JP2020198324A5 - - Google Patents

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Publication number
JP2020198324A5
JP2020198324A5 JP2019101611A JP2019101611A JP2020198324A5 JP 2020198324 A5 JP2020198324 A5 JP 2020198324A5 JP 2019101611 A JP2019101611 A JP 2019101611A JP 2019101611 A JP2019101611 A JP 2019101611A JP 2020198324 A5 JP2020198324 A5 JP 2020198324A5
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JP
Japan
Prior art keywords
opening degree
shutter
pressure sensor
exhaust damper
condition
Prior art date
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Granted
Application number
JP2019101611A
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English (en)
Japanese (ja)
Other versions
JP7143251B2 (ja
JP2020198324A (ja
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Publication date
Application filed filed Critical
Priority to JP2019101611A priority Critical patent/JP7143251B2/ja
Priority claimed from JP2019101611A external-priority patent/JP7143251B2/ja
Priority to US17/607,999 priority patent/US11967508B2/en
Priority to PCT/JP2020/021418 priority patent/WO2020241848A1/ja
Priority to SG11202112567WA priority patent/SG11202112567WA/en
Publication of JP2020198324A publication Critical patent/JP2020198324A/ja
Publication of JP2020198324A5 publication Critical patent/JP2020198324A5/ja
Application granted granted Critical
Publication of JP7143251B2 publication Critical patent/JP7143251B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2019101611A 2019-05-30 2019-05-30 ダンパー制御システムおよびダンパー制御方法 Active JP7143251B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2019101611A JP7143251B2 (ja) 2019-05-30 2019-05-30 ダンパー制御システムおよびダンパー制御方法
US17/607,999 US11967508B2 (en) 2019-05-30 2020-05-29 Damper control system and damper control method
PCT/JP2020/021418 WO2020241848A1 (ja) 2019-05-30 2020-05-29 ダンパー制御システムおよびダンパー制御方法
SG11202112567WA SG11202112567WA (en) 2019-05-30 2020-05-29 Damper control system and damper control method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2019101611A JP7143251B2 (ja) 2019-05-30 2019-05-30 ダンパー制御システムおよびダンパー制御方法

Publications (3)

Publication Number Publication Date
JP2020198324A JP2020198324A (ja) 2020-12-10
JP2020198324A5 true JP2020198324A5 (enExample) 2021-12-09
JP7143251B2 JP7143251B2 (ja) 2022-09-28

Family

ID=73552853

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2019101611A Active JP7143251B2 (ja) 2019-05-30 2019-05-30 ダンパー制御システムおよびダンパー制御方法

Country Status (4)

Country Link
US (1) US11967508B2 (enExample)
JP (1) JP7143251B2 (enExample)
SG (1) SG11202112567WA (enExample)
WO (1) WO2020241848A1 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102737433B1 (ko) * 2022-12-16 2024-12-02 세메스 주식회사 제어 유닛 및 이를 포함하는 반도체 제조 설비
TW202520411A (zh) * 2023-10-11 2025-05-16 日商東京威力科創股份有限公司 基板處理裝置及基板處理方法

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3548865A (en) * 1967-12-08 1970-12-22 Bela P Povinger Pressure control apparatus
US4375224A (en) * 1981-01-21 1983-03-01 Acutherm, Inc. Air conditioning control equipment
GB8531812D0 (en) * 1985-12-24 1986-02-05 Edi Eng Ltd Control system
SE458802B (sv) * 1987-04-03 1989-05-08 Stifab Ab Regleranordning foer instaellning av ett spjaell i en ventilationskanal
US4796651A (en) * 1988-03-30 1989-01-10 LeRoy D. Ginn Variable gas volume flow measuring and control methods and apparatus
JPH06163494A (ja) 1992-11-20 1994-06-10 Hitachi Electron Eng Co Ltd 半導体洗浄装置の排気ガス制御機構
US5363872A (en) * 1993-03-16 1994-11-15 Applied Materials, Inc. Low particulate slit valve system and method for controlling same
US5518446A (en) * 1994-07-28 1996-05-21 Landis & Gyr Powers, Inc. Fume hood exhaust terminal
US5758680A (en) * 1996-03-29 1998-06-02 Lam Research Corporation Method and apparatus for pressure control in vacuum processors
AU1682999A (en) * 1997-12-18 1999-07-05 Nikon Corporation Method of controlling air pressure in chamber, apparatus for the same, and exposure apparatus
JP4022309B2 (ja) 1998-04-08 2007-12-19 大日本スクリーン製造株式会社 基板処理装置
JP3623654B2 (ja) 1998-04-24 2005-02-23 大日本スクリーン製造株式会社 基板処理装置
JP4298840B2 (ja) * 1999-03-31 2009-07-22 芝浦メカトロニクス株式会社 スピン処理装置およびスピン処理方法
US6557574B2 (en) * 2000-04-04 2003-05-06 Clifford C. Federspiel Pressure based flow rate measurement device integrated with blades of a damper
JP2006078086A (ja) * 2004-09-09 2006-03-23 Taikisha Ltd 室圧制御システム
JP2009036425A (ja) * 2007-08-01 2009-02-19 Hitachi Plant Technologies Ltd 室圧制御方法及びシステム
DE102008010658B4 (de) * 2008-02-22 2010-08-19 Knorr-Bremse Systeme für Nutzfahrzeuge GmbH Abgasregelsystem und Abgasregelverfahren
JP5744382B2 (ja) 2008-07-24 2015-07-08 株式会社荏原製作所 基板処理装置および基板処理方法
JP5528374B2 (ja) * 2011-03-03 2014-06-25 東京エレクトロン株式会社 ガス減圧供給装置、これを備えるシリンダキャビネット、バルブボックス、及び基板処理装置
JP6105868B2 (ja) * 2012-06-26 2017-03-29 株式会社不二工機 電動弁制御装置及び電動弁装置
US9465391B2 (en) * 2014-01-09 2016-10-11 Fisher Controls International Llc Valve positioner with overpressure protection capabilities

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