JP2020516900A5 - - Google Patents
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- JP2020516900A5 JP2020516900A5 JP2019555964A JP2019555964A JP2020516900A5 JP 2020516900 A5 JP2020516900 A5 JP 2020516900A5 JP 2019555964 A JP2019555964 A JP 2019555964A JP 2019555964 A JP2019555964 A JP 2019555964A JP 2020516900 A5 JP2020516900 A5 JP 2020516900A5
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- 238000005259 measurement Methods 0.000 claims 39
- 238000005303 weighing Methods 0.000 claims 35
- 230000003287 optical effect Effects 0.000 claims 18
- 230000005855 radiation Effects 0.000 claims 17
- 238000005286 illumination Methods 0.000 claims 13
- 238000000034 method Methods 0.000 claims 11
- 230000010365 information processing Effects 0.000 claims 9
- 230000005484 gravity Effects 0.000 claims 4
- 230000006870 function Effects 0.000 claims 3
- 230000003993 interaction Effects 0.000 claims 3
- 230000004044 response Effects 0.000 claims 3
- MARUHZGHZWCEQU-UHFFFAOYSA-N 5-phenyl-2h-tetrazole Chemical compound C1=CC=CC=C1C1=NNN=N1 MARUHZGHZWCEQU-UHFFFAOYSA-N 0.000 claims 2
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 claims 2
- 229910001218 Gallium arsenide Inorganic materials 0.000 claims 2
- 229910052732 germanium Inorganic materials 0.000 claims 2
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 claims 2
- 238000001514 detection method Methods 0.000 claims 1
- 238000002347 injection Methods 0.000 claims 1
- 239000007924 injection Substances 0.000 claims 1
- 230000005415 magnetization Effects 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 238000007493 shaping process Methods 0.000 claims 1
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2022171657A JP7376665B2 (ja) | 2017-04-14 | 2022-10-26 | 透過型小角x線散乱計量システム |
| JP2022171658A JP7376666B2 (ja) | 2017-04-14 | 2022-10-26 | 透過型小角x線散乱計量システム |
| JP2023164224A JP7557590B2 (ja) | 2017-04-14 | 2023-09-27 | 透過型小角x線散乱計量システム及び方法 |
| JP2024159139A JP2024175033A (ja) | 2017-04-14 | 2024-09-13 | 透過型小角x線散乱計量システム及び方法 |
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201762485497P | 2017-04-14 | 2017-04-14 | |
| US62/485,497 | 2017-04-14 | ||
| US15/950,823 | 2018-04-11 | ||
| US15/950,823 US10767978B2 (en) | 2017-04-14 | 2018-04-11 | Transmission small-angle X-ray scattering metrology system |
| PCT/US2018/027648 WO2018191714A1 (en) | 2017-04-14 | 2018-04-13 | Transmission small-angle x-ray scattering metrology system |
Related Child Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2022171657A Division JP7376665B2 (ja) | 2017-04-14 | 2022-10-26 | 透過型小角x線散乱計量システム |
| JP2022171658A Division JP7376666B2 (ja) | 2017-04-14 | 2022-10-26 | 透過型小角x線散乱計量システム |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2020516900A JP2020516900A (ja) | 2020-06-11 |
| JP2020516900A5 true JP2020516900A5 (enExample) | 2021-05-27 |
Family
ID=63791810
Family Applications (5)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2019555964A Pending JP2020516900A (ja) | 2017-04-14 | 2018-04-13 | 透過型小角x線散乱計量システム |
| JP2022171658A Active JP7376666B2 (ja) | 2017-04-14 | 2022-10-26 | 透過型小角x線散乱計量システム |
| JP2022171657A Active JP7376665B2 (ja) | 2017-04-14 | 2022-10-26 | 透過型小角x線散乱計量システム |
| JP2023164224A Active JP7557590B2 (ja) | 2017-04-14 | 2023-09-27 | 透過型小角x線散乱計量システム及び方法 |
| JP2024159139A Pending JP2024175033A (ja) | 2017-04-14 | 2024-09-13 | 透過型小角x線散乱計量システム及び方法 |
Family Applications After (4)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2022171658A Active JP7376666B2 (ja) | 2017-04-14 | 2022-10-26 | 透過型小角x線散乱計量システム |
| JP2022171657A Active JP7376665B2 (ja) | 2017-04-14 | 2022-10-26 | 透過型小角x線散乱計量システム |
| JP2023164224A Active JP7557590B2 (ja) | 2017-04-14 | 2023-09-27 | 透過型小角x線散乱計量システム及び方法 |
| JP2024159139A Pending JP2024175033A (ja) | 2017-04-14 | 2024-09-13 | 透過型小角x線散乱計量システム及び方法 |
Country Status (7)
| Country | Link |
|---|---|
| US (2) | US10767978B2 (enExample) |
| EP (1) | EP3593124B1 (enExample) |
| JP (5) | JP2020516900A (enExample) |
| KR (2) | KR102580560B1 (enExample) |
| CN (2) | CN118837389A (enExample) |
| TW (1) | TWI783988B (enExample) |
| WO (1) | WO2018191714A1 (enExample) |
Families Citing this family (20)
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| US10767978B2 (en) * | 2017-04-14 | 2020-09-08 | Kla-Tencor Corporation | Transmission small-angle X-ray scattering metrology system |
| KR102442490B1 (ko) * | 2017-09-27 | 2022-09-13 | 삼성전자 주식회사 | 무선 통신 시스템에서 분산 처리에 기반한 망 설계를 위한 분석 방법 및 장치 |
| CN112602184A (zh) * | 2018-07-31 | 2021-04-02 | 朗姆研究公司 | 确定图案化的高深宽比结构阵列中的倾斜角度 |
| DE102018132542A1 (de) * | 2018-12-17 | 2020-06-18 | Osram Opto Semiconductors Gmbh | Optoelektronische leuchtvorrichtung und herstellungsverfahren |
| US11843069B2 (en) * | 2018-12-31 | 2023-12-12 | Asml Netherlands B.V. | Semiconductor detector and method of fabricating same |
| US11867595B2 (en) * | 2019-10-14 | 2024-01-09 | Industrial Technology Research Institute | X-ray reflectometry apparatus and method thereof for measuring three dimensional nanostructures on flat substrate |
| US11698251B2 (en) * | 2020-01-07 | 2023-07-11 | Kla Corporation | Methods and systems for overlay measurement based on soft X-ray Scatterometry |
| CN111473749B (zh) * | 2020-04-22 | 2021-09-03 | 中国科学院上海应用物理研究所 | 一种单毛细管内面形在线表征方法 |
| US11761913B2 (en) * | 2020-05-04 | 2023-09-19 | Bruker Technologies Ltd. | Transmission X-ray critical dimension (T-XCD) characterization of shift and tilt of stacks of high-aspect-ratio (HAR) structures |
| CN111912865A (zh) * | 2020-06-23 | 2020-11-10 | 成都飞机工业(集团)有限责任公司 | 一种基于微焦点的数字放大射线检测方法及系统 |
| US12013355B2 (en) * | 2020-12-17 | 2024-06-18 | Kla Corporation | Methods and systems for compact, small spot size soft x-ray scatterometry |
| CN113433142B (zh) * | 2021-06-22 | 2022-08-26 | 中国工程物理研究院激光聚变研究中心 | 适用于x射线诊断的高时空分辨光学系统 |
| JP7600046B2 (ja) * | 2021-07-13 | 2024-12-16 | キオクシア株式会社 | 形状計測方法、形状計測装置、及びプログラム |
| CN113686904B (zh) * | 2021-07-28 | 2023-08-29 | 河北工业大学 | 一种描述外载作用下岩体微细观破裂与微裂隙形成的方法 |
| JP2024545012A (ja) * | 2021-12-07 | 2024-12-05 | エーエスエムエル ネザーランズ ビー.ブイ. | リソグラフィシステムにおける基板アライメントのためのターゲット非対称性測定 |
| TWI814579B (zh) | 2022-09-13 | 2023-09-01 | 財團法人工業技術研究院 | 用以量測平整基板上之三維奈米結構的x射線反射儀設備及方法 |
| US12493004B2 (en) | 2022-09-28 | 2025-12-09 | Industrial Technology Research Institute | Method for determining parameters of three dimensional nanostructure and apparatus applying the same |
| CN118294484B (zh) * | 2023-11-21 | 2025-04-25 | 张江国家实验室 | 一种掠入射小角度x射线散射布拉格峰定位方法 |
| CN117990052B (zh) * | 2024-04-03 | 2024-08-06 | 浙江求是半导体设备有限公司 | 载台倾斜角度检测方法和载台调平方法 |
| CN119958472B (zh) * | 2024-12-31 | 2025-11-21 | 深圳中科飞测科技股份有限公司 | 一种x射线散射量测设备、监控方法及介质 |
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| US5998790A (en) * | 1997-06-18 | 1999-12-07 | The Regents Of The University Of California | Transmission electron microscope CCD camera |
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| US7068833B1 (en) | 2000-08-30 | 2006-06-27 | Kla-Tencor Corporation | Overlay marks, methods of overlay mark design and methods of overlay measurements |
| US7541201B2 (en) | 2000-08-30 | 2009-06-02 | Kla-Tencor Technologies Corporation | Apparatus and methods for determining overlay of structures having rotational or mirror symmetry |
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-
2018
- 2018-04-11 US US15/950,823 patent/US10767978B2/en active Active
- 2018-04-13 KR KR1020197033522A patent/KR102580560B1/ko active Active
- 2018-04-13 KR KR1020227033438A patent/KR102515242B1/ko active Active
- 2018-04-13 JP JP2019555964A patent/JP2020516900A/ja active Pending
- 2018-04-13 CN CN202411097198.XA patent/CN118837389A/zh active Pending
- 2018-04-13 TW TW107112756A patent/TWI783988B/zh active
- 2018-04-13 WO PCT/US2018/027648 patent/WO2018191714A1/en not_active Ceased
- 2018-04-13 CN CN201880023876.4A patent/CN110546489B/zh active Active
- 2018-04-13 EP EP18784894.0A patent/EP3593124B1/en active Active
-
2020
- 2020-08-25 US US17/002,614 patent/US11519719B2/en active Active
-
2022
- 2022-10-26 JP JP2022171658A patent/JP7376666B2/ja active Active
- 2022-10-26 JP JP2022171657A patent/JP7376665B2/ja active Active
-
2023
- 2023-09-27 JP JP2023164224A patent/JP7557590B2/ja active Active
-
2024
- 2024-09-13 JP JP2024159139A patent/JP2024175033A/ja active Pending
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