JP2020502944A5 - - Google Patents

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JP2020502944A5
JP2020502944A5 JP2019533554A JP2019533554A JP2020502944A5 JP 2020502944 A5 JP2020502944 A5 JP 2020502944A5 JP 2019533554 A JP2019533554 A JP 2019533554A JP 2019533554 A JP2019533554 A JP 2019533554A JP 2020502944 A5 JP2020502944 A5 JP 2020502944A5
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Japan
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voltage
electrode
cmut cell
polarity
cmut
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JP2019533554A
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Japanese (ja)
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JP2020502944A (ja
JP7208901B2 (ja
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Priority claimed from PCT/EP2017/084088 external-priority patent/WO2018115283A1/en
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Publication of JP2020502944A5 publication Critical patent/JP2020502944A5/ja
Priority to JP2022125373A priority Critical patent/JP7391152B2/ja
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JP2019533554A 2016-12-22 2017-12-21 容量性高周波微小電気機械スイッチのシステム及び動作方法 Active JP7208901B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2022125373A JP7391152B2 (ja) 2016-12-22 2022-08-05 容量性高周波微小電気機械スイッチのシステム及び動作方法

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP16206309 2016-12-22
EP16206309.3 2016-12-22
PCT/EP2017/084088 WO2018115283A1 (en) 2016-12-22 2017-12-21 Systems and methods of operation of capacitive radio frequency micro-electromechanical switches

Related Child Applications (1)

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JP2022125373A Division JP7391152B2 (ja) 2016-12-22 2022-08-05 容量性高周波微小電気機械スイッチのシステム及び動作方法

Publications (3)

Publication Number Publication Date
JP2020502944A JP2020502944A (ja) 2020-01-23
JP2020502944A5 true JP2020502944A5 (OSRAM) 2021-02-04
JP7208901B2 JP7208901B2 (ja) 2023-01-19

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JP2019533554A Active JP7208901B2 (ja) 2016-12-22 2017-12-21 容量性高周波微小電気機械スイッチのシステム及び動作方法
JP2022125373A Active JP7391152B2 (ja) 2016-12-22 2022-08-05 容量性高周波微小電気機械スイッチのシステム及び動作方法

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Country Status (5)

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US (2) US11458504B2 (OSRAM)
EP (2) EP3558549B1 (OSRAM)
JP (2) JP7208901B2 (OSRAM)
CN (1) CN110325293B (OSRAM)
WO (1) WO2018115283A1 (OSRAM)

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