JP2020505513A - Holder for substrate - Google Patents

Abstract

A holder is provided that is configured to be attached to a carrier body for holding a substrate. A rear portion including a front portion arranged to face the material source or the mask, a rear portion arranged to face in a direction opposite to the material source, the rear portion including an inclined portion having an inclined surface; and A groove is provided between the front portion and the rear portion for receiving the substrate. [Selection diagram] FIG.

Description

  Embodiments of the present disclosure relate to a holder, for example, for holding a substrate during processing for layer deposition. Embodiments of the present disclosure particularly relate to a holder configured to be attached to a carrier body of a carrier for holding a substrate during vacuum layer deposition. In particular, embodiments of the present disclosure include a holder configured to be attached to a carrier body of a carrier for holding a substrate, a carrier for holding one or more substrates, and a carrier having a carrier body. To fixing a substrate to a substrate.

  Several methods for depositing material on a substrate are known. For example, the substrate can be coated by a physical vapor deposition (PVD) process, a chemical vapor deposition (CVD) process, a plasma enhanced chemical vapor deposition (PECVD) process, and the like. Typically, the process is performed in a processing apparatus or processing chamber where the substrate to be coated is located. A deposition material is supplied into the apparatus. A plurality of materials, as well as their oxides, nitrides, or carbides, can be used for deposition on a substrate. Further, other processing operations, such as etching, structuring, annealing, etc., may be performed within the processing chamber.

  In some applications and in some technical areas, coated materials may be used. For example, it has applications in the field of microelectronics, such as in the manufacture of semiconductor devices. In addition, display substrates are often coated by a PVD process. Further applications include insulating panels, organic light emitting diode (OLED) panels, substrates with TFTs, color filters, and the like.

  Typically, a glass substrate can be supported on a carrier during processing. The carrier supports the glass or substrate and is passed through a processing machine. That is, the carrier drives the glass or the substrate. Typically, the carrier forms a frame or plate that supports the substrate along its edges, or, in the case of a plate, supports the surface itself.

  Various holding arrangements are available for fixing the substrate in the carrier, for example a glass holder. For example, with increasing demands on particles for TFT applications, avoiding the generation of particles becomes more important. Lateral deposition on carriers and holders (eg, clamps) and glass movement within holders (eg, glass clamps) are the primary sources of particles near the glass surface.

  In view of the above, there is provided a holder, specifically a holder configured to be attached to a carrier body for holding a substrate, which overcomes at least some of the problems in the art. Is beneficial.

  In view of the above, there is provided a holder configured to be attached to a carrier body of a carrier for holding a substrate, and a method for securing the substrate in the carrier. Further aspects, advantages and features of the present disclosure are apparent from the dependent claims, the description and the accompanying drawings.

  According to one embodiment, there is provided a holder configured to be attached to a carrier body for holding a substrate. A holder comprising a front portion disposed opposite the material source or the mask, a rear portion disposed opposite to the material source, the rear portion including an inclined portion having an inclined surface, and A groove is provided between the front portion and the rear portion for receiving the substrate.

  According to another aspect, a carrier is provided that includes at least one holder. The at least one holder includes a front portion disposed opposite the source of material or the mask, a rear portion disposed opposite to the source of material, the rear portion including a sloped portion having a sloped surface. And a groove for receiving a substrate provided between the front and rear portions.

  According to yet another aspect, a method is provided for securing a substrate in a carrier having a carrier body. The method comprises: loading a substrate on a carrier; moving at least one holder having a sloped portion toward the substrate relative to the carrier body; and a first portion of the groove having the sloped portion. Guiding the substrate into the substrate.

A more specific description of the present disclosure, briefly summarized above, may be provided by reference to embodiments so that the above-mentioned features of the disclosure may be understood in detail. The accompanying drawings relate to embodiments of the present disclosure and are described below.
FIG. 4 illustrates a carrier having at least one holder, according to embodiments described herein. 4 shows a holder for illustrating improvements of an embodiment of the present disclosure. 4 illustrates a holder according to an embodiment described herein. FIG. 7 shows various views of a further holder according to embodiments described herein. FIG. 7 shows various views of a further holder according to embodiments described herein. FIG. 4 illustrates a carrier with a holder and loading with a robot arm according to embodiments described herein. FIG. 4 shows a flow diagram of a method for securing a substrate in a carrier having a carrier body according to embodiments described herein. FIG. 4 shows a schematic diagram of a deposition chamber, according to embodiments described herein.

  Reference will now be made in more detail to various embodiments of the present disclosure. One or more examples of these embodiments are illustrated in the drawings. In the following description of the drawings, the same reference numbers represent the same components. Generally, only the differences with respect to the individual embodiments are described. Each example is provided by way of explanation of the disclosure, but is not intended to limit the disclosure. Furthermore, features illustrated and described as part of one embodiment, may be used on, or used in conjunction with, another embodiment, yielding yet another embodiment. . This description is intended to cover such modifications and variations.

  According to embodiments described herein, there is provided a carrier that includes at least one holder. At least one holder is configured to hold or clamp a substrate. The holder has a sloped portion, thereby forming a portion of the groove that guides the substrate to a further groove portion. The additional groove portion has a small clearance, for example, less than 0.5 mm (such as about 0.1 mm).

  According to some embodiments, which may be combined with other embodiments described herein, the thickness of the substrate may be from 0.1 to 1.8 mm, and the holder may have a thickness of such a substrate. It can be adapted for thickness. It may be particularly advantageous for the thickness of the substrate to be less than or equal to about 0.9 mm, for example 0.7 mm, 0.5 mm or 0.3 mm, the holder being particularly adapted for such a substrate thickness Let me do. Further, the holder may be adapted to smaller or larger substrate thicknesses. According to some embodiments, which can be combined with other embodiments described herein, a holder, or a carrier including at least one holder, can be adapted to a particular glass thickness. Glass substrates having a smaller thickness compared to the particular glass thickness may also be supported by the holder or a carrier containing the holder.

According to some embodiments, which can be combined with other embodiments described herein, a large area substrate may have a size of at least 0.174m ^2. Its size can be from about 1.375 m ² to about 10 m ² , more typically from about ² m ² to about 11 m ² , or even up to 12 m ² . Typically, the rectangular substrate for which the mask structures, devices, and methods are provided according to the embodiments described herein are the large area substrates described herein. For example, a large-area substrate has a GEN5 corresponding to a substrate of about 1.4 m ² (1.1 mx 1.3 m), and a GEN 7.5 corresponding to a substrate of about 4.39 m ² (1.95 mx 2.25 m). GEN 8.5 corresponding to a substrate of about 5.5 m ² (2.2 mx 2.5 m), or even GEN 10 corresponding to a substrate of about 8.7 m ² (2.85 mx 3.05 m). Subsequent generations, such as GEN11 and GEN12, and their corresponding substrate areas can be similarly mounted. However, those skilled in the art will appreciate that the holder may be used with any substrate size, i.e., smaller or larger substrate sizes than those described above.

  Typically, the substrate may be made from any material suitable for material deposition. For example, the substrate can be glass (eg, soda-lime glass, borosilicate glass, etc.), metal, polymer, ceramic, composite, carbon fiber material, or any other material or combination of materials that can be coated by a deposition process. Made from a material selected from the group consisting of:

  FIG. 1 illustrates a carrier 100 having at least one holder 200, according to embodiments described herein. The carrier 100 is configured to support the substrate 101. As shown in FIG. 1, a substrate 101 is provided at a position in a carrier 100, particularly when processed in a processing chamber. Carrier 100 includes a frame or carrier body 160. For example, the carrier body may define a window or aperture. According to a typical implementation, the carrier body 160 provides a substrate receiving surface.

  FIG. 1 further illustrates a guide rod 162 (eg, a rod) that may be located on a lower portion of the carrier 100. In operation, guide bar 162 may be provided below carrier body 160. The guide rod may be configured to contact a transport system (eg, a roller arrangement). Carrier 100 may further include an upper directing arrangement 164. The upper guidance arrangement 164 may be configured to support the position of the carrier 100 at an upper portion of the transport system.

  According to yet another embodiment, the carrier may be configured for contactless transport using, for example, a magnetic levitation system. The arrangement of the carrier for contactless transport may have a magnetic element configured to interact with the magnetic levitation system in an upper portion of the carrier. The lower portion of the carrier may be configured for lateral stabilization of the carrier, or the carrier body 160 may be suspended in a contactless transport arrangement.

  According to some embodiments, which can be combined with other embodiments described herein, the plurality of holders 200 can be movable, especially at a right angle or to an end of the carrier body. It may be movable in a substantially orthogonal direction. For example, the end of the carrier body may be the end of an aperture formed by the carrier body. The holder may be movable in a direction perpendicular or substantially perpendicular to a corresponding end of the substrate supported by the holder. In FIG. 1, the movement of the holder is indicated by arrow 201. According to some embodiments, the holder 200 on one side (right or left) of the carrier body and the holder 200 on the upper or lower side of the carrier body, in particular on the upper side of the carrier body shown in FIG. possible. The carrier body 160 includes a first side, a second side, a third side, and a fourth side. At least eight holders, in particular at least twenty-four holders, may be provided, wherein at least one of the first side, the second side, the third side, and the fourth side is provided. At least two corresponding holders of the eight holders are mounted. At least two corresponding holders of the group of holders are movably mounted on two adjacent portions of a first side, a second side, a third side, and a fourth side. .

  The holder may be movable on two adjacent sides of the carrier body, for example, the right side and the upper side of FIG. By moving the holder, the holder 200 can be retracted. Holder 200 can be retracted to load or unload a glass substrate into the carrier body. Retracting the holder, as indicated by arrow 201 in FIG. 1, increases the size of the aperture formed by each of the carrier body or holder 200. Increasing the size of the aperture provides enough space for loading or unloading the glass substrate.

  According to some embodiments that may be combined with other embodiments described herein, the carrier body 160 is made from aluminum, aluminum alloy, titanium, these alloys, stainless steel, or the like. obtain. For relatively small, large area substrates (eg, GEN5 or less), the carrier body 160 can be manufactured from a single piece, ie, the frame is integrally formed. However, according to some embodiments that can be combined with other embodiments described herein, the carrier body 160 includes two or more elements, such as a top bar, side bars, and a bottom bar. May be included. In particular, for very large substrates, the carrier or carrier body can be manufactured to have several parts. These portions of the carrier body are assembled to provide a carrier body 160 that supports the substrate 101. The carrier body 160 is specifically configured to receive the substrate 101 in a substrate area (eg, an aperture in the carrier body).

  FIG. 2 shows a holder 20 that may be comparable to a common clamp. The holder or clamp has a substrate receiving part or groove 30 having a rectangular cross section, ie a rectangular groove. Holder 20 has a rear portion 216, a front portion, and an intermediate portion 212. Intermediate portion 212 connects front portion 214 and rear portion 216. The front portion 214 faces the material or material source to be deposited. The direction of material deposition is indicated by arrow 25. The rear portion 216 points in the opposite direction to the material to be deposited, such that the substrate 101 is provided between the deposited material and the rear portion 216.

  In a holder or clamp having a rectangular substrate receiver 30, there may be a relatively large clearance between the holder or clamp and the glass to facilitate the supply of glass to the holder or clamp. For example, FIG. 2 shows a rear gap 21 between the rear portion 216 and the glass of the substrate 101 and a front gap 23 between the front portion 214 and the glass of the substrate 101. The clearance allows the glass to move into the groove (ie, clamp) of the holder.

  As further shown in FIG. 2, the material deposited on the substrate 101 along the direction indicated by the arrow 25 results in a lateral deposition 50, ie, the desired material on the holder 20. There can be no deposition. The lateral deposits 50 may in particular enter the front gap 23. Friction between the substrate 101 and the holder can cause generation of particles. A glass-mask gap 26 is provided, for example, by the front gap 23, the width of the holder in the front part 214, and the mask-holder gap 27. Due to the undefined glass position inside the clamp, the glass-mask gap 26 may be relatively large, for example, resulting in a larger front gap 23. A front gap 23 is provided for the holder between the holder and the glass. The holders or clamps can be provided separately from each other, thereby creating a mask-holder gap 27 between the holder and the mask 70. Because the distance to the mask 70, such as an edge exclusion mask, is not defined, the holder or clamp cannot be adequately covered, thus accumulating a relatively large amount of lateral deposits on the holder or clamp. As shown in FIG. 2, side deposits can enter the grooves of the clamp, i.e., between the front portion 214 and the substrate 101. Movement of the glass inside the holder slows down lateral deposition and further increases particle generation.

  FIG. 3 shows a holder 200 according to the embodiments described herein. Holder 200 includes a front portion 214 and a rear portion 216. Groove 300, which may be configured for insertion of substrate 101 into holder 200, includes a sloped portion 220 having a slope. The ramp 220 provides a half-V shaped holder or clamp. That is, one side of the groove for the substrate is V-shaped. Another side of the groove for the substrate may not be V-shaped, that is, it may be straight. The design of the semi-V-shaped clamp addresses some or all of the disadvantages described above. An intermediate portion 212 may connect the front and rear portions.

  On the one hand, loading or supply of the substrate is facilitated by a large holder opening on the rear side of the glass in the rear part. On the other hand, the movement of the glass inside the holder is limited by a small clearance of, for example, 0.1 mm. The groove portion having the smaller clearance forms the first portion of the groove. The groove portion with the large holder opening, ie, the beveled or semi-V-shaped portion, forms the second portion of the groove. Holders having first and second groove portions, each having a different shape, may be provided according to embodiments of the present disclosure.

  According to some embodiments, the holder or clamp may be adapted to the thickness of the glass used, thereby providing all or most of the advantages of small clearance. Alternatively, some glass thicknesses can be used in the processing system without replacing the carrier holder. Even for thinner glasses, it is possible to use a holder or clamp for the thickest glass processed in the processing system.

  According to embodiments of the present disclosure, which may be combined with other embodiments described herein, groove 300 may have a first portion, for example, the lower portion of FIG. The first portion of the groove may have surfaces that are substantially parallel to each other, for example, an inner surface of the front portion 214 and an inner surface of the rear portion 216. The first portion may be a parallel portion. For example, the first part may have a first angle between the opposing surfaces of the front part and the rear part of 5 ° or less, especially 0 °. The groove 300 has a second portion, which has a second angle between the opposing surfaces that is greater than the first angle due to the inclined portion 220. The second angle may be provided between the inclined surface of the inclined portion 220 and the inner surface of the front portion 214. The second angle can be greater than or equal to 10 °, for example, about 15 °. The inner surface of the front portion 214 forming the first angle and the inner surface of the front portion 214 forming the second angle may be the same inner surface, ie, one flat surface.

  According to embodiments of the present disclosure, a better or straighter substrate 101 may be achieved, particularly due to the small clearance in the first portion (eg, the bottom) of the groove 300, ie, in the groove portion adjacent the intermediate portion 212. Glass ends can also be provided. This makes it possible to further reduce the gap between the glass surface of the substrate 101 and the mask 70 (for example, an edge exclusion mask). The smaller gap between the glass and the mask improves uniformity and reduces lateral deposition on the holder or clamp. In addition, the defined glass location inside the clamp provides better protection against lateral deposition inside the clamp. The glass-mask gap 326 is provided, for example, by a small front gap, the width of the holder in the front portion 214, and the mask-holder gap 27. The glass-mask gap 326 can be reduced by the position of the glass inside the clamp, for example, resulting in a small front gap. As shown in FIG. 3, lateral deposition 250 from material deposited along arrow 25 is reduced as compared to lateral deposition 50 of FIG. FIG. 3 further illustrates a rotatable cathode or rotating cathode 330. The rotatable cathode or rotating cathode 330 may rotate as shown by arrow 335, for example, during sputtering of target material during material deposition, according to other embodiments, for flat cathodes or for material deposition. Other sources may be used.

  4A to 5B show a further embodiment of the holder 200. FIG. 4A and 5A show side views of the front portion 214 from the side. 4B and 5B show side views similar to FIGS. 2 and 3. FIG. 4A and 4B show a holder 200 according to one embodiment. This holder 200 can be used to show modifications that can be combined with embodiments of the present disclosure. The holder has a rear portion 216. For example, the rear portion may have a height of 20 to 40 mm, for example, about 30 mm. Front portion 214 extends along the length of holder 200. According to some embodiments, the length (the dimension from left to right as shown in FIG. 4A) can be 30 to 60 mm, for example, about 40 mm. The intermediate portion 212 may have a width (from left to right as shown in FIG. 4B) of 5 mm to 15 mm, for example, about 7 mm. The groove 300 has a constant width at a first portion 412 of the groove 300, for example, at the bottom portion of FIGS. 4A-5B, ie, at the groove portion opposite the intermediate portion 212. The bottom part in FIGS. 4A to 5B can be the top part of the groove when the holder is mounted on the upper side of the carrier. The width of the first portion 412 corresponds to the thickness of the substrate. Typically, the width of the first portion 412 may be 0.05 to 0.2 mm greater than the thickness of the substrate. For example, the width of the first portion can be 0.6 mm, 0.7 mm, 0.8 mm, or 1 mm. According to embodiments that can be combined with other embodiments described herein, the ramp 220 has a ramp angle of 10 ° to 25 ° (eg, about 13 ° or about 15 °). I can do it. According to some embodiments that can be combined with other embodiments described herein, the height of each of the sloped portion 220 or sloped surface is such that the width of the sloped portion is 1.5 mm to 5 mm ( For example, the height may be about 3 mm). The width of the sloped portion corresponds to an increase in the width of the groove in the second part of the groove.

  Further, the holder 200 shown in FIG. Opening 416 is configured to mount holder 200 to a carrier. For example, opening 416 may include a thread that receives a screw or the like. Opening 416 is configured to mount holder 200 to a carrier. The holder may be pivotally mounted on the carrier, as indicated by arrow 417. The pivotal mounting of the holder has the advantage that the holder can rotate, for example, by less than 25 °, because the glass makes full contact with the first part 412 of the groove. Full contact of the glass along the edge of the glass can be brought to the face of the groove. Thereby, stress can be reduced at the glass end. According to some embodiments, first portion 412 of groove 300 may be curved on its sides. This may be beneficial in gently loading the substrate into the holder 200. The curvature may have a radius of 2 mm or more.

  5A and 5B show a holder 200 according to one embodiment. This holder 200 can be used to show modifications that can be combined with embodiments of the present disclosure. Compared to the holder 200 shown in FIGS. 4A and 4B, the holder 200 of the embodiment shown in FIGS. 5A and 5B can have a reduced height rear portion 216, for example, from 7 mm to 15 mm. According to additional or alternative modifications, front portion 214 may be a front portion assembly having two front portion segments. There may be a gap between the two front part segments, which exposes the beveled part 220 when viewed from the front part side, i.e. from the material deposition side. The reduced height of the rear portion 216 provides a blind hole 516 instead of an opening for mounting the holder 200 to the carrier or carrier body.

  FIG. 6 shows the carrier 100 during a loading operation using a loading arm 602, for example, a robotic arm. As shown in FIG. 6, the holders 200 on the first side and the second side of the four sides of the carrier body 160 have moved to the retracted position. Illustratively, the upper and right holders 200 of FIG. 6 are shown in a retracted position. As shown by the arrow 201 in FIG. 1, the retraction position is provided by the movement of the holder. For example, movement into and out of the retracted position may be in a direction perpendicular to the rectangular substrate 101 supported by the holder.

  When the upper and right holders 200 are in the retracted positions, the substrate receiving area between the holders is enlarged, so that the loading arm 602 can move the substrate 101 to the area between the holders. The substrate may move as indicated by arrow 603, for example, as supported in holder 200 on the lower and left sides of FIG. According to some embodiments, which may be combined with other embodiments described herein, the holder 200 on two adjacent sides of the carrier body may be stationary, and the carrier 200 may be stationary. The holders on the remaining two of the one sides may be movable. The remaining two sides may also be adjacent sides of the carrier body.

  As mentioned above, the groove in the holder may have a first portion with a relatively small clearance to the substrate. The first portion is adjacent to an intermediate portion of the holder. For example, the first portion may be a bottom portion of the holder groove on the bottom side of the carrier body 160 and an upper portion of the holder groove on the upper side of the carrier body. Further, the groove in the holder may have a second part including a beveled part. The angled portion extends the size of the holder opening toward the rear of the holder (ie, for example, during deposition of material on the substrate, facing away from the source of the material).

  To load the substrate 101 into the carrier 100, the substrate is moved as shown by arrow 603. A second portion of the groove, including the sloped portion, guides the substrate into the groove. The increased thickness of the groove in the second part allows for smooth insertion of the substrate into the holder. After movement along arrow 603, substrate 101 is supported in the first portion of the groove. The first portion is provided with a clearance for the substrate that is smaller than the clearance in the second portion. Reducing the clearance to hold the substrate in its final position reduces lateral deposition on the holder with reduced distance from the substrate to the mask, resulting in stability of the glass substrate in the supporting position, and And / or masking with an edge exclusion mask is enabled. The reduction in the distance from the substrate to the mask further reduces lateral deposition. Reduced side deposition and increased capacity reduce particle generation during substrate processing.

  After the movement of the substrate along arrow 603, the upper and right holders 200 of FIG. 6 may move from a retracted position to an un-retracted position. Furthermore, during this movement of the holder, the second part of the groove of the holder guides the substrate to the correct position, the first part of the groove of the holder improves the stability and the lateral deposition at the final position of the holder. Bring about a decrease.

  According to various embodiments, carrier 100 can be utilized in a PVD deposition process, a CVD deposition process, substrate structuring deburring, heating (eg, annealing), or any type of substrate processing. it can. Embodiments of the carriers described herein and methods for utilizing such carriers are particularly useful in stationary, ie, non-continuous, substrate processing. Typically, the carrier is provided for a vertically oriented large area glass substrate.

  FIG. 7 shows a flow diagram of a method 80 for securing a substrate 101 in a carrier 100 having a carrier body 160, according to embodiments described herein. In block 81, the substrate 101 is loaded on the carrier 100. At block 82, at least one holder 200 is moved relative to carrier body 160 toward loaded substrate 101. The at least one holder 200 includes a beveled portion 220, for example, a beveled portion of the second portion of the holder groove 300. In block 83, the substrate 101 is guided into a portion of the groove having a sloped portion, that is, into the sloped surface of the second portion of the groove.

  The forward portion of the holder having a straight inner surface allows for a reduction in the lateral deposition of the holder. The inclined surface of the inclined portion of the groove, ie the second part of the groove, allows for a smooth insertion of the substrate into the holder. A smaller clearance of the substrate in the first part of the groove compared to the second part of the groove allows for a reduction in particle production. In particular, a half-V-shape, i.e., a single-sided V-shape, enables such a combination of advantages.

  FIG. 8 shows a schematic diagram of a deposition chamber 600 according to an embodiment described herein. The deposition chamber 600 is adapted for a deposition process such as a PVD process or a CVD process. Substrate 101 is shown as being located in or at carrier 100 on substrate transport device 620. A deposition source 630 for the deposition material is provided in the chamber 612 opposite the side of the substrate 101 to be coated. Material source 630 supplies a deposition material that is deposited on substrate 101.

  In FIG. 8, the deposition source 630 may be a target having deposition material on top, or any other arrangement that allows release of the material for deposition on the substrate 101. Typically, the material source 630 may be a rotatable target, ie, a rotating target. According to some embodiments, the material source 630 may be movable to position and / or replace the material source. According to another embodiment, the material source may be a planar target.

  According to some embodiments, the deposition material may be selected depending on the deposition process and subsequent use of the coated substrate. For example, the deposition material of the material source may be a material selected from the group consisting of metals (such as aluminum, molybdenum, titanium, copper), silicon, indium tin oxide, and other transparent conductive oxides. Typically, an oxide, nitride, or carbide layer that may include such a material may be provided by supplying the material from a material source, or by reactive deposition (ie, when the material from the material source is (Reacts with elements such as oxygen, nitride, or carbon).

  Typically, the substrate 101 is provided within or at the carrier 100. The carrier or carrier assembly may, in particular, further function as an edge exclusion mask for non-static deposition processes, or may include an edge exclusion mask. Dashed line 665 illustrates the path of the deposition material during operation of deposition chamber 600. According to other embodiments that can be combined with the other embodiments described herein, masking can be performed by a separate edge exclusion mask provided within chamber 612. The carriers according to the embodiments described herein can be beneficial for stationary processes and for non-stationary processes.

  According to an embodiment that can be combined with other embodiments described herein, the holder 200 securely holds the edge of the substrate 101, especially during the deposition process (for simplicity of illustration, The drawing is provided without the beveled part, i.e. without the half V-shape). Embodiments can provide improved stability of the substrate, and thus can provide reduced damage to the substrate, especially in view of the fact that the length and height of the substrate are increasing. Furthermore, particle generation, especially near the substrate, can be reduced.

  According to the embodiments described herein, which can be combined with other embodiments described herein, the substrate and carrier are oriented vertically, ie, substantially vertical, during deposition. Can be provided. Substantially perpendicular, when referring to substrate orientation, is understood to permit a deviation of no more than 20 ° (eg, no more than 10 °) from the vertical. For example, a substrate support having some deviation from the vertical alignment may provide more stable substrate position, and thus such deviations may be provided. Alternatively, the deviation in the opposite direction (downward facing substrate) may result in a decrease in the number of particles on the substrate.

  Although the above description is directed to the embodiments of the present disclosure, other embodiments and further embodiments of the present disclosure may be devised without departing from the basic scope of the present disclosure, and the scope of the present disclosure is , Determined by the following claims.

Claims (13)

A holder (200) configured to be attached to a carrier body (160) of a carrier for holding a substrate (101),
A front portion (214) positioned opposite the source of material or the mask;
A rear portion (216) arranged in a direction opposite to the material source, the rear portion (216) including an inclined portion having an inclined surface; and a rear portion (216) provided between the front portion and the rear portion. A holder (200) having a groove for receiving the substrate provided.   The groove has a first portion having a first angle of 5 ° or less between first opposing surfaces, and the groove has a second portion of 10 ° or more between second opposing surfaces. The holder according to claim 1, comprising a second part having an angle of?   The holder according to claim 2, wherein the second angle is provided between the inclined surface of the inclined portion and the front portion.   The holder according to claim 2, wherein the first angle is 0 °.   The first opposing surface is an inner surface of the front portion and an inner surface of the rear portion, and the second opposing surface is the inner surface of the front portion and the inclined surface of the inclined portion, The holder according to any one of claims 2 to 4.   The holder according to claim 5, wherein the groove comprises a half V-shaped part and a parallel part.   The holder according to any one of the preceding claims, wherein the front part is a front part assembly having at least two front part segments, wherein there is a gap between the two front part segments.   The holder according to any one of claims 1 to 7, further comprising an opening or a blind hole for attaching the holder to the carrier body.   A carrier (100) comprising at least one holder (200) according to any one of the preceding claims.   A carrier body (160) having a first side, a second side, a third side, and a fourth side, wherein the at least one holder (200) comprises at least eight holders. Especially at least 24 holders, each of said first side, said second side, said third side, and said fourth side being provided with at least eight holders. 10. The carrier according to claim 9, wherein at least two corresponding holders are mounted.   The at least two corresponding holders of the at least eight holders include two adjacent portions of the first side, the second side, the third side, and the fourth side. The carrier according to claim 10, movably mounted on the carrier. A method (80) for securing a substrate (101) in a carrier (100) having a carrier body (160), comprising:
Loading a substrate (101) on the carrier (100);
Moving (82) at least one holder (200) with an inclined portion (210) relative to the carrier body (160) towards the substrate (101);
Guiding the substrate into a first portion of the groove having the sloped portion (80).   13. Supporting the substrate in a second portion of the groove, the second portion having a clearance relative to the substrate of no more than 0.5 mm, especially no more than 0.2 mm. The method described in.

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