JP2020536383A - Tft基板の製造方法及びtft基板 - Google Patents
Tft基板の製造方法及びtft基板 Download PDFInfo
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 131
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 131
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- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 8
- 239000000243 solution Substances 0.000 description 8
- 239000002184 metal Substances 0.000 description 6
- 229910052751 metal Inorganic materials 0.000 description 6
- 230000000873 masking effect Effects 0.000 description 5
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- H01L21/7624—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology
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Abstract
Description
る。フレキシブル基板及びTFTデバイス膜層間の応力の不一致を低減し、複数回の曲げプロセスにおける安定性を向上させるために、フレキシブル基板を島状構造に設計することが考えられる。しかしながら、ポリイミドフレキシブル基板の島状構造を如何に実現するかは大きな難点である。
Claims (17)
- TFT基板の製造方法であって、
シリコンウェハプレートを提供するステップと、
前記シリコンウェハプレート上にフォトレジスト材料をコーティングし、第1マスク構造に対応する位置の前記フォトレジスト材料が除去されるようにパターニング処理するステップと、
前記フォトレジスト材料がコーティングされる前記シリコンウェハプレートの一方側に前記フォトレジスト材料を被覆する第1マスク層を形成し、前記フォトレジスト材料に対応するエッチング溶液を用いることにより、前記第1マスク構造が形成されるように前記フォトレジスト材料を被覆する前記第1マスク層を除去するとともに、島状構造が形成されるように前記シリコンウェハプレートをプラズマエッチングするステップと、
シリコンウェハサブプレートが形成されるように前記島状構造を層ごとにカットするステップと、
前記TFT基板が形成されるように前記シリコンウェハサブプレートを基板上に接着するステップと、を含む、
TFT基板の製造方法。 - 前記島状構造が形成された後に、
前記シリコンウェハプレート上に第2マスク層を積層し、前記島状構造が形成されていない前記シリコンウェハプレートの領域における前記第2マスク層上に第1保護層を形成し、前記第1保護層を硬化処理するステップと、
前記第2マスク層に対応するエッチング溶液を用いることにより、前記第1保護層から離間する前記島状構造の表面における前記第2マスク層を除去するステップと、
前記シリコンウェハプレート上に前記島状構造を覆う第2保護層を形成し、前記第2保護層を硬化処理するステップと、を含む、
請求項1に記載の方法。 - 前記第1保護層を硬化処理するステップは、前記第1保護層を第1温度環境に置き、前記第1保護層が硬化されるように第1所定時間を維持することを含み、
前記第2保護層を硬化処理するステップは、前記第2保護層を第2温度環境に置き、前記第2保護層が硬化されるに第2所定時間を維持することを含む、
請求項2に記載の方法。 - 前記島状構造を層ごとにカットするステップは、前記シリコンウェハサブプレートを覆う第2保護層サブ層が得られるように前記島状構造及び前記第2保護層を層ごとにカットすることを含む、
請求項2に記載の方法。 - 前記島状構造を覆う前記第2保護層を層ごとにカットするカット方向は、前記シリコンウェハプレートの延在平面に平行する、
請求項4に記載の方法。 - 前記第2保護層サブ層を前記基板上に転移させ、前記シリコンウェハサブプレートが露出されるように前記第2保護層サブ層をプラズマエッチングすることにより、前記TFT基板を形成する、
請求項4に記載の方法。 - 前記TFT基板を第3温度環境に置き、第3所定時間を維持するステップをさらに含む、
請求項4に記載の方法。 - TFT基板の製造方法であって、
シリコンウェハプレートを提供するステップと、
前記シリコンウェハプレート上に第1マスク構造を形成し、島状構造が形成されるようにエッチング処理するステップと、
シリコンウェハサブプレートが形成されるように前記島状構造を層ごとにカットするステップと、
前記TFT基板が形成されるように前記シリコンウェハサブプレートを基板上に接着するステップと、を含む、
TFT基板の製造方法。 - 前記シリコンウェハプレート上に第1マスク構造を形成するステップは、
前記シリコンウェハプレート上にフォトレジスト材料をコーティングし、第1マスク構造に対応する位置の前記フォトレジスト材料が除去されるようにパターニング処理するステップと、
前記フォトレジスト材料がコーティングされる前記シリコンウェハプレートの一方側に前記フォトレジスト材料を被覆する第1マスク層を形成し、前記フォトレジスト材料に対応するエッチング溶液を用いることにより、前記第1マスク構造が形成されるように前記フォトレジスト材料を被覆する前記第1マスク層を除去するステップと、を含む、
請求項8に記載の方法。 - 前記シリコンウェハプレート上に第1マスク構造を形成し、エッチング処理するステップは、
前記島状構造が形成されるように前記シリコンウェハプレートをプラズマエッチングするステップを含む、
請求項8に記載の方法。 - 前記島状構造が形成された後に、
前記シリコンウェハプレート上に第2マスク層を積層し、前記島状構造が形成されていない前記シリコンウェハプレートの領域における前記第2マスク層上に第1保護層を形成し、前記第1保護層を硬化処理するステップと、
前記第2マスク層に対応するエッチング溶液を用いることにより、前記第1保護層から離間する前記島状構造の表面における前記第2マスク層を除去するステップと、
前記シリコンウェハプレート上に前記島状構造を覆う第2保護層を形成し、前記第2保護層を硬化処理するステップと、を含む、
請求項8に記載の方法。 - 前記第1保護層を硬化処理するステップは、前記第1保護層を第1温度環境に置き、前記第1保護層が硬化されるように第1所定時間を維持することを含み、
前記第2保護層を硬化処理するステップは、前記第2保護層を第2温度環境に置き、前記第2保護層が硬化されるに第2所定時間を維持することを含む、
請求項11に記載の方法。 - 前記島状構造を層ごとにカットするステップは、前記シリコンウェハサブプレートを覆う第2保護層サブ層が得られるように前記島状構造及び前記第2保護層を層ごとにカットすることを含む、
請求項11に記載の方法。 - 前記島状構造を覆う前記第2保護層を層ごとにカットするカット方向は、前記シリコンウェハプレートの延在平面に平行する、
請求項13に記載の方法。 - 前記第2保護層サブ層を前記基板上に転移させ、前記シリコンウェハサブプレートが露出されるように前記第2保護層サブ層をプラズマエッチングすることにより、前記TFT基板を形成する、
請求項13に記載の方法。 - 前記TFT基板を第3温度環境に置き、第3所定時間を維持するステップをさらに含む、
請求項13に記載の方法。 - TFT基板の製造方法によって製造されるTFT基板であって、
前記TFT基板の製造方法は、
シリコンウェハプレートを提供するステップと、
前記シリコンウェハプレート上に第1マスク構造を形成し、島状構造が形成されるようにエッチング処理するステップと、
シリコンウェハサブプレートが形成されるように前記島状構造を層ごとにカットするステップと、
前記TFT基板が形成されるように前記シリコンウェハサブプレートを基板上に接着するステップと、を含む、TFT基板。
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CN201710976235.8 | 2017-10-17 | ||
PCT/CN2017/112507 WO2019075841A1 (zh) | 2017-10-17 | 2017-11-23 | 一种tft基板的制备方法以及tft基板 |
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EP3699954A1 (en) | 2020-08-26 |
WO2019075841A1 (zh) | 2019-04-25 |
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JP6994566B2 (ja) | 2022-01-14 |
CN107845606A (zh) | 2018-03-27 |
KR102307137B1 (ko) | 2021-09-30 |
US10930546B2 (en) | 2021-02-23 |
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EP3699954A4 (en) | 2021-07-14 |
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