JP2020536167A - 三元tm二ホウ化物コーティングフィルム - Google Patents
三元tm二ホウ化物コーティングフィルム Download PDFInfo
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/067—Borides
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23B—TURNING; BORING
- B23B27/00—Tools for turning or boring machines; Tools of a similar kind in general; Accessories therefor
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
- C23C14/352—Sputtering by application of a magnetic field, e.g. magnetron sputtering using more than one target
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
- C23C28/044—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material coatings specially adapted for cutting tools or wear applications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C30/00—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
- C23C30/005—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process on hard metal substrates
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Cutting Tools, Boring Holders, And Turrets (AREA)
Abstract
Description
WB2(紺色のデータポイント)では、Efはω型のショットキー欠陥濃度の増加に伴ってのみ増加する。しかし、Efは最初はα型のショットキー欠陥濃度の増加に伴って(約10at:%まで)減少する。WB2の2つのEf−対−欠陥濃度曲線(α型またはω型を有する)は、約8at:%の空孔濃度で交差し、そこからα型が勝る、図8cを参照。
傾向は、化学組成だけでは説明できず、フィルムの形態や残留応力と関連する。X線回折では、全ての温度と組成において構造に大きな変化は見られなかった。二元α−VB2コーティングは800℃でのアニール後に剥離したのに対し、タングステンを含むコーティングは全て基板上に残っていたため、アニールされたα−VB2のデータは得られなかった。金属副格子上のWが5at:%および13at:%のコーティングは、Ta=800℃でのアニール後に2GPaの硬度低下を示したが、最も高いW合金コーティング(V0.69W0.21B2)では、約2GPaのHの増加(42.5±0.9GPaまで)を示した。調査したすべての三元コーティングは、1000℃および1200℃の間でアニールした後に最高硬度を示した。例えば、最も高いW含有コーティング(V0.69W0.21B2)は、1時間アニールすると、39GPaから43GPaまで堆積時の硬度が増加し、1200℃または1400℃でアニールすると40GPa(堆積時の値に近い)までわずかに減少することを示した(図11a)。
これは、H/EとH3/E2の値も、一般的な結果ではないアニール温度(少なくともTa≦1200℃でアニールした場合)の上昇に伴って増加するという結果につながる。X線回折の研究(個々のアニール温度の後)は、追加の相を示さず、また、個々のXRDピーク(単相α−V1−xWxB2の代表)は、その形状のほとんど変化を示さない(示されていない)。これは、図12aおよびbに示すように、それぞれ1000℃および1400℃で1時間真空アニールした後の最も高いW含有コーティング(V0.69W0.21B2)についての断面TEM研究と一致する。
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Claims (12)
- 少なくとも1つの三元TM二ホウ化物コーティングフィルムを含むコーティングでコーティングされた基板表面を含むコーティング基板であって、前記少なくとも1つの三元TM二ホウ化物コーティングフィルムは、2つの異なる遷移金属を含む、コーティング基板。
- 前記2つの遷移金属のうちの第1遷移金属は、タングステン、タンタルまたはバナジウムであることを特徴とする、請求項2に記載のコーティング基板。
- 前記2つの遷移金属のうちの第2遷移金属は、タングステン、タンタルまたはバナジウムであることを特徴とする、請求項2に記載のコーティング基板。
- 前記少なくとも1つの三元TM二ホウ化物コーティングフィルムの化学組成は、式W1−xTaxB2−z、または式V1−xWxB2で表され、0.00≦x≦0.45、好ましくは0.05≦x≦0.45、および−0.03≦z≦0.03であり、係数がモル分率に対応することを特徴とする、請求項1に記載のコーティング基板。
- 前記少なくとも1つの三元TM二ホウ化物コーティングフィルムの化学組成は、式W1−xTaxB2−z、または式V1−xWxB2で表され、0.00≦x≦0.26、好ましくは0.05≦x≦0.26であることを特徴とする、請求項1から4のいずれか1項に記載のコーティング基板。
- 前記少なくとも1つの三元TM二ホウ化物コーティングフィルム中に、前記2つの遷移金属のそれぞれの二ホウ化物の1つの三元相が存在することを特徴とする、請求項4または5に記載のコーティング基板。
- 前記少なくとも1つの三元TM二ホウ化物コーティングフィルム中に、前記2つの遷移金属のそれぞれの二ホウ化物の1つのα相が存在することを特徴とする、請求項5に記載のコーティング基板。
- 請求項2〜7のいずれか1項に記載のコーティング基板を製造する方法であって、三元W1−xTaxB2−zコーティングフィルムを作製するために、二ホウ化タングステンWB2および二ホウ化タンタルTaB2を含むターゲットをそれぞれ、アルゴンを含む雰囲気下で、前記少なくとも1つの三元TM二ホウ化物コーティングフィルムを前記基板表面に堆積するための少なくとも1つのコーティングされる基板を含む真空チャンバの内部でスパッタリングする、あるいは、V1−xWxB2薄膜を作製するために、二ホウ化バナジウムVB2およびホウ化タングステンW2B5−xを含むターゲットをそれぞれ、アルゴンを含む雰囲気下で、前記少なくとも1つの三元TM二ホウ化物コーティングフィルムを前記基板表面に堆積するための少なくとも1つのコーティングされる基板を含む真空チャンバの内部でスパッタリングすることを特徴とする、方法。
- 前記コーティング基板は、成形ツールまたは切削ツールまたは部品であることを特徴とする、請求項1〜7のいずれか1項に記載のコーティング基板。
- 前記コーティング基板は、成形ツールまたは切削ツールまたは部品の一部であることを特徴とする、請求項1〜7のいずれか1項に記載のコーティング基板。
- 前記少なくとも1つの三元TM二ホウ化物、好ましくは全ての三元TM二ホウ化物の硬度は、真空雰囲気中で800℃から1400℃の間の温度で1時間の間にアニールした後、ナノインデンテーションによって測定された30GPa超、好ましくは40GPa超の硬度を維持することを特徴とする、請求項2〜7のいずれか1項に記載のコーティング基板。
- 前記少なくとも1つの三元TM二ホウ化物、好ましくは全ての三元TM二ホウ化物の硬度は、真空雰囲気中で800℃から1400℃の間の温度で1時間のアニール中に経時硬化効果を受けることを特徴とする、請求項2〜7のいずれか1項に記載のコーティング基板。
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US201762569064P | 2017-10-06 | 2017-10-06 | |
US62/569,064 | 2017-10-06 | ||
US201862660390P | 2018-04-20 | 2018-04-20 | |
US62/660,390 | 2018-04-20 | ||
PCT/EP2018/077335 WO2019068933A1 (en) | 2017-10-06 | 2018-10-08 | TM TERNAIRE DIBORURE COATING FILMS |
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AT16480U1 (de) * | 2018-04-20 | 2019-10-15 | Plansee Composite Mat Gmbh | Target und Verfahren zur Herstellung eines Targets |
DE112019007736T5 (de) * | 2019-10-15 | 2022-06-02 | Guangdong University Of Technology | Beschichtetes Schneidwerkzeug zum Bearbeiten von Titanlegierungen und Superlegierungen und Herstellungsverfahren hierfür |
KR20230007483A (ko) * | 2020-06-30 | 2023-01-12 | 교세라 가부시키가이샤 | 피복 공구 및 절삭 공구 |
CN111962022B (zh) * | 2020-09-07 | 2022-05-06 | 西安石油大学 | 一种wb2/wbc多层硬质涂层及其制备方法和应用 |
CN114032502B (zh) * | 2021-11-23 | 2022-05-03 | 江西省科学院应用物理研究所 | 一种耐磨耐蚀复合层及其制备方法 |
CN115073183B (zh) * | 2022-06-27 | 2023-06-13 | 山东大学 | 一种高熵硼化物纳米粉体及其溶胶-凝胶制备方法 |
CN117303908A (zh) * | 2022-08-23 | 2023-12-29 | 北京理工大学 | 一种四元高熵金属二硼化物及其制备方法和应用 |
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CN111344432B (zh) | 2022-12-20 |
EP3692182A1 (en) | 2020-08-12 |
KR20200065038A (ko) | 2020-06-08 |
CN111344432A (zh) | 2020-06-26 |
JP7223446B2 (ja) | 2023-02-16 |
US20200332407A1 (en) | 2020-10-22 |
WO2019068933A1 (en) | 2019-04-11 |
US11466357B2 (en) | 2022-10-11 |
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