus achieved that contact pilotage head 361
The measurement data that coordinate figure (specially X-coordinate value) is paired with the phase place of turntable 220.
In the case of turntable 220 is further rotation of, the lateral surface of calibration meter 500 is carried out by contact pilotage head 361
Profiling scans.In this example, contact pilotage head 361 be calibrated meter 500 lateral surface pressing in the case of,
Likely it is shifted in the positive direction of X-axis.Figure 11 illustrates that contact pilotage head 361 is sent out in the positive direction of X-axis
The state of raw maximum shift.Contact pilotage head 361 has been occurred in the positive direction of X-axis measurement during maximum shift
Value is appointed as " peak value ".Additionally, the phase place of the turntable 220 when showing this peak value is appointed as θ p.This
In, as example, θ p=42 °.
After peak value, in the case of turntable 220 is further rotation of, at the lateral surface to calibration meter 500
When carrying out profiling scanning, contact pilotage head 361 is shifted in the negative direction of X-axis.But, at turntable 220
Rotation advance in the case of, calibration meter 500 is finally moved away from contact pilotage head 361.(calibration meter 500 leads to
Cross measurement axis L, and no longer intersect with measurement axis L.) Figure 12 illustrates that being close in contact pilotage head 361 moves far
State before quasi-of leaving school meter 500.The time that contact between contact pilotage head 361 and calibration meter 500 is terminated
The phase place of the turntable 220 during point is appointed as θ f.Here, as example, θ f=52 °.
Afterwards, even if in the case of turntable 220 rotates, contact pilotage head 361 and calibration meter 500 the most do not connect
Touch, and measure (ST200) can by contact pilotage head 361 away from calibration in terms of 500 state terminate.So,
Obtain the measurement number that the coordinate figure (specially X-coordinate value) of contact pilotage head 361 is paired with the phase place of turntable 220
According to.
Once it is achieved in that the measurement data of calibration meter 500, then measures the analysis of data
(ST300).Master computer 110 is utilized to perform Data Analysis Services (ST300).Fig. 5 is to illustrate data analysis
The flow chart of process.This data analysis includes that principal point calculating processes ST300A and desired value calculating processes
ST300B。
First, illustrate from the beginning of principal point calculating processes ST300A.Principal point refers to above-mentioned θ i, θ p and θ f.
θ i is the phase place of the turntable 220 when the time point of the contact started between contact pilotage head 361 and calibration meter 500.
θ i is referred to as contact and starts phase place (detection starts phase place).θ p is the phase of the turntable 220 when showing peak value
Position.θ p is referred to as peak phase place.θ f is the time that the contact between contact pilotage head 361 and calibration meter 500 terminates
The phase place of the turntable 220 during point.θ f is referred to as contact and terminates phase place (detection terminates phase place).
Master computer 110 is analyzed measurement data and defines contact beginning phase theta i, peak phase theta p and contact knot
Bundle phase theta f.In this example, measurement data is mapped to XY face and returns all figures as shown in fig. 13 that etc.
Figure.Obtain measurement data and start (ST310) in the case of the angle of rotation of turntable 220 is 32 °, and at this
Angle of rotation terminates (ST330) in the case of being 52 °.Therefore, contact start phase theta i=32 ° (ST320) and
Contact terminates phase theta f=52 ° (ST340).
It addition, in the case of search peak, when the angle of rotation of turntable 220 is 42 °, contact pilotage head 361
The positive direction of X-axis occurs maximum shift (ST350), therefore peak phase theta p=42 ° (ST360).
Continue from the calculating (ST300A) of principal point (θ i, θ p and θ f), calculate axle offset desired value M
(ST300B).Axle offset desired value M is and turning until peak phase theta p from contacting and starting phase theta i
Dynamic angle is corresponding until the difference contacted between the angle of rotation terminating phase theta f with from peak phase theta p
Value.
Obtain from contact beginning phase theta i until the angle of rotation of peak phase theta p is (θ p-θ i)
(ST370).In this example, 42 °-32 °=10 °.Then, obtain from peak phase theta p until contact is tied
Angle of rotation till bundle phase theta f is i.e. (θ f-θ p) (ST380).In this example, 52 °-42 °=10 °.Then,
{ (θ p-θ i)-(θ f-θ p) }=M (ST390).In this example, M=10 °-10 °=0 °.Obtaining
In the case of axle offset desired value M, data analysis completes.
Then, mode decision (ST400) is carried out.Utilize master computer 110 to perform mode decision to process
(ST400).In this mode decision (ST400), during value based on axle offset desired value M judges to rotate
Relative position relation between the heart and measurement axis L.Fig. 6 is the flow process illustrating mode decision (ST400) process
Figure.
First absolute value | M | of axle offset desired value M is compared by master computer 110 with predetermined threshold ε
(ST410).In the case of absolute value | M | of axle offset desired value M is equal to or less than predetermined threshold ε
(ST410 being "Yes"), it is judged that pass through near the center of rotation of turntable 220 to greatest extent for measurement axis L,
And it is judged as that the calibration that measurement axis is directed at correctly and completes (ST420).
In the case of measurement axis L is by near the center of rotation of turntable 220, even if calibration meter 500
When measuring calibration meter 500 under the state of the position of the center of rotation away from turntable 220, due to calibration meter
500 self geometrical symmetries, contact starts phase theta i and contact terminates phase theta f relative between both
Peak phase theta p also should show symmetry.Therefore, in axle offset desired value M equal to or less than predetermined threshold
In the case of ε, it can be determined that pass through near the center of rotation of turntable 220 for measurement axis L.Axle offset is referred to
Scale value M specifies equal to or less than the pattern of given predetermined threshold ε and the calibration that need not measurement axis L
For first mode.
The value of threshold epsilon is not particularly limited, but the most preferably this value is defined as the numerical value of less than 1 °.
Then, master computer 110 informs the user this first mode, i.e. measurement axis alignment correctly
(ST500).The method informed the user can include audio frequency or verbal announcement or be printed upon on paper,
But in this example by providing guiding display to realize (ST500) on monitor 112.Figure 14 illustrates
Example guides display.Measurement axis L on the image being superimposed upon turntable 200 in the way of show at monitor picture
On, and in this example, display " OK (passing through) " symbol has successfully carried out measurement axis alignment to represent.
Once user checks guiding display and confirms to be calibrated to " OK " (for "Yes" in ST600), user
Calibration meter 500 is removed (ST700) from turntable 220, and proceeds the measurement of testee W.
Above-mentioned example is the feelings that measurement axis L is directed at (measurement axis L is passed through near the center of rotation of turntable 220)
Condition.Will be described below measurement axis L and the situation of skew occurs.Figure 15～19 illustrates that measurement axis L is relative to turntable
The situation of skew is there is in the pivot center of 220 in positive Y-direction.This is appointed as the second pattern.With above-mentioned
Example is identical and as shown in figure 15, is arranged on turntable 220 and measures calibration meter by calibration meter 500
500(ST100,ST200).In the case of turntable 220 rotates, contact pilotage head 361 starts and calibration meter 500
Contact (Figure 15), and along with the further rotation of turntable 220, contact pilotage head 361 is calibrated meter 500
Lateral surface promote and in the positive direction of X-axis, be shifted over (Figure 16).It addition, turning at turntable 220
In the case of dynamic advance, contact pilotage head 361 is finally moved away from calibrating meter 500 (Figure 17).To be achieved in that
Measurement data be mapped to XY face and return the figure of the such as figure etc. shown in Figure 18.
In this example, measurement axis L occurs relative to the pivot center of turntable 220 in positive Y-direction partially
Move, therefore compared with preceding example (Fig. 8～14), can understand that contact starts phase theta i, peak intuitively
Phase theta p all diminishes with contacting end phase theta f.By data analysis (ST300), definition contact starts phase
Position θ i, peak phase theta p terminate phase theta f (ST310～ST360) with contacting.As example, contact starts phase
Position θ i is 18 °, and it is 40 ° that contact terminates phase theta f, and peak phase theta p is 27 °.
Then, axle offset desired value M is calculated.Obtain from contact beginning phase theta i until peak phase theta p is
Angle of rotation only is i.e. (θ p-θ i) (ST370).In this example, 27 °-18 °=9 °.Obtain from peak phase theta p
Rise until contact terminates the angle of rotation of phase theta f i.e. (θ f-θ p) (ST380).In this example,
40 °-27 °=13 °.Then, { (θ p-θ i)-(θ f-θ p) }=M (ST390) is obtained.In this example,
9 °-13 °=-4 °.
Calibration meter 500 self has geometrical symmetry；But, owing to measurement axis L offsets, therefore survey
Amount result is likely to be of without symmetric distortion shape.In other words, contact starts phase theta i and contacts knot
Bundle phase theta f lies in less than symmetry relative to peak phase theta p between both.In measurement axis L at negative Y
In the case of offseting on direction, until the angle of rotation of peak phase theta p from contact beginning phase theta i
(θ p-θ i) is less than the angle of rotation (θ f-θ p) terminating phase theta f from peak phase theta p until contact.Therefore,
Axle offset desired value M is negative.
Mode decision (ST400) is carried out based on axle offset desired value M.Absolute by axle offset desired value M
Value | M | compares (ST410) with predetermined threshold ε.In this example, the absolute value of axle offset desired value M
| M | exceedes predetermined threshold ε (for "No" in ST410).Exceed pre-at absolute value | M | of axle offset desired value M
In the case of determining threshold epsilon, confirm the symbol (ST430) of axle offset desired value M.In axle offset desired value M
Value be (ST430 being "Yes") in the case of negative, it is judged that offset in positive Y-direction for measurement axis L.
Accordingly, it would be desirable in order to the calibration (ST440) making the movement in negative Y-direction of measurement axis L.By needs in order to make
Measurement axis L pattern of movement in negative Y-direction is appointed as the second pattern.
Figure 19 illustrates that example guidance shows.Measurement axis L on the image being superimposed upon turntable 220 in the way of aobvious
Show on monitor picture, and in this example, positive Y-direction occurs to measurement axis L of sening as an envoy to partially
The instruction moved, and together with this instruction, arrow (602) represents and carries out shifting during calibrating
Direction.
Once user checks guiding display and confirms to need axle alignment calibration (for "No" in ST600), uses
Family makes measurement axis L be shifted over (ST800) according to this guiding utilization calibration screw member (341 and 342).?
After calibration, it is " OK " that execution ST200～ST600, and user again confirms the calibration of measurement axis L
(ST600 being "Yes").Afterwards, calibration meter 500 is removed (ST700) from turntable 220 and continues by user
Carry out the measurement of testee W.
As the 3rd example, illustrate that the measurement axis L rotation bobbin relative to turntable 220 is in negative Y-direction
There is the situation of skew.Figure 20～24 illustrates that the measurement axis L rotation bobbin relative to turntable 220 is in negative Y side
Upwards there is the situation of skew.This is appointed as the 3rd pattern.Identical with above-mentioned example and such as Figure 20 institute
Show, calibration meter 500 is arranged on turntable 220 and measures calibration meter 500 (ST100, ST200).Turning
In the case of platform 220 rotates, contact pilotage head 361 starts to contact (Figure 20) with calibration meter 500, and along with
The further rotation of turntable 220, contact pilotage head 361 is calibrated the lateral surface of meter 500 and promotes and in the pros of X-axis
Upwards it is shifted over (Figure 21).It addition, in the case of the rotation of turntable 220 is advanced, contact pilotage head 361 is
It is moved away from eventually calibrating meter 500 (Figure 22).
Such as, the measurement data so obtained is mapped to XY face and returns all figures etc. as shown in figure 23
Figure.In this example, measurement axis L occurs relative to the pivot center of turntable 220 in negative Y-direction partially
Move, therefore compared with previous example (Fig. 8～14), can understand intuitively contact start phase theta i,
Peak phase theta p all becomes big with contacting end phase theta f.By data analysis (ST300), definition contact starts
Phase theta i, peak phase theta p terminate phase theta f (ST310～ST360) with contacting.As example, contact starts
Phase theta i is 46 °, and it is 68 ° that contact terminates phase theta f, and peak phase theta p is 58 °.
Then, axle offset desired value M is calculated.Obtain from contact beginning phase theta i until peak phase theta p is
Angle of rotation only is i.e. (θ p-θ i) (ST370).In this example, 58 °-46 °=12 °.Obtain from peak phase theta p
Rise until contact terminates the angle of rotation of phase theta f i.e. (θ f-θ p) (ST380).In this example,
68 °-58 °=10 °.Then, { (θ p-θ i)-(θ f-θ p) }=M (ST390) is obtained.In this example,
M=12 °-10 °=2 °.
Identical with above-mentioned example (Figure 15～19), owing to measurement axis L offsets, therefore measurement result may
Have without symmetric distortion shape, and contact beginning phase theta i and contact end phase theta f relative to this
Peak phase theta p between the two lies in less than symmetry.In this example, in measurement axis L in negative Y side
In the case of upwards offseting, until angle of rotation (the θ p of peak phase theta p from contact beginning phase theta i
-θ is i) more than the angle of rotation (θ f-θ p) terminating phase theta f from peak phase theta p until contact.Therefore, axle
Offset target value M is positive number.
Absolute value | M | of axle offset desired value M and predetermined threshold ε is compared (for "No" in ST410),
Then the symbol (being "No" in ST430) of axle offset desired value M is confirmed.Value in axle offset desired value M is
In the case of just (ST430 being "No"), it is judged that offset in negative Y-direction for measurement axis L
(ST450).Accordingly, it would be desirable in order to the calibration (ST450) making the movement in positive Y-direction of measurement axis L.Need to
The 3rd pattern is appointed as in order to make measurement axis L pattern of movement in positive Y-direction.
Figure 24 illustrates that example guidance shows.Measurement axis L on the image being superimposed upon turntable 220 in the way of aobvious
Show on monitor picture, and in this example, negative Y-direction occurs to measurement axis L of sening as an envoy to partially
The instruction moved, and together with this instruction, arrow (603) represents and carries out shifting during calibrating
Direction.
Once user checks guiding display and confirms to need axle alignment calibration (for "No" in ST600), uses
Family makes measurement axis L be shifted over (ST800) according to this guiding utilization calibration screw member (341 and 342).?
After calibration, it is " OK " that execution ST200～ST600, and user again confirms the calibration of measurement axis L
(ST600 being "Yes").Afterwards, calibration meter 500 is removed (ST700) from turntable 220 and continues by user
Carry out the measurement of testee W.
Following beneficial effect is achieved by the first embodiment with said structure.
(1) in the present embodiment, the position at 500 centers being arranged far from turntable 220 is counted in calibration.Tested
In the case of the measurement of object W is carrying out period, testee W may remain in place and puts and school
Quasi-meter 500 can be arranged in the vacant region of turntable 220.Therefore, even if measuring testee W
In the case of period changes the posture change of contact pilotage 360 or head keeper 340, also need not make measurement
Centering of turntable 220 and testee W is again carried out after axle alignment.So make it possible to improve survey
Amount efficiency.Furthermore, it is possible to carry out the replacing of contact pilotage 360 and head keeper 340 by shirtsleeve operation
Posture changes, and therefore can carry out contact pilotage 360 wittingly in response to the position of measuring of testee W
Change and the posture of head keeper 340 changes.Therefore, convenience and the certainty of measurement of measuring task are improved.
(2) in the present embodiment, calibration meter 500 can be arranged far from the position at the center of turntable 200, and
And for instance, it is not necessary to the position of calibration meter 500 is carried out trickle adjustment.Traditionally, cue ball 90 must be provided with
Center at turntable 220, it is therefore desirable in order to make cue ball 90 operation placed in the middle.In this respect, this enforcement
Example is greatly simplified.
(3) in the present embodiment, judge measurement axis L is which side according to the symbol of axle offset desired value M
Upwards offset.It addition, will be in which direction about measurement axis L by guiding display to give the user
The instruction of upper movement.Traditionally, by the most close along Y-axis when contact pilotage head 361 clashes into cue ball 90
Peak dot is found with away from contact pilotage head 361.In this respect, according to this embodiment, it can expectation is contracted significantly
The short time quantum made needed for measurement axis alignment.
(4) the present embodiment provides above-mentioned novelty result；But, calibration meter 500 self is traditional field
Interior well-known cue ball 90 etc., and need not use special meter.Therefore, the present embodiment is being used
In the case of, required fringe cost is less, and can add the present embodiment to existing with low cost
Roundness measuring device 100.
First variation
Multiple typical variant examples of the present embodiment are described.Owing to calibration meter 500 is arranged on the center of turntable 220
In addition, the most such as, as shown in figure 25, calibration meter 500 can be arranged on the side of turntable 220.?
In this case, even if calibration meter 500 holding is being installed to turntable 220, also will not be to quilt
The measurement surveying object W produces any impact.Therefore, calibration meter 500 can remain that installation is to turntable
The side of 220.
Second variation
Calibration meter 500 is not limited to spheroid.Calibration meter 500 only need to have symmetry relative to peak value, i.e. have
So-called symmetric figure.Such as, as shown in figure 26, calibration meter 500 can be to have face symmetry
The polygon of such as regular prism or the orthopyramid etc. of property, (bottom surface is equilateral for such as triangular prism or pyrometric cone etc.
Triangle or the shape of isosceles triangle).Calibrate and count 500 figures being not limited to there is convex, and such as
Instead, can have all spills waited as shown in figure 27, as long as calibration meter 500 has face symmetry
?.In this case, recess the deepest recessed position is corresponding with peak value.In this respect, in school
In the case of quasi-meter 500 is spheroid, the obvious all masks with respect to ball centre of calibration meter 500 have
Face symmetry.As a comparison, in the case of the calibration meter 500 of aspheres is arranged on turntable 220,
The mode that calibration meter 500 must be in terms of calibration on the plane of symmetry of 500 by the diameter of rotary shaft and turntable 220
It is arranged on turntable 220.
3rd variation
In the above-described embodiments, master computer 110 measurement result based on calibration meter 500 obtains measurement axis
L offsets in which direction, and is shown displayed to the user that these results by monitor.Therefore,
The manual operation carried out via user is to measure the task of axle alignment.As a comparison, configure as follows
May be possible that measurement result based on calibration meter 500 carries out occurring in which direction with measurement axis L
The quantitative Analysis that the skew of what degree is relevant, and specifically calculate calibrator quantity.In addition to calibrating direction,
Can also be shown by monitor and display to the user that calibrator quantity.User can carry out making measurement axis L send out
The operation of the displacement of the calibrator quantity indicated by life.Alternatively, measurement axis is to being configured to by host computer
Machine 110 is carried out by automatically controlling automatically according to the calibrator quantity calculated.Diameter at calibration meter 500
Or installation site (relative to the distance of center of rotation) and contact pilotage 360 or head keeper 340 further
Angle of inclination be known in the case of, (due to for geometrical calculation therefore) can specifically calculate theoretically
Calibrator quantity.
Alternatively, the description of above-described embodiment supposes to carry out being referred to as the calibration operation of " measurement axis alignment ".
But, following configuration may be possible that roundness measuring device grasps axle offset direction and axle offset amount, and
And the correction calculating of value is measured according to this axle offset direction and this axle offset amount.
Additionally, this invention is not limited to above-described embodiment, and can be without departing from the scope of the present invention
In the case of modify as required.In the above-described embodiments, exemplified with utilizing set by head keeper 340
The calibration screw member 341 and 342 put is to the structure making measurement axis L move.But, measurement axis alignment is
The pivot center of turntable 220 is directed at measurement axis L of contact pilotage head 361, and therefore turntable is also configured to edge
Y-axis to be shifted over.
Do not have to limit the method for providing program (axle offset determining program) to master computer.Can will remember
Record has (non-volatile) record medium of this program to be inserted directly in computer and install this program, or
The reading device of the information on reading & recording medium can be mounted externally to computer and can be by
This program is installed on computers from this reading device, or can by this program wirelessly or warp
Thered is provided to computer by the telecommunication circuit of such as the Internet, LAN cable or telephone circuit etc..
Noting, above-mentioned example is solely for the purpose of illustration and provides, and be certainly not constructed to right
The present invention limits.Although illustrating the present invention with reference to exemplary embodiments, it is to be understood that, here
The word used be for describe and explanation word rather than for carrying out the word limited.Do not having
Have in the case of deviating from the spirit and scope of each aspect of the present invention, can be such as current statement and amendment
It is changed in the boundary of claims.Although the most saying with reference to ad hoc structure, material and embodiment
Understand the present invention, but the present invention is not intended to be limited to details disclosed herein；On the contrary, the present invention expands
Open up to the most within the scope of the appended claims wait all structures being functionally equal to, method and
Purposes.
The invention is not restricted to above-described embodiment, and can be in the case of without departing from the scope of the present invention
Make various changes and modifications.
Cross-Reference to Related Applications
This application claims the priority of Japanese publication 2015-045978 submitted on March 9th, 2015, at this
Entire contents is clearly comprised by quoting.
Claims (12)
1. a calibration steps for form measuring instrument, described form measuring instrument includes:
Turntable, it is used for placing testee, and described turntable can rotate centered by Z axis；
And
Measurement of coordinates portion, it has the contact pilotage head being configured to detect described testee, and
Described measurement of coordinates portion is configured to make described contact pilotage head to retreat along the direction parallel with X-axis, wherein X-axis,
Y-axis and Z axis are mutually orthogonal to one another, and described measurement of coordinates portion is also configured to use described contact pilotage head and holds
The tracking measurement on the capable surface along described testee,
Described calibration steps comprises the following steps:
Using through the center of described contact pilotage head and the imaginary line parallel with X-axis as the feelings of measurement axis
Under condition, it is arranged on the position in addition to the center of rotation of described turntable by having face symmetric calibration meter；
When driving described turntable to rotate, measure described calibration meter；And
The phase pattern of described turntable when detecting described calibration meter based on described contact pilotage head, sentences
Whether disconnected described measurement axis offsets relative to the rotary shaft of described turntable.
Calibration steps the most according to claim 1, wherein, further comprising the steps of:
Based on described calibration meter measurement result determine detection start phase theta i, detection terminate phase theta f and
Peak phase theta p, wherein said detection start phase theta i be described contact pilotage head start described calibration meter detection time
The phase place of described turntable, it is the inspection that described contact pilotage head terminates described calibration meter that described detection terminates phase theta f
The phase place of described turntable during survey, and described peak phase theta p is described turn when showing peak value of measured value
The phase place of platform；And
Axle offset desired value M is being defined as M={ (θ p-θ i)-(θ f-θ p) } in the case of, according to institute
Stating axle offset desired value M is the most still to bear the direction of the skew judging described measurement axis.
Calibration steps the most according to claim 1, wherein, described calibration meter is at described calibration meter
Measurement before be arranged on the side of described turntable.
Calibration steps the most according to claim 2, wherein, described calibration meter is at described calibration meter
Measurement before be arranged on the side of described turntable.
5. according to the calibration steps according to any one of claim 1-4, wherein, described calibration meter has been
Whole spheroid and part sphere one of them.
6. a calibration steps for form measuring instrument, described form measuring instrument includes:
Turntable, it is used for placing testee, and described turntable can rotate centered by Z axis；
And
Measurement of coordinates portion, it has the contact pilotage head being configured to detect described testee, and
Described measurement of coordinates portion is configured to make described contact pilotage head to retreat along the direction parallel with X-axis, wherein X-axis,
Y-axis and Z axis are mutually orthogonal to one another, and described measurement of coordinates portion is also configured to use described contact pilotage head and holds
Row along the tracking measurement on surface of described testee, wherein can on the direction of Y-axis to institute
The position of the position and described turntable of stating contact pilotage head carries out trickle calibration,
Described calibration steps comprises the following steps:
Using through the center of described contact pilotage head and the imaginary line parallel with X-axis as the feelings of measurement axis
Under condition, it is arranged on the position in addition to the center of rotation of described turntable by having face symmetric calibration meter；
When driving described turntable to rotate, measure described calibration meter；
The phase pattern of described turntable when detecting described calibration meter based on described contact pilotage head, sentences
Whether disconnected described measurement axis offsets relative to the rotary shaft of described turntable；And
After having judged whether described measurement axis offsets, by sentencing of the offset direction of described measurement axis
Disconnected result shows on a monitor so that user can carry out described touching with reference to the display of described monitor
The trickle calibration of the position of syringe needle.
Calibration steps the most according to claim 6, wherein, further comprising the steps of:
Based on described calibration meter measurement result determine detection start phase theta i, detection terminate phase theta f and
Peak phase theta p, wherein said detection start phase theta i be described contact pilotage head start described calibration meter detection time
The phase place of described turntable, it is the inspection that described contact pilotage head terminates described calibration meter that described detection terminates phase theta f
The phase place of described turntable during survey, and described peak phase theta p is described turn when showing peak value of measured value
The phase place of platform；And
Axle offset desired value M is being defined as M={ (θ p-θ i)-(θ f-θ p) } in the case of, according to institute
Stating axle offset desired value M is the most still to bear the direction of the skew judging described measurement axis.
Calibration steps the most according to claim 6, wherein, described calibration meter is at described calibration meter
Measurement before be arranged on the side of described turntable.
Calibration steps the most according to claim 7, wherein, described calibration meter is at described calibration meter
Measurement before be arranged on the side of described turntable.
10. according to the calibration steps according to any one of claim 6-9, wherein, described calibration meter has been
Whole spheroid and part sphere one of them.
The calibration steps of 11. 1 kinds of form measuring instruments, wherein said form measuring instrument includes:
Turntable, it is used for placing testee, and described turntable can rotate centered by Z axis；
Measurement of coordinates portion, it has the contact pilotage head being configured to detect described testee, and
Described measurement of coordinates portion is configured to make described contact pilotage head to retreat along the direction parallel with X-axis, wherein X-axis,
Y-axis and Z axis are mutually orthogonal to one another, and described measurement of coordinates portion is also configured to use described contact pilotage head and holds
Row, along the tracking measurement on the surface of described testee, wherein has face symmetric calibration meter and is arranged on
Position in addition to the center of rotation of described turntable；And
Master computer, it carries out described turntable and the work in described measurement of coordinates portion via motion controller
Control,
Described calibration steps comprises the following steps:
Using through the center of described contact pilotage head and the imaginary line parallel with X-axis as the feelings of measurement axis
Under condition, determined the axle offset of described form measuring instrument by described master computer；
When driving described turntable to rotate, measure described calibration meter by described master computer；And
By described master computer, turn described in when described calibration meter being detected based on described contact pilotage head
The phase pattern of platform judges whether described measurement axis offsets relative to the rotary shaft of described turntable.
12. 1 kinds of form measuring instruments, including:
Turntable, it is used for placing testee, and described turntable can rotate centered by Z axis；
Calibration meter, it has face symmetry, and described calibration meter is positioned at except the center of rotation of described turntable
Position in addition；And
Measurement of coordinates portion, it has the contact pilotage head being configured to detect described testee, and
Described measurement of coordinates portion is configured to make described contact pilotage head to retreat along the direction parallel with X-axis, wherein X-axis,
Y-axis and Z axis are mutually orthogonal to one another, and described measurement of coordinates portion is also configured to use described contact pilotage head and holds
Row is along the tracking measurement on the surface of described testee.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015045978A JP6537852B2 (en) | 2015-03-09 | 2015-03-09 | Method for determining misalignment of shape measuring device, method for adjusting shape measuring device, program for determining misalignment of shape measuring device, and shape measuring device |
| JP2015-045978 | 2015-03-09 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105953703A true CN105953703A (en) | 2016-09-21 |
| CN105953703B CN105953703B (en) | 2020-01-17 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201610133196.0A Active CN105953703B (en) | 2015-03-09 | 2016-03-09 | Shape measuring device and calibration method thereof |
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| Country | Link |
|---|---|
| US (1) | US9952045B2 (en) |
| JP (1) | JP6537852B2 (en) |
| CN (1) | CN105953703B (en) |
| DE (1) | DE102016203802A1 (en) |
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| JP7361259B2 (en) | 2020-02-18 | 2023-10-16 | 株式会社東京精密 | Roundness measuring machine |
| US11326865B2 (en) | 2020-04-28 | 2022-05-10 | Mitutoyo Corporation | Rotating chromatic range sensor system with calibration objects and method |
| US11187521B2 (en) | 2020-04-28 | 2021-11-30 | Mitutoyo Corporation | Rotating chromatic range sensor system with calibration object and method |
| CN111649671B (en) * | 2020-06-11 | 2021-12-10 | 中国航空工业集团公司北京航空精密机械研究所 | Multi-axis vision measurement system and calibration method for rotation axis position of pitching table |
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2016
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- 2016-03-09 DE DE102016203802.8A patent/DE102016203802A1/en active Pending
- 2016-03-09 CN CN201610133196.0A patent/CN105953703B/en active Active
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| CN1637380A (en) * | 2003-12-22 | 2005-07-13 | 株式会社三丰 | Width measuring method and surface property measuring equipment |
| US20100292946A1 (en) * | 2009-05-18 | 2010-11-18 | Mitutoyo Corporation | Form measuring instrument, and calibration method and calibration program therefor |
| US20110000277A1 (en) * | 2009-07-01 | 2011-01-06 | Hexagon Metrology, Inc. | Method and apparatus for probe tip diameter calibration |
| JP2012083192A (en) * | 2010-10-12 | 2012-04-26 | Mitsutoyo Corp | Calibration method and calibration jig for three-dimensional measuring machines |
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Also Published As
| Publication number | Publication date |
|---|---|
| DE102016203802A1 (en) | 2016-09-15 |
| JP6537852B2 (en) | 2019-07-03 |
| JP2016166766A (en) | 2016-09-15 |
| US9952045B2 (en) | 2018-04-24 |
| CN105953703B (en) | 2020-01-17 |
| US20160265912A1 (en) | 2016-09-15 |
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