JP2020041954A - X-ray inspection device - Google Patents

Abstract

To provide an X-ray inspection device which can secure a sufficient enlargement rate for a small inspection target material without causing any interferences between the parts of the device and the inspection target material even if the material has a large size.SOLUTION: An X-ray generator 2 and an X-ray detector 3 are provided across a sample table 1. The shaft of rotation 5 is provided near the sample table 1 and extends to a direction perpendicular to the optical axis of an X-ray. A grasping mechanism 6 of an inspection target material W is provided in the shaft of rotation 5. A straight movement mechanism 8 moves the shaft of rotation 5 along the optical axis of the X-ray according to the size of the inspection target material W.SELECTED DRAWING: Figure 1

Description

  An embodiment of the present invention relates to an X-ray inspection apparatus provided with a perpendicular axis having a rotation function.

  BACKGROUND ART Conventionally, as disclosed in Patent Document 1, for example, an X-ray inspection apparatus used as a fluoroscopic X-ray inspection apparatus and a CT imaging apparatus has been known. This type of X-ray inspection apparatus allows the inspected object to be rotated while being gripped, thereby allowing the inspected object to be seen through from different angles, and reconstructing images captured continuously during the rotation of the inspected object. It functions as a CT imaging device.

  FIG. 11A is a schematic view of this type of X-ray inspection apparatus. In this X-ray inspection apparatus, an X-ray generator 2 is provided above the sample table 1 and an X-ray detector 3 is provided below. A box-shaped casing 4 is provided on the side of the sample table 1, and a rotating mechanism having a rotating shaft 5 extending in a horizontal direction is inserted into the box-shaped casing 4. The tip of the rotating shaft 5 protrudes from the housing 4, and a gripping mechanism 6 that grips the inspection object W is provided at an end of the protruding portion.

JP 2004-121291 A

  Since the inspected object W includes various articles of various sizes, in the above-described conventional technology, the position of the rotating shaft 5 is set so that the inspected object W does not interfere with the sample table 1 during rotation. It is provided on the upper part of the housing 4 in consideration of an assumed longitudinal dimension of the inspection object W. See FIGS. 11B and 11C. However, when the rotating shaft 5 is provided on the upper part of the housing 4, when inspecting a small inspection object W, the distance between the inspection object W and the sample table 1, that is, the inspection object W and the X-ray The distance from the detector 3 increases, and it becomes impossible to increase the magnification. See FIGS. 11D and 11E.

  Also, recently, by installing a rotating device prepared as an option on the sample table 1 of the existing X-ray inspection apparatus, the inspection object W is rotated to irradiate X-rays from various angles, An X-ray inspection apparatus that can be used as a simple CT apparatus has been proposed. When a rotating device is provided afterwards on the sample table 1, the size of the object W to be inspected depends on the size of the inspection object W due to the mechanism of the existing X-ray inspection device or dimensional restrictions. It has been difficult to solve the problems of interference with No. 1 and the enlargement ratio.

  The present embodiment has been proposed to solve the above-described problems of the related art. The purpose of the present embodiment is to make it possible to easily adjust an appropriate height of the rotation center according to the size of the inspection object, so that even a large inspection object does not interfere with each unit of the apparatus. Another object of the present invention is to provide an X-ray inspection apparatus capable of securing a sufficient magnification even for a small inspection object.

The X-ray inspection apparatus according to the embodiment of the present invention has the following configuration.
(1) An X-ray generator and an X-ray detector provided with a sample table interposed therebetween.
(2) A rotation axis provided near the sample table and extending in a direction orthogonal to the optical axis of the X-ray.
(3) A mechanism for gripping the inspection object provided on the rotating shaft.
(4) A linear movement mechanism for moving the rotation axis along the X-ray optical axis.

In the embodiment of the present invention, the following configuration can be provided.
(1) The orthogonal movement mechanism and the rotating shaft are detachably mounted on the sample table.
(2) An area scanner for detecting the outer shape of the inspection object is provided near the sample table, and determines the movement position of the rotation axis based on a detection signal from the area scanner.
(3) The external shape of the inspection object is acquired based on a fluoroscopic image of the inspection object obtained by X-ray fluoroscopy of the inspection object at each predetermined angle, and the acquired external shape of the inspection object is obtained. The moving position of the rotation axis is determined based on the external shape data.
(4) A 3D scanner for detecting the external shape of the inspection object is provided near the sample table, and determines the movement position of the rotation axis based on a detection signal from the 3D scanner.
(5) A camera for photographing the object to be inspected is provided near the sample table, and a moving position of the rotation axis is determined based on a detection signal from the camera.
(6) The rotary shaft is provided with a slide arm extending in a direction orthogonal to the axial direction of the rotary shaft, and a slide mechanism for varying a distance between the gripping mechanism provided on the slide arm and the rotary shaft. ing.

FIG. 2 is a perspective view showing the entire configuration of the first embodiment. FIG. 4 is a perspective view illustrating a mechanism for elevating the rotating shaft according to the first embodiment, showing a state where the rotating shaft is at a lowered position. FIG. 2 is a perspective view illustrating a mechanism for elevating the rotating shaft according to the first embodiment, showing a state where the rotating shaft is at a lowered position and a large test object interferes with a sample table. FIG. 2 is a perspective view showing a mechanism for elevating the rotating shaft according to the first embodiment, showing a state in which the rotating shaft is at a raised position and a large test object does not interfere with the sample table. The perspective view showing a 2nd embodiment. 9 is a flowchart illustrating a process of determining a rising position of a rotating shaft according to the second embodiment. 10 is a flowchart illustrating a process of determining a rising position of a rotating shaft according to a third embodiment. The perspective view showing a 4th embodiment. The perspective view showing a 5th embodiment. FIG. 17 is a perspective view showing a rotation shaft and a slide arm portion according to a sixth embodiment. The perspective view which illustrates a conventional technology typically.

[1. First Embodiment]
Hereinafter, embodiments of the present invention will be described. In the present embodiment, the X-ray generator 2 is provided below the sample table 1 and the X-ray detector 3 is provided above the sample table 1, contrary to the prior art described with reference to FIG.

[1-1. Constitution]
As shown in FIG. 1, in the X-ray inspection apparatus of the first embodiment, a back plate 7 extending in a vertical direction is provided on a back portion of the device, and a pair of Z-axis rails 71 are fixed to the back plate 7. A sample table elevating plate 72 is movably supported on the Z-axis rail 71 in parallel with the back plate 7, and a Z-axis frame 73 is horizontally supported by the sample table elevating plate 72 using triangular left and right brackets. The Z-axis frame 73 is a square member having an open center, and a pair of X-axis rails 74 extending in the left-right direction are fixed to both sides of the surface. On the upper surface of the Z-axis frame 73, a rectangular X-axis frame 75, which is also open at the center, is disposed so as to be movable left and right while being supported by the X-axis rail 74. Y-axis rails 79 are provided on the left and right sides of the upper surface of the X-axis frame 75, and a Y-axis frame 77 having an open central portion is supported by the Y-axis rail 79 so as to be movable in the forward and backward directions.

  A Z-axis drive unit 76 for moving the sample table elevating plate 72 along the Z-axis rail 71 is provided below the back plate 7. In the vicinity of the X-axis rail 74 provided on the back plate 7 side of the Z-axis frame 73, an X-axis drive unit 78 for moving the X-axis frame 75 supported by the X-axis rail 74 to the left and right is provided. In the vicinity of the Y-axis rail 79 provided on the right side of the X-axis frame 75, a Y-axis driving unit 80 for moving the Y-axis frame 77 supported by the Y-axis rail 79 back and forth is provided. As each of these drive units, a conventionally known drive mechanism for the sample table 1 of the X-ray inspection apparatus can be appropriately used. In the present embodiment, a ball shaft rotated by a stepping motor and a ball A mechanism having a nut block with a shaft inserted is used.

  The sample table 1 is supported inside a rectangular opening of the Y-axis frame 77. That is, the sample table 1 is fixed to the Y-axis frame 77 by using, for example, the screws 11 as illustrated in a state where the front and rear edges of the sample table 1 are hooked on the front and rear frames of the Y-axis frame 77. The sample table 1 has a light receiving area 12 for the X-ray beam from the X-ray generator 2 and an installation area 13 of the housing 4 provided on the back side thereof.

  In the present embodiment, the housing 4 and the elevating mechanism 8 of the rotating shaft 5 provided therein are mounted on the sample table 1 of a normal X-ray fluoroscopic apparatus having no rotation function of the inspection object W by bolting or the like. The device is detachably fixed by the means. As shown in FIGS. 2 to 4, a rotating shaft elevating mechanism 8 having the following configuration is provided inside the housing 4. The rotary shaft elevating mechanism 8 corresponds to a direct moving mechanism of the rotary shaft 5 in the present invention.

  That is, a support plate 81 extending in the Y-axis direction and the Z-axis direction is provided inside the housing 4 in a state fixed to the upper surface of the sample table 1. A pair of linear guides 82 extending in the Z-axis direction is provided on the surface of the support plate 81, and the rotary shaft elevating plate 83 is movably supported by the linear guides 82. A ball screw 84 rotatably supported by a bearing 80 provided on a support plate 81 is provided between the pair of linear guides 82, and the ball screw 84 is fixed to a rotary shaft elevating plate 83 by a nut block 85. Has been inserted. A pulley 86 is provided at an upper end of the ball screw 84, that is, at a portion protruding from the bearing 80. On the other hand, a lifting stepping motor 87 is provided on the support plate 81 along a linear guide 82 on the back plate 7 side. A pulley 88 provided on an output shaft of the stepping motor 87 and a pulley 86 of a ball screw 84 are provided. , A timing belt 89 is stretched.

  A rotating stepping motor 51 for driving the rotating shaft 5 is fixed to the surface of the rotating shaft elevating plate 83. In this embodiment, the rotating shaft 5 is coaxially fixed to the tip of the output shaft of the rotating stepping motor 51. The rotating shaft 5 protrudes from the opening provided in the housing 4 to the outside of the housing 4, and a gripping mechanism 6 for the inspection object W is provided at a tip of the protruding portion. In the present embodiment, the gripping mechanism 6 includes a pair of upper and lower hands 61 arranged at a fixed interval, and a screw 62 for adjusting the interval between the upper and lower hands 61. The gripping mechanism 6 is detachably fixed to the tip of the rotating shaft 5 by a joint 63.

[1-2. Action]
In this embodiment, in order to perform X-ray fluoroscopy on a small inspection object W, the rotating shaft 5 is lowered to a position close to the surface of the sample table 1 as shown in FIG. That is, the rotational force of the stepping motor 87 for elevation is transmitted to the ball screw 84 via the pulley 88, the timing belt 89, and the pulley 86, and the ball screw 84 is rotated in the nut block 85. 83 is lowered along the linear guide 82. In this state, the inspection object W is sandwiched between the upper and lower hands 61 and the screw 62 provided at the base of the hand 61 is tightened, so that the rotation shaft 5 grips the inspection object W. The gripping of the inspection object W may be performed when the rotating shaft 5 is at the raised position.

  In the case of the small inspection object W, even if the inspection object W is rotated while the rotation stepping motor 51 rotates the inspection object W when the rotating shaft 5 is in the lowered position as shown in FIG. The inspection object W does not interfere with the sample table 1. Therefore, it is possible to perform fluoroscopy in a state where the inspection object W is close to the sample table 1, that is, at a position close to the X-ray generator 2 provided below the sample table 1. Images can be obtained.

  On the other hand, when obtaining a see-through image of the large inspection object W as shown in FIG. 4, the rotation stepping motor 87 is driven to move the rotating shaft elevating plate 83 along the linear guide 82, thereby rotating the object. Move the shaft 5 to the raised position. In this way, a large distance can be secured between the rotating shaft 5 and the sample table 1, so that even when the large object W is rotated, the object W interferes with the sample table 1. Never do. If the large inspection object W is rotated while the rotating shaft 5 is in the lowered position as shown in FIG. 3, the inspection object W interferes with the sample table 1 and X-ray imaging becomes impossible.

  As described above, in the present embodiment, since the elevation position of the rotating shaft 5 is variable, it is possible to perform X-ray fluoroscopy while rotating the inspection object W at a position that is optimal for the dimensions of the inspection object W. Become. As an imaging method, it is possible to stop the rotating shaft 5 at an arbitrary angle to capture an X-ray fluoroscopic image, or to perform a CT scan for capturing an X-ray fluoroscopic image at each predetermined angle. As described above, the apparatus according to the present embodiment can be used for both X-ray CT and fluoroscopy.

[1-3. effect]
This embodiment has the following effects.
(1) By providing the rotating shaft 5 that moves up and down, the rotation center of the inspection object W can be appropriately set. As a result, when the object to be inspected W is large, the conventional apparatus interferes with the sample table 1, but the interference can be prevented by raising the rotating shaft 5. In addition, even with a small inspection object W, X-ray fluoroscopy and X-ray CT can be performed while maintaining the magnification by bringing the rotation center closer to the sample table 1.

(2) In the present embodiment, it is possible to easily capture fluoroscopic images at different angles with an existing fluoroscopic device by a simple means of installing the elevating mechanism 8 of the rotating shaft 5 on the sample table 1. It is possible to add functions and CT scan functions.

(3) By using the stepping motor 87 for pulse control, the distance from the upper surface of the sample table 1 to the center of rotation can be automatically calculated, and the observation height can be calculated. Also, the magnification can be automatically calculated from the observation height.

(4) Since the distance between the rotation center of the inspection object W and the sample table 1 can be increased by raising the rotating shaft 5, the gripping mechanism 6 itself can be increased in size, which is difficult with a conventional fluoroscope. In addition, the large and heavy inspection object W can be securely held and rotated to obtain fluoroscopic images from different angles. Furthermore, if the inspection object W is not rotated by 360 degrees, it is possible to see through a larger inspection object W by changing the angle in a range that does not interfere with the sample table 1.

[2. Second Embodiment]
In the present embodiment, the area sensor 9 prevents the inspection object W from coming into contact with the sample table 1 when rotated, thereby ensuring the soundness of the device. That is, in the present embodiment, as shown in FIG. 5, the light emitting unit and the light receiving unit of the area sensor 9 are provided on the left and right edges of the sample table 1. The area sensor 9 preferably has a detection area that covers the entire length of the inspection object W as viewed from the axial direction of the rotary shaft 5. In this embodiment, a plurality of line sensors are connected to the axial direction of the rotary shaft 5. Are arranged at predetermined intervals along the line.

  In the present embodiment having such a configuration, when the inspection object W held by the gripping mechanism 6 is rotated and a part of the inspection object W blocks the light beam of the area sensor 9, the inspection object W Is detected to interfere with the sample table 1. In such a case, the rotating shaft 5 is raised by the lifting mechanism 8 to increase the distance between the inspection object W and the sample table 1 to prevent interference between the two. It is preferable that the rising amount of the rotating shaft 5 is automatically set by driving the stepping motor 87 for raising and lowering based on the interference signal of the inspection object W output from the area sensor 9. However, it is also possible that the user is notified of the detection of the interference by an alarm or the like, and the user manually determines the amount of rise of the rotating shaft 5. The process of determining the ascending position of the rotating shaft 5 in the present embodiment will be described with reference to the flowchart shown in FIG.

  First, the rotating shaft 5 is rotated with the inspection object W sandwiched by the gripping mechanism 6 (S01). When the inspection object W rotated together with the rotating shaft 5 blocks the light beam of the area sensor 9 (YES in S02), a detection signal is output from the area sensor 9 to the rotating stepping motor 51, and the rotating shaft 5 stops. (S03). In this state, it is determined whether or not the rotating shaft 5 is at the upper end (S04). If the rotating shaft 5 has reached the upper end and cannot be raised any more (YES in S04), the inspection object W is to be inspected. Since it is impossible to rotate 360 degrees, it is determined that the size of the inspection object W is abnormal (S05), and the X-ray fluoroscopy of the inspection object W is abandoned. On the other hand, if the rotating shaft 5 has not reached the upper end (NO in S04), a drive command is output to the lifting / lowering stepping motor 87 to raise the rotating shaft 5 by a predetermined dimension (S06). After raising the rotating shaft 5, the process returns to (S01) to rotate the inspection object W.

  When the inspection object W is rotated and the area sensor 9 does not detect the inspection object W (NO in S02), the rotation angle of the inspection object W is monitored to determine whether the inspection object W has rotated 360 degrees. (S07). If the rotation angle is less than 360 degrees (NO in S07), the flow returns to (S01) and the rotation of the inspection object W is continued. On the other hand, if the inspection object W has rotated 360 degrees (YES in S07), a stop command is output to the rotation stepping motor 51 to stop the rotating shaft 5 (S08), and the size of the inspection object W is changed to the sample. It is determined that the size is a normal size that does not interfere with the table 1 (S09), and the size detection of the inspection object W ends.

  As described above, according to the present embodiment, the size of the inspection object W can be determined in advance by the area sensor 9, so that the rotation shaft 5 suitable for the size of the inspection object W is closest to the sample table 1. The position can be determined automatically. As a result, it becomes possible to see through the inspection object W at an optimum magnification. Also, the large object W such as to interfere in the sample table 1 is rotated 360 degrees, so either interference in advance any angle with the sample table 1 is found, until it reaches its angle, the object to be inspected X-ray fluoroscopy can be performed from different angles while appropriately rotating W.

[3. Third Embodiment]
In the third embodiment, data for preventing contact due to the rotation of the inspection object W is created using an X-ray fluoroscopic image interlocked with the rotation axis 5. The process of determining the ascending position of the rotating shaft 5 in the present embodiment will be described with reference to the flowchart shown in FIG.

  First, at the highest position of the rotating shaft 5, the rotating shaft 5 is rotated by a predetermined fixed angle while the inspection object W is gripped by the gripping mechanism 6 (S01). In this state, the inspection object W is irradiated with X-rays (S02), and the shape of the inspection object W at that angle is photographed (S03). The X-ray transmitted through the inspection object W is detected by the X-ray detector 3, and is orthogonal to the X-ray optical axis of the inspection object W based on output data from the X-ray detector 3, that is, parallel to the sample table 1. An external shape is obtained (S04).

  Based on the outer shape of the inspection object W acquired in this way and the preset highest position of the rotating shaft 5, whether or not interference occurs when the inspection object W is rotated 360 degrees. That is, it is determined whether or not the inspection object W has a normal outer shape (S05). When the inspection object W interferes with the sample table 1 (NO in S05), it is determined that the size is abnormal (S06), and the X-ray fluoroscopy of the inspection object W is abandoned.

  When the external shape of the inspection object W is normal (YES in S05), the rotation angle of the inspection object W is monitored to determine whether or not the inspection object W has rotated 360 degrees (S07). If the rotation angle is less than 360 degrees (NO in S07), the process returns to (S01), and the inspection object W is rotated by a predetermined angle, and X-rays are irradiated again to acquire the outer shape. When the inspected object W is rotated by 360 degrees (YES in S07), the maximum dimension from the external shape of the inspected object W acquired by irradiating the X-ray at a predetermined angle to the central axis and the outer edge is extracted. Then, based on the maximum dimension and a predetermined allowance, an optimal ascending position of the rotating shaft 5, that is, a rotation center of the inspection object W is set (S08). Thereafter, the rotary shaft 5 is lowered from the highest position where the outer shape was obtained to the set rotation center (S09), and the process of determining the vertical position of the rotary shaft 5 is completed.

  According to the present embodiment, it is possible to obtain the outer shape of the inspection object W by rotating the inspection object W by a predetermined angle and performing X-ray fluoroscopy, and to interfere with the sample table 1 based thereon. , The rotation center of the inspection object W can be determined. As a result, it is possible to see through the inspection object W at a position close to the sample table 1 where a large magnification can be obtained without fear of interference. As described above, according to the present embodiment, it is possible to determine an appropriate center of rotation in accordance with the size of the inspected object W by analyzing the image obtained by measuring the rotating outer shape. Therefore, the fluoroscopic imaging and the CT imaging at different angles are automatically performed. I can shoot.

[4. Fourth embodiment]
In the third embodiment, the outer shape of the inspection object W is acquired by X-ray fluoroscopy, but in the present embodiment, the shape of the inspection object W is measured in advance by operating the 3D scanner 10. In the present embodiment, as shown in FIG. 8, a 3D scanner 10 having a pair of left and right detection elements is provided on a sample table 1. In the 3D scanner 10, detection elements that output laser light are provided on left and right frame portions of the sample table 1, and are movable in the front-rear direction of the X-ray inspection apparatus, that is, in the axial direction of the rotating shaft 5. The 3D scanner 10 preferably has a detection area in a range from the upper surface of the sample table 1 to the highest position of the rotating shaft 5.

  By scanning the inspection object W gripped by the gripping mechanism 6 along the rotation axis 5 using such a pair of left and right 3D scanners 10, the left and right outer shapes of the rotation axis 5 of the inspection object W are respectively Can be detected by the 3D scanner 10. This makes it possible to determine whether the external shape of the inspection object W is normal or abnormal and to automatically determine the optimal elevation position of the rotating shaft 5 for the inspection object W, as in the case of the X-ray fluoroscopy of the third embodiment. .

[5. Fifth Embodiment]
In the present embodiment, the size of the sample is specified from the camera image showing the rotation axis 5, and mechanical interference is prevented. As shown in FIG. 9, in the present embodiment, a visible light or infrared camera 11 is installed in the axial direction of the rotating shaft 5 (and also in a direction orthogonal to the axial direction if necessary), and an image taken by the camera 11 is provided. The external shape of the inspection object W is acquired from Also in the present embodiment, similarly to the X-ray fluoroscopy and the 3D scanner 10 of each of the above-described embodiments, it is determined whether the external shape of the inspection object W is normal or abnormal, and the optimal vertical position of the rotating shaft 5 for the inspection object W is determined. Can be determined automatically.

[6. Sixth embodiment]
In the present embodiment, the target can be inspected irrespective of the gripping position of the inspected object W by changing the rotation center of the inspected object W by the slide arm 52 that moves in the left-right direction. That is, in each of the above embodiments, the rotating shaft 5 is provided coaxially with the output shaft of the rotating stepping motor 51. In the present embodiment, as shown in FIG. Is fixed, and a movable joint 63 a is supported on the slide arm 52 so as to be movable in the length direction of the slide arm 52. The hand 61 of the gripping mechanism 6 is connected to the moving joint 63a. A drive mechanism having a ball screw and a nut block is provided inside the slide arm 52 for linearly moving the moving joint. The drive mechanism is driven by a stepping motor 53 provided at the tip of the slide arm 52. You.

  In the present embodiment, by moving the stepping motor 53 in a state where the inspection object W is gripped by the gripping mechanism 6, the moving joint 63 a is moved in the direction orthogonal to the rotation axis 5 along the length direction of the slide arm 52. Move. That is, in the present embodiment, for example, since it is possible to move from the position A in FIG. 10 to the position B, it is possible to adjust the rotation center of the inspection object W and the size of the gripping position by the gripping mechanism 6. It is possible. As a result, the rotational torque and the position can be corrected in consideration of the position of the center of gravity of the inspection object W. Thereby, rotation unevenness due to the position of the center of gravity of the inspection object W can be grasped in advance, and the inspection object W can be smoothly rotated even with a small motor or the like. Further, even in a case where a workpiece having a complicated shape can hold only one point, the center of rotation in photographing can be arbitrarily set. This embodiment can be used in combination with any of the above embodiments as appropriate.

[7. Other Embodiments]
The present invention is not limited to the above-described embodiment, and can be embodied by modifying the constituent elements in the implementation stage without departing from the scope of the invention. Various inventions can be formed by appropriately combining a plurality of components disclosed in the above embodiments. For example, some components may be deleted from all the components shown in the embodiment. Further, constituent elements of different embodiments may be appropriately combined. For example, the following configuration can be adopted.

(1) The present invention can be applied to both an X-ray CT and a fluoroscope.
(2) In the above embodiment, the elevating mechanism 8 for the rotating shaft 5 is provided on the sample table 1 of the existing X-ray fluoroscope, but the elevating mechanism 8 for the rotating shaft 5 is provided at another place near the sample table 1. Is also possible. In this case, if the sample table 1 is a device that moves in the XYZ directions, it is preferable that the lifting mechanism 8 of the separately provided rotating shaft 5 be provided with a similar moving mechanism in the XYZ directions.
(3) In addition to adding the elevating mechanism 8 of the rotating shaft 5 to an existing X-ray fluoroscope, it is also possible to manufacture an X-ray inspection apparatus having such an elevating mechanism 8 from the beginning.
(4) By providing an opening in the sample table 1, interference between the inspection object W and the sample table 1 can be prevented, and a larger inspection object W can be handled. In this case, since the small inspection object W may fall into the apparatus, the opening can be covered with a removable cover plate.
(5) As the 3D scanner 10 in the fourth embodiment, besides the one in which the scanning unit moves along the axial direction of the rotating shaft 5, the rotating shaft 5 is rotated while the scanning unit is fixed, and One that scans around can also be used.
(6) In the sixth embodiment, instead of the configuration in which the moving joint 63a moves left and right along the slide arm 52, the slide itself uses the slide arm 52 that expands and contracts left and right, Thus, a configuration in which the slide arm moves in the perpendicular direction can be adopted.
(7) In the illustrated embodiment, since the X-ray generator 2 and the X-ray detector 3 are arranged above and below the sample table 1, the rotary shaft 5 is moved along the optical axis of the X-ray by the lifting mechanism 8. The present invention is also applicable to an X-ray inspection apparatus in which the sample table 1 is arranged vertically and the X-ray generator 2 and the X-ray detector 3 are arranged on both sides thereof. In this case, a mechanism that moves the rotating shaft 5 in the left-right direction of the inspection apparatus is used as the orthogonal movement mechanism that moves the rotating shaft 5 along the optical axis of the X-ray.

W: inspection object 1: sample table 2 ... X-ray generator 3 ... X-ray detector 4 ... housing 5 ... rotating shaft 51 ... rotating stepping motor 52 ... slide arm 53 ... slide mechanism 6 ... gripping mechanism 61 ... hand 62 Screw 7 Back plate 71 Z-axis rail 72 Sample table elevating plate 73 Z-axis frame 74 X-axis rail 75 Y-axis frame 76 Z-axis drive unit 77 X-axis frame 78 X-axis drive unit 79 ... Y-axis rail 80 ... Y-axis drive unit 8 ... rotary axis elevating mechanism 81 ... support plate 82 ... linear guide 83 ... rotary axis elevating plate 84 ... ball screw 86,88 ... pulley 85 ... nut block 87 ... elevating stepping motor 89 timing belt 9 area sensor 10 3D scanner 11 camera

Claims (7)

An X-ray generator and an X-ray detector provided on both sides of the sample table,
A rotation axis provided near the sample table and extending in a direction orthogonal to the optical axis of the X-ray;
A gripping mechanism for the inspection object provided on the rotating shaft,
A linear moving mechanism for moving the rotation axis along the X-ray optical axis;
An X-ray inspection apparatus comprising:   The X-ray inspection apparatus according to claim 1, wherein the orthogonal movement mechanism and the rotation shaft are detachably mounted on the sample table.   3. The area scanner according to claim 1, wherein an area scanner for detecting an outer shape of the inspection object is provided near the sample table, and a moving position of the rotation axis is determined based on a detection signal from the area scanner. X-ray inspection equipment.   Based on the fluoroscopic image of the inspection object obtained by X-ray fluoroscopy of the inspection object at each predetermined angle, the outer shape of the inspection object is acquired, and the acquired outer shape data of the inspection object is obtained. The X-ray inspection apparatus according to claim 1, wherein a moving position of the rotation axis is determined based on the rotation position.   The 3D scanner for detecting the external shape of the inspection object is provided near the sample table, and the moving position of the rotation axis is determined based on a detection signal from the 3D scanner. X-ray inspection equipment.   3. The X-ray inspection according to claim 1, wherein a camera for photographing the inspection object is provided near the sample table, and the moving position of the rotation axis is determined based on a detection signal from the camera. 4. apparatus.   The rotary shaft is provided with a slide arm extending in a direction orthogonal to the axial direction of the rotary shaft, and a slide mechanism that varies a distance between the gripping mechanism provided on the slide arm and the rotary shaft. An X-ray inspection apparatus according to any one of claims 1 to 6.