JP2020160136A - Lamp module and liquid crystal panel manufacturing device - Google Patents

Abstract

To provide a lamp module capable of reducing irradiation unevenness of ultraviolet rays to a panel to be treated and a liquid crystal panel manufacturing device.SOLUTION: A lamp module 41 includes multiple electric discharge lamps 1. The electric discharge lamp 1 has a light-emitting part, and non-light emitting parts 13 disposed at both ends of the light-emitting part. The electric discharge lamp 1 irradiates a panel to be treated, which contains a photoreactive substance, with light. In the multiple electric discharge lamps 1, the relationship between the diameter D [mm] of each electric discharge lamp 1 and the pitch d1 [mm] between adjacent electric discharge lamps 1 in the radial direction is 1.1D≤d1≤10D.SELECTED DRAWING: Figure 4

Description

An embodiment of the present invention relates to a lamp module and a liquid crystal panel manufacturing apparatus.

In recent years, there is a liquid crystal panel manufacturing apparatus that controls the orientation state of a monomer contained in a liquid crystal body by applying a voltage to a panel to be processed containing a liquid crystal body containing a photoreactive substance and irradiating with ultraviolet rays in parallel.

Japanese Unexamined Patent Publication No. 2011-146363 JP-A-2009-266574

By the way, in order to manufacture a high-performance liquid crystal panel, it is required to improve the irradiation performance and reduce the uneven irradiation of ultraviolet rays on the panel to be treated.

An object to be solved by the present invention is to provide a lamp module and a liquid crystal panel manufacturing apparatus capable of reducing uneven irradiation of ultraviolet rays on a panel to be processed.

The lamp module of the embodiment includes a plurality of discharge lamps. The discharge lamp has a light emitting portion and non-light emitting portions provided at both ends of the light emitting portion. The discharge lamp irradiates a panel to be treated containing a photoreactive substance with light. The plurality of discharge lamps have a relationship of 1.1D ≦ d1 ≦ 10D between the diameter D [mm] of each discharge lamp and the pitch d1 [mm] between the adjacent discharge lamps in the radial direction.

According to the present invention, it is possible to reduce uneven irradiation of ultraviolet rays on the panel to be treated.

It is a side view of the liquid crystal panel manufacturing apparatus which concerns on embodiment. It is a side view of the discharge lamp which concerns on embodiment. It is sectional drawing which shows typically the liquid crystal panel. It is a schematic diagram of the lamp module which concerns on embodiment. It is a figure which shows the result of having compared the orientation distribution. It is a top view of the shutter provided in the liquid crystal panel manufacturing apparatus which concerns on embodiment. It is a top view of the shutter with the movable part closed. It is a side view of the liquid crystal panel manufacturing apparatus in which the movable part of a shutter is closed. It is a figure which shows the relationship between the driving speed of a moving part, and a panel performance.

The lamp module 41 according to the embodiment described below includes a plurality of discharge lamps 1. The discharge lamp 1 has a light emitting unit and non-light emitting units 13 provided at both ends of the light emitting unit. The discharge lamp 1 irradiates the panel 6 to be treated containing the photoreactive substance with light. The plurality of discharge lamps 1 have a relationship of 1.1D ≦ d1 ≦ 10D between the diameter D [mm] of each discharge lamp and the pitch d1 [mm] between the discharge lamps 1 adjacent to each other in the radial direction.

Further, the plurality of discharge lamps 1 according to the embodiment described below are arranged in a staggered manner so that the light emitting portions of the discharge lamps 1 adjacent to each other in the radial direction overlap each other in a range of 20 [mm] or more and 120 [mm] or less. Has been done.

Further, the liquid crystal panel manufacturing apparatus 100 according to the embodiment described below includes a lamp module 41 and a shutter 60. The shutter 60 is arranged between the plurality of discharge lamps 1 and the panel 6 to be processed. The shutter 60 has a movable portion 67 that opens and closes at a driving speed of 1000 [mm / s] or more.

Further, the panel 6 to be processed according to the embodiment described below has a liquid crystal layer 9 and a pair of substrates 7 and 8 facing each other with the liquid crystal layer 9 interposed therebetween, and a voltage is applied to the plurality of discharge lamps 1. The liquid crystal layer 9 is irradiated with ultraviolet rays.

Hereinafter, embodiments according to the present invention will be described with reference to the drawings. In addition, each embodiment shown below does not limit the technique disclosed by this invention. In addition, each embodiment and each modification shown below can be appropriately combined within a consistent range. Further, in the description of each embodiment, the same reference numerals are given to the same configuration, and the following description will be omitted as appropriate.

[Embodiment]
First, an outline of the liquid crystal panel manufacturing apparatus according to the embodiment will be described with reference to FIG. FIG. 1 is a side view of the liquid crystal panel manufacturing apparatus according to the embodiment.

For the sake of clarity, FIG. 1 illustrates a three-dimensional Cartesian coordinate system including the Z-axis with the vertical downward direction as the positive direction and the vertical upward direction as the negative direction. Such a Cartesian coordinate system may also be shown in other drawings used in the later description.

As shown in FIG. 1, the liquid crystal panel manufacturing apparatus 100 according to the embodiment includes an irradiation unit 40, a stage unit 50, and a shutter 60. The liquid crystal panel manufacturing apparatus 100 is an apparatus for manufacturing a liquid crystal panel by irradiating the panel 6 to be processed arranged on the stage portion 50 with ultraviolet rays.

The irradiation unit 40 includes a lamp module 41, a lighting device 42, and a reflector 43. The lamp module 41 has a plurality of discharge lamps 1. The discharge lamp 1 radiates ultraviolet rays having a wavelength suitable for processing of the panel 6 to be processed by electric power supplied from a power supply device (not shown) via the lighting device 42. Here, a configuration example of the discharge lamp 1 will be described with reference to FIG.

FIG. 2 is a side view of the discharge lamp according to the embodiment. As shown in FIG. 2, the discharge lamp 1 according to the embodiment has an arc tube 10, a pair of bases 11, a pair of contacts 12, a pair of electrodes 20, and a phosphor 30. The pair of electrodes 20 are provided at both ends of the arc tube 10 in the length direction, and are connected to a pair of pin-shaped contacts 12 located at the ends of the pair of bases 11 that support the arc tube 10. There is.

The discharge lamp 1 is, for example, a hot cathode fluorescent lamp having a tube diameter D = 15.5 [mm], a light emitting length L1 = 1650 [mm], a tube length L2 = 1700 [mm], and a total length L3 = 1714.1 [mm]. is there. The illuminance setting value of the discharge lamp 1 can be, for example, 0.5 [mW / cm ² ] (313 [nm]). The arc tube 10 is a hard glass containing quartz (SiO ₂ ) as a main component, and transmits light generated by energization through the contact 12. The arc tube 10 is an example of a light emitting unit. On the other hand, the base 11 and the contact points 12 arranged at both ends of the arc tube 10 may be generically referred to as a non-light emitting unit 13.

Further, in the discharge lamp 1, as the phosphor 30, for example, aluminate having one or more of strontium (Sr), magnesium (Mg) and barium (Ba) and cerium (Ce) as an activator are used. contains. Specifically, for example, SrAl ₁₂ O ₁₉ : Ce (cerium-activated strontium aluminate) or (MgSrBa) Al ₁₁ O ₁₉ : Ce can be applied as the phosphor 30. The phosphor 30 is applied to, for example, the inner surface of the arc tube 10. Further, inside the arc tube 10, an inert gas containing a rare gas such as argon (Ar) or neon (Ne) and mercury are sealed.

The reflector 43 enhances the irradiation efficiency by reflecting the ultraviolet rays radiated from the discharge lamp 1 toward the stage portion 50. In the example shown in FIG. 1, the reflector 43 is arranged only on the back surface side (Z-axis negative direction side) of the lamp module 41, but is not limited to this, and is not limited to this, for example, inside the irradiation unit 40 or the stage unit 50. It may be arranged.

The stage portion 50 has a stage 51 and a lift pin 52. The stage 51 applies a voltage to the panel 6 to be processed, which is placed at a predetermined position. For the stage 51, for example, aluminum having high heat dissipation can be used. The stage size is not particularly limited, but may be, for example, a stage 51 of 3000 [mm] (X-axis direction) × 3400 [mm]. Further, by coating the surface of the stage 51 with a fluororesin, it is possible to quickly remove static electricity after the panel is replaced, and the liquid crystal panel can be efficiently manufactured.

The lift pin 52 is an elevator that raises and lowers the mounted panel 6 to be processed, and is mainly used for carrying in and out the panel 6 to be processed. Specifically, the lift pin 52 receives the panel 6 to be processed that has been carried into the stage portion 50 from a carry-in / out port (not shown). Further, the lift pin 52 floats the panel 6 to be processed after being irradiated with ultraviolet rays, which is placed on the stage 51, and delivers it to a transfer robot (not shown).

As described above, the discharge lamp 1 according to the embodiment can efficiently manufacture a liquid crystal panel by radiating ultraviolet rays having a wavelength suitable for processing the panel 6 to be processed. Here, the panel 6 to be processed will be described with reference to FIG.

FIG. 3 is a cross-sectional view schematically showing a liquid crystal panel. The panel 6 to be processed shown in FIG. 3 has a pair of substrates 7 and 8 and a liquid crystal layer 9 provided between the substrates 7 and the substrate 8.

The substrate 7 is, for example, a color filter substrate in which a color filter (not shown) that transmits red, green, and blue light is arranged on a base material, and the color filter is covered with a protective film. The substrate 8 is an opposed substrate provided so as to face the substrate 7 with the liquid crystal layer 9 interposed therebetween, and a plurality of electrodes are arranged in an array.

The liquid crystal layer 9 contains a liquid crystal composition and a polymerizable monomer as a photoreactive substance. The liquid crystal layer 9 polymerizes the polymerizable monomer by absorbing ultraviolet rays having a specific wavelength radiated from the discharge lamp 1, and stabilizes the liquid crystal composition whose orientation is controlled by applying a voltage on the stage 51. Will be done.

Next, the arrangement of the plurality of discharge lamps 1 in the lamp module 41 according to the embodiment will be described. FIG. 4 is a schematic view of the lamp module according to the embodiment.

As shown in FIG. 4, each of the plurality of discharge lamps 1 is mounted in a socket (not shown) provided on the top plate 44, and the length direction of the discharge lamp 1 is the X-axis which is the opening / closing direction of the shutter 60. They are arranged in parallel along the direction. The top plate 44 may also serve as a reflector 43 (see FIG. 1). The socket is electrically connected to a lighting device 42 (see FIG. 1) that lights the discharge lamp 1, and power is supplied from the lighting device 42 to the discharge lamp 1 via the socket, so that the discharge lamp 1 becomes Light. When the discharge lamp 1 is turned on, ultraviolet rays are irradiated toward the panel 6 to be processed mounted on the stage 51.

Further, the plurality of discharge lamps 1 are arranged so that the pitch d1 [mm] between the adjacent discharge lamps 1 in the radial direction (Y-axis direction) is evenly spaced. Specifically, it is arranged so as to have a relationship of 1.1D ≦ d1 ≦ 10D with respect to the diameter D [mm] (see FIG. 2) of each discharge lamp 1. By defining the pitch d1 [mm] in the above range, it is possible to reduce the uneven irradiation of ultraviolet rays over the entire panel 6 to be processed mounted on the stage 51, and it is possible to manufacture a high-performance liquid crystal panel. It becomes.

On the other hand, when the pitch d1 [mm] exceeds 10D, the uniformity of the ultraviolet rays emitted from the lamp module 41 decreases. Further, when the pitch d1 [mm] exceeds 10D, the number of discharge lamps 1 arranged per unit area decreases, so that a predetermined illuminance cannot be satisfied. Therefore, it becomes difficult to manufacture a high-performance liquid crystal panel. If the pitch d1 [mm] is less than 1.1D, there is a high possibility that the light emitting portion (light emitting tube 10) or non-light emitting portion 13 of the discharge lamps 1 adjacent in the radial direction and the socket (not shown) interfere with each other. , Not realistic.

Further, the lamp modules 41 are staggered so that the arc tubes 10 as the light emitting portions of the discharge lamps 1 adjacent to each other in the radial direction overlap each other by a predetermined dimension d2 [mm]. The dimension d2 [mm] affects the uniformity in the longitudinal direction (X-axis direction) of the lamp module 41. Specifically, by arranging the dimensions d2 [mm] shown in FIG. 4 so as to be in the range of, for example, 20 [mm] or more and 120 [mm] or less, uneven irradiation of ultraviolet rays to the panel 6 to be processed is caused. This can be reduced, and high-performance liquid crystal panels can be manufactured. If the dimension d2 [mm] is less than 20 [mm], the illuminance relatively decreases in the vicinity of the overlapped portion, and the uniformity decreases. Further, when the dimension d2 [mm] exceeds 120 [mm], the illuminance relatively increases in the vicinity of the overlapped portion, and the uniformity decreases. This point will be described with reference to the example shown in FIG.

FIG. 5 is a diagram showing the results of comparing the orientation distributions. In the example shown in FIG. 5, a plurality of discharge lamps 1 having a light emitting tube 10 having a tube diameter D = 15.5 [mm] and a light emitting length L1 = 1650 [mm] are provided with a pitch d1 = 19 [mm] and dimensions d2 =. Lamp modules 41 staggered so as to overlap by 130, 60, and 10 [mm] were produced, and their orientation distributions were compared.

Further, in FIG. 5, the “measurement point [mm]” on the horizontal axis defines the center parallel to the X-axis direction of the dimension d2 shown in FIG. 4 as 0 [mm], and is along the ramp axis direction. The locations separated by 300 [mm] are defined as 300 [mm] and 900 [mm], respectively. Further, the “313 nm relative illuminance” on the vertical axis is a place where the illuminance distribution is not affected by the arrangement of the plurality of discharge lamps 1 being different, specifically, X = + 450 [mm], as shown in FIG. It is standardized based on the illuminance value of -450 [mm]. The illuminance value is a value measured by an illuminance meter: UV-M03A (manufactured by ORC Manufacturing Co., Ltd.) and a sensor: UV-SN31 (manufactured by ORC Manufacturing Co., Ltd.). The illuminance values at the points of X = + 450 [mm] and -450 [mm] are the same, but when the illuminance values at the points of X = + 450 [mm] and X = -450 [mm] are different, each It may be standardized based on the average value obtained by adding the illuminance values of.

As shown in FIG. 5, when the dimension d2 = 60 [mm], there is little uneven irradiation of ultraviolet rays on the panel 6 to be treated, and a high-performance liquid crystal panel can be manufactured. On the other hand, when the dimension d2 [mm] = 10 [mm], the illuminance relatively decreases in the vicinity of the measurement point = −300 [mm] to 300 [mm], and the uniformity decreases. Further, when the dimension d2 [mm] = 130 [mm], the illuminance relatively increases in the vicinity of the measurement point = −400 [mm] to 400 [mm], and the uniformity decreases.

Returning to FIG. 1, the liquid crystal panel manufacturing apparatus 100 will be further described. The shutter 60 is arranged between the irradiation unit 40 and the stage unit 50, and controls the irradiation time and timing of the ultraviolet rays emitted from the irradiation unit 40 to the panel 6 to be processed carried into the stage unit 50. .. Here, the shutter 60 will be further described with reference to FIGS. 6 to 8.

FIG. 6 is a plan view of a shutter included in the liquid crystal panel manufacturing apparatus according to the embodiment. FIG. 7 is a plan view of the shutter with the movable portion closed. FIG. 8 is a side view of the liquid crystal panel manufacturing apparatus in which the movable portion of the shutter is closed.

As shown in FIGS. 6 and 7, the shutter 60 has a fixed portion 62, a movable portion 67, and a driving portion 68. The ultraviolet rays emitted from the irradiation unit 40 are emitted toward the stage unit 50 through the opening 61. The opening 61 is formed in the center of the shutter 60 by opening the movable portion 67. The opening 61 irradiates the panel 6 to be processed having the maximum dimension X1 [mm] in the X-axis direction, which is the opening / closing direction of the movable portion 67, and the dimension Y1 [mm] in the Y-axis direction extending the fixed portion 62. It is designed so that the ultraviolet rays emitted from the unit 40 can be evenly irradiated. Specifically, the liquid crystal panel manufacturing apparatus 100 can process the panel 6 to be processed having dimensions X1 = 2970 [mm] and dimensions Y1 = 3370 [mm].

As shown in FIGS. 7 and 8, the movable portion 67 includes movable pieces 63 to 66. Further, the drive unit 68 has a pair of drive units 68a to 68d that control the opening and closing of the movable pieces 63 to 66, respectively. The drive units 68a to 68d may include, for example, a linear motor or other linear motor. When the movable portion 67 is operated from open to closed by a shutter control unit (not shown), the drive units 68a and 68b move the movable pieces 63 and 64 in the positive direction of the X-axis, respectively, and the drive units 68c and 68d move the movable pieces. 65 and 66 are moved to the negative side of the X-axis, respectively. Further, when the movable portion 67 is operated from closed to open, the drive units 68a and 68b move the movable pieces 63 and 64 to the negative direction side of the X axis, respectively, and the drive units 68c and 68d move the movable pieces 65 and 66 to X. Move them to the positive direction of the axis. The drive unit 68 may have a linear motion mechanism that converts the drive of the rotary motor into a linear motion.

As described above, the shutter 60 controls the irradiation time and timing of the ultraviolet rays emitted from the irradiation unit 40 with respect to the panel 6 to be processed carried into the stage unit 50. Specifically, as shown in FIG. 8, after the lift pin 52 is carried into the stage portion 50 in a raised state, the processed panel 6 placed on the stage 51 by the lowering of the lift pin 52 has a predetermined voltage. After the application is started, the irradiation unit 40 irradiates the panel 6 to be treated with ultraviolet rays.

That is, the irradiation of ultraviolet rays from the irradiation unit 40 to the panel 6 to be processed controls the driving speed of the movable unit 67 by the driving unit 68, and reduces the time required for the state transition of the movable unit 67 from closed to open and open to closed. It can be realized by. Specifically, in the liquid crystal panel manufacturing apparatus 100, the movable portion 67 of the shutter 60 opens and closes at a driving speed of, for example, 1000 [mm / s] or more, and further 1000 [mm / s] or more and 2000 [mm / s] or less. By controlling the drive unit 68, uneven irradiation of ultraviolet rays to the panel 6 to be processed is reduced. Here, the "driving speed" is calculated by averaging the driving speeds calculated based on the driving time required for the movable portion 67 to transition from closed to open and open to closed. is there. The time during which the movable portion 67 is maintained in the "open" or "closed" state is not included in the driving time.

FIG. 9 is a diagram showing the relationship between the driving speed of the movable portion and the panel performance. In FIG. 9, the state of the panel 6 to be processed when the driving speed of the movable portion 67 is changed between 500 [mm / s] and 3000 [mm / s] is shown side by side with the shutter durability. .. In FIG. 9, “◯”, “Δ”, and “x” indicate that the state of the panel 6 to be processed or the durability of the shutter 60 is good in the order of ○> Δ> ×.

As shown in FIG. 9, when the driving speed of the movable portion 67 is 1000 [mm / s] or more, for example, the panel 6 to be processed shown in FIG. 6 is good over the entire X-axis direction which is the driving direction of the movable portion 67. Liquid crystal panel can be obtained. On the other hand, if the driving speed of the movable portion 67 is less than 1000 [mm / s] (500 [mm / s], 700 [mm / s]), irradiation unevenness occurs in the driving direction of the movable portion 67, and the desired quality is obtained. The liquid crystal panel may not be obtained.

The driving speed of the movable portion 67 may affect the durability of the shutter 60. As shown in FIG. 9, when the driving speed of the movable portion 67 is 2000 [mm / s] or less, no influence on the durability of the shutter 60 is observed, but the driving speed of the movable portion 67 is 2000 [mm / s]. When it exceeds [s] (2500 [mm / s], 3000 [mm / s]), the drive portion 68 and the movable portion 67 of the shutter 60 are likely to deteriorate over time.

As described above, the lamp module 41 according to the embodiment includes a plurality of discharge lamps 1. The discharge lamp 1 has a light emitting unit and non-light emitting units 13 provided at both ends of the light emitting unit. The discharge lamp 1 irradiates the panel 6 to be treated containing the photoreactive substance with light. The plurality of discharge lamps 1 have a relationship of 1.1D ≦ d1 ≦ 10D between the diameter D [mm] of each discharge lamp and the pitch d1 [mm] between the discharge lamps 1 adjacent to each other in the radial direction. Therefore, uneven irradiation of ultraviolet rays to the panel 6 to be treated can be reduced.

Further, the plurality of discharge lamps 1 according to the embodiment are staggered so that the light emitting portions of the discharge lamps 1 adjacent to each other in the radial direction overlap each other in a range of 20 [mm] or more and 120 [mm] or less. Therefore, uneven irradiation of ultraviolet rays to the panel 6 to be treated can be further reduced.

Further, the liquid crystal panel manufacturing apparatus 100 according to the embodiment includes a lamp module 41 and a shutter 60. The shutter 60 is arranged between the plurality of discharge lamps 1 and the panel 6 to be processed. The shutter 60 has a movable portion 67 that opens and closes at a driving speed of 1000 [mm / s] or more. Therefore, uneven irradiation of ultraviolet rays to the panel 6 to be treated can be reduced.

In the above-described embodiment, the discharge lamp 1 has been described as containing an aluminate having at least one of strontium (Sr), magnesium (Mg) and barium (Ba) as the phosphor 30. Not limited to this, for example, LaPO ₄ : Ce (cerium-activated lanthanum phosphate) may be applied as the phosphor 30. Further, as the discharge lamp 1, a metal halide lamp may be used instead of the hot cathode fluorescent lamp.

Further, in the above-described embodiment, the movable portion 67 of the shutter 60 is described as opening and closing along the X-axis direction, but the present invention is not limited to this, and the shutter 60 may be opened and closed along the Y-axis direction.

Although the embodiments of the present invention have been described, the embodiments are presented as examples and are not intended to limit the scope of the invention. The embodiment can be implemented in various other forms, and various omissions, replacements, and changes can be made without departing from the gist of the invention. The embodiments and modifications thereof are included in the scope and the gist of the invention as well as the invention described in the claims and the equivalent scope thereof.

1 Discharge lamp 6 Processed panel 7, 8 Substrate 9 Liquid crystal layer 10 Light arc tube 20 Electrode 30 Fluorescent material 40 Irradiation unit 41 Lamp module 50 Stage unit 51 Stage 60 Shutter 61 Opening 67 Moving unit 68 Drive unit 100 Liquid crystal panel manufacturing equipment

Claims (4)

A plurality of discharge lamps having a light emitting portion and non-light emitting portions provided at both ends of the light emitting portion and irradiating a panel to be treated containing a photoreactive substance with light;
Equipped with
The plurality of discharge lamps are lamp modules in which the diameter D [mm] of each discharge lamp and the pitch d1 [mm] between adjacent discharge lamps in the radial direction have a relationship of 1.1D ≦ d1 ≦ 10D. The plurality of discharge lamps
The lamp module according to claim 1, wherein the light emitting portions of the discharge lamps adjacent to each other in the radial direction are arranged in a staggered manner so as to overlap each other in a range of 20 [mm] or more and 120 [mm] or less. With the lamp module according to claim 1 or 2.
A shutter arranged between the plurality of discharge lamps and the panel to be processed;
Equipped with
The shutter is a liquid crystal panel manufacturing apparatus having a movable portion that opens and closes at a driving speed of 1000 [mm / s] or more. The panel to be processed has a liquid crystal layer and a pair of substrates facing each other with the liquid crystal layer interposed therebetween.
The liquid crystal panel manufacturing apparatus according to claim 3, wherein the plurality of discharge lamps irradiate the liquid crystal layer to which a voltage is applied with ultraviolet rays.

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