JP2020015942A - Plating apparatus - Google Patents

Abstract

To provide a plating apparatus that can exhaust electrolyte more inside a pipe arrangement compared to the case in which an exhaust port for exhausting gas is formed on the upper side of the cross section of the pipe arrangement.SOLUTION: A plating apparatus 10 comprises: a plating tank 12 including an electrolyte L in which a plurality of belts B arranged in one direction, whose surfaces have conductivity, and a plurality of metals M arranged oppositely to each of the belts B along the same direction are immersed; a power supply for applying a voltage between the belt B and the metal M; a pipe arrangement 82, in which air A flows, extending in the same direction below the belt; and a plurality of exhaust ports 90 for gas A, which are formed below the pipe arrangement 82 corresponding to each of the belts B.SELECTED DRAWING: Figure 11

Description

  The present invention relates to a plating apparatus.

  Patent Literature 1 discloses that a soluble or insoluble anode is used in a plating tank containing a copper sulfate plating bath containing an organic additive, an object to be plated is used as a cathode, and the plating bath overflows from the plating tank to the overflow tank. The plating bath in the tank is returned to the plating tank, and an oxidizing decomposition tank is provided.The plating bath is returned from the oxidizing decomposition tank to the plating tank via the overflow tank, and the plating bath is returned between the plating tank and the oxidizing decomposition tank. Circulating, immersing metallic copper in the plating bath in the oxidative decomposition tank, and subjecting the metallic copper to air bubbling to subject it to a treatment to oxidatively decompose the decomposed / modified organic products generated during electrolytic copper plating, A method for continuously electroplating copper on an object is disclosed.

JP 2009-030118 A

  An object of the present invention is to provide a plating apparatus that discharges a larger amount of an electrolytic solution inside a pipe than when a discharge port for discharging a gas is formed above a cross section of the pipe.

  The plating apparatus according to the first aspect includes a plurality of base materials having at least a surface having conductivity and arranged along one direction, and a plurality of base materials arranged facing each base material along the one direction. A metal, a bath having an electrolyte immersed therein, a power supply for applying a voltage between the base material and the metal, a pipe extending in one direction below the base material and flowing gas, And a plurality of gas outlets formed below the pipe corresponding to the respective substrates.

  In the plating apparatus of the second embodiment, the outlet is formed in a range of 0 to 50 degrees with respect to a perpendicular extending downward from the center of the cross section of the pipe.

  In the plating apparatus of the third mode, the outlet is formed in a range of 20 to 50 degrees with respect to a perpendicular extending downward from the center of the cross section of the pipe.

  A plating apparatus according to a fourth aspect is provided with a liquid pipe extending along the pipe and through which the electrolytic solution flows, and a container provided at one end of the tank in the one direction to recover the electrolytic solution from the tank. A pump for pumping the electrolytic solution from the container toward the liquid tube, and a plurality of discharge ports for the electrolytic solution formed in the liquid tube corresponding to the respective base materials, wherein And the discharge port located near the other end in the one direction.

  In the plating apparatus according to a fifth aspect, each of the outlets is located closer to the other end in the one direction with respect to the corresponding substrate, and the outlet is closer to the substrate than the outlet. It is provided in.

  In a plating apparatus according to a sixth aspect, the liquid tube is provided between the base and the metal in a plan view of the tank, and the discharge port corresponding to one of the bases is provided on the base side. And the metal side.

  In the plating apparatus of the seventh aspect, in the liquid tube, the discharge ports at both ends in one direction have a larger opening area than the discharge ports at the center in one direction.

  In the plating apparatus according to the eighth aspect, a plurality of the liquid tubes are arranged, and the terminal ends of the liquid tubes are connected.

  In the plating apparatus according to the ninth aspect, an adjustment valve for adjusting the flow rate of the electrolytic solution is provided for each of the plurality of liquid tubes.

  In the plating apparatus according to the tenth aspect, the gas is pumped from both ends of the pipe in the one direction.

  In a plating apparatus according to an eleventh aspect, pressure regulating valves for adjusting the pressure of the gas are provided in the introduction pipes connected to both ends of the pipe in the one direction.

  The twelfth aspect of the plating apparatus further includes additional ports provided outside the discharge ports at both ends in the one direction in the pipe, and formed below a cross section of the pipe.

  In a plating apparatus according to a thirteenth aspect, the anode is provided at the power supply, and is connected between the cathode of the power supply and the base material, and returns to the power supply from the base material. A control unit for controlling the current to a predetermined value.

  In the plating apparatus according to the fourteenth aspect, the control unit controls the current for each of the base materials.

  The plating apparatus according to the fifteenth aspect includes a rotating unit that rotates the substrate.

  In a plating apparatus according to a sixteenth aspect, the rotating section includes a brush having a plurality of contacts.

  According to the plating apparatus of the first embodiment, it is possible to discharge a larger amount of the electrolytic solution inside the pipe than in the case where the discharge port for discharging gas is formed above the cross section of the pipe.

  According to the plating apparatus of the second embodiment, more electrolyte is discharged from the inside of the pipe than in a case where the outlet is formed in a range of 50 to 90 degrees with respect to a perpendicular extending downward from the center of the cross section of the pipe. be able to.

  According to the plating apparatus of the third aspect, the electrolytic solution in the pipe is discharged more in comparison with the case where the discharge port is formed in the range of 0 to 20 degrees with respect to the perpendicular extending downward from the center of the cross section of the pipe. can do.

  According to the plating apparatus of the fourth aspect, it is possible to suppress the variation in the thickness of the plating layer for each base material, as compared with the case where each discharge port is arranged closer to the container with respect to the corresponding base material. .

  According to the plating apparatus of the fifth aspect, each discharge port is formed on each base material as compared with a case where each discharge port is disposed closer to the container with respect to the corresponding base material or farther than the discharge port to be combined. Variations in the thickness of the plating layer in the vertical direction can be suppressed.

  According to the plating apparatus of the sixth aspect, the variation in the thickness of the plating layer for each substrate can be suppressed as compared with the case where the electrolytic solution is supplied from each discharge port only to the substrate side.

  According to the plating apparatus of the seventh aspect, the discharge amount of the electrolytic solution at the discharge ports at both ends of the liquid pipe is lower than that at the center of the liquid pipe as compared with the case where the opening areas of the respective discharge ports are all equal. Can be suppressed.

  According to the plating apparatus of the eighth aspect, when a plurality of liquid tubes are arranged, variation in the flow rate of the electrolytic solution in each liquid tube is suppressed as compared with the case where the terminal end of the liquid tube is sealed. Can be.

  According to the plating apparatus of the ninth aspect, it is possible to adjust the variation in the flow rate of the electrolytic solution due to the difference in the shape and the path of the liquid tube, as compared with the case where the adjusting valve common to each liquid tube is provided.

  According to the plating apparatus of the tenth aspect, compared to the case where the terminal end of the pipe is sealed and gas is pumped from one end, the plating layer between the one-directional end and the center of each base material is formed. Variation in thickness can be suppressed.

  According to the plating apparatus of the eleventh aspect, it is possible to adjust the variation in the gas pressure due to the difference in the shape and route of the pipe and the introduction pipe, as compared with the case where a common pressure regulating valve is provided for each of the introduction pipes.

  According to the plating apparatus of the twelfth aspect, the amount of the electrolytic solution remaining in the pipe can be further reduced as compared with the case where only the outlet is provided in the pipe.

  According to the plating apparatus of the thirteenth aspect, the variation in the thickness of the plating layer formed on the base material surface can be suppressed as compared with the case where the current output from the power supply to the metal is controlled.

  According to the plating apparatus of the fourteenth aspect, the variation in the thickness of the plating layer for each base material can be suppressed as compared with the case where the current flowing for each base material is controlled collectively.

  According to the plating apparatus of the fifteenth aspect, it is possible to suppress variations in the thickness of the plating layer formed on the surface of the base material in the circumferential direction, as compared with the case where the base material is stationary in the circumferential direction.

  According to the plating apparatus of the sixteenth aspect, it is possible to suppress a change in the current value when the contact is corroded, as compared with the case where the brush has only one contact.

It is a top view of the plating device concerning an embodiment. FIG. 2 is a side sectional view (a sectional view taken along line 2-2 in FIG. 1) of the plating apparatus according to the embodiment. FIG. 2 is a cross-sectional view of a rotating unit in the plating apparatus according to the embodiment. It is a front view of a brush provided in a rotation unit of an embodiment. FIG. 3A is a perspective view of a terminal provided on the anode basket of the embodiment, and FIG. It is the plating apparatus concerning embodiment, Comprising: (A) The conceptual diagram of a power supply circuit, and (B) The conceptual diagram of a control part. It is a plating apparatus concerning an embodiment, and is a top view explaining a circulation device. FIG. 8 is a cross-sectional view (a cross-sectional view taken along line 8-8 in FIG. 7) of a liquid pipe including a discharge port in the circulation device of the embodiment. It is a plating apparatus concerning an embodiment, and is a top view explaining an aeration apparatus. In the aeration apparatus of the embodiment, (A) a cross-sectional view of a pipe including an exhaust port (a cross-sectional view taken along line 10A-10A in FIG. 9), and (B) a cross-sectional view of a pipe including an additional port (10B-10B in FIG. 9). FIG. It is a figure explaining an operation of a circulation device and an aeration device in a plating device concerning an embodiment, and is a figure which expanded (A) a top view and a (B) side sectional view. FIG. 9 is a cross-sectional view of a modification of the plating apparatus according to the embodiment, illustrating a driven portion of a rotating unit.

An example of a plating apparatus according to an embodiment of the present invention will be described with reference to the drawings. In addition, the arrow H shown in each figure shows the apparatus vertical direction, the arrow W shows the apparatus width direction, and the arrow D shows the apparatus depth direction. Further, in the apparatus depth direction, a side on which an overflow tank 13 described later is disposed is defined as a rear side, and a side facing the overflow tank 13 is defined as a near side. Note that the apparatus depth direction corresponds to one direction of the present invention.
Furthermore, when a numerical range is described using “to”, numerical values before and after “to” are included as the lower limit and the upper limit.

(Constitution)
The plating apparatus 10 according to the present embodiment includes, for example, a metal layer (hereinafter, referred to as a “plating layer”) formed by electrolytic plating on a surface of a polyimide belt (hereinafter, referred to as a “belt”) B for a fixing device of an image forming apparatus. ) Is formed. The belt B is an example of a base material.

  As shown in FIGS. 1, 2, and 6 (A), the plating apparatus 10 includes a plating tank 12, a rotating unit 20, an anode basket 40, a power supply device 100, a control unit 120, and a circulation device 60. And an aeration device 80. Here, the plating tank 12 is an example of a tank, the rotating unit 20 is an example of a rotating unit, the anode basket 40 is an example of a basket, and the power supply device 100 is an example of a power supply.

  The plating bath 12 stores a plating solution L, which is an example of an electrolytic solution. In the plating tank 12, a belt B and an anode basket 40 containing a metal M described later are immersed. As shown in FIG. 1, an overflow tank 13, which is a container smaller than the plating tank 12, is provided on an outer wall surface of the plating tank 12 on one end side in the apparatus depth direction. The overflow tank 13 and the plating tank 12 are connected by a rectangular opening 14 formed in the wall of the plating tank 12. When the level of the plating solution L in the plating tank 12 reaches the opening 14, it flows into the overflow tank 13. That is, the overflow tank 13 has a function of defining the upper limit of the level of the plating solution L in the plating tank 12 and collecting the plating solution L overflowing from the plating tank 12. A circulation pipe 66 described later is connected to the bottom of the overflow tank 13.

  Above the apparatus of the plating tank 12, a prismatic rod-shaped anode bus 16 extending in the apparatus depth direction is provided along the inner wall surface of the plating tank 12 in the apparatus width direction outside. The anode bath 16 is provided on both sides of the plating tank 12 in the apparatus width direction. A conductive and net-shaped anode basket 40 is suspended from the anode bath 16.

  The rotation unit 20 is an example of a rotation unit. As shown in FIG. 2, a total of ten rotating units 20 are provided in the plating tank 12, two rows in the apparatus width direction and five rows in the apparatus depth direction. As shown in FIG. 1, on one side (upper side in the drawing) of the rotation unit 20, the intervals determined in the order of the rotation units 20A, 20B, 20C, 20D, and 20E from the near side to the far side. It is arranged in. The rotating units 20 are arranged at predetermined intervals in the order of the rotating units 20F, 20G, 20H, 20I, and 20J from the near side to the far side on the other side in the apparatus width direction (the lower side in the drawing). . In the following description, when there is no need to distinguish between the rotary units 20, "A" to "J" at the end of the reference numerals are omitted (the anode basket 40, the discharge port 70, the discharge port 90, the first input unit). 132 and the second input unit 134).

  As shown in FIG. 3, the rotation unit 20 includes a driven unit 22 that extends in the vertical direction of the apparatus, to which the belt B is fixed, and a driving unit 30 that drives the driven unit 22 to rotate. I have. The belt B is a cylindrical body that extends in the vertical direction of the apparatus when fixed to the rotating unit 20.

  The driven portion 22 includes a cylindrical holding portion 24, an upper supporting portion 25 for supporting an upper portion of the holding portion 24, a lower supporting portion 26 for supporting a lower portion of the holding portion 24, and a columnar metal extending in the vertical direction of the apparatus. It includes a rod 27 and a holder 29 provided on the upper end of the upper support 25. The holding portion 24 is an insulating pipe, and is made of vinyl chloride or polycarbonate in the present embodiment. The length of the holding portion 24 in the vertical direction of the device is equal to or slightly longer than the length of the belt B. The holding unit 24 holds the belt B at the outer periphery. The driven part 22 has at least a part including the holding part 24 immersed in the plating solution L.

  The upper support 25 is a conductor component, and is made of stainless steel in the present embodiment. The holding portion 24 is an inverted T-shaped and cylindrical member in a sectional view. In the upper support portion 25, the outer diameter of the main body portion 210 below the device is slightly larger than the outer diameter of the holding portion 24, and the outer diameter of the extension portion 212 above the device is smaller than the outer diameter of the holding portion 24. The upper support portion 25 has a through-hole 214 formed in the axial center portion so as to penetrate in the vertical direction of the device. At the upper end of the belt B held by the holding portion 24, an insulating adhesive tape T is wound so as to straddle the boundary between the outer peripheral portion of the main body 210 and the belt B.

  A plurality of leaf spring portions 216 extending toward the holding portion 24 are provided on the outer peripheral portion of the main body portion 210. The leaf spring portion 216 is a conductor, and is made of the same stainless steel as the upper support portion 25. The plate spring portion 216 has a ring portion at the upper end of the apparatus fixed to the main body 210, and the lower side of the apparatus can be displaced in the radial direction. In a state where the upper supporting portion 25 supports the holding portion 24, the plate spring portion 216 presses the belt B on the lower side of the apparatus. Thus, the belt B is electrically connected to the upper support 25. The upper support 25 is an example of an electrode provided at an end of the belt B.

  The lower support portion 26 is a conductive component, and is made of stainless steel in the present embodiment. The lower support portion 26 is a T-shaped and columnar member in a sectional view. In the lower support portion 26, the outer diameter of the main body 220 above the device is slightly larger than the outer diameter of the holding portion 24, and the outer diameter of the extension portion 222 below the device is smaller than the outer diameter of the holding portion 24. The lower support portion 26 has an insertion hole 224 formed on the upper surface of the main body 220 toward the lower side of the apparatus. At the lower end of the belt B held by the holding unit 24, an adhesive tape T is wound so as to straddle the boundary between the outer peripheral portion of the main body 220 and the belt B.

  A plurality of leaf spring portions 226 extending toward the holding portion 24 are provided on an outer peripheral portion of the main body portion 220. The leaf spring portion 226 is a conductor, and is made of the same stainless steel as the lower support portion 26. The plate spring portion 226 has a ring portion at the lower end of the device fixed to the main body portion 220, and the upper portion of the device can be displaced in the radial direction. In a state where the lower supporting portion 26 supports the holding portion 24, the plate spring portion 226 presses the belt B on the upper side of the apparatus. As a result, the belt B is electrically connected to the lower support portion 26. The lower support 26 is an example of an electrode provided at an end of the belt B.

  The metal rod 27 is a conductive rod that penetrates through the axial portions of the upper support 25 and the holder 24 in the vertical direction of the device. Here, the metal rod 27 of the present embodiment is made of copper. The metal bar 27 is an example of a wiring. Since the outer diameter of the metal rod 27 is smaller than the inner diameter of the through hole 214 and the inner diameter of the holding part 24, the metal rod 27 does not come into contact with the upper support part 25 and the holding part 24. A collar 28 made of a resin, which is an insulator, is provided between the metal bar 27 and the upper support 25 on the upper side of the driven unit 22. Further, the metal bar 27 is fitted into the insertion hole 224 of the lower support portion 26. Therefore, the metal bar 27 is not electrically connected to the upper support 25 but is electrically connected to the lower support 26.

  The holder 29 is a substantially cylindrical member. The upper end of the holder 29 is fixed to an outer shaft portion 310 of the shaft portion 31 which will be described later.

  The drive unit 30 has a substantially cylindrical shaft portion 31, a plurality of bearings 32 rotatably supporting the shaft portion 31, a gear portion 33 for transmitting rotational power, and an input portion 130 of a control unit 120 described later. A brush 34 that is electrically connected to the driven portion 22 and a holding portion 36 that is a connection portion with the driven portion 22. The drive unit 30 includes a box-shaped case 38, and the shaft 31, the bearing 32, the gear 33, and the brush 34 are housed in the case 38. The case 38 is fixed above the plating tank 12.

  The shaft portion 31 includes a cylindrical outer shaft portion 310 provided radially outside, a cylindrical inner shaft portion 312 provided substantially radially in a cross-sectional view, and an outer shaft portion 310 and a cylindrical outer shaft portion 310. And an intermediate portion 314 provided between the shaft portions 312. Here, the outer shaft portion 310 and the inner shaft portion 312 are conductors, and the intermediate portion 314 is an insulator. As an example, the outer shaft portion 310 and the inner shaft portion 312 are both made of stainless steel, and the intermediate portion 314 is made of resin. Therefore, the outer shaft 310 and the inner shaft 312 are insulated. The shaft portion 31 has an inner shaft portion 312 exposed on the outer periphery on the upper side of the device, and the outer shaft portion 310 is exposed on the outer periphery on the lower side of the device.

  The bearing 32 rotatably supports the shaft 31 with respect to the case 38. The bearing 32 has a first bearing 320 that is a radial bearing that supports the shaft portion 31 above the device and a second bearing 322 that is a radial bearing that supports the shaft portion 31 below the device. The bearing 32 has a third bearing 324 that is a thrust bearing that supports the lower end of the shaft portion 31 on the lower side of the device than the second bearing 322.

  The gear portion 33 is provided between the first bearing 320 and the second bearing 322 in the vertical direction of the device. The gear portion 33 has a worm 330 connected to a driving device (not shown) and a worm wheel 332 fixed to the outer peripheral portion of the outer shaft portion 310. When the driving device is operated, the gear unit 33 rotates the shaft unit 31 and the driven unit 22 connected to the shaft unit 31.

  The brush 34 has a first brush 340 provided between the first bearing 320 and the worm wheel 332 in the vertical direction of the device, and a second brush 342 provided on the device upper side of the first bearing 320. I have. The first brush 340 is in contact with the outer peripheral portion of the outer shaft portion 310, and the second brush 342 is in contact with the outer peripheral portion of the inner shaft portion 312. As shown in FIG. 4, each brush 34 is formed by plating the surface of a substantially E-shaped copper plate with platinum. That is, each brush 34 has a plurality of (three in this embodiment) contacts 35 with respect to the shaft portion 31.

  As shown in FIG. 3, the holding portion 36 is a substantially inverted U-shaped member provided in the lower end of the inner shaft portion 312 in a cross-sectional view, and is housed inside the holder 29. The holding portion 36 is fitted with a substantially cylindrical adapter 37 on the lower side of the device. The metal rod 27 is fitted into the adapter 37 from below the apparatus.

  As shown in FIG. 2, the anode basket 40 is longer in the vertical direction of the apparatus than the belt B, and is immersed in the plating solution L together with the belt B. As shown in FIG. 1, a total of ten anode baskets 40 are provided in the plating tank 12 in two rows in the apparatus width direction and five rows in the apparatus depth direction. Supplementally, the anode baskets 40 are arranged at predetermined intervals in the order of the anode baskets 40A, 40B, 40C, 40D, and 40E from the near side to the far side on one side (upper side in the drawing) in the device width direction. . The anode baskets 40 are arranged at predetermined intervals in the order of the anode baskets 40F, 40G, 40H, 40I, and 40J from the near side to the far side on the other side (lower side in the figure) in the device width direction. . Each anode basket 40 is provided to face the rotating unit 20 (the driven portion 22) in the width direction of the device. For example, in the device width direction, the anode basket 40A faces the driven portion 22 of the rotating unit 20A, and the anode basket 40F faces the driven portion 22 of the rotating unit 20F.

  As shown in FIG. 2, the anode basket 40 has a cylindrical and net-like housing portion 41 for housing the metal M to be ionized, and a substantially inverted J-shaped hook portion for suspending the housing portion 41 on the anode bath 16. 42. A terminal 50 described later is fixed to the hook portion 42 (see FIG. 5A).

  Here, the metal M accommodated in the accommodation portion 41 differs depending on the metal to be plated. For example, when copper plating is performed on the belt B, a copper ball is accommodated in the accommodating portion 41. Further, for example, when the nickel plating is applied to the belt B, the accommodation portion 41 accommodates nickel balls. In the housing section 41, the metal M is stacked so as to be longer than the length of the belt B.

  Further, in the anode basket 40 of the present embodiment, the outer peripheral portion of the housing portion 41 is covered with the anode bag 43 which is a cloth made of polyester. In FIG. 2, the anode basket 40 </ b> A partially penetrates the anode back 43 for explanation. According to the present embodiment, since the anode slime as an impurity does not flow out of the anode basket 40 into the plating tank 12, the roughness of the plating layer on the belt B is suppressed as compared with the case where the storage unit 41 is not covered with the anode back 43. Is done. Here, the anode slime refers to a residue that is not electrochemically dissolved when electrolysis is performed using a metal as an anode. The roughness refers to roughness (defects in the form of irregularities) formed when solid foreign particles in the plating tank enter the plating layer.

  Furthermore, in the anode basket 40 of the present embodiment, a part of the housing portion 41 covered by the anode back 43 is shielded by being covered by the anode mask 44 which is an insulator. For example, the anode mask 44 of the present embodiment is made of vinyl chloride. The anode mask 44 is an example of an insulator. The anode mask 44 has a cylindrical upper mask 46 that covers the accommodation unit 41 above the device, and a cylindrical lower mask 48 that covers the accommodation unit 41 below the device. The upper mask 46 is installed across the liquid surface of the plating solution L, and the lower mask 48 has a cylindrical lower end closed.

  The exposed portion of the housing portion 41 not covered by the anode mask 44 has the same range as the belt B in the vertical direction of the apparatus (see the dotted line portion in FIG. 2). That is, the position of the lower end of the upper mask 46 in the vertical direction of the apparatus is the same as the position of the upper end of the belt B on the upper side of the apparatus, and the position of the upper end of the lower mask 48 is lower than the lower side of the belt B. It is equivalent to the position of the side end. That is, in the storage section 41 of the anode basket 40 of the present embodiment, both sides in the vertical direction of the apparatus that do not face the belt B in the apparatus width direction are covered with the anode mask 44. Around the shielded part of the housing part 41 covered by the anode mask 44, the current emission to the exposed part is suppressed.

  The terminal 50 is a conductive member provided to secure an electrical connection between the anode 102 of the power supply device 100 and the anode basket 40. The terminal 50 of the present embodiment is made of copper. As shown in FIG. 5A, in the present embodiment, a crimp terminal 152 is provided at the tip of a cable 150 extending from the anode 102, and the terminal 50 is formed so that the crimp terminal 152 can be fixed. As shown in FIG. 5 (B), the terminal 50 has a groove 51 provided along the vertical direction of the device on the wall surface on one side (left side in the drawing) in the device depth direction. Further, the terminal 50 is formed alongside the first female screw portion 52 and the first female screw portion 52 formed in a through hole extending from the wall surface on one side (lower side in the drawing) toward the groove portion 51 in the device width direction. And a second female thread portion 53.

  A fixing bolt 54 plated with platinum is screwed into the first female screw portion 52. The fixing bolt 54 of the present embodiment is formed such that the distal end portion 55 comes into contact with a metal plate constituting the hook portion 42 when screwed into the first female screw portion 52. In the groove 51, the terminal 50 is fixed to the hook 42 by the metal plate constituting the hook 42 being sandwiched between the wall of the terminal 50 and the tip 55 of the fixing bolt 54.

  A crimping screw 56 plated with platinum is screwed into the second female screw portion 53. The crimping screw 56 of this embodiment is fixed to the terminal 50 by passing the shaft portion 57 through the hole of the crimping terminal 152 and then screwing it into the second female screw portion 53.

  When the anode bus 16 is hooked to the anode bus 16 and the anode bus 16 and the anode basket 40 are electrically connected to each other, the anode bath 16 and the hook 42 are corroded by the influence of the plating solution L. Resistance increases. On the other hand, by providing the terminal 50 of the present embodiment, the resistance from the anode 102 of the power supply device 100 to the anode basket 40 is reduced, and compared to the case where the hook portion 42 is hooked on the anode bus 16 to conduct electricity. Conduction can be stabilized.

  The power supply device 100 applies a voltage between the belt B fixed to the rotating unit 20 and the metal M housed in the housing 41 of the anode basket 40. The power supply device 100 is an example of a power supply.

  As shown in FIG. 6A, in power supply device 100, anode 102 is connected to anode basket 40 via cable 150 and terminal 50, and cathode 104 is connected to output unit 136 of control unit 120. Further, cables 151 extending from the respective rotation units 20 are connected to the input units 130 of the control unit 120, respectively. Specifically, the upper support 25 is connected to the first input unit 132 of the input unit 130 via the first brush 340 and the cable 151, and the lower support 26 is connected to the input unit 130 via the second brush 342 and the cable 151. It is connected to the second input unit 134. The first input unit 132 and the second input unit 134 are formed for each rotation unit 20. Although omitted in FIG. 6A, the first input unit 132 includes a first input unit 132A to a first input unit 132J, and the second input unit 134 includes a second input unit 134A to a second input unit. 134J.

In the plating apparatus 10 connected as described above, a power supply circuit in which current flows in the order of the following parentheses is formed. Note that two systems are formed from the belt B to the control unit 120.
(1) Power supply device 100, (2) anode 102, (3) cable 150, (4) terminal 50, (5) anode basket 40, (6) metal M, (7) plating solution L, (8) belt B ,
(9-1) Upper support 25, (10-1) Holder 29, (11-1) Outer shaft 310, (12-1) First brush 340, (13-1) Cable 151, (14-1) ) First input unit 132
(9-2-1) Lower support portion 26, (9-2-2) metal rod 27, (10-2-1) adapter 37, (10-2-2) holding portion 36, inside (11-2) Shaft section 312, (12-2) second brush 342, (13-2) cable 151, (14-2) second input section 134
(15) Control unit 120, (16) Output unit 136, (17) Cathode 104, (18) Power supply device 100

  The control unit 120 is provided between the cathode 104 and the belt B in the power supply circuit, and controls the current returning from the belt B to the power supply device 100 to a predetermined value. As described above, the control unit 120 of the present embodiment is connected to both ends of each belt B in the vertical direction of the apparatus.

  Further, the control unit 120 of the present embodiment can individually control the current values in the first input units 132A to 132J and the second input units 134A to 134J. For example, as shown in FIG. 6B, variable resistances (including a current control circuit using a semiconductor) are provided on circuits from each of the input units 130 to the output units 136 so that current values can be individually set. Can be controlled. Thus, for example, the current values of the respective belts B can be made uniform, or different current values can be set for each of the plurality of belts B. Although not shown in FIG. 6B, the circuit for controlling the current value is not limited to the first input unit 132A and the second input unit 134A, and the first input unit 132B to the first input unit 132J, and The second input unit 134B to the second input unit 134J are also provided.

  Further, in the present embodiment, a process execution unit 140 for executing a plating process is connected to the power supply device 100 and the control unit 120. The process execution unit 140 can apply the voltage between the belt B and the metal M by operating the power supply device 100 to execute the plating process. In addition, the processing execution unit 140 individually sets the current value of the current input to each input unit 130 of the control unit 120, output from the output unit 136 of the control unit 120, and fed back to the power supply device 100 in the control unit 120. I do. That is, the process execution unit 140 can manage the thickness of the plating layer of the belt B fixed to each rotating unit 20.

  The circulation device 60 circulates the plating solution L, which is an electrolytic solution, in the plating tank 12. As shown in FIG. 2, the circulation device 60 has a liquid pipe 62 installed along the device depth direction below the device of the rotating unit 20, that is, below the device of the belt B. As shown in FIG. 7, the liquid pipe 62 is provided between the belt B fixed to the rotating unit 20 and the anode basket 40 in a plan view. In addition, the liquid pipe 62 includes a first liquid pipe 62P installed below the rotation units 20A to 20E, and a second liquid pipe 62S installed below the rotation units 20F to 20J. have. Each of the liquid pipes 62 is provided with a discharge port 70 for discharging the plating solution L into the plating tank 12.

  The first liquid pipe 62P and the second liquid pipe 62S have inner ends connected by a connection pipe 63, and front ends connected to inflow pipes 64 extending outside the plating tank 12, respectively. The inflow pipe 64 has a first inflow pipe 64P connected to the first liquid pipe 62P, and a second inflow pipe 64S connected to the second liquid pipe 62S.

  Each inlet pipe 64 is provided with an adjusting valve 65 for adjusting the flow rate of the plating solution L flowing through the liquid pipe 62. For example, a ball valve or a needle valve made of resin is used as the adjustment valve 65. The adjusting valve 65 includes a first adjusting valve 65P provided on the first inflow pipe 64P for adjusting the flow rate of the first liquid pipe 62P, and a second inflow pipe for adjusting the flow rate of the second liquid pipe 62S. 64S, and a second regulating valve 65S provided at 64S.

  A circulation pipe 66 is connected between the inflow pipe 64 and the overflow tank 13. The circulation pipe 66 is connected to the first inflow pipe 64P at the first adjustment valve 65P, and is connected to the second inflow pipe 64S at the second adjustment valve 65S. In the circulation pipe 66, a pump 67 for pumping the plating solution L is provided between the overflow tank 13 and the inflow pipe 64. The pump 67 is provided with a filter for removing impurities in the plating solution L.

  As described above, according to the circulation device 60 of the present embodiment, the following circulation system relating to the plating solution L is formed. That is, the plating solution L is (1) plating tank 12, (2) overflow tank 13, (3) circulation pipe 66 (pump 67), (4) inflow pipe 64, (5) solution pipe 62, (6) plating Circulation is performed in the order of the tank 12. In the plating tank 12, the inflow pipe 64, which is on the near side, is upstream of the flow F of the plating solution L, and the overflow tank 13, which is on the back side, is downstream of the flow F.

  On the other hand, each liquid pipe 62 is provided with a pair of discharge ports 70 for discharging the plating solution L into the plating tank 12. Specifically, in the first liquid pipe 62P, discharge ports 70A to 70E are provided corresponding to the respective belts B fixed to the rotation units 20A to 20E. In the second liquid pipe 62S, discharge ports 70F to 70J are provided corresponding to the respective belts B fixed to the rotation units 20F to 20J.

  Each discharge port 70 is disposed on the front side of the corresponding belt B, that is, on the upstream side of the flow F of the plating solution L in plan view of the plating tank 12. For example, the discharge port 70B is located between the rotation unit 20A and the rotation unit 20B in the apparatus depth direction, and the discharge port 70C is located between the rotation unit 20B and the rotation unit 20C in the apparatus depth direction.

  The outlet 70 has an inner outlet 72 formed on the rotating unit 20 (belt B) side and an outer outlet 74 formed on the anode basket 40 (metal M) side. As shown in FIG. 8, each discharge port 70 is formed above the apparatus in a cross section of each liquid pipe 62. As an example, the inner discharge port 72 and the outer discharge port 74 are each formed at a position where the angle X of the center line with respect to a perpendicular extending upward from the center of the cross section of each liquid pipe 62 is 45 degrees.

  Further, in each liquid pipe 62, the inner diameter of the discharge ports 70 at both ends in the apparatus depth direction is larger than the inner diameter of the discharge ports 70 at the center side in the apparatus depth direction. Specifically, in the first liquid pipe 62P, the inner diameter of the discharge ports 70A and 70E is larger than the inner diameter of the discharge ports 70B, 70C and 70D. In the second liquid pipe 62S, the inner diameters of the discharge ports 70F and 70J are larger than the inner diameters of the discharge ports 70G, 70H and 70I. Supplementally, the opening area of the discharge ports 70 at both ends in the apparatus depth direction is set to be about 10% to 20% larger than the opening area of the discharge port 70 on the center side in the apparatus depth direction.

  The aeration device 80 supplies air A as a gas into the plating solution L. As shown in FIG. 2, the aeration apparatus 80 has a pipe 82 installed along the apparatus depth direction below the apparatus of the rotating unit 20, that is, below the apparatus of the belt B. As shown in FIG. 9, the pipe 82 has a first pipe 82P installed below the rotating units 20A to 20E and a second pipe 82P installed below the rotating units 20F to 20J. And two pipes 82S. The first pipe 82P is arranged along the first liquid pipe 62P, and the second pipe 82S is arranged along the second liquid pipe 62S (see FIGS. 1 and 2). Each pipe 82 is provided with a discharge port 90 for discharging air A toward the plating solution L in the plating tank 12.

  Inlet pipes 84 are connected to both ends of the first pipe 82P and the second pipe 82S in the apparatus depth direction. Specifically, a first introduction pipe 84P extending outside the plating tank 12 is connected to an end on the near side of the first pipe 82P and the second pipe 82S, and is located on the inner side of the first pipe 82P and the second pipe 82S. The second introduction pipe 84S extending outside the plating tank 12 is connected to the end. The second introduction pipe 84S extends to the near side, bypassing the outside of the plating tank 12.

  Each inlet pipe 84 is provided with a pressure regulating valve 86 for adjusting the pressure of the air A in the pipe 82. For example, a resin ball valve or a needle valve is employed as the pressure regulating valve 86. The pressure regulating valve 86 has a first pressure regulating valve 86P provided on the first introduction pipe 84P and a second pressure regulating valve 86S provided on the second introduction pipe 84S.

  Each of the introduction pipes 84 is connected to an air supply source (not shown) (for example, a compressor) via a connection pipe 87. Therefore, according to the aeration apparatus 80 of the present embodiment, the air A is discharged in the following flow. That is, the air A flows in the order of (1) the compressor, (2) the connecting pipe 87, (3) the introducing pipe 84, (4) the pipe 82, and (5) the plating tank 12. In the first pipe 82P and the second pipe 82S, the air A is pumped from both ends in the apparatus depth direction by the introduction pipe 84.

  On the other hand, each pipe 82 is provided with a pair of outlets 90 for discharging the air A into the plating tank 12. Specifically, in the first pipe 82P, outlets 90A to 90E are provided corresponding to each belt B of the rotating units 20A to 20E. In the second pipe 82S, discharge ports 90F to 90J are provided corresponding to the respective belts B of the rotation units 20F to 20J.

  Each discharge port 90 is arranged on the front side of the corresponding belt B, that is, on the upstream side of the flow F of the plating solution L in plan view of the plating tank 12. Further, based on each belt B, the discharge port 90 is provided closer to the belt B than the discharge port 70. For example, the discharge port 90B is located between the rotary unit 20A and the rotary unit 20B in the depth direction of the apparatus, and is disposed at a position closer to the rotary unit 20B than the discharge port 70B (see FIG. 1). The discharge port 90C is located between the rotary unit 20B and the rotary unit 20C in the depth direction of the apparatus, and is disposed at a position closer to the rotary unit 20C than the discharge port 70C (see FIG. 1).

  The discharge port 90 has an inner discharge port 92 formed on the rotating unit 20 (belt B) side and an outer discharge port 94 formed on the anode basket 40 (metal M) side. As shown in FIG. 10A, each outlet 90 is formed below the apparatus in a cross section of each pipe 82. As an example, each of the inner outlet 92 and the outer outlet 94 has a center line in a range of 0 to 50 degrees (angle Y) with respect to a perpendicular extending downward from the center of the cross section of each pipe 82, preferably 20 to 50 degrees. (Angle Z).

  Further, each of the pipes 82 is provided outside the discharge ports 90 at both ends in the apparatus depth direction, and has an additional port 96 formed below the apparatus in a cross section of each of the pipes 82. Specifically, the additional port 96 has an additional port 96P1 formed on the front side of the discharge port 90A, and an additional port 96P2 formed on the back side of the discharge port 90E. The additional port 96 has an additional port 96S1 formed on the near side with respect to the discharge port 90F, and an additional port 96S2 formed on the back side with respect to the discharge port 90J.

  As shown in FIG. 10B, the additional port 96 is preferably in a range of 0 to 50 degrees (angle Y) with respect to a perpendicular extending downward from the center of the cross section of the pipe 82, similarly to the inner discharge port 92. Is formed in the range of 20 to 50 degrees (angle Z). The opening area of the additional port 96 is set to be equal to or less than half of the sum of the opening area of the inner outlet 92 and the opening area of the outer outlet 94.

(Action)
In the plating apparatus 10 of the present embodiment, the belt B is plated by the following steps to produce a plated component.
The belt B is subjected to electroless nickel plating and strike copper plating on a polyimide substrate in a pretreatment step. Then, using the plating apparatus 10, electrolytic copper plating and electrolytic nickel plating are performed. After passing through this pretreatment step, the belt B has conductivity.

  First, the belt B that has undergone the pre-processing step is fixed to the rotation units 20A to 20J. Specifically, the operator sandwiches the holding unit 24 covered with the belt B between the upper support unit 25 and the lower support unit 26. Then, the worker fixes the belt B to the upper support portion 25 and the lower support portion 26 with the adhesive tape T. Further, the operator fixes the leaf spring 216 to the main body 210 at the upper support 25 and fixes the leaf spring 226 to the main body 220 at the lower support 26. Thus, the driven part 22 is assembled.

  Next, the operator fixes the holder 29 of the driven part 22 to the outer shaft part 310 of the driving part 30 (see FIG. 3). At this time, the adapter 37 connected to the tip of the metal bar 27 is fitted into the holding portion 36. As a result, the driven unit 22 is attached to the driving unit 30, and the rotating unit 20 is assembled.

  The rotating unit 20 to which the belt B is fixed is first stored in the plating tank 12 for copper plating. That is, each belt B is immersed in the copper plating solution. Next, each rotation unit 20 starts rotating, the circulation device 60 starts operating, and the aeration device 80 starts operating. Then, the power supply device 100 starts up, and a voltage is applied between the anode basket 40 containing copper balls as the metal M and the rotating unit 20 to which the belt B is fixed, so that copper plating starts as a plating step. Is done. During the plating process, the control section 120 connected between the cathode 104 of the power supply device 100 and the belt B controls the current value at a predetermined value. In addition, the circulation device 60 circulates the plating solution L in the plating tank 12, and the aeration device 80 performs bubbling on the belt B by discharging the air A from the discharge port 90.

  When the copper plating is completed, the rotating unit 20 is taken out of the plating tank 12 for copper plating, and then moved to the plating tank 12 for nickel plating. Each belt B is immersed in a nickel plating solution by being accommodated in the plating tank 12 for nickel plating. And nickel plating is started as a plating process like copper plating. The details of the process are the same as in the case of copper plating.

The operation and effect of the plating apparatus 10 of the present embodiment are summarized as follows.
(1) Function and Effect of Current Control In electrolytic plating, the value of the current flowing through the belt B depends on the momentum of the plating solution L and the molar concentration of metal ions. Therefore, when the value of the current flowing through the belt B varies depending on the state of the plating solution L, the thickness of the plating layer varies.

  Therefore, in the plating apparatus 10 of the present embodiment, the control unit 120 is provided in the current circuit in order to control the current returning from the belt B to the power supply apparatus 100. In the case of a power supply that controls the current on the output side (anode side) of a constant current power supply as in the plating apparatus of Patent Literature 1, the environmental change of the plating solution affects the current value as described above. On the other hand, according to the present embodiment, a change in the value of the current flowing through the belt B can be suppressed as compared with the case where the current is controlled on the output side from the power supply toward the metal. Thereby, the variation in the thickness of the plating layer formed on the substrate surface can be suppressed.

  Further, in the plating apparatus 10 of the present embodiment, plating can be applied to the plurality of belts B. The control unit 120 can control the current for each belt B. That is, according to the present embodiment, the variation in the thickness of the plating layer for each belt B can be suppressed as compared with the case where the current flowing for each belt B is controlled collectively.

  In the plating apparatus 10 of the present embodiment, the belt B is connected to the control unit 120 at both ends in the vertical direction of the apparatus, and the control unit 120 controls the current value separately. According to the present embodiment, the variation in the thickness of the plating layer formed on the surface of the belt B in the length direction of the belt B can be suppressed as compared with the case where the number of connection points to the control unit 120 is one. In the present embodiment, the electrodes are connected to both ends of the belt B. However, the present invention is not limited to this, and the electrodes may be connected at a plurality of positions in the length direction of the belt B.

  Here, in the plating apparatus 10 of the present embodiment, plating is performed on the cylindrical belt B. Therefore, the wiring from the control unit 120 to the lower end of the belt B can pass through the inside of the belt B. Specifically, in the present embodiment, by passing the metal rod 27 through the inside of the belt B, a circuit from the upper end of the belt B to the control unit 120 and a circuit from the lower end of the belt B to the control unit 120 are separated from each other. ing. According to the present embodiment, it is possible to easily increase the number of electrodes connected to the end of the belt B as compared with the case where the surface of the solid member is plated.

(2) Operation and Effect of Anode Mask In the anode basket 40 of the present embodiment, both sides in the vertical direction of the apparatus that do not face the belt B in the apparatus width direction are covered with the anode mask 44. Here, when the exposed portion of the anode basket 40 (the anode back 43) is longer than the length of the belt B, the current emission is larger at the upper and lower ends of the belt B than at the center. Therefore, it is conceivable that the plating layer grows more at the end of the belt B than at the center. On the other hand, according to the present embodiment, the plating layers at both ends of the belt B are larger than those of the other portions in comparison with a case where both sides of the anode basket 40 facing the belt B in the vertical direction of the device are exposed. Thickness can also be suppressed.

  In the present embodiment, the upper mask 46 is installed across the liquid surface of the plating solution L, and the lower mask 48 has a cylindrical lower end closed. Therefore, in the upper mask 46, the current emission from the upper side of the anode basket 40 in the device is suppressed, and in the lower mask 48, the current emission from the lower side of the anode basket 40 in the device is suppressed. That is, since the belt B receives the current radiation from the anode basket 40 in the horizontal direction, the increase in the current density at the end of the belt B (edge effect) can be suppressed. It can suppress that the thickness of a plating layer becomes thicker compared with.

(3) Functions and Effects of the Rotating Unit In the present embodiment, the rotating unit 20 that rotates the belt B is provided. In electrolytic plating, the speed of metal ions moving through the plating solution L depends on the molar concentration of the metal ions. Therefore, by increasing the surface area of the plating target, the molar concentration of the metal ions decreases around the plating target. For example, as in the present embodiment, in the belt B of the rotating unit 20A, a difference in metal ion concentration occurs between the anode basket 40A side and the rotating unit 20F side. Then, if a concentration difference occurs between metal ions in the plating tank 12, a difference also occurs in current density.

  Therefore, the following effects are obtained by rotating the belt B by the rotation unit 20 as in the present embodiment. That is, according to the present embodiment, the variation in the current density applied to the belt B is suppressed as compared with the case where the belt B is stationary in the circumferential direction. Thereby, the variation in the thickness of the plating layer formed on the surface of the belt B in the circumferential direction can be suppressed.

  Further, in the present embodiment, the brush 34 is provided on the rotating unit 20 so that the current flows while rotating the belt B. The brush 34 has a plurality of contacts 35 that are in contact with the shaft 31. According to the brush 34 of the present embodiment, by dividing the contact 35 into a plurality of parts, the corrosion of one contact 35 is prevented from spreading to other contacts 35. Thereby, the change in the current value when the contact 35 is corroded can be suppressed as compared with the case where the brush 34 has one contact.

(4) Function and Effect of Circulating Device The plating solution L in the plating tank 12 of the present embodiment flows in the depth direction of the device toward the overflow tank 13 side when viewed globally. The plating solution L collected in the overflow tank 13 is pumped to the liquid pipe 62 via the pump 67, and is again discharged into the plating tank 12 from the discharge port 70 provided for each rotation unit 20 in the liquid pipe 62. In the present embodiment, the discharge port 70 is located on the front side with respect to each belt B fixed to the corresponding rotary unit 20, that is, on the upstream side of the flow F of the plating solution L in plan view of the plating tank 12. .

  In the vicinity of the belt B on the most upstream side of the flow F, that is, around the belt B of the rotating unit 20A and the belt B of the rotating unit 20F, unless the plating solution L is discharged from the further upstream side, the vicinity of these belts B on the most upstream side The concentration of metal ions will decrease. On the other hand, according to the plating apparatus 10 of the present embodiment, each of the discharge ports 70 is provided to each of the belts B as compared with the case where each of the discharge ports 70 is disposed closer to the overflow tank 13 on the back side with respect to the corresponding belt B. The variation in the concentration of the metal ions to be performed can be suppressed. Thereby, variation in the thickness of the plating layer for each belt B is suppressed.

  Preferably, the position of the discharge port 70 in the depth direction of the apparatus is set upstream by the vector of the flow F of the plating solution L.

  In the circulation device 60 of the present embodiment, the liquid pipe 62 is provided between the belt B fixed to the rotating unit 20 and the metal M accommodated in the anode basket 40 in a plan view of the plating tank 12. The discharge port 70 corresponding to one belt B has an inner discharge port 72 on the rotating unit 20 (belt B) side and an outer discharge port 74 on the anode basket 40 (metal M) side. As shown in FIGS. 11A and 11B, locally, a flow f1 from the inner discharge port 72 to the belt B and a flow f2 from the outer discharge port 74 to the anode basket 40 occur. I have.

  Therefore, according to the plating apparatus 10 of the present embodiment, the plating solution L is supplied from each discharge port 70 not only to the belt B side but also to the metal M side, so that the metal generated from the metal M of each anode basket 40 is provided. Variation in ion concentration can be suppressed. Thereby, the variation in the thickness of the plating layer for each belt B is suppressed as compared with the case where the plating solution L is supplied only from the discharge ports 70 to the belt B side.

  In each liquid tube 62 of the present embodiment, the discharge ports 70 at both ends in the apparatus depth direction have a larger opening area by 10% to 20% than the discharge ports 70 at the center side in the apparatus depth direction. Specifically, in the first liquid pipe 62P, the inner diameter of the discharge ports 70A and 70E is larger than the inner diameter of the discharge ports 70B, 70C and 70D. In the second liquid pipe 62S, the inner diameters of the discharge ports 70F and 70J are larger than the inner diameters of the discharge ports 70G, 70H and 70I.

  In the first liquid pipe 62P, the plating solution L flowing from the first inflow pipe 64P sequentially reaches from the discharge port 70A to the discharge port 70E. Further, in the second liquid pipe 62S, the plating solution L flowing from the second inflow pipe 64S sequentially reaches from the discharge port 70F to the discharge port 70J. Here, in the discharge port 70 on the most upstream side (the discharge ports 70A and 70F), an ejector effect may be generated due to the flow rate of the plating solution L. At the most downstream discharge port 70 (discharge ports 70E and 70J), pressure reflection occurs at the end of the liquid pipe 62.

  Therefore, when the diameter of the discharge ports 70 is the same in each of the liquid pipes 62, the discharge amount may be lower at the discharge ports 70 at both ends in the apparatus depth direction than at the center in the apparatus depth direction. On the other hand, according to the plating apparatus 10 of the present embodiment, the discharge amount of the plating solution L at the discharge ports 70 at both ends of the liquid pipe 62 is smaller than when the opening areas of the respective discharge ports 70 are all equal. It is possible to suppress the lowering than the center side of the tube 62.

  Further, in the circulation device 60 of the present embodiment, two liquid pipes 62 are arranged in the plating tank 12, and the end portions of the respective liquid pipes 62 are connected by connection pipes 63.

  According to the plating apparatus 10 of the present embodiment, when a plurality of the liquid tubes 62 are arranged, the plating solution L in each liquid tube 62 is Can be suppressed. Even when the number of the liquid tubes 62 is three or more, the same operation and effect as in the present embodiment can be obtained by connecting the ends with one connecting pipe.

  Further, in the plating apparatus 10 of the present embodiment, an adjustment valve 65 for adjusting the flow rate is provided for each of the inflow pipes 64 corresponding to each of the liquid pipes 62. Thereby, in the present embodiment, the flow rate of the plating solution L can be individually adjusted in the first liquid pipe 62P and the second liquid pipe 62S. Then, according to the plating apparatus 10 of the present embodiment, the flow rate of the plating solution L due to the difference in the shape and the path of the solution pipe 62 and the inflow pipe 64 is different from the case where the adjustment valve common to each solution pipe 62 is provided. Variation can be adjusted.

  When the liquid pipe 62 is added, the same operation and effect as in the present embodiment can be obtained by providing the adjustment valve 65 corresponding to the added liquid pipe 62. Alternatively, the variation in the flow rate of each liquid pipe 62 may be adjusted by omitting the adjustment valve 65 corresponding to one liquid pipe 62 and adjusting the flow rate at the adjustment valves 65 corresponding to the remaining liquid pipes 62.

(5) Operation and Effect of Aeration Device In the aeration device 80 of the present embodiment, the pipe 82 through which the air A flows extends in the depth direction of the device and is disposed below the rotating unit 20, that is, below the belt B. The pipe 82 has, as a plurality of outlets 90 below the cross section, an inner outlet 92 formed on the rotating unit 20 (belt B) side and an outer outlet 94 formed on the anode basket 40 (metal M) side. And

  When the pipe 82 is submerged in the plating solution L, the inside of the pipe 82 is filled with the plating solution L before the air A is pumped. Here, when the discharge port is formed above the cross section of the pipe, the plating solution that could not be pushed out by the compressed air stays inside the pipe filled with the plating solution. Further, in the pipe in this case, the flow velocity of the air near the outlet on both sides in the apparatus depth direction is higher than the flow velocity near the outlet on the center side in the apparatus depth direction. This is because the flow path is narrowed by the plating solution in order to secure the air discharged from the discharge port on the center side in the apparatus depth direction. The ejector effect may be generated due to an increase in the air flow rate on both sides in the apparatus depth direction where the flow velocity of the air is higher than the center side in the apparatus depth direction. Then, there is a possibility that the generation of air bubbles during bubbling is reduced at the outlets on both sides in the apparatus depth direction than at the center outlet in the apparatus depth direction.

  Therefore, in the present embodiment, by forming the discharge port 90 below the cross section of the pipe 82, the plating solution L inside the pipe 82 can be discharged as compared with the case where the discharge port 90 is formed above the cross section. Thereby, it is possible to suppress the amount of bubbles of the air A at each outlet 90, that is, the deviation of the bubbling strength, and to suppress the deviation of the metal ion concentration in the plating tank 12 in the vertical direction of the apparatus. Thereby, the variation of the thickness of the plating layer formed on each belt B in the vertical direction of the device is suppressed.

  Here, the discharge port 90 of each pipe 82 may be formed so that the center line is located in a range of 0 to 50 degrees with respect to a perpendicular extending downward from the center of the cross section of the pipe 82. When the outlet 90 is formed in such a range, the following effects are obtained. That is, as compared with the case where the discharge port 90 is formed so that the center line is located within a range of 50 to 90 degrees with respect to a perpendicular extending downward from the center of the cross section of the pipe 82, the plating solution L inside the pipe 82 is increased. Can be discharged.

  When there is no margin in the depth of the plating tank 12, the discharge port 90 is formed so that the center line is located in a range of 20 to 50 degrees with respect to a perpendicular extending downward from the center of the cross section of the pipe 82. Better. When the outlet 90 is formed in such a range, the following effects are obtained in addition to the above. That is, as compared with the case where the outlet is formed so that the center line is located in a range of 0 to 20 degrees with respect to the perpendicular extending downward from the center of the cross section of the pipe, the pressure reflection received from the bottom of the tank is suppressed. Can be. Thus, the plating solution L inside the pipe 82 can be further discharged.

  Further, the discharge port 90 in the plating apparatus 10 of the present embodiment is located on the near side with respect to the belt B fixed to the corresponding rotary unit 20, that is, on the upstream side of the flow F of the plating solution L in plan view of the plating tank 12. It is located in. The discharge port 90 is provided closer to the belt B than the discharge port 70 is. For example, the discharge port 90A is located upstream of the flow F with respect to the belt B fixed to the corresponding rotation unit 20A, and is provided closer to the belt B than the discharge port 70A.

  According to the plating apparatus 10 having the discharge ports 90 as described above, as shown in FIGS. 11A and 11B, the local flow f1 of the plating solution L from the discharge ports 70 to the belt B is in the middle. In, bubbling is performed from the discharge port 90. Therefore, the supply of the air A is not biased in the circumferential direction of the belt B, and the belt B is entirely covered with bubbles of the air A from below the apparatus to above the apparatus. According to the present embodiment, the air supplied to the belt B is smaller than when the discharge port 90 is disposed downstream of the flow F with respect to the corresponding belt B or farther than the discharge port 70 to be combined. The variation of the foam of A can be suppressed. Thereby, the variation of the thickness of the plating layer formed on each belt B in the vertical direction of the device is suppressed.

  The position of the discharge port 90 is a suitable position when it is set on the upstream side by an amount corresponding to a vector obtained by combining the vector of the local flow f1 of the plating solution L and the rising vector of the bubble of the air A, According to the present embodiment, the position of the outlet 90 can be brought closer to the suitable position.

  Further, in the aeration apparatus 80 of the present embodiment, the air A is fed under pressure from an introduction pipe 84 connected to both ends of the pipe 82 in the apparatus width direction. Here, when the end of the pipe to be pressure-fed is sealed, the outlet closest to the sealed end due to the effect of pressure reflection has more air bubbles than the outlet on the center side in the depth direction of the apparatus. Occurrence is reduced.

  On the other hand, according to the plating apparatus 10 of the present embodiment, the end of the pipe 82 is sealed, and the influence of pressure reflection at the end can be suppressed as compared with the case where the air A is pumped from one end. . That is, in each pipe 82, the discharge amount of the air A from each discharge port 90 can be made uniform. This suppresses variation in the thickness of the plating layer between the end of each belt B in the apparatus depth direction and the center. Note that, even when there are three or more pipes 82, the same operation and effect as in the present embodiment can be obtained by connecting each end to the introduction pipe 84.

  Further, in the aeration apparatus 80 of the present embodiment, each of the introduction pipes 84 is provided with a pressure regulating valve 86 for pressure adjustment. Therefore, in the present embodiment, the pressure of the air A can be individually adjusted by the first pressure regulating valve 86P and the second pressure regulating valve 86S.

  According to the plating apparatus 10 of the present embodiment, the variation in the pressure of the air A due to the difference in the shape and the path of the pipe 82 and the introduction pipe 84 is adjusted as compared with the case where a common pressure regulating valve is provided for each of the introduction pipes 84. be able to.

  Further, the aeration apparatus 80 of the present embodiment further includes an additional port 96 provided outside each of the discharge ports 90 at both ends in the apparatus depth direction in each pipe 82 and formed below the cross section of the pipe 82. Similar to the inner outlet 92, the additional port 96 is arranged such that the center line is located in a range of 0 to 50 degrees, preferably 20 to 50 degrees with respect to a perpendicular extending downward from the center of the cross section of the pipe 82. It is good to form. According to the plating apparatus 10 of the present embodiment, the amount of the plating solution L remaining in the pipe 82 can be further reduced as compared with the case where only the outlet 90 is provided in the pipe 82.

  In the bubbling, the bubbles of the air A rising in the plating solution L are attracted to each other and merged to increase. Therefore, when the additional port 96 is not provided, the air A discharged from the discharge ports 90A and 90F rises and flows to the back side because there is no bubble that merges on the front side, and the air A discharged from the discharge ports 90E and 90J. Flows to the front side as it rises because there are no bubbles that merge in the back side. On the other hand, according to the present embodiment, the air A discharged from the discharge ports 90A, 90E, 90F, and 90J due to the provision of the additional ports 96 is attracted to the outside in the apparatus depth direction. Thereby, the dispersion of the bubbles of the air A covering each belt B is suppressed, and the dispersion of the thickness of the plating layer for each belt B is suppressed.

  Note that the opening area of the additional port 96 is preferably set to be equal to or less than half of the sum of the opening area of the inner discharge port 92 and the opening area of the outer discharge port 94. With this setting, it is possible to suppress a decrease in the pressure of the air A at the outlets 90 on both sides in the apparatus depth direction in each pipe 82. That is, in each pipe 82, the discharge amount of the air A at each discharge port 90 can be made more uniform.

(Modification)
In the rotation unit 20 of the present embodiment, the belt B is electrically connected to the first input portion 132 by the leaf spring portion 216 in the upper support portion 25, and the belt B is transmitted to the first input portion 132 by the leaf spring portion 226 in the lower support portion 26. It is electrically connected to the two input unit 134. However, the connection method is not limited to this. As a modification of the present embodiment, as shown in FIG. 12, electrical connection can be performed by using a copper tape Tc which is a copper adhesive tape which is a conductor instead of the adhesive tape T. Specifically, in the upper support portion 25, the belt B is wound on the first input portion 132 by winding a copper tape Tc so as to straddle the boundary between the outer peripheral portion of the main body portion 210 and the belt B held by the holding portion 24. Can be electrically connected to Further, in the lower support portion 26, the belt B is wound on the second input portion 134 by winding a copper tape Tc so as to straddle a boundary portion between the outer peripheral portion of the main body 220 and the belt B held by the holding portion 24. Can be electrically connected.

(Note)
The plating apparatus 10 of the present embodiment is characterized in that the current is controlled for each belt B to thereby suppress the variation in the thickness of the plating layer formed on each belt B. On the other hand, according to the present embodiment, by setting a different current value for each belt B, a plurality of types of belts B having different plating layer thicknesses can be simultaneously formed in one plating apparatus 10.

  In the plating apparatus 10 of the present embodiment, the anode basket 40 serving as one anode is arranged to face one belt B in the width direction of the apparatus. On the other hand, when a plurality of pairs of the belt B and the anode basket 40 are immersed in the plating bath 12 as in the present embodiment, the current densities of the belts B on both sides in the apparatus depth direction and the belt B on the center side in the apparatus depth direction are different. Is considered to be biased. Specifically, the belt B fixed to the rotating unit 20A mainly receives the current from the anode basket 40A and also the current from the anode basket 40B. On the other hand, in the belt B fixed to the rotating unit 20B, current mainly flows from the anode basket 40B, and current also flows from the anode baskets 40A and 40C. In other words, in the belts B on both sides in the apparatus depth direction, the anode basket 40 adjacent to the opposed anode basket 40 is on only one side, so that the current density is smaller than that of the belt B on the center side in the apparatus depth direction.

  As described above, an additional anode basket connected to the anode 102 can be provided outside the anode basket 40 in the device depth direction in order to bias the current density in the device depth direction. In this case, the distance between the additional anode basket and the anode basket 40A may be equal to the distance between the anode basket 40A and the anode basket 40B. The same applies to the case where additional anode baskets are provided outside the anode baskets 40E, 40F and 40J in the device depth direction. In the present embodiment, since the current is controlled by the control unit 120, it is possible to suppress the influence on the plating layer even when the current density is biased, but this is a case where the control unit 120 does not control the current. Also, the above-described bias in the current density can be suppressed.

  In the plating apparatus 10 of the present embodiment, if the bias of the metal ion concentration and the current density in the plating tank 12 can be suppressed, it is not always necessary to control the current for each belt B. The current can be controlled uniformly. In this case, the connection of the belt B to the control unit 120 may be at one end in the vertical direction of the apparatus.

  The plating apparatus 10 of the present embodiment is an apparatus that performs plating on a total of ten belts B of 2 rows × 5 rows, but the arrangement of the belts B that can be applied is not limited to this. The arrangement and number of the belts B are arbitrary as long as the rotating unit 20, the anode basket 40, the discharge port 70, the discharge port 90, the first input section 132 and the second input section 134 corresponding to the belt B can be provided. It is also possible to apply plating to one belt B.

  In the present embodiment, the case where the plating layer is applied to the polyimide belt has been described, but the substrate on which the plating process can be performed is not limited to this. For example, as the base material on which the plating process is performed, parts such as resin-made or metal-made pipes, shafts, and pistons can be given.

10 Plating equipment 12 Plating tank (one example of tank)
13 Overflow tank (an example of a container)
20 Rotating unit (example of rotating unit)
34 brush 35 contact 62 liquid pipe 65 regulating valve 67 pump 70 discharge port 82 pipe 84 introduction pipe 86 pressure regulating valve 90 discharge port 96 additional port 100 power supply device (an example of a power supply)
120 Control unit A Air (an example of gas)
B. Polyimide belt (an example of a substrate)
L Plating solution (an example of electrolyte solution)
M metal

Claims (16)

A plurality of base materials having at least a surface conductive and arranged along one direction, and a plurality of metals arranged to face each of the base materials along the one direction, and an electrolytic solution immersed therein. A tank having
A power supply for applying a voltage between the substrate and the metal,
A pipe extending in the one direction below the base material and through which gas flows;
A plurality of gas outlets formed below the pipe corresponding to the respective substrates,
Plating equipment equipped with.   2. The plating apparatus according to claim 1, wherein the outlet is formed in a range of 0 to 50 degrees with respect to a perpendicular extending downward from a center of the cross section of the pipe. 3.   The plating apparatus according to claim 2, wherein the discharge port is formed in a range of 20 to 50 degrees with respect to a perpendicular extending downward from a cross-sectional center of the pipe. A liquid pipe extending along the pipe and through which the electrolyte flows,
A container provided at one end of the tank in the one direction, for recovering the electrolyte from the tank;
A pump for pumping the electrolyte from the container toward the liquid tube;
A plurality of discharge ports of the electrolytic solution formed in the liquid tube corresponding to each base material, the discharge ports located near the other end in one direction with respect to the corresponding base material,
The plating apparatus according to any one of claims 1 to 3, further comprising: The respective outlets are located near the other end in the one direction with respect to the corresponding base material,
The plating apparatus according to claim 4, wherein the discharge port is provided closer to the base than the discharge port. The liquid tube is provided between the substrate and the metal in a plan view of the tank,
The plating apparatus according to claim 4, wherein the discharge ports corresponding to the one base material are formed on the base material side and the metal side, respectively.   The plating apparatus according to any one of claims 4 to 6, wherein the discharge ports at both ends in the one direction in the liquid pipe have a larger opening area than the discharge ports at the center in the one direction.   The plating apparatus according to any one of claims 4 to 7, wherein a plurality of the liquid tubes are arranged, and an end portion of each liquid tube is connected.   The plating apparatus according to claim 8, wherein an adjusting valve for adjusting the flow rate of the electrolytic solution is provided for each of the plurality of liquid tubes.   The plating apparatus according to claim 1, wherein the gas is pressure-fed from both ends of the pipe in the one direction.   The plating apparatus according to claim 10, wherein each of the introduction pipes connected to both ends of the pipe in the one direction is provided with a pressure regulating valve for adjusting the pressure of the gas. The plating apparatus according to any one of claims 1 to 11, further comprising an additional port provided outside the discharge port at both ends in the one direction in the pipe, and formed below a cross section of the pipe. . An anode provided on the power supply, for flowing an electric current toward the metal;
A control unit connected between the cathode of the power supply and the base material to control the current returning from the base material to the power supply to a predetermined value,
The plating apparatus according to claim 1, further comprising: The plating apparatus according to claim 13, wherein the control unit controls the current for each of the base materials.   The plating apparatus according to claim 1, further comprising a rotating unit configured to rotate the substrate.   The plating apparatus according to claim 15, wherein the rotating unit includes a brush having a plurality of contacts.