CN110325293B - 电容式射频微机电开关的系统和操作方法 - Google Patents

电容式射频微机电开关的系统和操作方法 Download PDF

Info

Publication number
CN110325293B
CN110325293B CN201780087039.3A CN201780087039A CN110325293B CN 110325293 B CN110325293 B CN 110325293B CN 201780087039 A CN201780087039 A CN 201780087039A CN 110325293 B CN110325293 B CN 110325293B
Authority
CN
China
Prior art keywords
voltage
electrode
cmut
drift
cmut cell
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201780087039.3A
Other languages
English (en)
Chinese (zh)
Other versions
CN110325293A (zh
Inventor
S·舒列波夫
P·迪克森
H-P·勒布尔
F·P·M·布德泽拉
P·H·M·蒂默曼斯
N·M·A·德维尔德
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Koninklijke Philips NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Koninklijke Philips NV filed Critical Koninklijke Philips NV
Publication of CN110325293A publication Critical patent/CN110325293A/zh
Application granted granted Critical
Publication of CN110325293B publication Critical patent/CN110325293B/zh
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/0292—Electrostatic transducers, e.g. electret-type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/0207—Driving circuits
    • B06B1/0223—Driving circuits for generating signals continuous in time
    • B06B1/0238—Driving circuits for generating signals continuous in time of a single frequency, e.g. a sine-wave
    • B06B1/0246—Driving circuits for generating signals continuous in time of a single frequency, e.g. a sine-wave with a feedback signal
    • B06B1/0253—Driving circuits for generating signals continuous in time of a single frequency, e.g. a sine-wave with a feedback signal taken directly from the generator circuit
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/0207—Driving circuits
    • B06B1/0215—Driving circuits for generating pulses, e.g. bursts of oscillations, envelopes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B60—VEHICLES IN GENERAL
    • B60B—VEHICLE WHEELS; CASTORS; AXLES FOR WHEELS OR CASTORS; INCREASING WHEEL ADHESION
    • B60B1/00—Spoked wheels; Spokes thereof
    • B60B1/02—Wheels with wire or other tension spokes
    • B60B1/0253—Wheels with wire or other tension spokes the spoke being hollow
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/24—Probes
    • G01N29/2406—Electrostatic or capacitive probes, e.g. electret or cMUT-probes

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Micromachines (AREA)
CN201780087039.3A 2016-12-22 2017-12-21 电容式射频微机电开关的系统和操作方法 Active CN110325293B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP16206309.3 2016-12-22
EP16206309 2016-12-22
PCT/EP2017/084088 WO2018115283A1 (en) 2016-12-22 2017-12-21 Systems and methods of operation of capacitive radio frequency micro-electromechanical switches

Publications (2)

Publication Number Publication Date
CN110325293A CN110325293A (zh) 2019-10-11
CN110325293B true CN110325293B (zh) 2021-06-22

Family

ID=57737590

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201780087039.3A Active CN110325293B (zh) 2016-12-22 2017-12-21 电容式射频微机电开关的系统和操作方法

Country Status (5)

Country Link
US (2) US11458504B2 (OSRAM)
EP (2) EP4289521A3 (OSRAM)
JP (2) JP7208901B2 (OSRAM)
CN (1) CN110325293B (OSRAM)
WO (1) WO2018115283A1 (OSRAM)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3659515A1 (en) * 2018-11-29 2020-06-03 Koninklijke Philips N.V. Imaging system comprising an ultrasound transducer array and skin contact electrodes, and corresponding imaging method
US11935397B2 (en) 2019-12-30 2024-03-19 Sigmasense, Llc. Organic and inorganic test system
US12352713B2 (en) 2019-12-30 2025-07-08 Sigmasense, Llc. Organic and/or inorganic material test system using differential drive-sense circuits
US11173520B2 (en) 2020-01-20 2021-11-16 The Board Of Trustees Of The Leland Stanford Junior University Pulse train excitation for capacative micromachined ultrasonic transducer
US11738369B2 (en) * 2020-02-17 2023-08-29 GE Precision Healthcare LLC Capactive micromachined transducer having a high contact resistance part
TWI783491B (zh) 2021-05-21 2022-11-11 友達光電股份有限公司 超音波偵測裝置
EP4444480A4 (en) * 2021-12-06 2025-12-10 Orchard Ultrasound Innovation Llc MICRO-MACHINED CAPACITIVE ULTRASONIC TRANSDUCER
FR3131367B1 (fr) * 2021-12-23 2023-11-17 Commissariat Energie Atomique Procédé et système de détermination de l’état d’un capteur dont le comportement mécanique est non linéaire en fonction de l’amplitude de la pression exercée
EP4344795A1 (en) * 2022-09-27 2024-04-03 Koninklijke Philips N.V. Cmut drive method

Citations (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5396143A (en) * 1994-05-20 1995-03-07 Hewlett-Packard Company Elevation aperture control of an ultrasonic transducer
US6585653B2 (en) * 2001-07-31 2003-07-01 Koninklijke Philips Electronics N.V. Micro-machined ultrasonic transducer (MUT) array
CN1516909A (zh) * 2002-02-13 2004-07-28 ���µ�����ҵ��ʽ���� 微机械振动滤波器
US6826961B2 (en) * 1999-12-03 2004-12-07 Scimed Life Systems, Inc. Dynamically configurable ultrasound transducer with integral bias regulation and command and control circuitry
CN102333485A (zh) * 2009-02-27 2012-01-25 皇家飞利浦电子股份有限公司 具有机械塌陷保持的预塌陷cmut
EP2509125A2 (en) * 2011-04-06 2012-10-10 Canon Kabushiki Kaisha Electromechanical transducer and method of producing the same
CN103917304A (zh) * 2011-10-28 2014-07-09 皇家飞利浦有限公司 具有应力层的预塌陷电容式微加工换能器单元
WO2015004662A1 (en) * 2013-07-08 2015-01-15 Nova Measuring Instruments Ltd. Method and system for determining strain distribution in a sample
CN104826243A (zh) * 2015-05-15 2015-08-12 深圳先进技术研究院 一种超声刺激神经组织的装置
CN104919817A (zh) * 2012-12-03 2015-09-16 日本电气株式会社 电声换能器、其制造方法以及使用其的电子设备
CN105307975A (zh) * 2013-03-15 2016-02-03 蝴蝶网络有限公司 互补金属氧化物半导体(cmos)超声换能器及其形成方法
CN106198724A (zh) * 2016-06-30 2016-12-07 重庆大学 一种新型的多稳态超声检测传感器

Family Cites Families (41)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5161128A (en) * 1990-11-30 1992-11-03 Ultrasonic Arrays, Inc. Capacitive transducer system and method
US6283919B1 (en) 1996-11-26 2001-09-04 Atl Ultrasound Ultrasonic diagnostic imaging with blended tissue harmonic signals
US6458083B1 (en) 1996-11-26 2002-10-01 Koninklijke Philips Electronics N.V. Ultrasonic harmonic imaging with adaptive image formation
US6013032A (en) 1998-03-13 2000-01-11 Hewlett-Packard Company Beamforming methods and apparatus for three-dimensional ultrasound imaging using two-dimensional transducer array
US5997479A (en) 1998-05-28 1999-12-07 Hewlett-Packard Company Phased array acoustic systems with intra-group processors
US6530885B1 (en) 2000-03-17 2003-03-11 Atl Ultrasound, Inc. Spatially compounded three dimensional ultrasonic images
US6443901B1 (en) 2000-06-15 2002-09-03 Koninklijke Philips Electronics N.V. Capacitive micromachined ultrasonic transducers
WO2001097559A2 (en) 2000-06-15 2001-12-20 Koninklijke Philips Electronics N.V. Capacitive micromachined ultrasonic transducers.
US6443896B1 (en) 2000-08-17 2002-09-03 Koninklijke Philips Electronics N.V. Method for creating multiplanar ultrasonic images of a three dimensional object
US6468216B1 (en) 2000-08-24 2002-10-22 Kininklijke Philips Electronics N.V. Ultrasonic diagnostic imaging of the coronary arteries
US7780597B2 (en) * 2003-02-14 2010-08-24 Siemens Medical Solutions Usa, Inc. Method and apparatus for improving the performance of capacitive acoustic transducers using bias polarity control and multiple firings
US7087023B2 (en) * 2003-02-14 2006-08-08 Sensant Corporation Microfabricated ultrasonic transducers with bias polarity beam profile control and method of operating the same
US20050215909A1 (en) * 2004-03-19 2005-09-29 Siemens Medical Solutions Usa, Inc. Electric field control for capacitive micromachined ultrasound transducers
US20050219953A1 (en) * 2004-04-06 2005-10-06 The Board Of Trustees Of The Leland Stanford Junior University Method and system for operating capacitive membrane ultrasonic transducers
US8132462B2 (en) * 2005-09-05 2012-03-13 Hitachi Medical Corporation Ultrasonographic device
JP4812771B2 (ja) 2005-11-18 2011-11-09 株式会社日立メディコ 超音波診断装置、超音波診断装置の較正方法
JP4852356B2 (ja) * 2006-06-27 2012-01-11 株式会社日立メディコ 超音波診断装置
EP2207484B1 (en) * 2007-09-17 2016-11-09 Koninklijke Philips N.V. Production of pre-collapsed capacitive micro-machined ultrasonic transducers and applications thereof
US9089874B2 (en) 2007-12-13 2015-07-28 Hitachi Medical Corporation Ultrasonic diagnostic apparatus and ultrasonic probe
US8133182B2 (en) * 2008-09-09 2012-03-13 Siemens Medical Solutions Usa, Inc. Multi-dimensional transducer array and beamforming for ultrasound imaging
US8315125B2 (en) * 2009-03-18 2012-11-20 Sonetics Ultrasound, Inc. System and method for biasing CMUT elements
JP5409138B2 (ja) * 2009-06-19 2014-02-05 キヤノン株式会社 電気機械変換装置、電気機械変換装置の感度ばらつき検出方法、及び補正方法
JP5473579B2 (ja) * 2009-12-11 2014-04-16 キヤノン株式会社 静電容量型電気機械変換装置の制御装置、及び静電容量型電気機械変換装置の制御方法
EP2520917A1 (en) * 2011-05-04 2012-11-07 Nxp B.V. MEMS Capacitive Pressure Sensor, Operating Method and Manufacturing Method
US9476861B2 (en) * 2012-02-23 2016-10-25 Hitachi, Ltd. Ultrasound diagnostic device and ultrasound probe
CN104160250B (zh) * 2012-03-13 2017-10-27 皇家飞利浦有限公司 具有充电电压源的电容微机械超声换能器设备
WO2013179247A1 (en) * 2012-05-31 2013-12-05 Koninklijke Philips N.V. Wafer and method of manufacturing the same
US9479162B2 (en) * 2012-11-28 2016-10-25 Analog Devices, Inc. Apparatus and methods for ultrasound probes
EP3038764A1 (en) * 2013-08-27 2016-07-06 Koninklijke Philips N.V. Dual mode cmut transducer
EP3049194B1 (en) * 2013-09-24 2022-06-29 Koninklijke Philips N.V. Cmut device manufacturing method, cmut device and apparatus
US10743840B2 (en) 2013-09-27 2020-08-18 Koninklijke Philips N.V. Ultrasound transducer assembly and method for transmitting and receiving ultrasound waves
EP3079837B1 (en) * 2013-12-12 2023-02-08 Koninklijke Philips N.V. Monolithically integrated three electrode cmut device
KR20160021558A (ko) * 2014-08-18 2016-02-26 삼성전자주식회사 초음파 변환기의 구동방법 및 초음파 진단 방치
EP3223709B1 (en) 2014-11-25 2019-02-20 Koninklijke Philips N.V. Ultrasound system and method
WO2016091624A1 (en) 2014-12-11 2016-06-16 Koninklijke Philips N.V. Two-terminal cmut device
US9503820B2 (en) * 2015-01-23 2016-11-22 Silicon Audio Directional, Llc Multi-mode microphones
US9479875B2 (en) * 2015-01-23 2016-10-25 Silicon Audio Directional, Llc Multi-mode microphones
EP3265801B1 (en) 2015-03-05 2020-06-17 Koninklijke Philips N.V. Ultrasound system and method
JP6472313B2 (ja) * 2015-04-16 2019-02-20 キヤノン株式会社 探触子及び情報取得装置
CN108025331B (zh) * 2015-06-30 2019-11-05 皇家飞利浦有限公司 超声系统和超声脉冲发射方法
EP3559972B1 (en) * 2016-12-22 2025-10-15 Koninklijke Philips N.V. Systems and methods of operation of capacitive radio frequency micro-electromechanical switches

Patent Citations (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5396143A (en) * 1994-05-20 1995-03-07 Hewlett-Packard Company Elevation aperture control of an ultrasonic transducer
US6826961B2 (en) * 1999-12-03 2004-12-07 Scimed Life Systems, Inc. Dynamically configurable ultrasound transducer with integral bias regulation and command and control circuitry
US6585653B2 (en) * 2001-07-31 2003-07-01 Koninklijke Philips Electronics N.V. Micro-machined ultrasonic transducer (MUT) array
CN1516909A (zh) * 2002-02-13 2004-07-28 ���µ�����ҵ��ʽ���� 微机械振动滤波器
CN102333485A (zh) * 2009-02-27 2012-01-25 皇家飞利浦电子股份有限公司 具有机械塌陷保持的预塌陷cmut
EP2509125A2 (en) * 2011-04-06 2012-10-10 Canon Kabushiki Kaisha Electromechanical transducer and method of producing the same
CN103917304A (zh) * 2011-10-28 2014-07-09 皇家飞利浦有限公司 具有应力层的预塌陷电容式微加工换能器单元
CN104919817A (zh) * 2012-12-03 2015-09-16 日本电气株式会社 电声换能器、其制造方法以及使用其的电子设备
CN105307975A (zh) * 2013-03-15 2016-02-03 蝴蝶网络有限公司 互补金属氧化物半导体(cmos)超声换能器及其形成方法
WO2015004662A1 (en) * 2013-07-08 2015-01-15 Nova Measuring Instruments Ltd. Method and system for determining strain distribution in a sample
CN104826243A (zh) * 2015-05-15 2015-08-12 深圳先进技术研究院 一种超声刺激神经组织的装置
CN106198724A (zh) * 2016-06-30 2016-12-07 重庆大学 一种新型的多稳态超声检测传感器

Also Published As

Publication number Publication date
US20230012105A1 (en) 2023-01-12
EP4289521A3 (en) 2024-03-27
EP3558549B1 (en) 2024-02-14
EP4289521A2 (en) 2023-12-13
US11458504B2 (en) 2022-10-04
JP7391152B2 (ja) 2023-12-04
US20210129187A1 (en) 2021-05-06
JP7208901B2 (ja) 2023-01-19
JP2020502944A (ja) 2020-01-23
EP3558549A1 (en) 2019-10-30
JP2022166105A (ja) 2022-11-01
CN110325293A (zh) 2019-10-11
WO2018115283A1 (en) 2018-06-28

Similar Documents

Publication Publication Date Title
CN110325293B (zh) 电容式射频微机电开关的系统和操作方法
CN110100294B (zh) 电容式射频微机电开关的系统和操作方法
CN107405130B (zh) 超声系统和方法
CN106999151B (zh) 超声系统和方法
EP3038764A1 (en) Dual mode cmut transducer
CN110997165B (zh) 电容式微机械超声换能器(cmut)设备和控制方法
EP3962664B1 (en) Capacitive micro-machined ultrasound transducer (cmut) devices
US11241715B2 (en) Ultrasound system and ultrasonic pulse transmission method
WO2015028945A2 (en) Variable frequency control of collapsed mode cmut transducer
CN106660072A (zh) 具有节距均匀性的平铺的cmut切片

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant