JP2020503474A5 - - Google Patents

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Publication number
JP2020503474A5
JP2020503474A5 JP2019535814A JP2019535814A JP2020503474A5 JP 2020503474 A5 JP2020503474 A5 JP 2020503474A5 JP 2019535814 A JP2019535814 A JP 2019535814A JP 2019535814 A JP2019535814 A JP 2019535814A JP 2020503474 A5 JP2020503474 A5 JP 2020503474A5
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JP
Japan
Prior art keywords
passage
electrodes
membrane
selectively
electrode
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JP2019535814A
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English (en)
Japanese (ja)
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JP2020503474A (ja
JP7010959B2 (ja
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Priority claimed from PCT/EP2017/083967 external-priority patent/WO2018122080A1/en
Publication of JP2020503474A publication Critical patent/JP2020503474A/ja
Publication of JP2020503474A5 publication Critical patent/JP2020503474A5/ja
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Publication of JP7010959B2 publication Critical patent/JP7010959B2/ja
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JP2019535814A 2016-12-30 2017-12-21 静電蠕動ポンプ及び動作方法 Active JP7010959B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201662440571P 2016-12-30 2016-12-30
US62/440,571 2016-12-30
PCT/EP2017/083967 WO2018122080A1 (en) 2016-12-30 2017-12-21 Electrostatic peristaltic pump and method of operation

Publications (3)

Publication Number Publication Date
JP2020503474A JP2020503474A (ja) 2020-01-30
JP2020503474A5 true JP2020503474A5 (https=) 2021-02-04
JP7010959B2 JP7010959B2 (ja) 2022-01-26

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ID=60955034

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2019535814A Active JP7010959B2 (ja) 2016-12-30 2017-12-21 静電蠕動ポンプ及び動作方法

Country Status (5)

Country Link
US (1) US11506194B2 (https=)
EP (1) EP3563061B1 (https=)
JP (1) JP7010959B2 (https=)
CN (1) CN110168223B (https=)
WO (1) WO2018122080A1 (https=)

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6013994A (ja) * 1983-07-06 1985-01-24 Kaetsu Hoshi 流体移送方法
US5192197A (en) * 1991-11-27 1993-03-09 Rockwell International Corporation Piezoelectric pump
JPH06264870A (ja) * 1993-03-15 1994-09-20 Toshiba Corp マイクロポンプ
US5705018A (en) * 1995-12-13 1998-01-06 Hartley; Frank T. Micromachined peristaltic pump
US6106245A (en) * 1997-10-09 2000-08-22 Honeywell Low cost, high pumping rate electrostatically actuated mesopump
US5836750A (en) * 1997-10-09 1998-11-17 Honeywell Inc. Electrostatically actuated mesopump having a plurality of elementary cells
US6109888A (en) * 1998-09-09 2000-08-29 Bechtel Bwxt Idaho, Llc Electromagnetically driven peristaltic pump
EP1163446B1 (en) * 1998-11-06 2007-01-03 Honeywell Inc. Electrostatically actuated pumping array
US6568286B1 (en) * 2000-06-02 2003-05-27 Honeywell International Inc. 3D array of integrated cells for the sampling and detection of air bound chemical and biological species
JP2004025405A (ja) 2002-06-27 2004-01-29 Sony Corp 微小流体駆動装置とその製造方法、及び微小流体の駆動方法
EP1644639B1 (en) * 2003-06-30 2009-02-11 Nxp B.V. Device for generating sound by means of a medium stream generated
CN2704700Y (zh) * 2004-05-06 2005-06-15 云南大学 分体式微量泵压电驱动器
CN201022022Y (zh) * 2006-11-09 2008-02-13 大连交通大学 一种电信号到气信号的转换装置
DE102012013681A1 (de) 2012-07-11 2014-01-16 Pfeiffer Vacuum Gmbh Pumpenmodul, sowie Verdrängerpumpe
WO2015042192A1 (en) * 2013-09-17 2015-03-26 Pratheev Sabaratnam Sreetharan Zipping actuator fluid motivation
CN105201796A (zh) 2015-10-29 2015-12-30 宁波大学 一种压电蠕动微泵
WO2018122400A1 (en) * 2016-12-30 2018-07-05 Koninklijke Philips N.V. Electrostatic peristaltic pump and method of operation

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