CN110168223B - 静电蠕动泵及其操作方法 - Google Patents
静电蠕动泵及其操作方法 Download PDFInfo
- Publication number
- CN110168223B CN110168223B CN201780081111.1A CN201780081111A CN110168223B CN 110168223 B CN110168223 B CN 110168223B CN 201780081111 A CN201780081111 A CN 201780081111A CN 110168223 B CN110168223 B CN 110168223B
- Authority
- CN
- China
- Prior art keywords
- membrane
- channel
- electrodes
- electrode
- selectively
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/12—Machines, pumps, or pumping installations having flexible working members having peristaltic action
- F04B43/14—Machines, pumps, or pumping installations having flexible working members having peristaltic action having plate-like flexible members
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
- F04B45/04—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms
- F04B45/047—Pumps having electric drive
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
- F04B45/08—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having peristaltic action
- F04B45/10—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having peristaltic action having plate-like flexible members
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D33/00—Non-positive-displacement pumps with other than pure rotation, e.g. of oscillating type
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61M—DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
- A61M16/00—Devices for influencing the respiratory system of patients by gas treatment, e.g. ventilators; Tracheal tubes
- A61M16/0057—Pumps therefor
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Health & Medical Sciences (AREA)
- Emergency Medicine (AREA)
- Pulmonology (AREA)
- Anesthesiology (AREA)
- Biomedical Technology (AREA)
- Heart & Thoracic Surgery (AREA)
- Hematology (AREA)
- Life Sciences & Earth Sciences (AREA)
- Animal Behavior & Ethology (AREA)
- General Health & Medical Sciences (AREA)
- Public Health (AREA)
- Veterinary Medicine (AREA)
- Reciprocating Pumps (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201662440571P | 2016-12-30 | 2016-12-30 | |
| US62/440571 | 2016-12-30 | ||
| PCT/EP2017/083967 WO2018122080A1 (en) | 2016-12-30 | 2017-12-21 | Electrostatic peristaltic pump and method of operation |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN110168223A CN110168223A (zh) | 2019-08-23 |
| CN110168223B true CN110168223B (zh) | 2021-09-07 |
Family
ID=60955034
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201780081111.1A Active CN110168223B (zh) | 2016-12-30 | 2017-12-21 | 静电蠕动泵及其操作方法 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US11506194B2 (https=) |
| EP (1) | EP3563061B1 (https=) |
| JP (1) | JP7010959B2 (https=) |
| CN (1) | CN110168223B (https=) |
| WO (1) | WO2018122080A1 (https=) |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5836750A (en) * | 1997-10-09 | 1998-11-17 | Honeywell Inc. | Electrostatically actuated mesopump having a plurality of elementary cells |
| US6109888A (en) * | 1998-09-09 | 2000-08-29 | Bechtel Bwxt Idaho, Llc | Electromagnetically driven peristaltic pump |
| CN1354823A (zh) * | 1998-11-06 | 2002-06-19 | 霍尼韦尔有限公司 | 静电致动的泵阵列 |
| CN2704700Y (zh) * | 2004-05-06 | 2005-06-15 | 云南大学 | 分体式微量泵压电驱动器 |
| CN201022022Y (zh) * | 2006-11-09 | 2008-02-13 | 大连交通大学 | 一种电信号到气信号的转换装置 |
| WO2015042192A1 (en) * | 2013-09-17 | 2015-03-26 | Pratheev Sabaratnam Sreetharan | Zipping actuator fluid motivation |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6013994A (ja) * | 1983-07-06 | 1985-01-24 | Kaetsu Hoshi | 流体移送方法 |
| US5192197A (en) * | 1991-11-27 | 1993-03-09 | Rockwell International Corporation | Piezoelectric pump |
| JPH06264870A (ja) * | 1993-03-15 | 1994-09-20 | Toshiba Corp | マイクロポンプ |
| US5705018A (en) * | 1995-12-13 | 1998-01-06 | Hartley; Frank T. | Micromachined peristaltic pump |
| US6106245A (en) * | 1997-10-09 | 2000-08-22 | Honeywell | Low cost, high pumping rate electrostatically actuated mesopump |
| US6568286B1 (en) * | 2000-06-02 | 2003-05-27 | Honeywell International Inc. | 3D array of integrated cells for the sampling and detection of air bound chemical and biological species |
| JP2004025405A (ja) | 2002-06-27 | 2004-01-29 | Sony Corp | 微小流体駆動装置とその製造方法、及び微小流体の駆動方法 |
| EP1644639B1 (en) * | 2003-06-30 | 2009-02-11 | Nxp B.V. | Device for generating sound by means of a medium stream generated |
| DE102012013681A1 (de) | 2012-07-11 | 2014-01-16 | Pfeiffer Vacuum Gmbh | Pumpenmodul, sowie Verdrängerpumpe |
| CN105201796A (zh) | 2015-10-29 | 2015-12-30 | 宁波大学 | 一种压电蠕动微泵 |
| WO2018122400A1 (en) * | 2016-12-30 | 2018-07-05 | Koninklijke Philips N.V. | Electrostatic peristaltic pump and method of operation |
-
2017
- 2017-12-21 WO PCT/EP2017/083967 patent/WO2018122080A1/en not_active Ceased
- 2017-12-21 EP EP17828732.2A patent/EP3563061B1/en active Active
- 2017-12-21 JP JP2019535814A patent/JP7010959B2/ja active Active
- 2017-12-21 CN CN201780081111.1A patent/CN110168223B/zh active Active
- 2017-12-21 US US16/474,298 patent/US11506194B2/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5836750A (en) * | 1997-10-09 | 1998-11-17 | Honeywell Inc. | Electrostatically actuated mesopump having a plurality of elementary cells |
| US6109888A (en) * | 1998-09-09 | 2000-08-29 | Bechtel Bwxt Idaho, Llc | Electromagnetically driven peristaltic pump |
| CN1354823A (zh) * | 1998-11-06 | 2002-06-19 | 霍尼韦尔有限公司 | 静电致动的泵阵列 |
| CN2704700Y (zh) * | 2004-05-06 | 2005-06-15 | 云南大学 | 分体式微量泵压电驱动器 |
| CN201022022Y (zh) * | 2006-11-09 | 2008-02-13 | 大连交通大学 | 一种电信号到气信号的转换装置 |
| WO2015042192A1 (en) * | 2013-09-17 | 2015-03-26 | Pratheev Sabaratnam Sreetharan | Zipping actuator fluid motivation |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2020503474A (ja) | 2020-01-30 |
| EP3563061B1 (en) | 2021-03-17 |
| EP3563061A1 (en) | 2019-11-06 |
| CN110168223A (zh) | 2019-08-23 |
| WO2018122080A1 (en) | 2018-07-05 |
| US20190338766A1 (en) | 2019-11-07 |
| US11506194B2 (en) | 2022-11-22 |
| JP7010959B2 (ja) | 2022-01-26 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN110226038B (zh) | 静电蠕动泵及其操作方法 | |
| US11028840B2 (en) | Microelectromechanical systems fabricated with roll to roll processing | |
| EP3462025B1 (en) | Fluid system | |
| US8308452B2 (en) | Dual chamber valveless MEMS micropump | |
| EP1926678B1 (en) | A method of manufacturing a microsystem | |
| KR101153613B1 (ko) | 마이크로 이젝터 및 그 제조방법 | |
| JPH05502079A (ja) | 静電動作可能な超小形ポンプ | |
| EP3120023A1 (en) | Micro pump systems | |
| JP2020510158A (ja) | マイクロポンプシステムおよび処理技法 | |
| TWI653394B (zh) | 流體系統 | |
| TWM553321U (zh) | 微機電之流體控制裝置 | |
| TW201912559A (zh) | 微機電之流體控制裝置 | |
| US20080218934A1 (en) | Method of Manufacturing a Microsystem, Such a Microsystem, a Stack of Foils Comprising Such a Microsystem, an Electronic Device Comprising Such a Microsystem and Use of the Electronic Device | |
| TWM555406U (zh) | 流體系統 | |
| CN110168223B (zh) | 静电蠕动泵及其操作方法 | |
| TWM554131U (zh) | 氣體輸送裝置 | |
| TWI689665B (zh) | 氣體輸送裝置 | |
| TWI653395B (zh) | 流體系統 | |
| US20060056997A1 (en) | Electrically driven microfluidic pumping for actuation | |
| CN109424519B (zh) | 微机电的流体控制装置 | |
| CN210738778U (zh) | 微机电的流体控制装置 | |
| TWI650284B (zh) | 流體裝置之控制方法 | |
| CN209195658U (zh) | 气体输送装置 | |
| KR20200056896A (ko) | 압전 블로어 및 그 제조 방법 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |