JP2014018984A - Vacuum lamination device, and method for controlling vacuum lamination device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a vacuum lamination device and a control method thereof capable of controlling the degree of vacuum most suitably in response to various requirements in a molding process, concerning the vacuum lamination device and the control method thereof.SOLUTION: In a vacuum lamination device 11 in which a vacuum chamber C capable of sucking in vacuum by a vacuum pump 14 is formed by closing an upper board 12 and a lower board 13, and an elastic film body 15 or an elastic plate provided on at least either one board 12, 13 is swelled or projected to pressurize a laminate molded article M, the degree of vacuum in the vacuum chamber C in one molding is changed in multiple stages by controlling the vacuum pump 14.

Description

In the present invention, a vacuum chamber is formed in which an upper plate and a lower plate are closed and vacuum suction can be performed by a vacuum pump, and an elastic film body or an elastic plate provided on at least one of the plates protrudes into the vacuum chamber. The present invention also relates to a vacuum laminating apparatus that bulges and pressurizes a laminated molded product, and a control method for the vacuum laminating apparatus.

Conventionally, an upper board and a lower board are closed, and a vacuum chamber that can be vacuumed by a vacuum pump is formed, and an elastic film body provided on at least one of the boards is swelled into the vacuum chamber to perform lamination molding. As a vacuum laminating apparatus for pressurizing a product, one described in Patent Document 1 is known. In Patent Document 1, when the inside of the pressurized film is switched from vacuum to pressurized air, a step of once communicating the inside of the pressurized film with the atmosphere is provided, and the air pressure is changed stepwise to prevent local jumping of the pressurized film. It is described to do. However, Patent Document 1 only describes that the degree of vacuum in the chamber emits an electrical signal when a predetermined degree of vacuum is reached. That is, in the conventional vacuum laminating apparatus, a vacuum pump capable of setting the required degree of vacuum in the chamber is selected, and the actual condition is that the vacuum pump is continuously operated without any control. Patent Document 1 also describes that when the predetermined value set by the vacuum sensor is reached, the vacuum suction into the pressurized film is stopped. However, in this case as well, the vacuum pump is not controlled at all, and the vacuum suction is merely stopped by opening and closing the valve.

Patent Document 2 does not relate to a vacuum laminating apparatus that pressurizes a laminated molded product by expanding an elastic film body into a vacuum chamber, but relates to a vacuum hot press, but describes control of a vacuum pump. . In Patent Document 2, a vacuum pump connected to a vacuum chamber is started and stopped based on a hysteresis having a predetermined width set in advance.

JP 2002-225061 A (0008, 0009, FIG. 1) JP 2009-298007 A (Claim 1, FIG. 2)

However, in Patent Document 2, the vacuum pump is started and stopped to control the degree of vacuum to a predetermined value, and the degree of vacuum cannot be changed and controlled in multiple stages. And about patent document 2, since the load of a pump is large when starting and a stop of a vacuum pump are repeated, the failure of a pump may be caused or the lifetime of a pump may be shortened. In addition, when the vacuum pump is repeatedly started and stopped in a short time, the power consumption at the time of starting is large, and there is a case where it does not lead to energy saving as aimed. Furthermore, with respect to Patent Document 2, an optimum degree of vacuum cannot be selected according to various requests in the molding process.

Accordingly, the present invention provides a vacuum chamber in which the upper plate and the lower plate are closed and vacuum suction can be performed by a vacuum pump, and an elastic film body or elastic plate provided on at least one of the plates is placed in the vacuum chamber. Provided are a vacuum laminating apparatus for controlling the degree of vacuum according to various demands in a molding process, and a control method therefor, in a vacuum laminating apparatus and a vacuum laminating apparatus control method that pressurizes or bulges a laminated molded product The purpose is to do. Another object of the present invention is to provide a vacuum laminating apparatus capable of realizing energy saving without applying an excessive load to the vacuum pump and a control method therefor for controlling the number of rotations of the vacuum pump.

The vacuum laminating apparatus according to claim 1 of the present invention is such that an upper film and a lower panel are closed, a vacuum chamber capable of being vacuumed by a vacuum pump is formed, and an elastic film body provided on at least one of the panels Alternatively, in a vacuum laminating apparatus that pressurizes a laminated molded product by causing an elastic plate to bulge or protrude into the vacuum chamber, the degree of vacuum in the vacuum chamber during one molding can be changed in multiple stages. And

The vacuum laminating apparatus according to claim 2 of the present invention is characterized in that, in claim 1, the vacuum pump is controlled in speed by a motor or servo motor that can be controlled by an inverter capable of controlling the speed.

According to a third aspect of the present invention, there is provided a method for controlling a vacuum laminating apparatus, wherein the upper board and the lower board are closed and a vacuum chamber capable of vacuum suction is formed by a vacuum pump, and the vacuum chamber is provided on at least one of the boards. In a control method of a vacuum laminating apparatus in which an elastic film body or an elastic plate is expanded or protruded into the vacuum chamber to pressurize a laminated molded product, the degree of vacuum in the vacuum chamber during one molding is changed in multiple stages. It is characterized by that.

The method for controlling a vacuum laminating apparatus according to claim 4 of the present invention is characterized in that, in claim 3, the number of rotations of the vacuum pump during one molding is controlled by both open control and closed control. To do.

In the vacuum laminating apparatus of the present invention, the upper board and the lower board are closed to form a vacuum chamber that can be vacuum-sucked by a vacuum pump, and the elastic film body or elastic plate provided on at least one of the boards is evacuated. In a vacuum laminating apparatus that protrudes into the chamber and pressurizes the laminated molded product, the degree of vacuum in the vacuum chamber during one molding can be changed in multiple stages, so that various requests in the molding process can be met. The degree of vacuum can be controlled. Moreover, in what controls the rotation speed of a vacuum pump, energy saving is realizable, without applying an excessive load to a vacuum pump.

It is a schematic explanatory drawing of the vacuum lamination apparatus of this embodiment. It is a general view regarding the control method of the vacuum lamination apparatus of this embodiment. It is a fragmentary figure regarding the control method of the vacuum lamination apparatus of this embodiment. It is a figure regarding the operation amount at the time of the open loop control of the vacuum lamination apparatus of this embodiment. It is a block diagram regarding the control method of the vacuum lamination apparatus of this embodiment.

The vacuum lamination apparatus 11 of this embodiment is demonstrated with reference to FIG. The vacuum laminating apparatus 11 of the present embodiment carries a laminated material and a laminated material constituting the laminated molded product M together with a carrier film F from one side of the vacuum laminating apparatus 11 and pressurizes and laminates them in the vacuum laminating apparatus 11. It shape | molds, it carries out from the other side of the said vacuum lamination apparatus 11, and is transferred to a post process. The vacuum laminating apparatus 11 has a vacuum chamber C in which an upper panel 12 and a lower panel 13 are closed and vacuum suction can be performed by a vacuum pump 14, and an elastic film body 15 provided on at least one of the panels 12 and 13 is provided. The laminated molded product is pressurized by expanding into the vacuum chamber C.

More specifically, the lower board 13 is provided opposite to the upper board 12, and the lower board 13 can be moved close to and away from the upper board 12 by a hydraulic cylinder (not shown). And when the lower board 13 is raised by the said hydraulic cylinder and the upper board 12 and the lower board 13 are closed, the vacuum chamber C of the predetermined volume connected to the vacuum pump 14 is formed. The operation of the upper board 12 and the lower board 13 for forming the vacuum chamber C may be another method. A heatable plate 16 and a heatable plate 17 are respectively attached to the center of the lower surface of the upper plate 12 and the upper surface of the lower plate 13. An elastic film body 15 (diaphragm made of heat-resistant rubber such as silicon rubber) is attached so as to cover a portion of the upper surface of the lower board 13 where the heat plate 17 is not provided and a top surface of the heat plate 17. Yes. A frame-like side wall portion 18 is fixed on the portion of the elastic film body 15 that contacts the lower board 13, and the elastic film body 15 is sandwiched and fixed between the side wall section 18 and the lower board 13. Yes. Further, an O-ring insertion groove is formed on the surface of the side wall portion 18 facing the upper plate 12 on the upper surface, and an O-ring 19 as a seal member is inserted. The O-ring 19 is provided so as to surround the vacuum chamber C when viewed in plan.

As for the upper board 12, a side wall part 12 a that is higher (projected toward the lower board 13) is provided in a peripheral part of a predetermined width that faces the side wall part 18 on the lower board 13 side. A surface of the side wall portion 12 a that faces the lower plate 13 side is a contact surface with the O-ring 19. Therefore, when the upper board 12 and the lower board 13 are brought into contact with each other, the height of the vacuum chamber C is formed by the height including the side wall part 18 and the side wall part 12a. However, the hot plates 16, 17 and the like are provided inside the vacuum chamber C. Further, an elastic plate 20 made of heat-resistant rubber such as silicon rubber is adhered and fixed to the surface (lower surface) of the hot plate 16 of the upper board 12. In the present embodiment, only the elastic film body 15 of the lower board 13 is swelled in the vacuum chamber C, but an elastic film body capable of supplying pressurized air to the back surface side of the film body is provided on the upper board 12. And only the elastic film body on the upper panel 12 side may be swelled in the vacuum chamber C, or the elastic film bodies respectively provided on the upper panel 12 and the lower panel 13 may be expanded in the vacuum chamber C. It may be.

Next, a mechanism for vacuuming the inside of the vacuum chamber C and a mechanism for operating the elastic film body 15 will be described. The vacuum laminating apparatus 11 is provided with a vacuum pump 14 capable of vacuum suction in the vacuum chamber C formed between the upper board 12 and the lower board 13. In the pump used in the present embodiment, the frequency of the motor 22 is changed and controlled by the frequency sent from the inverter 21 to the motor 22 (three-phase AC induction motor). The motor of the vacuum pump 14 capable of controlling the rotation speed is not limited to the motor whose rotation speed is controlled by the inverter 21, and may be a motor whose rotation speed is controlled by a servo motor. In the present embodiment, a screw type dry pump is used as the vacuum pump 14. However, it may be one using a roots type dry pump, or another type of vacuum pump. Also, the number of vacuum pumps is not limited. For example, a roughing vacuum pump and a vacuum pump used in a working vacuum region may be used in combination.

A pipe line 23 is provided from the vacuum pump 14 toward the vacuum chamber C. The pipe line 23 may be provided so as to be connected to at least one of the upper board 12 and the lower board 13, but in this embodiment, the pipe line 23 is connected to the communication hole 24 of the upper board 12 to which the elastic film body 15 is not attached. Has been. Further, the number of communication holes 24 is not limited. A three-way switching valve 25 that can open and close the pipe 23 is provided in the middle of the pipe 23. A silencer 26 that is used when the inside of the vacuum chamber C is broken by vacuum is attached to the other port (the side that communicates with the atmosphere) of the three-way switching valve 25 that can communicate with the vacuum chamber C.

Further, the pipe line 23 is provided with a vacuum sensor 27 for measuring the degree of vacuum. The vacuum sensor 27 is connected to the control device 37 of the vacuum laminating apparatus 11. About the control apparatus 37 of this embodiment, in addition to control of the rotation speed of the vacuum pump 14, each control of the vacuum laminating apparatus 11 is performed. Further, the pipe 28 branches off from the pipe 23 and extends downward from the elastic film body 15 of the lower board 13. The pipe 28 is provided with a three-way switching valve 29 that can open and close the pipe 28.

The vacuum laminating apparatus 11 is provided with a pressurized gas supply device 30 for sending pressurized air below the elastic film body 15 in order to bulge the elastic film body 15 in the vacuum chamber C. In this embodiment, the pressurized gas supply device 30 is provided with a general compressor that pressurizes and sends the atmosphere. However, a device that uses a special gas or the like, or a device that can control the pressure in a closed loop may be used. The pipe 31 from the pressurized gas supply device 30 joins the pipe 28 from the vacuum pump 14 and is connected to the communication hole 38 of the lower board 13. The pipe 31 is provided with an on-off valve 32 that can open and close the pipe 31. Further, an air pressure sensor 33 is provided in the pipe line 28 on the communication hole 38 side of the pipe line 31 or the three-way switching valve 29. Further, a pipeline 34 communicating with the atmosphere from the pipeline 31 is branched, and an opening / closing valve 35 for opening and closing the pipeline 34 is provided in the middle of the pipeline 34, and a silencer 36 is attached to an end of the pipeline 34. ing. In some cases, a regulator for controlling the air pressure may be attached to the pipe line 31. The vacuum circuit or pressurization circuit of the vacuum laminating apparatus 11 is not limited to the above, such as using an on-off valve instead of using the three-way switching valve 29. Further, the location of the vacuum sensor may be separately provided on the vacuum chamber C side and the elastic film body 15 side, and is not limited. Further, a vacuum regulator may be provided.

The heat plate 17 below the elastic film body 15 has a cross-shaped groove formed on the surface in a cross shape, and the communication hole 38 is connected to some of the grooves near the center. ing. Accordingly, the suction or pressurization on the back surface of the elastic film body 15 is almost simultaneously applied to the entire elastic film body 15. The shape of the hot plate 17 to which the conduit 28 is connected and the number of communication holes 38 are not limited to the above.

Further, the means for expanding the elastic film body 15 is not limited to the above for the present invention. The medium for applying pressure by the elastic film body 15 may be another gas, or a liquid such as water or oil, in addition to the pressurized air. Furthermore, it is possible to pressurize the elastic film body by expanding the elastic film body by a relative pressure difference by sending atmospheric pressure to the vacuum chamber below the elastic film body. Further, the vacuum laminating apparatus is not limited to the above, and an elastic plate adhered to a smooth press plate is projected into the vacuum chamber by a hydraulic cylinder, a servo motor or the like, and is laminated with another elastic plate. May be used.

Next, the control method of the vacuum laminating apparatus 11 will be described with reference to FIGS. In the present invention, the lamination molding of the laminated molded product M by the vacuum laminating apparatus 11 is performed in a batch manner, and the vacuum chamber C is formed and opened every molding cycle. The initial state of the vacuum laminating apparatus 11 is a state where the lower board 13 is moved downward with respect to the upper board 12 and the vacuum chamber C is opened. In this state, the unmolded laminated molded product M is carried into the vacuum laminating apparatus 11 by the carrier film F, and at the same time, the laminated molded product M whose molding has been completed is carried out from the vacuum laminating apparatus 11 to the outside.

In parallel with this, the elastic film body vacuum suction step t1 is performed. In the elastic film body vacuum suction step t1, the three-way switching valve 25 allows the vacuum pump 14 and the elastic film body 15 to communicate with each other while the three-way switching valve 25 is closed between the vacuum pump 14 and the vacuum chamber C. The portion between the elastic film body 15 and the heat plate 17 below is vacuumed. In this embodiment, the set value in this vacuum suction is 50 hPa as an example. At this time, the vacuum pump 14 is initially controlled by open control as shown in FIG. In the open control of the present embodiment, as shown in FIG. 4, an operation amount (voltage command value sent from the control device 37 to the inverter 21) corresponding to the detected value detected by the vacuum sensor 14 is determined in advance. The inverter 21 sends a frequency to the motor 22 of the vacuum pump 14 based on the manipulated variable, and rotates the vacuum pump 14 at a predetermined rotational speed. That is, when the value detected by the vacuum sensor 27 is in a low vacuum state, the operation amount (number of rotations) of the motor 22 is also relatively low, and the operation amount (number of rotations) of the motor 22 is relatively high as the vacuum is increased. Thus, the control curve is determined in advance.

Then, as shown in FIG. 3, the degree of vacuum below the elastic film body 15 (the detection value of the vacuum sensor 27) approaches a preset degree of vacuum, and the switching pressure p1 at which the vacuum sensor 27 expects a predetermined hysteresis is set. When detected, the control of the vacuum pump 14 is changed from the open loop control to the closed loop control as shown in the block diagram of FIG. With respect to the closed loop control of the present embodiment, the vacuum pump 14 is not stopped, and therefore, a constant operation amount with respect to the operation amount (rotational speed of feedback control) corresponding to the degree of vacuum detected by the vacuum sensor 27. (Feed forward control rotational speed) is added to generate a control signal for the rotational speed of the motor 22 of the vacuum pump 14 and send it to the inverter 21. The inverter 21 sends a frequency for directly controlling the rotational speed of the motor 22 to the motor 22 based on the control signal.

Feedback control in this closed loop control is performed by PID control, and a PID gain, a disturbance removal filter value, and the like are set. Since these control values differ depending on the degree of vacuum detected by the vacuum sensor 27 as in the open-loop control, different PID gains such as TABLE1, TABLE2, and TABLE3 are set according to the degree of vacuum. ing.

For the closed loop control section, a threshold having a predetermined vacuum monitoring width is provided for the set value. If the vacuum sensor 27 exceeds the threshold value for some reason, an error is displayed and molding is temporarily terminated. When the upper limit threshold is exceeded, the vacuum pump 14 may be stopped, or when the lower limit threshold is exceeded, the vacuum pump 14 may be rotated at the upper limit of the rotation speed until entering the monitoring range.

Then, after the layered molded product M has been carried into the vacuum laminating apparatus 11, the lower board 13 is raised to form a vacuum chamber C whose periphery is sealed between the upper board 12 and the lower board 13 by an O-ring 19. If this is done (until this time, the inside of the vacuum chamber C is of course atmospheric pressure), the vacuum chamber vacuum process t2 is started. First, the three-way switching valve 29 is actuated to close the conduit 28 between the vacuum pump 14 and the elastic film body 15, and then the three-way switching valve 25 is actuated to connect the tube between the vacuum pump 14 and the vacuum chamber C. The road 23 is connected. As a result, the atmosphere in the vacuum chamber C flows into the conduit 23, and the detection value of the vacuum sensor 27 provided on the vacuum pump 14 side temporarily rises to near atmospheric pressure. In the vacuum chamber vacuum step t2 as in the elastic film body vacuum suction step t1, the vacuum pump 14 is initially controlled by open loop control as shown in FIG. When the switching pressure pn is detected when the vacuum setting value of the first vacuum setting 1 in the multi-stage control (but not limited to 40 hPa as an example) approaches and the switching pressure pn is detected, the control of the vacuum pump 14 is closed loop control (feed Including forward control). The rotational speed of the motor 22 of the vacuum pump 14 is controlled via the inverter 21 by the PID gain of TABLE corresponding to the degree of vacuum detected by the vacuum sensor 27. Further, when the vacuum chamber C and the pipe line 23 are in a certain reduced pressure state, the three-way switching valve 29 is operated again to connect the pipe line 28 and vacuum suction below the elastic film body 15 is also performed. As a result, the degree of vacuum in the vacuum chamber C and the degree of vacuum below the elastic film body 15 are substantially equal, so that unintentional lifting of the elastic film body 15 is prevented.

Then, when the time of the vacuum setting 1 in the closed loop control is completed by the timer of the control device 37, the process proceeds to the vacuum setting 2 (although not limited to this, 10 hPa as an example). At this time, if the difference between the vacuum setting values of the vacuum setting 1 and the vacuum setting 2 is small, the cruise loop control is continued, but the setting value is changed to the vacuum setting 2, and the closed-loop control of the rotation speed of the pump is performed. However, when the difference between the vacuum setting values between the vacuum setting 1 and the vacuum setting 2 is large, open loop control may be performed between them. Then, in the middle of the next vacuum setting 2, the three-way switching valve 29 is operated to close the conduit 28 between the vacuum pump 14 and the elastic membrane 15 in the conduit 28, open the on-off valve 32, and pressurize gas The supply device 30 communicates with the lower part of the elastic film body 15. As a result, the process proceeds from the vacuum process t2 in the vacuum chamber to the pressurization process t3. Note that the pressurized gas supply device 30 used in the pressurizing step t3 is always operated or is operated at least until the on-off valve 32 is opened. As a result, pressurized air is supplied to the lower side of the elastic film body 15, the elastic film body 15 is swelled into the vacuum chamber C, and the laminated molded product M is bonded to the elastic film body 15 and the elastic plate 20 of the upper board 12. Pressed between.

The first reason for delaying the pressurization of the laminated molded product M while the vacuum chamber C has been evacuated until this time is that the hot plate 16 and the lower plate of the upper board 12 with respect to the laminated molded product M. This is because heat is transmitted from the 13 hot plates 17 to change the laminated material (resin) of the laminated molded product M to a molten state or a semi-molten state. Another reason is to perform deaeration from the inside of the laminated molded product M carried in from the atmospheric state or between the laminated molded product M and the carrier film F. Therefore, for the purpose of merely transferring heat to the laminated molded product F, it may not be necessary to increase the degree of vacuum of the vacuum chamber C in the vacuum chamber vacuum step t2, and in this case, the rotational speed of the vacuum pump 14 is not necessary. Energy saving can be achieved by lowering.

When the time of the vacuum setting 2 is completed by the timer of the control device 37, the process proceeds to the vacuum setting 3 (although not limited to this, the vacuum setting value is 1 hPa as an example). In this case as well, when the difference between the vacuum setting values of the vacuum setting 2 and the vacuum setting 3 is small, a closed loop is continuously performed. Loop control may be performed. As for the vacuum setting 1, the vacuum setting 2, and the vacuum setting 3 for setting the degree of vacuum in the vacuum chamber C in multiple stages, the vacuum monitoring width is set in the same manner as in the elastic film body vacuum suction step. .

In this embodiment, the setting of the degree of vacuum during one molding, which means one cycle, consists of three stages: vacuum setting 1, vacuum setting 2, and vacuum setting 3, and the set value of the degree of vacuum is higher in the latter half. The second half is not limited to the one with a high degree of vacuum. Further, in the case where the degree of vacuum without the vacuum chamber C during one molding is controlled so as to be changed in multiple stages by controlling the vacuum pump 14, the number of stages is not limited, and the degree of vacuum is not limited to a predetermined inclination or The control of drawing a curve is also included in one of the multiple stages.

The reason for changing and controlling the degree of vacuum by changing the number of rotations of the vacuum pump 14 is not only to save energy but also to increase the life of the components of the vacuum pump 14. That is, it is possible to extend the life of the vacuum pump 14 by preventing the pump from continuing to rotate at a rotational speed higher than necessary. Further, it may be desirable for improving the moldability of the laminated molded product M. In other words, adjusting the degree of vacuum leads to a relative change in the applied pressure from the elastic film body 15 even when the elastic film body 15 is pressurized with the same pressure, and the applied pressure can be controlled. . Furthermore, when a useful component is sucked from the laminated molded product M by vacuum suction at the time of molding, it is possible to prevent or reduce the outflow of the useful component by sucking with an optimum suction force. .

In the present invention, the control method of the vacuum pump 14 is not limited to the above pattern. All steps of one molding cycle may be performed by open loop control. In this case, the number of rotations can be set in advance in multiple stages according to various requests. Since the degree of vacuum of the vacuum chamber C achieved by the number of rotations of the vacuum pump 14 corresponding to the operation amount can be grasped to some extent by experiments in advance, the minimum necessary degree of vacuum is required for the purpose of saving energy and protecting the pump. Lamination molding can also be performed. Also. All the steps of one molding cycle may be performed by closed loop control. In this case, the section in which the degree of vacuum is suddenly increased from the atmospheric pressure is substantially close to open loop control unless detection by the vacuum sensor is performed. As for the control of the section in which the degree of vacuum needs to be suddenly raised, the degree of vacuum may rise earlier as a result of the open loop control.

Further, in the closed loop control, the control without adding the feed forward control element as in the above embodiment may be performed. In this case, in principle, when the detection value of the vacuum sensor 27 reaches the set value, the rotation of the motor 22 of the vacuum pump 14 is stopped, and when the detection value of the vacuum sensor 27 falls from the set value, the motor 22 of the vacuum pump 14 is again turned on. It is rotated. However, it is desirable to adjust the PID gain so that the control does not become sensitive and the motor of the vacuum pump 14 is not stopped as much as possible.

When the pressurizing step t3 ends, the on-off valve 32 is closed and the supply of pressurized air to the lower side of the elastic film body 15 is cut off. Then, the on-off valve 35 is opened, and the pressurized air below the elastic film body 15 is released to the atmosphere. At the same time, the three-way switching valve 25 is operated to allow the inside of the vacuum chamber C to communicate with the atmosphere, thereby evacuating the vacuum chamber C. When the pressure in the vacuum chamber C reaches atmospheric pressure, a hydraulic cylinder (not shown) is operated to lower the lower board 13 and greatly open the vacuum chamber C. Then, as described above, the carrier film F is moved, and the laminated molded product M that has been laminated is taken out from the vacuum laminator. At the same time, the on-off valve 35 is closed, the three-way switching valve 29 is then operated, and the vacuum pump 14 again performs vacuum suction below the elastic film body 15.

Although not shown, as another embodiment, the degree of vacuum of the vacuum chamber C during one molding may be changed in multiple stages using a vacuum regulator. In that case, you may make it combine control of the rotation speed of the above-mentioned vacuum pump 14, and control of a vacuum regulator. Further, the vacuum pump 14 may be rotated at a constant rotation speed or a maximum rotation speed, and the degree of vacuum may be controlled only by a vacuum regulator. However, in the case of using a vacuum regulator, in most cases, it does not lead to energy saving as compared with the case of controlling only the rotation speed of the vacuum pump 14.

Although the present invention is not enumerated one by one, it is not limited to that of the above-described embodiment, and it goes without saying that the present invention is applied to those modified by a person skilled in the art based on the gist of the present invention. is there. The vacuum lamination apparatus 11 of the present invention is used for various molded products such as liquid crystal devices, semiconductors, solar cells, etc., in addition to various circuit boards including build-up substrates.

DESCRIPTION OF SYMBOLS 11 Vacuum laminating apparatus 12 Upper board 13 Lower board 14 Vacuum pump 15 Elastic film body 21 Inverter 22 Motor 27 Vacuum sensor 37 Control apparatus C Vacuum chamber M Laminated molding product

Claims (4)

The upper and lower panels are closed to form a vacuum chamber that can be vacuum-sucked by a vacuum pump. In a vacuum laminating apparatus that pressurizes the laminated molded product,
A vacuum laminating apparatus characterized in that the degree of vacuum in the vacuum chamber during one molding can be changed in multiple stages. 2. The vacuum lamination apparatus according to claim 1, wherein the rotation speed of the vacuum pump is controlled by a motor or a servo motor controlled by an inverter capable of controlling the rotation speed. The upper and lower panels are closed to form a vacuum chamber that can be vacuum-sucked by a vacuum pump. In the control method of the vacuum laminating apparatus that pressurizes the laminated molded product,
The method of controlling a vacuum laminating apparatus, wherein the degree of vacuum in the vacuum chamber during one molding is changed in multiple stages. The method of controlling a vacuum laminating apparatus according to claim 3, wherein the number of rotations of the vacuum pump during one molding is controlled by both open control and closed control.