JP2020506413A - 発光ダイオードデジタルマイクロミラーデバイスイルミネータ - Google Patents
発光ダイオードデジタルマイクロミラーデバイスイルミネータ Download PDFInfo
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Classifications
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- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0938—Using specific optical elements
- G02B27/0994—Fibers, light pipes
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- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B17/00—Systems with reflecting surfaces, with or without refracting elements
- G02B17/006—Systems in which light light is reflected on a plurality of parallel surfaces, e.g. louvre mirrors, total internal reflection [TIR] lenses
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
- G02B19/0004—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed
- G02B19/0009—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed having refractive surfaces only
- G02B19/0014—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed having refractive surfaces only at least one surface having optical power
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
- G02B19/0004—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed
- G02B19/0028—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed refractive and reflective surfaces, e.g. non-imaging catadioptric systems
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- G—PHYSICS
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- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
- G02B19/0033—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use
- G02B19/0047—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source
- G02B19/0061—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source the light source comprising a LED
- G02B19/0066—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source the light source comprising a LED in the form of an LED array
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- G—PHYSICS
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- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
- G02B19/0033—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use
- G02B19/0095—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with ultraviolet radiation
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
- G03B21/00—Projectors or projection-type viewers; Accessories therefor
- G03B21/005—Projectors using an electronic spatial light modulator but not peculiar thereto
- G03B21/008—Projectors using an electronic spatial light modulator but not peculiar thereto using micromirror devices
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
- G03B21/00—Projectors or projection-type viewers; Accessories therefor
- G03B21/14—Details
- G03B21/20—Lamp housings
- G03B21/2006—Lamp housings characterised by the light source
- G03B21/2033—LED or laser light sources
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
- G03B21/00—Projectors or projection-type viewers; Accessories therefor
- G03B21/14—Details
- G03B21/20—Lamp housings
- G03B21/208—Homogenising, shaping of the illumination light
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70383—Direct write, i.e. pattern is written directly without the use of a mask by one or multiple beams
- G03F7/70391—Addressable array sources specially adapted to produce patterns, e.g. addressable LED arrays
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- G—PHYSICS
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- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Projection Apparatus (AREA)
- Optical Elements Other Than Lenses (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
Abstract
Description
Claims (14)
- デジタルマイクロミラーデバイスイルミネータの光学系であって、
発光ダイオード(LED)アレイと、
前記LEDアレイにより放射された光エネルギーを受け取るために前記LEDアレイと光通信する入力アパーチャと、出力アパーチャとを有するテーパ状の非結像集光光学系と、
反射開口絞りと、
前記LEDアレイと前記反射開口絞りとの間に規定される光軸に沿って、前記テーパ状の非結像集光光学系と前記反射開口絞りとの間に配置されるテレセントリックレンズ系であって、光軸上の物体面のための対称な一対一撮像素子の第1半部として構成されるとともに、前記反射開口絞りから光軸上の像面に向けて反射される光エネルギーのための対称な一対一撮像素子の第2半部として構成されるテレセントリックレンズ系とを備えることを特徴とする光学系。 - 請求項1に記載の光学系において、
前記物体面及び前記像面が、前記光軸上で一致していることを特徴とする光学系。 - 請求項2に記載の光学系において、
前記物体面及び前記像面が、前記テーパ状の非結像集光光学系の出力アパーチャに配置されていることを特徴とする光学系。 - 請求項1に記載の光学系において、
前記反射開口絞りが、前記テーパ状の非結像集光光学系の出力アパーチャから前記テーパ状の非結像集光光学系の入力アパーチャを通って伝播して前記LEDアレイに入射する反射光エネルギーを与えることを特徴とする光学系。 - 請求項4に記載の光学系において、
前記LEDアレイに入射する反射光エネルギーが拡散反射され、拡散反射された光エネルギーの少なくとも一部が、前記テーパ状の非結像集光光学系の入力アパーチャから前記テーパ状の非結像集光光学系の出力アパーチャに伝播することを特徴とする光学系。 - 請求項1に記載の光学系において、
入力アパーチャを有する入力面と、出力アパーチャを有する出力面とを有する中空光インテグレータをさらに含み、前記中空光インテグレータの入力アパーチャが、前記テーパ状の非結像集光光学系の出力アパーチャに隣接することを特徴とする光学系。 - 請求項6に記載の光学系において、
前記中空光インテグレータの入力面と出力面が、互いに対して傾斜していることを特徴とする光学系。 - 請求項6に記載の光学系において、
前記物体面及び前記像面が、前記光軸上で一致し、かつ前記中空光インテグレータの出力アパーチャに配置されていることを特徴とする光学系。 - 請求項1に記載の光学系において、
前記LEDアレイが紫外線LEDアレイであることを特徴とする光学系。 - 請求項1に記載の光学系において、
前記反射開口絞りが、反射性の外側領域によって囲まれた透過性の中央領域を含むことを特徴とする光学系。 - 請求項6に記載の光学系において、
前記テーパ状の非結像集光光学系が、前記テーパ状の非結像集光光学系の出力アパーチャを有する出力面を含み、前記テーパ状の非結像集光光学系の出力面が、前記中空光インテグレータの入力アパーチャよりも大きいことを特徴とする光学系。 - 中空光インテグレータであって、
中空本体であって、第1の端部にある入力アパーチャと、前記第1の端部と反対側の第2の端部にある出力アパーチャと、前記入力アパーチャから前記出力アパーチャまで軸に沿って延びる複数の内壁とを有し、前記内壁の各々が反射面を有し、前記第1の端部が前記軸に垂直な入力面を含み、前記第2の端部が前記軸に対して傾斜した出力面を含む、中空本体と、
平行四辺形の形状を有し、前記第2の端部の出力面に配置された光学視野絞りとを備えることを特徴とする中空光インテグレータ。 - 請求項12に記載の光学系において、
前記平行四辺形の形状は、前記中空光インテグレータと光通信する撮像システムによって形成された像の台形歪みを補償するように、前記光軸に対して方向付けられていることを特徴とする光学系。 - 請求項12記載の光学系において、
前記中空本体の第1の端部が、前記入力アパーチャを囲む反射領域を含むことを特徴とする光学系。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/US2017/014084 WO2018136062A1 (en) | 2017-01-19 | 2017-01-19 | Light emitting diode digital micromirror device illuminator |
Publications (2)
Publication Number | Publication Date |
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JP2020506413A true JP2020506413A (ja) | 2020-02-27 |
JP6813687B2 JP6813687B2 (ja) | 2021-01-13 |
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Country Status (5)
Country | Link |
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EP (1) | EP3571539B1 (ja) |
JP (1) | JP6813687B2 (ja) |
CA (1) | CA3048412C (ja) |
IL (1) | IL267910B2 (ja) |
WO (1) | WO2018136062A1 (ja) |
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CN109240046A (zh) * | 2018-10-26 | 2019-01-18 | 洪小苗 | 一种直写曝光机用led照明系统 |
CN117280263A (zh) * | 2021-04-14 | 2023-12-22 | 光学创新股份有限公司 | 高均匀性远心照明器 |
WO2023018676A2 (en) * | 2021-08-09 | 2023-02-16 | Quadratic 3D, Inc. | Methods and systems for forming an object in a volume of a photohardenable composition |
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2017
- 2017-01-19 EP EP17892580.6A patent/EP3571539B1/en active Active
- 2017-01-19 JP JP2019536871A patent/JP6813687B2/ja active Active
- 2017-01-19 WO PCT/US2017/014084 patent/WO2018136062A1/en unknown
- 2017-01-19 CA CA3048412A patent/CA3048412C/en active Active
- 2017-01-19 IL IL267910A patent/IL267910B2/en unknown
Patent Citations (8)
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JP2002341222A (ja) * | 2001-05-14 | 2002-11-27 | Dainippon Screen Mfg Co Ltd | 結像光学装置 |
JP2006065118A (ja) * | 2004-08-27 | 2006-03-09 | Hayashi Soken:Kk | 照明光学装置 |
JP2006065202A (ja) * | 2004-08-30 | 2006-03-09 | Fujinon Corp | 投写型画像表示装置 |
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US20150325323A1 (en) * | 2014-05-10 | 2015-11-12 | Innovations In Optics, Inc. | Light emitting diode digital micromirror device illuminator |
JP2017516141A (ja) * | 2014-05-10 | 2017-06-15 | イノヴェイションズ イン オプティクス,インコーポレイテッドInnovations In Optics,Inc. | 発光ダイオードデジタルマイクロミラーデバイスイルミネータ |
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EP3571539A1 (en) | 2019-11-27 |
CA3048412C (en) | 2022-05-17 |
EP3571539A4 (en) | 2020-11-25 |
IL267910B2 (en) | 2024-04-01 |
WO2018136062A1 (en) | 2018-07-26 |
EP3571539B1 (en) | 2024-05-01 |
IL267910B1 (en) | 2023-12-01 |
IL267910A (en) | 2019-09-26 |
CA3048412A1 (en) | 2018-07-26 |
JP6813687B2 (ja) | 2021-01-13 |
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