JP2020097231A - Method for controlling vacuum lamination apparatus, method for preventing molding failure from occurring in vacuum lamination apparatus, and vacuum lamination apparatus - Google Patents

Abstract

To provide a method for controlling a vacuum lamination apparatus, a method for preventing a molding failure from occurring in the vacuum lamination apparatus, and the vacuum lamination apparatus, capable of eliminating a factor for the occurrence of positional deviations to prevent the positional deviations from occurring in a lamination-molded product when the product is molded in a chamber of the vacuum lamination apparatus.SOLUTION: A method for controlling a vacuum lamination apparatus 11 includes pressurizing a lamination-molded product M by swelling or projecting an elastic film 15 or an elastic plate in a chamber C, wherein the elastic film or elastic plate is provided on at least one of an upper board 12 and a lower board 13, the upper board 12 and the lower board 13 being closed to form the chamber C capable of vacuum suction with a vacuum pump 14. In the method for controlling the vacuum lamination apparatus, the rotational frequency of the vacuum pump 14 at the start of vacuum suction in the chamber C is made smaller in rotational frequency than the rotational frequency of the vacuum pump 14 after a lapse of a predetermined time period after the chamber is closed or during the pressurization step, to prevent positional deviations from occurring in the lamination-molded product M within the chamber C.SELECTED DRAWING: Figure 4

Description

According to the present invention, an upper plate and a lower plate are closed to form a chamber that can be vacuum-sucked by a vacuum pump, and an elastic film body or an elastic plate provided on at least one of the plates is bulged into the chamber. The present invention relates to a method for controlling a vacuum laminating apparatus that projects and presses a laminated molded article, a method for preventing defective molding of the vacuum laminating apparatus, and a vacuum laminating apparatus.

Conventionally, an upper plate and a lower plate are closed to form a chamber capable of vacuum suction by a vacuum pump, and an elastic film body or an elastic plate provided on at least one of the plates is bulged or projected into the chamber. As a vacuum laminating apparatus for pressurizing a laminated molded article by using the one described in Patent Document 1, there is known. Then, claim 2 of Patent Document 1 describes that the vacuum pump is controlled by an inverter capable of controlling the number of revolutions.

In addition, (0023) in the specification of the above-mentioned Patent Document 1 describes that when the detection value of the vacuum sensor 27 is in a low vacuum state, the operation amount (rotation amount of the motor 22 is The control curve is predetermined so that the operation amount (rotation speed) of the motor 22 becomes relatively high as the vacuum becomes high.” Further, in (0027), as the vacuum chamber internal vacuum step t2, “The vacuum chamber internal vacuum step t2 is initially set to the vacuum pump 14 as shown in FIG. 3 similarly to the elastic film vacuum suction step t1. When the switching pressure pPa is detected when the vacuum set value of the first vacuum setting 1 in the multi-step control (40hPa as an example, but not limited to this) is approached, the vacuum pump 14 is controlled. The control is switched to the closed loop control (including the feedforward control)." And the said control is also described in (FIG. 3) and (FIG. 4).

JP, 2014-18984, A (claim 1, claim 2, 0023, 0027, Drawing 2, Drawing 3, and Drawing 4).

By the way, in the vacuum laminating apparatus, there is a problem that the laminated molded article placed in the chamber is misaligned during molding, and its cause was initially unknown. Applicants have examined this issue and have determined that it has several causes. Then, in particular, it was found that the problem at the time of starting vacuum suction by the vacuum pump after forming the chamber is a major factor. On the other hand, Patent Document 1 focuses on controlling the degree of vacuum at the time of molding, and although FIG. 4 also describes that the rotational speed of the pump is changed, the stacking placed in the chamber There is no description about the problem that the molded product has the problem of preventing the positional deviation during molding and its countermeasure.

In view of this, the present invention is directed to a control device for a vacuum laminating apparatus capable of eliminating the cause of positional deviation in order to prevent positional deviation of a laminated molded product during molding in the chamber of the vacuum laminating apparatus, and prevention of defective molding of the vacuum laminating apparatus. A method and a vacuum laminating apparatus are provided.

In the method for controlling a vacuum laminating apparatus according to claim 1 of the present invention, an upper plate and a lower plate are closed to form a chamber capable of vacuum suction by a vacuum pump, and an elastic member provided on at least one of the plates. In a method for controlling a vacuum laminating apparatus, in which a film body or an elastic plate is bulged or projected into the chamber to press the laminated molded article, a vacuum in the chamber is used to prevent displacement of the laminated molded article in the chamber. The number of rotations of the vacuum pump at the start of suction is set to be lower than the number of rotations of the vacuum pump after a predetermined time has elapsed after closing the chamber or in the pressurizing step.

According to a second aspect of the present invention, in the method for controlling a vacuum laminating apparatus according to the first aspect, the vacuum pump is constantly driven to rotate during continuous molding, and vacuum is generated only during initial vacuum suction including start of vacuum suction after chamber closing. The pump is characterized in that the rotation speed is low.

According to a third aspect of the present invention, there is provided a method for controlling a vacuum laminating apparatus, wherein an upper plate and a lower plate are closed to form a chamber capable of vacuum suction by a vacuum pump, and an elastic member provided on at least one of the plates. In a method of preventing a molding defect of a vacuum laminating apparatus in which a film body or an elastic plate is bulged or projected into the chamber to press the laminated molded product, in order to prevent displacement of the laminated molded product in the chamber, The control of at least a part of the vacuum degree at the time of the initial vacuum suction is performed by providing a plurality of stages of different target vacuum degrees and performing closed loop control toward the different target vacuum degrees over time.

The vacuum stacking apparatus control method according to claim 4 of the present invention is the method according to claim 3, wherein a control gain used for closed loop control of at least a part of the vacuum degree at the time of the initial vacuum suction and a time other than the time of the initial vacuum suction are used. In the vacuuming process or the pressurizing process, the control gain of the vacuum degree used for the closed loop control is set to different values.

According to a fifth aspect of the present invention, in the vacuum laminating apparatus, an upper plate and a lower plate are closed to form a chamber capable of vacuum suction by a vacuum pump, and an elastic film body provided on at least one of the plates. In a vacuum laminating apparatus that presses a laminated molded product by bulging or projecting an elastic plate into the chamber, in order to prevent displacement of the laminated molded product in the chamber, a passage communicating from the vacuum pump to the chamber is provided. A gentle vacuum suction passage is provided, and at least when vacuum suction is started after the chamber is closed, vacuum suction in the chamber is performed through the gentle vacuum suction passage.

According to a sixth aspect of the present invention, in the vacuum laminating apparatus, an upper plate and a lower plate are closed to form a chamber capable of vacuum suction by a vacuum pump, and an elastic film body provided on at least one of the plates. In a vacuum laminating apparatus that presses a laminated molded product by bulging or projecting an elastic plate into the chamber, in order to prevent displacement of the laminated molded product in the chamber, a passage of a passage communicated with the chamber from the vacuum pump is provided. It is characterized in that the passage is made of a porous body at least in part.

In the vacuum laminating apparatus according to claim 7 of the present invention, the upper plate and the lower plate are closed to form a chamber capable of vacuum suction by a vacuum pump, and an elastic film body provided on at least one of the plates. In a vacuum laminating apparatus that bulges or projects an elastic plate into the chamber to press the laminated molded article, in order to prevent displacement of the laminated molded article in the chamber, electrostatic force is applied in the previous step of the vacuum laminating apparatus. It is characterized in that the laminated molded product and the conveying material are adsorbed.

A control method for a vacuum laminating apparatus according to the present invention is configured such that an upper plate and a lower plate are closed to form a chamber capable of vacuum suction by a vacuum pump, and an elastic film body or an elastic plate provided on at least one of the plates is provided. In a method for controlling a vacuum laminating apparatus for bulging or projecting into a chamber to press a laminated molded product, in order to prevent displacement of the laminated molded product in the chamber, a vacuum pump at the time of starting vacuum suction in the chamber Since the number of revolutions is set to be lower than the number of revolutions of the vacuum pump after a lapse of a predetermined time after closing the chamber, it is possible to prevent the displacement of the laminated molded product during the molding. Further, the method for preventing defective molding of the vacuum laminating apparatus and the vacuum laminating apparatus of the present invention have the same effect.

It is a schematic explanatory drawing of the vacuum laminating apparatus of this embodiment. FIG. 2 is a view taken along the line AA in FIG. 1 and shows the lower surface of the upper plate. It is a flowchart figure which shows the molding failure prevention method of the vacuum laminating apparatus of this embodiment. It is a figure which shows the control method of the vacuum laminating apparatus of this embodiment. It is a schematic explanatory drawing of the vacuum laminating apparatus of another embodiment. It is a schematic explanatory drawing of the vacuum lamination apparatus of another embodiment. It is a figure which shows the characteristic part of the control method of the vacuum lamination apparatus of another embodiment. It is a figure which shows the control method of the conventional vacuum laminating apparatus.

The vacuum laminating apparatus 11 of this embodiment will be described with reference to FIGS. 1 and 2. In the vacuum laminating apparatus 11 of the present embodiment, the upper plate 12 and the lower plate 13 are closed to form a chamber C capable of vacuum suction by the vacuum pump 14, and an elastic film body 15 provided on at least one of the plates. Alternatively, the elastic plate is bulged or protruded into the chamber C to press the laminated material and the laminated material (these are collectively referred to as the laminated molded product M both before and after molding).

More specifically, the lower plate 13 is provided so as to face the upper plate 12, and the lower plate 13 can be moved toward and away from the upper plate 12 by a hydraulic cylinder (not shown). (Note that since the die opening amount of the lower plate 13 relative to the upper plate 12 during the continuous forming is small, the chamber C can be visually observed from the gap formed between the upper plate 12 and the lower plate 13 during the mold opening during the continuous forming. It is almost impossible to confirm the position and the like of the laminated molded product M in the inside.) When the lower plate 13 is lifted by the hydraulic cylinder and the upper plate 12 and the lower plate 13 are closed, the vacuum pump 14 A chamber C which can communicate with each other and has a predetermined volume is formed. Other methods may be used for the operation of the upper plate 12 and the lower plate 13 for forming the chamber C. A heat plate 16 and a heat plate 17 capable of heating are attached to the lower surface of the upper plate 12 and the center of the upper surface of the lower plate 13, respectively. An elastic film body 15 (diaphragm made of heat-resistant rubber such as silicon rubber) is attached so as to cover the peripheral portion of the upper surface of the lower plate 13 where the heat plate 17 is not provided and the upper surface of the heat plate 17. There is. A frame-shaped side wall portion 18 is fixed to the elastic film body 15 above the peripheral portion, and the elastic film body 15 is sandwiched and fixed between the side wall portion 18 and the lower plate 13. An O-ring insertion groove is formed on the upper surface of the side wall portion 18 facing the upper plate 12 so as to surround the chamber C, and an O-ring 19 as a sealing member is inserted in the groove.

Also in the upper board 12, a contact portion 12a is provided in a peripheral portion of a predetermined width facing the side wall portion 18 on the lower board 13 side. The surface of the contact portion 12a facing the lower plate 13 side is the contact surface with the O-ring 19. Therefore, when the upper plate 12 and the lower plate 13 are brought into contact with each other, the side wall portion 18 and the contact portion 12a are brought into contact with each other to form the chamber C which can be sealed from the outside air. An elastic plate 20 made of heat resistant rubber such as silicon rubber is also attached to the surface (lower surface) of the heat plate 16 of the upper plate 12. As shown in FIGS. 1 and 2, the groove-shaped portion between the heat plate 16 to which the elastic plate 20 is attached and the contact portion 12a is connected to the vacuum pump 14 for sucking the inside of the chamber C. The suction opening 39 communicates with 24. The suction opening 39 is also formed so as to surround the chamber C. The position where the suction opening is provided may be provided between the elastic film body 15 and the side wall portion 18 on the lower plate 13 side or inside the side wall portion 18. Further, in the present embodiment, only the elastic film body 15 of the lower plate 13 is designed to bulge into the chamber C, but an elastic film body capable of supplying pressurized air to the back surface side of the film body is provided on the upper plate 12. Only the elastic film bodies on the upper plate 12 side may be bulged into the chamber C, or the elastic film bodies provided on the upper plate 12 and the lower plate 13 may be bulged into the chamber C. Good.

Next, a vacuum suction mechanism that vacuum-sucks the inside of the chamber C and a pressure mechanism that operates the elastic film body 15 will be described. The vacuum laminating apparatus 11 is provided with a vacuum pump 14 capable of vacuum suctioning the inside of the chamber C formed between the upper plate 12 and the lower plate 13. In the vacuum pump 14 used in this embodiment, the rotation frequency of the motor 22 is changed and controlled by sending a frequency from the inverter 21 to the motor 22 (three-phase AC induction motor). The motor of the vacuum pump 14 whose rotation speed can be controlled is not limited to the one whose rotation speed is controlled by the inverter 21, and may be, for example, a servo motor whose rotation speed is controlled. Further, in this embodiment, the vacuum pump 14 is a screw type dry pump. However, a roots type dry pump may be used, or another type of vacuum pump may be used. Also, the number of vacuum pumps is not limited.

A pipe line 23 is provided from the vacuum pump 14 toward the chamber C, and the pipe line 23 is connected to the suction opening 39 via the pipe line 24 in the upper plate as described above. A three-way switching valve 25 capable of opening and closing the pipeline 23 is provided in the middle of the pipeline 23. A silencer 26, which is used when vacuum breaking the inside of the chamber C, is attached to the other port (the side that communicates with the atmosphere) of the three-way switching valve 25 that can communicate with the chamber C.

A vacuum sensor 27 for measuring the degree of vacuum in the chamber C is provided in the conduit 23. The vacuum sensor 27 is connected to the control device 37 of the vacuum laminating apparatus 11. Regarding the control device 37 of the present embodiment, in addition to controlling the rotation speed of the vacuum pump 14, each control of the vacuum laminating device 11 is performed. Further, a pipe 28 branches off from the pipe 23 and extends downward of the elastic film body 15 of the lower plate 13. The pipe 28 is provided with a three-way switching valve 29 capable of opening and closing the pipe 28.

The vacuum laminating apparatus 11 is provided with a compressor 30 as a pressurizing mechanism for sending pressurized air below the elastic film body 15 to swell the elastic film body 15 in the chamber C. The conduit 31 connected to the compressor 30 merges with the conduit 28 from the vacuum pump 14 and is connected to the communication hole 38 of the lower plate 13. Further, an opening/closing valve 32 capable of opening/closing the pipeline 31 is provided in the pipeline 31. Further, an air pressure sensor 33 is provided on the pipe line 31 or the pipe line 28 closer to the communication hole 38 than the three-way switching valve 29. Further, a pipeline 34 communicating with the atmosphere from the pipeline 31 is branched, an opening/closing valve 35 for opening and closing the pipeline 34 is provided in the middle of the pipeline 34, and a silencer 36 is attached to an end of the pipeline 34. Has been. Note that the vacuum mechanism or the pressurizing mechanism of the vacuum laminating apparatus 11 is not limited to the above, such as using on-off valves instead of using the three-way switching valves 25 and 29. Further, the position and number of the vacuum sensors may be provided separately in the chamber C and on the elastic film body 15 side, and there is no limitation.

Further, for the present invention, the pressing mechanism for bulging the elastic film body 15 is not limited to the above. It is also possible to swell and pressurize the elastic film body 15 due to a relative pressure difference by sending atmospheric air to the chamber C in a vacuum state below the elastic film body 15. Also, the vacuum laminating apparatus is not limited to the above, and an elastic plate attached to a smooth press plate is projected into the chamber by a hydraulic cylinder, a servomotor, or the like to form a laminated molded product with another elastic plate. It may be pressurized.

Next, the transport mechanism of the vacuum laminating apparatus 11 will be described. In FIG. 1, one side of the vacuum laminating apparatus 11 is an unwinding roll (not shown) of the lower carrier film F, which is a carrier, and an unrolling roll (not shown) of the upper carrier film F, which is a carrier. ) Is provided. These unwinding rolls are equipped with a torque motor or the like so that tension can be applied to the film. Further, on the other side of the vacuum laminating apparatus 11, there are provided a lower roll of the carrier film F (not shown) (not shown) and a higher roll of the carrier film F (not shown). These take-up rolls are equipped with a servo motor or the like so that the film can be fed with high precision. The carrier film may be moved by another moving device. A mounting stage for the laminated molded article M is provided on the lower side carrier film on one side of the vacuum laminating apparatus, and the mounting stage for the laminated molded article M is provided on the lower side carrier film on the other side of the vacuum laminating apparatus. A carry-out stage is provided.

Next, the control method of the vacuum laminating apparatus 11 and the molding failure prevention method will be described with reference to FIGS. 3, 4, and 8. Then, the laminated molding of the laminated molded article M by the vacuum laminating apparatus 11 is performed in a batch system, and the elastic film body 15 is bulged in the chamber C in a vacuum state to laminate the laminated molded article on the carrier film F. Be seen. Usually, the laminated molding is performed in a state where the upper carrier film is overlaid on the laminated molded product M on the lower carrier film, and molten resin or the like of the film of the laminated molded product M is stored in the vacuum laminating apparatus 11. It does not adhere to the elastic plate 20 or the like. However, the upper carrier film F is not essential, and the laminated molded product M and the cover film cut at a constant length may be placed on the lower carrier film F.

The type of the carrier film F is not limited, but the resin material is polyethylene terephthalate or polyester. The carrier film F used in this embodiment is a carrier film PTH25 manufactured by Unitika Ltd., the surface of which is roughened (embossed). A carrier film having a roughened surface has a larger coefficient of friction with the laminated molded product M and is less likely to cause displacement of the laminated molded product M.

The laminated molded product M molded by the vacuum laminating apparatus 11 is a circuit board, a semiconductor wafer, or the like, but is not limited to this, and a laminated molded product M is laminated by stacking unevenly laminated materials and various films. There are many things to do. Generally, the laminated molded product M is directly placed on the carrier film F, but in a build-up substrate or the like, the substrate may be placed via a film to be laminated. Alternatively, the laminated molded product M such as a wafer may be placed on a placing tool such as a wear ring with a bonding tape and placed on the carrier film F or the elastic film body 15. In that case, the one including the mounting tool corresponds to the laminated molded article of the present invention.

Among these laminated molded products M, those having a particularly light weight are likely to cause positional deviation on the carrier film F during molding. Regarding the weight of the laminated molded product M, there is no boundary value that the position shift occurs when the weight is less than or equal to g and the position shift does not occur when the weight is greater than or equal to the weight, but here, the weight of a general 6-inch wafer is 25 g or less. Since there is a high possibility that the object will be displaced, a weight of 25 g or less is defined as lightweight. Further, the shape of the back surface of the laminated molded article M and the coefficient of friction also affect the positional deviation. Further, a plurality of laminated molded products M are stopped and positioned and molded at positions other than the center rather than one laminated molded product M that is stopped and positioned in the center of the chamber C via the carrier film F. Things are more likely to be misaligned. When the laminated molded product M is displaced from the mounting position (molding position) on the carrier film in the chamber C during molding, and in an extreme case, it protrudes laterally from the carrier film F, it is not possible to apply good pressure. As a result, the molding becomes defective.

The main causes of displacement of the laminated molded product M from the mounting position on the carrier film F at the time of molding are (1) displacement when the movement of the carrier film F is stopped, (2) when chamber vacuum suction is started. It is conceivable that there is a positional shift of (3) when the chamber is in a high vacuum (before pressurization), and (4) a positional shift when the elastic film body 15 is bulged. Regarding this point, a method of grasping the cause of the positional deviation will be described with reference to the flowchart of FIG.

First, as shown in FIG. 8 which is a conventional technique, during one molding cycle, the number of revolutions of the vacuum pump 14 is set to the same high rotation region to perform the lamination molding (S1). Then, it is checked a plurality of times whether the misalignment defect is observed in the laminated molded product M taken out from the vacuum laminating apparatus 11 after the molding (S2). If no misregistration is found at this stage (S2=N), it is determined that there is no misalignment and the verification ends. Further, when the positional deviation abnormality is observed (S2=Y), the carrier film F is moved by the manual mode or the like to move the laminated molded product M on the carrier film F to the opened chamber C of the vacuum laminating apparatus 11. The molding is stopped at the stage where it is moved to the inside molding position and stopped (S3). Then, in the stopped state, the upper plate 12 of the vacuum laminating apparatus 11 is opened to the retracted position, and it is checked a plurality of times whether or not the positional displacement of the laminated molded product M has occurred (S4). If there is misalignment at this stage (S4=Y), measures such as reducing the moving speed of the carrier film F (in particular, acceleration at the time of stopping) are taken, and again it is checked whether the misalignment occurs at the time of stopping. Check and eliminate the misalignment at this stage. Since the moving speed of the carrier film F is set to some extent from the beginning, the positional deviation at this stage is not so large.

On the other hand, when there is no displacement of the laminated molded article M when the carrier film F is moved or stopped (including the case where the displacement of the carrier film F is eliminated by the measure to stop the movement of the carrier film) (S4=N), Then, the lower plate 13 is raised to form the chamber C, and as described above, the vacuum suction in the chamber C is started while the vacuum pump 14 is rotated at the high rotation speed. Then, at the time when a predetermined short time elapses or a time until the predetermined intermediate vacuum degree is reached (these are collectively referred to as initial vacuum suction time), the elastic film body 15 does not pressurize, and the chamber slowly moves. The degree of vacuum in C is reduced to normal pressure and the molding is stopped. Then, the upper plate 12 of the vacuum laminating apparatus 11 is opened (S6). Then, whether or not the laminated molded product M on the carrier film after the initial vacuum suction is displaced is checked, if possible, a plurality of times (S7). When the displacement of the laminated molded product M on the carrier film F is confirmed (S7=Y) in the above, the influence of the air flow generated in the chamber C at the time of initial vacuum suction is suspected. The number of rotations of the vacuum pump 14 at the time of vacuum suction is set to a low rotation range (for example, 2000 min-1), and the steps of (S6) and (S7) are performed again. (Alternatively, it is possible to perform molding until the completion of molding to check whether the positional deviation of the laminated molded product M has been resolved, but if there is positional deviation, it is necessary to perform (S6, S7).) If the displacement of the laminated molded article M is eliminated by taking measures to switch the rotation of the vacuum pump 14 from the high rotation area (high rotation speed) to the low rotation area (low rotation speed), the present invention is implemented. Can be confirmed.

When there is no displacement of the laminated molded product M after the initial vacuum suction (including the case where the displacement has disappeared as a result of taking measures to change the rotation speed of the vacuum pump 14 during the initial vacuum suction to a low rotation region) Since (S7=N) is highly likely to cause a positional deviation during pressurization by the elastic film body 15 (especially due to swelling at the start of pressurization), the pressurized air initially sent to the elastic film body 15 is used. The pressure is reduced to make the pressurizing curve looser (S9). Then, continuous molding is performed again to confirm the positional deviation of the laminated molded product M (S2).

It should be noted that there is a possibility that the chamber C in the vacuuming process may be misaligned during high vacuuming (vacuuming that approaches the vacuum level during molding), but the results of verification show that laminated molding during high vacuuming is performed. Since it was not possible to confirm the occurrence of displacement of the product M, it is excluded from the flowchart of FIG. As described above, in the present invention, it is possible to find out the cause of the positional deviation of the laminated molded product at which stage and take a countermeasure.

As a result of the above verification, it has been found that the positional deviation of the laminated molded product at the time of molding is considerably high at the time of initial vacuum suction in the chamber C by the vacuum pump 14. The reason for this is considered to be that an air flow is generated in the chamber C during the initial vacuum suction, and the flapping of the carrier film F accompanying it. In addition, the influence of air flow and flapping of the carrier film F is likely to occur when the weight of the laminated molded product M is light or when it is placed near the suction opening 39 (other than the center).

Next, a control method of the vacuum laminating apparatus 11 which has taken measures against the positional deviation of the above-mentioned laminated molded product M will be described particularly focusing on the operation of the vacuum pump 14 of the vacuum suction mechanism and the vacuuming of the chamber C. As shown in FIG. 4, during continuous molding of the vacuum laminating apparatus 11, the vacuum pump 14 is constantly driven to rotate. This is because if the vacuum pump 14 is repeatedly operated and stopped, it may cause a failure due to backflow of lubricating oil or the like. The lower platen 13 of the vacuum laminating apparatus 11 is opened downwardly and the chamber C is opened, and the carrier film F placed between the take-up roll and the take-up roll has not been placed on the stage. The molded laminated molded product M is carried into the vacuum laminating apparatus 11 and placed via the carrier film F. At the same time, the laminated molded product M, which has been molded by the vacuum laminating apparatus 11, is moved from the vacuum laminating apparatus 11 to an external carry-out stage.

At this time, the vacuum suction mechanism of the vacuum laminating apparatus 11 opens the three-way switching valve 29 and closes the vacuum pump 14 and the chamber C by closing the three-way switching valve 25 to close the vacuum pump 14 and the elastic film body 15. Make communication between the lower parts. Then, the portion between the elastic film body 15 and the lower heating plate 17 is vacuumed. In order to bring the heat plate 17 and the elastic film body 15 into close contact with each other to transfer heat to the elastic film body 15, the rotation speed of the vacuum pump 14 is in a high rotation range (the rotation speed is different depending on the vacuum pump, but is not limited to this). In the present embodiment, it is desirable that the maximum rotation speed be 6,000 mim-1).

Next, after the loading of the laminated molded product M into the vacuum laminating apparatus 11 is completed, the lower platen 13 is raised to form a chamber C between the upper platen 12 and the lower platen 13 the outer periphery of which is sealed by an O-ring 19. (Until this time, the pressure in the chamber C is, of course, atmospheric pressure), and then the vacuuming process in the chamber C is started. Regarding the vacuum suction in the chamber C, the three-way switching valve 29 is closed to close the conduit 28 between the vacuum pump 14 and the lower part of the elastic film body 15, and then the three-way switching valve 25 is opened to open the vacuum pump 14 and the chamber C. The conduits 23 and 24 between the two are connected. A predetermined time from the start of vacuum suction after the chamber is closed is referred to as initial vacuum suction in the present application. Since the chamber C, which has just closed the chamber, is still at normal pressure, the atmosphere in the chamber C flows into the pipelines 23 and 24, and the detected value of the vacuum sensor 27 provided on the vacuum pump 14 side is once. Rise. At that time, an air flow is generated in the chamber C as the air moves.

The rotation speed of the vacuum pump 14 at the time of this initial vacuum suction is reduced to a low rotation region (though not limited to this, 2,000 mim-1 in this embodiment). The timing of lowering may be the same as the start of vacuum suction when the communication between the vacuum pump 14 and the chamber C (three-way switching valve 25 is opened) is started, or may be slightly before (for example, within a few seconds). Immediately after the communication of the chamber C (for example, after 0.03 seconds), the number of rotations of the vacuum pump 14 may be reduced to a low rotation region as long as a rapid air flow is not generated in the chamber C, but they also start vacuum suction. ) At the same time (approximately at the same time), the rotation of the vacuum pump 14 is included in the range of low rotation. The rotation speed when operating the vacuum pump 14 in the low rotation region is, for example, 10% to 50% with respect to the rotation speed when operating the vacuum pump 14 in the high rotation region in the pressurizing step or the like. Preferably. Further, in the case of controlling the number of rotations of the vacuum pump 14 regardless of the degree of vacuum of the chamber C at the time of initial vacuum suction, there are many cases where slope control is performed so that the number of rotations of the vacuum pump 14 gradually becomes high and the number of rotations is large. Multi-stage control may be performed so that the rotation speed is high at each stage.

Then, the vacuum pump 14 is rotated in the low rotation region for a predetermined time to perform the initial vacuum suction in the chamber C. As a result, the vacuum pump 14 is always rotated in a high rotation saving area, or even if the vacuum degree is controlled in two stages as in Patent Document 1, the vacuum pump 14 is operated aiming at the first degree of vacuum. In comparison, the airflow toward the suction opening 39 in the chamber C is relatively weak. As a result, flapping of the carrier film F due to the air flow is suppressed. Alternatively, suction of the laminated molded article M is suppressed from between the lower carrier film F and the upper carrier film F. The predetermined time after closing the chamber for rotating the vacuum pump 14 in the low rotation region is not limited to this, but is preferably 0.3 to 5.0 seconds. Even if the time for rotating the vacuum pump 14 in the low rotation region is lengthened to some extent in the vacuuming process and the time required to reach a vacuum degree at which molding is possible becomes slightly longer, the laminated molded product M in the chamber C is concurrently processed. In most cases, the total molding time does not become so long because it requires heating time by radiant heat or the like. However, if the initial vacuum suction time in the low rotation region is too long, the vacuum level at which molding can be performed is delayed and the molding cycle becomes long.

Then, in the vacuuming process, after a lapse of a predetermined time after the chamber is closed, the rotation speed of the vacuum pump 14 is set to the same high rotation region as before (6,000 min-1 as an example), and the vacuum suction in the chamber C is continued to be accelerated. After the elapse of a predetermined time after the chamber is closed, the chamber C is depressurized to some extent (depressurized to a medium vacuum degree). Therefore, even if the number of revolutions of the vacuum pump 14 is changed to a high revolution region, a strong air flow in the chamber C occurs. Does not occur. As a result, the displacement of the laminated molded product M due to the flapping of the carrier film F or the like hardly occurs.

In the present embodiment, the rotation speed of the vacuum pump 14 is switched after a predetermined time has passed. However, the rotation speed of the vacuum pump 14 is switched by measuring the degree of vacuum in the chamber C or the pipelines 23, 24, 28. May be. At this time, the control of the motor of the vacuum pump 14 in the low rotation region is not particularly limited, but when the motor of the vacuum pump 14 is an inverter-controlled motor or the like, the rotation speed may be controlled by open loop control, such as a servo motor. In this case, the rotation speed may be controlled by closed loop control. Further, in the embodiment of FIG. 4, the vacuum degree is controlled to increase in a slope shape by the open loop control or the closed loop control at the time of initial vacuum suction, but the vacuum degree may be increased stepwise by the closed loop control. Good.

Specifically, the control of the degree of vacuum at the time of initial vacuum suction from the start of the vacuum suction in the chamber C to the different target degree of vacuum with the passage of time is performed by providing different target degree of vacuum at a plurality of stages. Closed loop control. FIG. 7 is an enlarged view of control at the time of initial suction of the vacuum chamber C, which is a characteristic part of the control method of the vacuum stacking apparatus according to still another embodiment.

During the initial period A during the initial vacuum suction performed by switching the three-way switching valve 25 and connecting the vacuum pump 14 and the inside of the chamber C, the atmosphere in the vacuum chamber C flows into the pipe line 23, so that the vacuum sensor 26 is used. The detected vacuum degree V1 once rises. In the present embodiment, during the start period A, the vacuum pump 14 is rotationally driven by a preset fixed rotation speed R until the vacuum degree V2 reaches a predetermined vacuum degree V2. At this time, the rotation speed R1 of the vacuum pump 14 is set to a rotation speed R1 at which air is not generated in the chamber C by vacuum suction. Next, when the value of the vacuum sensor 26 reaches the predetermined vacuum degree V2, the slope control is performed only for the slope time S preset so that the inside of the chamber C reaches the target vacuum degree.

In the slope control, a plurality of control stages T are set corresponding to the time axis of the slope time S. The control stage T is provided so as to move to the next stage in a time of, for example, 0.01 second to 1 second, preferably 0.1 second to 0.5 second. Then, for each control stage T, a target vacuum degree is set in which the vacuum degree is gradually increased toward the subsequent control stage T. When the actual slope control is started, the closed loop control is performed so that the vacuum degree V in the chamber C becomes the target vacuum degree of the next control stage T. More specifically, the degree of vacuum in the vacuum chamber C is detected by the vacuum sensor 27 and sent to the control device 37. Then, a command value for the next rotation speed of the vacuum pump 14 is generated from the difference between the actually measured vacuum degree and the target vacuum degree in the controller 37, and the closed loop control of the rotation speed R2 of the vacuum pump 14 is performed.

Therefore, as shown by the rotation speed R2 at the time of slope control in FIG. 7, the rotation speed does not rise sharply, which causes a sudden change in the vacuum degree in the chamber C at the time of initial vacuum suction and the accompanying generation of wind. Avoided. When the target vacuum degree V4 is reached at the end of the slope time S, the slope control ends. It should be noted that the control for providing closed loop control toward the different target vacuum degree over time by providing different target vacuum degrees in a plurality of stages is at least a part of the first half of the control of the vacuum degree during the initial vacuum suction as described above. Anything can be done. Further, the degree of vacuum V may be controlled to be increased in multiple stages other than that which is smoothly controlled to be increased.

In the embodiment of FIG. 7, the control gain used for closed-loop control of the vacuum degree at the time of initial vacuum suction and the control gain of the vacuum degree used for closed-loop control at the vacuuming step or the pressurizing step other than the initial vacuum suction. Is characterized by different values. More specifically, the ratio of the proportional gain to the integral gain at the time of initial vacuum suction is set to be higher than the ratio of the proportional gain to the integral gain at the time of initial vacuum suction in a vacuuming process or a pressurization process other than during initial vacuum suction. ing. This can be expected to improve the responsiveness of the vacuum pump within the range in which the degree of vacuum does not rise sharply during the initial vacuum suction. Further, the ratio of the integral gain to the proportional gain in the vacuuming process or the pressurizing process other than the initial vacuum suction is set higher than the ratio of the integral gain to the proportional gain in the initial vacuum suction. Therefore, it can be expected that the vacuum pump can be stably rotated in the vacuuming process or the pressurizing process other than the initial vacuum suction.

In both the embodiment shown in FIG. 4 and the embodiment shown in FIG. 7, when the vacuum pump 14 is rotated in the high rotation region in the latter half of the vacuuming process and the inside of the chamber C reaches a predetermined vacuum degree, the vacuuming process is changed to the pressurizing process. After the transition, the on-off valve 32 is opened and the compressor 30 and the lower part of the elastic film body 15 are communicated with each other. As a result, pressurized air is supplied below the elastic film body 15, the elastic film body 15 is bulged into the chamber C, and the laminated molded product M on the carrier film F is separated from the elastic film body 15 and the upper plate 12. The elastic plate 20 and the elastic plate 20 are pressed for a predetermined period of time to perform laminated molding. The vacuum pump 14 is rotated in the high rotation region also during the lamination molding.

Then, after a predetermined lamination molding time has elapsed in the pressurizing step, the on-off valve 32 is closed and the supply of the pressurized air below the elastic film body 15 is cut off. Then, the opening/closing valve 35 is opened, and the pressurized air below the elastic film body 15 is released to the atmosphere. At the same time, the three-way switching valve 25 is switched so that the inside of the chamber C is connected to the atmosphere and the chamber C is broken. When the inside of the chamber C becomes atmospheric pressure, the lower platen 13 is lowered and the chamber C is opened. Then, the carrier film F is moved as described above, and the laminated molded article M formed by lamination is taken out from the vacuum laminating apparatus 11. When the chamber C is opened, the on-off valve 35 is closed, the three-way switching valve 25 is closed, the three-way switching valve 29 is opened, and the vacuum pump 14 again performs vacuum suction below the elastic film body 15. At this time, the rotation speed of the vacuum pump 14 is also rotated at the same rotation speed in the high rotation region.

Next, the vacuum laminating apparatus 41 of another embodiment shown in FIG. 5 will be described focusing on the differences by using the same numbers for the same portions as the embodiment of FIG. The pipelines 23 and 24 for performing vacuum suction of the vacuum laminating apparatus 41 of FIG. 5 are operated by the vacuum pump 14 at the same rotation speed in a high rotation region, and even if the vacuum pump 14 is communicated with the chamber C, the vacuum suction is not performed rapidly. It is a pipeline. More specifically, a part of the gentle vacuum suction pipe line is a porous body 42 such as a porous metal, a porous ceramic, a heat-resistant porous resin, or a porous elastomer. The porous body 42 preferably has many continuous pores and a high porosity. Even if the porosity is high (for example, 60% or more), it is possible to prevent a rapid airflow from being generated in the chamber C during the initial vacuum suction after the formation of the chamber C. Rather, if the porosity is low (20% or less as an example), there is a fear that the time for evacuating the chamber C to a desired degree of vacuum will be long.

The portion of the conduits 23, 24 where the porous body 42 is provided may be the portion of the suction opening 39 of the conduit 24 or a part of the conduit 23 inside or outside the board surface. By providing the porous body 42 at the portion of the suction opening 39 or in the vicinity thereof, it is possible to subdivide the airflow when sucked and prevent a sudden airflow from being generated. As a result, it is possible to eliminate the main cause of positional deviation of the laminated molded product M on the carrier film F during molding. Alternatively, the porous body 42 provided inside the conduit 23 can be attached and detached, and the porous body 42 is attached only when the laminated molded product M is a lightweight product (for example, 25 grams or less) and a displacement occurs during molding. You may do it.

Further, the gentle vacuum suction pipe line may have a filter made of non-woven fabric or the like attached thereto. Further, a device such as a vacuum regulator may be attached to the gentle vacuum suction pipe line to reduce the degree of vacuum suction during the initial vacuum suction. Further, the pipe line 23 may be such that a mild vacuum suction passage and a vacuum suction pipe passage having a conventional general cross-sectional area are switched by a switching valve. In that case, at the time of initial vacuum suction in the chamber C, suction is performed through a gentle vacuum suction pipe line provided with the porous body 42, a filter and the like, and the switching valve is switched when a predetermined vacuum degree is reached or a predetermined time has elapsed. The suction may be performed from a suction passage having a secured cross-sectional area. It should be noted that in the embodiment of FIG. 5 and its application, control for decreasing the rotation speed of the vacuum pump 14 at the time of initial vacuum suction may be combined.

Next, a vacuum laminating apparatus 51 of still another embodiment shown in FIG. 6 will be described focusing on different points by using the same numbers for the same parts as those of the embodiment of FIG. In the vacuum laminating apparatus 51 of FIG. 6, the laminated molded article M and the lower carrier film F or the upper carrier film F, which is a conveying material, are electrostatically charged to the mounting position 52 which is a pre-process for conveying the laminated molded article M to the vacuum laminating apparatus 51. Is provided with a static electricity applying device 53 (electrostatic chuck) for adsorbing. Here, for example, by applying a voltage to the static electricity imparting device 53 from below the lower carrier film, a reverse voltage is generated in the lower carrier film F. As a result, the laminated molded product M is attached to the lower carrier film F by electrostatic force. Further, a state close to a vacuum state occurs between the laminated molded article M and the lower carrier film F.

Next, even if the laminated molded article M is moved from the part of the previous step in which the static electricity imparting device 53 is present to the vacuum laminating apparatus 51, the electrostatic force between the laminated molded articles M with respect to the lower carrier film F or a state close to a vacuum state. Is not resolved immediately. Therefore, the adsorption state of the laminated molded product M to the lower carrier film F is maintained until the laminated molded product M is transported inside the vacuum laminating apparatus 51 along with the movement of the lower carrier film F, the chamber C is formed, and the vacuum suction is started. Be sustained. Therefore, the vacuum pump 14 and the chamber C can be communicated with each other to prevent the displacement of the laminated molded product M at the start of vacuum suction. In the present embodiment, if the rotation speed of the vacuum pump 14 at the start of vacuum suction is reduced, the positional deviation can be prevented more reliably. However, depending on the type of the laminated molded article M, the rotation speed of the vacuum pump 14 is the same as that of the conventional one. Positional deviation can be prevented even in the street.

When it is difficult to separate the laminated molded product M from the carrier film F in the post-process after the lamination molding in the vacuum laminating apparatus 51, a static eliminator may be provided in the post-process. In some cases, the static electricity imparting device 53 (electrostatic chuck) may be provided, for example, on the lower plate 13 of the vacuum laminating device 51 itself. In each example, the static electricity imparting device 53 (electrostatic chuck) can be used for most laminated molded articles M such as substrates and semiconductors by devising a method of generating static electricity. However, when static electricity affects the laminated molded product M, it is desirable to prevent the positional displacement of the laminated molded product M by a method other than this method.

The present invention is not listed one by one, but is not limited to the above-described embodiments, and those obtained by multiplying the above-described embodiments and those modified by those skilled in the art in view of the spirit of the present invention, It goes without saying that it applies. In the present embodiment, the prevention of the positional deviation of the laminated molded article M on the carrier film has been described, but the present invention is also applied to the case where the laminated molded article M is placed in the chamber C without the carrier film. In that case, fluttering of the carrier film does not occur at the time of initial vacuum suction, but if the laminated molded product M is extremely lightweight, there is a possibility that displacement will occur due to the air flow in the laminated molded product M at the mounting position other than the center. There is.

11, 41, 51 Vacuum stacking device 12 Upper plate 13 Lower plate 14 Vacuum pump 15 Elastic film body 22 Motor 23, 24 Pipe line 27 Vacuum sensor 37 Control device 39 Suction opening 42 Porous body 53 Static electricity imparting device C Chamber F upper Carrier film, lower carrier film (transport material)
M laminated molding

Claims (7)

A chamber capable of vacuum suction by a vacuum pump is formed by closing an upper plate and a lower plate, and an elastic film body or an elastic plate provided on at least one of the plates is bulged or projected into the chamber to be laminated. In the control method of the vacuum laminating apparatus for pressurizing the molded product,
In order to prevent displacement of the laminated molded product in the chamber,
A method for controlling a vacuum laminating apparatus, characterized in that the rotation speed of the vacuum pump at the start of vacuum suction in the chamber is set lower than the rotation speed of the vacuum pump after a predetermined time has elapsed after closing the chamber or in the pressurizing step. .. The vacuum pump according to claim 1, wherein the vacuum pump is constantly driven during continuous molding, and the rotation speed of the vacuum pump is set to a low rotation speed only during initial vacuum suction including the start of vacuum suction after the chamber is closed. Laminating apparatus control method. A chamber capable of vacuum suction by a vacuum pump is formed by closing an upper plate and a lower plate, and an elastic film body or an elastic plate provided on at least one of the plates is bulged or projected into the chamber to be laminated. In a method for preventing defective molding of a vacuum laminating apparatus that pressurizes molded products,
In order to prevent displacement of the laminated molded product in the chamber,
A vacuum laminating apparatus characterized in that at least a part of the vacuum degree during initial vacuum suction in the chamber is controlled by closed loop control toward different target vacuum degrees with the lapse of time by providing a plurality of different target vacuum degrees. Control method. The control gain used for closed loop control of at least a part of the vacuum degree at the time of the initial vacuum suction and the control gain of the vacuum degree used for closed loop control at the vacuuming step or the pressurization step other than the initial vacuum suction are different values. The method for controlling a vacuum laminating apparatus according to claim 3, wherein: A chamber capable of vacuum suction by a vacuum pump is formed by closing an upper plate and a lower plate, and an elastic film body or an elastic plate provided on at least one of the plates is bulged or projected into the chamber to be laminated. In a vacuum laminating device that pressurizes molded products,
In order to prevent displacement of the laminated molded product in the chamber,
Provide a gentle vacuum suction passage in the passage that communicates from the vacuum pump to the chamber,
A vacuum stacking apparatus, wherein vacuum suction is performed in the chamber via the gentle vacuum suction passage at least when vacuum suction is started after the chamber is closed. A chamber capable of vacuum suction by a vacuum pump is formed by closing an upper plate and a lower plate, and an elastic film body or an elastic plate provided on at least one of the plates is bulged or projected into the chamber to be laminated. In a vacuum laminating device that pressurizes molded products,
In order to prevent displacement of the laminated molded product in the chamber,
A vacuum laminating apparatus characterized in that at least a part of a passage communicating with a chamber from a vacuum pump is made of a porous body. A chamber capable of vacuum suction by a vacuum pump is formed by closing an upper plate and a lower plate, and an elastic film body or an elastic plate provided on at least one of the plates is bulged or projected into the chamber to be laminated. In a vacuum laminating device that pressurizes molded products,
In order to prevent displacement of the laminated molded product in the chamber,
A vacuum laminating apparatus characterized in that a laminated molded product and a carrier material are attracted by electrostatic force in the preceding step of the vacuum laminating apparatus.

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