JP2020040019A - Ultrasonic water jet device - Google Patents

Abstract

To provide an ultrasonic washing nozzle, which allows ultrasonic vibration with large amplitude to be propagated to washing water.SOLUTION: An ultrasonic water jet device 2, which is a device for jetting water to which ultrasonic vibration is propagated, comprises: a tubular water storage part 20 that temporarily stores water supplied from a water supply source 22; a jetting port 21 through which water is jetted from one end side of the water storage part 20; and an ultrasonic oscillation part 23, arranged at the other end side of the water storage part 20 to oppose to the jetting port 21, which propagates ultrasonic vibration to water in the water storage part 20. The ultrasonic oscillation part 23 comprises: a first columnar part 25; a second columnar part 26 with a diameter larger than a diameter of the first columnar part 25, connected to the first columnar part 25, sharing a center shaft with the first columnar part; and an ultrasonic vibration plate 29 arranged at a free end side of the second columnar part 26. The water storage part 20 is made to store the first columnar part 25, and a side wall 200 forming the water storage part 20 is connected to a part at which ultrasonic vibration becomes zero in a longitudinal direction of the ultrasonic oscillation part 23.SELECTED DRAWING: Figure 2

Description

  TECHNICAL FIELD The present invention relates to an ultrasonic water jetting device that jets water propagated by ultrasonic vibration.

  An ultrasonic cleaning nozzle that removes dirt from an object to be cleaned (for example, see Patent Literature 1) includes a water reservoir for temporarily storing cleaning water, a jet port for jetting water from the water pool, and a water pool facing the jet port. The ultrasonic vibration oscillated from the ultrasonic vibration plate is transmitted to the cleaning water in the water reservoir, and the object to be cleaned is generated by the ultrasonic vibration of the cleaning water ejected from the ejection port. By applying an impact to the dirt, the dirt is removed from the object to be cleaned.

JP-A-2004-082038

Since the cleaning using such an ultrasonic cleaning nozzle is used for the purpose of removing fine dirt that cannot be removed with a two-fluid cleaning nozzle or a high-pressure cleaning nozzle, an ultra-high frequency of 1 MHz is often transmitted to the cleaning water. .
On the other hand, if the amplitude of the ultrasonic vibration generated from the ultrasonic vibration plate is set to be small, it is not possible to remove large dirt such as grinding dust generated by grinding. For this reason, ultrasonic vibration with a reduced frequency is transmitted directly from the ultrasonic vibration plate to the cleaning water to remove large dirt, but since ultrasonic vibration does not propagate, it is necessary to remove large dirt such as grinding dust. There is a problem that can not be.

  Therefore, in the ultrasonic cleaning nozzle, there is a problem that ultrasonic vibration having a large amplitude can be transmitted to the cleaning water.

  The present invention for solving the above-mentioned problem is an ultrasonic water jetting device for jetting water in which ultrasonic vibrations are propagated, and a cylindrical water reservoir for temporarily storing water supplied from a water supply source. An outlet for injecting water from one end side of the water reservoir, and an ultrasonic wave disposed at the other end of the water reservoir opposed to the water outlet for transmitting ultrasonic vibrations to the water in the water reservoir. An ultrasonic wave oscillating unit, wherein the ultrasonic wave oscillating unit is connected to a first columnar portion and having the same central axis as the first columnar portion, and has a diameter larger than the diameter of the first columnar portion. And an ultrasonic vibrating plate disposed on a free end side of the second cylindrical portion, wherein the first cylindrical portion is accommodated in the water reservoir, and the ultrasonic water jet device is provided. Is an ultrasonic water spraying device in which the side wall forming the above is connected to a portion where ultrasonic vibration becomes zero in the longitudinal direction of the ultrasonic oscillation section.

  In the ultrasonic water jet apparatus according to the present invention, it is preferable that high-frequency power of 16 kHz to 80 kHz is supplied to the ultrasonic diaphragm.

  The ultrasonic water injection device according to the present invention is a cylindrical water storage portion for temporarily storing water supplied from a water supply source, an injection hole that injects water from one end side of the water storage portion, and an injection hole. An ultrasonic oscillating section disposed opposite to the other end of the water basin to transmit ultrasonic vibration to water in the water basin, the ultrasonic oscillating section comprising: a first columnar section; A second columnar portion connected to the columnar portion in the same central axis and having a diameter larger than the diameter of the first columnar portion; and an ultrasonic diaphragm disposed on a free end side of the second columnar portion. Since the first cylindrical portion is housed in the water reservoir and the side wall forming the ultrasonic water jet device is connected to a portion where the ultrasonic vibration becomes zero in the longitudinal direction of the ultrasonic oscillator, a large amplitude Ultrasonic vibration can be efficiently transmitted to water. In addition, it is possible to spray water to which the ultrasonic vibration having a large amplitude is propagated onto the object to be cleaned, thereby removing large dust such as grinding dust that cannot be removed by the conventional ultrasonic nozzle.

It is a perspective view showing an example of a grinding device in which the ultrasonic water injection device concerning the present invention was arranged. It is sectional drawing which shows an example of an ultrasonic water injection device. It is sectional drawing which shows another example of a water reservoir part. It is sectional drawing which shows an example of the ultrasonic water injection device which does not have a body part. It is sectional drawing which shows another example of an ultrasonic water injection device. FIG. 4 is a cross-sectional view illustrating a state in which the workpiece is being ground while the cleaning water is being sprayed onto the grinding surface of the grinding wheel by the ultrasonic water spray device.

  The grinding device 1 shown in FIG. 1 is a device for grinding a workpiece W held on a holding means 3 by a grinding means 7. The front (−Y direction side) on the base 10 of the grinding device 1 is a region where the workpiece W is attached to and detached from the holding unit 3, and the rear (+ Y direction side) on the base 10 is the grinding unit. 7 is a region where the workpiece W held on the holding means 3 by the grinding is performed.

  The holding means 3 is composed of a circular plate-shaped porous member or the like, and includes a suction unit 30 that suctions the workpiece W, and a frame 31 that supports the suction unit 30. The suction unit 30 communicates with a suction source (not shown) such as a vacuum generator, and the suction force generated by the suction by the suction source is transmitted to the holding surface 30a that is the exposed surface of the suction unit 30. The holding means 3 can suction-hold the workpiece W on the holding surface 30a. Further, the holding means 3 is surrounded by a cover 39 and is rotatable around the axis in the Z-axis direction.

  Below the holding means 3, the cover 39, and the bellows cover 39a connected to the cover 39 (inside the base 10), a motor for moving the holding means 3 in the Y-axis direction and a Y-axis moving means (not shown) including a ball screw and the like. Is provided, and the holding means 3 is reciprocally movable in the Y-axis direction by the Y-axis direction moving means.

  In the grinding area, a column 11 is provided upright. On the front surface of the column 11, there is provided a grinding feeding means 5 for grinding and feeding the grinding means 7 in the Z-axis direction (vertical direction) which is separated or approaches the holding means 3. It is arranged. The grinding feed means 5 includes a ball screw 50 having a vertical axis, a pair of guide rails 51 arranged in parallel with the ball screw 50, a motor 52 connected to the upper end of the ball screw 50 to rotate the ball screw 50, An internal nut is screwed into the ball screw 50, and a side portion is provided with an elevating plate 53 slidingly contacting the guide rail 51. When the motor 52 rotates the ball screw 50, the elevating plate 53 is attached to the guide rail 51 accordingly. It is guided and reciprocates in the Z-axis direction, and the grinding means 7 fixed to the elevating plate 53 is ground and fed in the Z-axis direction.

  The grinding means 7 for grinding the workpiece W held by the holding means 3 includes a rotating shaft 70 whose axial direction is the Z-axis direction, a housing 71 rotatably supporting the rotating shaft 70, and a rotating shaft 70. A motor 72 that rotates, an annular mount 73 connected to the lower end of a rotating shaft 70, a grinding wheel 74 that is detachably mounted on the lower surface of the mount 73, and a housing 71 that supports the housing 71 and raises and lowers the grinding feed unit 5. A holder 75 having a side surface fixed to the plate 53 is provided.

  The grinding wheel 74 includes a wheel base 741 and a plurality of substantially rectangular parallelepiped grinding wheels 740 arranged annularly on the bottom surface of the wheel base 741. The grinding wheel 740 is formed, for example, by bonding diamond abrasive grains or the like with a resin bond, a metal bond, or the like.

An ultrasonic water injection device 2 according to the present invention is disposed at a position adjacent to the grinding wheel 74 that has been lowered to the grinding position.
The ultrasonic water jetting device 2 for jetting water propagated by ultrasonic vibration shown in FIG. 2 includes, for example, a cylindrical water reservoir 20 for temporarily storing water supplied from a water supply source 22 and a water reservoir 20. An injection port 21 for injecting water from one end side (+ Z direction side in FIG. 2), and the other end side of the water reservoir 20 opposed to the injection port 21 (−Z direction side in FIG. 2). And an ultrasonic oscillator 23 for transmitting ultrasonic vibrations to water in the water reservoir 20.

The cylindrical water reservoir 20 is made of, for example, SUS or the like, and gradually decreases in diameter, for example, toward the injection port 21 on one end side. A water supply port 200 a is formed through the side wall 200 of the water reservoir 20, and the water supply source 22 communicates with the water supply port 200 a via an on-off valve 221.
In addition, as shown in FIG. 3, the water reservoir 20 may have a shape that is not reduced in diameter toward the injection port 21.

  The ultrasonic water injection device 2 includes a cylindrical body 24 integrally connected to the water reservoir 20 and having a diameter larger than that of the water reservoir 20. An entrance 240 into which the ultrasonic oscillator 23 enters is formed on the free end side (−Z direction side) of the body portion 24.

  The ultrasonic oscillator 23 in the present embodiment includes, for example, a first columnar portion 25 made of a predetermined metal (for example, a titanium alloy or an aluminum alloy), and the first columnar portion 25 extending in the Z-axis direction. A second cylindrical portion 26 having the same central axis and connected to each other and having a diameter larger than the diameter of the first cylindrical portion 25, and disposed on the free end side (-Z direction end side) of the second cylindrical portion 26; And an ultrasonic vibration plate 29 to be used.

  The first cylindrical portion 25, which is a cylindrical rod-shaped body, is accommodated in the water reservoir 20 in a non-contact manner, and the base 250 is integrally connected to the second cylindrical portion 26. The outer peripheral surface of the base 250 of the first cylindrical portion 25 is formed so as to have an R-shaped slope that widens toward the end.

  The diameter of the second cylindrical portion 26 formed of a predetermined metal is set to be larger than, for example, the diameter of the first cylindrical portion 25 and the inner diameter of the water reservoir 20. They are in contact via a ring-shaped rubber plate 263. The rubber plate 263 fixed and bonded to the top plate 241 serves as a sealing member, and prevents water supplied from the water supply port 200a into the water reservoir 20 from entering the body 24 side. Further, the rubber plate 263 expands and contracts together with expansion and contraction of the entire ultrasonic oscillation unit 23 so that the body 24 does not hinder amplification of ultrasonic vibration.

In the present embodiment, the ultrasonic oscillator 23 further includes a third column 27 and a fourth column 28 in addition to the first column 25 and the second column 26.
The third columnar portion 27, which is a columnar rod-shaped body made of a predetermined metal, has, for example, a diameter substantially the same as that of the first columnar portion 25, and has one end face (the end face in the + Z direction in FIG. 2). ) Is connected to the free end surface 26 a of the second cylindrical portion 26 by a connecting screw 277. The root 270 (the end in the −Z direction in FIG. 2) at the other end of the third columnar portion 27 is, for example, expanded in a flange shape so as to have substantially the same diameter as the diameter of the ultrasonic vibration plate 29. . A metal connecting plate 274 having a diameter larger than that of the third cylindrical portion 27 is bonded and fixed to the other end of the third cylindrical portion 27 with a predetermined brazing member or the like. The third cylindrical portion 27 plays a role of a booster that increases and decreases the amplitude (magnitude of vibration) of the ultrasonic vibration transmitted from the ultrasonic vibration plate 29 to adjust.

  The ultrasonic vibration plate 29 is bonded and fixed to the connection plate 274. The ultrasonic vibration plate 29 has a plate-shaped first piezoelectric element 291 and a second piezoelectric element 292 that expand and contract when a voltage is applied, and are joined together. The first piezoelectric element 291 and the second piezoelectric element 292 are, for example, piezo elements that are a kind of ceramics. An electrode (not shown) is attached to each of the first piezoelectric element 291 and the second piezoelectric element 292, and an AC voltage is applied to the first piezoelectric element 291 and the second piezoelectric element 292 to apply high-frequency power to the ultrasonic vibration plate 29 through the electrode and the wiring 293. The power supply 295 to be supplied is connected. By repeatedly turning on and off the application of the voltage at a predetermined frequency by the power supply 295, the first piezoelectric element 291 and the second piezoelectric element 292 can be caused to expand and contract in the Z-axis direction. Then, the expansion and contraction movement becomes mechanical ultrasonic vibration.

  A fourth cylindrical portion 28 is provided on the ultrasonic vibration plate 29, and the fourth cylindrical portion 28 is fixed to the ultrasonic vibration plate 29 by a fixing bolt 283 screwed with the third cylindrical portion 27. Fixed on top. The ultrasonic vibration plate 29 is firmly sandwiched between the fourth cylindrical portion 28 and the third cylindrical portion 27 from both sides in the Z-axis direction.

An annular rubber plate 275 is adhered and fixed to the lower surface side of the bottom plate 242 of the body portion 24. When the ultrasonic oscillation portion 23 is inserted into the water reservoir 20 and the body portion 24, the ultrasonic oscillation portion 23 Is in contact with the rubber plate 275. A plurality of screw holes 274a are formed uniformly in the circumferential direction in an outer peripheral region of the connection plate 274. Then, a fixing screw (not shown) is inserted into the screw hole 274 a and screwed into a screw hole (not shown) of the rubber plate 275 and the bottom plate 242 of the body 24, so that the ultrasonic oscillation unit 23 is fixed to the body 24. become.
In addition, as shown in FIG. 2, the outer peripheral surface of the root 270 of the third columnar portion 27 is not in direct contact with the body portion 24.
In addition, as shown in FIG. 4, the ultrasonic water injection device 2 may be configured not to include the body 24, the connecting plate 274, and the rubber plate 275. In this case, the ultrasonic oscillator 23 is bonded and fixed to the lower end surface of the water reservoir 20 via the rubber plate 263.

In the ultrasonic oscillation unit 23, there is a node portion of a wavelength called a node point where the amplitude in the Z-axis direction becomes zero. Then, the ultrasonic water spraying device 2 includes the first cylindrical portion 25, the second cylindrical portion 26, and the first cylindrical portion 25, which constitute the ultrasonic oscillating portion 23, and the longitudinal lengths and inner diameters of the water reservoir 20 and the body 24. By setting the length and diameter of the cylindrical portion 27 in the longitudinal direction to a predetermined size, the first cylindrical portion 25 is housed in the water reservoir 20, and the side wall 200 forming the water reservoir 20 is connected to the ultrasonic oscillator 23. Is connected to a portion where the ultrasonic vibration becomes zero in the longitudinal direction (Z-axis direction). In the present embodiment, the side wall of the body 24 is connected to a portion where the ultrasonic vibration becomes zero in the longitudinal direction (Z-axis direction) of the ultrasonic oscillator 23.
In the ultrasonic water jetting device 2 without the body portion 24 shown in FIG. 4, similarly, the first cylindrical portion 25 is housed in the water reservoir 20, and the side wall 200 forming the water reservoir 20 is formed by the ultrasonic oscillator. 23 is connected to a portion where the ultrasonic vibration becomes zero in the longitudinal direction (Z-axis direction).

For example, the length of the first cylindrical portion 25 of the ultrasonic water injection device 2 shown in FIG. 2: the length of the second cylindrical portion 26: the length of the third cylindrical portion 27: the length of the third cylindrical portion 27 The length of the root 270 = 56.5: 57.1: 59.0: 9.0.
Also, the diameter of the first cylindrical portion 25: the diameter of the second cylindrical portion 26: the diameter of the third cylindrical portion 27: the diameter of the root 270 of the third cylindrical portion 27: the diameter of the fourth cylindrical portion 28 = 25: 45: 25: 42: 42.
The ratio of the length of each of the cylindrical portions and the ratio of the diameter of each of the cylindrical portions is an example, and is not limited thereto. For example, the end portion of the outer peripheral surface of the root 250 of the first cylindrical portion 25 may be widened. Also changes depending on the angle of the R-shaped inclination.

  FIG. 2 also shows a vibration distribution indicating the intensity of the ultrasonic wave in the ultrasonic oscillation unit 23. The vibration (vibration in the Z-axis direction) generated by the ultrasonic vibration plate 29 is amplified by being resonated by the third cylindrical portion 27 which is a booster, and transmitted to the second cylindrical portion 26. In FIG. 2, (B) shows the position of the antinode in the ultrasonic vibration, and (A) shows the position of the node (the position of the node point) in the ultrasonic vibration. That is, the position of the antinode has the maximum amplitude in the Z-axis direction (the maximum ultrasonic vibration), and the position of the node has the minimum amplitude in the Z-axis direction (the minimum ultrasonic vibration).

  Further, the ultrasonic vibration transmitted from the second columnar portion 26 to the first columnar portion 25 is also amplified in the first columnar portion 25, and is amplified from the upper end surface of the first columnar portion 25 to the water reservoir 20. Of water.

  The ultrasonic water injection device according to the present invention is not limited to the ultrasonic water injection device 2, but may be an ultrasonic water injection device 2A shown in FIG. The ultrasonic water injection device 2A is obtained by changing a part of the configuration of the ultrasonic water injection device 2 shown in FIG. That is, unlike the ultrasonic oscillator 23 described above, the ultrasonic oscillator 23A of the ultrasonic water injection device 2A does not include the third columnar portion 27 serving as a booster. In accordance with this, the ultrasonic water jetting device 2 </ b> A does not include the body portion 24.

  In the ultrasonic water jetting device 2A, an ultrasonic vibration plate 29 is fixed to the free end surface 26a of the second cylindrical portion 26 by, for example, a fixing bolt 283. The ultrasonic vibration plate 29 may be brazed to the free end surface 26a of the second cylindrical portion 26. The second cylindrical portion 26 is bonded and fixed to the lower end surface (side surface in the −Z direction) of the side wall 200 of the water reservoir 20 via the rubber plate 263. Then, the first cylindrical portion 25 is housed in the water reservoir 20, and the side wall 200 forming the water reservoir 20 is connected to a portion where ultrasonic vibration becomes zero in the longitudinal direction (Z-axis direction) of the ultrasonic oscillator 23A. ing.

  FIG. 5 also shows a vibration distribution indicating the intensity of the ultrasonic wave in the ultrasonic oscillation unit 23A. In FIG. 5, (B) shows the position of the antinode in the ultrasonic vibration, and (A) shows the position of the node (the position of the node point) in the ultrasonic vibration. That is, the position of the antinode has the maximum amplitude (the maximum ultrasonic vibration), and the position of the node has the minimum amplitude (the minimum ultrasonic vibration).

The vibration (vibration in the Z-axis direction) generated by the ultrasonic vibration plate 29 of the ultrasonic oscillation unit 23A is transmitted to the second cylindrical part 26, and further amplified in the first cylindrical part 25 to be amplified in the first cylindrical part 25. The water propagates from the upper end surface of the cylindrical portion 25 to the water in the water reservoir 20.
In addition, as described above, the amplitude of the ultrasonic vibration is increased or decreased even in the first cylindrical portion 25 by setting each dimension of the first cylindrical portion 25 to an appropriate length and an appropriate diameter. Although it is possible as described above, the amplitude of the ultrasonic vibration can be adjusted over a wider range by providing the third cylindrical portion 27 serving as a booster as in the ultrasonic water injection device 2 shown in FIG. It becomes possible.

The operation of the grinding device 1 and the operation of the ultrasonic water jet device 2 when the workpiece W held by the holding means 3 is ground by the grinding device 1 shown in FIG. 1 will be described below.
The workpiece W shown in FIG. 1 is, for example, a semiconductor wafer having an outer shape of a circular plate, and a back surface Wb of the workpiece W is a ground surface to be ground. The front surface Wa of the workpiece W on which devices and the like are formed is protected by attaching a protection tape (not shown).

  First, in the attachment / detachment area, the workpiece W is placed on the holding surface 30a of the holding means 3 so that the back surface Wb is on the upper side. Then, a suction force generated by a suction source (not shown) is transmitted to the holding surface 30a, and the holding means 3 suction-holds the workpiece W on the holding surface 30a.

  Next, the holding means 3 holding the workpiece W moves in the + Y direction from the attachment / detachment area to below the grinding means 7 in the grinding area, and the workpiece W is positioned at a predetermined position with respect to the grinding wheel 740. . The positioning is performed, for example, such that the rotation center of the grinding wheel 740 is horizontally shifted by a predetermined distance with respect to the rotation center of the workpiece W, and the rotation locus of the grinding wheel 740 passes through the rotation center of the workpiece W. Done. Further, the motor 72 drives the rotation shaft 70 to rotate, and accordingly, the grinding wheel 74 also rotates. The grinding unit 7 is fed in the −Z direction by the grinding feed unit 5, and the rotating grinding wheel 740 comes into contact with the back surface Wb of the workpiece W to perform grinding. During the grinding, the workpiece W held on the holding surface 30a also rotates as the holding means 3 rotates, so that the grinding wheel 740 performs the entire grinding of the back surface Wb of the workpiece W. .

  As shown in FIG. 6, during the grinding, the injection port 21 which is the upper end of the ultrasonic water injection device 2 is placed on the ground surface (lower end surface) of the grinding wheel 740 protruding from the workpiece W being ground. opposite. Then, the washing water is supplied from the water supply source 22 to the water reservoir 20 of the ultrasonic water injection device 2 at a predetermined flow rate. In the water reservoir 20, water is injected from the injection port 21 in the + Z direction, and water is constantly stored in the water reservoir 20 by a predetermined amount.

  Further, when high-frequency power having a frequency of, for example, 16 kHz to 80 kHz is supplied to the ultrasonic vibration plate 29 from the power supply 295, an AC voltage is applied to the ultrasonic vibration plate 29, and the ultrasonic vibration plate 29 is moved in the Z-axis direction. Vibrates.

  As described above, the ultrasonic vibration plate 29 amplifies the oscillated ultrasonic vibration before reaching the first cylindrical portion 25 and propagates the water from the upper end surface of the first cylindrical portion 25 to the water in the water reservoir 20. I do. As a result, the water injected from the injection port 21 becomes ultrasonic water accompanied by ultrasonic vibration. The ultrasonic vibration is generated within a predetermined range of the ultrasonic water jetting direction (for example, a range of several millimeters to several tens of millimeters in width from the injection port 21 in the + Z direction). For example, the position of the ultrasonic water injection device 2 in the Z-axis direction may be made variable by a moving unit (not shown) so that the grinding surface of the grinding wheel 740 is located in the intermediate region of the predetermined range.

  Since the ultrasonic vibration is propagated to the water jetted from the ultrasonic water jetting device 2 to the grinding surface of the grinding wheel 740, not only large dirt such as grinding dust clogged on the grinding surface of the grinding wheel 740, but also For example, it is possible to grind the workpiece W to a desired grinding thickness while maintaining the grinding force of the grinding wheel 740 by also removing grinding debris that has penetrated from the grinding surface to the inside of the grinding wheel due to the grinding of the grinding wheel 740. it can.

As described above, the ultrasonic water jetting device 2 according to the present invention shown in FIGS. 2 and 6 or the ultrasonic water jetting device 2A shown in FIG. 5 has a cylindrical shape for temporarily storing water supplied from the water supply source 22. A water reservoir 20, a jet 21 for injecting water from one end of the water reservoir 20, and a water in the water reservoir 20 disposed at the other end of the water reservoir 20 facing the jet 21. An ultrasonic oscillator 23 for transmitting ultrasonic vibrations, wherein the ultrasonic oscillator 23 is connected to the first cylindrical portion 25 and the first cylindrical portion 25 with the same central axis as the first cylindrical portion. A second cylindrical portion having a diameter larger than the diameter of the portion; and an ultrasonic vibration plate disposed on a free end side of the second cylindrical portion; The ultrasonic vibration is reduced to zero in the longitudinal direction of the ultrasonic oscillating section 23 by holding the side wall 200 forming the water basin 20. Since the is connected to a portion, ultrasonic vibration of a large amplitude can be propagated in water. In addition, it is possible to remove water that has propagated ultrasonic vibration having a large amplitude onto a grinding wheel 740, which is an object to be cleaned, to remove large dust such as grinding dust that could not be removed by a conventional ultrasonic nozzle. Become.
As shown in FIG. 2, in the ultrasonic water injection device 2, the side wall of the body portion 24 is also connected to a portion where the ultrasonic vibration becomes zero in the longitudinal direction (Z-axis direction) of the ultrasonic oscillator 23. Therefore, the ultrasonic vibration plate 29 transmits ultrasonic waves having a large amplitude to the water, and fine bubbles are generated in the water by cavitation, thereby improving the cleaning effect.

The ultrasonic water injection device according to the present invention is not limited to the above three examples, and the ultrasonic water injection device 2 shown in the accompanying drawings and the ultrasonic water injection device without the body 24 are not shown. The shape, size, and the like of each component of the device 2 and the ultrasonic water injection device 2A are not limited thereto, and can be appropriately changed as long as the effects of the present invention can be exhibited.
In the above embodiment, the lower surface of the grinding wheel 740 is used as the object to be cleaned. However, ultrasonic water is sprayed from the ultrasonic water spray device according to the present invention onto the upper surface of a workpiece such as a wafer held on a holding table. Then, the upper surface of the workpiece may be cleaned.

1: grinding device 10: base 11: column 3: holding means 30: suction unit 31: frame body 39: cover
5: Grinding feed means 50: Ball screw 51: Guide rail 52: Motor 53: Elevating plate 7: Grinding means 70: Rotating shaft 71: Housing 72: Motor 73: Mount
74: grinding wheel 75: holder 2: ultrasonic water injection device 20: water reservoir 200: side wall 200a: water supply port 21: injection port
24: body part 240: entrance 23: ultrasonic oscillation part
25: 1st column part
26: second cylindrical portion 263: rubber plate 27: third cylindrical portion 274: connecting plate 275: rubber plate 277: connecting screw 28: fourth cylindrical portion 283: fixing bolt 29: ultrasonic vibration plate 291: first 1st piezoelectric element 292: 2nd piezoelectric element 293: Wiring 295: Power supply 2A: Ultrasonic water injection device

Claims (2)

An ultrasonic water injection device that injects water propagated by ultrasonic vibration,
A cylindrical water reservoir for temporarily storing water supplied from a water supply source, an injection port for injecting water from one end of the water storage, and the other of the water storage opposed to the injection port. An ultrasonic oscillator that is disposed on the end side and propagates ultrasonic vibration to water in the water reservoir,
The ultrasonic oscillating portion includes a first columnar portion, a second columnar portion having the same central axis as the first columnar portion, and having a diameter larger than the diameter of the first columnar portion. An ultrasonic vibration plate disposed on the free end side of the second cylindrical portion,
Ultrasonic water injection wherein the first cylindrical portion is accommodated in the water reservoir, and a side wall forming the ultrasonic water injection device is connected to a portion where ultrasonic vibration is zero in the longitudinal direction of the ultrasonic oscillation portion. apparatus.   The ultrasonic water injection device according to claim 1, wherein high-frequency power of 16 kHz to 80 kHz is supplied to the ultrasonic vibration plate.

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