JP2020092266A5 - - Google Patents
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- JP2020092266A5 JP2020092266A5 JP2019218742A JP2019218742A JP2020092266A5 JP 2020092266 A5 JP2020092266 A5 JP 2020092266A5 JP 2019218742 A JP2019218742 A JP 2019218742A JP 2019218742 A JP2019218742 A JP 2019218742A JP 2020092266 A5 JP2020092266 A5 JP 2020092266A5
- Authority
- JP
- Japan
- Prior art keywords
- base region
- fingers
- capacitor
- electrode
- capacitor structure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US16/209,768 | 2018-12-04 | ||
| US16/209,768 US10692967B1 (en) | 2018-12-04 | 2018-12-04 | High density self-routing metal-oxide-metal capacitor |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2020092266A JP2020092266A (ja) | 2020-06-11 |
| JP2020092266A5 true JP2020092266A5 (https=) | 2020-07-27 |
| JP6861784B2 JP6861784B2 (ja) | 2021-04-21 |
Family
ID=70681434
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2019218742A Active JP6861784B2 (ja) | 2018-12-04 | 2019-12-03 | 高密度自己ルーチング金属−酸化物−金属キャパシタ |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US10692967B1 (https=) |
| JP (1) | JP6861784B2 (https=) |
| CN (1) | CN111276465B (https=) |
| DE (1) | DE102019132881B4 (https=) |
| TW (1) | TWI727532B (https=) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114914089A (zh) * | 2021-02-08 | 2022-08-16 | 日月光半导体制造股份有限公司 | 电容器结构 |
| CN118678876A (zh) * | 2023-03-14 | 2024-09-20 | 中芯国际集成电路制造(上海)有限公司 | 半导体结构及其形成方法 |
| US20240404943A1 (en) * | 2023-06-02 | 2024-12-05 | Intel Corporation | Integrated circuit devices with fishbone capacitor structures |
| US20250113498A1 (en) * | 2023-10-02 | 2025-04-03 | International Business Machines Corporation | Metal spacer 3d-mim capacitor |
Family Cites Families (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7102195B2 (en) * | 2000-12-20 | 2006-09-05 | Winbond Electronics Corporation | Transistor structure for electrostatic discharge protection circuit |
| US7838919B2 (en) * | 2007-03-29 | 2010-11-23 | Panasonic Corporation | Capacitor structure |
| US8021954B2 (en) * | 2009-05-22 | 2011-09-20 | Globalfoundries Singapore Pte. Ltd. | Integrated circuit system with hierarchical capacitor and method of manufacture thereof |
| US8378450B2 (en) * | 2009-08-27 | 2013-02-19 | International Business Machines Corporation | Interdigitated vertical parallel capacitor |
| US8476687B2 (en) * | 2010-09-22 | 2013-07-02 | Texas Instruments Incorporated | Low impedance transmisson line |
| US8971014B2 (en) | 2010-10-18 | 2015-03-03 | Taiwan Semiconductor Manufacturing Company, Ltd. | Protection structure for metal-oxide-metal capacitor |
| US8963286B2 (en) | 2011-05-09 | 2015-02-24 | Marvell International Ltd. | Finger metal oxide metal capacitor structures |
| US8558350B2 (en) * | 2011-10-14 | 2013-10-15 | Taiwan Semiconductor Manufacturing Company, Ltd. | Metal-oxide-metal capacitor structure |
| US8558346B1 (en) | 2012-06-26 | 2013-10-15 | United Microelectronics Corp. | Semiconductor structure |
| US9331013B2 (en) * | 2013-03-14 | 2016-05-03 | Taiwan Semiconductor Manufacturing Company, Ltd. | Integrated capacitor |
| JP2014232865A (ja) * | 2013-04-30 | 2014-12-11 | 住友電気工業株式会社 | キャパシタ素子およびその製造方法並びにフィルタ |
| JP6244967B2 (ja) * | 2014-02-19 | 2017-12-13 | 株式会社ソシオネクスト | キャパシタアレイおよびａｄ変換器 |
| KR101585959B1 (ko) | 2015-02-10 | 2016-01-20 | 전자부품연구원 | 무선랜 ap의 adc에 적용 가능한 mom 커패시터 |
| JP6555084B2 (ja) * | 2015-11-02 | 2019-08-07 | 富士通株式会社 | 容量素子及び容量素子の製造方法 |
| US10147783B2 (en) * | 2017-03-20 | 2018-12-04 | Globalfoundries Inc. | On-chip capacitors with floating islands |
| CN107633128A (zh) | 2017-09-15 | 2018-01-26 | 北京华大九天软件有限公司 | Mom电容、mom电容阵列及mom电容阵列的布局和走线方法 |
-
2018
- 2018-12-04 US US16/209,768 patent/US10692967B1/en active Active
-
2019
- 2019-12-03 JP JP2019218742A patent/JP6861784B2/ja active Active
- 2019-12-03 DE DE102019132881.0A patent/DE102019132881B4/de active Active
- 2019-12-03 TW TW108144079A patent/TWI727532B/zh active
- 2019-12-04 CN CN201911223913.9A patent/CN111276465B/zh active Active
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