JP2020202126A - 電子銃 - Google Patents
電子銃 Download PDFInfo
- Publication number
- JP2020202126A JP2020202126A JP2019109692A JP2019109692A JP2020202126A JP 2020202126 A JP2020202126 A JP 2020202126A JP 2019109692 A JP2019109692 A JP 2019109692A JP 2019109692 A JP2019109692 A JP 2019109692A JP 2020202126 A JP2020202126 A JP 2020202126A
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- Prior art keywords
- cathode
- heat
- electron gun
- resistant member
- electrons
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- 229910052751 metal Inorganic materials 0.000 claims description 6
- 239000002184 metal Substances 0.000 claims description 6
- 239000013641 positive control Substances 0.000 claims description 5
- 239000000463 material Substances 0.000 abstract description 25
- 238000004382 potting Methods 0.000 abstract description 19
- 230000006866 deterioration Effects 0.000 abstract description 7
- 238000010438 heat treatment Methods 0.000 description 19
- 150000002500 ions Chemical class 0.000 description 14
- 238000010894 electron beam technology Methods 0.000 description 10
- 230000002093 peripheral effect Effects 0.000 description 9
- 230000005684 electric field Effects 0.000 description 7
- 230000020169 heat generation Effects 0.000 description 5
- 239000000126 substance Substances 0.000 description 5
- 238000000034 method Methods 0.000 description 3
- 238000005304 joining Methods 0.000 description 2
- 230000000149 penetrating effect Effects 0.000 description 2
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 2
- 229910010271 silicon carbide Inorganic materials 0.000 description 2
- 238000005507 spraying Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 239000010953 base metal Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 229910052735 hafnium Inorganic materials 0.000 description 1
- VBJZVLUMGGDVMO-UHFFFAOYSA-N hafnium atom Chemical compound [Hf] VBJZVLUMGGDVMO-UHFFFAOYSA-N 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 238000010943 off-gassing Methods 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 238000004080 punching Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- 230000001960 triggered effect Effects 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
Images
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
- H01J3/02—Electron guns
- H01J3/027—Construction of the gun or parts thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J23/00—Details of transit-time tubes of the types covered by group H01J25/00
- H01J23/02—Electrodes; Magnetic control means; Screens
- H01J23/06—Electron or ion guns
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J23/00—Details of transit-time tubes of the types covered by group H01J25/00
- H01J23/02—Electrodes; Magnetic control means; Screens
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
- H01J29/46—Arrangements of electrodes and associated parts for generating or controlling the ray or beam, e.g. electron-optical arrangement
- H01J29/48—Electron guns
- H01J29/484—Eliminating deleterious effects due to thermal effects, electrical or magnetic fields; Preventing unwanted emission
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
- H01J29/46—Arrangements of electrodes and associated parts for generating or controlling the ray or beam, e.g. electron-optical arrangement
- H01J29/48—Electron guns
- H01J29/485—Construction of the gun or of parts thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
- H01J29/46—Arrangements of electrodes and associated parts for generating or controlling the ray or beam, e.g. electron-optical arrangement
- H01J29/48—Electron guns
- H01J29/488—Schematic arrangements of the electrodes for beam forming; Place and form of the elecrodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
- H01J3/02—Electron guns
- H01J3/024—Electron guns using thermionic emission of cathode heated by electron or ion bombardment or by irradiation by other energetic beams, e.g. by laser
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
- H01J3/02—Electron guns
- H01J3/029—Schematic arrangements for beam forming
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
- H01J3/10—Arrangements for centring ray or beam
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2201/00—Electrodes common to discharge tubes
- H01J2201/28—Heaters for thermionic cathodes
Landscapes
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Electron Sources, Ion Sources (AREA)
Abstract
Description
図1は、この実施の形態に係る電子銃1の概略構成を示す断面図である。なお、この実施の形態に係る電子銃1は、2極電子銃である。この電子銃1は、主として、カソード2に貫通孔21が形成された上で耐熱部材8が設けられている点が従来の電子銃と構成が異なり、従来と同等の構成についての説明を省略するが、概略次のような構成となっている。
図4は、この実施の形態に係る電子銃1の概略構成を示す断面図である。この実施の形態では、実施の形態1と同等の構成に加え、ウェネルト5に対してグリッド6が接続されている。すなわち、この実施の形態に係る電子銃1は、3極電子銃である。なお、実施の形態1と同等の構成については、同一符号を付することでその説明を省略する。
図5は、この実施の形態に係る電子銃1の概略構成を示す断面図である。この実施の形態では、耐熱部材8が実施の形態1の耐熱部材8と構成が異なる。なお、実施の形態1と同等の構成については、同一符号を付することでその説明を省略する。
2 カソード
21 貫通孔
3 ヒータ
4 アノード
41 開口部
5 ウェネルト
6 グリッド
61 孔
8 耐熱部材
81 板状部
82 凸部
83 周端
84 切欠き部
85 円筒部
86 外周面
9 スリーブ
10 ポッティング材
101 従来の構成の電子銃
102 カソード
103 アノード
104 ウェネルト
105 ヒータ
106 グリッド
A 電子の放出方向(進行方向)
Claims (6)
- 電子を放出するカソードと、該カソードを昇温させるヒータと、前記カソードに対して正の電位を印加して電子を一定方向に引き出すアノードと、を備える電子銃であって、
前記カソードの、前記電子の進行方向に対する直交面視における中心位置に、前記電子の進行方向に沿う貫通孔が設けられ、
該貫通孔を塞ぐ第一の部分と、前記カソードと前記ヒータとの間に位置する第二の部分とを有する耐熱部材が配設されている、
ことを特徴とする電子銃。 - 前記カソードに対して正の制御電圧を印加するために前記カソードと前記アノードとの間にグリッドを備え、
該グリッドの、前記カソードの前記貫通孔と同軸上に、孔が設けられている、
ことを特徴とする請求項1に記載の電子銃。 - 前記耐熱部材の前記第一の部分よりも、前記第二の部分が薄くなっている、
ことを特徴とする請求項1または2のいずれか1項に記載の電子銃。 - 前記耐熱部材の前記第一の部分が、前記第二の部分の一面から突出して前記カソードの前記貫通孔へと挿し入れられる円筒部として形成されている、
ことを特徴とする請求項1から3のいずれか1項に記載の電子銃。 - 前記耐熱部材の前記第二の部分に、1つもしくは複数の切欠き部もしくは穴が形成されている、
ことを特徴とする請求項1から4のいずれか1項に記載の電子銃。 - 前記耐熱部材が、金属によって形成され、前記カソードと同電位となっている箇所に接続されている、
ことを特徴とする請求項1から5のいずれか1項に記載の電子銃。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2019109692A JP7269107B2 (ja) | 2019-06-12 | 2019-06-12 | 電子銃 |
US16/897,828 US10950407B2 (en) | 2019-06-12 | 2020-06-10 | Electron gun |
CN202010536688.0A CN112086331A (zh) | 2019-06-12 | 2020-06-12 | 电子枪 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2019109692A JP7269107B2 (ja) | 2019-06-12 | 2019-06-12 | 電子銃 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2020202126A true JP2020202126A (ja) | 2020-12-17 |
JP7269107B2 JP7269107B2 (ja) | 2023-05-08 |
Family
ID=73735912
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2019109692A Active JP7269107B2 (ja) | 2019-06-12 | 2019-06-12 | 電子銃 |
Country Status (3)
Country | Link |
---|---|
US (1) | US10950407B2 (ja) |
JP (1) | JP7269107B2 (ja) |
CN (1) | CN112086331A (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN115529710B (zh) * | 2022-09-28 | 2024-02-20 | 中国原子能科学研究院 | 一种电子帘加速器 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4091311A (en) * | 1976-12-17 | 1978-05-23 | United Technologies Corporation | Modulatable, hollow beam electron gun |
JPS63211534A (ja) * | 1987-02-25 | 1988-09-02 | Hitachi Ltd | 含浸形カソ−ド構体 |
JP2002260522A (ja) * | 2000-12-26 | 2002-09-13 | Sony Corp | 陰極構体とその製造方法及び電子銃並びに陰極線管 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE50310817D1 (de) * | 2003-12-02 | 2009-01-02 | Comet Holding Ag | Modulare röntgenröhre und verfahren zu ihrer herstellung |
JP2010015814A (ja) * | 2008-07-03 | 2010-01-21 | Toshiba Corp | 電子銃構体およびマイクロ波管 |
JP5350911B2 (ja) | 2008-07-31 | 2013-11-27 | キヤノンアネルバ株式会社 | プラズマ発生装置及び成膜装置並びに成膜方法及び表示素子の製造方法 |
US8907550B2 (en) * | 2009-03-16 | 2014-12-09 | Molex Incorporated | Light module |
WO2011034086A1 (ja) * | 2009-09-18 | 2011-03-24 | 株式会社アルバック | 電子銃、真空処理装置 |
CN103493171B (zh) * | 2011-04-28 | 2016-02-17 | 株式会社日立高新技术 | 电子显微镜用试样保持装置以及电子显微镜装置 |
CN202633200U (zh) | 2012-06-04 | 2012-12-26 | 山东新华医疗器械股份有限公司 | 一种驻波加速管用阴控两极电子枪 |
US9257253B1 (en) | 2014-08-21 | 2016-02-09 | Altair Technologies, Inc. | Systems and methods utilizing a triode hollow cathode electron gun for linear particle accelerators |
CN109698102B (zh) * | 2017-10-20 | 2021-03-09 | 中芯国际集成电路制造(上海)有限公司 | 电子枪、掩膜版制备方法及半导体装置 |
CN109346205A (zh) * | 2018-10-19 | 2019-02-15 | 房春 | 一种电子加速器辐照系统反馈控制方法及系统 |
-
2019
- 2019-06-12 JP JP2019109692A patent/JP7269107B2/ja active Active
-
2020
- 2020-06-10 US US16/897,828 patent/US10950407B2/en active Active
- 2020-06-12 CN CN202010536688.0A patent/CN112086331A/zh active Pending
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4091311A (en) * | 1976-12-17 | 1978-05-23 | United Technologies Corporation | Modulatable, hollow beam electron gun |
JPS63211534A (ja) * | 1987-02-25 | 1988-09-02 | Hitachi Ltd | 含浸形カソ−ド構体 |
JP2002260522A (ja) * | 2000-12-26 | 2002-09-13 | Sony Corp | 陰極構体とその製造方法及び電子銃並びに陰極線管 |
Also Published As
Publication number | Publication date |
---|---|
US10950407B2 (en) | 2021-03-16 |
CN112086331A (zh) | 2020-12-15 |
JP7269107B2 (ja) | 2023-05-08 |
US20200395185A1 (en) | 2020-12-17 |
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