JP2020529329A5 - - Google Patents

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Publication number
JP2020529329A5
JP2020529329A5 JP2020504696A JP2020504696A JP2020529329A5 JP 2020529329 A5 JP2020529329 A5 JP 2020529329A5 JP 2020504696 A JP2020504696 A JP 2020504696A JP 2020504696 A JP2020504696 A JP 2020504696A JP 2020529329 A5 JP2020529329 A5 JP 2020529329A5
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JP
Japan
Prior art keywords
concentration
radius
treated article
abrasive
length
Prior art date
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Granted
Application number
JP2020504696A
Other languages
English (en)
Japanese (ja)
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JP7262439B2 (ja
JP2020529329A (ja
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Publication date
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Priority claimed from PCT/IB2018/055037 external-priority patent/WO2019025883A1/en
Publication of JP2020529329A publication Critical patent/JP2020529329A/ja
Publication of JP2020529329A5 publication Critical patent/JP2020529329A5/ja
Application granted granted Critical
Publication of JP7262439B2 publication Critical patent/JP7262439B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2020504696A 2017-07-31 2018-07-09 可変研磨剤分布を有するフロアパッド Active JP7262439B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201762539120P 2017-07-31 2017-07-31
US62/539,120 2017-07-31
PCT/IB2018/055037 WO2019025883A1 (en) 2017-07-31 2018-07-09 VARIABLE ABRASIVE DISTRIBUTION FLOOR MAT

Publications (3)

Publication Number Publication Date
JP2020529329A JP2020529329A (ja) 2020-10-08
JP2020529329A5 true JP2020529329A5 (https=) 2021-08-19
JP7262439B2 JP7262439B2 (ja) 2023-04-21

Family

ID=63143295

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2020504696A Active JP7262439B2 (ja) 2017-07-31 2018-07-09 可変研磨剤分布を有するフロアパッド

Country Status (8)

Country Link
US (1) US11806838B2 (https=)
EP (1) EP3661697B1 (https=)
JP (1) JP7262439B2 (https=)
KR (1) KR102619228B1 (https=)
CA (1) CA3071501A1 (https=)
MX (1) MX2020001195A (https=)
TW (1) TWI826383B (https=)
WO (1) WO2019025883A1 (https=)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20220156966A (ko) * 2020-04-07 2022-11-28 생-고뱅 어브레이시브즈, 인코포레이티드 고정 연마 버프
CN114378715B (zh) * 2020-10-16 2023-05-30 万华化学集团电子材料有限公司 一种化学机械抛光垫及抛光方法
US20240316724A1 (en) * 2023-03-21 2024-09-26 Taiwan Semiconductor Manufacturing Company, Ltd. Multi-pattern in-pad surface for polish rate control

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1694594C3 (de) 1960-01-11 1975-05-28 Minnesota Mining And Manufacturing Co., Saint Paul, Minn. (V.St.A.) Reinigungs- und Polierkörper
US6062958A (en) 1997-04-04 2000-05-16 Micron Technology, Inc. Variable abrasive polishing pad for mechanical and chemical-mechanical planarization
ID25820A (id) * 1998-03-27 2000-11-09 Norton Co Alat-alat penggosok
US7201645B2 (en) * 1999-11-22 2007-04-10 Chien-Min Sung Contoured CMP pad dresser and associated methods
US20060059785A1 (en) * 2002-09-24 2006-03-23 Chien-Min Sung Methods of maximizing retention of superabrasive particles in a metal matrix
TWI238753B (en) * 2002-12-19 2005-09-01 Miyanaga Kk Diamond disk for grinding
US20050076577A1 (en) 2003-10-10 2005-04-14 Hall Richard W.J. Abrasive tools made with a self-avoiding abrasive grain array
US10065283B2 (en) * 2005-03-15 2018-09-04 Twister Cleaning Technology Ab Method and tool for maintenance of hard surfaces, and a method for manufacturing such a tool
DK1787751T3 (da) 2005-03-15 2011-10-31 Htc Sweden Ab Anvendelse af et system til daglig vedligeholdelse af en hård gulvoverflade bestående af sten eller stenlignende materiale
MX2007011295A (es) 2005-03-15 2008-03-18 Htc Sweden Ab Metodos y herramienta para mantenimiento de superficies duras, y un metodo para la fabricacion de dicha herramienta.
CN102458771A (zh) * 2009-04-17 2012-05-16 3M创新有限公司 采用转移制品制造的平面磨料制品及其制造方法
WO2011045953A1 (ja) 2009-10-15 2011-04-21 シャープ株式会社 液晶表示パネルおよびその製造方法、液晶表示装置
ITMI20110850A1 (it) 2011-05-16 2012-11-17 Nicola Fiore Utensile multi-abrasivo
WO2013181582A1 (en) 2012-05-31 2013-12-05 Ryan Webster Diamond impregnated polishing pad with diamond pucks
TWI589404B (zh) 2013-06-28 2017-07-01 聖高拜磨料有限公司 基於向日葵圖案之經塗佈的研磨製品
JP6964588B2 (ja) 2015-09-08 2021-11-10 スリーエム イノベイティブ プロパティズ カンパニー 砥粒凝集体を伴う砥粒回転ツール
USD843672S1 (en) 2017-07-31 2019-03-19 3M Innovative Properties Company Floor pad
USD843673S1 (en) 2017-08-09 2019-03-19 3M Innovtive Properties Company Floor pad
USD844272S1 (en) 2017-08-09 2019-03-26 3M Innovative Properties Company Floor pad

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