JP2020107750A - Semiconductor device and alternator using the same - Google Patents

Semiconductor device and alternator using the same Download PDF

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JP2020107750A
JP2020107750A JP2018245652A JP2018245652A JP2020107750A JP 2020107750 A JP2020107750 A JP 2020107750A JP 2018245652 A JP2018245652 A JP 2018245652A JP 2018245652 A JP2018245652 A JP 2018245652A JP 2020107750 A JP2020107750 A JP 2020107750A
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semiconductor device
base
alternator
diameter
jig
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JP2020107750A5 (en
JP7231407B2 (en
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佑 春別府
Yu Harubeppu
佑 春別府
谷江 尚史
Hisafumi Tanie
尚史 谷江
河野 賢哉
Kenya Kono
賢哉 河野
智弘 恩田
Tomohiro Onda
智弘 恩田
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Hitachi Power Semiconductor Device Ltd
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/26Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L2224/31Structure, shape, material or disposition of the layer connectors after the connecting process
    • H01L2224/33Structure, shape, material or disposition of the layer connectors after the connecting process of a plurality of layer connectors
    • H01L2224/331Disposition
    • H01L2224/3318Disposition being disposed on at least two different sides of the body, e.g. dual array
    • H01L2224/33181On opposite sides of the body
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/73Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
    • H01L2224/732Location after the connecting process
    • H01L2224/73251Location after the connecting process on different surfaces
    • H01L2224/73265Layer and wire connectors

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Abstract

To realize a semiconductor device capable of improving reliability, by reducing stress acting on a semiconductor chip when press fitting into an alternator.SOLUTION: A radiator 7, in which a fitting hole 16 is formed, is fixed, and a semiconductor device 6 is installed so that the pedestal part 2a side of a base 2 faces the mating hole 16. Top face of a press jig 8 is brought into contact with the bottom face of the base 2 so as to substantially matches a region 2d, and by pressing the bottom face of the base 2 in the direction of the radiator 7 by means of the press jig 8, the base 2 is fitted in the fitting hole 16 thus press-fitting the semiconductor device 6 to the radiator 7 of the alternator. External-diameter of the press jig 8 is between the diameter of the pedestal part 2a and the bore diameter of an outer peripheral protrusion 2b, similarly to the region 2d. Stress of a semiconductor chip is reduced by setting the external-diameter of a pressed-point for the bottom face of the base 2 of the semiconductor device 6 between the diameter of the pedestal part 2a and the bore diameter of the outer peripheral protrusion 2b.SELECTED DRAWING: Figure 2

Description

本発明は、半導体装置およびそれを用いたオルタネータに関する。 The present invention relates to a semiconductor device and an alternator using the same.

自動車用オルタネータの交流出力の整流用に使用される半導体装置は、半導体チップと、ベースと、リードと、それらを接合する導電性接合材を備えるものである。 A semiconductor device used for rectifying an AC output of an alternator for an automobile includes a semiconductor chip, a base, a lead, and a conductive bonding material that bonds them.

半導体装置は、特許文献1に記載されているように、トランジスタ回路チップやコンデンサ等、複数の電子部品を搭載した構造も知られている。 As described in Patent Document 1, a semiconductor device has a structure in which a plurality of electronic components such as a transistor circuit chip and a capacitor are mounted.

半導体装置をオルタネータへ実装する際には、ベースのうち、電子部品と接合されていない面を押圧冶具により押圧し、オルタネータの放熱体に形成された嵌合孔に圧入される。 When the semiconductor device is mounted on the alternator, the surface of the base that is not joined to the electronic component is pressed by a pressing jig and press-fitted into a fitting hole formed in the radiator of the alternator.

半導体装置のオルタネータへの圧入時には嵌合孔からの締付力と押圧冶具による押圧力で半導体装置のベースが変形するため、それに伴い、半導体チップに応力が発生する。 When the semiconductor device is press-fitted into the alternator, the base of the semiconductor device is deformed by the tightening force from the fitting hole and the pressing force of the pressing jig, which causes stress on the semiconductor chip.

よって、半導体チップへの応力を低減し、信頼性を向上することが必要である。 Therefore, it is necessary to reduce stress on the semiconductor chip and improve reliability.

この要求に応えるべく、圧入時の応力を低減した半導体装置を提供する技術として、例えば、特許文献2に記載の技術が知られている。 As a technique for providing a semiconductor device in which stress at the time of press-fitting is reduced to meet this demand, for example, a technique described in Patent Document 2 is known.

特許文献2には、半導体装置のベースの底面を湾曲した形状とし、圧入時の応力を緩和する技術が記載されている。 Patent Document 2 describes a technique in which a bottom surface of a base of a semiconductor device is formed into a curved shape to relieve stress during press fitting.

特開2017−98276号公報JP, 2017-98276, A 特開2004−296595号公報JP 2004-296595 A

近年、半導体装置における電子部品の搭載量が増加する傾向にあり、その搭載量を確保するため、領域を増加させる必要がある。このため、半導体装置の高さ方向への搭載領域を増加すべく、半導体装置のベースを薄型化することが考えられる。 In recent years, the mounting amount of electronic components in semiconductor devices tends to increase, and it is necessary to increase the area in order to secure the mounting amount. Therefore, it is conceivable to thin the base of the semiconductor device in order to increase the mounting area of the semiconductor device in the height direction.

電子部品の搭載領域確保のために半導体装置のベースを薄型化する場合には、ベースの曲げ剛性が低下する。 When the base of a semiconductor device is thinned to secure a mounting area for electronic components, the bending rigidity of the base is reduced.

よって、オルタネータの嵌合孔からの締付力の影響でベースが曲げ変形しやすくなり、ベースの底面側に凸の特有の曲げ変形が生じる。 Therefore, the base is likely to be bent and deformed by the influence of the tightening force from the fitting hole of the alternator, and the peculiar bending and deformation is generated on the bottom surface side of the base.

このため、半導体装置のベースを薄型化する場合には、半導体チップの応力を低減し信頼性を向上するため、ベースの曲げ変形を抑制する必要がある。 Therefore, when thinning the base of the semiconductor device, it is necessary to suppress the bending deformation of the base in order to reduce the stress of the semiconductor chip and improve the reliability.

本発明は、前記課題に鑑みて成されたもので、オルタネータへの圧入時に半導体チップに作用する応力が低減され、信頼性を向上することができる半導体装置およびそれを用いたオルタネータを実現することである。 The present invention has been made in view of the above problems, and realizes a semiconductor device in which stress acting on a semiconductor chip during press-fitting into an alternator is reduced and reliability can be improved, and an alternator using the same. Is.

本発明は、上記課題を解決するため、以下のように構成される。 The present invention is configured as follows to solve the above problems.

半導体装置において、リード電極と、前記リード電極に接続された電子部品と、前記電子部品を支持するベースと、を備え、前記ベースは、前記ベースの一方の面に、前記電子部品が配置される台座部と、前記台座部の外周側に配置された円環状の外周凸部とが形成され、前記ベースの一方の面と反対側の面である底面に、外部部材の孔に前記半導体装置を挿入するための押圧治具が接触する治具接触領域が形成されている。 A semiconductor device includes a lead electrode, an electronic component connected to the lead electrode, and a base that supports the electronic component. The base has the electronic component disposed on one surface of the base. A pedestal portion and an annular outer circumferential convex portion arranged on the outer circumferential side of the pedestal portion are formed, and the semiconductor device is provided in a hole of an external member on a bottom surface which is a surface opposite to one surface of the base. A jig contact area is formed in contact with the pressing jig for insertion.

また、ロータと、ステータと、整流器とを備えるオルタネータにおいて、前記整流器は、放熱体に形成された嵌合孔に挿入された半導体装置を有し、前記半導体装置は、リード電極と、前記リード電極に接続された電子部品と、前記電子部品を支持するベースとを有し、前記ベースは、前記ベースの一方の面に、前記電子部品が配置される台座部と、前記台座部の外周側に配置された円環状の外周凸部とが形成され、前記ベースの一方の面と反対側の面である底面に、外部部材の孔に前記半導体装置を挿入するための押圧治具が接触する治具接触領域が形成されている。 Further, in an alternator including a rotor, a stator, and a rectifier, the rectifier has a semiconductor device inserted into a fitting hole formed in a radiator, and the semiconductor device has a lead electrode and the lead electrode. And an electronic component connected to the base, and a base that supports the electronic component, the base is on one surface of the base, a pedestal portion on which the electronic component is disposed, and an outer peripheral side of the pedestal portion. A circular ring-shaped outer peripheral convex portion is formed and a pressing jig for inserting the semiconductor device into a hole of an external member comes into contact with a bottom surface that is a surface opposite to one surface of the base. A tool contact area is formed.

本発明によれば、オルタネータへの圧入時に半導体チップに作用する応力を低減し、信頼性を向上することができる半導体装置およびそれを用いたオルタネータを実現することができる。 According to the present invention, it is possible to realize a semiconductor device that can reduce the stress acting on a semiconductor chip at the time of press fitting into an alternator and improve reliability, and an alternator using the same.

第1実施例に係る半導体装置6の概略断面図である。It is a schematic sectional drawing of the semiconductor device 6 which concerns on 1st Example. 第1実施例に係る半導体装置をオルタネータの放熱体に形成された嵌合孔に圧入する状態を示す概略断面図である。It is a schematic sectional drawing which shows the state which presses the semiconductor device which concerns on 1st Example into the fitting hole formed in the radiator of the alternator. 本発明とは異なる例であり、本発明と比較するための例を示す図である。It is a figure which is an example different from this invention, and shows an example for comparing with this invention. 比較例による方法で半導体装置を嵌合孔に圧入した際のひずみを測定した結果を示すグラフである。7 is a graph showing a result of measuring strain when a semiconductor device is press-fitted into a fitting hole by a method according to a comparative example. 図3に示した比較例の測定結果から考えられるベースの曲げ変形の方向の模式図である。It is a schematic diagram of the direction of bending deformation of the base considered from the measurement result of the comparative example shown in FIG. 応力解析モデルを示す図である。It is a figure which shows a stress analysis model. 応力解析の各条件での押圧箇所を示す図である。It is a figure which shows the press location in each condition of stress analysis. 応力解析の結果得られた各条件の半導体チップ応力を示す図である。It is a figure which shows the semiconductor chip stress of each condition obtained as a result of stress analysis. 応力解析の結果得られた各条件の曲げ変形量を示す図である。It is a figure which shows the bending deformation amount of each condition obtained as a result of stress analysis. 応力解析の各条件での押圧箇所を示す図である。It is a figure which shows the press location in each condition of stress analysis. 応力解析の結果得られた各条件の半導体チップ応力を示す図である。It is a figure which shows the semiconductor chip stress of each condition obtained as a result of stress analysis. 第2実施例に係る半導体装置の概略断面図である。It is a schematic sectional drawing of the semiconductor device which concerns on 2nd Example. 第3実施例に係る半導体装置及び押圧治具の概略断面図である。It is a schematic sectional drawing of the semiconductor device and pressing jig which concern on 3rd Example. 本発明の第4実施例に係る半導体装置の概略断面図である。It is a schematic sectional drawing of the semiconductor device which concerns on 4th Example of this invention. 第1実施例〜第4実施例の半導体装置のいずれかが圧入された整流器を有するオルタネータの概略断面図である。It is a schematic sectional drawing of the alternator which has a rectifier with which any one of the semiconductor devices of a 1st example-a 4th example was press-fitted.

以下、図面を適宜参照しながら、本発明の実施形態を説明する。ただし、本発明はここで取り上げた実施形態に限定されることはなく、要旨を変更しない範囲で適宜組合せや改良が可能である。 Hereinafter, embodiments of the present invention will be described with reference to the drawings as appropriate. However, the present invention is not limited to the embodiments described here, and various combinations and improvements can be made without departing from the scope of the invention.

(第1実施例)
図1は、本発明の第1実施例に係る半導体装置6の概略断面図である。
(First embodiment)
FIG. 1 is a schematic sectional view of a semiconductor device 6 according to the first embodiment of the present invention.

図1において、半導体装置6は、半導体チップ1a、コンデンサ1b、制御回路チップ1c、ソースフレーム1d、電子部品用導電性接合材1e、ワイヤ1f、リードフレーム1g、電子部品用樹脂1hからなる電子部品1と、電子部品1が配置されるベース2と、リード電極3と、半導体装置用導電性接合材4と、半導体装置用樹脂5で構成される。電子部品1はリード電極3に接続される。 In FIG. 1, a semiconductor device 6 is an electronic component including a semiconductor chip 1a, a capacitor 1b, a control circuit chip 1c, a source frame 1d, an electronic component conductive bonding material 1e, a wire 1f, a lead frame 1g, and an electronic component resin 1h. 1, a base 2 on which the electronic component 1 is arranged, a lead electrode 3, a conductive bonding material 4 for a semiconductor device, and a resin 5 for a semiconductor device. The electronic component 1 is connected to the lead electrode 3.

ベース2は電子部品1を支持する部材であって、半導体装置用導電性接合材4を介して電子部品1と互いに接合され電子部品1が配置される円形の台座部2aと、台座部2aの外周側に配置され、台座部2aを取り囲むように設けられた円環形の外周凸部2bと、基部2cとを有する。台座部2aと外周凸部2bとの間は、円環状の溝が形成されている。 The base 2 is a member that supports the electronic component 1, and is a circular pedestal portion 2a on which the electronic component 1 is arranged by being joined to the electronic component 1 via the conductive bonding material 4 for a semiconductor device, and the pedestal portion 2a. It has a ring-shaped outer peripheral convex portion 2b arranged on the outer peripheral side and provided so as to surround the pedestal portion 2a, and a base portion 2c. An annular groove is formed between the pedestal portion 2a and the outer peripheral protrusion 2b.

円形の台座部2a及び円環形の外周凸部2bはベース2の一方の面に形成されている。 The circular pedestal portion 2 a and the annular outer peripheral convex portion 2 b are formed on one surface of the base 2.

ソースフレーム1d、ベース2、リードフレーム1g、リード電極3の材質としては、電気伝導性と熱伝導性に優れた銅や銅合金が望ましい。特に、ベース2は圧入時の締付力や押圧力を受けるため、ジルコニウムと銅との合金等、高強度な材質が望ましい。 As a material of the source frame 1d, the base 2, the lead frame 1g, and the lead electrode 3, copper or copper alloy having excellent electrical conductivity and thermal conductivity is desirable. In particular, since the base 2 receives a tightening force and a pressing force at the time of press fitting, a high-strength material such as an alloy of zirconium and copper is preferable.

ベース2の厚さは3〜4mm程度である。 The thickness of the base 2 is about 3 to 4 mm.

半導体装置6は、オルタネータに実装される際、基部2cのうち台座部2aのある側の面(ベース2の一方の面)と反対側の面を外部から押圧冶具で押されることで、オルタネータの放熱体に形成された嵌合孔に挿入(圧入)される。このとき、ベース2の底面(台座部2aが配置された面、つまり、ベース2の一方の面とは反対側の面)には押圧冶具と接する領域2dと押圧冶具と接しない領域2eとが設定されており、押圧冶具と接する領域2dの外径は、台座部2aの直径以上、かつ外周凸部2bの内径以下であることが第1実施例の構成の最大の特徴である。 When the semiconductor device 6 is mounted on the alternator, the surface of the base portion 2c opposite to the surface on which the pedestal portion 2a is located (one surface of the base 2) is pressed from the outside by a pressing jig, so that It is inserted (press-fitted) into the fitting hole formed in the radiator. At this time, on the bottom surface of the base 2 (the surface on which the pedestal portion 2a is arranged, that is, the surface opposite to one surface of the base 2), there are an area 2d contacting the pressing jig and an area 2e not contacting the pressing jig. The greatest feature of the configuration of the first embodiment is that the outer diameter of the area 2d that is set and is in contact with the pressing jig is not less than the diameter of the pedestal portion 2a and not more than the inner diameter of the outer peripheral protrusion 2b.

図2は第1実施例に係る半導体装置6をオルタネータの放熱体7に形成された嵌合孔16に圧入する状態を示す概略断面図である。 FIG. 2 is a schematic sectional view showing a state in which the semiconductor device 6 according to the first embodiment is press-fitted into the fitting hole 16 formed in the radiator 7 of the alternator.

図2において、半導体装置6をオルタネータの放熱体(外部部材)7の嵌合孔16に圧入するときには、嵌合孔16が形成された放熱体7を固定し、ベース2の台座部2aのある側が嵌合孔16に対向するように半導体装置6を設置する。 In FIG. 2, when the semiconductor device 6 is press-fitted into the fitting hole 16 of the radiator (external member) 7 of the alternator, the radiator 7 having the fitting hole 16 is fixed, and the base 2 a of the base 2 is provided. The semiconductor device 6 is installed so that its side faces the fitting hole 16.

押圧冶具8の上面(ベース2の底面を押圧する面)を領域2dに略一致するようにベース2の底面に接触させる。そして、押圧冶具8によりベース2の底面を放熱体7の方向へ押圧することで、ベース2を嵌合孔16内に嵌合させる。 The top surface of the pressing jig 8 (the surface that presses the bottom surface of the base 2) is brought into contact with the bottom surface of the base 2 so as to substantially coincide with the region 2d. Then, the base 2 is fitted into the fitting hole 16 by pressing the bottom surface of the base 2 toward the radiator 7 by the pressing jig 8.

押圧冶具8の外径は、領域2dと同様に、台座部2aの直径以上、かつ外周凸部2bの内径以下である。ベース2の底面における、押圧治具8がベース2の底面に接触する領域2dを治具接触領域と定義する。 The outer diameter of the pressing jig 8 is equal to or larger than the diameter of the pedestal portion 2a and equal to or smaller than the inner diameter of the outer peripheral protrusion 2b, similarly to the region 2d. An area 2d on the bottom surface of the base 2 where the pressing jig 8 contacts the bottom surface of the base 2 is defined as a jig contact area.

第1の実施例は、押圧治具8がベース2の底面に接触する領域2dが治具接触領域として形成されている。 In the first embodiment, a region 2d where the pressing jig 8 contacts the bottom surface of the base 2 is formed as a jig contact region.

図3は、本発明とは異なる例であり、本発明と比較するための例を示す図である。図3に示す例においては、治具接触領域はベース2の底面全面のいずれかの領域であり、本発明の第1実施例のようには特定されていない。 FIG. 3 is a diagram showing an example different from the present invention, which is an example for comparison with the present invention. In the example shown in FIG. 3, the jig contact area is any area on the entire bottom surface of the base 2, and is not specified as in the first embodiment of the present invention.

また、図3に示した例では、円環状の押圧冶具8の外径は外周凸部2bの内径を上回る。 Further, in the example shown in FIG. 3, the outer diameter of the annular pressing jig 8 is larger than the inner diameter of the outer peripheral protrusion 2b.

図3に示した例では、円環状の押圧冶具8の円環部でのみ、ベース2の底面を押圧し、半導体装置6を放熱体7の嵌合孔に圧入する。 In the example shown in FIG. 3, the bottom surface of the base 2 is pressed only by the annular portion of the annular pressing jig 8 to press the semiconductor device 6 into the fitting hole of the radiator 7.

図4は図3に示した比較例による方法で半導体装置6を放熱体7の嵌合孔に圧入した際のベース2の台座部2aとベース2の底面の中央のひずみを測定した結果を示すグラフである。また、図5は図3に示した比較例の測定結果から考えられるベース2の曲げ変形の方向の模式図である。 FIG. 4 shows the result of measuring the strain at the center of the pedestal portion 2a of the base 2 and the bottom surface of the base 2 when the semiconductor device 6 is press-fitted into the fitting hole of the radiator 7 by the method according to the comparative example shown in FIG. It is a graph. Further, FIG. 5 is a schematic diagram of the bending deformation direction of the base 2 which is considered from the measurement result of the comparative example shown in FIG.

図4及び図5において、圧入途中、ベース2の台座部2aには圧縮のひずみが作用し、ベース底面には引張のひずみが作用する。よって、ベース2はベース底面側に凸の曲げ変形をしている。 4 and 5, during the press-fitting, a compressive strain acts on the pedestal portion 2a of the base 2 and a tensile strain acts on the bottom face of the base. Therefore, the base 2 has a convex bending deformation on the bottom surface side of the base.

圧入の途中ではベースのうち台座部2a側のみが放熱体7からの締付力を受ける。この締付力により曲げ変形したと考えられる。 During the press-fitting, only the pedestal portion 2a side of the base receives the tightening force from the radiator 7. It is considered that this tightening force caused bending deformation.

圧入途中のベース2の曲げ変形により半導体チップ1aに作用する応力を評価するために、有限要素法による応力解析を実施した。 In order to evaluate the stress acting on the semiconductor chip 1a due to the bending deformation of the base 2 during the press fitting, the stress analysis by the finite element method was performed.

図6は、応力解析モデルを示す図である。図6に示した例は、ベース2の形状の対称性を考慮して、二次元軸対称モデルとした。また、ベース2の変形による半導体チップ1aへの影響を厳しめに評価するために、部材としては半導体チップ1aと電子部品用導電性接合材1eとベース2のみをモデル化した。ベース側面のうち、台座部2a側の半分にのみ、嵌合孔の内壁からの締付けに相当する締付力Fを与えることで、圧入途中を模擬した。 FIG. 6 is a diagram showing a stress analysis model. The example shown in FIG. 6 is a two-dimensional axisymmetric model in consideration of the symmetry of the shape of the base 2. Further, in order to severely evaluate the influence of the deformation of the base 2 on the semiconductor chip 1a, only the semiconductor chip 1a, the electronic component conductive bonding material 1e, and the base 2 were modeled as members. A press-fitting process was simulated by applying a tightening force F corresponding to the tightening from the inner wall of the fitting hole to only the half of the side surface of the base on the pedestal portion 2a side.

ベース2の底面に、押圧冶具からの押圧力Pを与えた。この押圧力Pを与える箇所を変えることで、本発明の第一実施例と図3に示した比較例とを比較した。押圧箇所を変える各条件での押圧力Pの荷重は全て同じ大きさとした。 The pressing force P from the pressing jig was applied to the bottom surface of the base 2. The first embodiment of the present invention and the comparative example shown in FIG. 3 were compared by changing the location where the pressing force P is applied. The load of the pressing force P under each condition of changing the pressed portion is the same.

図7は、応力解析の各条件での押圧箇所を示す図である。図7において、押圧箇所はA、B、Cの3条件とした。条件Aは、押圧箇所の外径が外周凸部2bの内径を上回る条件であり、図3に示した比較例に相当する。 FIG. 7 is a diagram showing pressed portions under each condition of stress analysis. In FIG. 7, the pressed portion was under three conditions of A, B, and C. The condition A is a condition in which the outer diameter of the pressed portion exceeds the inner diameter of the outer peripheral convex portion 2b, and corresponds to the comparative example shown in FIG.

条件Bは、押圧箇所の外径が台座部2aの直径以上、かつ外周凸部2bの内径以下の条件であり、本発明の第1実施例に含まれる。 The condition B is a condition that the outer diameter of the pressed portion is equal to or larger than the diameter of the pedestal portion 2a and equal to or smaller than the inner diameter of the outer peripheral protrusion 2b, and is included in the first embodiment of the present invention.

条件Cは、押圧箇所の外径が台座部2aの直径を下回る条件であり、ベース中心に集中的な押圧力を与える場合を模擬した追加の比較例(図3に示した例とは別箇の比較例)である。 Condition C is a condition in which the outer diameter of the pressed portion is smaller than the diameter of the pedestal portion 2a, and is an additional comparative example simulating a case where a concentrated pressing force is applied to the center of the base (separate from the example shown in FIG. 3). Is a comparative example).

図8は、応力解析の結果得られた各条件の半導体チップ応力を示す図である。図3に示した比較例である条件Aの応力を1として相対比較した。 FIG. 8 is a diagram showing the semiconductor chip stress under each condition obtained as a result of the stress analysis. Relative comparison was performed by setting the stress of condition A, which is the comparative example shown in FIG. 3, to 1.

図8において、条件Cでは条件Aの7倍の応力が発生するが、本第1実施例に含まれる条件Bでは応力は、条件Aの0.2倍に低減される。この理由を示すために、各条件での解析モデルの曲げ変形量を比較した。 In FIG. 8, under the condition C, a stress 7 times that under the condition A is generated, but under the condition B included in the first embodiment, the stress is reduced to 0.2 times under the condition A. In order to show the reason, the bending deformation amounts of the analytical models under each condition were compared.

図9は、応力解析の結果得られた各条件の曲げ変形量を示す図である。図9において、条件Aの変形量を1として相対比較した。条件Aでは、ベース2の外周部を押圧するため、図4および図5で示した通り、嵌合孔16の内壁からの締付力によって、ベース2の底面側に凸の曲げ変形が発生する。 FIG. 9 is a diagram showing the bending deformation amount under each condition obtained as a result of the stress analysis. In FIG. 9, the amount of deformation under condition A was set to 1, and relative comparison was performed. Under the condition A, since the outer peripheral portion of the base 2 is pressed, as shown in FIGS. 4 and 5, the clamping force from the inner wall of the fitting hole 16 causes a convex bending deformation on the bottom surface side of the base 2. ..

条件Bでは、押圧力がベース底面側に凸の曲げ変形を打ち消す方向に作用するため、ベース2の曲げ変形量が低減される。その結果、半導体チップ応力も低減されたと考えられる。 Under the condition B, the pressing force acts in the direction of canceling the convex bending deformation on the bottom surface side of the base, so that the bending deformation amount of the base 2 is reduced. As a result, it is considered that the stress on the semiconductor chip was also reduced.

条件Cでは、押圧力がベース底面側に凸の曲げ変形を打ち消す方向に作用するが、押圧力がベース中央部に集中しているため、台座部側に凸の曲げ変形が過大に発生し、その結果、半導体チップ応力も増大したと考えられる。 Under the condition C, the pressing force acts in the direction of canceling the convex bending deformation on the base bottom surface side, but since the pressing force is concentrated on the center part of the base, the convex bending deformation occurs excessively on the pedestal side, As a result, it is considered that the semiconductor chip stress also increased.

以上のことから、ベース2の底面側に凸の曲げ変形を打ち消す方向に押圧力を作用させ、かつ、ベース2の中央に押圧力を集中させすぎないことが、チップ応力低減のために有効であることがわかる。 From the above, it is effective for reducing the chip stress that the pressing force acts on the bottom surface side of the base 2 in the direction of canceling the convex bending deformation and the pressing force is not concentrated too much in the center of the base 2. I know there is.

応力低減効果を得られる押圧箇所の範囲を示すために、さらに応力解析を実施した。図10は、応力解析の各条件での押圧箇所を示す図である。図10において、押圧箇所としてD、Eの2条件を追加した。D及びEのいずれの条件も本第1実施例に含まれる。 Further stress analysis was carried out to show the range of pressed points where the stress reduction effect can be obtained. FIG. 10 is a diagram showing pressed portions under each condition of stress analysis. In FIG. 10, two conditions, D and E, were added as pressing points. Both conditions D and E are included in the first embodiment.

条件Dは条件Bと押圧箇所が共通する部分があるが、押圧する範囲を条件Bよりも増加させたものである。条件Eは、条件Dよりもさらに押圧箇所の範囲を広げ、台座部2aの直径と同じ範囲全体を押圧するものである。 The condition D has a portion having the same pressing portion as the condition B, but the pressing range is increased as compared with the condition B. The condition E is to expand the range of the pressed portion more than the condition D and press the entire range having the same diameter as the pedestal portion 2a.

図11は、応力解析の結果得られた各条件の半導体チップ応力を示す図である。図11において、条件Dは条件Aの0.2倍で条件Bと同等、条件Eは条件Aの0.4倍の応力が発生しており、いずれの条件でも、図3に示した比較例の条件Aに対して応力低減効果を得られることがわかる。 FIG. 11 is a diagram showing the semiconductor chip stress under each condition obtained as a result of the stress analysis. In FIG. 11, the condition D is 0.2 times the condition A, which is equivalent to the condition B, and the condition E is 0.4 times the stress of the condition A. In either condition, the comparative example shown in FIG. It is understood that the stress reducing effect can be obtained under the condition A of 1.

以上のことから、本発明の第1実施例のように、半導体装置6のベース2の底面に対する押圧箇所(治具接触領域2d)の外径を台座部2aの直径以上、かつ外周凸部2bの内径以下とすることで、半導体チップの応力を低減できることがわかる。 From the above, as in the first embodiment of the present invention, the outer diameter of the pressing portion (jig contact region 2d) with respect to the bottom surface of the base 2 of the semiconductor device 6 is equal to or larger than the diameter of the pedestal portion 2a and the outer peripheral convex portion 2b. It can be seen that the stress of the semiconductor chip can be reduced by setting the inner diameter to be less than or equal to

また、条件B、Dのように、ベース2の中心を除く円環形の範囲を押圧することで、より応力を低減することができることがわかる。 Further, it can be seen that the stress can be further reduced by pressing the annular area excluding the center of the base 2 as in the conditions B and D.

つまり、本発明の第1実施例によれば、半導体装置6のベース2の底面に対する押圧治具8による押圧箇所として、台座部2aの直径以上、かつ外周凸部2bの内径以下とする治具接触領域2dを形成したので、オルタネータへの圧入時に半導体チップに作用する応力が低減され、信頼性を向上することができる半導体装置を実現することができる。 That is, according to the first embodiment of the present invention, a jig for pressing the bottom surface of the base 2 of the semiconductor device 6 by the pressing jig 8 is not less than the diameter of the pedestal portion 2a and not more than the inner diameter of the outer peripheral protrusion 2b. Since the contact region 2d is formed, the stress acting on the semiconductor chip at the time of press-fitting into the alternator is reduced, and a semiconductor device capable of improving reliability can be realized.

なお、上述したように、押圧治具8の外径は台座部2aの直径以上、かつ外周凸部2bの内径以下であることが必要である。 In addition, as described above, the outer diameter of the pressing jig 8 needs to be equal to or larger than the diameter of the pedestal portion 2a and smaller than or equal to the inner diameter of the outer peripheral protrusion 2b.

(第2実施例)
図12は、本発明の第2実施例に係る半導体装置6の概略断面図である。
(Second embodiment)
FIG. 12 is a schematic sectional view of a semiconductor device 6 according to the second embodiment of the present invention.

図12において、第2実施例は、ベース2の底面に底面凸部2fを有する。底面凸部2fの直径は、第1実施例の治具接触領域2dと同様に、台座部2aの直径以上、かつ外周凸部2bの内径以下である。よって、底面凸部2fが治具接触領域となる。また、押圧冶具8の直径は底面凸部2fの直径以上とする。 In FIG. 12, the second embodiment has a bottom surface protrusion 2f on the bottom surface of the base 2. The diameter of the bottom surface convex portion 2f is equal to or larger than the diameter of the pedestal portion 2a and equal to or smaller than the inner diameter of the outer peripheral convex portion 2b, similarly to the jig contact area 2d of the first embodiment. Therefore, the bottom surface convex portion 2f becomes the jig contact area. The diameter of the pressing jig 8 is set to be equal to or larger than the diameter of the bottom surface protrusion 2f.

第2実施例の半導体装置において、押圧冶具8と接する領域は、底面凸部2fであり、その直径は台座部2aの直径以上、かつ外周凸部2bの内径以下であるため、第1実施形態と同様の応力低減効果を得られ、オルタネータへの圧入時に半導体チップに作用する応力が低減され、信頼性を向上することができる半導体装置を実現することができる。 In the semiconductor device of the second embodiment, the area in contact with the pressing jig 8 is the bottom surface convex portion 2f, and the diameter thereof is equal to or larger than the diameter of the pedestal portion 2a and equal to or smaller than the inner diameter of the outer peripheral convex portion 2b. It is possible to obtain a semiconductor device in which a stress reducing effect similar to that can be obtained, the stress acting on the semiconductor chip at the time of press-fitting into the alternator is reduced, and the reliability can be improved.

また、押圧冶具8の直径が底面凸部2fの直径以上であれば、寸法が異なっても同様の効果を得られるという長所がある。 Further, if the diameter of the pressing jig 8 is equal to or larger than the diameter of the bottom surface convex portion 2f, there is an advantage that the same effect can be obtained even if the dimensions are different.

(第3実施例)
図13は、本発明の第3実施例に係る半導体装置6及び押圧治具8の概略断面図である。
(Third embodiment)
FIG. 13 is a schematic sectional view of the semiconductor device 6 and the pressing jig 8 according to the third embodiment of the present invention.

第3実施例は、押圧冶具8は、半導体装置6のベース2の底面と接する面に円環形押圧冶具凸部8aを有する。円環形押圧冶具凸部8aの外径は台座部2aの直径以上、かつ外周凸部2bの内径以下である。 In the third embodiment, the pressing jig 8 has a ring-shaped pressing jig convex portion 8a on the surface in contact with the bottom surface of the base 2 of the semiconductor device 6. The outer diameter of the annular pressing jig convex portion 8a is not less than the diameter of the pedestal portion 2a and not more than the inner diameter of the outer peripheral convex portion 2b.

半導体装置6のベース2の底面には、外径は台座部2aの直径以上、かつ外周凸部2bの内径以下である円環状の治具接触領域が形成されている。 On the bottom surface of the base 2 of the semiconductor device 6, there is formed an annular jig contact region whose outer diameter is greater than or equal to the diameter of the pedestal portion 2a and less than or equal to the inner diameter of the outer peripheral protrusion 2b.

第3実施例によれば、第1実施例と同様な効果が得られる他、図10および図11に示した条件B、Dのような円環形の範囲となるため、より応力低減効果を得られるという効果がある。 According to the third embodiment, the same effect as that of the first embodiment can be obtained, and the stress reduction effect can be further obtained because the conditions are the annular ranges like the conditions B and D shown in FIGS. There is an effect that is.

なお、円環状の治具接触領域の内径は、任意に設定可能であるが、例えば、円環状の治具接触領域の外径の半分程度の寸法としてもよい。 The inner diameter of the annular jig contact area can be set arbitrarily, but may be about half the outer diameter of the annular jig contact area, for example.

(第4実施例)
図14は、本発明の第4実施例に係る半導体装置6の概略断面図である。
(Fourth embodiment)
FIG. 14 is a schematic sectional view of a semiconductor device 6 according to the fourth embodiment of the present invention.

本発明の第4実施例は、ベース2の底面に円環形底面凸部2gが形成されている。 In the fourth embodiment of the present invention, an annular bottom surface protrusion 2g is formed on the bottom surface of the base 2.

円環形底面凸部2gの外径は台座部2aの直径以上、かつ外周凸部2bの内径以下である。この円環形底面凸部2gは、円環状の治具接触領域に該当する。押圧冶具8は実施例1及び実施例2と同様であり、その外径は円環形底面凸部2gの外径以上である。 The outer diameter of the annular bottom convex portion 2g is not less than the diameter of the pedestal portion 2a and not more than the inner diameter of the outer circumferential convex portion 2b. The annular bottom convex portion 2g corresponds to an annular jig contact area. The pressing jig 8 is the same as in the first and second embodiments, and the outer diameter thereof is equal to or larger than the outer diameter of the annular bottom surface convex portion 2g.

第4実施例における半導体装置6の底面の押圧箇所が、第3実施例での押圧箇所と同等となるため、同様の応力低減効果を得られる。押圧冶具8は、外径が円環形底面凸部2gの直径以上であれば、寸法が異なっても同様の効果を得られるという長所がある。 Since the pressed portion on the bottom surface of the semiconductor device 6 in the fourth embodiment is the same as the pressed portion in the third embodiment, a similar stress reducing effect can be obtained. The pressing jig 8 has an advantage that the same effect can be obtained even if the dimensions are different as long as the outer diameter is equal to or larger than the diameter of the annular bottom surface convex portion 2g.

なお、円環形底面凸部2gは、第2実施例と同様に、押圧治具8により、円環形底面凸部2gが押圧されたときに、押圧治具8がベース2の底面が接触しない程度、ベース2の底面から突出していればよい。例えば、1mm程度突出していればよい。 In addition, the annular bottom convex portion 2g is similar to the second embodiment in that the pressing jig 8 does not come into contact with the bottom surface of the base 2 when the annular bottom convex portion 2g is pressed by the pressing jig 8. It suffices that it projects from the bottom surface of the base 2. For example, the protrusion may be about 1 mm.

また、円環形底面凸部2gの内径は、任意に設定可能であるが、例えば、円環状の円環形底面凸部2gの外径の半分程度の寸法としてもよい。 The inner diameter of the ring-shaped bottom convex portion 2g can be set arbitrarily, but may be, for example, about half the outer diameter of the circular ring-shaped bottom convex portion 2g.

(第5実施例)
上述した第1実施例〜第4実施例は半導体装置6の例であるが、第1〜第4実施例による半導体装置を有するオルタネータも本発明の実施例として成立する。
(Fifth embodiment)
Although the first to fourth embodiments described above are examples of the semiconductor device 6, the alternator having the semiconductor device according to the first to fourth embodiments is also realized as an embodiment of the present invention.

ここで、オルタネータの概略構成を説明する。 Here, a schematic configuration of the alternator will be described.

図15は、本発明の第1実施例〜第4実施例の半導体装置6のいずれかが圧入された整流器を有するオルタネータ15の概略断面図である。 FIG. 15 is a schematic sectional view of an alternator 15 having a rectifier into which any one of the semiconductor devices 6 of the first to fourth embodiments of the present invention is press fitted.

図15において、オルタネータ15は、半導体装置が圧入された整流器9と、ロータ10と、ステータ11と、シャフト14と、筐体13とを備える。整流器9、ロータ10、ステータ11及びシャフト14は筐体13の内部に配置される。筐体13には、シャフト14を回転可能に支持するベアリング12が形成されている。 In FIG. 15, the alternator 15 includes a rectifier 9 into which a semiconductor device is press-fitted, a rotor 10, a stator 11, a shaft 14, and a housing 13. The rectifier 9, the rotor 10, the stator 11, and the shaft 14 are arranged inside the housing 13. A bearing 12 that rotatably supports the shaft 14 is formed in the housing 13.

半導体装置6は、整流器9の放熱体7に形成された嵌合孔16に挿入されて電気回路を構成し、ステータ11で生成された交流を直流に変換する。 The semiconductor device 6 is inserted into a fitting hole 16 formed in the radiator 7 of the rectifier 9 to form an electric circuit, and converts the alternating current generated by the stator 11 into direct current.

上述したように、本発明の第1実施例〜第4実施例の半導体装置6は、オルタネータへの圧入時に半導体チップに作用する応力が低減され、信頼性を向上することができるため、本発明の第1実施例〜第4実施例のいずれかの半導体装置6が圧入された整流器9を備えるオルタネータも、信頼性を向上することができる。 As described above, in the semiconductor device 6 according to the first to fourth embodiments of the present invention, the stress acting on the semiconductor chip at the time of press-fitting into the alternator is reduced, and the reliability can be improved. The alternator including the rectifier 9 into which the semiconductor device 6 of any of the first to fourth embodiments is press-fitted can also improve reliability.

なお、本発明は上述した実施例に限定されるものではなく、様々な変形例が含まれる。例えば、上述した実施例は本発明をわかりやすく説明するために詳細を述べたものであり、必ずしも説明した全ての構成を備えるものに限定されるものではない。 It should be noted that the present invention is not limited to the above-described embodiments, but includes various modifications. For example, the above-described embodiments have been described in detail for the purpose of explaining the present invention in an easy-to-understand manner, and are not necessarily limited to those having all the configurations described.

また、各実施例の構成の一部について、本発明の趣旨を損なわない範囲で追加、削除、置換をすることが可能である。 Further, it is possible to add, delete, or replace a part of the configuration of each embodiment without departing from the spirit of the present invention.

1・・・電子部品、 1a・・・半導体チップ、 1b・・・コンデンサ、 1c・・・制御回路チップ、 1d・・・ソースフレーム、 1e・・・電子部品用導電性接合材、 1f・・・ワイヤ、 1g・・・リードフレーム、 1h・・・電子部品用樹脂、 2・・・ベース、 2a・・・台座部、 2b・・・外周凸部、 2c・・・基部、 2d・・・押圧冶具と接する領域、 2e・・・押圧冶具と接しない領域、 2f・・・底面凸部、 2g・・・円環形底面凸部、 3・・・リード電極、 4・・・半導体装置用導電性接合材、 5・・・半導体装置用樹脂、 6・・・半導体装置、 7・・・放熱体、 8・・・押圧冶具、 8a・・・円環形押圧冶具凸部、 9・・・整流器、 10・・・ロータ、 11・・・ステータ、 12・・・ベアリング、 13・・・筐体、 14・・・シャフト、 15・・・オルタネータ、 16・・・嵌合孔 DESCRIPTION OF SYMBOLS 1... Electronic component, 1a... Semiconductor chip, 1b... Capacitor, 1c... Control circuit chip, 1d... Source frame, 1e... Electronic component conductive bonding material, 1f... -Wire, 1g... Lead frame, 1h... Resin for electronic parts, 2... Base, 2a... Pedestal part, 2b... Outer peripheral convex part, 2c... Base part, 2d... Area contacting the pressing jig, 2e... Area not contacting the pressing jig, 2f... Bottom convex portion, 2g... Annular bottom convex portion, 3... Lead electrode, 4... Conductivity for semiconductor device Bonding material, 5... Resin for semiconductor device, 6... Semiconductor device, 7... Radiator, 8... Pressing jig, 8a... Torus pressing jig convex portion, 9... Rectifier , 10... Rotor, 11... Stator, 12... Bearing, 13... Housing, 14... Shaft, 15... Alternator, 16... Fitting hole

Claims (10)

リード電極と、
前記リード電極に接続された電子部品と、
前記電子部品を支持するベースと、を備え、
前記ベースは、前記ベースの一方の面に、前記電子部品が配置される台座部と、前記台座部の外周側に配置された円環状の外周凸部とが形成され、前記ベースの一方の面と反対側の面である底面に、外部部材の孔に前記半導体装置を挿入するための押圧治具が接触する治具接触領域が形成されている
ことを特徴とする半導体装置。
A lead electrode,
An electronic component connected to the lead electrode,
A base supporting the electronic component,
The base has, on one surface of the base, a pedestal portion on which the electronic component is arranged, and an annular outer peripheral convex portion arranged on an outer peripheral side of the pedestal portion, and the one surface of the base is formed. A semiconductor device, wherein a jig contact region, which is in contact with a pressing jig for inserting the semiconductor device into a hole of an external member, is formed on a bottom surface that is a surface opposite to the semiconductor device.
請求項1に記載の半導体装置において、
前記治具接触領域の外径は、前記台座部の直径以上であり、かつ、前記外周凸部の内径以下である
ことを特徴とする半導体装置。
The semiconductor device according to claim 1,
An outer diameter of the jig contact region is equal to or larger than a diameter of the pedestal portion and is equal to or smaller than an inner diameter of the outer peripheral convex portion.
請求項2に記載の半導体装置において、
前記治具接触領域は、前記底面に形成された底面凸部である
ことを特徴とする半導体装置。
The semiconductor device according to claim 2,
The semiconductor device, wherein the jig contact area is a bottom surface convex portion formed on the bottom surface.
請求項2に記載の半導体装置において、
前記治具接触領域は、円環状である
ことを特徴とする半導体装置。
The semiconductor device according to claim 2,
The semiconductor device, wherein the jig contact region has an annular shape.
請求項2に記載の半導体装置において、
前記治具接触領域は、円環形底面凸部である
ことを特徴とする半導体装置。
The semiconductor device according to claim 2,
The semiconductor device, wherein the jig contact region is an annular bottom convex portion.
ロータと、ステータと、整流器とを備えるオルタネータにおいて、
前記整流器は、放熱体に形成された嵌合孔に挿入された半導体装置を有し、前記半導体装置は、リード電極と、前記リード電極に接続された電子部品と、前記電子部品を支持するベースとを有し、前記ベースは、前記ベースの一方の面に、前記電子部品が配置される台座部と、前記台座部の外周側に配置された円環状の外周凸部とが形成され、前記ベースの一方の面と反対側の面である底面に、外部部材の孔に前記半導体装置を挿入するための押圧治具が接触する治具接触領域が形成されている
ことを特徴とするオルタネータ。
In an alternator including a rotor, a stator, and a rectifier,
The rectifier has a semiconductor device inserted into a fitting hole formed in a radiator, and the semiconductor device has a lead electrode, an electronic component connected to the lead electrode, and a base that supports the electronic component. And the base has, on one surface of the base, a pedestal on which the electronic component is disposed, and an annular outer peripheral protrusion disposed on the outer peripheral side of the pedestal, the An alternator characterized in that a jig contact region, which is in contact with a pressing jig for inserting the semiconductor device into a hole of an external member, is formed on a bottom surface which is a surface opposite to one surface of a base.
請求項6に記載のオルタネータにおいて、
前記半導体装置の前記治具接触領域の外径は、前記台座部の直径以上であり、かつ、前記外周凸部の内径以下である
ことを特徴とするオルタネータ。
The alternator according to claim 6,
An outer diameter of the jig contact region of the semiconductor device is equal to or larger than a diameter of the pedestal portion and smaller than or equal to an inner diameter of the outer peripheral protrusion portion.
請求項7に記載のオルタネータにおいて、
前記半導体の前記治具接触領域は、前記底面に形成された底面凸部である
ことを特徴とするオルタネータ。
The alternator according to claim 7,
The alternator, wherein the jig contact area of the semiconductor is a bottom surface convex portion formed on the bottom surface.
請求項7に記載のオルタネータにおいて、
前記半導体の前記治具接触領域は、円環状である
ことを特徴とするオルタネータ。
The alternator according to claim 7,
The alternator, wherein the jig contact region of the semiconductor has an annular shape.
請求項7に記載のオルタネータにおいて、
前記半導体の前記治具接触領域は、円環形底面凸部である
ことを特徴とするオルタネータ。
The alternator according to claim 7,
The alternator, wherein the jig contact region of the semiconductor is an annular bottom convex portion.
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